Cv Valve

Compact Vacuum Valve

The Cv Valve has many configurations to suit your system’s Seal choices for the Cv Valve include Viton® and Chemraz®
particular needs. The angle and inline valves include pneumatic elastomers for leak-tight operation with a metal bonnet seal
or manual actuation. The manual actuation is attained option in UHV applications. Vacuum exposed parts are
either through a rotary knob or toggle lever. The rotary clean and free of lubricants. Additional options include an air
knob option allows for conductance variability and includes solenoid for electro-pneumatic control and a limit switch for
a visual position indicator. remote indication of the valve’s position.

The angle Cv Valve is available in two body sizes, ¾'' and A special feature of the pneumatic Cv Valve is a reversible
1''. The inline model is available in the 1'' size. Both models actuation assembly which allows you to change the actuation
are available with a variety of flange options, including from normally open to normally closed. In the event of
CF and ISO-KF flanges. The body is comprised of high power or air loss, the valve will fail open or closed, depending
grade, corrosion resistant, 304 stainless steel with non- on the actuation setting of the spring, in about 100 milliseconds.
magnetic properties to ensure more accurate gauge readings.
All these standard features provide reliable operation with
MKS utilizes clean, tungsten inert gas (TIG) welding for
less down time. The Cv Valve is virtually maintenance-
significantly fewer entrapment areas.
free with a bellows life expectancy of 1,000,000 cycles
A formed 321 stainless steel bellows is incorporated into for the pneumatic version.
the Cv Valve. The stroke length has been optimized to
ensure a longer life cycle while maintaining high conductance.

Product Features

• Used for gauge isolation on semiconductor process

systems

• Formed bellows of 321 stainless steel for reduced

particle generation and a longer cycle life

• Manual or pneumatic actuation

• Interchangeable actuation for normally open and
normally closed pneumatic actuators
Key Benefits
• Cycle life exceeding 1,000,000 cycles in clean
conditions
• Designed for use in vacuum systems as gauge
isolation, roughing, bypass, or venting valve
• High purity, corrosion resistant, 304 stainless steel
• High conductance improves gauge response time
• Assorted seal options to meet process needs and accuracy of gauge readings

• Compact design for space constrained applications

If you have any special valve requirements, the staff at Primarily used for gauge or system isolation, it is also
MKS will gladly assist you in meeting them. We can recommended as a venting, bypass, or roughing valve.
customize the Cv Valve to meet your process needs. For
In gauge isolation applications, the Cv Valve’s high
more information, call 1.800.227.8766. The LTA (Low
conductance ensures more accurate readings and
Temperature Alert) option provides remote notification
helps improve gauge response time. The Cv Valve can
if a heater’s temperature has become undesireably low.
isolate the sensor from the chamber during venting
Male and female twist-lock connectors are standard.
to atmosphere. If a capacitance manometer is being
Applications used, the isolation valve will prevent overpressuring
The Cv Valve’s high conductance, compact, durable and the diaphragm. Where the gauge is used to monitor
dependable design make it the foremost choice for today’s pressure, and not required for process control, it can be
high vacuum process needs. The Cv Valve is ideally isolated during the process to prevent process gases
suited for the semiconductor industry or research environments. from contaminating the gauge.

Specifications
Conductance Angle KF 25 • 4.5 l/sec
Inline KF 25 • 3.4 l/sec
Cylinder Air Pressure 60 to 120 psig
Pneumatic Cylinder Displacement Volume 0.25 in.3 (4.1 cm3)
Approximate Pneumatic Closing Time 100 msec

Blow-By Pressure 30 psi (1500 Torr) differential

Vacuum Range Atmosphere to below 10-9 Torr

• 6.0 watts - AC
Solenoid Valve Coil Power
• 7.0 watts - DC

Helium Leak Test • Less than 1.0 x 10-9 std cc/sec

Typical Valve Weight Angle • 12.8 oz. (360 g) (KF 16 flanges)
Inline • 16.9 oz. (480 g) (8 VCR flanges)
Wetted Volume 1.09 in3 (17.8 cm3) (Angle KF 16 flanges)
Operating Temperature -26° to 125° C
Maximum Bakeout Temperature 150° C
Pneumatic Life Cycles 1,000,000
Orientation Seals against atm at either port
Limit Switch Rating .5 A - 115 VAC
Single Pole, Single Throw .5 A - 24 VDC
 CV Inline Valve Ordering Information
Body Configuration Flanging
CVXX -XX
Actuator Type Bonnet Seal Nose Seal Control Port
Angle -XX X X Accessories
CV16 Flanges Inline
Angle Inline Pneumatic and -XXX
CV16 Flanges
bottom port side port Toggle Seals

CV 16 CVNL B2 B2 B2 LC C K F12
¾'' Port 1'' Port ¼'' Tube Stub ¼'' Tube Stub ¼'' Tube Stub Normally Closed Copper Kalrez 1/8'' NPT-F
w/ Limit Switch
B4 B4 B4 K S N12
½'' Tube Stub ½'' Tube Stub ½'' Tube Stub MT Kalrez® Silicone 1/8'' NPT-M
Manual Toggle
B6 B6 B6 N V T12
¾'' Tube Stub ¾'' Tube Stub ¾'' Tube Stub NC Nickel Viton* 1/8'' Tube Coupling
Normally Closed
C1 C1 B8 S Z T4M
1-1/3'' CF 1-1/3'' CF 1'' Tube Stub NO Silicone Chemraz 4 mm (5/32'')
Normally Open Tube Coupling
K0 K0 K1 V
KF 10 KF 10 KF 16 Viton® T25
¼'' Tube Coupling
K1 K1 K2 Z
KF 16 KF 16 KF 25 Chemraz® 24A
24 VAC
OF OF 4F 50/60 Hz SPV
8 VCO®-F* 8 VCO®-F* 4 VCR-F*
24D
OM OM RF 24 VDC SPV
8 VCO®-M* 8 VCO®-M* 8 VCR-F*
Manual Knob Manual Knob 12D
4F 4F Actuation Seals 12 VDC SPV
4 VCR®-F* 4 VCR®-F*
100
4M 4M MK KC 100 VAC
4 VCR®-M* 4 VCR®-M* Manual Rotary Copper 50 Hz SPV
Knob
RF RF KK 120
8 VCR®-F* 8 VCR®-F* Kalrez 120 VAC
50/60 Hz SPV
RM RM KN
8 VCR®-M* 8 VCR®-M* Nickel 208
208 VAC
KS 50/60 Hz SPV
Silicone
CV25 CV25 CV25 240
Body Flanges Flanges KV 240 VAC
Viton 50/60 Hz SPV

CV 25 B8 B8 KZ NONE
1'' Port 1'' Tube Stub 1'' Tube Stub Chemraz 10-32 UNC-F

C2 C2
2 1/8'' CF 2 1/8'' CF

C3 C3
2 ¾'' CF 2 ¾'' CF

K2 K2
KF 25 KF 25

Add the options to the price of the body, for example: CV25-K2K2-NCCV-120 (Angle); CVNL-K2-NCCV-120 (Inline). 1 For LC, NO and NC actuator types only. SPV
- Solenoid Pilot Valve.* VCR® and VCO®-compatible parts may be used. Note: Add the price of the base heater to the price of the options. Sample part number:
9815-0130-1105-2-11. All heaters require two (2) heatable clamps. Power cables are not included with heaters and must be ordered separately. Do not exceed 12
amps draw per power cord.

Spare Parts Part Number

Rebuild Kit, Pneumatic, Viton O-Rings 100004937

Rebuild Kit, Pneumatic, Chemraz O-Rings 100008317
Rebuild Kit, Toggle, Viton O-Rings 100008311
Rebuild Kit, Toggle, Chemraz O-Rings 100008313
Rebuild Kit, Knob, Viton O-Rings 100010491
Rebuild Kit, Knob, Chemraz O-Rings 100010492
O-Ring Seal Kit, Viton® 100012281
O-Ring Seal Kit, Chemraz® 100012282
O-Ring Seal Kit, Kalrez® 100012283
O-Ring Seal Kit, Silicone 100012284
 Dimensions
Flanging Control Port
Body A B Size C D E
(order code) (order code)

CV 16 B2, B4, B6 1.6 (41) F12 1.6 (41) CV16 2.4 (62) 2.7 (69) 4.0 (101)
Weld Stub 1/8'' NPT-F

C1 1.8 (46) N12 1.6 (41)

1 1/3'' CF 1/8'' NPT-M CV 25 2.6 (65) 2.8 (71) 4.1 (104)

K0 1.4 (35) T12 1.5 (39)
KF 10 1/8'' Tube Coupling

K1 1.4 (35) T4M 1.6 (41)

KF 16 4 mm (5/32'')
Tube Coupling
OF 1.6 (41)
8 VCO-F* T25 1.7 (43)
¼'' Tube Coupling
OM 2.1 (54)
8 VCO-M* Solenoid Valve 2.6 (67)

4F 2.2 (55) Manual Rotary Knob 0.9 (22)

4 VCR-F*
Manual Toggle 1.6 (41)
4M 2.2 (55)
4 VCR-M*

RF 2.3 (58)
8 VCR-F*

RM 2.3 (58)
8 VCR-M*

CV 25 B8 1.8 (46)
Weld Stub

C2 2.0 (51)
2 1/8'' CF

C3 2.0 (51)
2 3/4'' CF

K2 1.4 (35)
KF 25
Pneumatic Actuation Manual Toggle Manual Rotary Knob

* VCR and VCO -compatible parts may be used.

® ®

Flanging A
(order code)

B2 1.7 (43)
¼'' Weld Stub

B4 2.3 (58)
½'' Weld Stub

B6, B8 2.0 (51)

3/4'', 1''
Weld Stub

K1, K2 3.0 (76)

ISO-KF
NW 16, NW 25

4F 2.8 (71)
4 VCR-F*

RF 3.5 (89)
8 VCR-F*
Pneumatic Actuation Manual Toggle Manual Rotary Knob
* VCR® and VCO®-compatible parts may be used.

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