Editorial for the Topic: MEMS in Italy
Department of Civil and Environmental Engineering, Politecnico di Milano, 20133 Milano, Italy
Micromachines 2024, 15(12), 1528; https://doi.org/10.3390/mi15121528
Submission received: 18 December 2024
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Accepted: 19 December 2024
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Published: 23 December 2024
Microsystems or microelectromechanical systems (MEMSs) over the last thirty years have seen impressive development in terms of potentialities and diffusion [1]; they are now widespread as microsensors and/or micro-actuators and can be found in many objects of common use.
After an initial period in which MEMS development was mainly driven by the design and production of inertial sensors, i.e., accelerometers and gyroscopes, the MEMS world has more recently been enriched by many other devices, like piezo-actuated MEMSs. These innovations have been enabled by the introduction of new materials in micro-fabrication technologies and by the dramatic improvement of clean-room technologies.
Italy has become an important player in the MEMS industry in terms of its contributions to research and development, design, production and innovative applications.
The 22 articles collected in here cover a wide variety of scientific problems and solutions offered by the MEMS world, which is witnessing an impressive diversity of applications.
We can group the contributions of the topic into the following three main areas—materials and fabrication processes, innovative devices and innovative applications.
In the first area, new materials have been proposed [contribution 1], fabrication steps have been analyzed in depth [contribution 2], reliability issues have been discussed [contribution 3], the diffusion of additive manufacturing technologies for the creation of MEMSs has been critically described [contributions 4,5] and an overview of organic bioelectronics developments has been proposed [contribution 6].
Innovative devices have been proposed and analyzed, including piezo-micro-ultrasonic transducers [contribution 7], acoustic wave triggers [contribution 8], microcapsules [contribution 9], microgrippers [contribution 10], microphones [contribution 11], micromirrors [contribution 12] and gas sensors [contribution 13], confirming the great variety of devices that are now being proposed and that most probably will be transformed into future commercial products.
The applications mentioned in this topic concern gas storage [contribution 14], wearable devices [contribution 15] and drug delivery systems [contributions 16,17] for the biomedical field, space industry, the monitoring of soil in agriculture [contribution 18], nanoparticle size assessments [contribution 19], structural health monitoring [contribution 20] and communication systems [contributions 21,22].
The articles mentioned in this Editorial collectively represent a meaningful portion of research activities on MEMSs in Italy. They demonstrate significant advancements in technology for MEMS production and highlight the wide range of applications of these technologies in many fields, which span from the consumer market to agriculture and biomedical applications. The insights and innovations presented in this collection may offer new solutions to both long-standing and emerging challenges related to the underlying science of MEMSs, as well as their engineering and fabrication.
Conflicts of Interest
The author declares no conflict of interest.
List of Contributions
- Zecchi, S.; Ruscillo, F.; Cristoforo, G.; Bartoli, M.; Loebsack, G.; Kang, K.; Piatti, E.; Torsello, D.; Ghigo, G.; Gerbaldo, R.; et al. Effect of Red Mud Addition on Electrical and Magnetic Properties of Hemp-Derived-Biochar-Containing Epoxy Composites. Micromachines 2023, 14, 429. https://doi.org/10.3390/mi14020429.
- Yazdi, S.A.F.F.; Garavaglia, M.; Ghisi, A.; Corigliano, A. An Experimental and Numerical Study on Glass Frit Wafer-to-Wafer Bonding. Micromachines 2023, 14, 165. https://doi.org/10.3390/mi14010165.
- Valle, T.V.F.D.; Mariani, S.; Ghisi, A.; De Masi, B.; Rizzini, F.; Gattere, G.; Valzasina, C. MEMS Reliability: On-Chip Testing for the Characterization of the Out-of-Plane Polysilicon Strength. Micromachines 2023, 14, 443. https://doi.org/10.3390/mi14020443.
- Aronne, M.; Bertana, V.; Schimmenti, F.; Roppolo, I.; Chiappone, A.; Cocuzza, M.; Marasso, S.L.; Scaltrito, L.; Ferrero, S. 3D-Printed MEMS in Italy. Micromachines 2024, 15, 678. https://doi.org/10.3390/mi15060678.
- Bernasconi, R.; Invernizzi, G.P.; Stampino, E.G.; Gotti, R.; Gatti, D.; Magagnin, L. Printing MEMS: Application of Inkjet Techniques to the Manufacturing of Inertial Accelerometers. Micromachines 2023, 14, 2082. https://doi.org/10.3390/mi14112082.
- Parmeggiani, M.; Ballesio, A.; Battistoni, S.; Carcione, R.; Cocuzza, M.; D’angelo, P.; Erokhin, V.V.; Marasso, S.L.; Rinaldi, G.; Tarabella, G.; et al. Organic Bioelectronics Development in Italy: A Review. Micromachines 2023, 14, 460. https://doi.org/10.3390/mi14020460.
- Abdalla, O.M.O.; Massimino, G.; Quaglia, F.; Passoni, M.; Corigliano, A. PMUTs Arrays for Structural Health Monitoring of Bolted-Joints. Micromachines 2023, 14, 311. https://doi.org/10.3390/mi14020311.
- Grasso, S.; Di Marcello, F.; Sabatini, A.; Zompanti, A.; Di Loreto, M.V.; Cenerini, C.; Lodato, F.; De Gara, L.; Cherubini, C.; Pennazza, G.; et al. Micromachined Tools Using Acoustic Wave Triggering for the Interaction with the Growth of Plant Biological Systems. Micromachines 2022, 13, 1525. https://doi.org/10.3390/mi13091525.
- Pour, M.M.; Riseh, R.S.; Ranjbar-Karimi, R.; Hassanisaadi, M.; Rahdar, A.; Baino, F. Microencapsulation of Bacillus velezensis Using Alginate-Gum Polymers Enriched with TiO2 and SiO2 Nanoparticles. Micromachines 2022, 13, 1423. https://doi.org/10.3390/mi13091423.
- Yallew, T.S.; Belfiore, N.P.; Bagolini, A.; Pantano, M.F. Performance Analysis of a CSFH-Based Microgripper: Analytical Modeling and Simulation. Micromachines 2022, 13, 1391. https://doi.org/10.3390/mi13091391.
- Zauli, M.; Peppi, L.M.; Di Bonaventura, L.; Arcobelli, V.A.; Spadotto, A.; Diemberger, I.; Coppola, V.; Mellone, S.; De Marchi, L. Exploring Microphone Technologies for Digital Auscultation Devices. Micromachines 2023, 14, 2092. https://doi.org/10.3390/mi14112092.
- Bagolini, A.; Sitar, A.; Porcelli, L.; Boscardin, M.; Dell’agnello, S.; Monache, G.D. High Frequency MEMS Capacitive Mirror for Space Applications. Micromachines 2023, 14, 158. https://doi.org/10.3390/mi14010158.
- Feng, Z.; Giubertoni, D.; Cian, A.; Valt, M.; Barozzi, M.; Gaiardo, A.; Guidi, V. Nano Hotplate Fabrication for Metal Oxide-Based Gas Sensors by Combining Electron Beam and Focused Ion Beam Lithography. Micromachines 2023, 14, 2060. https://doi.org/10.3390/mi14112060.
- Massimiani, A.; Panini, F.; Marasso, S.L.; Vasile, N.; Quaglio, M.; Coti, C.; Barbieri, D.; Verga, F.; Pirri, C.F.; Viberti, D. Design, Fabrication, and Experimental Validation of Microfluidic Devices for the Investigation of Pore-Scale Phenomena in Underground Gas Storage Systems. Micromachines 2023, 14, 308. https://doi.org/10.3390/mi14020308.
- Brasiliano, P.; Mascia, G.; Di Feo, P.; Di Stanislao, E.; Alvini, M.; Vannozzi, G.; Camomilla, V. Impact of Gait Events Identification through Wearable Inertial Sensors on Clinical Gait Analysis of Children with Idiopathic Toe Walking. Micromachines 2023, 14, 277. https://doi.org/10.3390/mi14020277.
- Rahmani, E.; Pourmadadi, M.; Zandi, N.; Rahdar, A.; Baino, F. pH-Responsive PVA-Based Nanofibers Containing GO Modified with Ag Nanoparticles: Physico-Chemical Characterization, Wound Dressing, and Drug Delivery. Micromachines 2022, 13, 1847. https://doi.org/10.3390/mi13111847.
- Bergonzi, C.; Bianchera, A.; Remaggi, G.; Ossiprandi, M.C.; Bettini, R.; Elviri, L. 3D Printed Chitosan/Alginate Hydrogels for the Controlled Release of Silver Sulfadiazine in Wound Healing Applications: Design, Characterization and Antimicrobial Activity. Micromachines 2023, 14, 137. https://doi.org/10.3390/mi14010137.
- Sabatini, A.; Leoni, A.; Goncalves, G.; Zompanti, A.; Marchetta, M.V.; Cardoso, P.; Grasso, S.; Di Loreto, M.V.; Lodato, F.; Cenerini, C.; et al. Microsystem Nodes for Soil Monitoring via an Energy Mapping Network: A Proof-of-Concept Preliminary Study. Micromachines 2022, 13, 1440. https://doi.org/10.3390/mi13091440.
- Pò, C.L.; Iacono, V.; Boscarino, S.; Grimaldi, M.G.; Ruffino, F. Monte Carlo Approach to the Evaluation of Nanoparticles Size Distribution from the Analysis of UV-Vis-NIR Spectra. Micromachines 2023, 14, 2208. https://doi.org/10.3390/mi14122208.
- Dibiase, M.; De Marchi, L. An Optimal Shaped Sensor Array Derivation. Micromachines 2023, 14, 1154. https://doi.org/10.3390/mi14061154.
- Margheri, G.; Del Rosso, T. Tunable Device for Long Focusing in the Sub-THz Frequency Range Based on Fresnel Mirrors. Micromachines 2024, 15, 715. https://doi.org/10.3390/mi15060715.
- Zecchi, S.; Cristoforo, G.; Bartoli, M.; Tagliaferro, A.; Torsello, D.; Rosso, C.; Boccaccio, M.; Acerra, F. A Comprehensive Review of Electromagnetic Interference Shielding Composite Materials. Micromachines 2024, 15, 187. https://doi.org/10.3390/mi15020187.
Reference
- Corigliano, A.; Ardito, R.; Comi, C.; Frangi, A.; Ghisi, A.; Mariani, S. Mechanics of Microsystems; Wiley: Hoboken, NJ, USA, 2018; ISBN 978-1-119-05383-5. [Google Scholar]
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Corigliano, A. Editorial for the Topic: MEMS in Italy. Micromachines 2024, 15, 1528. https://doi.org/10.3390/mi15121528
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Corigliano A. Editorial for the Topic: MEMS in Italy. Micromachines. 2024; 15(12):1528. https://doi.org/10.3390/mi15121528
Chicago/Turabian StyleCorigliano, Alberto. 2024. "Editorial for the Topic: MEMS in Italy" Micromachines 15, no. 12: 1528. https://doi.org/10.3390/mi15121528
APA StyleCorigliano, A. (2024). Editorial for the Topic: MEMS in Italy. Micromachines, 15(12), 1528. https://doi.org/10.3390/mi15121528
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