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ma=86400 A high-resolution microchip optomechanical accelerometer | Nature Photonics
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A high-resolution microchip optomechanical accelerometer

Nature Photonics volume 6, pages 768–772 (2012)Cite this article

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Abstract

The monitoring of acceleration is essential for a variety of applications ranging from inertial navigation to consumer electronics1,2. Typical accelerometer operation involves the sensitive displacement measurement of a flexibly mounted test mass, which can be realized using capacitive3,4, piezo-electric5, tunnel-current6,7 or optical8,9,10,11 methods. Although optical detection provides superior displacement resolution8, resilience to electromagnetic interference and long-range readout7, current optical accelerometers either do not allow for chip-scale integration or utilize relatively bulky test mass sensors of low bandwidth8,9,10. Here, we demonstrate an optomechanical accelerometer that makes use of ultrasensitive displacement readout using a photonic-crystal nanocavity12 monolithically integrated with a nanotethered test mass of high mechanical Q-factor13. This device achieves an acceleration resolution of 10 µg Hz−1/2 with submilliwatt optical power, bandwidth greater than 20 kHz and a dynamic range of greater than 40 dB. Moreover, the nanogram test masses used here allow for strong optomechanical backaction14,15,16,17, setting the stage for a new class of motional sensors.

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Figure 1: Overview of accelerometer design.
Figure 2: Experimental system and noise data.
Figure 3: Frequency-dependence of sensitivity and resolution.
Figure 4: Independent tuning of bandwidth and resolution.

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Acknowledgements

This work was supported by the Defense Advanced Research Projects Administration QuASaR program through a grant from the Army Research Office. T.D.B. acknowledges support from the National Science Foundation Graduate Research Fellowship Program (grant no. 0703267).

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Author notes

  1. Alexander G. Krause, Martin Winger and Tim D. Blasius: These authors contributed equally to this work

Authors and Affiliations

  1. Kavli Nanoscience Institute and Thomas J. Watson, Sr, Laboratory of Applied Physics, California Institute of Technology, Pasadena, 91125, California, USA

    Alexander G. Krause, Martin Winger, Tim D. Blasius & Oskar Painter

  2. School of Engineering and Applied Sciences, University of Rochester, Rochester, 14627, New York, USA

    Qiang Lin

Authors
  1. Alexander G. Krause
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  2. Martin Winger
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  3. Tim D. Blasius
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  5. Oskar Painter
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Contributions

A.G.K., M.W. and T.D.B. performed sample design, fabrication, optical measurements and data analysis. O.P. and Q.L. developed the device concept and supervised measurements and analysis. All authors worked together on writing the manuscript.

Corresponding author

Correspondence to Oskar Painter.

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The authors declare no competing financial interests.

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Krause, A., Winger, M., Blasius, T. et al. A high-resolution microchip optomechanical accelerometer. Nature Photon 6, 768–772 (2012). https://doi.org/10.1038/nphoton.2012.245

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