3rd Step Guide

WIRE BONDER
UTC-1000
NE00040-00
THIRD STEP GUIDE
(2)
Caution
a.
No part of the contents of this manual can be reproduced or reprinted in any form without our
permission.
b.
If you should have found obscure points, errors, omissions of description, Incorrect collating,
missing pages, or other defects, please inform our Engineering Service Dept.
c.
Never operate the machine by the methods other than described in this manual, otherwise
unexpected troubles or accidents may occur.
You are requested to understand that our
company is not responsible even if a trouble should have occurred.

d.
You are requested to understand that our company is not responsible for any direct or indirect
damage caused by defects of this manual, machine, and/or software.
e.
Keep this manual without fail after reading. Read this manual again if a question has arisen
during operation of this machine or if a trouble should have occurred in the machine.
NE00040-00
This manual describes the maintenance methods by disassembly and adjustment for the purpose of
maintaining the performance of this machine.
You are, therefore, requested to read through this manual without fail and understand the cautions on
work, working methods, and safety items before starting the maintenance work of this machine for the
purpose of maintaining the performance of this machine and using the machine for a long time
without any danger. UTC-1000 Third Step Guide is divided into three volumes consisting of Third
Step Guide (1), Third Step Guide (2), and Third Step Guide (3).
Third Step Guide (1)
THIRD STEP GUIDE
Chapter 1 Periodical inspection

1-1 Necessity of periodical inspection
1. Necessity of periodical inspection
2. Inspection and maintenance
records of machine
1-2 Jigs and tools necessary for
periodical inspection
1. Lubricating oils
2. Tools
3. Measuring tools
1-3 Periodical inspection recording
1. Periodical inspection recording
table
2. Maintenance record
1-4 Kinds of periodical inspection and
maintenance
1. Periodical inspection items
2. Routine inspection and
maintenance
3. Weekly inspection and
maintenance
4. Monthly inspection and
maintenance
5. Three-month intervals inspection
and maintenance
6. Six-month intervals inspection and
maintenance
7. Annual inspection and
maintenance
Chapter 2 Disassembly and adjustment
of each unit
2-1 Disassembly and adjustment of
bonding head
1. Bonding head specifications
2. Bonding head adjusting procedure
3. Linear sensor adjusting methods
4. Z-axis calibration method
5. Camera lens tube and ring
illumination adjusting methods
6. Torch electrode adjusting method
7. Loop control adjusting methods
NE00040-00
THIRD STEP GUIDE

of each unit
universal indexer
1. Specifications of universal indexer
2. Adjusting procedures of universal
indexer
3. Adjustment after assembling the
main body
2-3 Disassembly and adjustment of XY
table
1. Specifications of XY table
2. Adjusting procedure of XY table
3. Mounting method of NRS table
4. Adjusting method of linear sensor
THIRD STEP GUIDE

of each unit
loader and unloader
1. Loader and unloader specifications
2. Loader and unloader adjusting
procedures
3. Elevator magazine receiver
adjustment
2-5 Overall adjustment
1. Origin correction value setting
2. Air pressure adjustment
Chapter 3 Inspection and maintenance
records
3-1 Inspection and maintenance
records
1. Routine inspection
2. Weekly inspection
3. Monthly inspection
4. Three-month intervals inspection
5. Six-month intervals inspection
6. Annual inspection
2-2
Disassembly and adjustment of universal indexer (Page 9 ~)
2-3
Disassembly and adjustment of XY table (Page 147 ~)
Work icons
[Point][Caution] and [Tools employed] icons are indicated on each page as occasion demands.
+.,-/*
Work points are described every description of work as occasion demands.
You can understand the work point before starting work.
Caution
Cautions on work are described every description of work as occasion demands.
You can understand the cautions on work before starting work.
2mm
-1102+, /.2
Cap Screw Wrench
Tools and jigs necessary for work are illustrated every description of work.
Since necessary tools and jigs can be understood intuitively, the work efficiency is
improved.
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Chapter 2 Disassembly and adjustment of

each unit
UF-79
2-2
Disassembly and adjustment of universal indexer............................9
1. Specifications of universal indexer ..................................................................................... 10

2. Adjusting procedures of universal indexer.......................................................................... 12
(A) Dismounting method .................................................................................................... 13
(B) Disassembly method.................................................................................................... 18
(C) Assembly method......................................................................................................... 49
(D) Mounting method ......................................................................................................... 118
3. Adjustment after assembling the main body....................................................................... 122
(A) Origin adjustment of AC servo motor ........................................................................... 122
(B) Adjustment heat block height ....................................................................................... 130
(C) Vacuum sensor setting................................................................................................. 138
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each unit
2-3
Disassembly and adjustment of XY table........................................... 147
1. Specifications of XY table ...................................................................................................148

2. Adjusting procedure of XY table .........................................................................................149
(A) Removing method ........................................................................................................150
(B) Disassembly method ....................................................................................................163
(C) Assembly method.........................................................................................................171
3. Mounting method of NRS table...........................................................................................205
(A) Mounting method of NRS table ....................................................................................205
(B) Mounting method of motor ...........................................................................................206
4. Adjusting method of linear sensor ......................................................................................209
(A) XY origin position adjustment.......................................................................................209
(B) Lissajous waveform adjustment...................................................................................214
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For safe work

Please read through and understand [For safe work] before starting the maintenance by disassembly
and adjustment for the purpose of maintaining the performance of the machine.
Each illustrated symbol means as follow.
DANGER
WARNING
CAUTION
Caution
Never
disassemble
Indication
Wrong operation, if executed due to the negligence of this caution

may cause operators death or serious injuries.
may probably cause operators death or serious injuries.
may cause operators injuries or physical damage.
This symbol indicates an item to be careful when operating the machine.

carefully and operate the machine safely.
Please read the contents
Inhibition This symbol shows an inhibited item to be not executed. Please read the indicating contents
carefully and never execute any inhibited item.
Indication This symbol indicates an indicating item to be executed without fail.
indicating contents carefully and execute it without fail.
Please read the
Caution on use
Observe the following cautions for safety when using our machine.
WARNING
Be careful with an
electric shock accident
When touching the terminal board, etc. during maintenance work, make sure that a qualified trained
maintenance man (line keeper) has shut off the power supply without fail before starting the work. Negligence
of this confirmation may cause an electric shock accident, a fire, and/or troubles.
Be careful with an
Internal parts in the machines may remain charged even after turning off all power supplies. Make sure that
no voltage is applied to these parts by using a circuit tester or the like before starting the maintenance work.
Negligence of this confirmation may cause an electric shock accident, a fire, and/or troubles.
Be careful with an
Make sure that the breaker is turned off without fail for preventing an electric shock accident when
maintenance work is done in the vicinity of the main breaker of the machine.
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CAUTION
Be careful with a
strong magnetic field
Never disassemble
A powerful magnetic field section is provided. Dont put any iron or other magnetic substances or a wrist
watch close to the section.
Dont perform any adjustment or disassembly other than described in this manual, otherwise negligence of this
caution may cause personal injuries or the breakage of the machine.
Dont click [YES] during adjustment, otherwise the capillary and reference pin may touch each other.
Inhibition
Indication
Execute routine inspection and periodical inspection of the machine without fail. Make sure before starting
every work that the machine is free of abnormal symptoms.
Indication
For maintenance, use tools conforming to the accuracy of the machine.

cause the machine to be broken.
Indication
Fasten the fixing screws with the specified tightening torque without fail and lock them with paint for preventing
them from being loosened.
A tool having poor accuracy may
Take an anti-static countermeasure without fail when adjusting electric units.

Indication
Lower the
temperature
Be careful with hot portions during maintenance work. For the maintenance of hot sections, turn off the heater
power supply and wait for a while until the temperature falls to be lower than 50 before starting the work for
the purpose of preventing a burn. A high temperature caution is indicated at hot portions where temperature
may exceed 50 inside the machine.
Wear protective gloves and safety shoes for preventing workers danger during maintenance work.
Indication
Shut off the air feed source without fail in advance for ensuring workers safety when units are adjusted.
Indication
OFF
ELB
Turn off
power supply
OFF
ELB
Turn off
power supply
Turn off [POWER] switch and shut off the main breaker without fail in advance for the purpose of preventing
workers danger when touching each circuit in the control unit during maintenance work, etc.
Turn off [POWER] switch and shut off the main breaker without fail in advance for the purpose of preventing
workers danger when replacing the machine fuse. Replace the fuse with a fuse having the specified capacity
without fail.
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UTC-1000 inspection and adjusting points
Disassembly and
Disassembly and adjustment
adjustment of XY table
(2) Page 147 ~ 221
of bonding head
(1) Page 051~ 221
Disassembly and
adjustment of loader
(3) Page 009~ 158
of unloader
(3) Page 009 ~ 158

of universal indexer
(2) Page 009~ 146
Fig. A001
For safety
Observe the cautions for safety during machine operation.
Store your various data (production data, frame data ,magazine data, configuration machine
data) into a CD-RW ,a floppy disk, or the like frequently.
We are not responsible even if the
storage contents in the hard disk cannot be recovered due to a trouble of the hard disk.
NE00040-00

each unit
UF-79
2-2
Disassembly and adjustment of universal indexer
1. Specifications of universal indexer......................................................................................10

2. Adjusting procedures of universal indexer..........................................................................12
(A) Dismounting method ....................................................................................................13
(D) Mounting method..........................................................................................................118
3. Adjustment after assembling the main body .......................................................................122
(A) Origin adjustment of AC servo motor ...........................................................................122
(B) Adjustment heat block height .......................................................................................130
(C) Setting of vacuum sensor.............................................................................................138
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UF-79
2-2
1.
Disassembly and adjustment of universal indexer

Specifications of universal indexer
Model
UF-79A
Scope of frame
Frame width
20 ~ 80mm
Frame length
95 ~ 262mm
Frame thickness
0.07 ~ 2.0mm (by parts exchange)

Conversion
0.07 ~ 0.16mm in thickness 50 ~ 70mm in width
0.1 ~
0.3mm in thickness 20 ~ 80mm in width
C1 0.3 ~
C2 0.5 ~
Standard
Frame thickness corresponding to exclusive design 0.7 ~ 2.0mm in thickness

Operation sizes
Heat block
Load clamper
Index pincher
Innermost rail
Rail on this side
Vertical stroke
Short
2.54mm
Long
4.0mm
Paddle adapter height setting range
2.4mm
Vertical stroke height resolution
10m/Pulse
Vertical stroke
Short
1.5mm
Long
4.0mm
Vertical stroke of upper pincher
1.9mm
Vertical stroke of lower pincher
0.8mm
Index pincher width of upper pincher
4.0mm
Index pincher width of lower pincher
1.5mm
Rail groove width
1.10.03mm
Rail groove depth
0.80.05mm
Rail groove width dial
0.45mm
0.8mm
1.35mm
Rail groove depth

Resolution
0.8mm
Frame feed
5m/Pulse
Frame width
10m/Pulse
Units employed
RPS unit (RPS-01)
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MS-235
Unit magnification X0.75
Pin material
Tip
Diamond
Main body
Titanium
10
[Electric parts]
Drive motor
Stepping motor
6 units in total
Opening and closing of real rail
C7827-9012K
Oriental
20513251
Opening and closing of front rail
C7827-9012K
Oriental
20513251
Heater up/down
PK266M-02B-C2
Oriental
20513382
Lead clamper up/down
PK266-02A-C113
Oriental
20513385
Opening and closing of right frame
TS3214N59
Tamagawa Seiki
20516318
TS3214N59
Tamagawa Seiki
20516318
index pincher
Opening and closing of left frame
index pincher
AC motor
1 unit in total
Frame feed
MD-21
Yasukawa Electric 21610231

Sensors
Photo sensor
8 units in total
Index pincher opening/closing on
PM-L24
SUNX
20023591
PM-L24
SUNX
20023591
Feed left limit
PM-L24
SUNX
20023591
Heat block origin (Short)
PM-L24
SUNX
20023591
Heat block origin (Long)
PM-L24
SUNX
20023591
Lead clamper origin
PM-L24
SUNX
20023591
Limit of front rail
PM-L24
SUNX
20023591
Limit of real rail
PM-L24
SUNX
20023591
loader side
Index pincher opening/closing on
unloader side
Heater, Thermocouple
Main heater
W94H04
250W
Lead 900
West Electronics
Pre heater
W94H02
150W
Lead500
West Electronics
After heater
W94H02
150W
Lead500
West Electronics
Thermocouple for main heater
CAT35A-
West Electronics
20630594
1.6 x 75 x 900 without terminal

Thermocouple for pre heater
CAT35A-
West Electronics

Thermocouple for after heater
CAT35A-
West Electronics

Thermostat (temperature fuse)
Main heater
15NA180 plain mounting
Matsuo Denki Sangyo 20452384
bracket / #187 upright

Pre heater

After heater
.
11
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2.
Adjusting procedures of universal indexer

The universal indexer holds the work being fed from the loader side magazine upward during
bonding and feeds it to the unloader side magazine after bonding. In adjustment of the universal
indexer, appropriate adjustment of the control sensor in the operation unit , drive cam, drive screw,
and drive timing belt is important. For replacing the heater, drive motor, drive timing belt, and
other parts, disassemble the unit up to the aimed item according to the procedures in this manual.
Universal indexer
Fig. U001
UTC-1000
Maintenance tools and jigs for universal indexer
Tools
L-type wrench (Cap Screw Wrench) 1.27mm, 1.5mm, 2mm
2.5mm, 3mm, 4mm, 5mm, 6mm
Wrench M3
Screwdriver (+)
Screwdriver (-)
Pliers
T-type wrench M3
Jigs
Jig J124
Jig J714
Jig J716
Jig J717
Jig J718
Jig J719
Jig J721
Index pincher adjusting

Rail width adjusting jig
HB, WP vertical origin adjusting pin
Index pincher height adjusting jig
Index pincher height adjusting jig
Index pincher vertical positioning jig
Heat block parallel adjusting jig
Meters
Torque gauge
Pick test
Torque driver
Block gauge 100mm option
Height gauge
Magnet stand
Scale (150mm), graplate (flat-plate), spring scale
Others
Grease
Oil
Lock tight
Multi-purpose. EA2. NSK PS-2

Diamond oil RO-32+HDCI
No. 648
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12
Removal
(A) Dismounting method
Remove the universal indexer UF-79A from wire bonder UTC-1000 main body according to the
following procedure (1) ~ (8).
(1) Removal of operation panel

(2) Move of operation panel
(3) Removal of loader and unloader covers
(4) Removal of loader side cover
(5) Removal of unloader side cover
(6) Removal of connectors
(7) Removal of reference system piping
(8) Removal of vacuum piping
Universal indexer UF-79 profile
Fig. U002
13
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Removal

Open the front face of the operation panel at the front of the machine and draw out the keyboard
forward.
Loosen two SUS CSB M6 x 12mm mounted on the upper face of the keyboard on the lower side
of the operation panel, and remove the operation panel cover through the panel hole.
SUS CSB M6 12mm
Operation panel
Keyboard
5mm
Fig. U003
-1102+, /.2
Cap Screw Wrench

After removing the operation panel form [ Normal fixed position of operation panel], fix the
operation panel to the [Fixed position during maintenance of operation panel]. In the photo in
Fig. U004, the operation panel is not mounted for explaining the fixed section.
Since the
operation panel wiring is short, fix the operation panel at the front of the machine as illustrated
in Fig. U008 (Page 16). Be careful not to break the LCD of the operation panel.
Normal fixed position of operation

panel
Fixed position during
maintenance of operation panel
Fig. U004
Unnecessary
-1102+, /.2
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14
Removal

Remove the loader side cover after removing two SUS CSB M3 x 8mm and one SUS hexagon
socket head countersunk bolt (screw) M3 x 4mm on the loader side.
The unloder side is
manufactured symmetrically. Remove two SUS CSB M3 x 8mm and one SUS hexagon socket
head countersunk bolt (screw) M3 x 4mm in the same way and remove the unloader side cover.
SUS hexagon socket head countersunk bolt (screw) M3 4mm
SUS CSB M3 8mm
Loader side cover
Fig. U005
2mm
-1102+, /.2
Cap Screw Wrench
2.5mm
Cap Screw Wrench

Remove two CSB M6 x 20mm which fix the universal indexer from the loader side (left side
panel of machine).
CSB M6 20mm
Fig. U006
5mm
-1102+, /.2
15
Cap Screw Wrench
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Removal

Remove two CSB M6 x 20mm which fix the universal indexer from the unloader side (right side
panel of machine).
CSB M6 20mm
Fig. U007
5mm
-1102+, /.2
Cap Screw Wrench

(A) Disconnect the wiring connector from the AC motor of the universal indexer.
(B) Disconnect the connector (P-1) from the heater and CA cable.
(C) Disconnect the connector (P-2) from reference system (RPS).
(D) Disconnect PJ-9, PJ-17, PJ-18, PJ-25, and PJ-26 connectors.
(E) Disconnect GND wire together with its fixing bolt CSB M4 x 6mm.
CSB M4 6mm
GND
P-2
PJ-9
P-1
PJ-17
PJ-18
PJ-25
PJ-26
AC connector
(Inserted into portion)
Operation panel
(Fixed position during the
maintenance of machine)
Fig. U008
3mm
-1102+, /.2
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16
Cap Screw Wrench
Removal

Disconnect the tube piping to the reference system (RPS) from the lower side of the flowmeter.
Draw out of the connector

Piping tube to reference system
Fig. U009
Unnecessary
-1102+, /.2

Disconnect the vacuum piping. Now, the work for removing the universal indexer from the
main body is completed.
Raw out of connector

Vacuum piping
Fig. U010
Unnecessary
-1102+, /.2
17
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Disassembly
(B) Disassembly method
This section describes the disassembly method of the universal indexer.
Remove the universal indexer from the machine main body according to the procedure shown in
(A) Removing method (Page 13 ~ Page 17) in the above paragraph and put it on a work bench.
(1) Removal of vertical motion guide stand

(2) Disassembly of vertical motion guide stand
(3) Disassembly of male screw and female screws of front and real rails
(4) Disassembly of pitch feed
(5) Disassembly of reference unit
(6) Disassembly of arm block
Fig. U011
Universal indexer UF-79A
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18
Disassembly

a)
Remove the cover after loosening three chrome-plated hexagon socket head button bolts
(screws) M4 x 4mm which fix the cover.
Chrome-plated hexagon socket head button bolts (screws) M4 4mm
Cover
Fig. U012
2.5mm
-1102+, /.2
b)
Cap Screw Wrench
Remove the arm base (#77) after removing two SUS CSB M5 x 16mm which fix the arm
base (#77).
SUS CSB M5 16mm
Arm base (#77)
Piping to reference
system
Vacuum piping
Fig. U013
[From the rear panel of universal indexer]
4mm
-1102+, /.2
19
Cap Screw Wrench
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Disassembly
c)
Remove one chrome-3 plated CSB M4 x 10mm, 2 pieces in total, which fix the pre heat plate
and after heat plate, and remove the pre heat plate and after heat plate. Remove the
bundling wire cover after removing two SUS CSB M3 x 4mm.
SUS CSB M3 4mm
Chrome-3 plated CSB M4 10mm
Pre heat plate
After heat plate
Bundled wire cover
Fig. U014
2.5mm
-1102+, /.2
d)
Cap Screw Wrench
3mm
Cap Screw Wrench
Disconnect PJ1, PJ2,PJ19, and PJ20 from the board (small board JBP-313A). Remove two
CSB M3 x 6mm and remove the board (small board JBP-313A) from the universal indexer.
CSB M3 6mm
Board
(small board JBP-313A)
Fig. U015
2.5mm
-1102+, /.2
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20
Cap Screw Wrench
e)
Disassembly
Remove two hexagon socket head button bolts (screws) M3 x 6mm and remove the origin
sensor for AC motor. Remove the main body cover (front) by drawing it this side.
Hexagon socket head button bolt (screw) M3 6mm
Origin sensor
Main body cover (front)
Fig. U016
2mm
-1102+, /.2
f)
Cap Screw Wrench
Remove the slide base (#1) after removing four CSB M5 x 10mm.
CSB M5 10mm
Bearing
(F624-H-ZZMC4EA2L)
Slide base (#1)
Micro photo sensor

Stepping motor
(PM-L24)
(TS3214N59)
Fig. U017
4mm
-1102+, /.2
21
Cap Screw Wrench
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Disassembly
g)
Remove the right and left width motor covers after removing two CSB M3 x 6mm, or, 4
pieces in total.
CSB M3 6mm
Width motor cover

Width motor cover
Fig. U018
2.5mm
-1102+, /.2
h)
Cap Screw Wrench
Remove four CSB M4 x 30mm, and separate the slide base (F)(#20) and drive unit from each
other. Dont remove the bearing unit.
CSB M4 30mm
Slide base F (#20)
Drive side
Bearing unit
Bearing unit
Fig. U019
3mm
-1102+, /.2
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22
Cap Screw Wrench
i)
Disassembly
Remove eight CSB M3 x 8mm, and then, remove the lower slide base (#20). Remove the
heat base by removing four chrome-3 plated CSB M2.6 x 6mm.
CSB M3 8mm
Chrome-3 plated CSB M2.6
6mm
Lower slide base (#20)
Fig. U020
Heat spacer
2mm
-1102+, /.2
j)
Cap Screw Wrench
2.5mm
Cap Screw Wrench
Removal of heater, Thermocouple and thermostat

Remove the heater and Thermocouple from the heat block after loosening three HSB M2.6 x
3mm.
Remove one chrome-3 plated CSB M3 x 5mm which fixes GND(ground wire).
Remove the ceramic plate by removing two chrome-3 plated CSB M4 x 16mm and two
chrome-3 plated M4 x 14mm. Then, remove the thermostat by removing two chrome-3
plated CSB M3 x 5mm.
HSB M2.6 3mm
Heat block
Chrome-3 plated CSB
M4 16mm
Chrome-3 plated CSB

M4 14mm
Stopper
Ceramic plate
Chrome-3 plated CSB

M3 5mm
Thermostat
GND
(Ground wire)
Fig. U021
-1102+, /.2
23
1.27mm
2.5mm
Cap Screw Wrench
Cap Screw Wrench
3mm
Cap Screw Wrench
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Disassembly
k)
Remove the rear cover by removing two SUS CSB M3 x 4mm.
SUS CSB M3 4mm
Cover
Fig. U022
2.5mm
-1102+, /.2
1)
Cap Screw Wrench
Remove the rear main body cover by drawing it this side, and then, remove the rear rail
stand by removing four CSB M4 x 30mm.
CSB M4 30mm
Rear rail stand
Main body cover (Rear)
Fig. U023
3mm
-1102+, /.2
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24
Cap Screw Wrench
Disassembly
m) Remove the slide bases (R) (#21,22)

Rear
Rear
Remove slide base ( R ) (#21) by removing four CSB M3 x 6mm. Remove slide base ( R )
(#22) by removing four CSB M3 x 6mm.
CSB M3 6mm
CSB M3 6mm
Rear
Rear
Slide base (R)
Slide base (R)
(#21)
(#22)
Fig. U024
2.5mm
-1102+, /.2
n)
Cap Screw Wrench
Remove the linear guide (LM guide)

Remove thirteen CSB M3 x 8mm which fix the linear guide (LM guide) rail and remove the
linear guide on the left side as viewed from the rear side. Remove eleven CSB M3 x 8mm
which fix the linear guide rail and remove the linear guide (LM guide) on the right side as
viewed from the rear side.
Linear guide
(LM guide)
Linear guide
(LM guide)
Fig. U025
CSB M3 8mm
Caution
CSB M3 8mm
No stopper is mounted on both sides of linear guide (LM guide).
Be
careful not to protrude the linear guide (LM guide) out of the end face of
the linear rail.
2.5mm
-1102+, /.2
25
Cap Screw Wrench
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Disassembly
o)
Disconnect wiring connectors PJ-21, PJ-22, PJ-23, PJ-24 from the board (JBP-313A).
Remove one CSB M4 x 4mm, and remove nylon clamp (NK-10N).
CSB M4 4mm
Board
(JBP-313A)
Cable clamp
(NK-10N)
Connector
PJ-21
PJ-22
PJ-23
PJ-24
Fig. U026
3mm
-1102+, /.2
p)
Cap Screw Wrench
Remove the nylon clamp (NK-7N) after removing one CSB M4 x 6mm, or, 2 pieces in total.
Remove four CSB M5 x 14mm and remove the heat block vertical move motor.
CSB M5 14mm
CSB M4 6mm
Cable clamp
Cable clamp
(NK-7N)
(NK-7N)
Heat block stepping motor

vertical move motor
Fig. U027
(PK-266M-02B-2)
3mm
-1102+, /.2
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26
Cap Screw Wrench
4mm
Cap Screw Wrench
q)
Disassembly
Remove two CSB M5 x 14mm and then, remove the lead clamper vertical move motor.
CSB M5 14mm
Lead clamper vertical move motor

(Stepping motor PK-266-02A-C113)
Timing belt
(214PM10)
Fig. U028
4mm
-1102+, /.2
r)
Cap Screw Wrench
Remove the vertical motion guide stand by removing four CSB M6 x 20mm.
CSB M6 20mm
[Operator side]
CSB M6 20mm
Fig. U029
[Rear side]
Fig. U030
5mm
-1102+, /.2
27
Cap Screw Wrench
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Disassembly

a)
Remove the heater base by removing three chrome-3 plated CSB M4 x 10mm. Remove the
stand cover by removing two chrome-3 plated hexagon socket head button bolts (screws) M3
x 6mm.
Chrome-3 plated hexagon socket head button bolts (screws) CSB M3 6mm
Chrome-3 plated CSB
M4 10mm
Stand cover
Heater base
Fig. U031
2mm
-1102+, /.2
b)
3mm
Cap Screw Wrench
Cap Screw Wrench
-1102+, /.2
Cap Screw Wrench
Remove the spring hook by removing six CSB M3 x 6mm.
CSB M3 6mm
Spring hook
Spring hook
Spring hook
Fig. U032
2.5mm
NE00040-00
28
Disassembly
c)
Remove block (#67) by removing four CSB M4 x 30mm.
CSB M4 30mm
Block (#67)
Fig. U033
3mm
-1102+, /.2
d)
Cap Screw Wrench
Remove pressure plate (#35) by removing four CSB M4 x 12mm.
CSB M4 12mm
Pressure plate (#35)
Fig. U034
3mm
-1102+, /.2
29
Cap Screw Wrench
NE00040-00
Disassembly
e)
Remove the pressure holder (#34) by removing four CSB M5 x 20mm after loosening two
HSB M3 x 12mm and M3 nuts.
CSB M5 20mm
HSB M3 12mm M3 nut
Pressure holder (#34)
Fig. U035
1.5mm
-1102+, /.2
f)
Cap Screw Wrench
4mm
Cap Screw Wrench
Remove the V shaped rail.
V shaped rail
V shaped rail
Fig. U036
Caution
Be careful not to drop the cross roller cage inside the V shaped rail when
Unnecessary
removing V shaped rail.
NE00040-00
-1102+, /.2
30
Disassembly
Disassembly end
Vertical motion guide stand
(#31)
Cross roller cage

(R204073BP5-123)
Pressure holder
(#34)
V shaped rail
(R104080AP6-51)
Fig. U037
g)
Loosen three HSB M3 x 10mm and lock nut M3 of vertical motion guide stand (#31).
HSB M3 10mm
Vertical motion guide

stand (#31)
Fig. U038
1.5mm
-1102+, /.2
31
Cap Screw Wrench
NE00040-00
Disassembly
h)
Remove the V shaped rail and heater vertical motion plate (#33) by removing six CSB M4 x
14mm.
CSB M4 14mm
V shaped rail
V shaped rail
Heater vertical motion plate

(#33)
Fig. U039
Caution
Be careful not to drop the cross roller cage inside the V shaped rail when
3mm
removing V shaped rail.
-1102+, /.2
Cap Screw Wrench
Disassembly end
Vertical motion guide stand
(#31)
Heater vertical motion plate (#33)

Cross roller cage
(R204115BP-133)
Cross roller cage

(R204115BP-133)
Fig. U040
V shaped rail
V shaped rail
(R104120TP5-51)
NE00040-00
(R104120TP5-51)
32
(3) Disassembly of male screw and female screw of front and real rails
Disassembly
a)
Remove the sensor mounting plate (#13) by removing four CSB M3 x 4mm.
CSB M3 4mm
Timing belt
(141P3M6)
Sensor mounting plate

(#13)

(#13)
Front rail width motor
Real rail width motor
(Stepping motor:C7827-9012K)
(Stepping motor: C7827-9012K)
Fig. U041
2.5mm
b)
-1102+, /.2
Cap Screw Wrench
-1102+, /.2
Cap Screw Wrench
Remove the motor bracket by removing two CSB M4 x 14mm.
CSB M4 14mm
Motor bracket
Timing belt
(141P3M6)
Fig. U042
3mm
33
NE00040-00
Disassembly
c)
After removing the E ring by a minus screwdriver, separate the male screw (#3) from the
famale screw (#4) by turning it. Disassemble the real rail side in the same way.
E ring ETW-4
Female screw (#4)
Male screw (#3)
Fig. U043
Caution
Be careful not to lose the E ring when removing it.
-1102+, /.2
Disassembly end
Fig. U044
NE00040-00
34
()
Driver
Disassembly

a)
Remove ball screw cover (#67) by removing two chrome-3 plated hexagon socket head
button bolts (screws) M4 x 4mm.
Chrome-3 plated hexagon socket head button bolts (screws) M4 4mm
Ball screw cover (#67)
Fig. U045
2.5mm
b)
-1102+, /.2
Cap Screw Wrench
-1102+, /.2
Cap Screw Wrench
Remove wire clamp (#68) by removing two SUS CSB M3 x 6mm.
SUS CSB M3 6mm
Wire clamp (#68)
Fig. U046
2.5mm
35
NE00040-00
Disassembly
c)
Remove plate (#63) by removing hexagon socket head button bolts (screws) M4 x 6mm.
Hexagon socket head button bolts (screws) M4 6mm
Plate (#63)
Fig. U047
2.5mm
-1102+, /.2
d)
Remove nylon clamp (NK-5N) by removing one CSB M4 x 6mm.
e)
Remove upper pincher arm (#47) by removing two SUS CSB M3 x 16mm.
Cap Screw Wrench
CSB M4 6mm
SUS CSB M3 16mm
Upper pincher arm

(#47)
Nylon clamp (NK-5N)
Fig. U048
2.5mm
-1102+, /.2
NE00040-00
36
Cap Screw Wrench
3mm
Cap Screw Wrench
Disassembly
f)
Remove the spring from spring hook (L). After removing one CSB M2 x 4mm, loosen the
hexagon low nut M5 and miniature ball plunger while pressing the adjustment shaft (#12),
and remove the adjustment shaft (#12) and spring (E649).
CSB M2 4mm
Miniature ball plunger
Hexagon low nut M5
Adjustment shaft (#12)
Spring (C204)
Collar (#13)
Spring (E649)
Slide block (#20)
Spring hook (L)
Fig. U049
Caution
Be careful not to drop the collar (#13) from the inside of CSB M2
1.5mm
x 4mm when removing the latter.
-1102+, /.2
Cap Screw Wrench
After removing the front rail, remove the E ring by using a minus screwdriver.
E ring ETW-4
Fig. U050
Caution
Be careful not to scatter and lose the E ring when removing it.
-1102+, /.2
37
()
Driver
NE00040-00
Disassembly
g)
Remove the body (L) (#50) from the slide table by removing three CSB M3 x 6mm.
CSB M3 6mm
Body (L) (#50)

Slide table (#30)
Fig. U051
2.5mm
-1102+, /.2
h)
Cap Screw Wrench
Remove three CSB M4 x 45mm from screw housing (#61).
CSB M4 45mm
Screw housing (#61)
Fig. U052
3mm
-1102+, /.2
NE00040-00
38
Cap Screw Wrench
Disassembly
i)
Remove the slide table (#30) by removing eight CSB M3 x 5mm.
CSB M3 5mm
Slide table (#30)
Fig. U053
2.5mm
-1102+, /.2
j)
Cap Screw Wrench
Remove the linear guide (LM guide) by removing seven CSB M4 x 8mm.
CSB M4 8mm
Linear guide (LM guide)

(THK:2RSR12WZMUUC1+290LPM)
Fig. U054
Caution
No stopper is mounted on both sides of linear guide (LM guide).
Be
careful not to protrude the linear guide (LM guide) out of the end face of
the linear rail.
3mm
-1102+, /.2
39
Cap Screw Wrench
NE00040-00
Disassembly
k)
1)
Remove the micro photo sensor by removing two CSB M2 x 6mm. Loosen two HSB M4 x
4mm which fix the index pincher cam (#32).
HSB M4 4mm
CSB M2 6mm
Index pincher cam (#32)

Micro photo sensor
Stepping motor
Fig. U055
1.5mm
-1102+, /.2
2)
2mm
Cap Screw Wrench
Cap Screw Wrench
-1102+, /.2
Cap Screw Wrench
Remove the stepping motor by removing three CSB M3 x 6mm.
CSB M3 6mm
Stepping motor
(TS3214N59)
Fig. U056
2.5mm
NE00040-00
40
Disassembly
3)
Remove the lower index pincher (L) (#54) by removing two SUS CSB M2 x 4mm.
CSB M2 4mm
Lower index pincher (L) (#54)
Fig. U057
1.5mm
-1102+, /.2
4)
Remove the stand (#39) by removing two SUS CSB M3 x 8mm.
5)
Remove the shaft (#49) by a minus screwdriver.
Cap Screw Wrench
CSB M3 8mm
Stand (#39)
Spring
Spring
(DC-517)
(C-127)
Shaft (#49)
Shaft (#49)
Fig. U058
E ring
E ring
Caution
Dont remove E ring.
2.5mm
-1102+, /.2
41
Cap Screw Wrench
()
Driver
NE00040-00
Disassembly
6)
Draw out two shafts (#38) by removing four SUS HSB M3 x 4mm. Draw out two shafts
(#38) by removing four SUS HSB M3 x 4mm on the opposite side in the same way as
described above. Observe the same procedure for the right index pincher side.
Shaft (#38)
SUS HSB M3 4mm
Fig. U059
1.5mm
-1102+, /.2
NE00040-00
42
Cap Screw Wrench
Disassembly

a)
Remove the connector (P2) from the illumination relaying plate of the reference unit.
Reference unit illumination

relaying plate
Connector (P2)
Fig. U060
Caution
The reference unit is the name of the unit where MS-235 is assembled in
-1102+, /.2
RPS-01.
b)
Unnecessary
Remove nylon clamp (NK-5N) by removing one SUS CSB M4 x 6mm.
Remove the
reference unit by removing two SUS CSB M4 x 16mm.
SUS CSB M4 16mm
SUS CSB M4 6mm
Reference unit
Nylon clamp
(NK-5K)
Fig. U061
3mm
-1102+, /.2
43
Cap Screw Wrench
NE00040-00
Disassembly
c)
SUS CSB M3 8mm
Nylon clamp
(NK-5N)
Fig. U062
2.5mm
d)
-1102+, /.2
Cap Screw Wrench
-1102+, /.2
Cap Screw Wrench
Remove MS-235 by removing two SUS CSB M2 x 6mm.
SUS CSB M2 6mm
MS-235
Fig. U063
1.5mm
NE00040-00
44
Disassembly

a)
Remove the upper reference ball holder (#61) by removing one chrome-3 plated CSB M2.6 x
6mm of arm block (L).
Chrome-3 plated CSB M2.6 6mm
Arm block (L)
Upper reference
ball holder (#61)
Caution
Fig. U064
Be careful not to lose the steel ball when removing the upper reference
2mm
-1102+, /.2
ball holder (#61).

b)
Cap Screw Wrench
Remove the ball holder (#63) by removing two chrome-3 plated CSB M2.6 x 12mm of arm
block (L).
Arm block (L)
Ball holder (#63)

Fig. U065
2mm
-1102+, /.2
45
Cap Screw Wrench
NE00040-00
Disassembly
c)
Remove the upper reference ball holder (#61) by removing one chrome-3 plated CSB M2.6 x
12mm of arm block (R).
Arm block (R)
Upper reference ball

holder (#61)
Fig. U066
2mm
-1102+, /.2
d)
Cap Screw Wrench
Remove the lateral reference ball holder (#62) by removing two chrome-3 plated CSB M2.6 x
12mm of arm block (R).
Chrome3 -plated CSB M2.6 12mm
Arm block (R)
Lateral reference ball

Fig. U067
Caution
holder (#62)
Be careful not to lose the steel ball when removing the lateral reference
2mm
ball holder (#62).
NE00040-00
-1102+, /.2
46
Cap Screw Wrench
Disassembly
e)
Remove one chrome-3 plated CSB M2.6 x 6mm of ball holder (#63).
Upper reference holder (#61)
Ball holder (#63)
Fig. U068
2mm
-1102+, /.2
f)
Cap Screw Wrench
Remove one chrome-3 plated CSB M2.6 x 6mm of lateral reference holder (#62).
Upper reference holder (#61)

Lateral reference holder (#62)
Fig. U069
2mm
-1102+, /.2
47
Cap Screw Wrench
NE00040-00
Disassembly
g)
Remove one chrome-3 plated CSB M2.6 x 6mm which fixes the ball cover (#66).
Ball cover (#66)
Fig. U070
Profile as viewed from the top
2mm
-1102+, /.2
Ball cover (#66)
Ball holder (#63)
Fig. U071
Profile as viewed from the side
NE00040-00
48
Cap Screw Wrench
Assembly
(C) Assembly method
This section describes the assembly method of the universal feed.
(1) Assembly of lead clamper vertical move motor

(2) Assembly and mounting of vertical motion stand
(3) Assembly and mounting of rail drive unit
(4) Assembly of pitch feed
(5) Assembly and mounting of reference unit
(6) Assembly of cable and cable cover
(7) Adjustment of origin sensor
(8) Adjustment of lead clamper
(9) Assembly of arm block
Fig. U072
Universal indexer UF-79A
49
NE00040-00
Assembly

a)
Mount the lead clamper vertical motor temporarily by two CSB M5 x 14mm. Apply a coat of
multi-purpose grease to the vertical cam of the lead clamper.
CSB M5 14mm
Lead clamper vertical cam
Fig. U073
Caution
Temporary mounting:
4mm
unit, but fix the unit by fastening the bolts after positioning it.
b)
grease
Dont fasten bolts securely for fixing the

-1102+ ,/.2
Multipurpose
Cap Screw Wrench
Move the motor in the arrow direction and adjust the tension of the timing belt engaged to
the cam shaft pulley and motor shaft pulley.
Motor
Motor bracket
Cam
Timing belt
Pulley
Pulley
Fig. U074
Unnecessary
-1102+ ,/.2
NE00040-00
50
Assembly
c)
Adjust the deflection quantity of the belt to 1.6mm by applying the force of 3N (approx.
0.3Kgf) to the center between the shafts. After adjustment, fix the bracket by two CSB M5
x 14mm.
CSB M5 14mm
3N
(0.3Kgf)
Motor bracket
1.6mm
Fig. U075
4mm
-1102+ ,/.2
51
Cap Screw Wrench
NE00040-00
Assembly

a)
Wipe off old grease out of the vertical motion guide stand (#31) and heater vertical motion
plate (#33) by a wiper (or dust-free waste). Apply a coat of grease (EA2) to the V shapeds of
vertical motion guide stand (#31) and heater vertical motion plate (#33).
Vertical motion guide stand (#31)

Fig. U076
Grease
-1102+ ,/.2
b)
EA2
Wipe off old grease out of the cross roller cage and V shaped rails by a wiper (or dust-free
waste). Apply a coat of grease (EA2) to the cross roller cage and V shaped.
Cross roller cage
Fig. U077
V shaped rail
Grease
-1102+ ,/.2
NE00040-00
52
EA2
Assembly
c)
Assemble the cross roller cage between V shaped rails in such a way as the top roller of the
cross roller cage is set in the direction shown in Fig. U080. Arrange the height by applying
the cross roller cage to the stopper lightly.
Roller cage
V shaped rail
Roller
Fig. U078
Unnecessary
-1102+ ,/.2
d)
Loosen two CSB M4 x 14mm which fix the V shaped rails. Apply a preload to the guide by
fastening three HSB M3 x 12mm of the vertical motion guide stand (#31) with the torque of
0.05Nm (approx. 0.5Kgfcm) first time, 0.1Nm (approx. 1.0Kgfcm) second time, and
0.15Nm (approx. 1.5Kgfcm) third time under this condition.
CSB M4 14mm
HSB M3 12mm
Stopper

(#33)
Fig. U079
1.5mm
-1102+ ,/.2
53
Cap Screw Wrench
3mm
Cap Screw Wrench
NE00040-00
Assembly
e)
Fix V shaped rails by six CSB M4 x 14mm.
f)
Fix two HSB M3 x 12mm by two hexagon nuts M3, and lock them by bonding agent (lock
tight No. 648).
CSB M4 14mm
HSB M3 12mm
Stopper
Hexagon nut M3
Hexagon nut M3
Hexagon nut M3

(#33)
Fig. U080
lock tight
3mm
-1102+ ,/.2
g)
Cap Screw Wrench
1.5mm
No. 648
Cap Screw Wrench
Assemble the cross roller cage between V shaped rails. Arrange the height by applying the
cross roller cage to the stopper lightly.
h)
Loosen two CSB M5 x 20mm which fix the V shaped rails. Apply a preload to the guide by
fastening three HSB M3 x 12mm of the pressure holder (#34) with the torque of 0.05Nm
(approx. 0.5Kgfcm) first time, 0.1Nm (approx. 1.0Kgfcm) second time, and 0.15Nm(approx.
1.5Kgfcm) third time under this condition.
Caution
Apply a preload after mounting the pressure plate (#35) to the pressure holder (#34).
Pressure holder (#34)
Stopper
V shaped rail (NSK)
HSB 3 12 (2 pieces)
M3 nut (2 pieces)
Fig. U081
NE00040-00
54
Assembly
HSB M3 12mm
CSB M5 20mm
Fig. U082
1.5mm
-1102+ ,/.2
i)
4mm
Cap Screw Wrench
Cap Screw Wrench
-1102+ ,/.2
Cap Screw Wrench
Fix V shaped rails by four CSB M5 x 20mm.
CSB M5 20mm
Fig. U083
4mm
55
NE00040-00
Assembly
j)
Fix two HSB M3 x 12mm by two hexagon nuts M3, and lock them by bonding agent (lock
tight No. 648).
HSB M3 12mm
Fig. U084
lock tight
1.5mm
-1102+ ,/.2
k)
No. 648
Cap Screw Wrench
Press the block (#67) downward while pressing it to the pin, and fix it by four CSB M4 x
30mm.
CSB M4 30mm
Block (#67)
Pin
Fig. U085
3mm
-1102+ ,/.2
NE00040-00
56
Cap Screw Wrench
Assembly
l)
Fix the heater base (#36) by three CSB M4 x 10mm while pressing against the side face of
heater vertical motion plate(#33).
CSB M4 10mm
Heater base (#36)
Fig. U086
3mm
-1102+ ,/.2
Cap Screw Wrench
m) Mount the spring hooks.
Spring hook
Spring hook
Spring hook
Spring hook
Fig. U087
Unnecessary
-1102+ ,/.2
57
NE00040-00
Assembly
n)
Mount the vertical move unit to the main body base (#1) temporarily by four CSB M6 x
20mm.

Main body base (#1)
Fig. U088
CSB M6 20mm
5mm
-1102+ ,/.2
o)
Cap Screw Wrench
Mount the heat block parallel adjusting jig (J721) to the vertical move unit by four SUS
CSB M4 x 20mm.
SUS CSB M4 20mm
Heat block parallelism

adjusting jig (J721)
Fig. U089
Jig J721
-1102+ ,/.2
NE00040-00
58
heat block parallel

adjusting
3mm
Cap Screw Wrench
p)
Assembly
Adjust the parallelism of the reference plane of main body base (#1) and the side face of heat
block parallelism adjusting jig (J721) is less than 0.01mm by moving the magnet stand
laterally and rotating the adjustment shaft (#56).
Magnet stand
Pick test
Heat block parallelism adjusting jig (J721)
Fig. U091
Fig. U090
-1102+ ,/.2
q)
Bring the heat block up-down motor leftward while applying it to the innermost pin, and fix
it by four CSB M5 x 14mm.
CSB M5 14mm
Pin
Attach this face closely
Fig. U092
4mm
-1102+ ,/.2
59
Cap Screw Wrench
NE00040-00
Assembly
r)
Apply a coat of grease (multi-purpose) to the heat block vertical motion cam.
Heat block vertical

motion cam
Fig. U093
Grease
-1102+ ,/.2
NE00040-00
60
Multipurpose
Assembly

a)
Assemble the male screw and female screw to bearing unit (F) (#1). Lubricate the male
screw with oil (diamond RO-32+ DHC I).
Bearing unit (F) (#1)

Male screw
Fig. U094
-1102+ ,/.2
b)
Bundle wiring cables by nylon clamp (NK-7N) and fix it by two CSB M4 x 6mm.
CSB M4 6mm
Nylon clamp
Nylon clamp
(NK-7N)
(NK-7N)
Fig. U095
3mm
-1102+ ,/.2
61
Cap Screw Wrench
NE00040-00
Assembly
c)
Apply a coat of grease (multi-purpose) to both side faces of linear guide (LM guide).
Reference plane
Lubricate with grease
Fig. U096
grease
-1102+ ,/.2
d)
Multipurpose
Press the reference plane of linear guide (LM guide) down to the doubling plate and mount
the linear guide (LM guide).
Doubling plate
Fig. U097
Unnecessary
-1102+ ,/.2
NE00040-00
62
Assembly
e)
Fix the linear guide (LM guide) by thirteen left CSB M3 x 8mm and eleven right CSB M3 x
8mm.
CSB M3 8mm
Linear guide
Linear guide
(LM guide)
(LM guide)
Fig. U098
Caution
Be careful not to protrude the linear guide (LM guide) from the end face
of the linear rail when mounting the linear guide (LM guide), since no
f)
2.5mm
-1102+ ,/.2
stopper is mounted at both ends.
Cap Screw Wrench
Mount the sensor mounting plate (#13) by four CSB M3 x 4mm.
CSB M3 4mm
(#13)
(#13)
Fig. U099
2.5mm
-1102+ ,/.2
63
Cap Screw Wrench
NE00040-00
Assembly
g)
Put the slide base (F) (#20) at its specified position, and fix it temporarily by eight CSB M3 x
6mm.
CSB M3 6mm
Linear guide
(LM guide)
Linear guide
(LM guide)
Parallel pin
Parallel pin
Slide base (F) (#20)

[Top view]
Fig. U100
Caution
No stopper is mounted on both sides of the linear guide (LM guide).
Be
careful not to protrude the linear guide (LM guide) from the end faces of
2.5mm
the linear rail.

h)
-1102+ ,/.2
Cap Screw Wrench
Fix the slide base (R) (#20) by eight CSB M3 x 6mm while pressing its parallel pin against
linear guide (LM guide).
CSB M3 6mm
Linear guide
[Lateral view]
Fig. U101
Parallel pin
2.5mm
-1102+ ,/.2
NE00040-00
64
Cap Screw Wrench
Assembly
i)
Put the slide base (F) (#20) at the linear guide (LM guide) position, and fix it temporarily by
eight CSB M3 x 6mm.
CSB M3 6mm
Fig. U102
2.5mm
-1102+ ,/.2
j)
Cap Screw Wrench
Fix the slide base (R) (#21) by four CSB M3 x 6mm while pressing its parallel pin against
the linear guide (LM guide).
CSB M3 6mm
Slide base (R) (#21)
Fig. U103
Caution
Be careful not to protrude the linear guide (LM guide) from the end face
of the linear rail when mounting the linear guide (LM guide), since no
2.5mm
stopper is mounted at both ends.
-1102+ ,/.2
65
Cap Screw Wrench
NE00040-00
Assembly
k)
Fix the slide base (F) (#20) and screw mounting block (F) (#5) by two CSB M4 x 30mm. Fix
slide base (R) (#21) and screw block (R) (#12) by two CSB M4 x 30mm.
CSB M4 30mm
CSB M4 30mm

Screw mounting
block (R) (#12)
Screw mounting
block (F) (#5)
Fig. U104
3mm
-1102+ ,/.2
l)
Cap Screw Wrench
Remove the timing pulley and mount a torque gauge. Turn the torque gauge and check if
the torque is less than 0.03Nm (approx 0.3Kgfcm).
Torque gauge
Timing pulley
Fig. U105
-1102+ ,/.2
NE00040-00
66
Torque Gauge
Assembly
m) For adjusting the torque, loosen two CSB M4 x30mm which fix the screw mounting block
(F) (#5). Move the screw mounting block (F) (#5) rightward and leftward by turning the
male screw, fix two CSB M4 x 30mm at the position where the torque has become light, and
check the torque by the torque gauge. Continue adjusting until the torque becomes less
than 0.03Nm (approx. 0.3Kgfcm).
CSB M4 30mm
Torque gauge
Screw mounting block

(F) (#5)
Fig. U106
3mm
-1102+ ,/.2
n)
Torque Gauge
Cap Screw Wrench
Remove the torque gauge and mount the timing pulley without any play in the axial
direction. Check and adjust the torque on the backward rail side in the same way.
Torque gauge
Timing pulley
Fig. U107
Unnecessary
-1102+ ,/.2
67
NE00040-00
Assembly
o)
Mount the timing belt to the rail width motor on front rail and the rear rail width motor and
fix it two CSB M4 x 14mm temporarily.
CSB M4 14mm
Motor bracket
Timing belt
(141P3M6)
Fig. U108
3mm
-1102+ ,/.2
p)
Cap Screw Wrench
Move the motor (motor bracket) in the arrow direction, and adjust the tension of the timing
belt being mounted to the screw shaft and motor shaft pulley.
Fig. U109
Unnecessary
-1102+ ,/.2
NE00040-00
68
Assembly
q)
Fix the motor brackets (#2, #11) by two CSB M4 x 14mm so that the belt is deflected by
1.6mm when applying the force of 2N (approx.0.2Kgf) to the center between both shafts.
CSB M4 14mm
1.6mm
2N (approx. 0.2Kgf)
Motor bracket
(#2, #11)
Fig. U110
3mm
-1102+ ,/.2
r)
Cap Screw Wrench
Mount the slide base (#1) to slide base (F) (#20), and fix it temporarily by four CSB M5 x
10mm.
CSB M5 10mm
Fig. U111
Slide base (#1)
Fig. U112
4mm
-1102+ ,/.2
69
Cap Screw Wrench
NE00040-00
Assembly
s)
Adjust the slide base (R) (#21) face to be flush with the bridge (#1) face and fix them by two
CSB M4 x 30mm.
CSB M4 30mm
Bridge (#1)
Flushing
Flushing
Fig. U113
3mm
-1102+ ,/.2
t)
Cap Screw Wrench
Adjust the slide base (R) (#22) and bridge (#1) to be flush with each other, and fix them by
two CSB M4 x 30mm.
CSB M4 30mm
Bridge (#1)
Flushing
Fig. U114
3mm
-1102+ ,/.2
NE00040-00
70
Cap Screw Wrench
Assembly

a)
1)
Apply a coat of grease (multi-purpose) to both side faces of linear guide (LM guide).
Reference plane
Greasing
Fig. U115
Caution
Be careful not to protrude the linear guide (LM guide) from the
end face of the linear rail when mounting the linear guide (LM
guide), since no stopper is mounted at both ends.
Wipe off old
grease out of the frame feed ball screw and lubricate it with
grease (NSK PS-2).
2)
-1102+ ,/.2
Grease
Grease
Multipurpose
NSK PS-2
Place the reference plane this side, and fix the linear guide (LM guide) by seven CSB M4
x 8mm, while pressing it against the positioning pin of slide base (#1).
CSB M4 8mm
Positioning pin
Positioning pin
Slide base (#1)
After wiping off old grease,

lubricate with new grease.
Fig. U116
3mm
-1102+ ,/.2
71
Cap Screw Wrench
NE00040-00
Assembly
3)
Fix the slide table (#30) by eight CSB M3 x 5mm while pressing it against the linear
guide (LM guide).
CSB M3 5mm
Slide table (#30)
Fig. U117
2.5mm
-1102+ ,/.2
Cap Screw Wrench
b)
1)
Apply a thin coat of grease (multi purpose) to the outer circumference of the ball gauge
and shaft (#38).
Upper pincher block (#41)
Ball gauge
(M4620)
Stand (#39)
Shaft (#38)
Fig. U118
Lower pincher block (#42)
Grease
-1102+ ,/.2
NE00040-00
72
Multipurpose
Assembly
2)
Assemble the ball gauge to lower pincher block (#42).
Outer case
(S6820)
Ball gauge
(M4620)
Upper pincher block (#41)
Fig. U119
Unnecessary
-1102+ ,/.2
3)
After assembling the lower pincher block (#42) to stand (#39), assemble the shaft (#38),
and then, fix them by four SUS HSB M3 x 4mm. Assemble the upper pincher block (#41)
in the same way.
SUS HSB M3 4mm
Stand (#39)
Fig. U120
Fig. U121
1.5mm
-1102+ ,/.2
73
Cap Screw Wrench
NE00040-00
Assembly
4)
Assemble the spring and shaft (#49).
SUS CSB M2 4mm
Stand (#39)
Spring
Spring
(DC-517)
(C-127)
E ring
E ring
Shaft (#49)
Shaft (#49)
Fig. U122
1.5mm
-1102+ ,/.2
5)
Cap Screw Wrench
Mount the stand to body (L) (#50) and fix it temporarily by two SUS M3 x 8mm.
SUS CSB M3 8mm
Stand (#39)
Spring
Spring
(DC-517)
(C-127)
E ring
E ring
Shaft (#49)
Shaft (#49)
Fig. U123
2.5mm
-1102+ ,/.2
NE00040-00
74
Cap Screw Wrench
Assembly
6)
Adjust the body (L) (#50) and stand (#50) to be flush with each other and fix them by two
SUS CSB M3 x 8mm while pressing them downward.
SUS CSB M3 8mm
Press the stand (#39) down to

the body (L) (#50)
Body (L) (#50)

Join the faces to be flush with
each other.
Stand (#39)
Fig. U124
2.5mm
-1102+ ,/.2
7)
Cap Screw Wrench
Mount the stepping motor to body (L) (#50) and fix it by three CSB M3 x 6mm.
CSB M3 6mm
Stepping motor
TS3214N59
Fig. U125
2.5mm
-1102+ ,/.2
75
Cap Screw Wrench
NE00040-00
Assembly
8)
Mount the cam to the stepping motor , adjust it to set to the center of cam follower, and fix
it by two HSB M4 x 4mm.
HSB M4 4mm
Stepping motor
Fig. U126
2mm
9)
-1102+ ,/.2
Cap Screw Wrench
-1102+ ,/.2
Cap Screw Wrench
Mount the micro photo sensor and fix it by two CSB M2 x 6mm.
HSB M2 6mm
Micro photo sensor
Fig. U127
1.5mm
NE00040-00
76
Assembly
10) Mount the lower index pincher (L)(#54)to lower pincher arm (#48), and fix it temporarily
by two SUS CSB M2 x 4mm.
SUS CSB M2 4mm
Lower pincher arm (#48)
Fig. U128
1.5mm
-1102+ ,/.2
Cap Screw Wrench
c) Mount the body (L) (#50) to the slide table (#30), and adjust them to be flush with each other.
Fix the body (L) by three CSB M3 x 6mm while pressing it against the reference plane of
slide table (#30). Adjust the right index pincher in the same way.
CSB M3 6mm
Slide table (#30)

Reference plane
Body (L) (#50)
Press down
Adjust them to be flush with each other.
Fig. U129
2.5mm
-1102+ ,/.2
77
Cap Screw Wrench
NE00040-00
Assembly
d)
Mount the slide table (#30) to housing (#61), and fix it by three CSB M4 x 45mm.
CSB M4 45mm
Screw housing (#61)
Fig. U130
3mm
-1102+ ,/.2
e)
Cap Screw Wrench
Mount the upper guide rail (#10) to lower guide rail (#11). Insert the pressure pin (#16) from
the upper guide rail (#10) side, set the collar (#17) to pressure pin (#16), and fix it by
E-retaining pin.
Pressure pin (#16)

Upper guide rail (#10)
Lower guide rail (#11)
Collar (#17)
Fig. U131
E ring
-1102+ ,/.2
NE00040-00
78
Assembly
f)
1)
Mount the front rail to slide block (#20). Input the spring into adjustment shaft (#12)
and assemble it to the slide block (#20) and front rail. Insert the collar (#13) and fix with
one CSB M2 x 4mm.
CSB M2 4mm

Spring
(C204)
Collar (#13)
Front rail
Slide block (#20)
Fig. U132
1.5mm
-1102+ ,/.2
2)
Cap Screw Wrench
After fastening the mini ball plunger, rotate the adjustment shaft (#12) until a click is
heard, and fix it by one hexagon low nuts M5. Hook the spring to spring hook (L).
Adjust the unloader side in the same way.
Hexagon low nut M5
Miniature ball plunger
Spring
(E649)
Spring hook (L)
Fig. U133
Caution
Dont fasten the mini ball plunger excessively, otherwise the adjustment
shaft (#12) does not rotate.
-1102+ ,/.2
79
NE00040-00
Assembly
3)
Bundle the left index pincher side motor cable and micro photo sensor cable by nylon
clamp (NK-5N) and fix them by one CSB M4 x 6mm.
CSB M4 6mm
Nylon clamp
(NK-5N)
Fig. U134
Caution
Dont allow wiring to touch the micro photo sensor.

4)
3mm
-1102+ ,/.2
Cap Screw Wrench
Bundle the right and left index pincher open/close motor cable and micro photo sensor
cable by wire clamp (#68) and fix them by two CSB M3 x 6mm
CSB M3 6mm
Wire clamp (#68)
Fig. U135
Caution
Dont allow wiring to touch the micro photo sensor.
NE00040-00
80
2.5mm
-1102+ ,/.2
Cap Screw Wrench
Assembly
5)
Mount the origin sensor to slide base (#1) and fix it by two hexagon socket head button
bolts (screws) M3 x 6mm.
Slide base (#1)
Origin sensor
Main body cover (Front)
Fig. U136
2mm
-1102+ ,/.2
6)
Cap Screw Wrench
Fix the plate (#63) and screw housing (#61) by three hexagon socket head button bolts
(screws) M4 x 6mm.
Screw housing (#61)
Plate (#63)
Fig. U137
2.5mm
-1102+ ,/.2
81
Cap Screw Wrench
NE00040-00
Assembly
g)
Fix JBP-313A small board to plate (#63) by two CSB M3 x 6mm with flat washers and
connect wiring connectors PJ1,PJ2,PJ19, PJ20 to the JBP-313A small board.
CSB M3 6mm with flat washer
JBP-313A small board
Fig. U138
2.5mm
-1102+ ,/.2
h)
Cap Screw Wrench
Adjust the height of the upper face of the rail on this side from the lower face of the main
body base. Adjust the height to be 201.650.05mm by turning the eccentric shaft (#21).
Front rail
Eccentric shaft (#21)
Eccentric shaft
201.650.05
(#21)
Fig. U139
1.5mm
-1102+ ,/.2
NE00040-00
82
Cap Screw Wrench
Assembly
i)
Adjust the height of the upper face of the rear rail from the lower face of the main body base
to 208.550.05mm by turning the eccentric shaft (#8).
Rear rail
Eccentric shaft (#8)
Eccentric shaft
208.550.05
(#8)
Fig. U140
-1102+ ,/.2
()
Driver
j)
1)
Fix the thermostat to the heater base by two CSB M3 x 5mm.
CSB M3 5mm
Heater base
Thermostat
Fig. U141
2.5mm
-1102+ ,/.2
83
Cap Screw Wrench
NE00040-00
Assembly
2)
Fix the stand cover (#42) to vertical motion guide stand (#31) by two chrome-3 plated
hexagon socket head button bolts (screws) M3 x 6mm.
Stand cover (#42)
Vertical motion guide stand (#31)
Fig. U142
2mm
-1102+ ,/.2
3)
Cap Screw Wrench
Fix the cover (#30) to the stand cover (#42) by two SUS CSB M3 x 4mm.
SUS CSB M3 4mm
Stand cover (#42)
Cover (#30)
Fig. U143
2.5mm
-1102+ ,/.2
NE00040-00
84
Cap Screw Wrench
Assembly
4)
Assemble the heater and Thermocouple to the heat block and fix it by three HSB M3 x
3mm.
HSB M3 3mm
Heater
Thermocoup
Heater
Heat block
Fig. U144
1.5mm
-1102+ ,/.2
5)
Cap Screw Wrench
Assemble the ground wire to the heat block and fix it by one CSB M3 x 5mm.
CSB M3 5mm
Ground wire
Fig. U145
2.5mm
-1102+ ,/.2
85
Cap Screw Wrench
NE00040-00
Assembly
6)
Fix the ceramic plate by two CSB M4 x 16mm and two CSB M4 x 14mm while pressing it
down in such a way as no gap exists at 2 points on the heater base.
CSB M4 16mm
CSB M4 14mm
Ceramic plate
Assemble the ceramic plate

in such way as no gap exists
between the ceramic plate
and the heater base.
Heater base
Fig. U146
Assemble the ceramic plate
in such way as no gap exists
between the ceramic plate
and the heater base.
Caution
Assemble the ceramic plate in such way as no gap exists between the
3mm
ceramic plate and the heater base.

7)
-1102+ ,/.2
Cap Screw Wrench
Press the heat spacer press to the stopper of the heat block.
Heat block
Stopper
Fig. U147
Unnecessary
-1102+ ,/.2
NE00040-00
86
Assembly
8)
Fix it by four CSB M2.6 x 6mm.
CSB M2.6 6mm
Fig. U148
2mm
-1102+ ,/.2
9)
Cap Screw Wrench
Fix the heater wiring, vacuum wiring, CA wiring, and thermostat wiring by wire clamp
(#45).
CSB M3 4mm
Wire clamp (#45)
Wire clamp (#45)
Fig. U149
2.5mm
-1102+ ,/.2
87
Cap Screw Wrench
NE00040-00
Assembly
k)
1)
Mount the rail width adjusting jig (J714) to the heat spacer.
Rear rail
Rail parallelism adjusting jig
(J714)
Front rail
Fig. U150
Jig J714
-1102+ ,/.2
2)
Rail width
adjusting jig
Move the front rail and check if the rail side face touches (if it is in parallel with) both end
faces of the rail width adjusting jig (J714). If not (if not in parallel), adjust it by turning
the eccentric shaft A.
3)
Fix the slide base (#1) by four CSB M5 x 10mm.
Front rail

(J714)
Rail on this side

CSB M5 10mm
Eccentric shaft A
Fig. U151
Jig J714
-1102+ ,/.2
NE00040-00
88
rail width
adjusting jig
4mm
Cap Screw Wrench
Assembly
4)
Move the rear rail and check if the rail side face touches (if it is in parallel with) both end
faces of the rail width adjusting jig (J714). If not (if not in parallel), loosen one CSB M4
x 12mm and adjust it by turning the eccentric shaft B. After adjustment, fix the CSB
M4 x 12mm.
Eccentric shaft B
CSB M4 12mm
Rear rail

(J714)
Front rail
Jig J714
Fig. U152
-1102+ ,/.2
rail width
adjusting jig
3mm
Cap Screw Wrench
l)
1)
Loosen four CSB M3 x 10mm which fix the lateral lower pincher arm (#48). Insert the
index pincher adjusting jig (J124) between the rail and the pincher, and fix the lower
pincher arm (#48).
Front rail
0.5mm
Index pincher adjusting jig

(J124)
Lower pincher
Lower pincher arm (#48)
CSB M3 10mm
Fig. U153
Jig J124
-1102+ ,/.2
89
index
pincher adjusting jig
2.5mm
Cap Screw Wrench
NE00040-00
Assembly
2)
Rotate the index pincher cam (#32) to adjust the lower pincher to the highest position.
Insert the pin of the index pincher vertical positioning block jig (J719) at the position
where the lower pincher is the highest so that the index pincher does not rotate.
Index pincher vertical positioning block

(J719)
Fig. U154
Jig J719
-1102+ ,/.2
3)
Index pincher vertical

positioning block jig
Loosen four SUS CSB M2 x 4mm which fix the lower index pincher. Mount the index
pincher height adjusting jigs (J717,718) to the guide rail (#10).
SUS CSB M2 4mm
Index pincher height

Guide rail (#10)
Index pincher height

Fig. U155
-1102+ ,/.2
NE00040-00
90
Jig J717
Jig J718
index pincher height

adjusting jigs

adjusting jigs
1.5mm
Cap Screw Wrench
Assembly
4)
Press the lower index pincher (#44) down to the index pincher height adjusting jig (J717)
and fix two SUS CSB M2 x 4mm.
SUS CSB M2 4mm
(J717)
Lower index pincher

(#44)
Fig. U156
Jig J717
-1102+ ,/.2
5)

adjusting jigs
1.5mm
Cap Screw Wrench
Press the lower index pincher (#54) down to the index pincher height adjusting jig (J718),
adjust the pitch between both index pinchers to 1550.5mm, and fix two SUS CSB M2 x
4mm.
SUS CSB M2 4mm
(J718)
Lower index pincher

(#54)
Fig. U157
1550.5mm
Jig J718
-1102+ ,/.2
91

adjusting jigs
1.5mm
Cap Screw Wrench
NE00040-00
Assembly
6)
Fix the right and left upper pinchers temporarily, insert the index pincher adjusting jig
(J124) between the rail and pinchers, and fix the upper pincher (#47) by two SUS CSB M3
x 10mm, or, 4 pieces in total. After fixing the upper pincher arm (#47), remove the index
pincher adjusting jig (J124).
SUS CSB M3 10mm
Upper pincher arm (#47)
Index pincher adjusting jig (J124)

Front rail

positioning block (J719)
Fig. U158
Jig J124
-1102+ ,/.2
7)
index
pincher adjusting jig
2.5mm
Cap Screw Wrench
Loosen two SUS CSB M2 x 4mm which fix the upper index pincher (#43). Adjust the
right end face to be flush with lower pincher (#44) and fix it by two SUS CSB M2 x 4mm.
8)
Loosen two SUS CSB M2 x 4mm which fix the upper index pincher (#53). Adjust the left
end face to be flush with lower pincher (#54) and fix it by two SUS CSB M2 x 4mm.
SUS CSB M2 4mm
Upper index pincher (#53)

Upper index pincher (#43)
Lower pincher (#54)
Adjust to be flush
with each other
Lower pincher (#44)
Fig. U159
Caution
After adjustment, remove index pincher vertical positioning block jig

1.5mm
(J719).
NE00040-00
-1102+ ,/.2
92
Cap Screw Wrench
Assembly
m) Fix the pre heat plate and after heat plate by two chrome-3 plated CSB M4 x 10mm.
Pre heat plate
After heat plate
Fig. U160
3mm
-1102+ ,/.2
93
Cap Screw Wrench
NE00040-00
Assembly

a)
If the vertical move unit of RPS-01 has a play, fasten two plungers with the torque of
0.06Nm (0.6Kgfcm) by a torque driver.
Plunger
RPS-01
Fig. U161
Caution
Perform adjustment so that the vertical move unit of RPS-01 operates up

and down smooth without any play.
b)
-1102+ ,/.2
Fix MS-235 to RPS-01 temporarily by two SUS CSB M2 x 6mm.
SUS CSB M2 6mm
MS-235
Fig. U162
1.5mm
-1102+ ,/.2
NE00040-00
94
Cap Screw Wrench
Assembly
c)
Adjust the side face of MS-235 to be flush with RPS-01 by pressing down. Fix MS-235
temporarily by two CSB M2 x 6mm after pressing it down.
SUS CSB M2 6mm
MS-235
Adjust the faces to be
flush with each other
RPS-01
Fig. U163
1.5mm
-1102+ ,/.2
d)
Cap Screw Wrench
Bundle the wiring cables by nylon clamp (NK-5N), and fix them by one CSB M3 x 8mm.
CSB M3 8mm
Nylon clamp
(NK-5N)
Fig. U164
2.5mm
-1102+ ,/.2
95
Cap Screw Wrench
NE00040-00
Assembly
e)
Assemble the reference unit to UF-79A, press it down to slide base (#1), and fix it by two
CSB M4 x 16mm.
CSB M4 16mm
Reference unit
Slide base (#1)
Fig. U165
3mm
-1102+ ,/.2
f)
Cap Screw Wrench
Bundle the wiring cable and piping of the reference unit by nylon clamp (NK-5N), and fix
them to slide base (#1) by CSB M4 x 6mm.
CSB M4 6mm
Reference unit
Slide base (#1)
Nylon clamp
(NK-5N)
Fig. U166
3mm
-1102+ ,/.2
NE00040-00
96
Cap Screw Wrench
g)
Assembly
Connect connector P2 to the reference unit illumination relaying plate.
Connector P2
Reference unit illumination

relaying plate
Fig. U167
Unnecessary
-1102+ ,/.2
97
NE00040-00
Assembly

a)
Connect connectors PJ21,PJ22,PJ23,PJ24 to JBP-313A board.

Bundle the wiring cables of PJ9,PJ17,PJ18,PJ21,PJ22, PJ23,PJ24,PJ25,PJ26 by nylon
clamp (NK-10N), and fix them by one CSB M4 x 4mm.
Bundle the wiring cables of PJ9,PJ17,PJ18,PJ21,PJ22,PJ23,PJ24,PJ25,PJ26 by cable tie.
CSB M4 4mm
Nylon clamp
(NK-10N)
Cable tie
Cable tie
Connection of
connectors
Fig. U168
PJ9,PJ17,PJ18,PJ
21, PJ22, PJ23,
PJ24, PJ25, PJ26
3mm
-1102+ ,/.2
b)
Cap Screw Wrench
Mount the cable cover to JBP-313A small board and fix it by two SUS CSB M3 x 4mm.
SUS CSB M3 4mm
Cable cover
JBP-313A small board

Fig. U169
2.5mm
-1102+ ,/.2
NE00040-00
98
Cap Screw Wrench
Assembly
c)
Mount screw cover (#14) and fix it by two CSB M3 x 6mm each, or, 4 pieces in total.
CSB M3 6mm
Screw cover (#14)
Screw cover (#14)
Fig. U170
2.5mm
-1102+ ,/.2
d)
Cap Screw Wrench
Mount the main body cover (front) by inserting it to the innermost.
Main body cover

(front)
Fig. U171
Unnecessary
-1102+ ,/.2
99
NE00040-00
Assembly
e)
Mount the main body cover (rear) by inserting it to the innermost.
Main body cover (rear)
Fig. U172
Unnecessary
-1102+ ,/.2
f)
Mount the ball screw cover (#67), and fix it by two chrome-3 plated hexagon socket head
button bolts (screws) M4 x 4mm.
Chrome- 3 plated hexagon socket head button bolts (screws) M4 4mm
Ball screw cover (#67)
Fig. U173
2.5mm
-1102+ ,/.2
NE00040-00
100
Cap Screw Wrench
Assembly

a)
1)
Move the heat block to the bottom point by turning the heater vertical motion cam (#13).
Insert HB,WP vertical origin adjusting pin (J716) into 2mm hole of heater vertical
motion cam (#13), and fix the cam.
HB,WP vertical origin adjusting pin (J716)
Heater vertical motion cam

(#13)
Fig. U174
Jig J716
-1102+ ,/.2
2)
HB,WP origin
adjusting pin
Supply the power to the heater vertical origin sensor, and loosen one HSB M3 x 3mm of
the innermost sensor cam (#15) mounted to the motor shaft. Fix one HSB M3 x 3mm
when the LED of origin sensor 1 lights at the right edge as viewed form the indexer front
by turning the sensor cam.
HSB M3 3mm
Sensor cam (#15)
Origin sensor 1
Fig. U175
1.5mm
-1102+ ,/.2
101
Cap Screw Wrench
NE00040-00
Assembly
3)
Power is supplied when this mother board is connected to an optional connector.
Connect to an
unoccupied
connector.
Fig. U176
15V power supply
Unnecessary
-1102+ ,/.2
4)
Draw HB,WP vertical origin adjusting pin (J716) out of heater vertical motion cam (#13),
insert HB,WP vertical origin adjusting pin (J716) again into the other 2mm hole by
turning the cam clockwise by 90and then, fix the cam.
Heater vertical
motion cam (#13)
Sensor cam (#15)
Origin sensor 2
Fig. U177
Jig J716
-1102+ ,/.2
NE00040-00
102
HB,WP origin
adjusting pin
Assembly
5)
Loosen one HSB M3 x 3mm of the sensor cam (#15) on front side mounted to the motor
shaft. Fix one HSB M3 x 3mm when the LED of origin sensor 2 lights at the right edge
as viewed form the indexer front by turning the sensor cam.
HSB M3 3mm
Sensor cam (#15)
Origin sensor 2
Fig. U178
1.5mm
-1102+ ,/.2
Cap Screw Wrench
b)
1)
Align 2mm slit of bearing unit (#21) with the 2mm hole of lead clamper vertical cam
(#22) by turning the lead clamper vertical cam (#22).
Insert HB,WP vertical origin
adjusting pin (J716) into the 2mm hole and then, fix the cam.
Lead clamper vertical cam (#22)
Bearing unit (#21)

HB,WP vertical origin adjusting pin
(J716)
Fig. U179
Jig J716
-1102+ ,/.2
103
HB,WP origin
adjusting pin
NE00040-00
Assembly
2)
Loosen one HSB M3 x 3mm of sensor cam (#24). Fix one HSB M3 x 3mm when LED of
the origin sensor lights at the position shown in Fig.U180 by turning the sensor cam
(#24).
HSB M3 3mm
Sensor cam(#24)
Fig. U180
Origin sensor
1.5mm
-1102+ ,/.2
Cap Screw Wrench
c)
1)
Turn the lower index pincher cam (#32) to set it at the position where the lower pincher
and upper pincher are open to the maximum. Insert the pin of index pincher vertical
positioning block (J719) into 2mm hole of index pincher cam (#32) so that the cam does
not rotate.
Lower index pincher cam (#32)
Index pincher vertical positioning block (J719)

Fig. U181
Jig J719
-1102+ ,/.2
NE00040-00
104

positioning block jig
Assembly
2)
Loosen two HSB M3 x 3mm of the sensor plate mounted to the motor shaft. Turn the
sensor plate until the LED lights, and fix two HSB M3 x 3mm.
HSB M3 3mm
Sensor plate (#33)
Fig. U182
Origin sensor
1.5mm
-1102+ ,/.2
Cap Screw Wrench
d)
1)
Mount the rail width adjusting jig (J714) to the heat block. Move the front rail and rear
rail to the heat block side, and perform adjustment so that the rails touch the rail width
adjusting jig (J714).
Rear rail
Rail width adjusting jig (J714)
Front rail
Fig. U183
Jig J714
-1102+ ,/.2
105
Rail width
adjusting jig
NE00040-00
Assembly
2)
Loosen two CSB M3 x 4mm, or, 4 pieces in total which fix the sensor plate (#4). Fix the
sensor plate by two CSB M3 x 4mm, or, 4 pieces in total when the front rail and rear rail
origin sensors light on.
CSB M3 4mm
Origin sensor
Origin sensor
Fig. U184
Sensor plate (#9)

Sensor plate (#9)
2.5mm
-1102+ ,/.2
NE00040-00
106
Cap Screw Wrench
Assembly

a)
1)
Fix the arm base (#77) temporarily by two SUS CSB M5 x 16mm.
SUS CSB M5 16mm
Arm base (#77)
Fig. U185
4mm
-1102+ ,/.2
2)
Cap Screw Wrench
Remove two chrome-3 plated CSB M3 x 10mm each, or, 4 pieces in total, and remove the
arm block.
Arm block
Fig. U186
2.5mm
-1102+ ,/.2
107
Cap Screw Wrench
NE00040-00
Assembly
b)
1)
Align the 2mm slit of bearing unit (#21) with 2mm hole of the lead clamper vertical
cam (#22) by turning the lead clamper vertical cam (#22). Fix the cam by inserting HB,
WP vertical origin adjusting pin (J716) into 2mm hole.
Lead clamper vertical cam (#22)
Bearing unit (#21)

HB,WP vertical origin adjusting pin
(J716)
Fig. U187
Jig J716
-1102+ ,/.2
2)
HB,WP origin
adjusting pin
Adjust the relative height difference of faces A and B of arm base (#77) to be less than
0.03mm by turning the eccentric pin (See Fig.U189). After the relative height difference
of faces A and B of arm base (#77) has been adjusted to be less than 0.03mm, fix two SUS
CSB M5 x 16mm (See Fig.U189).
Face A
Face B
218.20.03
Arm base (#77)
[Front view]
Fig. U188
Jig J716
4mm
-1102+ ,/.2
NE00040-00
108
Cap Screw Wrench
HB,WP origin
adjusting pin
Assembly
3)
Loosen one HSB M4 x 4mm which fixes cover vertical eccentric shaft (#40). Adjust the
cover vertical eccentric shaft (#40) by turning it so that the height of faces A and B of arm
base (#77) from the lower face of the main body base becomes 218.20.03mm.
HSB M4 4mm
SUS CSB M5 16mm
Arm base (#77)
[Rear view]
Eccentric pin
Cover vertical eccentric shaft (#40)
Fig. U189
Jig J716
-1102+ ,/.2
4)
2mm
Cap Screw Wrench
HB,WP origin
adjusting pin
After the height of faces A and B of arm base (#77) has become 218.20.03mm, fix the
cover vertical eccentric shaft by one HSB M4 x 4mm. Remove the HB,WP vertical origin
adjusting pin (J716).
HSB M4 4mm
Fig. U190
Jig J716
-1102+ ,/.2
109
2mm
Cap Screw Wrench
HB,WP origin
adjusting pin
NE00040-00
Assembly

a)
1)
Set the spring and steel ball to ball holder (#63), mount the ball cover (#66), and adjust
them to be flush with each other.
Be flush with each other
Ball cover (#66)

Ball holder (#63)
Fig. U191
Caution
For adjusting to be flush with each other, use a surface plate or a block
gauge.
2)
Option
-1102+ ,/.2
Block gauge
-1102+ ,/.2
Cap Screw Wrench
Fix the arm block by one chrome-3 plated CSB M2.6 x 6mm.
Fig. U192
2mm
NE00040-00
110
Assembly
3)
Mount the receiving plate (#64) and pressure plate (#65) to the ball holder (#63).
Ball holder (#63)
Receiving plate (#64)

Fig. U193
Unnecessary
-1102+ ,/.2
4)
Fix them by one chrome-3 plated CSB M2.6 x 6mm.
Fig. U194
2mm
-1102+ ,/.2
111
Cap Screw Wrench
NE00040-00
Assembly
5)
Mount the arm block (L) to ball holder (#63) and adjust them to be flush with each other.
Adjust to be flush with each other
Arm block (L)

Ball holder (#63)
Fig. U195
Caution
gauge.
6)
Option
-1102+ ,/.2
Block gauge
-1102+ ,/.2
Cap Screw Wrench
Fix the arm block by two chrome-3 plated CSB M2.6 x 12mm.
Fig. U196
2mm
NE00040-00
112
Assembly
7)
Set the steel ball to the upper reference ball holder (#61), mount the leaf spring (plate
spring) (#83), and assemble them to the arm bock (L).
Leaf spring (plate spring) (#83)

Ball holder (#63)
Fig. U197
Upper reference ball holder (#61)
Unnecessary
-1102+ ,/.2
8)
Adjust the rear face to be flush with each other while pressing the upper reference ball
holder(#61) against the ball holder (#63). Fix them by one chrome-3 plated CSB M2.6 x
6mm.
Ball holder (#63)
Upper reference ball holder (#61)
Fig. U198
Caution
For adjusting to be flush with each other, use a surface plate or

a block gauge.
-1102+ ,/.2
113
2mm
Cap Screw Wrench
option
Block gauge
NE00040-00
Assembly
b)
1)
Mount the receiving plate (#64) and pressure plate (#65) to the lateral reference ball
holder (#62).
Lateral reference holder

(#62)
Receiving plate
(#64)

Fig. U199
Unnecessary
-1102+ ,/.2
2)
Fig. U200
2mm
-1102+ ,/.2
NE00040-00
114
Cap Screw Wrench
Assembly
3)
Mount the steel ball to the lateral reference ball holder (#62), mount it to the arm block
(R), and then, adjust them to be flush with each other.
Arm block (R)
Lateral reference ball holder (#62)

Fig. U201
Caution
gauge.
4)
Option
-1102+ ,/.2
Block gauge
-1102+ ,/.2
Cap Screw Wrench
Fix them by two chrome-3 plated CSB M2.6 x 12mm.
Chrome-3 plated CSBM2.6 12mm
Fig. U202
2mm
115
NE00040-00
Assembly
5)
Set the steel ball to the upper reference ball holder, mount the leaf spring (plate spring)
(#83), and assemble them to the arm bock (R).
Leaf spring (plate spring) (#83)
Fig. U203
Unnecessary
-1102+ ,/.2
6)
Press the upper reference ball holder (#61) to the lateral reference ball holder (#62) and
adjust their rear faces to be flush with each other.
Lateral reference ball holder (#62)

Upper reference
ball holder (#61)
Rear face
Fig. U204
Caution
gauge.
NE00040-00
-1102+ ,/.2
116
Option
Block gauge
Assembly
7)
Fig. U205
2mm
-1102+ ,/.2
c)
Cap Screw Wrench
Mount arm blocks (R), (L) to the arm base and fix them by two chrome-3 plated CSB M3 x
10mm, or, 4 pieces in total.
Arm block (R)
Arm block (L)
Fig. U206
2.5mm
-1102+ ,/.2
117
Cap Screw Wrench
NE00040-00
Mounting
(1) Mount the universal indexer to the machine main body (2) Fixing of loader side
(D) Mounting method

Mount the assembled universal indexer unit to the wire bonder UTC-1000 main body.
(1) Mount the universal indexer to the machine main body

Mount the universal indexer to the wire bonder main body, and press it against the positioning
plate slowly by inserting it from the front face to the left innermost.
10(UF assembly size
Use J742)
Fig. U208
BP
See Fig. U208
UF
230(UF assemble size
Use J742)
Fig. U207
Unnecessary
-1102+ ,/.2
(2) Fixing of loader side

Fix the loader side by two CSB M6 x 20mm.
CSB M6 20mm
Fig. U209
5mm
-1102+ ,/.2
NE00040-00
118
Cap Screw Wrench
(3) Fixing of unloader side
Mounting
(4) Piping of reference unit
(3) Fixing of unloader side

Fix the unloader side by two CSB M6 x 20mm.
CSB M6 20mm
Fig. U120
5mm
-1102+ ,/.2
Cap Screw Wrench
(4) Piping of reference unit

Connect the reference system (RPS) piping mounted below the flowmeter.
Reference system piping
Fig. U121
Unnecessary
-1102+ ,/.2
119
NE00040-00
Mounting
(5) Vacuum piping
(6) Connection of connectors
(5) Vacuum piping

Connect the vacuum piping.
Vacuum piping
Fig. U212
Unnecessary
-1102+ ,/.2

a)
Connect two connectors of AC motor (MD-21).
b)
Connect P2 connector to the reference system.
P2
AC motor connector
Fig. U213
Unnecessary
-1102+ ,/.2
NE00040-00
120
Mounting
c)
Connect P1 connector.
d)
Connect PJ9,PJ17,PJ18, PJ25, PJ26 connectors.
P1
PJ9, PJ17, PJ18, PJ25, PJ26
Fig. U214
Unnecessary
-1102+ ,/.2
e)
Fix the ground wire by one CSB M4 x 6mm.
CSB M4 6mm
Fig. U215
3mm
-1102+ ,/.2
121
Cap Screw Wrench
NE00040-00
Adjustment
3.
(1) Open the front door of the machine main body (2) Removal of front cover
Adjustment after assembling the main body

(A) Origin adjustment of AC servo motor
(1) Open the front door of the machine main body
Open the front door of the machine main body.
Left side of front door
Right side of front door
Fig. U216
Unnecessary
-1102+ ,/.2
(2) Removal of front cover

Remove the front cover of the EPU chassis by loosening six cross-recessed pan head screws M4 x
8mm.
Cross-recessed pan head screw M4 8mm
Fig. U217
-1102+ ,/.2
NE00040-00
122
()
Driver
(3) Removal of universal indexer cover
(4) Loosen the coupling screws
Adjustment
(3) Removal of universal indexer cover

Loosen three chrome-3 plated hexagon socket head button bolts (screws) M4 x 4mm and remove
the universal indexer cover.
Fig. U218
2.5mm
-1102+ ,/.2
Cap Screw Wrench
-1102+ ,/.2
Cap Screw Wrench
(4) Loosen the coupling screws

Loosen two HSB M4 x 5mm which fix the ball screw side of the coupling.
HSB M4 5mm
Ball screw
MD-21
Fig. U219
Coupling
2mm
123
NE00040-00
Adjustment
(5) Disconnect the AC servo motor connector
(6) Turn on the POWER switch
(5) Disconnect the AC servo motor connector

Disconnect the connector (4 pins white) of AC servo motor (MD-21).
AC servo motor connector

(4 pins, white)
Fig. U220
Unnecessary
-1102+ ,/.2
(6) Turn on the POWER switch

Turn on the POWER ON switch.
POWER ON switch
POWER OFF switch
Fig. U221
Unnecessary
-1102+ ,/.2
NE00040-00
124
(7) Click DRIVE (D)
Adjustment
(8) Click [Buzzer stop]
(7) Click DRIVE (D)

Left-click DRIVE being displayed in the dialog box.
Fig. U222
Unnecessary
-1102+ ,/.2
(8) Click [Buzzer stop]

Left-click Buzzer stop, since a lead frame index origin error occurs.
Fig. U223
Unnecessary
-1102+ ,/.2
125
NE00040-00
Adjustment
(9) Adjustment of left index pincher
(10) Adjustment of pitch feed origin sensor
(9) Adjustment of left index pincher

Bring the left end face of the left index pincher to 25mm from the left end face of rail on the
loader side.
Index pincher
25mm
Front rail
Fig. U224
Unnecessary
-1102+ ,/.2
(10) Adjustment of pitch feed origin sensor

Loosen two CSB M3 x 5mm which fix the sensor plate (#9). Fix the pitch feed origin sensor by
two CSB M3 x 5mm at the position where its LED has changed from ON to OFF.
CSB M3 5mm
Sensor plate (#9)
Origin sensor
Fig. U225
2.5mm
-1102+ ,/.2
NE00040-00
126
Cap Screw Wrench
(11) LED ON
Adjustment
(12) Fixing of coupling
(11) LED ON
On LED of FCP board by turning the coupling.
FCP board
LED ON
Fig. U226
Unnecessary
-1102+ ,/.2
(12) Fixing of coupling

Fix the coupling by two HSB M4 x 5mm on its ball screw side.
HSB M4 5mm
Fig. U227
2mm
-1102+ ,/.2
127
Cap Screw Wrench
NE00040-00
Adjustment
(13) Click Shut down
(14) Turn off the POWER switch
(13) Click Shut down

Left-click Shut down being displayed in the dialog box.
Fig. U228
Unnecessary
-1102+ ,/.2
(14) Turn off the POWER switch

Turn off the power supply by pressing POWER OFF switch.
POWER ON switch
POWER OFF switch
Fig. U229
Unnecessary
-1102+ ,/.2
NE00040-00
128
(15) Connection of connector of AC servo motor
Adjustment
(16) Mounting of universal indexer
(15) Connection of connector of AC servo motor

Connector the connector (4-pin white) of AC servo motor (MD-21).
Connector for AC servo motor

(4-pin, white)
Fig. U230
Unnecessary
-1102+ ,/.2
(16) Mounting of universal indexer cover

Fix the universal indexer cover by three chrome-3 plated hexagon socket head button bolts
(screws) M4 x 4mm.
Fig. U231
2.5mm
-1102+ ,/.2
129
Cap Screw Wrench
NE00040-00
Adjustment
(1) Transfer of lead frame
(2) Setting of setting value of heat block
(B) Adjustment heat block height

(1) Transfer of lead frame
Transfer the lead frame to the bonding stage.
(2) Setting of setting value of heat block

a)
After pulling down Machine management of the menu bar, click Machine specific and
then click Indexer adjustment (F).
Fig. U232
Caution
Perform the indexer adjustment (setting of origin setting value) without

-1102+ ,/.2
fail before starting work.

b)
Unnecessary
Set the setting value of the Heater block (M) being displayed in the dialog box to 0, click
OK.
Fig. U233
Unnecessary
-1102+ ,/.2
NE00040-00
130
Adjustment
(3) Bond level setting
(3) Bond level setting

a)
After pulling down from Edit (E) of menu bar, click Bond level Set.
Fig. U234
Unnecessary
-1102+ ,/.2
b)
Click Lead.
c)
Change the illumination to be able to see lead clearly on the screen.
d)
Enter the chessman mode by right clicking.
e)
Set the cross mark at the screen center to the lead side.
f)
Exit chessman mode by right-clicking.
g)
Click Auto set (A).
Fig. U235
Unnecessary
-1102+ ,/.2
131
NE00040-00
Adjustment
(4) Adjustment heat block height

Adjust the heat block height if the bond level setting value does not meet 90050.
a)
After loosening two SUS CSB M6 x 12mm, transfer the operation panel (SWU-182) to the
maintenance position during machine adjustment.
SUS CSB M6 12mm
Normal fixed position of operation

panel
Fixed position during maintenance
of operation panel
Fig. U236
5mm
-1102+ ,/.2
Fixed position during maintenance of

operation panel
Fig. U237
NE00040-00
132
Cap Screw Wrench
Adjustment
b)
Open the front door by removing one CSB M4 x 5mm which fixes the front door of the
indexer.
CSB M4 5mm
Fig. U238
3mm
-1102+ ,/.2
c)
Cap Screw Wrench
Remove the main body cover (front) by drawing it out this side.
Fig. U239
Unnecessary
-1102+ ,/.2
133
NE00040-00
Adjustment
d)
Insert a 3mm T-wrench from the left side of the indexer and loosen one chrome-3 plated
CSB M4 x 16mm mounted at the innermost.
Loader side
As viewed from the left side of machine
Fig. U240
-1102+ ,/.2
e)
Turn the heater vertical eccentric shaft (#38) by a minus screwdriver.
JPB313A small board
Heater vertical eccentric shaft

(#38)
Fig. U241
-1102+ ,/.2
NE00040-00
134
()
Driver
Adjustment
f)
Insert a 3mm T-wrench from the left side of the indexer and fix one chrome-3 plated CSB
M4 x 16mm mounted at the innermost.
Loader side
As viewed from the left side of machine
Fig. U242
-1102+ ,/.2
g)
Click Auto set being displayed in the dialog box, and make sure that Bond level setting
value enters 90050. If not, repeat steps d) ~ g) in (4) Heat block height adjustment.
Fig. U243
Unnecessary
-1102+ ,/.2
135
NE00040-00
Adjustment
(5) Mounting of main body cover
(6) Fixing of indexer front door
(5) Mounting of main body cover

Mount the main body cover (front).
Fig. U244
Unnecessary
-1102+ ,/.2
(6) Fixing of indexer front door

Fix the front door of indexer by one CSB M4 x 5mm.
CSB M4 5mm
Fig. U245
3mm
-1102+ ,/.2
NE00040-00
136
Cap Screw Wrench
Adjustment
(7) Mounting of operation panel
(7) Mounting of operation panel

Fix the operation panel to the normal fixing position by two CSB M5 x 12mm.
CSB M5 12mm
Operation panel
Fig. U246
4mm
-1102+ ,/.2
137
Cap Screw Wrench
NE00040-00
Adjustment
(1) Names of components of sensor
(2) Zero adjustment
(C) Vacuum sensor setting

(1) Names of components of sensor
Names of components of frame vacuum sensor (SUNX DP-5-C-Z).
Note) The numeric value on the screen is irrespective of the setting value.
Setting value UP key

LCD indicator
Comparative output 1
operation indicator lamp
(orange)
Comparative output 2 operation

indicator lamp (green)
Mode setting key
Setting value DOWN key
Fig. U247
Unnecessary
-1102+ ,/.2
(2) Zero adjustment

a)
Pull down Toolof the menu bar and click Frame clear.
Fig. U248
Unnecessary
-1102+ ,/.2
NE00040-00
138
Adjustment
(2) Zero adjustment
b)
Draw out the frame by clicking YES being displayed in the dialog box.
Fig. U249
Unnecessary
-1102+ ,/.2
c)
Continue pressing the setting value UP key and setting value DOWN key of the frame
vacuum sensor the same time until 0.0 is displayed on the LCD indicator. Now, the
adjustment ends.

LCD indicator
Fig. U250
Unnecessary
-1102+ ,/.2
139
NE00040-00
Adjustment
(3) Initialization
(3) Initialization
a)
Press the mode conversion key and setting value UP key of the frame vacuum sensor at the
same time. Make sure that the first digit of the LCD indicator flickers and d is indicated.
If not, continue pressing the setting value DOWN key until d is displayed.

LCD indicator
Mode setting key
Fig. U251
Unnecessary
-1102+ ,/.2
b)
Press the setting value UP key of the frame vacuum sensor. Make sure that the 2nd digit of
the LCD indicator flickers and H is displayed. If not, continue pressing the setting key
until H is displayed. When H is displayed, press the mode conversion key. Now, the
initialization ends.

LCD indicator
Mode setting key
Fig. U252
Unnecessary
-1102+ ,/.2
NE00040-00
140
Adjustment
(4) Auxiliary setting

a)
Continue pressing the mode conversion key and setting value DOWN key of the frame
vacuum sensor at the same time to set U1. The display changes each time the setting
value DOWN key is pressed once. Continue pressing the key until 1o2c is displayed.

LCD indicator
Mode setting key
Fig. U253
Unnecessary
-1102+ ,/.2
b)
Indicate U-5 on the LCD indicator by pressing the setting value UP key of the frame
vacuum sensor. Continue pressing the setting value DOWN key until -2- is displayed.

LCD indicator
Fig. U254
Unnecessary
-1102+ ,/.2
141
NE00040-00
Adjustment
c)
(5) Pressure setting
When -2- has been displayed in the LCD indicator, press the mode conversion key. Now,
the auxiliary setting ends.
LCD indicator
Mode setting key
Fig. U255
Unnecessary
-1102+ ,/.2

a)
Press the mode conversion key of the frame vacuum, sensor. Set P-1 to -10KPa by the
setting value UP key and setting value DOWN key.

LCD indicator
Mode setting key
Fig. U256
Unnecessary
-1102+ ,/.2
NE00040-00
142
Adjustment
b)
Press the mode conversion key of the frame vacuum sensor. Set P-2 to -65KPa by the

LCD indicator
Mode setting key
Fig. U257
Unnecessary
-1102+ ,/.2
c)

LCD indicator
Mode setting key
Fig. U258
Unnecessary
-1102+ ,/.2
143
NE00040-00
Adjustment
d)

LCD indicator
Mode setting key
Fig. U259
Unnecessary
-1102+ ,/.2
e)
Press the mode conversion key of the frame vacuum sensor. P-A setting is not done.

LCD indicator
Mode setting key
Fig. U260
Unnecessary
-1102+ ,/.2
NE00040-00
144
Adjustment
f)
Press the mode conversion key of the frame vacuum sensor, and the pressure setting ends.
Mode setting key
Fig. U261
Unnecessary
-1102+ ,/.2
145
NE00040-00
NE00040-00
146
Chapter 2 Disassembly and adjustment of each

unit
XY-156
2-3
Disassembly and adjustment of XY table
1. Specifications of XY table ...................................................................................................148

2. Adjusting procedure of XY table .........................................................................................149
(A) Removing method ........................................................................................................150
3. Mounting method of NRS table...........................................................................................205
(A) Mounting method of NRS table ....................................................................................205
(B) Mounting method of motor ...........................................................................................206
4. Adjusting method of linear sensor ......................................................................................209
(A) XY origin position adjustment.......................................................................................209
(B) Lissajous waveform adjustment...................................................................................214
147
NE00040-00
XY-156
2-3
1.
Disassembly and adjustment of XY table

Specifications of XY table
Type
XY-156
Bonding range
X : 27.5mm
Y : 32.5mm
Limit sensor range
X : 33.5mm
Y : +34mm
-48mm
Effective stroke
X : 69mm
Resolution
Y : 84mm
0.1m / Pulse
[Electric parts]
Linear scale
Linear scale
2 pieces in total
X-axis
ST34-70
Mitsutoyo
20028926
Y-axis
ST34-80
Mitsutoyo
20028927
SUNX
20023591
Mechanical stroke
Yasukawa Electric
21610208
Effective stroke
Yasukawa Electric
21610208
Stroke
Yasukawa Electric
21610219
Effective stroke
Yasukawa Electric
21610219
Sensor
Sensor
4 pieces in total
Limit sensor
PM-L24
Linear motor
MD-19
MD-20
NE00040-00
148
2.
Adjusting procedure of XY table

The XY table is provided with the bonding head having the vertical drive function, and it moves the
bonding head in the X-Y direction for connecting the wire to an aimed position. The XY table
adjustment mainly comprises the guide rail adjustment for smooth operation without any play,
appropriate adjustment of linear scale for controlling the operation unit, adjustment of mutual XY
mounting position, and assembly adjustment of linear motor.
For replacing the linear scale, linear motor, and other parts, disassemble the machine up to the
aimed item according to the procedure in this manual.
XY table
UTC-1000
Fig. X001
XY maintenance tools and jigs

Tools
L-type wrenches (Cap Screw Wrench) 2.5mm, 3mm, 4mm,
5mm
Wrench M3
Screwdriver (-)
Jigs
Jig J725 T-arm
Jig J727
Meters
Torque driver
Oscilloscope
Others
Grease Multi-purpose
Silicon tube 4mm 1m, 2m
Lock tight
149
NE00040-00
Removal
(A) Removing method
Remove the XY table XY-156 from the wire bonder UTC-1000 main body according to the
following procedure (1)~(4).
Remove the universal indexer, loader and unloader from the
machine main body before removing the XY-table from the machine main body. For the removing
method of universal indexer, refer to (A) Removing method in 2 Universal indexer adjusting
procedure of Vol 1 2-2 Disassembly and adjustment of universal indexer. For the removing
method of loader and unloader, refer to (A) Removing method in 2. Adjusting procedure of loader
and unloader in VOL 1 2-4 Disassembly and adjustment of loader and unloader.
(1) Removal of nylon clamp

(2) Fixing with silicon tube
(3) Removal of XY table
(4) Removal of ground wire and NRS (X)
Caution
Be careful with a
strong magnetic field
This unit contains powerful magnetic field sections.

close to these sections.
Dont put any magnetic substances like iron or a watch
XY-table XY-156 profile
Fig. X002
NE00040-00
150
Removal

a)
Fix the transducer and the camera lens tube by using vinyl tie.
Vinyl tie
Camera lens tube
Transducer
Fig. X003
Unnecessary
-1102+ ,/.2
b)
SUS CSB M4 8mm
Nylon clamp
(NK-7N)
Spiral tube
Fig. X004
3mm
-1102+ ,/.2
151
Cap Screw Wrench
NE00040-00
Removal
c)
SUS CSB M4 8mm
Nylon clamp
(NK-7N)
Fig. X005
3mm
-1102+ ,/.2
d)
Cap Screw Wrench
Disconnect PJ1 connector from board JBP-315. Remove nylon clamp (NK-7N) by removing
one SUS CSB M4 x 6mm.
SUS CSB M4 6mm
JBP-315
Nylon clamp
PJ1
(NK-7N)
Fig. X006
3mm
-1102+ ,/.2
NE00040-00
152
Cap Screw Wrench
Removal

a)
Remove four SUS CSB M5 x 20mm with spring washers and flat washers which fix the
bonding head (BH-171).
SUS CSB M5 20mm with spring washer and flat washer
BH
XY
Fig. X007
4mm
-1102+ ,/.2
b)
Cap Screw Wrench
Fix the bonding head (BH-171) by binding this side to LCU by silicon tube (1m).
LCU
Silicon tube (4mm)
Fig. X008
4mm
1m
-1102+ ,/.2
153
Silicon Tube
NE00040-00
Removal
c)
Pass the silicon tube (2m) into the fixing bolt hole on the rear side of the bonding head
(BH-171) and fix it to the grip.
Silicon tube (4mm)
Grip
Fig. X009
4mm
2m
-1102+ ,/.2
NE00040-00
154
Silicon Tube
Removal

a)
Remove the X- motor piping. Loosen two SUS CSB M4 x 8mm and remove the plate.
Piping
X- motor
Plate
Rear view
SUS CSB M4 8mm
Fig. X010
3mm
-1102+ ,/.2
b)
Cap Screw Wrench
After disconnecting the X motor connector, disconnect the connectors from the X and Y
linear sensor amplifiers. Remove the X and Y linear sensor amplifiers by removing four
SUS CSB M4 x 20mm.
SUS CSB M4 20mm
X- linear amplifier
Y-linear amplifier
Y-linear amplifier connector

X-linear amplifier connector
X-motor connector
Fig. X011
3mm
-1102+ ,/.2
155
Cap Screw Wrench
NE00040-00
Removal
c)
Remove nylon clamps (NK-6N and NK-12N) by removing two SUS CSB M4 x 8mm on the
rear side of the X-motor.
SUS CSB M4 8mm
Nylon clamp
Nylon clamp
(NK-12N)
(NK-6N)
X-motor
Fig. X012
3mm
-1102+ ,/.2
d)
Cap Screw Wrench
Remove the front cover by removing six SUS CSB M3 x 8mm with flat washers. Remove
the rear cover by removing four SUS CSB M3 x 8mm with flat washers.
SUS CSB M3 8mm with flat washer
SUS CSB M3 8mm with flat washer
Front cover
Rear cover
Fig. X013
2.5mm
-1102+ ,/.2
NE00040-00
156
Cap Screw Wrench
Removal
e)
Remove four SUS CSB M6 x 25mm with spring washers and flat washers by using T arm
(jig J725).
SUS CSB M6 25mm with spring washers and flat washers
Fig. X014
Caution
Jig J725
Remove these screws by T arm (jig J725) without fail because of strong
magnetism.
f)
-1102+ ,/.2
T arm
-1102+ ,/.2
Cap Screw Wrench
Removal of Xmotor
1)
Remove two front SUS CSB M6 x 20mm which fix the X-motor.
SUS CSB M6 20mm
Arm (#8)
Fig. X015
Photo as viewed from the workers side
5mm
157
NE00040-00
Removal
2)
Remove two rear SUS CSB M6 x20mm which fix the X-motor. Remove the X-motor by
drawing it in the X direction.
SUS CSB M6 20mm
Arm (#8)
Photo as viewed from the rear
Caution
Fig. X016
X-motor weighs approx. 40kg. Particularly be careful when removing the

5mm
-1102+ ,/.2
X-motor.
g)
Cap Screw Wrench
Removal of wiring
1)
Disconnect the ground wire by removing one SUS CSB M3 x 6mm.
SUS CSB M3 6mm
Y-motor coil
Ground wire
(Cable No. 56)
Fig. X017
2.5mm
-1102+ ,/.2
NE00040-00
158
Cap Screw Wrench
Removal
2)
Remove four SUS CSB M6 x 25mm with spring washers and flat washers which fix the
Y-motor coil.
Y motor coil
Ground wire
(Cable No. 56)
Fig. X018
5mm
-1102+ ,/.2
h)
Cap Screw Wrench
Remove nylon clamp (NK-7N) by removing one SUS CSB M4 x 8mm. Remove PJ21, PJ22,
PJ24, and PJ25 of PCB JBP-316.
SUS CSB M4 8mm
Nylon clamp
(NK-7N)
PJ21, PJ22, PJ24, PJ25
JBP-316
Fig. X019
3mm
-1102+ ,/.2
159
Cap Screw Wrench
NE00040-00
Removal
i)
Disconnect the ground wire by removing one SUS CSB M4 x 6mm.
SUS CSB M4 6mm
Ground wire
(Cable No. 59)
Fig. X020
3mm
j)
-1102+ ,/.2
Cap Screw Wrench
-1102+ ,/.2
Cap Screw Wrench
Remove four SUS CSB M6 x 20mm and move the XY table slightly.
SUS CSB M6 20mm
Fig. X021
5mm
NE00040-00
160
Removal
k)
Remove nylon clamp (NK-6N) by removing one SUS CSB M4 x 8mm. Now, XY table can be
removed.
SUS CSB M4 8mm
Nylon clamp
(NK-6N)
XY-table (XY-156)
Fig. X022
3mm
-1102+ ,/.2
161
Cap Screw Wrench
NE00040-00
Removal

a)
Remove the ground wire by removing one SUS CSB M4 x 6mm. Remove NRS (X) by
removing four SUS CSB M8 x 25mm.
SUS CSB M4 6mm
SUS CSB M8 25mm
Ground wire
Fig. X023
3mm
-1102+ ,/.2
NE00040-00
162
Cap Screw Wrench
6mm
Cap Screw Wrench
Disassembly
(B) Disassembly method
This section describes the disassembly methods of XY table.
Remove the XY table from the machine main body according to (A) Removing method (pages 150
~ 162) and put it on a work bench.
(1) Removal of Y table (#5)

(2) Removal of X table (#4)
(3) Disassembly of NRS
Fig. X024
XY table XY-156
163
NE00040-00
Disassembly

a)
Remove the Y sensor flag (#23) by removing two SUS CSB M3 x 8mm.
SUS CSB M3 8mm
Y sensor flag (#23)
Fig. X025
2.5mm
-1102+ ,/.2
b)
Cap Screw Wrench
Remove two sets of guide covers (#38) by removing four SUS CSB M3 x 6mm.
SUS CSB M3 6mm
Guide cover (#38)

Guide cover (#38)
Fig. X026
2.5mm
-1102+ ,/.2
NE00040-00
164
Cap Screw Wrench
Disassembly
c)
Loosen the lock nuts M3 of preload bolts (four SUS CSB M3 x 12mm) of the V shaped rails
on the right side of X-table (#4), and unlock the preload screws.
Lock nut M3 & SUS CSB M3 12mm
Fig. X027
2.5mm
-1102+ ,/.2
d)
Cap Screw Wrench
Remove the Ytable (#5) by removing eight SUS CSB M4 x 18mm of two V shaped rails.
SUS CSB M 4 18mm
Y table (#5)
X table (#4)
Fig. X028
Caution
Be careful not to scar V shaped rails, cross roller gauge, linear scale, or
linear sensor when removing the Y table.
165
3mm
-1102+ ,/.2
Cap Screw Wrench
NE00040-00
Disassembly
Disassembly end
Y table (#5)
NE00040-00
166
Fig. X029
Disassembly
(2) Removal of X-table (#4)

a)
Remove the photo sensor angle (#2:X side) by removing two SUS CSB M3 x 6mm.
SUS CSB M3 6mm
Photo sensor angle (#21)
Fig. X030
2.5mm
-1102+ ,/.2
b)
Cap Screw Wrench
Loosen the lock nuts M3 of preload screws (four SUS CSB M3 x 12mm) of the V shaped rails
on the this side of X-axis receiver (#3), and unlock the preload screws.
Lock nut M3 & SUS CSB M3 12mm
X-axis receiver (#3)
Fig. X031
2.5mm
-1102+ ,/.2
167
Cap Screw Wrench
NE00040-00
Disassembly
c)
Remove the X table (#4) by removing eight SUS CSB M4 x 18mm of two V shaped rails.
SUS CSB M4 18mm
X table (#4)
Fig. X032
Caution
Be careful not to scar V shaped rails, cross roller gauge, linear scale, or
3mm
linear sensor when removing the X table.
-1102+ ,/.2
Disassembly end
Fig. X033
X table (#4)
NE00040-00
168
Cap Screw Wrench
Disassembly

a)
1)
Remove stopper bolt (#13) by removing two SUS CSB M5 x 16mm.
2)
Remove stopper holder (#14) by removing two SUS CSB M5 x 16mm.
SUS CSB M5 16mm
Stopper holder (#14)
Fig. X034
SUS CSB M5 16mm
4mm
-1102+ ,/.2
b)
Cap Screw Wrench
1)
Remove the damper block (#31) by removing two SUS CSB M5 x 16mm.
2)
Remove two SUS CSB M6 x 20mm with spring washers and flat washers (small round)
and remove the shock absorber holder 1 (#29).
SUS CSB M5 16mm
Damper block (#31)
Shock absorber holder 1

(#29)
Fig. X035
SUS CSB M6 20mm SW W
4mm
-1102+ ,/.2
169
Cap Screw Wrench
5mm
Cap Screw Wrench
NE00040-00
Disassembly
c)
Remove X slide base (#6) by removing sixteen SUS CSB M3 x 8mm.
SUS CSB M3 8mm
Fig. X036
2.5mm
-1102+ ,/.2
d)
Cap Screw Wrench
Remove the linear guide (LM guide) by removing ten SUS CSB M4 x 10mm.
SUS CSB M4 10mm
Linear guide
Linear guide
Fig. X037
Caution
Particularly be careful not to drop the linear guide (LM guide) because
3mm
no stopper is mounted at both ends.
NE00040-00
-1102+ ,/.2
170
Cap Screw Wrench
Assembly
(C) Assembly method
This section describes the assembly method of XY table.
(1) Assembly of X table

(2) Assembly of Y table
(3) Assembly of limit sensor
(4) Assembly of NRS
(5) Assembly of XY table (XY-156) to the main body
171
NE00040-00
Assembly

a)
1)
Fully degrease X-axis receiver (#3) with alcohol.
2)
Clean the V rail with alcohol or the like sufficiently before mounting it and remove grease
and dirt.
Caution)
Check if V shaped is free of scars, and replace V-rail if scars are detected.
3)
Apply a thin coat of grease (EA2) to V rail.
4)
Fasten the V-rail by CSB M4 x 16mm temporarily to such an extent as the V rail is
movable by hand.
Caution)
Dont protrude the screw head from the spot-faced hole of the V-rail.
5) Fully remove grease from the roller gauge by using a wiper (free of dust).
6) Apply a thin coat of grease (EA2) to the roller gauge.
7) Put the rollers on the V shaped so that they face symmetrically on the right and left sides
(-shaped or V shaped).
CSB M4 x 16mm
Reference side V rail
Roller gauge
Preload side rail

Directions of rollers are symmetric
Fig. 1
Fig. 2
Grease
3mm
-1102+ ,/.2
NE00040-00
172
Cap Screw Wrench
EA2
Assembly
b)
1)
Fully degrease X-table (#4) with alcohol.
2)
Clean the V rail with alcohol or the like sufficiently before mounting the V rail and
remove grease and dirt.
Caution)
Check if V shaped of V-rail is free of scars, and replace V-rail if scars are detected.
3)
4)
Insert the X-table (#4) to X-axis receiver (#3).

X table (#4)
Insert
Unnecessary
-1102+ ,/.2
Fig. 3
c)
Position the V-rail in such a way as the reference side V-rail fixing screws (CSB M4 x 16mm)
are set to the center of the spot-faced hole of the V-rail and fix the V-rail temporarily. (See
Fig. 4)
Fig. 4
3mm
-1102+ ,/.2
173
Cap Screw Wrench
NE00040-00
Assembly
d)
Fasten the preload adjusting screws 2, 3 with the tightening torque of 5cNm (approx.
0.5Kgfcm) when the X-table is set to the position shown in Fig. 5.
Preload adjusting screw 2

Fig. 5
-1102+ ,/.2
e)
Fasten the preload adjusting screw 4with the tightening torque of 5cNm (approx. 0.5Kgf
cm) when the X-table is set to the position shown in Fig. 5.
Fig. 6
-1102+ ,/.2
NE00040-00
174
Assembly
f)
Fasten the preload adjusting screw 1 with the tightening torque of 5cNm(approx. 0.5Kgfcm)
when the X-table is set to the position shown in Fig.7.
g)
1)
Repeat the procedure in d) ~ f) after setting the tightening torque of preload adjusting
screws to 10cNm (approx. 1.0Kgfcm).
2)
3)

Fig. 7
-1102+ ,/.2
175
NE00040-00
Assembly
h)
Fasten the reference side fixing screw with the tightening torque of 1Nm(approx. 10Kgf
Reference side fixing screw 4
Preload side fixing screw 4
Fig. 8
-1102+ ,/.2
i)
Fasten the reference side fixing screws 2, 3 with the tightening torque of 1Nm (approx.
10Kgfcm) when the X-table is set to the position shown in Fig. 9.

Fig. 9
-1102+ ,/.2
NE00040-00
176
Assembly
j)
Fasten the reference side fixing screw 1 with the tightening torque of 1Nm (approx. 10Kgf

Fig. 10
-1102+ ,/.2
k)
1)
Repeat the procedure in h) ~ j) after setting the tightening torque of the reference side
fixing screw to 2Nm (approx. 20Kgfcm).
2)
3)
4)
-1102+ ,/.2
177
NE00040-00
Assembly
l)
1)
Loosen the preload adjusting screws once.
2)
Position the V-rail in such a way as the reload side fixing screws are set to the center of
the spot-faced hole of the V-rail.
2.5mm
-1102+ ,/.2
m) Mount the bind head screws to the table for cross roller gauge stopper.
Bind head screw
Bind head screw
Fig. 11
-1102+ ,/.2
NE00040-00
178
Cap Screw Wrench
Assembly
n)
Fasten the preload adjusting screws 2,3 with the tightening torque of 2cNm (approx.
0.2Kgfcm) when the X-table is set to the position shown in Fig. 12.

Fig. 12
-1102+ ,/.2
o)
Fasten the preload adjusting screw 4 with the tightening torque of 2cNm(approx. 0.2Kgf
cm) when the X-table is set to the position shown in Fig.13.
Fig. 13
-1102+ ,/.2
179
NE00040-00
Assembly
p)
Fasten the preload adjusting screw 1 with the tightening torque of 2cNm(approx. 0.2Kgfcm)
q)
Move the table on one side up to the position where the cross roller gauge touches the stopper,
and set the cross roller gauge position.
Caution)
r)
1)
Particularly be careful not to strike the cross roller gauge strongly.
Fasten the preload adjusting screws with the tightening torque of 5cNm(approx. 0.5Kgf
cm) according to the procedure n) ~ p).
Caution)
Repeat the above procedure three times.
2)
Move the table reciprocally by ten times.
3)
Fasten the preload adjusting screws with the tightening torque of 10cNm(approx.
1.0Kgfcm) according to the procedure n) ~ p).
Caution)
4)
5)
Caution)
6)
7)
Caution)
8)

Fig. 14
-1102+ ,/.2
NE00040-00
180
Assembly
s)
Fasten the preload side fixing screw 1 with the tightening torque of 1Nm (approx. 10Kgf

Fig. 15
-1102+ ,/.2
t)
Fasten the preload fixing screws 2 and 3 with the tightening torque of 1Nm (approx.
10Kgfcm) when the X-table is set to the position shown in Fig.16.
Fig. 16
-1102+ ,/.2
181
NE00040-00
Assembly
u)
Fasten the preload side fixing screw 4 with the tightening torque of 1Nm (approx. 10Kgfcm)
Fig. 17
-1102+ ,/.2
v)
1)
Repeat the procedure in s) ~ u) after setting the tightening torque of the preload side
2)
Repeat the procedure in s)~u) after setting the tightening torque of the preload side fixing
screw to 3Nm (approx. 30Kgfcm).
3)
Repeat the procedure in s) ~ u) after setting the tightening torque of the preload side
4)
Repeat the procedure in s)~ u) after setting the tightening torque of the preload side
w) Fasten the preload adjusting screws with lock nuts and coat them with screw lock.
-1102+ ,/.2
NE00040-00
182
Assembly

a)
1)
Fully degrease V shaped of Y table (#5) with alcohol.
2)
Clean the V rail mounting face of X table (#4) with alcohol or the like and remove grease
and dirt.
Caution)
3)
Check if V shaped is free of scars, and replace V-rail if scars are detected.
Mount the roller gauge, V shaped gauge, and Y table (#5) in the same way as in the
X-table.
4)
5)
Fully remove grease from the roller gauge by using a wiper (free of dust).
6)
Apply a thin coat of grease (EA2) to the roller gauge.

Caution)
Put the rollers on the V shaped so that they face symmetrically on the right and left
sides (-shaped or V shaped). (See Fig. 2)
Y table (#5)
CSB M4 x 16mm
X table (#4)
Grease
Fig. 18
-1102+ ,/.2
183
EA2
NE00040-00
Assembly
b)
Position the V-rail in such a way as the reference side fixing screws are set to the center of
the spot-faced hole of the V-rail and fix the V-rail temporarily.
c)
0.5Kgfcm) when the Y-table (#5) is set to the position shown in Fig. 19.

Fig. 19
-1102+ ,/.2
d)
Fasten the preload adjusting screw 1 with the tightening torque of 5cNm (approx. 0.5Kgf
cm) when the Y-table (#5) is set to the position shown in Fig.20.

Fig. 20
-1102+ ,/.2
NE00040-00
184
Assembly
e)
cm) when the Y-table (#5) is set to the position shown in Fig. 21.
Fig. 21
-1102+ ,/.2
f)
1)
Repeat the procedure in c)~e) after setting the tightening torque of preload adjusting
2)
Repeat the procedure in c) ~ e) after setting the tightening torque of preload adjusting
3)
4)
5)
-1102+ ,/.2
NE00040-00
185
Assembly
g)
Fasten the reference side fixing screw 4with the tightening torque of 1Nm (approx. 10Kgf
h)
Fasten the reference side fixing screws 2, 3 with the tightening torque of 1Nm (approx.
10Kgfcm) when the Y-table (#5) is set to the position shown in Fig. 19.
i)
Fasten the reference side fixing screw 1 with the tightening torque of 1Nm (approx. 10Kgf
j)
1)
Repeat the procedure in g)~i) after setting the tightening torque of the reference side
2)
Repeat the procedure in g)~ i) after setting the tightening torque of the reference side
3)
4)
k)
Loosen the preload adjusting screws once.
l)
Position the V-rail in such a way as the reload side fixing screws are set to the center of the
spot-faced hole of the V-rail.
-1102+ ,/.2
m) Mount the bind head screws to the Y-table (#5) for cross roller gauge stopper.
Y table (#5)
Bind head screw
CSB M4 x 16mm
X table (#4)
Bind head screw
Fig. 22
-1102+ ,/.2
186
NE00040-00
Assembly
n)
0.2Kgfcm) when the Y-table is set to the position shown in Fig. 23.

6
Fig. 23
-1102+ ,/.2
o)
cm) when the Y-table is set to the position shown in Fig. 24.

Fig. 24
-1102+ ,/.2
NE00040-00
187
Assembly
p)
cm) when the Y-table is set to the position shown in Fig.25.
Fig. 25
-1102+ ,/.2
q)
Move the table on one side up to the position where the cross roller gauge touches the stopper.
Position the cross roller gauge.
Caution)
r)
1)
Particularly be careful not to strike the cross roller gauge strongly.
Set the tightening torque of preload adjusting screws to 5cNm (approx. 0.5Kgfcm) and
repeat the procedure n) ~ p).
s)
2)
3)
Move the Y-table reciprocally by ten times.
1)
t)
2)
3)
1)
2)
3)
-1102+ ,/.2
188
NE00040-00
Assembly
u)
1)
v)
2)
3)
1)
2)
3)
w) 1)
2)
3)
-1102+ ,/.2
x)
1)
Fasten the preload side fixing screw 1 with the tightening torque of 1Nm (approx.
10Kgfcm) when the Y-table (#5) is set to the position shown in Fig. 24.
2)
Fasten the preload fixing screws 2 and 3 with the tightening torque of 1Nm (approx.
10Kgfcm) when the Y-table (#5) is set to the position shown in Fig.23.
3)
Fasten the preload side fixing screw 4 with the tightening torque of 1Nm (approx.
10Kgfcm) when the Y-table (#5) is set to the position shown in Fig.25.
y)
1)
Repeat the procedure in 1) ~ 3) after setting the tightening torque of the preload side
2)
3)
4)
z)
Fasten the preload adjusting screws with lock nuts and coat them with screw lock.
-1102+ ,/.2
NE00040-00
189
Assembly
Mount the Y stoppers (#15 at 2 positions) by two SUS CSB M4 x 10mm each.
SUS CSB M4 10mm
Y stopper (#15)
Fig. X059
3mm
-1102+ ,/.2
190
Cap Screw Wrench
NE00040-00
Assembly
SUS CSB M4 10mm
Y stopper (#15)
Fig. X060
3mm
-1102+ ,/.2
NE00040-00
191
Cap Screw Wrench
Assembly
Fig. X061
Assembly of limit sensor

Unnecessary
-1102+ ,/.2
a)
Assembly of sensors
Mount the photo sensors (PM-L24 for X PM-L24R for Y) to photo sensor angle (#21) as
shown in Fig. X062.
SUS CSB M2 6mm
Photo sensor
Adjusting to be flush
with each other
Fig. X062
Adjusting to be flush
with each other
Adjust the photo sensor end face to be flush with the end face of #21 and fix it by screws on both right and left sides.
1.5mm
-1102+ ,/.2
192
Cap Screw Wrench
NE00040-00
Assembly
b)
Fixing of X-table and Y-table

Fix bearing unit (#3) and X table (#4) by table fixing plate (#40) and fix the X-table (#4) and
Y-table (#5).
X-table (#4)
Table fixing plate (#40)

Bearing unit (#3)
Fig. X063
Unnecessary
-1102+ ,/.2
Y-table (#5)
X-table (#4)
Fig. X064
Unnecessary
-1102+ ,/.2
NE00040-00
193
Assembly
c)
Assembly of sensor flag and photo sensor angle

Mount the X-direction sensor on bearing unit (#3) and also mount the Y-direction sensor on
X-table (#4). Adjust the mounting sizes of the X-sensor flag (#22) and Y sensor flag (#23) to
the sensor, referring to Fig. X065. Be careful not to mount the photo sensor flags obliquely.
Y sensor flag (#23)


X sensor flag (#22)
Fig. X065
#40
Unnecessary
-1102+ ,/.2
#23 Y sensor flag

#22 X sensor flag
X direction
Fig. X066
#21 Photo sensor angle
Fig. X067
Y direction
#21 Photo sensor angle
Unnecessary
-1102+ ,/.2
194
NE00040-00
Assembly
(4) Assembly of NRS
(4) Assembly of NRS

a)
1)
Apply a coat of grease (multi-purpose) to both side of linear guide (LM guide) rail.
2)
Mount the linear guide (LM guide) to X-base (#1), and fasten and fix it by ten SUS CSB
M4 x 10mm.
Reference plane
Reference plane
Reference plane
Fig. X068
Caution
Particularly be careful not to protrude the linear guide (LM guide) from
the end face of linear rail since no stopper is mounted at both ends of the
Grease
linear guide (LM guide). Mount the linear guide while pressing its
reference plane against the reference edge of X base (#1).
-1102+ ,/.2
Multipurpose
SUS CSB M4 10mm
X base (#1)
Reference edge
Reference edge
Fig. X069
3mm
-1102+ ,/.2
NE00040-00
195
Cap Screw Wrench
Assembly
b)
1)
(4) Assembly of NRS
Mount the X-slide base (#6) to the linear guide (LM guide), and fasten and fix it by sixteen
SUS CSB M3 x 8mm.
2)
Make sure that the table moves by less than 2.5N (approx 250g).
SUS CSB M3 8mm
X slide base (#6)
Fig. X070
Caution
Mount the SUS parallel pin while pressing it against the side face of the
linear guide (LM guide) movable device.
Repeat assembling again if
2.5mm
-1102+ ,/.2
the torque is more than 2, 5N (approx. 250gf).
Cap Screw Wrench
SUS parallel pin
Side face of linear guide (LM guide )

movable device
Fig. X071
Unnecessary
-1102+ ,/.2
196
NE00040-00
Assembly
(4) Assembly of NRS
c)
1)
Mount the shock absorber Holder 1 (#29) to X base (#1) and fasten and fix it by two SUS
CSB M6 x 20mm with spring washers and flat washers (small round).
2)
Mount the damper block (#31) to X slide base (#6), and fasten and fix it by SUS CSB M5 x
16mm.
SUS CSB M5 16mm

Damper block (#31)
Shock absorber holder

(#29)
X base (#1)
Fig. X072
4mm
-1102+ ,/.2
d)
Cap Screw Wrench
5mm
Cap Screw Wrench
Mount stopper holders (#13, #14) to X base (#1), and fasten fix them by four SUS CSB M5 x
16mm.
SUS CSB M5 16mm
X base (#1)
Fig. X073
4mm
-1102+ ,/.2
NE00040-00
197
Cap Screw Wrench
Assembly
e)
(4) Assembly of NRS
Adjust the mounting position of the stopper holder (#14) so that the gap between the urethane
13mm
stopper and the X slide base (#6) becomes 13mm.
13mm
X slide base (#6)
Fig. X074
Unnecessary
-1102+ ,/.2
f)
Adjust the mounting positions of the damper block (#31) and shock absorber holder 1 (#29) so
that the gap between the tips of right and left shock absorbers and damper block (#31)
becomes 6mm.
SUS CSB M5 16mm (Screw lock)

Damper block (#31)
Shock absorber holder 1

(#29)
6mm
6mm
Fig. X075
Unnecessary
-1102+ ,/.2
198
NE00040-00
Assembly

a)
1)
Put the XY table (XY-156) on the Y base (#2) temporarily.
2)
Fix the X sensor amplifier cable by nylon clamp (NK-6N) together with the ground wire
(cable No. 59) and Y motor cable by one SUS CSB M4 x 8mm.
SUS CSB M4 8mm
Nylon clamp
(NK-6N)
Y base (#2)
XY table (XY-156)
Fig. X076

3mm
-1102+ ,/.2
b)
Cap Screw Wrench
Press the XY table against the positioning pieces (#25) and positioning plate (#34) securely,
and fasten and fix it by four SUS CSB M6 x 20mm.
SUS CSB M6 20mm
Positioning piece (#25)
Positioning plate (#34)

Fig. X077
5mm
-1102+ ,/.2
NE00040-00
199
Cap Screw Wrench
Assembly
c)
Mount the ground wire (cable No. 59) to the XY table by one SUS CSB M4 x 6mm.
SUS CSB M4 6mm
Ground wire
(Cable No. 59)
Fig. X078
3mm
-1102+ ,/.2
d)
1)
Cap Screw Wrench
Bundle the X sensor amplifier cable, Y motor coil cable, limit sensor cable, and ground
wire (cable No. 59) by nylon clamp (NK-7N), and fasten and fix them by one SUS CSB M4
x 8mm.
2)
Connect PJ21, PJ22, PJ24, PJ25 connectors to JBP-316.

SUS CSB M4 8mm
Nylon clamp
(NK-7N)
PJ-21, 22, 24, 25
JBP-316
Fig. X079
Figure as viewed from the right side

Caution
Make sure that each cable has an allowance by moving the XY table in
3mm
all directions.
-1102+ ,/.2
200
Cap Screw Wrench
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Assembly
e)
1)
Mount the Y motor coil to the XY table, and fasten and fix it by four SUS CSB M6 x 25mm
with spring washers and flat washers.
2)
Mount the ground wire (Cable No. 56) to the X table, and fasten and fix it by one SUS
CSB M3 x 6mm.
SUS CSB M3 6mm
Y motor coil
Ground wire
(Cable No.56)
Fig. X080
Figure as viewed from the workers side

2.5mm
-1102+ ,/.2
f)
Cap Screw Wrench
5mm
Cap Screw Wrench
Untie the silicon tube and lower the bonding head (BH-171) slowly.
Grip
Silicon tube
Fig. X081
Unnecessary
-1102+ ,/.2
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201
Assembly
g)
Untie the silicon tube on this side and lower the bonding head slowly.
LCU
Silicon tube
Fig. X082
For mounting the bonding head, refer to (C) Assembly method in 2.
Caution
Bonding head adjusting procedure in 2-1 Disassembly and adjustment

-1102+ ,/.2
of bonding head.
h)
Unnecessary
1)
Connect PJ1 connector to JBP-315.
2)
Clamp and fix cable No. 16 by nylon clamp (NK-7N) using one SUS CSB M4 x 6mm.
JBP-315
SUS CSB M4 6mm
Nylon clamp
(NK-7N)
Cable No.16
PJ1
Fig. X083
Caution
Move the XY table and make sure that cable No. 16 does not touch the
3mm
XY table.
-1102+ ,/.2
202
Cap Screw Wrench
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Assembly
i)
1)
Wind the spiral tube to Z linear sensor cable and Y linear sensor cable.
2)
Clamp and fix the spiral tube by nylon clamp (NK-7N) using one SUS CSB M4 x 8mm.
SUS CSB M4 8mm
Nylon clamp
(NK-7N)
Spiral tube
Fig. X084
3mm
Move the XY table to make sure that the cable does not touch it.
Caution
j)
-1102+ ,/.2
Cap Screw Wrench
1)
Connect the X motor connector.
2)
Mount the X and Y linear sensor amplifiers and fasten and fix them by four SUS CSB M4
x 20mm.
3)
Connect the connectors of X and Y linear sensor amplifiers.
SUS CSB M4 20mm
X linear sensor amplifier
Y linear sensor amplifier

connector
Y linear sensor amplifier

connector
X motor connector
Fig. X085
3mm
-1102+ ,/.2
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203
Cap Screw Wrench
Assembly
k)
Bundle the Z linear sensor amplifier cable and Y linear sensor amplifier cable by nylon clamp
(NK-7N), and fasten and fix them by one SUS CSB M4 x 8mm.
SUS CSB M4 8mm
Nylon clamp
(NK-7N)
Fig. X086
3mm
-1102+ ,/.2
l)
Cap Screw Wrench
Remove the vinyl tie slowly.
Vinyl tie
Camera lens tube
Transducer
Fig. X087
Unnecessary
-1102+ ,/.2
204
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Mounting
(1) Press NRS (X) against Y base (#2) and positioning plate
3. Mounting method of NRS table

(A) Mounting method of NRS table
Y base (#2)
Positioning plate
Figure as viewed from

the workers side
Fig. X088
Unnecessary
-1102+ ,/.2
(2) Fasten and fix NRS (X) by four SUS CSB M8 x 25mm.
(3) Mount the ground wire (cable No. 57) to NRS (X), and fasten and fix it by one SUS CSB M4
x 6mm.
SUS CSB M8 25mm
SUS CSB M4 6mm
Ground wire
(Cable No. 57)
Figure as viewed from

the workers side
Fig. X089
3mm
-1102+ ,/.2
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205
Cap Screw Wrench
6mm
Cap Screw Wrench
Mounting
(2) Mount the X coil to the
(B) Mounting method of motor

(1) Mount the X motor on the X slide base (#6), press it against the positioning piece, and
fasten and fix it by four SUS CSB M6 x 20mm.
(2) Mount the X coil to the arm (#8), and fasten it temporarily by four SUS CSB M6 x 25mm
with spring washers and flat washers (small round).
Arm (#8)
X slide base (#6)

Positioning piece
SUS CSB M6 20mm

Arm (#8)
Fig. X090
5mm
-1102+ ,/.2
Cap Screw Wrench
(3) Position the coil flange to equalize gaps with each other.
(4) After gap adjustment, fasten and fix the X coil by four SUS CSB M6 x 25mm with spring
washers and flat washers (small round).
(5) Move the coil flange over the full stroke, and make sure that the coil and magnet dont touch
each other.
Gap 0.6mm
Coil
Coil flange
See detail drawing

(Fig.X092)
See detail drawing

(Enlarged view of gap peep hole)
Fig. X091
Caution
Fig. X092
Repeat procedure (3) ~ (5) again if the coil and flange touch each other.
206
5mm
-1102+ ,/.2
Cap Screw Wrench
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(6)
Mounting
(7)
(6) a) Mount the front cover, and fix it by fastening it with six SUS CSB M3 x 8mm W.
b)
Mount the rear cover, and fix it by fastening it with four SUS CSB M3 x 8mm W.
SUS CSB M3 8mm W
Two SUS CSB
Two SUS CSB
M3 8mm are also

mounted on this side
M3 8mm are also

mounted on this side
Rear cover
Front cover
Fig. X093
2.5mm
-1102+ ,/.2
(7) a)
Cap Screw Wrench
Bundle the Y motor coil cable, X linear sensor cable, and ground wire by nylon clamp
(NK-6N), and fasten and fix them by one SUS CSB M4 x 8mm.
b)
Bundle cable No. 3, 4, 5, X motor coil cable, Y motor coil cable, each ground wire, and X
linear sensor cable by nylon clamp (NK-12N), and fasten and fix them by one SUS CSB M4
x 8mm.
SUS CSB M4 8mm
Nylon clamp
(NK-12N)
Nylon clamp
(NK-6N)
X motor
Fig. X094
Caution
After fixing them, move the XY table to make sure that the X motor coil
cable does not touch the X motor or X slide base (#6).
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207
3mm
-1102+ ,/.2
Cap Screw Wrench
Mounting
(8)
(9)
(10)
(8) a) Mount the plate and fasten and fix it by two SUS CSB M4 x 8mm.
b)
Connect piping.
X motor
Connect piping
Connect piping
Plate
Fig. X095
SUS CSB M4 8mm
3mm
-1102+ ,/.2
Cap Screw Wrench
(9) Mount the loader to the machine main body (SU-119), referring to (C) Assembly method in
2. Loader and unloader adjusting procedures in 2-4 Disassembly and adjustment of loader
and unloader (SU-119, 120).
(10) Mount the universal indexer (UF-79) to the machine main body, referring to (C) Assembly
method in 2. Adjusting procedures of universal indexer in 2-2 Disassembly and
adjustment of universal indexer (UF-79).
208
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Adjustment
(1) Preparation work
4. Adjusting method of linear sensor

(A) XY origin position adjustment
* This section describes the adjustment of X side. This also applies to the Y side,
correspondingly.
Caution
Take an anti-static measure without fail before starting electric

adjustment.
Remove the left side cover of the machine main body.
Three X, Y, Z linear sensor amplifiers are mounted in line.
Adjust the X-axis linear sensor amplifier (Be careful not to take Y or Z axis for X axis).
Turn on the power supply of the machine main body (Dont turn on DRIVE switch).
Y-axis linear
X-axis linear
sensor amplifier
sensor amplifier
Fig. X096
Unnecessary
-1102+ ,/.2
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209
Adjustment
(2) Adjusting method

Wait for approx. 5 minutes after turning on the power supply before starting the adjustment
work for stabilizing the output voltage.
Basic adjustment
Basic adjustment is the oscilloscope adjustment. Adjust the output voltage of the linear sensor
amplifier output voltage to display at the center of the monitor screen of the oscilloscope.
Set the oscilloscope.
Time setting
2 ~ 5ms / div
Voltage setting
500mV
Scanning mode
DC mode
Trigger
Auto or Normal level
If the waveform is not seen clearly, the setting range may be changed.
-1102+ ,/.2
Remove the X-axis linear sensor cover.

Connect the probe of an oscilloscope to the linear sensor amplifier. (Use CH1, CH2)
Connect the probe to TP1 (Vref) and also connect GND to TP6 (GND).
(Adjust CH1 and CH2 in the same way.)
TP6 (GND)
TP1 (Verf)
Fig. X097
Connector is not connected for photography.
-1102+ ,/.2
210
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Adjustment
(3) Origin adjustment
Adjust the oscilloscope in such a way as an approx. 2.5V is applied and a waveform is displayed
at the center of the screen by OFFSET setting of the oscilloscope.
The waveform at the screen center serves as the reference waveform.
The reference waveform is the reference position for origin adjustment and Lissajous s
waveform. Set the waveform to the screen center by OFFSET setting without fail. If the
position is set by POSITION setting, the origin adjustment cannot be done precisely.
Fig. X098
-1102+ ,/.2
(3) Origin adjustment

Adjust the X-axis origin position output signal of XY table.
Perform trigger setting of the oscilloscope.
Trigger mode
SINGLE
Trigger CH
CH1
Trigger level
2.5V
If a waveform can be confirmed in trigger mode AUTO, it is applicable.
-1102+ ,/.2
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211
Adjustment
(4) Probe connection position change

Connect CH1 to TP4 and connect TP1 (Vref) to CH2. (Connect GND to TP6)
TP4 (CH1)
TP6 (GND)
TP1 (CH2)
Fig. X099
-1102+ ,/.2
A waveform shown in Fig.X100 appears on the oscilloscope screen.

By moving the X-axis of XY table to the right end or left end manually, an origin waveform
appears in CH1 in the vicinity of the stroke center.
Fig. X100
-1102+ ,/.2
212
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Adjustment
Waveform standard
The ratio of points a and b of the origin signal shall be within a range of 0.9 ~ 1.1 with reference
to the reference waveform a/b = 0.9 ~ 1.1.
Higher than 0.3V with reference to the reference waveform
0.3Va, b
1cn signal
2cn signal
Fig. X101
-1102+ ,/.2
If the waveform is abnormal, adjust it by VR5 After adjustment, lock VR5 by paint lock.
Make sure that the origin signal appears at one XY table center position only over the entire
stroke.
-1102+ ,/.2
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213
Adjustment
(B) Lissajous waveform adjustment

* This section describes the X-axis side adjusting method. However, this also applies to the
Y-axis side.
Prepare an oscilloscope conforming to the following standard at least.
Sampling cycle (rate)
100ms/s or over
Input frequency
Higher than 100MHz
X-Y waveforms are measurable

2 channels at least
Caution
Take an anti static measure without fail before starting electric adjustment.
Perform the same adjustment a sin X origin position adjustment in the above paragraph.

Wait for approx. 5 minutes after turning on the power supply before starting the adjustment
work for stabilizing the output voltage.
Basic adjustment
Set the oscilloscope
Time setting
100s/div
Voltage setting
500mV
Scanning mode
DC mode
Trigger
Auto level
If the waveform is not seen clearly, the setting range may be changed.
-1102+ ,/.2
214
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Adjustment
a)
Remove the Z-axis linear sensor cover.
b)
Fix the XY table (XY-156) to J727.
c)
Connect cables (No. 31, 33) to the X, Y linear sensor amplifiers.
Cable (No.31)
XY table
J727
Fig. X102
Jig J727
-1102+ ,/.2
d)
Connect the probe of oscilloscope to the linear sensor amplifier (CH1, CH2).
e)
Connect the probe to TP1 (Vref) and also connect GND to TP6 (GND).
(Perform the same adjustment in CH1 and CH2.)
f)
Turn on the power supply. (Dont turn on DRIVE switch)
TP6 (GND)
TP1 (Verf)
Fig. X103
-1102+ ,/.2
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215
Adjustment
g)
(3) Lissajous waveform adjustment
Adjust the oscilloscope in such a way as an approx. 2.5V is applied and a waveform is
displayed at the center of the screen by OFFSET setting of the oscilloscope.
The waveform at the screen center serves as the reference waveform.
The reference waveform is the reference position for origin adjustment and Lissajous s
waveform. Set the waveform to the screen center by OFFSET setting without fail. If the
position is set by POSITION setting, the Lissajous waveform adjustment cannot be done
precisely due to a deviation of the Lissajous waveform origin.
Fig. X104
-1102+ ,/.2

The Lissajous waveform is the linear sensor output waveform of XY axes of XY table.
If Lissajous waveform is not adjusted properly, an abnormal XY table noise or an XY count error
occurs.
a)
Change the oscilloscope setting.

Change the waveform display to X-Y waveform (X-Y format).
b)
Change the connection position of probe.

Connect CHl to TP2 (A) and connect CH2 to TP3 (B) (Connect GND to TP6 (GND) in
any way).
-1102+ ,/.2
216
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Adjustment
SW1 and 2 are fixed

(Fixed on the upper side)
VR6 and 7 are fixed
(Not adjustable)
S.up lamp
AL lamp or
Power lamp
Fig. X105
Unnecessary
-1102+ ,/.2
c)
By moving the X-axis of XY table manually, a waveform is observed at about the center of
the oscilloscope screen. (Lissajous waveform)
-1102+ ,/.2
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217
Adjustment
(4) Coarse adjustment of Lissajous waveform
(4) Coarse adjustment of Lissajous waveform

For coarse adjustment of Lissajous waveform, adjust the parallel positions of the XY table
linear sensor mechanically to circularize the waveform.
a)
Moire angle adjustment

This adjustment is done to adjust the waveform size.
A waveform is maximized when the scale line of the linear scale and the linear sensor are
adjusted in parallel with each other.
Caution
Move the X-axis lightly by hand, otherwise the Lissajous waveform

-1102+ ,/.2
cannot be observed on the oscilloscope.

1)
After loosening four SUS CSB M3 x 8mm screws which fix the linear sensor head, turn
the moir angle adjusting eccentric pin by using a minus screwdriver until the Lissajous
waveform is maximized as shown in Fig. 2068. Then, fasten four SUS CSB M3 x 8mm
screws. Make sure after fastening the screws that no change occurs.
SUS CSB M3 8mm
Jig (J727)
Moire angle adjusting pin
Fig. X106
2.5mm
-1102+ ,/.2
218
Cap Screw Wrench
()
Driver
NE00040-00
Adjustment
(5) Fine adjustment of Lissajous waveform

A waveform center voltage and an amplitude voltage are deviated after mechanical adjustment,
so that fine adjustment is necessary.
a)
Move the XY table slowly over the stroke range. (Approx. 5sec on one way as a reference)
b)
Adjust A phase (X) size by VR1 while monitoring the Lissajous waveform on the
oscilloscope.
c)
Adjust A phase (X) position by VR2 while monitoring the Lissajous waveform on the
oscilloscope.
Make sure that the A phase (X) waveform is higher than 1.0V but lower than 1.5Vover the
entire stroke.
VR1=Size in X direction
VR2=
Position in X direction
d)
Higher than
-1.0V
Higher than
+1.0V
Lower than
-1.5V
Lower than
+1.5V
Fig. X107
-1102+ ,/.2
Adjust B phase (Y) size by VR3 while monitoring the Lissajous waveform on the
oscilloscope.
e)
Adjust B phase (Y) position by VR4 while monitoring the Lissajous waveform on the
oscilloscope.
Set the B phase (Y) waveform to be higher than 1.0V but lower than 1.5V over the entire
Lower than +1.5V

Lower than -1.5V
Higher than
+1.0V
Higher than
-1.0V
VR4=Position in y direction
VR3=Size in Y direction
stroke.
Fig. X108
-1102+ ,/.2
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219
Adjustment
f)
After the end of Lissajous waveform adjustment, lock VR1, VR2, VR3, VR4 with paint.
220
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221
WIRE BONDER
UTC-1000
THIRD STEP GUIDE (2)
August 1, 2004 issue
Not for sale
Version 1
Issue
SHINKAWA LTD. Engineering Service Dept.

2-51-1 Inadaira Musashimurayama-shi,
Tokyo 208-8585, Japan
Edit
Masao Ogawa
Toshiyuki Gomi
Nobuyuki Mitui
Hideki Izaki
C
SHINKAWA LTD 2004. All rights reserved
NE00040-00
(Doc#2018-1)

3rd Step Guide

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WIRE BONDER

THIRD STEP GUIDE

You are requested to understand that our

company is not responsible even if a trouble should have occurred.

THIRD STEP GUIDE

Chapter 1 Periodical inspection

Third Step Guide (2)

THIRD STEP GUIDE

Chapter 2 Disassembly and adjustment

Third Step Guide (3)

THIRD STEP GUIDE

Chapter 2 Disassembly and adjustment

Disassembly and adjustment of universal indexer (Page 9 ~)

Disassembly and adjustment of XY table (Page 147 ~)

Cap Screw Wrench

Chapter 2 Disassembly and adjustment of

Disassembly and adjustment of universal indexer............................9

1. Specifications of universal indexer ..................................................................................... 10

Chapter 2 Disassembly and adjustment of

Disassembly and adjustment of XY table........................................... 147

1. Specifications of XY table ...................................................................................................148

For safe work

Each illustrated symbol means as follow.

Wrong operation, if executed due to the negligence of this caution

This symbol indicates an item to be careful when operating the machine.

Please read the contents

Please read the

For maintenance, use tools conforming to the accuracy of the machine.

A tool having poor accuracy may

Take an anti-static countermeasure without fail when adjusting electric units.

UTC-1000 inspection and adjusting points

Disassembly and adjustment

We are not responsible even if the

Chapter 2 Disassembly and adjustment of

Disassembly and adjustment of universal indexer

1. Specifications of universal indexer......................................................................................10

Disassembly and adjustment of universal indexer

0.07 ~ 2.0mm (by parts exchange)

0.07 ~ 0.16mm in thickness 50 ~ 70mm in width

0.3mm in thickness 20 ~ 80mm in width

0.5mm in thickness 20 ~ 80mm in width

0.7mm in thickness 20 ~ 80mm in width

Frame thickness corresponding to exclusive design 0.7 ~ 2.0mm in thickness

Rail on this side

Paddle adapter height setting range

Vertical stroke height resolution

Vertical stroke of upper pincher

Vertical stroke of lower pincher

Index pincher width of upper pincher

Index pincher width of lower pincher

Rail groove width

Rail groove depth

Rail groove width dial

Rail groove depth

RPS unit (RPS-01)

Unit magnification X0.75

Opening and closing of real rail

Opening and closing of front rail