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    Lecture 6. Surface Diffusion

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    최종윤
    This document discusses surface diffusion during crystal growth. It defines key terms like diffusion length (λs) and diffusion coefficient (Ds). Surface diffusion is described by equations that show λs is determined by Ds and residence time (τs), and that Ds depends on temperature through an Arrhenius relationship. A model is presented where surface diffusion, described by Fick's laws, determines step flow rate and crystal growth rate as a function of temperature, flux, and other parameters. The document concludes by discussing how measurements of the temperature where RHEED intensity oscillations disappear can be used to evaluate the surface diffusion coefficient D.

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    Lecture 6. Surface Diffusion

    Uploaded by

    최종윤
    18 views7 pages
    This document discusses surface diffusion during crystal growth. It defines key terms like diffusion length (λs) and diffusion coefficient (Ds). Surface diffusion is described by equations that show λs is determined by Ds and residence time (τs), and that Ds depends on temperature through an Arrhenius relationship. A model is presented where surface diffusion, described by Fick's laws, determines step flow rate and crystal growth rate as a function of temperature, flux, and other parameters. The document concludes by discussing how measurements of the temperature where RHEED intensity oscillations disappear can be used to evaluate the surface diffusion coefficient D.

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    This document discusses surface diffusion during crystal growth. It defines key terms like diffusion length (λs) and diffusion coefficient (Ds). Surface diffusion is described by equations that show λs is determined by Ds and residence time (τs), and that Ds depends on temperature through an Arrhenius relationship. A model is presented where surface diffusion, described by Fick's laws, determines step flow rate and crystal growth rate as a function of temperature, flux, and other parameters. The document concludes by discussing how measurements of the temperature where RHEED intensity oscillations disappear can be used to evaluate the surface diffusion coefficient D.

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    18 views7 pages

    Lecture 6. Surface Diffusion

    Uploaded by

    최종윤
    This document discusses surface diffusion during crystal growth. It defines key terms like diffusion length (λs) and diffusion coefficient (Ds). Surface diffusion is described by equations that show λs is determined by Ds and residence time (τs), and that Ds depends on temperature through an Arrhenius relationship. A model is presented where surface diffusion, described by Fick's laws, determines step flow rate and crystal growth rate as a function of temperature, flux, and other parameters. The document concludes by discussing how measurements of the temperature where RHEED intensity oscillations disappear can be used to evaluate the surface diffusion coefficient D.

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    Lecture 6.

    Surface diffusion

    6-1. Surface diffusion: s (diffusion length), Ds (diffusion coefficient)

    1
    - Diffusion length s ~ Ds,  s

    BCF theory “The Growth of crystals and the equilibrium structure


    of their surface” W.K. Burton, N. Cabrera, F.C. Frank

    s 2 = Ds   s .....(1) Ds : diffusion coefficient


     s : mean residence time
    for simple molecules ,

     E 
    Ds = a 2   ' exp  − s  .....(2)
     kT 

     E 
    1  s =   exp  − d  .....(3)
     kT 
    Es : activation energy between two neighbouring equilibrium positions

    a : distance from each other

    Ed : evaporation energy from the surface to vapor

     ,  ' : frequency factor


    order of atomic frequency of vibration (~ 1013 s −1 ) for monoatomic

    assuming  ' ~ 

     Ed − E s 
    s = a  exp  
     2kT 

    2
    6-2. Crystal Growth – Surface Diffusion Model
    (J. Appl. Phys. 75(2), 850(1994), J. Cryst. Growth 99, 482(1990)

    Surface Diffusion rate : Fick’s 1st Law

    dns ( y )
    J s = − Ds  .....(1) Ds : diffusion coefficient
    dy
     s : mean residence time
    ns : surface density of adatom
    Continuity equation

    d 2 ns ( y ) n
    − Ds  = J − s .....(2)
    dy 2
    s

    steps : perfect sinks for the incoming adatoms

    ns
    B.C.) y =  o / 2, ns = nso  (= ) = 1 at steps  : supersaturation ratio
    nso

    cosh( y / s )
    Then, ns ( y ) = J   s + (nso − J   s ) .....(3)
    cosh(o / 2s )

     E − Es 
    1
    Where s = ( Ds   s )2 = a  exp  d  .....(4) diffusion length on " step − free " surface
     2kT 

    3
    dns ( y ) n sinh( y / s )
    from (1) J s ( y ) = − Ds  = s ( J − so ) .....(5)
    dy  s cosh(o / 2s )

    step velocity

    J s ( y) 2s  nso   o 
     step = 2 = J −  tanh   .....(6)
    no y=
    o no  s   2s 
    2
    no : the density of adatom sites on the surface

    Growth rate

    h
    R =  step  tan  =  step 
    o

    2h  s  nso   o 
    = J −  tanh   .....(7)
    no  o  s   2s 

    o h n 
    if <<
    1 , then R =  J − so 
    2s no  s 

    소두

    4
    Growth mod e depends on  max

     max >  crit : two − dimensional nucleation

     max <  crit : step − flow

    s  E − Es 
    s = a  exp  d 
     2kT 

    1000/T (K-1)

    5
    6-3. Surface diffusion measurements

    Growth modes

    o : terrace width

    s : diffusion length of adatom


    o

    o > s : 2 − D nucleation  RHEED intensity oscillation

    o < s : no nucleation  no RHEED intensity oscillation

     Ns  Ns
    s 2 = D   = D    =
     J Ga  J Ga

    time required to cover monolayer


    D : diffusion coefficient
    N s : number of surface site
    J Ga : flux of Ga

    6
    Then

    J 
    ( )
    D = s 2  Ga   D evaluated by measuring T
     Ns 
    D(T ) at which oscillations disappear
     E 
    D = Do  exp  − s  at different Ga fluxes
     kT 

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