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FEATURES

3.3V Single and Dual Axis Automotive iMEMS Accelerometers

AD22300, AD22301, AD22302

Complete Acceleration Measurement System on a Single Monolithic IC 35g, 70g and 70g/35g Ranges Available Smallest Available Package Footprint For Automotive Safety Applications 8 pin Leadless Chip Carrier Full Differential Sensor & Circuitry for High Resistance to EMI/RFI Environmentally robust packaging Complete Mechanical and Electrical Self-test on Digital Command Output Ratiometric to Supply Sensitive Axes in the Plane of the Chip High Linearity (0.2% of Full-scale) Frequency Response Down To DC Supply Voltage (3.3V) Low-Power Consumption (1.3 mA single and dual axis) Tight Sensitivity Tolerance and Zero g Offset capability Higher Output Drive Current Largest available pre-filter clipping headroom 400 Hz, 2 pole Bessel Filter

GENERAL DESCRIPTION The AD22300, AD22301, and AD22302 are derivative products of the fourth generation ADXL78 family surface micromachined iMEMS accelerometers from Analog Devices with enhanced performance and lower cost. Designed for use in airbag applications, these products also provide complete cost-effective solutions useful for a wide variety of other applications. The AD22300 and AD22301 are single-axis accelerometers with g-ranges of 37g or 70g. The AD22302 is a monolithic two-axis (XY) version with the sensor axes orthogonal (90) to each other and in the plane of the chip. The AD22302 X-axis has a g-range of 70g and its Y-axis has a g-range of 37g. It can be used for sensing crashes in the front or side of the vehicle and to determine the angle of impact. The AD22300, AD22301, and AD22302 are temperature stable and accurate over the automotive temperature range, with a self-test feature that fully exercises all the mechanical and electrical elements of the sensor with a digital signal applied to a single pin.

Vs Vdd Vdd2 Timing

AD22300/1
Vs Vdd Vdd2 Vdd3
Differential Sensor Demod Amp 400Hz Bessel Filter XOUT

AD22302
Exc Differential Sensor Demod Amp 400Hz Bessel Filter X OUT

Generator

Timing Generator

Exc

Exc

Differential Sensor

Demod Amp

400Hz Bessel Filter

Y OUT

Self Test

Self Test

http://www.analog.com/iMEMS

All minimum and maximum specifications are guaranteed; typical values are not guaranteed nor tested. Product characteristics and specifications are subject to change without notice. Analog Devices assumes no obligation regarding future manufacturing unless otherwise agreed to in writing. Patents pending. Rev. 03

AD22300, AD22301 - AUTOMOTIVE GRADE SPECIFICATIONS

( @ TA = -40C to +105C, 3.3V DC 5%, Acceleration = 0g; unless otherwise noted)

AD22300 Conditions Sensor Output Full Scale Range Nonlinearity Package alignment error Cross-axis sensitivity Resonant frequency Sensitivity, Ratiometric Vdd=3.3V, 100Hz, 25C Vdd=3.3V5%, 100Hz, temp Offset Zero-g output voltage Noise Noise density Clock Noise Frequency Response -3dB frequency -3dB frequency drift Self Test Output change (cubic vs. Vdd) Logic input high Logic input low Turn on time Input resistance Output Amplifier Output voltage swing Capacitive load drive Pre-filter Headroom CFSR Power Supply (Vdd) Functional Voltage Range Supply current Temperature Range 3.135 3.135 0.4 -40 0.8 IOUT 100A IOUT 250A 0.1 0.25 1000 210 5 3.3 3.465 6 2 105 3.135 3.135 0.4 -40 0.8 Vdd-0.1 Vdd-0.25 0.1 0.25 1000 420 3 3.3 3.465 6 2 105 Vdd-0.1 V Vdd-0.25 V pF g V/V V V mA deg C to 90% of final value pull-down resistor to ground 30 1 50 30 Vdd=3.3V 108 Vdd-0.8 0.8 1 50 158 212 60 Vdd-0.8 0.8 90 120 mV V V ms k 25 deg C to TMIN or TMAX 2 pole Bessel 360 400 6 440 360 400 6 440 Hz Hz 10Hz-400Hz, 3.3V 1.67 3.3 4.6 2.7 3.3 5.3 mg/rt Hz mV p-p Vdd=3.3V, 25C error over temp 1.51 -42.42 1.65 1.79 42.42 1.56 -27.27 1.65 1.74 27.27 V mV/V 33.94 -6.5 10.28 -6.5 11 -5 24 36.3 38.66 6.5 11.72 6.5 16.66 -6.5 5.05 -6.5 5.4 IOUT 100A IOUT 250A 37 35 0.2 1 5 -5 24 17.82 18.98 6.5 5.75 6.5 2 70 67 0.2 1 5 2 g g % degree % kHz mV/g % mV/V/gee % min typ max min AD22301 typ max units

All minimum and maximum specifications are guaranteed; typical values are not guaranteed nor tested. Product characteristics and specifications are subject to change without notice. Analog Devices assumes no obligation regarding future manufacturing unless otherwise agreed to in writing. Patents pending. Rev. 03

AD22302 - AUTOMOTIVE GRADE SPECIFICATIONS

Conditions Sensor Output Full Scale Range IOUT 100A IOUT 250A Nonlinearity Package alignment error Sensor to sensor alignment error Cross-axis sensitivity Resonant frequency Sensitivity, Ratiometric

( @ TA = -40C to +105C, 3.3V DC 5%, Acceleration = 0g; unless otherwise noted)

AD22302 min typ x axis: y axis: x axis: y axis: 70 37 67 35 0.2 1 0.1 -5 Vdd=3.3V, 100Hz, 25C x: y: Vdd=3.3V 5%, 100Hz, temp x: y: Offset Zero-g output voltage 16.66 -6.5 33.94 -6.5 5.05 -6.5 10.28 -6.5 1.56 -27.27 1.51 -42.42 24 17.82 36.3 5.4 11 2 max units g g g g % degree degree % kHz mV/g % mV/g % mV/V/gee % mV/g % V mV/V V mV/V mg/rt Hz mg/rt Hz mV p-p Hz Hz mV mV V V ms k

5 18.98 6.5 38.66 6.5 5.75 6.5 11.72 6.5 1.74 27.27 1.79 42.42 5.3 4.6

Vdd=3.3V, 25C error over temp Vdd=3.3V, 25C error over temp 10Hz-400Hz, 3.3V

x: y:

1.65 1.65

Noise Noise density Clock Noise Frequency Response -3dB frequency -3dB frequency drift Self Test Output change (cubic vs. Vdd) Logic input high Logic input low Turn on time Input resistance Output Amplifier Output voltage swing Capacitive load drive Pre-filter Headroom CFSR Power Supply (Vdd) Functional Voltage Range Supply current Temperature Range

x: y: x / y: 360

2.7 1.67 3.3 400 6 90 158

2 pole Bessel 440 25 deg C to TMIN or TMAX Vdd=3.3V x: y: 60 108 Vdd-0.8

120 212 0.8

to 90% of final value pull-down resistor to ground IOUT 100A IOUT 250A x/y: x/y: x: y: x: y:

30 0.1 0.25 1000

1 50

3.135 3.135 0.6 -40

420 210 3 6 3.3 1.0

Vdd-0.1 V Vdd-0.25 V pF g V/V 3.465 6 2 105 V V mA deg C

All minimum and maximum specifications are guaranteed; typical values are not guaranteed nor tested. Product characteristics and specifications are subject to change without notice. Analog Devices assumes no obligation regarding future manufacturing unless otherwise agreed to in writing. Patents pending. Rev. 03

ABSOLUTE MAXIMUM RATINGS*

Acceleration (Any Axis, Unpowered and Powered) Supply Voltage Vs Output Short Circuit Duration (Vout, to Ground) Storage Temperature Soldering Temperature Range (Soldering 10 sec) Drop Test Operating Temp Range 4000 g -0.3 to 7.0V Indefinite -65C to 150C 245C 1.2 m -55C to 125C

* Stresses above those listed under Absolute Maximum Ratings may cause permanent damage to the device. This is a stress rating only; the functional operation of the device at these or any other conditions beyond those indicated in the operational sections of this specification is not implied. Absolute maximum ratings apply individually only, not in combination.

ORDERING GUIDE
Standard Devices
AD22300 AD22301 AD22302

G Range
35g 70g 70g X, 35g Y

Branding
AD22300 AD22301 AD22302

PIN FUNCTION DESCRIPTIONS

8-Pin LCC
Pin 1 2 3 4 5 6 7 8 AD22300/01 NC NC COM Self-Test NC Xout Vdd Vdd2 Description No internal connection No internal connection Common (connected to package lid) Self Test Input No internal connection Voltage Output X Power Supply Power Supply Pin 1 2 3 4 5 6 7 8 AD22302 Vdd3 Yout COM Self-Test NC Xout Vdd Vdd2 Description Power Supply Voltage Output Y Common(connected to package lid) Self Test Input No internal connection Voltage Output X Power Supply Power Supply

(Dimensions are nominal only. For tolerances, see the Package Outline Drawing for this part.)

All minimum and maximum specifications are guaranteed; typical values are not guaranteed nor tested. Product characteristics and specifications are subject to change without notice. Analog Devices assumes no obligation regarding future manufacturing unless otherwise agreed to in writing. Patents pending. Rev. 03

Theory of Operation The ADXL78 family provides a fully differential sensor structure and circuit path, resulting in the industrys highest resistance to EMI/RFI effects. This latest generation uses electrical feedback with zero force feedback for improved accuracy and stability. The sensor resonant frequency is significantly higher than the signal bandwidth set by the on-chip filter, avoiding the signal analysis problems caused by resonant peaks near the signal bandwidth. Figure 1 is a simplified view of one of the differential sensor elements. Each sensor includes several differential capacitor unit cells. Each cell is composed of fixed plates attached to the substrate, and movable plates attached to the frame. Displacement of the frame changes the differential capacitance, which is measured by the on-chip circuitry.

ANCHOR PLATE CAPACITORS FIXED PLATES UNIT SENSING CELL MOVING PLATE UNIT FORCING CELL MOVABLE FRAME

ACCELERATION

ANCHOR

Figure 1. Simplified View of Sensor Under Acceleration

Complementary 400kHz square waves drive the fixed plates (200 kHz for the ADXL278). Electrical feedback adjusts the amplitudes of the square waves such that the AC signal on the moving plates is zero. The feedback signal is linearly proportional to the applied acceleration. This unique feedback technique ensures that there is no net electrostatic force applied to the sensor. The differential feedback control signal is also applied to the input of the filter, where it is filtered and converted to a single-ended signal. Self-Test The fixed fingers in the forcing cells are normally kept at the same potential as that of the movable frame. When the self-test digital input is activated, the voltage on the fixed fingers on one side of the moving plate in the forcing cells is changed. This creates an attractive electrostatic force, which causes the frame to move towards those fixed fingers. The entire signal channel is active, so the sensor displacement causes a change in Vout. The ADXL78 self-test function is a comprehensive method of verifying the operation of the accelerometer. Because electrostatic force is independent of the polarity of the voltage across capacitor plates, a positive voltage is applied in half of the forcing cells, and its complement in the other half of the forcing cells. Activating self-test causes a step function force to be applied to the sensor, while the capacitive coupling term is canceled. The ADXL78 has improved selftest functionality including excellent transient response and high-speed switching capability. Arbitrary force waveforms can be applied to the sensor by modulating the self-test input, such as test signals to measure the system frequency response, or even crash signals to verify algorithms within the limits of the selftest swing.

All minimum and maximum specifications are guaranteed; typical values are not guaranteed nor tested. Product characteristics and specifications are subject to change without notice. Analog Devices assumes no obligation regarding future manufacturing unless otherwise agreed to in writing. Patents pending. Rev. 03