1880

Cleanroom Quality Management:
How to Understand and

Demonstrate Compliance to
International Standards
March 3
rd
& 5
th
, 2008
Kirk Buecher Hach Ultra Analytics
March 10
th
, 2008
Ong Yam Chai Cesstech (S) Pte Ltd
Agenda
Introduction of Hach Ultra Analytics, Cesstech & CT Flow
International Organization for Standardization
Overview of CleanroomPerformance Testing (ISO14644)
Key Requirements Of ISO 14644-2
Discussions And Interpretations Of The Key
Requirements
Overview of ISO 21501-4 and what does it mean to me?
Summary : Suggestions on How to Demonstrate
Compliance
Q&A
Who is Hach Ultra? Some of our
Product Offerings
Particle Counters
LPC
APC
Vacuum
Remotes
Silica analysers
TOC analysers
Conductivity & PH
Sodium
Dissolved Gases
Anatel, HYT, Orbisphere, Polymetron
Who is Cesstech / CT Flow?
Leading supplier of cleanroom
equipment, instrumentation and
related product lines, backed by our
third party Auditing, performance
testing, qualification and certification
services.
Recognized provider of ESD and
Microcontamination solutions for ultra
clean environments and processes
Long and successful working
relationship with many HDD
Customers
ISO Standards Cover All Industries
Electronics
Semiconductor
Flat Panel
Circuit Board
Optical
HDD
MEMS/Nanomachines
Life Sciences
Pharmaceutical
Biotechnology
Medical Devices
Hospitals/Pharmacies
Aerospace
Launch Vehicles
Satellites
Commercial/Military Aircraft
Laboratories
Analytical Laboratories
Universities
Electronics
Life Sciences
Laboratory
Other
Aerospace
Other
Nuclear
Photographic, X-ray films
Automobile Painting
Todays Focus : ISO 14644 Cleanroom
Classification and Testing and ISO 21501-4
Determination of Particle Size Distribution
www.iso.org
Overview of Cleanroom Performance
Testing and Certification
Specifications
Measurement & Testing Methods
Test Procedures
Instrumentation
Operational Condition of the cleanrooms
Standards and Reference Documents
NEBB Procedural Standards for Certified Testing of Cleanrooms
ISO 14644 standard (Part 1 and 3)*
IEST RP CC006.3
Performed by suitably qualified personnel
Certification Results
On the day of test (time of test)
Verification & Repeatability
The ISO 14644 Standard
Part 1: Classification of air cleanliness
Part 2: Specifications for testing and monitoring to prove
continued compliance with ISO 14644-1
Part 3: Metrology and Test methods
Part 4: Design, construction and start-up
Part 5: Operations
Part 6: Vocabulary
Part 7: Separative devices (clean air hoods, gloveboxes,
isolators and mini-environments)
Part 8: Classification of airborne molecular contamination
Overview Of Cleanroom Performance
Testing and Certification
Type of Tests
- Are Not all inclusive
- Is Not necessary to include all
Recommended Tests
Extracted fromISO14644-3
Types of Tests
Extracted fromIEST RP CC 006.3
Particle Counts per Cleanroom Classes
Extracted fromISO14644-1
in summary
Many elements to consider
Wording is sometimes
difficult to understand
Makes my head hurt
But what is really
important?
ISO 14644-2:2000(E)
Specifications for testing and monitoring to prove continued
compliance to ISO 14644-1
Specifies requirements for periodic testing of a cleanroomor
cleanzone to prove continued compliance
Specifies requirements for monitoring of a cleanroomor
cleanzone to provide evidence of its continued
compliance
Note
Primarily focus on airborne particulate cleanliness
Additional (optional tests) are also specified
Normative reference to ISO14644-1 & ISO14644-3
Extract fromISO14644-2
Para 4.2.2 & 4.2.3 - referring to the tests
requirement and appropriateness in table 2 and A.1
by agreement between customer and supplier
Who is the customer and who is the supplier?
Who should dictate the requirement?
Para 4.2.4 ..
Where the installation is equipped with instrumentation
for continuous or frequent monitoring for airborne particle
concentration, .., the maximum time interval in table 2
maybe be extended, provided that the results of
continuous or frequent monitoring remain within the
specified limits?
Para 4.2.5 .. .
those installation that require additional tests, and are
equipped with instrumentation for continuous or frequent
monitoring, the maximum time interval stated in Table
2 may be extended.
How to interpret this?
Para 4.2.4
Monitoring locations
Where?
How many?...
Maybe extended to when?
Frequent monitoring..
Manual sampling acceptable?
remain within the specified limits.
Tolerance?
Re-qualification shall be undertaken, if..
Completion of remedial action..
Significant * change from the current performance
specification..
Significant * interruption of air movement which affects
the operation..
Special maintenance which significantly * affects the
operation..
(* determined by agreement between the customer and the supplier)
Clarification:
scope of the re-qualification?
Definition of customer and supplier, again, whos who?
ISO 21501 4
Full Title: Determination of particle size distribution Single
particle light interaction methods Part 4: Light scattering airborne
particle counter for clean spaces. Implemented in J uly of 2007
Purpose : To provide a calibration procedure and verification method for
particle counters, so as to minimize the inaccuracy in the measurement
result by the counter, as well as the differences in the results measured
by different instruments.
All instruments used for Audit, Compliance and Classification of air
cleanliness in cleanrooms and associated controlled environments per
ISO 14644 should conform to this new calibration standard.
A realization that the testing required by ISO14644 is
only as good as the tools you use to perform the tests!
What tests does ISO 21501 cover?
Size calibration
Verification of size setting
Counting efficiency
Size resolution
False count rate
Maximum particle
number concentration
Sampling flow rate
Sampling time
Sampling volume
Calibration interval
Test report (format)
What does it cover in the Annexs
Uncertainty of particle size calibration
Counting efficiency (how to configure the test)
Size resolution (how to calculate)
False count rate (how to calculate)
Response rate (from clean air to high particle
concentration and back)
What does this mean for me?
If units used in ISO14644 testing have been calibrated
to this new standard, I can have confidence in the results!
(Measurement uncertainty is greatly reduced)
A unit calibrated to this standard, should perform at the
highest performance level possible, given its design.
If two similar units are calibrated to this standard, I have
the highest possible level of repeatability and
reproducibility, between those units.
If two dissimilar units (with the same measuring range)
are calibrated to this standard, I have minimized as much
as possible, measurement uncertainty within my control.
Summary : Suggestions on How to
Demonstrate Compliance
Will be provided during the sessions
Questions ?

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Cleanroom Quality Management:

How to Understand and

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