CP 070 Leak Detecting Instruments EN
CP 070 Leak Detecting Instruments EN
CP 070 Leak Detecting Instruments EN
Leak Detecting
Instruments
Helium Sample Probes (Sniffers) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 806
Miscellaneous
Connection Flanges. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 808
Connection Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 808
Applications
for Leak Detecting Instruments
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Applications
Semiconductor production n n n n n
Vacuum coating n n n
Research and development n n n n n n n
Chemistry/pharmaceutical n n n n n n n
Metallurgy/furnaces n n n
Lamps and tube manufacture n n n n n
Automotive industry n n n n n
Laser engineering n n n
Particle accelerators n n n n
Analytical engineering n n n n n n n
Systems with cryopumps n n n n n n
Cooling and air conditioning n n n n
Electrical engineering n n n n n n
Mechanical engineering n n n n
Power plants n n n n
Systems engineering n n n n
UHV applications n n n n n n
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Accessories Page
Trigger relay boards standard standard standard standard standard standard standard
1)
Upon request
Leak Detecting
Instruments
Vacuum method
is acceptable. Absolutely leak-tight
Helium leak detector PHOENIX L300i DRY
components and systems do not exist.
A component is considered technically
Helium leak detector PHOENIX L300i MODUL
leak-tight if its leak rate remains below
a value defined for this particular com- Helium leak detector PHOENIX L500i
Overpressure method
vacuum technology mbar x l x s-1 is
Helium leak detector PHOENIX L500i
used as the unit for leak rates.
Pressure rise
A leak rate of 1 mbar x l x s-1 exists in
a closed vessel having a volume of Bubble test
1 liter when the pressure increases by
Pressure drop test
1 mbar within one second, or in case
of an overpressure it decreases by
1 mbar within one second. Overview of the leak rate detection ranges
V x Vp
qL = (mbar x l x s-1) rent leak detection principles and leak detection are called leak detectors.
·S
hence leak detectors (see figure). The leak detectors presented in this
The wide range of leak rates from Besides the determination of the total product section can be used for the
several 100 mbar x l x s-1 to below leak tightness, it is usually important to localization of leaks, and in addition
10-11 mbar x l x s-1 as they occur in locate the leak, quickly and precisely, some are suitable for determining the
practice necessitates the use of diffe- in order to seal it. Instruments for local total leak rate of test objects.
Pa x m3 x s-1 1 10 9.87
-1
1 mbar x l x s (He) 0.1 1 0.99
3 -1 *) 3 -1
1 atm x cm x s = cm (STP) x s 0.101 1.01 1
-1*)
1 Torr x l x s 0.133 1.33 1.33
1 kg x h-1 air 23.4 234 234
1 g/a C2H2F4 (R 134a) 6.41 x 10 -7
7.58 x 10 -6
6.3 x 10-6
1 atm x cm3 x s-1 *) = cm3 (STP) x s-1 0.76 4.3 x 10-3 2.3 x 105
*)
According to international system of units only Pa x m3 x s-1 is permissible
Leak Detecting
Instruments
2. If possible the test objects should be object and the measured pressure rise face of the test object comes into con-
tested under the same conditions that over a fixed rise time (see equation on tact with the search gas. If the search
will be used in their final application, i.e. page before). Curve (c) shows the gas enters the test object, the total leak
parts for vacuum operation should be pressure rise as it occurs in practice, rate is indicated independently of the
tested according to the vacuum where out-gassing and leak rate add. number of existing leaks. With helium
method and parts for overpressure The detectable leak rate depends on leak detectors it is possible to determi-
operation should be tested using the the volume of the test object, the ne the helium content of the air. This is
overpressure method. obtained ultimate pressure and the out- utilized in the detection of gross leaks.
gassing from the test object. In con-
nection with very large test objects this
method is time consuming if extremely
low leak rates are to be determined in
the fine and rough vacuum range.
6 1
LD
HELIUM
2
a) Pressure rise due to leakage
b) Pressure rise due to outgassing
from the chamber walls
4
c) Both effects combined
3
Pressure rise in a vacuum chamber after switching Local leak detection – Evacuated test object (left) and Integral method – Evacuated test object (right)
off the pump; double log. plot
5
1
1
6
3 3
6
2 LD 2 LD
HELIUM HELIUM
Local leak detection – Integral method (search gas accumulation) Integral method –
Search gas overpressure in the test object Search gas overpressure in the test object Search gas overpressure in the test object
Leak Detecting
multistage switchable high impedance
Instruments
input amplifiers of the leak detectors with V = Volume of the test object
also permit the measurement of high SHe = Volume flow rate for he-
leak rates. lium at the point of the
test object
In practical applications, especially in the (or at the inlet of the leak
localization of leaks the response time is detector, if it alone pumps
of great significance. This is the time it down the test object).
takes from spraying the test object with
Leak Detecting
Instruments
PHOENIX L300i
example
(11,93)
30,3
457
(179,92)
438
(172,44)
57
(22,44)
32
(12,6)
(150,39)
(22,05)
56,5
382
282
(111,02)
213 207
(83,86) (81,5)
49
22 41,5
(19,29)
(8,66) (16,34)
(172,64)
(160,83)
(22,24)
438,5
408,5
56,5
438,5
(172,64)
382
(150,39)
38,5
(15,16)
495
(194,88)
Dimensional drawing for the PHOENIX L300i (rear side) Dimensional drawing for the PHOENIX L300i
(side and upper side)
Leak Detecting
Instruments
Ordering Information PHOENIX L300i
Part No.
PHOENIX L300i
EURO version
230 V, 50/60 Hz, mbar readout,
with integrated calibrated leak TL 7 250000V01
US version
115 V, 60 Hz, mbar readout,
with integrated calibrated leak TL 7 251000V01
Japan version
100 V, 50/60 Hz, mbar readout,
with integrated calibrated leak TL 7 251100V01
Tablet incl. software (APP), WiFi module,
protection case (IP 67) PHOENIX L300i 252005V01
Tablet incl. software (APP), communication
cable and E-chip, protection case (IP 67)
PHOENIX L300i 252005V02
Tablet holder PHOENIX L300i 252007V01
BARCODE scanner tablet PHOENIX L300i 252008V01
Tablet table stand 252009V01
Tablet lock 252010V01
Partial flow system (115-230 V) 140 20
PC software LeakWare 140 90
For further accessories see para.
“Accessories for PHOENIX L300i,
PHOENIX L300i DRY and PHOENIX L300i MODUL”
(48,54)
protection - Laser
(11,93)
30,3
457
(179,92)
438
(172,44)
57
(22,44)
32
(12,6)
(150,39)
(22,05)
56,5
382
282
(111,02)
213 207
(83,86) (81,5)
49
41,5
(19,29)
22 (16,34)
(8,66)
(172,64)
(160,83)
(22,24)
438,5
408,5
56,5
438,5
(172,64)
382
(150,39)
38,5
(15,16)
495
(194,88)
Dimensional drawing for the PHOENIX L300i DRY (rear side) Dimensional drawing for the PHOENIX L300i DRY
(side and upper side)
Leak Detecting
Instruments
Russian, French, Italian, Spanish, Polish and Korean
Part No.
PHOENIX L300i DRY
EURO version
230 V, 50 Hz, mbar readout,
with integrated calibrated leak TL 7 250001V01
US version
115 V, 60 Hz, mbar readout,
with integrated calibrated leak TL 7 251001V01
Japan version
100 V, 50/60 Hz, mbar readout,
with integrated calibrated leak TL 7 251101V01
Tablet incl. software (APP), WiFi module,
protection case (IP 67) PHOENIX L300i 252005V01
Tablet incl. software (APP), communication
cable and E-chip, protection case (IP 67)
PHOENIX L300i 252005V02
Tablet holder PHOENIX L300i 252007V01
BARCODE scanner tablet PHOENIX L300i 252008V01
Tablet table stand 252009V01
Tablet lock 252010V01
Partial flow system (115-230 V) 140 20
PC software LeakWare 140 90
For further accessories see para.
“Accessories for PHOENIX L300i,
PHOENIX L300i DRY and PHOENIX L300i MODUL”
The PHOENIX L300i MODUL combines PHOENIX L300i MODUL PHOENIX L300i MODUL
the excellent characteristics of the with Oil Sealed with Dry Compressing
PHOENIX L300i with those of the Backing Pump Scroll Pump
pump system which has been added
This combination represents a powerful This combination represents a dry high-
to the basic leak detector module.
leak detector, the pumping speed of performance leak detector.
This results in two basic groups: which is adapted to the particular appli-
cation in each case.
- Dry, mobile leak detectors with
Advantages to the User
selectable pumping speed
- Oil sealed, mobile leak detectors - Very high pumping speed which is
Advantages to the User
offering a high pumping speed at an also acceptable for testing semi-
optimum price-to-performance ratio. - Cost-effective leak detector conductor production chambers
- Pumping speed optimized for the without having to use their own
particular application pump systems
All applications involving short cycles All applications which demand a clean
and/or larger volumes and which requi- process, for example:
re a mobile system, for example: - Semiconductor industry (chip manu-
- Automotive industry facturers)
Sniffer mode mbar x l x s-1 < 1 x 10-7 < 1 x 10-7 < 1 x 10-7
Leak Detecting
Instruments
Units of measurement (selectable)
Pressure mbar, Pa, atm, Torr mbar, Pa, atm, Torr mbar, Pa, atm, Torr
Leak rate mbar x l x s-1, Pa x m3 x s-1, mbar x l x s-1, Pa x m3 x s-1, mbar x l x s-1, Pa x m3 x s-1,
Torr x l x s-1, Torr x l x s-1, Torr x l x s-1,
atm x cc x sec-1, sft3/yr atm x cc x sec-1, sft3/yr
Sniffer mode ppm, g/a eq, oz/yr eq ppm, g/a eq, oz/yr eq ppm, g/a eq, oz/yr eq
Mass spectrometer 180° magnetic sector field 180° magnetic sector field 180° magnetic sector field
Dimensions (W x H x D) mm 495 x 456 x 314 495 x 456 x 314 495 x 456 x 314
Available languages English, German, Chinese, English, German, Chinese, English, German, Chinese,
Japanese (Katakana), Japanese (Katakana), Japanese (Katakana),
Russian, French, Russian, French, Russian, French,
Italian, Spanish, Italian, Spanish, Italian, Spanish,
Polish, Korean Polish, Korean Polish, Korean
1)
With SCROLLVAC SC 30 DL
2)
With SCROLLVAC SC 15 D
Accessories
Recommended backing pumps Euro version US version
230 V, 50 Hz 115 V, 60 Hz
SOGEVAC SV 16 BI 960 286 upon request
SOGEVAC SV 28 BI 960 277 upon request
SOGEVAC SV 40 BI upon request upon request
TRIVAC D 16 B 113 25 upon request
TRIVAC D 25 B 113 35 upon request
SCROLLVAC SC 15 D 133 001 133 101
SCROLLVAC SC 30 DL 133 050 133 051
1095
999
647
191 200
125
40 76 525
537
729
CART 300 (with PHOENIX L300i) Dimensional drawing for CART 300
(here as an example with leak detector and scroll pump SCROLLVAC SC 30 DL)
Weight
without leak detector and pump, approx.
kg (lbs) 50.0 (110.38)
Leak Detecting
Instruments
(here as an example with leak detector
and scroll pump SCROLLVAC SC 30 DL)
CART 300
252 005 252 005
without E-Box
252 006 –
with E-Box 230 V, EURO version
345
315
630
999
Leak Detecting
Instruments
Time constant of the leak rate signal
(blanked off, 63% of final value) s < 0.2
Mass spectrometer 180° magnetic sector field
Ion source 2 filaments; iridium/yttria-oxide
Part No.
Helium leak detector PHOENIX L500i
Rotary vane vacuum pump filled with
Mineral oil LVO 100 503504V901
PFPE oil LVO 400 503504V902
Calibrated leak
TL 9 144 08
TL 8 165 57
TL 6 155 66
TL 4 155 65
TL 4-6 155 80
Reducer DN 63 ISO-K / DN 40 ISO-KF 887 40
Search gas spray gun for Helium
(including 5 m long hose) 165 55
Antistatic worktop optional
Part No.
PHOENIX L340i upon request
Custom PHOENIX L340i upon request
- High pumping speed due to separa- Typical Applications The PHOENIX L320i Fab is equipped
te backing pump Quality assurance on the following: with useful accessories like gas cylinder
- Low particle emissions due to holder, hooks for the sniffer hoses and
- Equipment operated in areas with mains cord as well as a separate
encapsulated backing pump
increased cleanness requirements switch for the backing pump.
- Rapid entry in to the ready mode
- Equipment for research and deve-
- High detection sensitivity for helium, lopment
thus very small leaks can be detec-
- One off products
ted
Leak Detecting
Instruments
Technical Data PHOENIX L320i Fab
Part No.
PHOENIX L320i Fab upon request
Custom PHOENIX L320i Fab upon request
RC 310 C / RC 310 WL
Remote Control Units for Leak Detectors
The RC 310 remote control unit with
their industrial design RC 310 WL
(wireless) and RC 310 C (cable) and
integrated data memory offer utmost
flexibility during the leak detection pro-
cess.
The RC 310 WL permits wireless remo-
te monitoring up to a distance
of 100 m. The RC 310 units support
the current leak detectors of the
PHOENIX L300i series as well as the
Wired remote control unit RC 310 C Wireless remote control unit RC 310 WL
UL 200 and L 200 models.
Memory capacity
Internal memory capacity MB 64
of this available for recording data MB 32
or memory stick
Battery operating time (RC 310 WL only), (depending on charging condition) hours >8
Battery charger
Mains voltages V 100 -240 (+/- 10%)
Frequencies Hz 50/60
Leak Detecting
Instruments
Available languages English, German
Protection class IP 42
Dimensions (L x W x H) mm 210 x 90 x 45
Weight
RC 310 C, approx. kg (lbs) 0.4 (0.88)
RC 310 WL, approx. kg (lbs) 0.5 (1.1)
Part No.
Remote control
RC 310 C, wired with 4 m long connection cable 252 013 V01
RC 310 WL, wireless with battery charger (for integrated rechargeable battery) and
wireless transmitter with connection cable (additional 4 m long connection cable) 252 014 V01
Accessories
Wireless transmitter with connection cable (for operation of a further PHOENIXL) 252 015 V01
Test leaks
Note
All calibrated leaks with the exception
of the TL 4 are not suited for use in a
vacuum.
TL 6, without helium gas reservoir 10-6 mbar x l x s-1 Vacuum and sniffer DN 16 ISO-KF
TL 4-6, with helium gas reservoir 10-4 to 10-6 mbar x l x s-1 Vacuum and sniffer DN 16 ISO-KF
TL 4, with helium gas reservoir 10-4 mbar x l x s-1 Vacuum Discharging opening
-7 -1
TL 7, with helium gas reservoir 10 mbar x l x s Vacuum (for installation Nozzle
within the PHOENIX L300i)
S-TL 6, with helium gas reservoir 10-6 mbar x l x s-1 Sniffer Nozzle
Leak Detecting
Instruments
Part No.
1)
TL 4, without helium gas reservoir 155 65
1)
TL 6, without helium gas reservoir 155 66
1)
TL 4-6, with helium gas reservoir 155 80
1)
TL4, with helium gas reservoir 122 67
TL 7, with helium gas reservoir 1)
for installation within the PHOENIX L300i
filling pressure 8 bar 140 23 V01
filling pressure 2,9 bar 140 23
TL 7, with manual valve
1)
and helium gas reservoir 142 10
1)
TL 8, with helium gas reservoir 165 57
1
TL 9, with helium gas reservoir 144 08
1)
S-TL 4, with helium gas reservoir 122 37
1)
S-TL 5, with helium gas reservoir 122 38
1)
S-TL 6, with helium gas reservoir 122 39
Set of calibrated leaks for power plants
1000, 100, 10 mbar x l x s-1 115 16
Rubber bladder with hose clamp 890 11
Helium can; 1 l, 12 bar (for TL 4-6) 252 001
DAkkS calibration for TL 7/8/9 154 15
Factory calibration for He test leaks 154 16
1)
With factory certificate
Calibrated leak with screw-in sleeve Calibrated leak with pin type casing Calibrated leak with cylindrical casing
1,0E+00
mbarl/s
1,0E-01
1,0E-02
1,0E-04
1,0E-05
1,0E-06
1,0E-07
1,0E-08
1 2 3 4 5 6 7 8 9 10
bar
Specified pressure
Test pressure PV
Leak rate as a function of applied forevacuum with reference to 0 bar (> 7 bar upon request)
M 3.5
Leak Detecting
Instruments
Calibrated leak with screw-in sleeve Calibrated leak with pin type casing and hose nozzle
9.5 mm
9.5 mm
Calibrated leak with pin type casing and VCO fitting Calibrated leak with cylindrical casing and VCO fitting
1)
Ordering Information Calibrated Leak
Part No.
Calibrated leak
with screw-in sleeve 143 00
with pin type casing and VCO fitting 143 04
with pin type casing and hose nozzle 143 08
with cylindrical casing and VCO fitting 143 12
1)
When ordering please always state leak rate, test pressure and helium concentration
Partial flow system without pump Replacement ion source PC software LeakWare
Part No.
Leak Detecting
Instruments
Replacement ion source 165 04
1)
5 centering rings, 5 clamping rings and 1 vacuum hose 1 m with DN 25 ISO-KF are included
2)
Extension „X“ respectively with actual tablet version
Helium sniffer line SL 300 Helium sniffer QUICK-TEST QT 100 with sniffer
Leak Detecting
Instruments
SL 300
red/green LED
ZERO button
4 m long, straight handle 252 003 –
SL 301
04 m long, straight handle 252 025 V01 –
10 m long, straight handle 252 026 V01 –
Connection Flanges
Leak Detectors Helium Sniffers Calibrated Leaks
If components of the same nominal width are connected, only one centering ring and one clamping ring will be required.
Connection Components
When wanting to connect accessories (helium sniffer and calibrated leaks) to a leak detector, the following reducers and
components may be necessary:
1)
See clamps for ISO-K flanges in the Product Part “Flanges and Fittings”
The following metal hoses are recommended to connect the leak detectors to systems:
Part No.
Further connecting components, like quick clamping rings and other components are described in Product Part “Flanges and Fittings”