Read Assgn 9 Photolithography Overview Participant Guide

Photolithography Overview
Photolithography Overview
for MEMS
for MEMS
Photolithography Overview PK
Photolithography Overview PK

Activity
Activity
Terminology
Terminology

Participant Guide
Participant Guide

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Southwest Center for Microsystems Education (SCME)
Fab_PrLith_PK00_PG_012810 Page 1 of 16

Photolithography Overview for Microsystems

Primary Knowledge
Participant Guide

Description and Estimated Time
Microsystems fabrication uses several layers to build
devices. These layers typically consist of thin films of
metal, bulk silicon or polysilicon. The graphic illustrates the
layers of a MEMS linkage assembly. Each layer is a
different component of that device. Each layer requires a
different pattern.

Photolithography is the process step used to define and
transfer a pattern to its respective layer. The
photolithography process occurs several times during the
fabrication of a microsystems device as layers build upon layers. The linkage assembly would
require "at least" six layers. Can you see at least six layers? (Hint: In MEMS fabrication, some
layers are removed completely leaving behind a void so that components can "float".) [Linkage
graphic courtesy of Khalil Najafi, University of Michigan]

This unit provides an overview of the Photolithography process. It provides you with the basic
information on the steps of the photolithography process. Additional units provide more detail on
each step of the process. See Related SCME Learning Modules. NOTE: The definition of many of
the underlined terms can be found in the glossary at this end of this unit.

Estimated Time: Allow at least 30 minutes to review material


Introduction

Photolithography Process

Photolithography is the process that defines and transfers a pattern onto a layer of the wafer. In the
photolithography process a light source is typically used to transfer an image from a patterned mask
to a photosensitive layer (photoresist or resist) on a substrate or thin film. This same pattern is later
transferred into the substrate or thin film (layer to be etched) using a different process (etch
process).

For some layers, the resist pattern is used as a mask for a deposition process. In such cases, the
patterned resist would identify the areas that receive the deposited material and the areas that do not.


Overview of Photolithography Steps

Photolithography Steps: Coat, Expose, Develop

In the construction of microsystems, photolithography is used at any point in the process where a
pattern needs to be defined on a layer. This occurs several times during the fabrication of a
microsystems device as layers build upon layers. Remember the linkage assembly device?

This unit provides an overview of the three primary steps of the photolithography process:
Coat
Expose
Develop

Additional units cover each of the photolithography steps in more detail as well as the chemistry
involved.

Objectives

Develop an outline of the photolithography process
Briefly describe each step of the photolithography process


Pattern Transfer

Pattern Transfer to Underlying Layer

Each layer within a microsystem has a unique pattern. The initial process used to transfer this
pattern into a layer is photolithography. The photolithography process transfers the pattern of a
mask or reticle (depending on the method of exposure) to a photosensitive layer (resist). In the
construction of microsystem devices a subsequent process step, usually etch or liftoff, transfers the
pattern from the photosensitive layer into an underlying layer.

After the pattern transfer, the resist is stripped (removed).

Steps of Photolithography

Steps of Photolithography - Coat, Expose, Develop

There are three basic steps to photolithography:
Coat - A photosensitive material (photoresist or resist) is applied to the substrate surface.

Expose - The photoresist is exposed using a light source, such as Near UV (Ultraviolet), Deep
UV or X-ray.

Develop - The exposed photoresist or substrate is subsequently dissolved with a chemical
developer. The type of photoresist (positive or negative) determines which material is dissolved.


Photolithography vs. Photography

The photolithography process is analogous to a twentieth century
photographic process which uses exposed film as the patterned mask
(referred to as a "negative" in photography). The exposed film is
removed from a camera and developed to create the patterned mask or
negative. In a dark room, the negative (patterned mask) is placed
between a light source and a prepared sheet of photosensitive paper.
The paper has been coated with a light-sensitive photographic
emulsion.
The paper is exposed when the light travels through the negative.
The exposed paper is placed in a liquid developer which
chemically reacts with the emulsion, transferring the negatives
image to the photographic paper.

Coat Process: Step 1 - Surface Conditioning

The first step of the Coat Process is Surface Conditioning. Surface conditioning prepares the wafer
to accept the photoresist by providing a clean surface, coated with an intermediate chemical (such as
HMDS or Hexamethyldisalizane) that will boost adhesion of the photoresist to the wafers surface.
HMDS is the most commonly used intermediate chemical.

There are several reasons for conditioning the wafers surface:

The presence of other molecules or particles can create problems for resist adhesion and
subsequent resist thickness uniformity; therefore, the wafer must be thoroughly cleaned and
dried.
Intermediates such as HMDS prepare the surface for adhesion of photoresist.
Photoresist is an organic material that must interface with the substrate material which, in most
cases, is inorganic. As an intermediate, HMDS allows this interface to occur.
Different surface materials can have different surface tensions or affinity for organic materials
such as photoresist. Again, as an intermediate between the underlying surface and the
photoresist, HMDS acts as a buffer and promotes the adhesion of photoresist to a variety surface
materials.
Photoresist adheres best to a hydrophobic surface. A hydrophobic surface is defined as a surface
which does not like (phobic) water (hydro). A layer of HMDS provides a hydrophobic surface.

Photographer/Painter: Jean-Pol
Grandmont, shot and develop
(b&W) and scanner
[Courtesy of Jean-PolGrandmont]


Steps of Surface Conditioning

Bake, Prime and Cool

There are three basic steps to conditioning the wafers surface: bake, prime and cool.

Bake
Prior to applying the HMDS, water molecules present on the wafer surface must be removed. One
way is to heat the wafer to 100 C, the boiling point of water. The wafer is heated or baked in a
small vacuum chamber or on a hot plate to remove water molecules on the wafer surface.

Prime
HMDS is applied (prime) to create a hydrophobic surface. The hydrophobic surface prevents
water molecules from re-accumulating on the surface once the wafer is returned to the
environment.

Cool
The wafer is cooled to room temperature (sometimes using a chill plate). This brings the wafer
to the same temperature as the resist for the subsequent resist dispense step.

After the surface is conditioned, the wafer is coated with photoresist.


The Photoresist (Resist)

Photoresist - Positive vs. Negative resist

Photoresist is a mixture of organic compounds held together in a solvent solution.

There are two basic types of photoresist: negative or positive. Their primary difference is how they
respond to the light source (as shown in the graphic).

Negative resist and UV: The regions of resist exposed to ultraviolet light (UV) harden. When
developed, the hardened resist remains on the wafer and the non-exposed resist dissolves. The
result is a negative resist pattern on the wafer.

Positive resist and UV: The regions of resist exposed to the UV become more soluble. When
developed, the exposed resist dissolves and the unexposed resist remains. The result is a positive
resist pattern on the wafer.


Coat Process

Spin Coating

The coat process is the application of photoresist to the wafers surface. There are several methods
used to coat the wafer (spin, spray and electrodeposition or ED). Regardless of the method, the goal
of the coat process is to distribute a uniform thickness of resist across the wafer's surface. The
resist must be thick enough and durable enough to withstand the next process steps. It must also be
uniform in order to prevent problems during the expose process.

Spin coating is one of the most common methods for coating a wafer. (See figure Spin coating)

The wafer is placed on a vacuum chuck.
A vacuum holds the wafer on the chuck.
Photoresist is applied.
The chuck is accelerated to a pre-programmed rpm to achieve the desired thickness and
uniformity.
The chuck continues to spin until most of the solvents in the resist have evaporated and the film
is dry.

A Quick Research Question

What is the relationship between resist film thickness and rpm during the spin coat process?

Research the answer to this question.
Write a short summary of your findings.
Include a graph which illustrates the relationship.
Include all sources.


Softbake

After the photoresist is applied to the desired thickness, a
softbake is used to remove the residual solvents of the
photoresist.

After the softbake, the wafer is cooled to room temperature.

Softbake after Applying Resist

Align

Microscopic Hinge [Courtesy of Sandia National Laboratories]

The expose process consists of Align and Expose steps.

Alignment is one of the most critical steps in the entire microsystems fabrication process. Due to
the microscopic size of these devices, a misalignment of one micron or even smaller can destroy the
entire device and all the other devices on the wafer. It is important that each layer is aligned
properly and within specifications to the previous layers and subsequent layers.

Take a look at the microscopic hinge. Notice the 1m scale in the bottom right. Using this scale we
might estimate the width of the space between the hinged component and its enclosure to be
approximately 0.5 m or 500 nm.

What would be the result if the mask for the loop component was misaligned by 0.5 m?


Align Procedure

The patterned mask (or reticle) is a quartz or glass plate
with the desired pattern (usually in chrome). The picture
shows a mask used to expose an entire wafer. Notice that
there is a repeating pattern throughout the mask. Each of
these patterns is a reticle or the pattern for one device.
(Reticle shown in the bottom right of picture.)

Some equipment do not use masks. Instead a smaller quartz
plate is used with just a few reticles (inset). Regardless of
which is used, a mask or a reticle, the plate is locked into
the expose equipment. The wafer is aligned to the mask or
reticle along the x and y coordinates. The z-coordinate is adjusted to define the focal plane of the
image.

When a mask is used, a single pulse of light will expose the entire wafer. When a reticle is used, it
is "stepped" around the wafer. A small portion of the wafer is exposed with each step. This type of
expose equipment is called a "stepper".

Expose

Expose Photoresist

During expose, the photoresist layer is exposed when UV from the light source travels through the
mask to the resist. UV light sources include mercury vapor lamps and excimer lasers. The UV light
hitting the resist causes a chemical reaction between the resist and the light. Only those areas not
protected by the mask undergo a chemical reaction.

Let's see if you remember what happens when the light hits the resist. Do you remember positive
vs. negative photoresist?

What happens to exposed negative resist?
What happens to exposed positive resist?


The Develop Process

In the develop process, portions of the photoresist are
dissolved by a chemical developer. With positive resist
(the more commonly used resist), the exposed resist is
dissolved while the unexposed resist remains on the wafer.
With negative resist, the unexposed resist is dissolved while
the exposed resist remains.

The develop process leaves a visible pattern (seen by the
naked eye) within the resist.

Develop Processes

Immersion and Spray-on

Develop is usually a wet process. The wafers are physically placed in the develop solution
(immersion) or the developer is sprayed onto the wafer.

The timing of this process is critical. Too long of a time leads to an "overdeveloped resist". Too
little of a time leads to an "underdeveloped resist". Both negatively affect line width. An
underdeveloped resist could prevent access to the underlying layer by leaving too much resist on the
wafer.

To stop the chemical reaction of the developer with the photoresist, the wafers are rinsed with DI
water then spin-dried.


Hardbake

Hardbake Temperatures

A post-develop hardbake is used to harden the photoresist for the subsequent process. In order to do
this, the temperature of the hardbake is higher than that of the softbake after coat. The hard bake
temperature for positive resist is approximately 120C to 140C.

However, too high of a temperature could cause the photoresist to reflow, destroying the pattern.

After the hardbake, the wafer is cooled to room temperature.

Inspect What to Look for

Wafers are inspected immediately after the photolithography process and before subsequent
processes such as etch. The inspection specifications vary depending on the product requirements.

Three critical parameters of the photolithography process are alignment, line widths and defects.
Alignment the pattern must be positioned accurately to the previously layer.
Line width or critical dimension (CD) the pattern images are in focus and have the correct size.
Defects things that could affect subsequent processes and eventually the operation of the devices
(i.e. particles, scratches, peeling (lifting) of the resist, holes in the resist, scumming (an
underdeveloped or underexposed pattern))

The inspection step ensures that the pattern is properly aligned to the previous layers and that the
critical dimensions are correct. Because of the 3-dimensional characteristic of MEMS devices,
inspection is more challenging than with integrated circuits.


Inspect How is it done?

Inspecting a wafer
(Photo courtesy of the MTTC, University of New Mexico)

High powered microscopic equipment is used to inspect wafers at the end of the photolithography
process. The smaller the CD's the more technologically advanced the equipment needs to be. Many
tools are equipped with software that can measure the width of a printed structure and provide the
information to the inspecting technician.

Alignment marks are designed into the masks and reticles and, in turn, are patterned into each layer
to be used as reference points during inspect. In this way, the overlay of a subsequent step can be
measured against the previous step and the misalignment can be quantified or measured.

The microscopes are powerful enough to allow the technician to see various types of defects
(particles, scratches, peeling (lifting) of the resist, holes in the resist, scumming (an underdeveloped
or underexposed pattern). The type of defect, if one exists, determines if the wafer can be reworked
or not.

Review Questions

What are some of the critical parameters that should be inspected during the photolithography
process and as a final inspection?

Critical dimensions are getting smaller. Objects are getting smaller. In microsystems technology,
some objects are required to "float" above the substrate. What do you think are some of the
limitations, if any, of the photolithography process described here when applied to these advancing
technologies?


Summary

Coat, Expose, Develop

Photolithography uses three basic process steps to transfer a pattern from a mask to a wafer: coat,
develop, expose. The pattern is then transferred into the wafers surface or an underlying layer
during a subsequent process (such as etch). The resist pattern can also be used to define the pattern
for a deposited thin film.

Glossary of Key Terms
Alignment: The ability of the alignment tool to accurately overlay the mask/reticle pattern to the
wafer for transferring the first pattern.

Coat: A photosensitive material (photoresist or resist) is applied to the substrate surface.

Deep UV (ultraviolet): A portion of the electromagnetic spectrum (in the range of 100-250 nm)
containing wavelengths often used to expose photoresist. It can produce smaller image widths.

Develop: The exposed photoresist is subsequently dissolved with a chemical developer.

Etch: The process of removing material from a wafer (such as oxides or other thin films) by
chemical, electrolytic or plasma (ion bombardment) means. Examples: nitride etch, oxide etch.

Expose: Subjecting a sensitive material (photoresist) to light or other radiant energy (such as Deep
UV (Ultraviolet), Near UV or x-ray).

Focal Plane: The plane perpendicular to the axis of a lens or optical system that contains the focal
point.

Intermediate: Something that lies or occurs between two states, forms or extremes. In
photolithography, HMDS is an intermediate lying between the photoresist and the previous layer.

Liftoff: A method for patterning films that are deposited. A pattern is defined on a substrate using
photoresist. A film, usually metallic, is blanket-deposited all over the substrate, covering the
photoresist and areas in which the photoresist has been cleared. During the actual lifting-off, the
photoresist under the film is removed with solvent, taking the film with it, and leaving only the film
which was deposited directly on the substrate.


Mask: A glass plate covered with an array of patterns used in the photomasking process. Each
pattern consists of opaque and clear areas that respectively prevent or allow light through.

Near UV: A portion of the electromagnetic spectrum (in the range of 400 nm 300 nm) containing
wavelengths often used to expose photoresist.

Photolithography: The transfer of a pattern or image from one medium to another, as from a mask
to a wafer.

Resist: Thin film used in lithography to transfer a circuit pattern to the underlying substrate.

Reticle: An exposure mask with the image of a single die, or small cluster of die (called a field).
The image on the reticle is stepped across the wafer and is exposed multiple times.

Substrate: The base material on or in which MEMS components and circuits are constructed.

Thin film: Thin material layers ranging from fractions of a nanometer to several micrometers in
thickness.

UV (UltraViolet) light: A portion of the electromagnetic spectrum from 250 to 400 nm. High-
pressure mercury sources emit UV light for photoresist exposure. The region below 250nm is
known as deep UV (DUV).

X-ray: A form of electromagnetic radiation with a wavelength in the range of 10 to 0.01
nanometers.


References

Photolithography Lab.ppt, Fabian Lopez, Central New Mexico Community College
Photolithography. Module 40. MATEC. NSF Center. Arizona.
"Comparing the costs of photoresist coating using spin, spray, and electrodeposition systems".
Nga P. Pham and Pasqualina M. Sarro, Delft University of Technology. MicroMagazine.com.
2007. http://www.micromagazine.com/archive/05/04/pham.html
"Photolithography". Wikipedia. http://en.wikipedia.org/wiki/Photolithography

Disclaimer
The information contained herein is considered to be true and accurate; however the Southwest
Center for Microsystems Education (SCME) makes no guarantees concerning the authenticity of
any statement. SCME accepts no liability for the content of this unit, or for the consequences of any
actions taken on the basis of the information provided.

Unit Evaluation

The Southwest Center for Microsystems Education (SCME) would like your feedback on this
primary knowledge unit. Your feedback allows SCME to maintain the quality and relevance of this
material.

To provide feedback, please visit http://scme-nm.org. Click on SCO Feedback.

Your feedback is greatly appreciated.

Unit Contributors

Designer
Mary Jane Willis, Instructional Design

Subject Matter Experts
Dr. Matthias Pleil, Principal Investigator, SCME; Research Associate Professor of Mechanical
Engineering, UNM.
Fabian Lopez, Central New Mexico Community College (CNM)

Editors
Barbara C. Lopez, UNM Research Engineer
Dr. John Wood, University of New Mexico

Graphics
Junifer Nez, SCME

Support for this work was provided by the National Science Foundation's Advanced Technological
Education (ATE) Program.

Fab_PrLith_AC00_PG_012810 Page 1 of 6

Photolithography Overview for Microsystems
Activity Crossword Puzzle

Participant Guide

Description and Estimated Time to Complete

In this activity you will demonstrate your knowledge of photolithography terminology. This
activity consists of two parts:
A crossword puzzle that tests your knowledge of the terminology and acronyms associated
with photolithography processing, and
Post-activity questions that ask you to demonstrate a better understanding of
photolithography and its application to MEMS fabrication.

If you have not reviewed the unit Photolithography Overview for Microsystems, you should do
so before completing this activity.

Estimated Time to Complete
Allow at least 30 minutes to complete this activity.

Introduction

Photolithography is the process that defines and transfers a pattern onto a layer of the wafer. In
the photolithography process a light source is typically used to transfer an image from a
patterned mask to a photosensitive layer (photoresist or resist) on a substrate or thin film. This
same pattern is later transferred into the substrate or thin film (layer to be etched) using a
different process (etch process).

For some layers, the resist pattern is used as a mask for a deposition process. In such cases, the
patterned resist would identify the areas that receive the deposited material and the areas that do
not.

Activity Objective

Activity Objectives
Identify the correct terms used for several definitions or statements related to
photolithography.
Describe the photolithography process as it applies to microsystems fabrication.

Resources
SCMEs Photolithography Overview for Microsystems PK

Documentation
1. Completed Crossword Puzzle
2. Questions and Answers to the Post-Activity Questions

Activity: Photolithography Terminology

Procedure:
Complete the crossword puzzle using the clues on the following page.

1
2
3
4 5 6
7
8 9
10 11 12
13
14 15
16
17 18 19 20
21 22
23
24
25
EclipseCrossword.com


ACROSS DOWN
1. Type of resist that hardens when exposed to
UV light
1. A portion of the electromagnetic spectrum (in
the range of 300 nm 400 nm) containing
(Hint: It is not DeepUV but ________.)
2. The photolithography step which transfers a
pattern using a UV light source.
3. Prepare the surface of the wafer for the coat
process.
5. UV 4. The resist parameter that is affected by rpm
7. Hexamethyldisalizane 6. A fear of water
8. Used to stop the reaction of the chemical
developer with the photoresist.
8. A portion of the electromagnetic spectrum (in
the range of 100-250nm) containing
Due to the smaller wavelengths, this process
can produce smaller structures.
10. The base material or foundation on or in
which MEMS components and circuits are
constructed.

9. To match (overlay) the pattern on one layer
to the pattern on a previous layer.

13. A quartz plate, used in steppers, that has the
pattern for one field or one or more die at one
given layer.

11. During expose, a chemical reaction takes
place as the result of absorbing _________.

14. An underdeveloped or underexposed pattern
results in this type of defect.

12. HMDS is used to promote the _______ of
resist to the wafer's surface.
17. A light sensitive thin film spun onto a wafer
during the coat step of the photolithography
process.

15. A quartz plate that contains the desired
pattern for an entire wafer
20. A type of resist that becomes more soluble in
developer after being exposed to UV light.

16. High powered optical equipment used to
inspect wafers at the end of the
photolithography process.
21. During the exposure process, the wafer is
adjusted in the z-axis and also may be tilted
to adjust the __________ plane of the image.

18. The photolithography process step which
removes most of the solvents from the resist
after the spin coat process.

22. The photolithography process step which
hardens the photoresist after it has been
developed.
19. The application of resist to the wafer surface.

23. A _______________ holds the wafer on the
chuck during the spin coating process step.

24. When you measure the critical linear
dimension of a structure, you measure the
___________ _________ (2 words).

25. The removal of select photoresist material
after exposure is done during the _________
process step.

Post-Activity Questions

1. Discuss the purpose of photolithography as it applies to the fabrication of microsystems.
2. Create an outline of the photolithography process.

Summary

Photolithography uses three basic process steps to transfer a pattern from a mask to a wafer:
coat, develop, expose. Within each step are secondary steps that ensure the wafer is properly
conditioned, the patterns are accurately aligned, and problems and defects are identified. The
pattern is then transferred into the wafers surface or an underlying layer during a subsequent
process (such as etch). The resist pattern can also be used to define the pattern for a deposited
thin film.

Disclaimer
The information contained herein is considered to be true and accurate; however the Southwest Center
for Microsystems Education (SCME) makes no guarantees concerning the authenticity of any statement.
SCME accepts no liability for the content of this unit, or for the consequences of any actions taken on the
basis of the information provided.
Activity Evaluation

The Southwest Center for Microsystems Education (SCME) would like your feedback on this
activity. Your feedback allows SCME to maintain the quality and relevance of this material.

To provide feedback, please visit www.scme-nm.org . Click on SCO Feedback.

Your feedback is greatly appreciated.
Contributors

Developer

Subject Matter Experts and Editors
Dr. Matthias Pleil, Principal Investigator, SCME; Research Associate Professor of Mechanical
Engineering, UNM.
Barbara C. Lopez, UNM Research Engineer

Support for this work was provided by the National Science Foundation's Advanced
Technological Education (ATE) Program.


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