Models - Plasma.electrodeless Lamp
Models - Plasma.electrodeless Lamp
Models - Plasma.electrodeless Lamp
Electrodeless Lamp
Introduction
This model simulates an electrodeless lamp with argon/mercury chemistry. The low
excitation threshold for mercury atoms means that even though the mercury is present
in small concentrations, its interaction with electrons determines the overall discharge
characteristics. here is strong UV emission from the plasma at 185 nm and 253 nm
stemming from spontaneous decay of electronically excited mercury atoms. The UV
emission can stimulate phosphors coated on the surface of the bulb resulting in visible
light. From an electrical point of view, the lamp can be thought of as a transformer,
where the coil acts as the primary and the plasma acts as the secondary. If the efficiency
of discharge lamps could be increased by 1%, it would result in a saving of 109 kWh
per year worldwide.
Note: This model requires the Plasma Module and the AC/DC Module.
Model Definition
A schematic of the geometry used to solve the problem is given in Figure 1. A
sinusoidal current is applied to the copper coil (green) which creates a magnetic field
in the ferrite core (gray). When the plasma ignites, a magnetic circuit is created
between the ferrite core and the plasma. The free electrons in the plasma bulk are
accelerated by the electric field. This leads to creation of new electrons through
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ELECTRODELESS LAMP
ionization which sustains the plasma. In quasi steady-state, the creation of new
electrons is balanced by the loss of electrons to the wall.
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PLASMA CHEMISTRY
The chemical mechanism comes from Ref. 1 and consists of 11 species and 96
reactions:
TABLE 1: TABLE OF COLLISIONS AND REACTIONS MODELED.
(eV)
REACTION
FORMULA
TYPE
e+Ar=>e+Ar
Momentum
e+Ar=>e+Ar*
Excitation
11.56
+
e+Ar=>e+e+Ar
Ionization
15.80
e+Ar*=>e+Ar
Superelastic
-11.56
e+Ar*=>e+e+Ar
Ionization
4.24
e+Hg=>e+Hg
Momentum
e+Hg=>e+Hg(63P0)
Excitation
4.66
e+Hg=>e+Hg(63P1)
Excitation
4.87
e+Hg=>e+Hg(63P2)
Excitation
5.43
10
e+Hg=>e+Hg(61P1)
Excitation
6.70
11
e+Hg=>e+Hg(73S1)
Excitation
7.70
12
Excitation
8.85
13
e+Hg=>e+Hg(63DJ)
+
e+Hg=>e+e+Hg
Ionization
10.44
14
e+Hg(63P0)=>e+Hg(63P0)
Momentum
15
e+Hg(63P0)=>e+Hg
Superelastic
-4.66
16
e+Hg(63P0)=>e+Hg(63P1)
Excitation
0.21
17
e+Hg(63P0)=>e+Hg(63P2)
Excitation
0.77
18
e+Hg(63P0)=>e+Hg(61P1)
Excitation
2.04
19
e+Hg(63P0)=>e+Hg(73S1)
Excitation
3.04
20
Excitation
4.18
21
e+Hg(63P0)=>e+Hg(63DJ)
+
e+Hg(63P0)=>e+e+Hg
Ionization
5.78
22
e+Hg(63P1)=>e+Hg(63P1)
Momentum
23
e+Hg(63P1)=>e+Hg
Superelastic
-4.87
24
e+Hg(63P1)=>e+Hg(63P0)
Superelastic
-0.21
25
e+Hg(63P1)=>e+Hg(63P2)
Excitation
0.56
26
e+Hg(63P1)=>e+Hg(61P1)
Excitation
1.83
27
e+Hg(63P1)=>e+Hg(73S1)
Excitation
2.83
28
e+Hg(63P1)=>e+Hg(63DJ)
Excitation
3.98
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FORMULA
TYPE
(eV)
29
+
e+Hg(63P1)=>e+e+Hg
Ionization
5.57
30
e+Hg(63P2)=>e+Hg(63P2)
Momentum
31
e+Hg(63P2)=>e+Hg
Superelastic
-5.43
32
e+Hg(63P2)=>e+Hg(63P0)
Superelastic
-0.77
33
e+Hg(63P2)=>e+Hg(63P1)
Superelastic
-0.56
34
e+Hg(63P2)=>e+Hg(61P1)
Excitation
1.27
35
e+Hg(63P2)=>e+Hg(73S1)
Excitation
2.27
36
Excitation
3.42
37
e+Hg(63P2)=>e+Hg(63DJ)
+
e+Hg(63P2)=>e+e+Hg
Ionization
5.01
38
e+Hg(61P1)=>e+Hg(61P1)
Momentum
39
e+Hg(61P1)=>e+Hg
Superelastic
-6.7
40
e+Hg(61P1)=>e+Hg(63P0)
Superelastic
-2.04
41
e+Hg(61P1)=>e+Hg(63P1)
Superelastic
-1.83
42
Superelastic
-1.27
43
e+Hg(61P1)=>e+Hg(63P2)
+
e+Hg(61P1)=>e+e+Hg
Ionization
3.74
44
e+Hg(73S1)=>e+Hg(73S1)
Momentum
45
e+Hg(73S1)=>e+Hg
Superelastic
-7.7
46
e+Hg(73S1)=>e+Hg(63P0)
Superelastic
-3.04
47
e+Hg(73S1)=>e+Hg(63P1)
Superelastic
-2.83
48
Superelastic
-2.27
49
e+Hg(73S1)=>e+Hg(63P2)
+
e+Hg(73S1)=>e+e+Hg
Ionization
2.74
50
e+Hg(63DJ)=>e+Hg(63DJ)
Momentum
51
e+Hg(63DJ)=>e+Hg
Superelastic
-8.85
52
e+Hg(63DJ)=>e+Hg(63P0)
Superelastic
-4.19
53
e+Hg(63DJ)=>e+Hg(63P1)
Superelastic
-3.98
54
e+Hg(63DJ)=>e+Hg(63P2)
+
e+Hg(63DJ)=>e+e+Hg
+
Ar*+Ar*=>e+Ar+Ar
+
Ar*+Hg=>e+Ar+Hg
+
Ar*+Hg(63P0)=>e+Ar+Hg
+
Ar*+Hg(63P1)=>e+Ar+Hg
Superelastic
-3.42
Ionization
1.59
Penning
Penning
Penning
Penning
55
56
57
58
59
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FORMULA
TYPE
(eV)
Penning
Penning
Penning
63
+
Ar*+Hg(63P2)=>e+Ar+Hg
+
Ar*+Hg(61P1)=>e+Ar+Hg
+
Ar*+Hg(73S1)=>e+Ar+Hg
+
Ar*+Hg(63DJ)=>e+Ar+Hg
Penning
64
Hg(63P2)+Hg(63P2)=>e+Hg+Hg
Penning
Hg(63P2)+Hg(63P1)=>e+Hg+Hg
Penning
Hg(63P2)+Hg(73S1)=>e+Hg+Hg
Penning
67
Hg(63P2)+Hg(63DJ)=>e+Hg+Hg
Penning
68
Hg(61P1)+Hg(63P0)=>e+Hg+Hg
Penning
Hg(61P1)+Hg(63P1)=>e+Hg+Hg
Penning
Hg(61P1)+Hg(63P2)=>e+Hg+Hg
Penning
71
Hg(61P1)+Hg(61P1)=>e+Hg+Hg
Penning
72
Hg(61P1)+Hg(73S1)=>e+Hg+Hg
Penning
Hg(61P1)+Hg(63DJ)=>e+Hg+Hg
Penning
Hg(73S1)+Hg(63P0)=>e+Hg+Hg
Penning
75
Hg(73S1)+Hg(63P1)=>e+Hg+Hg
Penning
76
Hg(73S1)+Hg(63P2)=>e+Hg+Hg
Penning
Hg(73S1)+Hg(61P1)=>e+Hg+Hg
Penning
Hg(73S1)+Hg(73S1)=>e+Hg+Hg
Penning
79
Hg(73S1)+Hg(63DJ)=>e+Hg+Hg
Penning
80
Hg(63DJ)+Hg(63P0)=>e+Hg+Hg
Penning
Hg(63DJ)+Hg(63P1)=>e+Hg+Hg
Penning
Hg(63DJ)+Hg(63P2)=>e+Hg+Hg
Penning
83
Hg(63DJ)+Hg(61P1)=>e+Hg+Hg
Penning
84
Hg(63DJ)+Hg(73S1)=>e+Hg+Hg
Penning
Penning
Charge exchange
Charge exchange
88
Hg(63DJ)+Hg(63DJ)=>e+Hg+Hg
+
+
Ar +Hg=>Hg +Ar
+
+
Ar +Ar=>Ar+Ar
+
+
Hg +Hg=>Hg+Hg
Charge exchange
89
Hg(63P1)=>Hg
253nm
90
Hg(61P1)=>Hg
185nm
60
61
62
65
66
69
70
73
74
77
78
81
82
85
86
87
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FORMULA
TYPE
(eV)
91
Hg(73S1)=>Hg(63P0)
405nm
92
Hg(73S1)=>Hg(63P1)
436nm
93
Hg(73S1)=>Hg(63P2)
546nm
94
Hg(63DJ)=>Hg(63P0)
297nm
95
Hg(63DJ)=>Hg(63P1)
96
Hg(63DJ)=>Hg(63P2)
365nm
FORMULA
Ars=>Ar
Ar+=>Ar
Hg1=>Hg
Hg2=>Hg
Hg3=>Hg
Hg4=>Hg
Hg5=>Hg
Hg6=>Hg
Hg+=>Hg
The electron density and mean electron energy are computed by solving a pair of
drift-diffusion equations for the electron density and mean electron energy.
Convection of electrons due to fluid motion is neglected. For detailed information on
electron transport see Theory for the Drift Diffusion Interface in the Plasma Module
Users Guide.
n
( ) + [ n e ( e E ) D e n e ] = R e
t e
n
( ) + [ n ( E ) D n ] + E e = R
t
The electron source Re and the energy loss due to inelastic collisions R are defined
later. The electron diffusivity, energy mobility, and energy diffusivity are computed
from the electron mobility using:
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ELECTRODELESS LAMP
5
D e = e T e, = --- e, D = T e
3
The source coefficients in the above equations are determined by the plasma chemistry
using rate coefficients. Suppose that there are M reactions that contribute to the
growth or decay of electron density and P inelastic electron-neutral collisions. In
general P >> M. In the case of rate coefficients, the electron source term is given by:
M
Re =
xj kj Nn ne
j=1
where xj is the mole fraction of the target species for reaction j, kj is the rate coefficient
for reaction j (SI unit: m3/s), and Nn is the total neutral number density (SI unit: 1/
m3). The electron energy loss is obtained by summing the collisional energy loss over
all reactions:
P
R =
xj kj Nn ne j
j=1
where j is the energy loss from reaction j (SI unit: V). The rate coefficients can be
computed from cross section data by the following integral:
kk =
0 k ( )f ( ) d
where = (2q/me)1/2 (SI unit: C1/2/kg1/2), me is the electron mass (SI unit: kg),
is energy (SI unit: V), k is the collision cross section (SI unit: m2), and f is the electron
energy distribution function. In this case a Maxwellian EEDF is assumed.
For non-electron species, the following equation is solved for the mass fraction of each
species. For detailed information on the transport of the non-electron species see
Theory for the Heavy Species Transport Interface in the Plasma Module Users
Guide.
( w k ) + ( u )w k = j k + R k
t
The electrostatic field is computed using the following equation:
0 r V =
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ELECTRODELESS LAMP
The space charge density is automatically computed based on the plasma chemistry
specified in the model using the formula:
N
= q
Z k n k n e
k = 1
For detailed information about electrostatics see Theory for the Electrostatics
Interface in the Plasma Module Users Guide.
For a nonmagnetized and nonpolarized plasma, the induction currents are computed
in the frequency domain using the following equation:
2
( j 0 )A + ( 0 A ) = J
(1)
The plasma conductivity needs to be specified as a material property, usually from the
cold plasma approximation:
2
ne q
= ------------------------------m e ( e + j )
(2)
where ne is the electron density, q is the electron charge, me is the electron mass, e is
the collision frequency and is the angular frequency.
ELECTRICAL EXCITATION
The lamp is operated by a fixed power of 80 watts. This means that the total power
dissipation in the system is 80 W. Some of the power is lost in the coil and the ferrite
but the bulk of the power is channeled into the plasma.
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Figure 8: Plot of the mole fraction of Hg(63P1). Spontaneous decay of this species is
responsible for the generation of 253nm radiation.
The mole fraction of Hg(63P1) is plotted in Figure 8. These atoms will spontaneously
emit photos at a frequency factor of 8106 s1. On the way to the walls of the lamp,
the photons will continuously excite mercury atoms and then be released when
spontaneous decay occurs. This resonant absorption and re-absorption of the photons
means that the frequency factor appears to be much lower than it actually is. Since a
self consistent model of the radiation imprisonment of the photons is computationally
impractical, a trapping factor is used to approximate this effect. A trapping factor of 10
is used for the Hg(63P1) atoms which means that the frequency factor is lowered by
a factor of 10. In Figure 9 the mole fraction of Hg(61P1) is plotted. A trapping factor
of 1000 is used for the spontaneous decay back to ground state mercury.
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Figure 9: Plot of the mole fraction of Hg(61P1). Spontaneous decay of this species is
responsible for the generation of 185nm radiation.
Reference
1. K. Rajaraman, Radiation Transport in Low Pressure Plasmas: Lighting and
Semiconductor Etching Plasmas, Ph.D. thesis, Depart. of Physics, University of
Illinois, 2005.
Modeling Instructions
From the File menu, choose New.
NEW
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ELECTRODELESS LAMP
MODEL WIZARD
Rectangle 1 (r1)
1 On the Geometry toolbar, click Primitives and choose Rectangle.
2 In the Settings window for Rectangle, locate the Size section.
3 In the Width text field, type 0.004.
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Rectangle 2 (r2)
1 On the Geometry toolbar, click Primitives and choose Rectangle.
2 In the Settings window for Rectangle, locate the Size section.
3 In the Width text field, type 0.006.
4 In the Height text field, type 0.052.
Rectangle 3 (r3)
1 On the Geometry toolbar, click Primitives and choose Rectangle.
2 In the Settings window for Rectangle, locate the Size section.
3 In the Width text field, type 0.007.
4 In the Height text field, type 0.053.
Chamfer 1 (cha1)
1 On the Geometry toolbar, click Chamfer.
2 Click the Zoom In button on the Graphics toolbar.
3 On the object r2, select Point 3 only.
4 In the Settings window for Chamfer, locate the Distance section.
5 In the Distance from vertex text field, type 1.5e-3.
6 Click the Build All Objects button.
Chamfer 2 (cha2)
1 On the Geometry toolbar, click Chamfer.
2 On the object r3, select Point 3 only.
3 In the Settings window for Chamfer, locate the Distance section.
4 In the Distance from vertex text field, type 2e-3.
5 Click the Build All Objects button.
Square 1 (sq1)
1 On the Geometry toolbar, click Primitives and choose Square.
2 In the Settings window for Square, locate the Size section.
3 In the Side length text field, type 0.001.
4 Locate the Position section. In the r text field, type 0.0045.
5 In the z text field, type 0.025.
6 Click the Build All Objects button.
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Array 1 (arr1)
1 On the Geometry toolbar, click Transforms and choose Array.
2 Select the object sq1 only.
3 In the Settings window for Array, locate the Size section.
4 From the Array type list, choose Linear.
5 In the Size text field, type 5.
6 Locate the Displacement section. In the z text field, type 5e-3.
7 Click the Build All Objects button.
8 Click the Zoom Extents button on the Graphics toolbar.
DEFINITIONS
Variables 1
1 On the Model toolbar, click Variables and choose Local Variables.
2 In the Settings window for Variables, locate the Variables section.
3 In the table, enter the following settings:
Name
Expression
Unit
Description
Tinit
350[K]
Gas temperature
pinit
101325*(500E-3/
760)[Pa]
Pa
Initial pressure
lamp_powe
r
80[W]
Lamp power
tf1
10
Trapping factor
tf2
1000
Trapping factor
Explicit 1
1 On the Definitions toolbar, click Explicit.
2 Select Domains 59 only.
3 In the Settings window for Explicit, locate the Output Entities section.
4 From the Output entities list, choose Adjacent boundaries.
5 Right-click Component 1 (comp1)>Definitions>Explicit 1 and choose Rename.
6 In the Rename Explicit dialog box, type Coil boundaries in the New label text field.
7 Click OK.
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Explicit 2
1 On the Definitions toolbar, click Explicit.
2 Select Domains 59 only.
3 Right-click Component 1 (comp1)>Definitions>Explicit 2 and choose Rename.
4 In the Rename Explicit dialog box, type Coil domains in the New label text field.
5 Click OK.
Explicit 3
1 On the Definitions toolbar, click Explicit.
2 In the Settings window for Explicit, locate the Input Entities section.
3 From the Geometric entity level list, choose Boundary.
4 Select Boundaries 8, 27, and 3538 only.
5 Right-click Component 1 (comp1)>Definitions>Explicit 3 and choose Rename.
6 In the Rename Explicit dialog box, type Boundary layers in the New label text field.
7 Click OK.
Explicit 4
1 On the Definitions toolbar, click Explicit.
2 Select Domain 4 only.
3 Right-click Component 1 (comp1)>Definitions>Explicit 4 and choose Rename.
4 In the Rename Explicit dialog box, type Discharge in the New label text field.
5 Click OK.
INDUCTIVELY COUPLED PLASMA (ICP)
section.
3 Click Browse.
4 Browse to the models Model Library folder and double-click the file
Ar_xsecs.txt.
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2 In the Settings window for Cross Section Import, locate the Cross Section Import
section.
3 Click Browse.
4 Browse to the models Model Library folder and double-click the file
Hg_xsecs.txt.
Reaction 1
1 On the Physics toolbar, click Domains and choose Reaction.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Ars+Ars=>Ar++Ar+e.
4 Locate the Kinetics Expressions section. In the kf text field, type
N_A_const*1.00E-15.
Reaction 2
1 On the Physics toolbar, click Domains and choose Reaction.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Ars+Hg=>Hg++Ar+e.
4 Locate the Kinetics Expressions section. In the kf text field, type N_A_const*9E-16.
58: Ars+Hg=>Hg++Ar+e
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>Reaction 2 and
choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Ars+Hg1=>Hg++Ar+e.
59: Ars+Hg1=>Hg++Ar+e
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>58:
Ars+Hg=>Hg++Ar+e and choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Ars+Hg2=>Hg++Ar+e.
60: Ars+Hg2=>Hg++Ar+e
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>59:
Ars+Hg1=>Hg++Ar+e and choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Ars+Hg3=>Hg++Ar+e.
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61: Ars+Hg3=>Hg++Ar+e
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>60:
Ars+Hg2=>Hg++Ar+e and choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Ars+Hg4=>Hg++Ar+e.
62: Ars+Hg4=>Hg++Ar+e
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>61:
Ars+Hg3=>Hg++Ar+e and choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Ars+Hg5=>Hg++Ar+e.
63: Ars+Hg5=>Hg++Ar+e
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>62:
Ars+Hg4=>Hg++Ar+e and choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Ars+Hg6=>Hg++Ar+e.
64: Ars+Hg6=>Hg++Ar+e
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>63:
Ars+Hg5=>Hg++Ar+e and choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg3+Hg3=>Hg++Hg+e.
4 Locate the Kinetics Expressions section. In the kf text field, type
N_A_const*3.50E-16.
65: Hg3+Hg3=>Hg++Hg+e
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>64:
Ars+Hg6=>Hg++Ar+e and choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg3+Hg4=>Hg++Hg+e.
66: Hg3+Hg4=>Hg++Hg+e
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>65:
Hg3+Hg3=>Hg++Hg+e and choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg3+Hg5=>Hg++Hg+e.
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67: Hg3+Hg5=>Hg++Hg+e
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>66:
Hg3+Hg4=>Hg++Hg+e and choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg3+Hg6=>Hg++Hg+e.
68: Hg3+Hg6=>Hg++Hg+e
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>67:
Hg3+Hg5=>Hg++Hg+e and choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg4+Hg1=>Hg++Hg+e.
69: Hg4+Hg1=>Hg++Hg+e
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>68:
Hg3+Hg6=>Hg++Hg+e and choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg4+Hg2=>Hg++Hg+e.
70: Hg4+Hg2=>Hg++Hg+e
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>69:
Hg4+Hg1=>Hg++Hg+e and choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg4+Hg3=>Hg++Hg+e.
71: Hg4+Hg3=>Hg++Hg+e
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>70:
Hg4+Hg2=>Hg++Hg+e and choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg4+Hg4=>Hg++Hg+e.
72: Hg4+Hg4=>Hg++Hg+e
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>71:
Hg4+Hg3=>Hg++Hg+e and choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg4+Hg5=>Hg++Hg+e.
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73: Hg4+Hg5=>Hg++Hg+e
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>72:
Hg4+Hg4=>Hg++Hg+e and choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg4+Hg6=>Hg++Hg+e.
74: Hg4+Hg6=>Hg++Hg+e
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>73:
Hg4+Hg5=>Hg++Hg+e and choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg5+Hg1=>Hg++Hg+e.
75: Hg5+Hg1=>Hg++Hg+e
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>74:
Hg4+Hg6=>Hg++Hg+e and choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg5+Hg2=>Hg++Hg+e.
76: Hg5+Hg2=>Hg++Hg+e
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>75:
Hg5+Hg1=>Hg++Hg+e and choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg5+Hg3=>Hg++Hg+e.
77: Hg5+Hg3=>Hg++Hg+e
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>76:
Hg5+Hg2=>Hg++Hg+e and choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg5+Hg4=>Hg++Hg+e.
78: Hg5+Hg4=>Hg++Hg+e
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>77:
Hg5+Hg3=>Hg++Hg+e and choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg5+Hg5=>Hg++Hg+e.
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79: Hg5+Hg5=>Hg++Hg+e
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>78:
Hg5+Hg4=>Hg++Hg+e and choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg5+Hg6=>Hg++Hg+e.
80: Hg5+Hg6=>Hg++Hg+e
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>79:
Hg5+Hg5=>Hg++Hg+e and choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg6+Hg1=>Hg++Hg+e.
81: Hg6+Hg1=>Hg++Hg+e
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>80:
Hg5+Hg6=>Hg++Hg+e and choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg6+Hg2=>Hg++Hg+e.
82: Hg6+Hg2=>Hg++Hg+e
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>81:
Hg6+Hg1=>Hg++Hg+e and choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg6+Hg3=>Hg++Hg+e.
83: Hg6+Hg3=>Hg++Hg+e
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>82:
Hg6+Hg2=>Hg++Hg+e and choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg6+Hg4=>Hg++Hg+e.
84: Hg6+Hg4=>Hg++Hg+e
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>83:
Hg6+Hg3=>Hg++Hg+e and choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg6+Hg5=>Hg++Hg+e.
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85: Hg6+Hg5=>Hg++Hg+e
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>84:
Hg6+Hg4=>Hg++Hg+e and choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg6+Hg6=>Hg++Hg+e.
86: Hg6+Hg6=>Hg++Hg+e
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>85:
Hg6+Hg5=>Hg++Hg+e and choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Ar++Hg=>Hg++Ar.
4 Locate the Kinetics Expressions section. In the kf text field, type
N_A_const*1.50E-17.
87: Ar++Hg=>Hg++Ar
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>86:
Hg6+Hg6=>Hg++Hg+e and choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Ar++Ar=>Ar++Ar.
4 Locate the Kinetics Expressions section. In the kf text field, type
N_A_const*4.60E-16.
88: Ar++Ar=>Ar++Ar
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>87:
Ar++Hg=>Hg++Ar and choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg++Hg=>Hg+Hg+.
4 Locate the Kinetics Expressions section. In the kf text field, type
N_A_const*1.00E-15.
89: Hg++Hg=>Hg+Hg+
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>88:
Ar++Ar=>Ar++Ar and choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg2=>Hg.
4 Locate the Kinetics Expressions section. In the kf text field, type 8.00E6/tf1.
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90: Hg2=>Hg
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>89:
Hg++Hg=>Hg+Hg+ and choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg4=>Hg.
4 Locate the Kinetics Expressions section. In the kf text field, type 7.50E8/tf2.
91: Hg4=>Hg
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>90: Hg2=>Hg and
choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg5=>Hg1.
4 Locate the Kinetics Expressions section. In the kf text field, type 2.2E7.
92: Hg5=>Hg1
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>91: Hg4=>Hg and
choose Duplicate.
2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg5=>Hg2.
4 Locate the Kinetics Expressions section. In the kf text field, type 6.6E7.
93: Hg5=>Hg2
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>92: Hg5=>Hg1
94: Hg5=>Hg3
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>93: Hg5=>Hg2
95: Hg6=>Hg1
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>94: Hg5=>Hg3
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2 In the Settings window for Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg6=>Hg2.
4 Locate the Kinetics Expressions section. In the kf text field, type 6E7.
96: Hg6=>Hg2
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>95: Hg6=>Hg1
Surface Reaction 1
1 On the Physics toolbar, click Boundaries and choose Surface Reaction.
2 In the Settings window for Surface Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Ars=>Ar.
4 Locate the Boundary Selection section. From the Selection list, choose Boundary
layers.
2: Ars=>Ar
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>Surface Reaction
1 and choose Duplicate.
2 In the Settings window for Surface Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Ar+=>Ar.
3: Ar+=>Ar
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>2: Ars=>Ar and
choose Duplicate.
2 In the Settings window for Surface Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg1=>Hg.
4: Hg1=>Hg
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>3: Ar+=>Ar and
choose Duplicate.
2 In the Settings window for Surface Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg2=>Hg.
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5: Hg2=>Hg
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>4: Hg1=>Hg and
choose Duplicate.
2 In the Settings window for Surface Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg3=>Hg.
6: Hg3=>Hg
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>5: Hg2=>Hg and
choose Duplicate.
2 In the Settings window for Surface Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg4=>Hg.
7: Hg4=>Hg
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>6: Hg3=>Hg and
choose Duplicate.
2 In the Settings window for Surface Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg5=>Hg.
8: Hg5=>Hg
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>7: Hg4=>Hg and
choose Duplicate.
2 In the Settings window for Surface Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg6=>Hg.
9: Hg6=>Hg
1 Right-click Component 1 (comp1)>Inductively Coupled Plasma (icp)>8: Hg5=>Hg and
choose Duplicate.
2 In the Settings window for Surface Reaction, locate the Reaction Formula section.
3 In the Formula text field, type Hg+=>Hg.
Species: Hg
1 In the Model Builder window, under Component 1 (comp1)>Inductively Coupled
Plasma (icp) click Species: Hg.
2 In the Settings window for Species, locate the General Parameters section.
3 In the Mw text field, type 0.2006.
4 In the text field, type 2.969[angstrom].
5 In the /kb text field, type 750.
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Species: Hg1
1 In the Model Builder window, under Component 1 (comp1)>Inductively Coupled
Plasma (icp) click Species: Hg1.
2 In the Settings window for Species, locate the General Parameters section.
3 In the Mw text field, type 0.2006.
4 In the text field, type 2.969[angstrom].
5 In the /kb text field, type 750.
6 In the x0 text field, type 2E-6.
Species: Hg2
1 In the Model Builder window, under Component 1 (comp1)>Inductively Coupled
Plasma (icp) click Species: Hg2.
2 In the Settings window for Species, locate the General Parameters section.
3 In the Mw text field, type 0.2006.
4 In the text field, type 2.969[angstrom].
5 In the /kb text field, type 750.
6 In the x0 text field, type 1E-6.
Species: Hg3
1 In the Model Builder window, under Component 1 (comp1)>Inductively Coupled
Plasma (icp) click Species: Hg3.
2 In the Settings window for Species, locate the General Parameters section.
3 In the Mw text field, type 0.2006.
4 In the text field, type 2.969[angstrom].
5 In the /kb text field, type 750.
6 In the x0 text field, type 5E-6.
Species: Hg4
1 In the Model Builder window, under Component 1 (comp1)>Inductively Coupled
Plasma (icp) click Species: Hg4.
2 In the Settings window for Species, locate the General Parameters section.
3 In the Mw text field, type 0.2006.
4 In the text field, type 2.969[angstrom].
5 In the /kb text field, type 750.
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Species: Hg5
1 In the Model Builder window, under Component 1 (comp1)>Inductively Coupled
Plasma (icp) click Species: Hg5.
2 In the Settings window for Species, locate the General Parameters section.
3 In the Mw text field, type 0.2006.
4 In the text field, type 2.969[angstrom].
5 In the /kb text field, type 750.
6 In the x0 text field, type 5E-6.
Species: Hg6
1 In the Model Builder window, under Component 1 (comp1)>Inductively Coupled
Plasma (icp) click Species: Hg6.
2 In the Settings window for Species, locate the General Parameters section.
3 In the Mw text field, type 0.2006.
4 In the text field, type 2.969[angstrom].
5 In the /kb text field, type 750.
6 In the x0 text field, type 1E-6.
Species: Ar
1 In the Model Builder window, under Component 1 (comp1)>Inductively Coupled
Plasma (icp) click Species: Ar.
2 In the Settings window for Species, locate the Species Formula section.
3 Select the From mass constraint check box.
Species: Ar+
1 In the Model Builder window, under Component 1 (comp1)>Inductively Coupled
Plasma (icp) click Species: Ar+.
2 In the Settings window for Species, locate the General Parameters section.
3 In the n0 text field, type 1E16.
Species: Hg+
1 In the Model Builder window, under Component 1 (comp1)>Inductively Coupled
Plasma (icp) click Species: Hg+.
2 In the Settings window for Species, locate the General Parameters section.
3 In the Mw text field, type 0.2006.
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Plasma Model 1
1 In the Model Builder window, under Component 1 (comp1)>Inductively Coupled
Plasma (icp) click Plasma Model 1.
2 In the Settings window for Plasma Model, locate the Electron Density and Energy
section.
3 In the e text field, type 4E24[1/(m*V*s)]/icp.Nn.
4 Locate the Model Inputs section. In the T text field, type Tinit.
5 In the pA text field, type pinit.
Ampre's Law 1
1 On the Physics toolbar, click Domains and choose Ampre's Law.
2 Select Domains 13 and 59 only.
Ground 1
1 On the Physics toolbar, click Boundaries and choose Ground.
2 In the Settings window for Ground, locate the Boundary Selection section.
3 From the Selection list, choose Boundary layers.
Wall 1
1 On the Physics toolbar, click Boundaries and choose Wall.
2 In the Settings window for Wall, locate the Boundary Selection section.
3 From the Selection list, choose Boundary layers.
Initial Values 1
1 In the Model Builder window, under Component 1 (comp1)>Inductively Coupled
Plasma (icp) click Initial Values 1.
2 In the Settings window for Initial Values, locate the Initial Values section.
3 In the ne,0 text field, type 1E17.
4 In the 0 text field, type 2.
5 Click the Zoom Box button on the Graphics toolbar.
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section.
4 From the Coil excitation list, choose Power.
5 In the Pcoil text field, type lamp_power.
Species: Ar
Click the Zoom Extents button on the Graphics toolbar.
MATERIALS
Material 1 (mat1)
1 In the Model Builder window, under Component 1 (comp1) right-click Materials and
Name
Value
Unit
Property group
Electrical conductivity
sigma
6e7
S/m
Basic
Relative permittivity
epsilonr
Basic
Relative permeability
mur
Basic
Material 2 (mat2)
1 In the Model Builder window, right-click Materials and choose Blank Material.
2 Select Domain 1 only.
3 In the Settings window for Material, locate the Material Contents section.
4 In the table, enter the following settings:
Property
Name
Value
Unit
Property group
Electrical conductivity
sigma
S/m
Basic
Relative permittivity
epsilonr
Basic
Relative permeability
mur
1e3
Basic
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Material 3 (mat3)
1 In the Model Builder window, right-click Materials and choose Blank Material.
2 Select Domain 2 only.
3 In the Settings window for Material, locate the Material Contents section.
4 In the table, enter the following settings:
Property
Name
Value
Unit
Property group
Electrical conductivity
sigma
S/m
Basic
Relative permittivity
epsilonr
Basic
Relative permeability
mur
Basic
Material 4 (mat4)
1 In the Model Builder window, right-click Materials and choose Blank Material.
2 Select Domain 3 only.
3 In the Settings window for Material, locate the Material Contents section.
4 In the table, enter the following settings:
Property
Name
Value
Unit
Property group
Electrical conductivity
sigma
S/m
Basic
Relative permittivity
epsilonr
4.2
Basic
Relative permeability
mur
Basic
1 In the Settings window for Mesh, locate the Mesh Settings section.
2 From the Element size list, choose Extra fine.
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Edge 1
1 Right-click Component 1 (comp1)>Mesh 1 and choose More Operations>Edge.
2 In the Settings window for Edge, locate the Boundary Selection section.
3 From the Selection list, choose Coil boundaries.
Distribution 1
1 Right-click Component 1 (comp1)>Mesh 1>Edge 1 and choose Distribution.
2 In the Settings window for Distribution, locate the Boundary Selection section.
3 From the Selection list, choose Coil boundaries.
4 Locate the Distribution section. From the Distribution properties list, choose
Predefined distribution type.
5 In the Number of elements text field, type 30.
6 In the Element ratio text field, type 6.
7 From the Distribution method list, choose Geometric sequence.
8 Select the Symmetric distribution check box.
Mapped 1
1 In the Model Builder window, right-click Mesh 1 and choose Mapped.
2 In the Settings window for Mapped, locate the Domain Selection section.
3 From the Geometric entity level list, choose Domain.
4 From the Selection list, choose Coil domains.
Edge 2
1 Right-click Mesh 1 and choose More Operations>Edge.
2 Select Boundaries 8, 27, and 35 only.
Size 1
1 Right-click Component 1 (comp1)>Mesh 1>Edge 2 and choose Size.
2 In the Settings window for Size, locate the Element Size section.
3 Click the Custom button.
4 Locate the Element Size Parameters section. Select the Maximum element size check
box.
5 In the associated text field, type 5e-4.
Edge 3
1 In the Model Builder window, right-click Mesh 1 and choose More Operations>Edge.
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Size 1
1 Right-click Component 1 (comp1)>Mesh 1>Edge 3 and choose Size.
2 In the Settings window for Size, locate the Element Size section.
3 Click the Custom button.
4 Locate the Element Size Parameters section. Select the Maximum element size check
box.
5 In the associated text field, type 1e-3.
Boundary Layers 1
1 In the Model Builder window, right-click Mesh 1 and choose Boundary Layers.
2 In the Settings window for Boundary Layers, locate the Domain Selection section.
3 From the Geometric entity level list, choose Domain.
4 Select Domain 4 only.
5 Click to expand the Transition section. Clear the Smooth transition to interior mesh
check box.
section.
3 From the Selection list, choose Boundary layers.
4 Locate the Boundary Layer Properties section. In the Boundary layer stretching factor
Free Triangular 1
1 In the Model Builder window, right-click Mesh 1 and choose Free Triangular.
2 Right-click Free Triangular 1 and choose Build All.
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STUDY 1
Step 1: Frequency-Transient
1 In the Model Builder window, expand the Study 1 node, then click Step 1:
Frequency-Transient.
2 In the Settings window for Frequency-Transient, locate the Study Settings section.
3 In the Frequency text field, type 2[MHz].
4 In the Times text field, type 0.
5 Click Range.
6 In the Range dialog box, choose Number of values from the Entry method list.
7 In the Start text field, type -8.
8 In the Stop text field, type log10(2e-3).
9 In the Number of values text field, type 3.
10 From the Function to apply to all values list, choose exp10.
11 Click Add.
12 On the Model toolbar, click Compute.
RESULTS
2D Plot Group 4
1 On the Model toolbar, click Add Plot Group and choose 2D Plot Group.
2 In the Model Builder window, under Results right-click 2D Plot Group 4 and choose
Surface.
3 In the Settings window for Surface, click Replace Expression in the upper-right corner
of the Expression section. From the menu, choose Component 1>Inductively Coupled
Plasma (Magnetic Fields)>Heating and losses>icp.Qrh - Resistive losses.
4 On the 2D plot group toolbar, click Plot.
2D Plot Group 5
1 On the Model toolbar, click Add Plot Group and choose 2D Plot Group.
2 In the Model Builder window, under Results right-click 2D Plot Group 5 and choose
Surface.
3 In the Settings window for Surface, click Replace Expression in the upper-right corner
of the Expression section. From the menu, choose Component 1>Inductively Coupled
Plasma (Heavy Species Transport)>Mole fractions>icp.x_wHg - Mole fraction.
4 On the 2D plot group toolbar, click Plot.
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2D Plot Group 6
1 On the Model toolbar, click Add Plot Group and choose 2D Plot Group.
2 In the Model Builder window, under Results right-click 2D Plot Group 6 and choose
Surface.
3 In the Settings window for Surface, click Replace Expression in the upper-right corner
of the Expression section. From the menu, choose Component 1>Inductively Coupled
Plasma (Heavy Species Transport)>Number densities>icp.n_wHg_1p - Number density.
4 On the 2D plot group toolbar, click Plot.
2D Plot Group 7
1 On the Model toolbar, click Add Plot Group and choose 2D Plot Group.
2 In the Model Builder window, under Results right-click 2D Plot Group 7 and choose
Surface.
3 In the Settings window for Surface, click Replace Expression in the upper-right corner
of the Expression section. From the menu, choose Component 1>Inductively Coupled
Plasma (Heavy Species Transport)>Mole fractions>icp.x_wHg2 - Mole fraction.
4 On the 2D plot group toolbar, click Plot.
2D Plot Group 8
1 On the Model toolbar, click Add Plot Group and choose 2D Plot Group.
2 In the Model Builder window, under Results right-click 2D Plot Group 8 and choose
Surface.
3 In the Settings window for Surface, click Replace Expression in the upper-right corner
of the Expression section. From the menu, choose Component 1>Inductively Coupled
Plasma (Heavy Species Transport)>Mole fractions>icp.x_wHg4 - Mole fraction.
4 On the 2D plot group toolbar, click Plot.
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