CP 070 Leak Detecting Instruments EN

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Contents

Leak Detecting Instruments


General
Applications for Leak Detection Instruments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 778
Accessories for Leak Detection Instruments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 779
Leak Detection - Leak Testing. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 780
Leak Detection Methods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 781
Operating Principles of the Helium Leak Detectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 783
Products
Helium Leak Detectors
PHOENIX L300i . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 786
PHOENIX L300i DRY. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 788
PHOENIX L300i MODUL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 790
CART 300 for PHOENIX L300i . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 793
PHOENIX L500i . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 794
Special Versions
PHOENIX L340i, Mobile Helium Leak Detector as Seated Workplace . . . . . . . . . . . . . . . . . 796
PHOENIX L320i Fab, Mobile Helium Leak Detector for Increased Cleanness Requirements . . . . . . 797
Accessories
Remote Control Units for Leak Detectors RC 310. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 798
Calibrated Leaks for Vacuum and Sniffer Applications. . . . . . . . . . . . . . . . . . . . . . . . . . . . 800
Screw-in Calibrated Leaks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 802
Accessories for the PHOENIX L300i, PHOENIX L300i DRY, PHOENIX L300i MODUL and PHOENIX L500i . .804

Leak Detecting
Instruments
Helium Sample Probes (Sniffers) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 806
Miscellaneous
Connection Flanges. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 808
Connection Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 808

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 777


General

Applications
for Leak Detecting Instruments

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Applications
Semiconductor production n n n n n
Vacuum coating n n n
Research and development n n n n n n n
Chemistry/pharmaceutical n n n n n n n
Metallurgy/furnaces n n n
Lamps and tube manufacture n n n n n
Automotive industry n n n n n
Laser engineering n n n
Particle accelerators n n n n
Analytical engineering n n n n n n n
Systems with cryopumps n n n n n n
Cooling and air conditioning n n n n
Electrical engineering n n n n n n
Mechanical engineering n n n n
Power plants n n n n
Systems engineering n n n n
UHV applications n n n n n n

778 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold


Accessories
for Leak Detecting Instruments

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Accessories Page

Remote control unit RC 310 788 n n n n n n


Calibrated leaks 792 n n n n n n n
Screw-in calibrated leaks 794 n n n n n n n
Transportation means 796 n n n n
Partial flow system 796 n n n
PC software LeakWare 796 n n n n n n
Helium sniffers 798 n n n n n 1)
n n
Exhaust filter sets standard standard standard

Interfaces standard standard standard standard standard standard standard

Gas ballast facilities standard standard

Trigger relay boards standard standard standard standard standard standard standard

1)
Upon request

Leak Detecting
Instruments

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 779


Leak Detection – Leak Testing
Whether a component or a system is
leak-tight depends on the application it
is to be used in and the leak rate that Helium leak detector PHOENIX L300i

Vacuum method
is acceptable. Absolutely leak-tight
Helium leak detector PHOENIX L300i DRY
components and systems do not exist.
A component is considered technically
Helium leak detector PHOENIX L300i MODUL
leak-tight if its leak rate remains below
a value defined for this particular com- Helium leak detector PHOENIX L500i

ponent. In order to provide a quantita-


103................100 10-1 10-2 10-3 10-4 10-5 10-6 10-7 10-8 10-9 10-10 10-11 10-12 mbar x l x s -1
tive measure, the term “leak rate” with
the symbol “qL” was introduced. In Helium leak detector PHOENIX L300i

Overpressure method
vacuum technology mbar x l x s-1 is
Helium leak detector PHOENIX L500i
used as the unit for leak rates.
Pressure rise
A leak rate of 1 mbar x l x s-1 exists in
a closed vessel having a volume of Bubble test
1 liter when the pressure increases by
Pressure drop test
1 mbar within one second, or in case
of an overpressure it decreases by
1 mbar within one second. Overview of the leak rate detection ranges

V x Vp
qL = (mbar x l x s-1) rent leak detection principles and leak detection are called leak detectors.
·S
hence leak detectors (see figure). The leak detectors presented in this
The wide range of leak rates from Besides the determination of the total product section can be used for the
several 100 mbar x l x s-1 to below leak tightness, it is usually important to localization of leaks, and in addition
10-11 mbar x l x s-1 as they occur in locate the leak, quickly and precisely, some are suitable for determining the
practice necessitates the use of diffe- in order to seal it. Instruments for local total leak rate of test objects.

Leak Rate atm x cm3 x s-1 *)


atm x cm3 x s-1 *)

Pa x m3 x s-1 mbar x l x s-1 *)


cm3 x s-1 *)

Pa x m3 x s-1 1 10 9.87
-1
1 mbar x l x s (He) 0.1 1 0.99
3 -1 *) 3 -1
1 atm x cm x s = cm (STP) x s 0.101 1.01 1
-1*)
1 Torr x l x s 0.133 1.33 1.33
1 kg x h-1 air 23.4 234 234
1 g/a C2H2F4 (R 134a) 6.41 x 10 -7
7.58 x 10 -6
6.3 x 10-6

atm x cm3 x s-1 *)


kg x h-1 g/a
Leak Rate
-1 1)
Torr x l s Air C2H2F4 (R 134a)

Pa x m3 x s-1 7.5 4.28 x 10-2 2.28 x 106

1 mbar x l x s-1 (He) 0.75 4.3 x 10-3 2.28 x 105

1 atm x cm3 x s-1 *) = cm3 (STP) x s-1 0.76 4.3 x 10-3 2.3 x 105

1 Torr x l x s-1*) 1 5.7 x 10-3 3.0 x 105

1 kg x h-1 air 175 1 –


-6
1 g/a C2H2F4 (R 134a) 4.8 x 10 – 1

*)
According to international system of units only Pa x m3 x s-1 is permissible

780 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold


Leak Detection Methods
There are two main groups of leak Leak Testing Based on Local Leak Detection
detection methods; for both there are Vacuum Methods The test object is evacuated by a vacu-
special instruments available:
(Vacuum inside the test object.) um pump (auxiliary pump) until the
Vacuum Methods pressure is low enough for the leak
Pressure Rise Method
detector to operate. When using a
The equipment to be tested is eva-
With this method it is only possible to helium leak detector, its own pump
cuated. The pressure ratio between
determine the total leak rate. The test system will take care of further eva-
inside and outside is 0:1.
object is evacuated with a vacuum cuation. Suspicious spots on the test
Overpressure Methods pump or a vacuum pump system. A object will then be sprayed with a fine
valve is used to isolate the test object jet of search gas. Search gas entering
The equipment to be tested is pres-
from the vacuum pump. The pressure through leaks into the test object is
surized with a search gas or a search
will then rise as a function of time. pumped out by the vacuum pump and
gas mixture.
Curve (a) shows the theoretical pres- it is converted by the leak detector into
The pressure ratio between inside and sure rise if there is only a leak. Curve an electrical signal which is then dis-
outside is over 1:1. (b) shows the pressure rise due to out- played. This permits rapid detection
gassing from the surfaces of the test and determination of the size of even
Between the two methods there exist
object. This pressure rise tends to tail the smallest leaks.
many variations depending on the par-
off in the direction of a saturation level.
ticular application. Integral Method
If in such a case the time allowed for
General Notes monitoring the pressure rise is too Determination of the total leak rate of a
1. The lowest leak rates can only be short, a leak will be indicated which in test object. The testing arrangement is
measured by employing the vacuum reality does not exist. If one waits long the same as for local leak detection,
method, whereby the following applies: enough for the pressure to rise, i.e. but in this case the test object is not
The lower the leak rate, the higher the after the bend of curve (b) the outgas- sprayed with search gas on selected
requirements are concerning cleanness sing process can then be disregarded, areas, but it is surrounded by a hood or
and ultimate vacuum. so that the leak rate can be determined a chamber which is filled with the
from the known volume of the test search gas. Thus the entire outer sur-

Leak Detecting
Instruments
2. If possible the test objects should be object and the measured pressure rise face of the test object comes into con-
tested under the same conditions that over a fixed rise time (see equation on tact with the search gas. If the search
will be used in their final application, i.e. page before). Curve (c) shows the gas enters the test object, the total leak
parts for vacuum operation should be pressure rise as it occurs in practice, rate is indicated independently of the
tested according to the vacuum where out-gassing and leak rate add. number of existing leaks. With helium
method and parts for overpressure The detectable leak rate depends on leak detectors it is possible to determi-
operation should be tested using the the volume of the test object, the ne the helium content of the air. This is
overpressure method. obtained ultimate pressure and the out- utilized in the detection of gross leaks.
gassing from the test object. In con-
nection with very large test objects this
method is time consuming if extremely
low leak rates are to be determined in
the fine and rough vacuum range.

1 Test object 3 Search gas cylinder 5 Hood


2 Leak detector 4 Vacuum pump 6 Spray gun for search gas

6 1

LD
HELIUM

2
a) Pressure rise due to leakage
b) Pressure rise due to outgassing
from the chamber walls
4
c) Both effects combined
3

Pressure rise in a vacuum chamber after switching Local leak detection – Evacuated test object (left) and Integral method – Evacuated test object (right)
off the pump; double log. plot

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 781


Leak Testing Based on After a fixed accumulation period a Integral Method –
Overpressure Methods sniffer probe is used to measure the Bombing-Test
concentration of the search gas which
(Overpressure within the test object.) This method is used for testing
has collected in the hood.
hermetically sealed components such
Pressure Drop Method
Before this the leak detector should be as transistors, IC-packages or dry reed
The test object is filled with a gas (for calibrated by a reference measurement relays. It is basically a variation of the
example air or nitrogen) until the testing using a known search gas concentra- vacuum hood test. Here the test ob-
pressure is reached. Precision vacuum tion. jects are placed in a vessel which is
gauges are used to detect a possible pressurized with the search gas – pre-
The leak rate can then be determined
pressure drop during the testing period. ferably helium. At a fairly high search
by the equation for qL where V is the
This method is simple to implement, it gas pressure and after a period of up
volume of the hood, ·p is the partial
is suitable for the determination of to several hours it is tried to enrich the
pressure difference of the search gas
gross leaks and can be improved upon search gas inside leaky test objects.
(concentration change) and t is the
by using differential pressure gauges. This is the actual so called “bombing”
accumulation period.
By applying soap solutions or similar, process.
leaks can be located. Uncertainties in the determination of
After this, the test objects are
the volume, leaks in the hood and a
Local Leak Detection with Leak transferred to a vacuum chamber and
wrong accumulation period make pre-
'HWHFWRUVò6QLIðQJ their total leak rate is determined in the
cise leak rate measurements based on
The test object is filled with the search same way as in the vacuum hood test.
this method very questionable.
gas or the search gas/air mixture to During evacuation of the vacuum
which the leak detector is sensitive. Integral Method – Vacuum Hood chamber down to the required testing
The leak detector is equipped with a Test pressure, those test objects which
sniffer probe, whereby there is a low This test is a variation of the hood test have a gross leak already lost their
pressure at the probe tip. If the sniffer described above, which has consider- accumulated search gas. These parts
tip passes suspicious points on the test able advantages. A vacuum chamber are not detected as leaking during the
object the search gas coming out of which is evacuated by an auxiliary actual leak test. Therefore the test with
the leak is sucked in and transferred to pump and which is connected to a leak the vacuum chamber is often preceded
the detection system of the leak detec- detector is used as the hood. The by a “bubble test”.
tor. After conversion into electrical sig- search gas escaping through the leaks This method permits the detection of
nals these are displayed optically and is converted by the detection system of the lowest leak rates and is used main-
acoustically by the leak detector. the leak detector into electrical signals ly in automatic industrial leak testing
which are immediately displayed. After especially when it is not possible to fill
Integral Method – Hood Test
calibration of the leak detector with a the parts with gas in any other way.
To determine the total leak rate of a test calibrated leak it is possible to quantita-
object subjected to a search gas over- tively determine the total leak rate.
pressure, the test object is surrounded
by a hood of a known volume. The This method permits the detection of
search gas which escapes through the very small leaks and is especially suited
leaks collects in the hood. for automatic industrial leak detection.

Key to the Figures


1 Test object 3 Search gas cylinder 5 Hood
2 Leak detector 4 Vacuum pump 6 Sniffer probe

5
1
1
6
3 3
6

2 LD 2 LD
HELIUM HELIUM

Local leak detection – Integral method (search gas accumulation) Integral method –
Search gas overpressure in the test object Search gas overpressure in the test object Search gas overpressure in the test object

782 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold


Operating Principles
of the Helium Leak Detectors
Operating Principle Important Specifications
A helium leak detector permits the The two most important features of a helium until a measured value is dis-
localization of leaks and the quantitative leak detector are its measurement played by the leak detector. The respon-
determination of the leak rate, i.e. the range (detection limits) and its response se time of the electronic signal conditio-
gas flow through the leak. Such a leak time. ning circuitry is an important factor in the
detector is therefore a helium flow overall response time. In the case of leak
The measurement range is limited by
meter. detectors the response time of the elect-
the lowest and the highest detectable
ronic circuitry is well below 1 s.
In practice the leak detector performs leak rate. The lowest detectable leak
this task by firstly evacuating the part rate is defined by the sum of drift and The volume flow rate for helium at the
which is to be tested, so that gas from noise in the most sensitive measure- point of the test object is of decisive
the outside may enter through an exist- ment range. Usually the sum of noise significance to leak detection on com-
ing leak due to the pressure difference amplitude and zero drift per minute is ponents which are pumped down
present. If only helium is brought in made to be equivalent to the lowest solely by the leak detector. This volume
front of the leak (for example by using a detectable leak rate. With leak detec- flow rate provided by the leak detector
spray gun) this helium flows through tors the amount of drift is so low, that takes care of the helium entering
the leak and is pumped out by the leak the noise amplitude alone determines through a leak and it ensures quick
detector. The helium partial pressure the detection limit. detection by the leak detector. On the
present in the leak detector is mea- other hand the volume of the test
The highest detectable leak rate de-
sured by a sector mass spectrometer object delays the arrival of the helium
pends strongly on the method emplo-
and is displayed as a leak rate. This is signal. The response time can be cal-
yed. Especially the counterflow method
usually given in terms of volume flow of culated on the basis of the following
and partial flow operation (see descrip-
the helium (pV-flow). simple equation:
tion below) permit the measurement of
V
very high leak rates even with a sensi- Response time for helium tA = 3
SHe
tive helium leak detector. In addition the
(for 95% of the final value)

Leak Detecting
multistage switchable high impedance

Instruments
input amplifiers of the leak detectors with V = Volume of the test object
also permit the measurement of high SHe = Volume flow rate for he-
leak rates. lium at the point of the
test object
In practical applications, especially in the (or at the inlet of the leak
localization of leaks the response time is detector, if it alone pumps
of great significance. This is the time it down the test object).
takes from spraying the test object with

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 783


Main Flow Method Counterflow Method Partial Flow Method
The classic operating principle of With this method the test object is not In order to expand the measurement
helium leak detectors is based on the connected to the high vacuum. Instead range in the direction of higher leak
main flow method. Here the entire it is connected to the forevacuum rates and for operation at higher inlet
helium flow passes through the high (between turbomolecular pump and pressures, helium leak detectors incor-
vacuum system of the leak detector, backing pump), so that the entire gas porate a partial flow or a gross leak
where the mass spectrometer mea- flow (especially water vapor) does not system. This consists basically of a
sures the partial pressure of the contribute to the pressure increase in throttle and a rotary vane pump. At
helium. In this, the use of a liquid nitro- the mass spectrometer. Thus a cold pressures above the normal inlet pres-
gen cold trap is essential to remove trap is no longer required! sure (main flow: above 10-2 mbar,
water vapor or other condensable counterflow: above 10-1 mbar) or in the
The helium which now enters the fore-
gases in the vacuum system which case of high helium leak rates, the inlet
vacuum can still be detected, as it is
impair the operation. Moreover, the use valve is closed and the main flow is
able to flow against the pumping direc-
of a cold trap permits the low operat- allowed to enter the partial flow pump,
tion of the turbomolecular pump into
ing pressures for the mass spectrome- whereas only a small part enters
the mass spectrometer. This is due to
ter to be reached (below 10-4 mbar) the leak detector via the partial flow
the high particle velocity of the helium.
despite the directly connected (and throttle. Thus the total pressure and
The sensitivity of this counterflow
possibly contaminated) test object. the helium pressure are dropped to
arrangement is equal to that of the
values suitable for operation of the
The advantages of the main flow main flow principle, provided the right
leak detector.
method are: combination of volume flow rate of the
backing pump and helium compression To obtain correct leak rate readings in
– Highest sensitivity, i.e. low detection
of the turbomolecular pump is used. the partial flow mode, the partial flow
limit
ratio, i.e. the ratio between the actually
– Short response time due to a high The advantages of the counterflow
measured gas flow and the total gas
volume flow rate at the inlet. method are:
flow must be known and stable.
The main flow method is thus espe- – No liquid nitrogen is required
In all leak detectors this is achieved by
cially suitable for stationary leak detec- – High permissible inlet pressures (i.e. a partial flow throttle made of ruby with
tion on components. Leak detection on pressure within the test object) a precisely machined hole. This en-
systems having their own pump sets
This makes the counterflow method sures that the quantitatively determined
and at higher pressures requires the
especially suitable for mobile leak leak rates are always correct without
use of an external throttling valve, i.e. a
detection on systems. For leak detec- calibration, even for gross leaks.
partial flow with subsequently reduced
tion on larger components where a
sensitivity is utilized.
short response time is essential (i.e.
high volume flow rate) an additional tur-
bomolecular pump stage is required at
the inlet of the leak detector.

Main flow method Counterflow method Partial flow method

784 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold


Calibration of Helium Leak To obtain a quantitatively correct leak by the PTB (Federal Institution of Phy-
Detectors with Calibrated rate reading the sensitivity of the leak sics and Technology). If requested each
Leaks detector must also be adjusted. This helium calibrated leak can be supplied
requires the use of a calibrated leak. with a calibration certificate issued by
In the process of leak detection one
the DAkkS Calibration Service. The
expects that a test object which does Oerlikon Leybold Vacuum offers calibra-
calibration itself is performed by the
not have a leak produces a zero read- ted helium leaks of various designs
DAkkS Calibration Service for Vacuum
ing on the leak detector. In this any covering the range between 10-9 to
which is run by Oerlikon Leybold
malfunctions are excluded. Thus calib- 10-4 mbar x l x s-1 as part of the stan-
Vacuum on behalf of the PTB.
rated leaks, i.e. artificial leaks which dard range of products. All leak rates
produce a known helium leak rate are are traceable to the standards of the
essential for reliable results. DAkkS Calibration Service controlled

Leak Detecting
Instruments

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 785


Products

Helium Leak Detector


PHOENIX L300i
The PHOENIX L300i is a portable multi-
purpose helium leak detector and
equally well suited to both service and
series production testing.

The rugged modular design and its


ease of use make the PHOENIX L300i
one of the most user-friendly leak
detector in its class.

Through the remote controls tablet and


RC 310, remote monitoring and control
is possible.

PHOENIX L300i

Advantages to the User Typical Applications


- Lowest detectable leak rate Leak tests in connection with In connection with the sniffer lines
- Short He recovering time condition which are available as accessories the
- Quality assurance
PHOENIX L300i may also be used as a
- Quick startup under 2 minutes - Automotive industry sniffer leak detector.
- Extremely fast response time - Analytical instruments
In connection with a partial flow pump
- Oil-free gas admission system - Systems manufacture set the PHOENIX L300i may also be
- One of the smallest helium leak - Power station engineering used for the detection of leaks on large
detectors in the world vessels.
- Research and development
- High sensitivity
- Semiconductor industry
- Fast leak rate readout also at low
- High vacuum and ultra-high vacuum
leak rates
engineering
- Service friendly through modular
- Ideal tool for industrial series pro-
design
duction testing – in the cooling and 314
(123,62)
(111,02)

air conditioning industries, for


(48,54)
123,3
282

example
(11,93)
30,3

457
(179,92)
438
(172,44)
57
(22,44)

32
(12,6)
(150,39)

(22,05)
56,5
382

282
(111,02)

213 207
(83,86) (81,5)

49
22 41,5
(19,29)
(8,66) (16,34)
(172,64)

(160,83)

(22,24)
438,5

408,5

56,5

438,5
(172,64)

382
(150,39)

38,5
(15,16)

495
(194,88)

Dimensional drawing for the PHOENIX L300i (rear side) Dimensional drawing for the PHOENIX L300i
(side and upper side)

786 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold


Technical Data PHOENIX L300i

Minimum detectable helium leak rate


Vacuum mode mbar x l x s-1 # 5 x 10-12
Sniffer mode mbar x l x s-1 < 1 x 10-7
Minimum detectable hydrogen leak rate
Vacuum mode mbar x l x s-1 # 1 x 10-8
Sniffer mode mbar x l x s-1 < 1 x 10-7
Units of measurement (selectable)
Pressure mbar, Pa, atm, Torr
Leak rate mbar x l x s-1, Pa x m3 x s-1, Torr x l x s-1, atm x cc x sec-1, sft3/yr
Sniffer mode ppm, g/a eq, oz/yr eq
Leak rate measurement range
s-1
mbar x l x 1 x 10-12 to 1 x 10-1
Measurement ranges 12 decades
Max. inlet pressure mbar (Torr) 15 (11.25)
Pumping speed during the
evacuation process
50 Hz m3 x h-1 (cfm) 2.5 (1.5)
60 Hz m3 x h-1 (cfm) 3.0 (1.8)
Pumping speed (helium) at the inlet
GROSS mode l/s 0.4
FINE mode l/s > 2,5
Time constant of the leak rate signal
(blanked off, 63% of final value) s <1
Run-up time (after starting) min #2
Mass spectrometer 180° magnetic sector field
Ion source 2 filaments; iridium/yttria-oxide
Detectable masses amu 2, 3 and 4
Inlet port DN 25 ISO-KF
Dimensions (W x H x D) 495 x 457 x 314
Weight kg (lbs) 40.0 (88.2)
Available languages English, German, Chinese, Japanese (Katakana),
Russian, French, Italian, Spanish, Polish and Korean

Leak Detecting
Instruments
Ordering Information PHOENIX L300i

Part No.
PHOENIX L300i
EURO version
230 V, 50/60 Hz, mbar readout,
with integrated calibrated leak TL 7 250000V01
US version
115 V, 60 Hz, mbar readout,
with integrated calibrated leak TL 7 251000V01
Japan version
100 V, 50/60 Hz, mbar readout,
with integrated calibrated leak TL 7 251100V01
Tablet incl. software (APP), WiFi module,
protection case (IP 67) PHOENIX L300i 252005V01
Tablet incl. software (APP), communication
cable and E-chip, protection case (IP 67)
PHOENIX L300i 252005V02
Tablet holder PHOENIX L300i 252007V01
BARCODE scanner tablet PHOENIX L300i 252008V01
Tablet table stand 252009V01
Tablet lock 252010V01
Partial flow system (115-230 V) 140 20
PC software LeakWare 140 90
For further accessories see para.
“Accessories for PHOENIX L300i,
PHOENIX L300i DRY and PHOENIX L300i MODUL”

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 787


Portable and Dry Helium Leak Detector
PHOENIX L300i DRY
The PHOENIX L300i DRY is a compact
portable helium leak detector capable
of meeting the highest cleanness requi-
rements.

Based on the well-proven technology


of the PHOENIX L300i, equipped with
an oil-free pump system, the
PHOENIX L300i DRY meets the highest
requirements concerning cleanness
while at the same time being small in
size.

PHOENIX L300i DRY

Advantages to the User Typical Applications


- Oil-free “dry” pump system Leak tests with stringent requirements
- Small footprint concerning cleanness, for example

- Quick start-up - Semiconductor industry


- Extremely fast response - after repairs or maintenance work
- Service friendly through modular - Production of semiconductor com-
design ponents 314
(123,62)
(111,02)

(48,54)

- Integrated helium contamination - Pharmaceutical/medicine


123,3
282

protection - Laser
(11,93)
30,3

457
(179,92)
438
(172,44)
57
(22,44)

32
(12,6)
(150,39)

(22,05)
56,5
382

282
(111,02)

213 207
(83,86) (81,5)

49
41,5
(19,29)
22 (16,34)
(8,66)
(172,64)

(160,83)

(22,24)
438,5

408,5

56,5

438,5
(172,64)

382
(150,39)

38,5
(15,16)

495
(194,88)

Dimensional drawing for the PHOENIX L300i DRY (rear side) Dimensional drawing for the PHOENIX L300i DRY
(side and upper side)

788 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold


Technical Data PHOENIX L300i DRY

Minimum detectable helium leak rate


Vacuum mode mbar x l x s-1 # 3 x 10-11
Sniffer mode mbar x l x s-1 < 1 x 10-7
Minimum detectable hydrogen leak rate
Vacuum mode mbar x l x s-1 # 1 x 10-8
Sniffer mode mbar x l x s-1 < 1 x 10-7
Units of measurement (selectable)
Pressure mbar, Pa, atm, Torr
Leak rate mbar x l x s-1, Pa x m3 x s-1, Torr x l x s-1, atm x cc x sec-1, sft3/yr
Sniffer mode ppm, g/a eq, oz/yr eq
Leak rate measurement range
s-1
mbar x l x 1 x 10-11 to 1 x 10-1
Measurement ranges 11 decades
Max. inlet pressure mbar (Torr) 15 (11.25)
Pumping speed during the
evacuation process
50 Hz m3 x h-1 (cfm) 1.6 (0.94)
60 Hz m3 x h-1 (cfm) 1.8 (1.06)
Pumping speed (helium) at the inlet
GROSS mode l/s 0.02
PRECISION mode l/s 0.4
FINE mode l/s > 2,5
Time constant of the leak rate signal
(blanked off, 63% of final value) s <1
Run-up time (after starting) min #2
Mass spectrometer 180° magnetic sector field
Ion source 2 filaments; iridium/yttria-oxide
Detectable masses amu 2, 3 and 4
Inlet port DN 25 ISO-KF
Dimensions (W x H x D) 495 x 457 x 314
Weight kg (lbs) 35.5 (78.4)
Available languages English, German, Chinese, Japanese (Katakana),

Leak Detecting
Instruments
Russian, French, Italian, Spanish, Polish and Korean

Ordering Information PHOENIX L300i DRY

Part No.
PHOENIX L300i DRY
EURO version
230 V, 50 Hz, mbar readout,
with integrated calibrated leak TL 7 250001V01
US version
115 V, 60 Hz, mbar readout,
with integrated calibrated leak TL 7 251001V01
Japan version
100 V, 50/60 Hz, mbar readout,
with integrated calibrated leak TL 7 251101V01
Tablet incl. software (APP), WiFi module,
protection case (IP 67) PHOENIX L300i 252005V01
Tablet incl. software (APP), communication
cable and E-chip, protection case (IP 67)
PHOENIX L300i 252005V02
Tablet holder PHOENIX L300i 252007V01
BARCODE scanner tablet PHOENIX L300i 252008V01
Tablet table stand 252009V01
Tablet lock 252010V01
Partial flow system (115-230 V) 140 20
PC software LeakWare 140 90
For further accessories see para.
“Accessories for PHOENIX L300i,
PHOENIX L300i DRY and PHOENIX L300i MODUL”

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 789


Mobile and Flexible Helium Leak Detector
PHOENIX L300i MODUL
The PHOENIX L300i MODUL repre-
sents the basic unit of an entire family
of leak detectors. It is based on the
PHOENIX L300i , but it does not inclu-
de an integrated backing pump. The
customer has to select and add an
external backing pump depending on
the special application. For example
when large vacuum chambers have to
be evacuated or higher leak testing
cycles are required.

PHOENIX L300i MODUL

The PHOENIX L300i MODUL combines PHOENIX L300i MODUL PHOENIX L300i MODUL
the excellent characteristics of the with Oil Sealed with Dry Compressing
PHOENIX L300i with those of the Backing Pump Scroll Pump
pump system which has been added
This combination represents a powerful This combination represents a dry high-
to the basic leak detector module.
leak detector, the pumping speed of performance leak detector.
This results in two basic groups: which is adapted to the particular appli-
cation in each case.
- Dry, mobile leak detectors with
Advantages to the User
selectable pumping speed
- Oil sealed, mobile leak detectors - Very high pumping speed which is
Advantages to the User
offering a high pumping speed at an also acceptable for testing semi-
optimum price-to-performance ratio. - Cost-effective leak detector conductor production chambers
- Pumping speed optimized for the without having to use their own
particular application pump systems

- Fast response - Fast response

- Quick recovery - Quick recovery


(after helium contamination)
- High sensitivity
- Absolutely dry
- Fast leak rate readout also at low
leak rates - High sensitivity

Typical Applications Typical Applications

All applications involving short cycles All applications which demand a clean
and/or larger volumes and which requi- process, for example:
re a mobile system, for example: - Semiconductor industry (chip manu-
- Automotive industry facturers)

- Cooling and air conditioning - Semiconductor industry (tool manu-


facturers and subcontractors)
- Manufacturers of furnaces/
machines/systems - High purity gas industry

- Packaging - Research and development


- UHV applications

790 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold


Technical Data PHOENIX L300i MODUL
with 1-stage with 2-stage with Scroll Pump
Rotary Vane Pump Rotary Vane Pump

Minimum detectable helium leak rate


Vacuum mode mbar x l x s-1 # 5 x 10-11 # 5 x 10-12 # 8 x 10-12 1) / # 5 x 10-11 2)

Sniffer mode mbar x l x s-1 < 1 x 10-7 < 1 x 10-7 < 1 x 10-7

Minimum detectable hydrogen leak rate


Vacuum mode mbar x l x s-1 # 1 x 10-8 # 1 x 10-8 # 1 x 10-8
Sniffer mode mbar x l x s-1 < 1 x 10-7 < 1 x 10-7 < 1 x 10-7

Max. permissible inlet pressure mbar (Torr) 15 15 15


with partial flow system mbar (Torr) 1000 1000 1000

Pumping speed during the evacuation


process with the pump (50 Hz)
SOGEVAC SV 16 BI m3 x h-1 (cfm) 16 – –
3 -1
SOGEVAC SV 28 BI m x h (cfm) 25 – –
SOGEVAC SV 40 BI m3 x h-1 (cfm) 40 – –
3 -1
TRIVAC D 16 B m x h (cfm) – 16 –
TRIVAC D 25 B m3 x h-1 (cfm) – 26 –
3 -1
SCROLLVAC SC 15 D m x h (cfm) – – 13
SCROLLVAC SC 30 DL m3 x h-1 (cfm) – – 26

Pumping speed for helium


at the inlet flange l/s > 2,5 > 2,5 > 2,5

Time constant of the leak signal


(blanked off, 63% of final value) s <1 <1 <1

Leak rate measurement range


mbar x l x s-1 1 x 10-12 to 1 · 10-1 1 x 10-12 to 1 · 10-1 1 x 10-12 to 1 · 10-1

Leak Detecting
Instruments
Units of measurement (selectable)
Pressure mbar, Pa, atm, Torr mbar, Pa, atm, Torr mbar, Pa, atm, Torr
Leak rate mbar x l x s-1, Pa x m3 x s-1, mbar x l x s-1, Pa x m3 x s-1, mbar x l x s-1, Pa x m3 x s-1,
Torr x l x s-1, Torr x l x s-1, Torr x l x s-1,
atm x cc x sec-1, sft3/yr atm x cc x sec-1, sft3/yr
Sniffer mode ppm, g/a eq, oz/yr eq ppm, g/a eq, oz/yr eq ppm, g/a eq, oz/yr eq

Time until ready for operation min #2 #2 #2

Mass spectrometer 180° magnetic sector field 180° magnetic sector field 180° magnetic sector field

Ion source 2 yttrium/ 2 yttrium/ 2 yttrium/


iridium long-life cathodes iridium long-life cathodes iridium long-life cathodes

Detectable masses amu 2, 3 and 4 2, 3 and 4 2, 3 and 4

Test port 1 x DN 25 ISO-KF 1 x DN 25 ISO-KF 1 x DN 25 ISO-KF

Dimensions (W x H x D) mm 495 x 456 x 314 495 x 456 x 314 495 x 456 x 314

Weight (without pump) kg (lbs) 30 30 30

Available languages English, German, Chinese, English, German, Chinese, English, German, Chinese,
Japanese (Katakana), Japanese (Katakana), Japanese (Katakana),
Russian, French, Russian, French, Russian, French,
Italian, Spanish, Italian, Spanish, Italian, Spanish,
Polish, Korean Polish, Korean Polish, Korean

1)
With SCROLLVAC SC 30 DL
2)
With SCROLLVAC SC 15 D

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 791


The following Part Numbers contain
only the individual components needed
for assembly by the customer.

Ordering Information PHOENIX L300i MODUL

Part No. Part No.

PHOENIX L300i MODUL


without backing pump
115 - 230 V / 50/60 Hz 250002V01 250002V01

Accessories
Recommended backing pumps Euro version US version
230 V, 50 Hz 115 V, 60 Hz
SOGEVAC SV 16 BI 960 286 upon request
SOGEVAC SV 28 BI 960 277 upon request
SOGEVAC SV 40 BI upon request upon request
TRIVAC D 16 B 113 25 upon request
TRIVAC D 25 B 113 35 upon request
SCROLLVAC SC 15 D 133 001 133 101
SCROLLVAC SC 30 DL 133 050 133 051

For further accessories see para.


“Accessories for PHOENIX L300i,
PHOENIX L300i DRY and PHOENIX L300i MODUL”

792 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold


CART 300 for
PHOENIX L300i
53 334
300 671
19 153 311

1095
999

647

191 200
125

40 76 525
537
729

CART 300 (with PHOENIX L300i) Dimensional drawing for CART 300
(here as an example with leak detector and scroll pump SCROLLVAC SC 30 DL)

Technical Data CART 300

Dimensions (W x H x D) mm 525 x 1095 x 1024

Weight
without leak detector and pump, approx.
kg (lbs) 50.0 (110.38)

Leak Detecting
Instruments
(here as an example with leak detector
and scroll pump SCROLLVAC SC 30 DL)

Ordering Information CART 300


Euro version US version
Part No. Part No.

CART 300
252 005 252 005
without E-Box
252 006 –
with E-Box 230 V, EURO version

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 793


Helium Leak Detector
PHOENIX L500i
The PHOENIX L500i Helium leak
detector opens up new dimensions of
productivity and reliability for your appli-
cations. This is your solution, pioneered
with an intelligent tablet control. The
smartest and unparalleled user experi-
ence in leak detection.

PHOENIX L500i PHOENIX L500i tablet control

Advantages to the User Typical Applications Smart Monitoring and Control


- High reliable leak detection Quality control of components and - Wireless operation via tablet using
- Fast and reproducible test results subassemblies from industries like WiFi (included within the standard
delivery) within a distance of up to
- Improved system design for a high - Electrical engineering
50 m
degree of productivity and uptime (feedthroughs, vacuum sensors,
lamps, transformers) - Unique ergonomic tablet retainer (in-
- Approved for serial testing
cluded within the standard delivery)
- Rapid evacuation, low contamina- - Automotive
(fuel systems, gears) - Easy set-up and intuitive touch-
tion degree
screen operation
- Compact and mobile unit, ergono- - Refrigeration and air conditioning
- Selectable operation mode for maxi-
mic working position - Packaging
mized flexibility
- Simple and comfortable operation (medical, pharmaceutical and food
products, barrels) - Data logger and readout
- Sleep mode/wake-up function provi-
des system ready at shift start - Research
(fusion facilities, space simulators, High Speed leak detection
- All connections on the backside,
particle accelerators)
easy access to all facilities - Response time < 1 s
- 3 years warranty on the long-life - Helium pumping speed at the inlet
cathodes in the ion sources up to 50 l/s
- Extremely short Helium recovery
time
DN63 ISO-K
- Efficient standby mode and wake-up
function saving time and energy
1289 - Reliable and reproducible test
1028 results

345

315
630

999

Dimensional drawing for the PHOENIX L500i

794 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold


Technical Data PHOENIX L500i

Smallest detectable He leak rate


(per AVS 2.1 and EN 1518) mbar x l x s-1 , 5 x 10-12
Max. permissible inlet pressure
Qualitative measurement mbar (Torr) 1000 (750)
Quantitative measurement mbar (Torr) 100 (75)
Detectable masses amu 2, 3 and 4
Run-up time
(until ready of operation) min ,3
Inlet flange DN 63 ISO-K
Max. He pumping speed
at the inlet l/s 50
Response time s ,1
Supply voltages
3 phases/N/PE, 50/60 Hz V 200/208/380/400/460
Weight kg (lbs) 385 (849)
Dimensions (L x W x H) mm 999 x 630 x 1028
Tablet ingress protection category
with charging cable IP 65
with cover on the charging connection IP 67
Available languages English, German
Units of measurement (selectable)
Pressure mbar, Pa, atm, Torr
Leak rate mbar x l x s-1, Pa x m3 x s-1, Torr x l x s-1, atm x cc x sec-1, sft3/yr
Sniffer mode ppm, g/a eq, oz/yr eq
Leak rate measurement range
mbar x l x s-1 5 x 10-12 to 1000
Pumping speed during the
evacuation process
50 Hz m3 x h-1 (cfm) 65 (40.0)
60 Hz m3 x h-1 (cfm) 78 (45.9)

Leak Detecting
Instruments
Time constant of the leak rate signal
(blanked off, 63% of final value) s < 0.2
Mass spectrometer 180° magnetic sector field
Ion source 2 filaments; iridium/yttria-oxide

Ordering Information PHOENIX L500i

Part No.
Helium leak detector PHOENIX L500i
Rotary vane vacuum pump filled with
Mineral oil LVO 100 503504V901
PFPE oil LVO 400 503504V902
Calibrated leak
TL 9 144 08
TL 8 165 57
TL 6 155 66
TL 4 155 65
TL 4-6 155 80
Reducer DN 63 ISO-K / DN 40 ISO-KF 887 40
Search gas spray gun for Helium
(including 5 m long hose) 165 55
Antistatic worktop optional

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 795


PHOENIX L340i
Mobile Helium Leak Detector
as Seated Workplace
The PHOENIX L340i is a mobile leak The PHOENIX L340i is operated
testing station. It was developed prefe- through the PHOENIX L300i operator
rably for testing of small series produc- panel, which for this purpose has been
tion parts in the vacuum or the sniffer integrated in the front panel of the unit.
mode. Based on its small footprint and Operation and technical parameters of
being equipped with 4 wheels it will fit the PHOENIX L340i can be directly
through any standard doorway. derived from the PHOENIX L300i.
Optionally, the PHOENIX L340i may be
The integrated standard components
equipped with an exhaust filter
comprise PHOENIX L300i MODUL with
AF16-25 for the TRIVAC, with a dry
two-stage, oil sealed rotary vane vacu-
compressing backing pump
um pump TRIVAVC D 25 B as well as
SCROLLVAC SC 30 DL or also with a
PHOENIX L340i a power supply and controller unit.
remote control.

Advantages to the User Typical Applications


- Mobile, convenient seated work- - High detection sensitivity for helium, Quality assurance on
place thus very small leaks can be detec-
- one off and small series production
- Simple to operate, identical with the ted
products
PHOENIX L300i - Rapid entry in to the ready mode
- equipment for research and deve-
- Compact size, since only standard - High pumping speed due to separa- lopment
components like the PHOENIX te backing pump
L300i MODUL or TRIVAC D 25 B
have been integrated

Technical Data PHOENIX L340i

Lowest detectable helium leak rate


(vacuum operation) mbar x l x s-1 # 5 x 10-12
Maximum detectable helium leak rate
(vacuum operation) mbar x l x s-1 > 0.1
Connecting flange for units under test DN 40 ISO-KF
Pumping speed during
the evacuation process
with TRIVAC D 25 B m3 x h-1 approx. 25
with SCROLLVAC SC 30 DL (60 Hz) m3 x h-1 approx. 25
Pumping speed for helium
at the inlet flange l/s > 2.5
Time constant of the leak rate signal
(blanked off, 63% of the final value) s <1
Time until entering the ready mode min <2
Dimensions (W x H x D) mm 780 x 1000 x 1000
Height of the bench top mm 750
Available languages English, German, Chinese, Japanese (Katakana),
Russian, French, Italian, Spanish, Polish and Korean

Ordering Information PHOENIX L340i

Part No.
PHOENIX L340i upon request
Custom PHOENIX L340i upon request

796 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold


PHOENIX L320i Fab
Mobile Helium Leak Detector
for Increased Cleanness Requirements
The PHOENIX L320i Fab is a mobile
helium leak detector, chiefly designed
to be operated in rooms subject to
increased cleanness requirements.

A PHOENIXL 300 Modul serves as the


helium leak detection unit, the backing
pump is a dry compressing
SCROLLVAC SC 30 DL.
Both principal components of the
PHOENIX L320i Fab have been
accommodated in a visually pleasing
PHOENIX L320i Fab PHOENIX L320i Fab, and space saving chassis. In order to
with side cover removed significantly suppress the emission of
particles, the backing pump has been
Advantages to the User - Exclusively standard components
fitted within an encapsulated housing
have been integrated: convenient
- Pleasantly designed mobile leak and is supplied with fresh air from the
access, simple maintenance
detector bottom (fan). The side panels of this
- Compact dimensions housing can be easily removed.

- High pumping speed due to separa- Typical Applications The PHOENIX L320i Fab is equipped
te backing pump Quality assurance on the following: with useful accessories like gas cylinder
- Low particle emissions due to holder, hooks for the sniffer hoses and
- Equipment operated in areas with mains cord as well as a separate
encapsulated backing pump
increased cleanness requirements switch for the backing pump.
- Rapid entry in to the ready mode
- Equipment for research and deve-
- High detection sensitivity for helium, lopment
thus very small leaks can be detec-
- One off products
ted

Leak Detecting
Instruments
Technical Data PHOENIX L320i Fab

Lowest detectable helium leak rate


(vacuum operation) mbar x l x s-1 # 5 x 10-12
Lowest detectable helium leak rate
(sniffer operation) mbar x l x· s-1 < 1 x 10-7
Connecting flange for units under test DN 25 ISO-KF
Maximum detectable helium leak rate
(vacuum operation) mbar x l x s-1 > 0.1
Pumping speed during
the evacuation process
with SCROLLVAC SC 30 DL m3 x h-1 approx. 25
Pumping speed for helium
in the vacuum mode l/s > 2.5
Time constant of the leak rate signal
(blanked off, 63% of the final value) s <1
Time until entering the ready mode min <2
Dimensions (W x H x D) mm 450 x 1200 x 1150
Available languages English, German, Chinese, Japanese (Katakana),
Russian, French, Italian, Spanish, Polish and Korean

Ordering Information PHOENIX L320i Fab

Part No.
PHOENIX L320i Fab upon request
Custom PHOENIX L320i Fab upon request

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 797


Accessories

RC 310 C / RC 310 WL
Remote Control Units for Leak Detectors
The RC 310 remote control unit with
their industrial design RC 310 WL
(wireless) and RC 310 C (cable) and
integrated data memory offer utmost
flexibility during the leak detection pro-
cess.
The RC 310 WL permits wireless remo-
te monitoring up to a distance
of 100 m. The RC 310 units support
the current leak detectors of the
PHOENIX L300i series as well as the
Wired remote control unit RC 310 C Wireless remote control unit RC 310 WL
UL 200 and L 200 models.

Advantages to the User Typical Applications


- Easy operation via Touch Screen - Mobile use with a portable leak
Panel 3.5" detector due to wireless link
- Wireless transmission up to 100 m, - Leak detection for analytics
wired transmission up to 34 m - Medicine technology
- Data transfer to Windows is possible - Solar systems
- Research and development
- Data backup on internal 32 MB data
- Vacuum equipment
logger or USB stick is possible
- Accessories for the automotive
- Possible operating with or without industry
cable - IT branch
- Adjustable alarm trigger - Process industry
- Magnetic holder on the rear of the
instrument
- Rugged industrial design with an
IP 42 rating Different color displays on the remote control unit
- Scroll function for measured data
(optional)
- USB connection for data transfer
and software updates
- Adjustable loudspeaker and head-
phone output
- Search function (paging) via audible
signal
- Peak hold (maximum value indica-
tion)
- For simultaneous detection of up to
10 leak detectors

798 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold


Technical Data RC 310

Display TFT graphic touch panel 1/4 VGA / 3.5";


240 x 320 px

Memory capacity
Internal memory capacity MB 64
of this available for recording data MB 32
or memory stick

Battery operating time (RC 310 WL only), (depending on charging condition) hours >8

Wireless transmission range RC 310 WL m up to 100

HF output power (4 mW) dBm +6

Wireless transmission frequency RC 310 WL GHz 2.4

Audio alarm at 1 m distance, max. dB(A) 70

Headphone jack stereo 3.5 mm Ohm > 2 x 32

Permissible ambient temperature °C +5 to +40

Battery charger
Mains voltages V 100 -240 (+/- 10%)
Frequencies Hz 50/60

Connectable leak detectors PHOENIX L300I series,


UL 200 line, L 200 series

Detection of leak detectors up to 10

Leak Detecting
Instruments
Available languages English, German

Further languages Chinese, Japanese (Katakana),


Russian, French, Italian,
Spanish, Polish and Korean

Protection class IP 42

Charger protection class IP 56

RC 310 WL radio permits CE, FCC, IC, TELEC, MIC, MII

Dimensions (L x W x H) mm 210 x 90 x 45

Weight
RC 310 C, approx. kg (lbs) 0.4 (0.88)
RC 310 WL, approx. kg (lbs) 0.5 (1.1)

Ordering Information RC 310

Part No.

Remote control
RC 310 C, wired with 4 m long connection cable 252 013 V01

RC 310 WL, wireless with battery charger (for integrated rechargeable battery) and
wireless transmitter with connection cable (additional 4 m long connection cable) 252 014 V01

Accessories
Wireless transmitter with connection cable (for operation of a further PHOENIXL) 252 015 V01

Extension cable, 10 m (three extensions max. are possible) 140 22

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 799


Calibrated Leaks for Vacuum and
Sniffer Applications
Calibrated leaks are required for the
alignment of mass spectrometers, for
the calibration of leak rates and for
determining the response time of vacu-
um systems.

Test leaks

Calibrated Leaks TL 4 Advantages to the User


for Vacuum Applications Calibrated helium leak (capillary leak)
- Factory certificate (included)
with reservoir which may be refilled
TL 4 and TL 6 in accordance with
and with a leak rate in the range of
Calibrated leaks without gas reservoir DIN 55 350-18-4.2.2
10-4 mbar x l x s-1. Special calibrated
(capillary type of leak) for sensitivity and - Highly accurate
leak for use in a vacuum.
signal response time determinations
- Very low temperature dependence
during vacuum leak detection and for TL 7 (For installation within the
determination of sniffer sensitivity for PHOENIX L300i) - Determination of the nominal leak
overpressure leak detection. Nominal Helium calibrated leak (capillary leak) rate by comparison with a cali-
leak rate ranges 10-4 mbar x l x s-1 for with helium reservoir and electro- brated leak having a PTB 1) certifica-
TL 4 and 10-6 mbar x l x s-1 for TL 6. magnetically operated valve. Leak rate te
Suitable for helium. A purging valve with range 10-7 mbar x l x s-1. The electro- - DAkkS 2) certificate (optional),
hose nozzle permits a rapid exchange magnetically operated valve provided traceable to PTB
of the gas in the dead volume. permits the opening and closing of the - Custom models for special
calibrated leak to be controlled by the applications
TL 4-6
leak detector’s software.
Helium calibrated leak (capillary leak) The nominal leak rate applies only if the
for gross leaks, adjustable in the range TL 7 calibrated leak has been connected to
between 10-4 to 10-6 mbar x l x s-1, Calibrated helium leak (capillary leak) a vacuum system at a pressure of less
with exchangeable helium reservoir, with helium reservoir, manual valve and than 1 mbar.
pressure gauge and two manually ope- He gas.
rated valves. For calibration of leak rate 1)
Federal Institution of Physics and Technology
TL 8 and TL 9 2)
Deutsche Akkreditierungsstelle GmbH
readings and the alignment of helium
Helium calibrated leak calibrated for a (German Calibration Service)
mass spectrometers in the vacuum
leak rate in the range of 10-8 mbar
pressure range and for determining the
x l x s-1 (helium leak rate) for TL 8 and
sensitivity of sniffers in the overpres-
10-9 mbar x l x s-1 for TL 9, with gas
sure range.
reservoir and diaphragm shutoff valve.
For alignment of a helium mass spec-
trometer, for calibration of the leak rate
display of helium leak detectors and
for response time measurements in
connection with larger volumes.

Note
All calibrated leaks with the exception
of the TL 4 are not suited for use in a
vacuum.

800 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold


Calibrated Leaks for Sniffer Helium calibrated leaks Set of Calibrated Leaks for
Applications S-TL 4 to S-TL 6 with leak rates from
Power Plants
These calibrated leaks have been set 10-4 to 10-6 mbar x l x s-1. These three calibrated leaks of 1000,
to a fixed value within the typical leak 100 and 10 mbar x l x s-1 allow leak
rate range (see Ordering Information). tests under partial flow conditions
The exchangeable calibration gas under the ambient conditions of power
reservoir is monitored through the built- plants.
in manometer.

Technical Data Leak Rate Leak Detection Connection


Range Method Flange
TL 4, without helium gas reservoir 10-4 mbar x l x s-1 Vacuum and sniffer DN 16 ISO-KF

TL 6, without helium gas reservoir 10-6 mbar x l x s-1 Vacuum and sniffer DN 16 ISO-KF

TL 4-6, with helium gas reservoir 10-4 to 10-6 mbar x l x s-1 Vacuum and sniffer DN 16 ISO-KF

TL 4, with helium gas reservoir 10-4 mbar x l x s-1 Vacuum Discharging opening
-7 -1
TL 7, with helium gas reservoir 10 mbar x l x s Vacuum (for installation Nozzle
within the PHOENIX L300i)

TL 7, with manual valve


and helium gas reservoir 10-7 mbar x l x s-1 Vacuum DN 10 ISO-KF
-8 -1
TL 8, with helium gas reservoir 10 mbar x l x s Vacuum DN 10 ISO-KF
-9 -1
TL 9, with helium gas reservoir 10 mbar x l x s Vacuum DN 10 ISO-KF
-4 -1
S-TL 4, with helium gas reservoir 10 mbar x l x s Sniffer Nozzle
-5 -1
S-TL 5, with helium gas reservoir 10 mbar x l x s Sniffer Nozzle

S-TL 6, with helium gas reservoir 10-6 mbar x l x s-1 Sniffer Nozzle

Ordering Information Calibrated Leak

Leak Detecting
Instruments
Part No.
1)
TL 4, without helium gas reservoir 155 65
1)
TL 6, without helium gas reservoir 155 66
1)
TL 4-6, with helium gas reservoir 155 80
1)
TL4, with helium gas reservoir 122 67
TL 7, with helium gas reservoir 1)
for installation within the PHOENIX L300i
filling pressure 8 bar 140 23 V01
filling pressure 2,9 bar 140 23
TL 7, with manual valve
1)
and helium gas reservoir 142 10
1)
TL 8, with helium gas reservoir 165 57
1
TL 9, with helium gas reservoir 144 08
1)
S-TL 4, with helium gas reservoir 122 37
1)
S-TL 5, with helium gas reservoir 122 38
1)
S-TL 6, with helium gas reservoir 122 39
Set of calibrated leaks for power plants
1000, 100, 10 mbar x l x s-1 115 16
Rubber bladder with hose clamp 890 11
Helium can; 1 l, 12 bar (for TL 4-6) 252 001
DAkkS calibration for TL 7/8/9 154 15
Factory calibration for He test leaks 154 16

1)
With factory certificate

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 801


Screw-in Calibrated Leaks
The manufacturers of helium leak test- Depending on the type of application Oerlikon Leybold Vacuum is offering a
ing systems are in need of calibrated these calibrated leaks are either instal- complete family of calibrated leaks
leaks of various sizes with individually led in the test sample as a master leak which are capable of meeting the
adjusted leak rates for the purpose of or used as a continually available facility requirements concerning type and
setting up and calibrating their in the test chamber itself. required leak rate.
systems.

Calibrated leak with screw-in sleeve Calibrated leak with pin type casing Calibrated leak with cylindrical casing

Calibrated Leak with Calibrated Leak with Calibrated Leak with


Screw-in Sleeve Pin Type Casing Cylindrical Casing
Is used as a so-called master leak to Serves as a calibrated leak for the Is used to check the sensitivity of a
check the entire helium leak testing entire helium leak testing system wit- sniffing facility.
system. hout being influenced by the presence
Before and after the actual test, the
of a test sample.
Generally two leaktight test samples operator checks the sensitivity of his
are equipped with these calibrated Here a dummy is placed in the test test facility within the scope of a plausi-
leaks. These will ensure proper separa- chamber. The connection to the test bility check.
tion between “passed and rejected” chamber is directly by a DN 10 ISO-KF
The connection on the side of the
parts. fitting. The test gas connection is either
customer’s system is provided via a
by a VCO fitting or a hose nozzle for
They are fitted to the customer’s test VCO fitting for a diameter of 10 mm.
flexible connections.
samples either by a welded joint or the
screw-in sleeve is glued in place. Connections on the side of the
customer’s system are

- 16 ISO-KF running to the vacuum


chamber
- Hose nozzle, 10 mm in diameter or
VCO fitting, 10 mm in diameter

Typical Applications Advantages to the User


- As a master calibrated leak built-in - Various types adapted to different - Ideal installation dimensions
directly into the test sample customer requirements - As a rule, all calibrated leaks are
- Directly installed to the test - Simple to operate supplied with a certificate (factory
chamber certificate) indicating the leak rate
- Easy to install
which has been set up
- Use as a calibrated leak for sniffer
applications

802 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold


pmax = 7 bar

1,0E+00

mbarl/s
1,0E-01

1,0E-02

Specified leak rate


1,0E-03
Leak rate qL

1,0E-04

1,0E-05

1,0E-06

1,0E-07

1,0E-08
1 2 3 4 5 6 7 8 9 10
bar
Specified pressure
Test pressure PV

Leak rate as a function of applied forevacuum with reference to 0 bar (> 7 bar upon request)

M 3.5

Leak Detecting
Instruments
Calibrated leak with screw-in sleeve Calibrated leak with pin type casing and hose nozzle

9.5 mm
9.5 mm

Calibrated leak with pin type casing and VCO fitting Calibrated leak with cylindrical casing and VCO fitting

1)
Ordering Information Calibrated Leak

Part No.

Calibrated leak
with screw-in sleeve 143 00
with pin type casing and VCO fitting 143 04
with pin type casing and hose nozzle 143 08
with cylindrical casing and VCO fitting 143 12

1)
When ordering please always state leak rate, test pressure and helium concentration

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 803


Accessories for
PHOENIX L300i, PHOENIX L300i DRY,
PHOENIX L300i MODUL and PHOENIX L500i

Extension line Search gas spray gun Transport Case 300

10 m Extension Line Search Gas Spray Gun Transport Case 300


The use of extension lines permits The search gas spray gun with PVC For impact protected transportation of
operation of the PHOENIXL 300 up to hose (5 m long) is used for well aimed the PHOENIXL 300; complete with
34 m away from the test objects. spraying of search gas at places where strong carrying handles and plastic
A maximum of three extension lines a leak is suspected. castors. Separate case for accessories.
(of 10 m each) may be connected in
series.

Partial flow system without pump Replacement ion source PC software LeakWare

Partial Flow System Replacement Ion Source PC Software LeakWare


only for PHOENIX L300i and Complete replacement component, The Windows PC software is used for
PHOENIX L300i MODUL including two built-in yttrium coated data acquisition, documentation of the
with following advantages: iridium cathodes measurements and to control the ope-
ration of the leak detector.
- Faster response
- Entry into the measure mode Hardware > 486 DX and 8 MB Ram
already at an inlet pressure of Software Windows.
1000 mbar.
- Faster venting of large test objects
or leak detection of mass produc-
tion.
Equipment:
Valve block (with inlet valve, venting
valve, bypass or purging valve) plus
right-angle bellows valve DN 25 ISO-KF
made of stainless steel, solenoid drives,
suited for remote control by the
PHOENIX L300i.

The partial flow systems are available


without pumps.

804 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold


Tablet including Software, Protection Case and Tablet holder PHOENIX L300i BARCODE Scanner tablet PHOENIX L300i
charging cable; tablet table stand

Ordering Information Accessories

Part No.

Transport Case 300 252 004


Dimensions, including castors and handles
approx. 600 x 790 x 380 mm (W x H x D)

Partial flow system 1)


for PHOENIX L300i and
PHOENIX L300i Modul
115 - 230 V / 50/60 Hz, without pump 140 20

AF 16-25 exhaust filter,


for partial flow system 189 11

Leak Detecting
Instruments
Replacement ion source 165 04

PC software LeakWare 140 90

10 m long extension line for RC 310 140 22

Search gas spray gun 165 55

Tablet incl. software (APP) and


2)
protection case (IP 67) PHOENIX L300i 252005V01 or 252005V01-X
2)
Tablet holder PHOENIX L300i 252007V01 or 252007V01-X
BARCODE Scanner tablet PHOENIX L300i 252008V01
2)
Tablet table stand PHOENIX L300i/500i 252009V01 or 252009V01-X
Tablet lock 252010V01

1)
5 centering rings, 5 clamping rings and 1 vacuum hose 1 m with DN 25 ISO-KF are included
2)
Extension „X“ respectively with actual tablet version

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 805


Helium Sample Probes (Sniffers)
Helium sniffers in connection with the
leak detectors are used for leak testing
test samples in which a helium over-
pressure is present. Besides accurate
pinpointing of leaks it is also possible
to determine the leak rate of the escap-
ing helium.

Helium sniffer line SL 300 Helium sniffer QUICK-TEST QT 100 with sniffer

Helium sniffer line SL 301 in transport case

Advantages to the User Typical Applications


Helium Sniffer Line SL 300 and Helium Sniffers QUICK-TEST - Storage and transportation vessels
SL 301 for PHOENIX L300i QT 100 for PHOENIX L300i for gases and liquids
- Sniffer line connects directly at the - Sniffer leak detection for greater dis- - Gas supply systems
test connection tances between test object and leak - Gas compressors
- Status LEDs red and green detector
- Components for the cooling and air
(only at SL 300) - Diaphragm pump for sucking the conditioning industries
- ZERO pushbutton search gas
- Heat pumps and components for
(only at SL 300) - Smallest detectable leak rate thermal energy recovery units
- Easy filter removable 1 x 10-6 mbar x l x s-1
- Chemical production plants
- Very fast response - Short response and decay times
- Supply and phone lines laid in the
- Extremely low detection limit - High sniffer velocity ground
< 1 x 10-7 mbar x l x s-1 - Switching power supply, can be run - Power station condensers and
- Rigid sniffer tip 120 mm off mains voltages from 100 to turbines
230 V AC
- Very rugged industrial design - Window and door seals of car
bodies, refrigerators and alike
- Revision checks on leak testing
systems
- Measurement of helium concen-
trations ranging from ppm to %
- All hollow objects exposed to over-
pressures

806 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold


Technical Data SL 300 / SL 301 QT 100

Smallest detectable leak rate mbar x l x s-1 < 10-7 10-6

Inlet pressure mbar < 0.13 –

Supply voltage – 100-230 V, 50/60 Hz

Signal response time for


SL 301 at a length of
04 m s <1 –
10 m s <4 –
SL 300 at a length of
05 m s <1 1
10 m s <5 –
20 m s – <6
50 m s – 20

Connection flange DN 25 ISO-KF 25 ISO-KF

Weight kg (lbs) 0.6 (1.3) 3.5 (7.7)

Ordering Information SL 300 / SL 301 QT 100

Part No. Part No.

Helium sniffer line with rigid sniffer tip


120 mm

Leak Detecting
Instruments
SL 300
red/green LED
ZERO button
4 m long, straight handle 252 003 –

SL 301
04 m long, straight handle 252 025 V01 –
10 m long, straight handle 252 026 V01 –

Helium sniffer QUICK-TEST QT 100 – 155 94

Sniffer line for the QT 100


05 m – 140 08
20 m – 140 09
50 m – 121 83

Spare Parts for SL 301


Filter insert, 2 pieces ESLMSA-92097 –
Stainless steel tube with capillary tube E-LST-30 –

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 807


Miscellaneous

Connection Flanges
Leak Detectors Helium Sniffers Calibrated Leaks

PHOENIX L300i – DN 25 ISO-KF SL 300 – DN 25 ISO-KF TL 4 – DN 16 ISO-KF

PHOENIX L300i DRY – DN 25 ISO-KF QT – DN 25 ISO-KF TL 6 – DN 16 ISO-KF

PHOENIX L300i MODUL – DN 25 ISO-KF ST 100 – DN 25 ISO-KF TL 4-6 – DN 16 ISO-KF

If components of the same nominal width are connected, only one centering ring and one clamping ring will be required.

Connection Components
When wanting to connect accessories (helium sniffer and calibrated leaks) to a leak detector, the following reducers and
components may be necessary:

Reduction Reducers Centering Rings Clamping Rings


Stainless steel/FPM Aluminum
Part No. Part No. Part No.

DN 25 ISO-KF / 16 ISO-KF 183 86 (Aluminum) or DN 25 ISO-KF, 883 47 DN 20 / 25 ISO-KF 183 42


885 04 (Stainless steel) DN 16 ISO-KF, 883 46 DN 10 / 16 ISO-KF, 183 41

DN 40 ISO-KF / 25 ISO-KF 183 87 (Aluminum) or DN 40 ISO-KF, 883 48 DN 32 / 40 ISO-KF, 183 43


885 05 (Stainless steel) DN 25 ISO-KF, 883 47 DN 20 / 25 ISO-KF, 183 42

DN 40 ISO-KF / 16 ISO-KF 183 89 (Aluminum) or DN 40 ISO-KF, 883 48 DN 32 / 40 ISO-KF, 183 43


885 07 (Stainless steel) DN 16 ISO-KF, 883 46 DN 10 / 16 ISO-KF, 183 41
1)
DN 63 ISO-K / 40 ISO-KF 269 40 (Aluminum) or DN 63 ISO-K, 887 03 DN 63 / 250 ISO-K,
887 40 (Stainless steel) DN 40 ISO-KF, 883 48 DN 32 / 40 ISO-KF, 183 43

1)
See clamps for ISO-K flanges in the Product Part “Flanges and Fittings”

The following metal hoses are recommended to connect the leak detectors to systems:

Nominal Width Length Ordering Information

Part No.

DN 16 ISO-KF 1.0 m 868 01

DN 16 ISO-KF 0.5 m 867 91

DN 25 ISO-KF 1.0 m 868 03

DN 25 ISO-KF 0.5 m 867 93

DN 40 ISO-KF 1.0 m 868 05

DN 40 ISO-KF 0.5 m 867 95

Further connecting components, like quick clamping rings and other components are described in Product Part “Flanges and Fittings”

808 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold

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