Four Probe
Four Probe
Four Probe
Probe method
This equipment is Class 1 equipment tested in accordance with the European Standard
publication EN 61010-1.
This manual contains information and warnings that must be observed to keep the Instrument
in a safe condition and ensure safe operation.
To use the Instrument correctly and safely, read and follow the precautions in Table 1 and
follow all safety instructions or warnings given throughout this manual that relate to specific
measurement functions. In addition, follow all generally accepted safety practices and
procedures required when working with and around electricity.
SYMBOLS
The table below lists safety and electrical symbols that appear on the Instrument or in this
manual.
Table: Safety and Electrical Symbols
Warning
To avoid possible electric shock, personal injury, read the following before using the
Instrument:
• Use the Instrument only as specified in this manual, or the protection provided by
the Instrument might be impaired.
• Do not use the Instrument in wet environments
• Inspect the Instrument before using it. Do not use the Instrument if it appears
damaged.
• Inspect the connecting lead before use. Do not use them if insulation is damaged or
metal is exposed. Check the connecting leads for continuity. Replace damaged
connecting leads before using the Instrument.
• Whenever it is likely that safety protection has been impaired, make the
• Instrument inoperative and secure it against any unintended operation.
• Never remove the cover or open the case of the Instrument before without first
removing it from the main power source.
• Never operate the Instrument with the cover removed or the case open.
• Use only the replacement fuses specified by the manual.
• Do not operate the Instrument around explosive gas, vapor or dust.
• The equipment can remain Switched on continuously for five hours
• The equipment must remain Switched off for at least fifteen minutes before being
switched on again.
• The equipment is only for the intended use
• Use the equipment only as specified in this manual.
PID CONTROLLED OVEN
Model : PID-TZ
TEMP. CONTROLLER
PID
Temperature
Controller
Oven Selector
Switch between Temperture
600C & 200C Oven Sensor Connector
Temp. Sensor
OVEN-600 OVEN-200
Oven
Oven ON-OFF Switch for Selector
ON ON
600C Oven Oven ON-OFF Switch for
200C Oven
Oven Power for 600C
MAINS
Oven
Oven Power for 200C
ON Oven
Mains On-OFF switch
C
6 , , Setting Key
3 7
SV2 AT OUT EV1
4 8 7 EV1 : Indicate EVENT1 Output
MD AT
8 OUT : Indicate Output
9
9 MD Key : Mode Key
5 6
Fig.2 Shows the front panel of the Controller Panel for identification of the various keys,
indicators and displays
OBJECTIVES:
INTRODUCTION
Four Probe method is one of the standard & most commonly used method for the
accurate measurement of resistivity. It overcomes the problem of contact resistance and also
offer several other advantages. Accurate resistivity measurement in samples having a variety
of shapes is possible by this method. The pressure contacts provided in the Four Point
Arrangement are especially useful for quick measurement. This setup can measure samples of
reasonably wide resistivity range (micro ohm to mega ohm).
General Specifications
CURRENT
20mA 200mA
ON
OUTPUT
Controls
(1) OVEN SELECTOR Switch – to select between the smaller 200 ºC or larger 600 ºC
ovens. Select 200ºC for the small oven used in this experiment.
(2) POWER CONNECTORS – a 3-pin round for small 200ºC oven and two sockets for
the large 600ºC oven
(3) SENSOR CONNECTOR – Common thermocouple input for both ovens
(4) OVEN ON-OFF switches – for individual oven with its own indicator
(5) PID TEMPERATURE CONTROLLER – for setting, displaying and controlling the
temperature of the oven used. Details shown in Fig.2 above
(6) MAINS SWITCH – for connecting the mains power to the unit
200 µA
2mA
CURRENT
RANGE
ADJ.
OUTPUT ON
Controls
(1) Range Switch – The current meter can be switched between 2µA, 20µA,
200µA and 2mA range using this switch. Keep the range switch at the desired
range and set the desired current using the current control knob. In case the
meter shows over ranging (sign of 1 on the left and all other digits goes blank)
range switch maybe shifted to higher range.
(2) Panel Meter – Display the current in µA/ mA (as per setting of Range Switch)
(3) Current Control – This is to feed the desired current in the Sample.
(4) Current Output – Connect suitable connector from Four probe Arrangement in
this connector. This will enable the unit to feed the desired current in the sample
(5) ON-OFF Switch – To power the unit ON/ OFF.
Note: Please note that this unit is operated on 9V x 3 batteries. In case there is any
problem in operation, please check the batteries also. Batteries are assessable after
opening the Top Cover of the unit.
DIGITAL MICROVOLTMETER
Model : DMV-001
1 mV
10 mV
RANGE 100 mV
1V
10 V
ON
Controls
(1) Range Switch – The voltmeter can be switched between 1mV, 10mV, 100mV,
1V & 10V range using this switch. Keep the range switch at lowest range for
better accuracy. In case the meter shows over ranging (sign of 1 on the left and
all other digits goes blank) range switch maybe shifted to higher range.
(2) Panel Meter – Display the Voltage in mV/ V (as per setting of Range Switch)
(3) Zero Adj. Knob – This is to adjust Zero of Microvoltmeter before starting the
experiment.
(4) Voltage Input – Connect suitable connector from Four probe Arrangement in
this connector. This will enable the unit to measure the voltage output of the
sample
(5) ON-OFF switch – To power the unit ON/ OFF.
Probe Pipe
To Thermocouple
Probe Holding Connector
Screws
Spring Loaded
4 Probes
APPARATUS
(1). PID Controller with a Oven Unit, Model PID-TZ
(2). Constant Current Sources:-
a) Constant Current Source, Model CCS-01
b) Low Current Source, Model LCS-02
(3). D.C. Microvoltmeter, Model DMV-001
(4). Four Probe Arrangement with Thermocouple sensor and suitable connectors for
DMV and CCS/ LCS.
(5). Set of test samples and emery powder.
BASIC THEORY
Four sharp probes are placed on a flat surface of the material to be measured (Fig.7).
The current is passed through the two outer electrodes, and the floating potential is measured
across the inner pair. If the flat surface on which the probes rest is adequately large, it may be
considered to be a semi-infinite volume. To prevent minority carrier injection and make good
contacts, the surface on which the probes rest, maybe mechanically lapped.
The experimental circuit used for measurement is illustrated schematically in Fig. 8.
A nominal value of probe spacing, which has been found satisfactory, is an equal distance of
2.0 mm between adjacent probes.
In order to use the four-probe method, it is assumed that:
1. The resistivity of the material is uniform in the area of measurement.
2. If there is minority carrier injection into the semiconductor by the current - carrying
electrodes, most of the carriers recombine near the electrodes so that their effect on the
conductivity is negligible. (This means that the measurements should be made on surface,
which has a high recombination rate, such as mechanical by lapped surfaces).
3. The surface on which the probes rest is flat with no surface leakage.
4. The four probes used for resistivity measurements are equally spaced and collinear.
5. The diameter of the contact between the metallic probes and the semiconductor should be
small compared to the distance between probes.
6. The surfaces of the material may be either conducting or non-conducting.
A conducting boundary (such as copper) is one on which the sample is plated or placed.
A non-conducting boundary is produced when the surface of the sample is in contact with
an insulator.
PROBES
I V I
SEMICONDUCTORS
1 2 3 4
S1 S2 S3
PROBES
One added boundary condition is required to treat this case namely, the probes are far
from any of the other surfaces of the sample and the sample can thus be considered a semi-
infinite volume of uniform resistivity material. Fig. 7 shows the geometry of this case. Four
probes are spaced S1, S2 and S3 apart. Current I is passed through the outer probes (1 and 4)
and the floating potential V is measured across the inner pair of probes 2 and 3.
The floating potential Vf a distance r from an electrode carrying a current I in a
material of resistivity ρ0 is given by
ρ0 I
Vf =
2π r
In the model shown in Fig. 7 there are two current-carrying electrodes, numbered 1
and 4, and the floating potential Vf, at any Y point in the semiconductor is the difference
between the potential induced by each of the electrodes, since they carry currents of equal
magnitude but in opposite directions Thus:
ρ0 I 1 1
Vf = − (1)
2π r1 r4
where r1 = distance from probe number 1 and r4 = distance from probe number 4.
The floating potentials at probe 2, Vf2, and at probe 3, Vf3 can be calculated from (1)
by substituting the proper distances as follows :
ρ0 I 1 1
Vf2 = −
2π S1 S 2 + S3
ρ0 I 1 1
Vf3 = −
2π S1 + S 2 S3
The potential difference V between probes 2 and 3 is then
ρ0I 1 1 1 1
V = Vf2 − Vf3 = + − −
2π S1 S3 S 2 + S 3 S1 + S 2
and the resistivity ρ0 is computable as
V 2π
ρ0 = − (2)
I 1 1 1 1
+ − −
S
1 S 3 S1 + S 2 S 2 + S 3
+I -I
n = +2
2W
-I +I
n = +1
2W
+I 1 2 3 4
-I TOP SURFACE
n = -0
(NON-CONDUCTING)
S S S W SLICE
BOTTOM SURFACE
-I +I (CONDUCTING)
W
n = -1
3S
2W
+I -I
n = -2
Fig. 9: Images for the case of the resistivity probes on a slice with conducting bottom
surface
1.0
0.7
0.5
0.4
0.3
0.2
S S S
G6(W/S)
0.1
W
0.07
CONDUCTING BOUNDARY
0.05
0.04
0.03
0.02
0.01
0.1 0.2 0.3 0.4 0.5 0.7 1.0 2 3 4 5 7 10
(W/S)
Fig. 10: G6 (W/S) for probes on a thin slice with a conducting bottom surface
When the point spacings are equal, that is, S1 = S2 = S3 = S the above simplifies to :
V
ρ0 = × 2πS (3)
I
Two boundary conditions must be met in this case; the top surface of the slice must be
a reflecting (non-conducting) surface and the bottom surface must be an absorbing
(conducting) surface. Since the two boundaries are parallel, a solution by the method of
images requires for each current source an infinite series of images along a line normal to the
plane and passing through the current source.
The model for this case is shown in Fig. 9. The side surface of the slice is assumed to
be far from the area of measurement and, therefore, only the effect of the bottom surface
needs to be considered. In this analysis equal probe spacing S shall be assumed. The width of
the slice is W. The array of images needed is indicated in Fig. 9. where the polarity and
spacing of the first few images are as shown.
The floating potential Vf2 at electrodes 2 is
r I n =∞ 1 n =∞
1
Vf2 = (−1) n − (−1) n (4)
2p n = −∞ S2 + (2nW)2 n = −∞ (2S)2 + (2nW)2
Likewise, the floating potential at electrode (3) can be obtained and
ρ I 1
n =∞ n =∞
4 4
V= +
2 π S n =1 ( −1) n − ( −1) n
2
(5)
S 2 + (2nW) 2 n =1
2
(2S) + (2nW)
The resistivity then becomes
ρ0
ρ= (6)
G 6 ( W / S)
Where resistivity ρ0 is computable from (2, and 3) can be used if the point spacing are
different, but approximately equal. The function G6 (W/S) is computed from
n =∞
W S n 1 1
G6 = 1+ 4
S W n=1
( −1)
2
−
2 (7)
S 2 S 2
W + (2n)
2
W
+ (2n)
which is tabulated in Table I and plotted in Fig. 10.
100.0
70.0
S S S
40.0
30.0
W
20.0
NON CONDUCTING
BOUNDARY
10.0
7.0
5.0
4.0
2.0
1.0
0.1 0.2 0.3 0.4 0.5 0.7 1.0 2.0 3.0 4.0 5.0 7.0 10.0
Fig. 11: G7 (W/S) for probes on a thin slice with a non-conducting bottom surface
TABLE - I
S. No. W/S G6 (W/S) G7 (W/S)
1 0.100 0.0000019 13.863
2 0.141 0.00018 9.704
3 0.200 0.00342 6.931
4 0.33 0.0604 4.159
5 0.500 0.228 2.780
6 1.000 0.683 1.504
7 1.414 0.848 1.223
8 2.000 0.933 1.094
9 3.333 0.9838 1.0228
10 5.000 0.9948 1.0070
11 10.000 0.9993 1.00045
The model for these measurements is like the case 2, except that the bottom surface of
the slice is nonconducting. This means that all the images of Fig. 3 have the same charge as
the current source. Thus all the images on a row have equal charges and Eq. 5 describes the
potential difference across the inner pair of probes, if (-1)n is removed from the equation.
Then,
ρ0
ρ= , (8)
G 7 (W / S)
where
n= ∞
S 1 1
G 7 (W / S) = 1 + 4
W
2
−
2 (9)
n=1 S 2 S 2
W + ( n) 2 + (2 n)
W
This function G7(W/S) is tabulated in Table I. and plotted in Fig. 11. For smaller
values of W/S the function G7 (W/S) approaches the case for an infinitely thin slice, or
W 2S
G7 = log e 2 (10)
S W
Thus for sample W/S < 0.25 or sample thickness upto 0.5mm, the correction factor
may be obtained from equation (10) directly.
DIGITAL MICROVOLTMETER CONSTANT CURRENT SOURCE
Model : DMV-001 Model : CCS - 01
mA
1 mV
10 mV ZERO ADJ
RANGE 100 mV CURRENT
1V
10 V
20mA 200mA
ON OUTPUT ON
OR
PV ON
OUTPUT
sv
SV2 AT OUT EV1
MD AT
Temp. Sensor
OVEN-600 OVEN-200
Oven
Selector
ON ON
MAINS
OVEN
ON
Before starting the experiment, make sure that the surface of your sample is clean and
conducting. Particularly in case of Germanium and Silicon, a oxidation layer is formed which
causes error in readings. Therefore for such samples, it is advisable to remove this oxidation
layer by rubbing the sample in fine emery slurry on a glass surface for 2 – 3 minutes. The
sample will be ready to use after washing it in plane water and subsequent drying.
OBSERVATIONS
Correction Factor:
Since the thickness of the samples are small compared to the probe distance a correction
factor for it has to be applied. Further the bottom surface is non-conducting in the present
case, Eq. (9) will be applied.
ρ0
ρ=
G 7 ( W/S)
The function G7 (W/S) may be obtained from Table-I or Fig. 5 for the appropriate
value of (W/S). For sample W/S<0.25, correction factor may be obtained directly from Eqn.
10. Thus ρ may be calculated for various temperatures.
1.300
1.250
1.200
1.150
1.100
1.050
1.000
0.950
0.900
0.850
0.800
0.750
0.700
0.650
log10ρ
0.600
0.550
0.500
0.450
0.400
0.350
0.300
0.250
0.200
0.150
0.100
0.050
0.000
1.00 1.20 1.40 1.60 1.80 2.00 2.20 2.40 2.60 2.80 3.00 3.20 3.40 3.60 3.80 4.00 4.20
-0.050
-0.100
T-1 X 10-3
The results given above are only for reference, exact values depend upon the sample and
may not replicate.
1. Very high resistance (> 1MΩ) may cause high off-set in D.C. Microvoltmeter which can
not be adjusted with the knob provided - Note it down and treat it zero error.
2. Unstable voltage reading may be due to improper contacts of probes with the sample.
(a) This may be due to insulating layer on the sample - Clean it.
(b) It may be due to loose contacts of probes with the sample - tighten the springs of
4-probes (1/2 thread only)
(c) Check the earth point and see that the whole system, constant current power
supply, D.C. Microvoltmeter and Four Probe Arrangement are properly grounded.
3. In cases of semiconductor, like Si though the resestivity of sample may not be high but
because of contact resistance, its effective resistance is usually very high.
Sources of Error
1. Material (Al) used in the foil is commercial grade, while standard resistance is for pure
Al.
2. The thickness of Al foil is very small and there could be error of ± 7% in measurement
of thickness.
3. The formula for ρ is valid for semi-infinite /very large surface in comparision with the
probe distance.
4. Variation of doping in the sample
REFERENCES