VSO Low Flow: Thermally Compensated Proportional Valve
VSO Low Flow: Thermally Compensated Proportional Valve
VSO Low Flow: Thermally Compensated Proportional Valve
Features
Typical Applications • Enables precise low flow (0 - 500 sccm) control for improved instrument
• Gas Chromatography accuracy
• Mass Spectrometry • Thermally compensated to maintain precise flow over a wide range of media
• Pressure & Flow Control • Computer automated calibration and serialization for performance traceability
• Mass Flow Control
• Cleaned for Oxygen and Analytical Service use
• Proven performance tested to 10 million life cycles
• RoHS compliant
Product Specifications
Physical Properties Physical Properties Performance Characteristics
Valve Type: Internal Volume: Leak Rate:
2-Way Normally Closed 0.031 in3 (0.508 cm3) The leakage shall not exceed
Media: Filtration: the following values:
Air, argon, helium, hydrogen, 5 Micron (Customer Supplied) Internal 0.2 SCCM of He with a
methane, nitrogen, oxygen, & differential pressure of 1 psid,
Flow Direction: 25 psid and 150 psid
others
Inlet Port Port 2 External 0.016 SCCM of He at
Operating Environment:
Outlet Port Port 1 150 psi
32 to 131°F (0 to 55°C)
Oxygen and Analytically Clean: Pressure:
Storage Temperature:
Standard 0 to 150 psi (10.34 bar)
-40 to 158°F (-40 to 70°C)
Electrical See Table 1
Length:
Power: Vacuum:
1.79 in (45.3 mm)
1.0 Watt maximum 0-27 in Hg (0-686 mm Hg)
Width:
Voltage: Orifice Size:
0.63 in (15.9 mm) 0.003” (0.076 mm)
See Table 2
Height: Hysteresis:
Electrical Termination:
0.67 in (17.0 mm) 7% of full scale current (Typical)
18” (45.7 cm) Wire Leads
Porting: 15% of full scale current (Max)
Manifold mount Wetted Materials
Weight: Body: 360 H02 Brass,
2.2 oz (63 grams) 300 Series Stainless Steel
Stem Base:
430 FR Stainless Steel and
Brass 360 HT
All Others:
FKM; 430 FR Stainless Steel;
300 Series Stainless Steel
VSO is a registered trademark of Parker Hannifin Corporation.
2
®
VSO Low Flow Thermally Compensated Proportional Valve
Miniature Proportional Valves
0
0.45
150 psi / 10.34 bar
0.40 125 psi / 8.62 bar
100 psii / 6.89
6 89 bar
b
0.35
75 psi / 5.17 bar
ow Rate (sslpm)
0.20
Flo
0.15
0 10
0.10
0.05
0.00
0 10 20 30 40 50 60 70 80 90
Current (mA)
0.4
Flow Rate (slpm)
0.3
0.2
0.1
0.0
0 20 40 60 80 100 120 140 160
Pressure (psi)
Pressure and Flow Capabilities L3
Table 1
Maximum Operating
Maximum Operating
Orifice Diameter Pressure
Inlet Pressure
Differential
0.003 in (0.076 mm) 150 psig (10.34 bar) 150 psid (10.34 bar)
3
®
VSO Low Flow Thermally Compensated Proportional Valve
Mechanical Integration
Dimensions VSO Low Flow, Basic Valve Dimensions
VSO® Low Flow Basic Valve Dimensions
.625 [15.88] MAX.
.67 [17.0]
2X Ø.123 ±.003 .305 [7.75]
.305 [7.75]
[3.12 ±0.08] (I.D.)
PORT 2
(INLET)
.281 [7.14] 1.785 [45.34]
.27 [6.9]
2X Ø.125 [Ø3.18]
.125 [3.18] .055 [1.40]
.156 [3.96] .500 [12.70]
UNITS
PORT 1
.312 [7.92] (OUTLET) .500 [12.70] .055 [1.40] IN. [mm.]
Electrical Interface
Coil Type: 18” Wire Lead
.625 [15.88]
2X #26 AWG.
BLACK WIRES .305 [7.75]
18 1/2" ± 1/2"
[469.9 ± 12.7] LG.
1.53 [38.9]
APPROX.
Electrical Requirements
Table 2
Minimum Nominal Coil
Input Current for
Available Resistance @ 20ᵒC
Full Flow (mA)
Voltage (VDC) (Ohms)
6.5 47 130
8.0 68 115
12 136 80
18 274 60
24.0 547 43
4
®
VSO Low Flow Thermally Compensated Proportional Valve
Miniature Proportional Valves
INPUT SIGNAL
®
VSO Low Flow Thermally Compensated Proportional Valve
.310 ±.005
.310 ±.005 [7.87 ±0.13]
[7.87 ±0.13] .312 ±.005
[7.92 ±0.13] .620 ±.010 [15.75 ±0.25]
.250 ±.005
.170 ±.005 2X #4-40 UNC-2B
[6.35 ±0.13]
[4.32 ±0.13] X .260 [6.60] Ø.093 ±.005 [Ø2.36 ±0.13]
#10-32 UNF-2B .150 [3.81]
.620 ±.010 [15.75 ±0.25]
Accessories
O-Ring (Manifold Seal) Dimensions Screw 4-40 x 5/8” Pan Head, Phillips
190-007024-002 (2 required for each valve) 191-000115-010 (2 required for each valve)
I.D. = Ø.114 ±.005 [Ø2.90 ±0.13]
W = .070 ±.003 [1.78 ±0.08]
O.D. = Ø.254 [Ø6.45] REFERENCE
I.D. "W"
Ordering Information
Sample Part ID 910 - 0 0020 0 - 001
Description Series - Body / Elastomer Model Number Electrical Interface - Coil Voltage*/ Resistance
Options VSO 0: FKM / Brass VSO Low Flow, 0.003" 0: Wire Leads, 18" (45.7 cm) 001: 6.5 VDC / 47 OHMS
1: FKM / Stainless Steel (0.076 mm) Orifice 002: 8 VDC / 68 OHMS
003: 12 VDC / 136 OHMS
004: 18 VDC / 274 OHMS
007: 24 VDC / 547 OHMS
* Maximum voltage for continuous full flow,
ambient temperature 55°C
Accessories
190-007024-002: O-ring, FKM, 0.114" ID x 0.070" Thick* * Not supplied with the valve. Used as a seal between the valve body and manifold.
191-000115-010: Screw 4-40 x 5/8" Pan Head ** **Not supplied with the valve. Used to mount the valve to a manifold.
NOTE: In order to provide the best possible solution for your application, please provide the following ORDER
ON-LINE
requirements when contacting Applications Engineering:
• Media, Inlet & Outlet Pressures
• Minimum Required Flow Rate
• System Supply Voltage
• Media & Ambient Temperature Range
NOTES