electronics

Article
A Fast Steering Mirror Using a Compact Magnetic
Suspension and Voice Coil Motors for
Observation Satellites
Tadahiko Shinshi 1, *, Daisuke Shimizu 1 , Kazuhide Kodeki 2 and Kazuhiko Fukushima 2
1 Tokyo Institute of Technology, Yokohama 226-8503, Japan; shimizu.d.aa@m.titech.ac.jp
2 Mitsubishi Electric Corporation, Amagasaki 661-8661, Japan;
Kodeki.Kazuhide@db.MitsubishiElectric.co.jp (K.K.);
Fukushima.Kazuhiko@ce.MitsubishiElectric.co.jp (K.F.)
* Correspondence: shinshi.t.ab@m.titech.ac.jp; Tel.: +81-45-924-5095




Received: 29 September 2020; Accepted: 23 November 2020; Published: 25 November 2020


Abstract: Fast steering mirrors (FSMs) are used to correct images observed by satellites. FSMs need
to have large apertures and realize high precision and the positioning of the mirror in the tip-tilt
and axial directions needs to be highly precise and highly responsive in order to capture large-scale,
high-resolution images. An FSM with a large-diameter mirror supported by a compact magnetic
suspension and driven by long-stroke voice coil motors (VCMs) is proposed in this paper. The magnetic
suspension and VCM actuators enable the mirror to be highly responsive and to have long-range
movement in the tip-tilt and axial directions without friction and wear. The magnetic suspension
is a hybrid that has active control in the lateral directions and passive support in the tip-tilt and
axial directions. An experimental FSM with an 80 mm diameter dummy mirror was fabricated and
tested. The mirror’s driving ranges in the tip-tilt and axial directions were ±20 mrad and ±500 µm,
respectively. Furthermore, the servo bandwidths in the tip-tilt and axial directions were more than
1 kHz and 200 Hz, respectively.

Keywords: observation satellite; image correction; fast steering mirror; magnetic suspension; voice
coil motor (VCM); wide bandwidth; gimbal mechanism

1. Introduction
Earth observation and astronomical satellites for acquiring larger-scale, high-resolution images
have been developed [1]. The disturbance generated by flywheels for attitude control and other moving
components increases the satellite’s vibration and degrades the resolution of the captured images.
Figure 1 shows that a fast steering mirror (FSM) [2] positioned in the tip-tilt directions can be used to
correct the image blur caused by the vibration of the instrument. The mirror needs to have a large
diameter to capture large-scale images. It also has to respond rapidly to compensate for high-frequency
vibrations. Rapid response of a large mirror is usually difficult to realize because the larger the mirror
is, the more vibration modes the FSM has in the low-frequency range.
Many FSMs have been developed for corrections of images made by observation satellites and for
laser systems for inter-satellite communication. Figure 2 shows a schematic view of an FSM, consisting of
a mirror, actuators, displacement sensors, and a guideway mechanism for the tip-tilt motion and
axial adjustment of the mirror [3]. Many types of actuator for driving the mirror, such as rotary
motors [4], voice coil motors (VCMs) [5], electromagnets [6], and laminated piezoelectric actuators [7],
have been tested and used. Electromagnets and laminated piezoelectric actuators generate a large force,
but the stroke is smaller than that of a VCM, and non-linearity such as hysteresis and saturation is

Electronics 2020, 9, 1997; doi:10.3390/electronics9121997 www.mdpi.com/journal/electronics

 diameter mirror. The mirror is supported by a magnetic suspension with two degrees of freedom
(DOF) control, and is driven by high response VCMs. The targets for the positioning ranges in the
tip-tilt and axial directions are set to be more than ±17.4 mrad and ±500 mm, respectively. The design
target of the servo bandwidth in the tip-tilt directions is set to more than 1000 Hz. To satisfy the above
targets, a VCM was designed and fabricated. The current–force characteristics and the distance–force
Electronics 2020, 9, 1997 2 of 11
characteristics of the VCM were evaluated. Furthermore, the uncontrolled and controlled
performances of the FSM are also evaluated. Finally, to confirm the superiority of the magnetic
support,inexperiments
observed to measure
the input/output the performance
characteristics. of thehand,
On the other FSM and
VCMs compare this with
can respond the performance
rapidly with good
of an FSM
linearity andguided by a gimbal
have a larger mechanism
positioning wereeither
range than carried out.
piezoelectric actuators or electromagnets [5–7].

Figure 1. An observation satellite with a fast steering mirror disturbed by reaction wheels.
Figure
Electronics 2020, 1. An
9, x FOR observation
PEER REVIEW satellite with a fast steering mirror disturbed by reaction wheels. 3 of 11

Figure
Figure 2.
2. A A
fastfast
steering
steeringmirror (FSM)
mirror having
(FSM) a multi-degree-of-freedom
having a multi-degree-of-freedom(DOF) mechanism.
(DOF) The
mechanism.
rotational motion is for jitter compensation. The translational motion is for defocus correction.
The rotational motion is for jitter compensation. The translational motion is for defocus correction.

2. Magnetically Supported
Spherical bearings FSM Mechanism
[8], gimbal mechanisms [9], elastic rods [6], and elastic hinges [10] have been
designed and tested to realize the tip-tilt motion of FSMs. Spherical bearings have a wide stroke range
2.1.
andFSM Configuration
a fixed center of rotation, but the friction and wear degrade the positioning accuracy and the
response of
As shown theinFSM. Gimbal
Figure 3, themechanisms using flexure
mirror is supported pivots [11]
by a magnetic are free from
suspension. Softfriction
tip-tilt and
and wear.
axial
However, the structure connecting the mirror and the gimbal ring with some
passive springs are generated by the magnetic coupling [12]. This magnetic suspension uses a flexure pivots decreases
the natural
magnetic frequencies
circuit in those
similar to the uncontrolled directions.
used in centrifugal bloodFurthermore,
pumps [13], the dynamic
except for thecharacteristics
restoring torque of
each axis are different due to the mass and inertia of the gimbal ring, and
around the Z axis generated by the separated permanent magnets and cores in the rotor.interference between the axes
also increases.
The magnetic suspension mechanism consists of four pairs of U-shaped iron cores and coils in
A mirror
the stator, andsupported bycrescent-shaped
four pairs of an elastic rod and/or flexuremagnets
permanent hinges can move without
sandwiched friction
between two and wear,
crescent-
and the guideway mechanism is simple and compact. However, many elastic
shaped iron rings in the suspended mirror. The four pairs of U-shaped electromagnets in the stator vibration modes
occur
and theinfour
the pairs
driving frequency magnets
of permanent range due to cores
and the deformation of themirror
in the suspended guideway at high at
are installed frequencies,
90 degree
which destabilizes
intervals. the feedback system and limits the servo bandwidth. To avoid mode vibration of
the mechanical guideways, the use of a magnetic suspension for FSMs has been studied [12].
In this paper, we propose an FSM using a magnetic suspension to guide the mirror in the tip-tilt and
axial directions and suppress other low-frequency vibration modes. The proposed magnetic suspension
is compact, simple, and free from friction, wear, and maintenance. Furthermore, axial positioning of
the mirror for defocus correction of the optical system is also realized.
This paper presents the design, fabrication, and control performance of an FSM with an 80 mm
diameter mirror. The mirror is supported by a magnetic suspension with two degrees of freedom
Electronics 2020, 9, 1997 3 of 11

(DOF) control, and is driven by high response VCMs. The targets for the positioning ranges in the
tip-tilt and 2.
Figure axial directions
A fast steeringare set to(FSM)
mirror be more thana ±17.4
having mrad and ±500 mm,
multi-degree-of-freedom respectively.
(DOF) mechanism. The design
The
target of the servo
rotational bandwidth
motion is for jitter in the tip-tilt directions
compensation. is set tomotion
The translational more than
is for 1000 Hz.correction.
defocus To satisfy the above
targets, a VCM was designed and fabricated. The current–force characteristics and the distance–force
2.characteristics
MagneticallyofSupported
the VCM were FSMevaluated.
Mechanism Furthermore, the uncontrolled and controlled performances
of the FSM are also evaluated. Finally, to confirm the superiority of the magnetic support, experiments
2.1. FSM Configuration
to measure the performance of the FSM and compare this with the performance of an FSM guided by
a gimbal mechanism were carried out.
As shown in Figure 3, the mirror is supported by a magnetic suspension. Soft tip-tilt and axial
passive springs are
2. Magnetically generated
Supported FSM byMechanism
the magnetic coupling [12]. This magnetic suspension uses a
magnetic circuit similar to those used in centrifugal blood pumps [13], except for the restoring torque
around
2.1. FSM theConfiguration
Z axis generated by the separated permanent magnets and cores in the rotor.
The magnetic suspension mechanism consists of four pairs of U-shaped iron cores and coils in
As shown in Figure 3, the mirror is supported by a magnetic suspension. Soft tip-tilt and axial
the stator, and four pairs of crescent-shaped permanent magnets sandwiched between two crescent-
passive springs are generated by the magnetic coupling [12]. This magnetic suspension uses a magnetic
shaped iron rings in the suspended mirror. The four pairs of U-shaped electromagnets in the stator
circuit similar to those used in centrifugal blood pumps [13], except for the restoring torque around
and the four pairs of permanent magnets and cores in the suspended mirror are installed at 90 degree
the Z axis generated by the separated permanent magnets and cores in the rotor.
intervals.

Figure 3. Configuration of an FSM in which the mirror is supported by a two-DOF controlled magnetic
Figure 3. Configuration of an FSM in which the mirror is supported by a two-DOF controlled
suspension and driven by voice coil motors (VCMs).
magnetic suspension and driven by voice coil motors (VCMs).
The magnetic suspension mechanism consists of four pairs of U-shaped iron cores and coils in the
2.2. Magnetic Suspension Mechanism
stator, and four pairs of crescent-shaped permanent magnets sandwiched between two crescent-shaped
ironThe
ringsbias
in the suspended
magnetic mirror. The
flux generates four pairs
magnetic of U-shaped
couplings electromagnets
between the U-shaped in the statorand
magnets andthethe
four pairs of
suspended permanent
part, as shown magnets and4.cores
in Figure in the suspended
The magnetic mirror
couplings are installed
generate restoringattorques
90 degree intervals.
around the
X, Y, and Z axes and a restoring force in the axial direction. In the lateral directions, the current
2.2. Magnetic
through Suspension
two coils Mechanismiron cores facing each other provides push–pull motion needed to
in the U-shaped
stabilize
Thethebiassuspended
magnetic mirror. The magnetic
flux generates magneticsuspension
couplingsactively
between controls the two-DOF
the U-shaped magnets lateral
and
movement, and passively supports the mirror for four-DOF out of plane movement.
the suspended part, as shown in Figure 4. The magnetic couplings generate restoring torques around
the X, Y, and Z axes and a restoring force in the axial direction. In the lateral directions, the current
through two coils in the U-shaped iron cores facing each other provides push–pull motion needed
to stabilize the suspended mirror. The magnetic suspension actively controls the two-DOF lateral
movement, and passively supports the mirror for four-DOF out of plane movement.
Electronics 2020, 9, 1997 4 of 11
Electronics 2020, 9, x FOR PEER REVIEW 4 of 11

Figure 4. The proposed magnetic suspension mechanism. The lateral movement is controlled by
Figure 4. The proposed magnetic suspension mechanism. The lateral movement is controlled by
electromagnets. The other motion is supported by the magnetic coupling.
electromagnets. The other motion is supported by the magnetic coupling.
2.3. Tip-Tilt and Axial Positioning Mechanism
2.3. Tip-Tilt and Axial Positioning Mechanism
Four VCMs are attached to the bottom of the suspended mirror at 90 degree intervals. These are
usedFour VCMs are
to position theattached
mirror in tothe
the tip-tilt
bottomdirections,
of the suspended
as shown mirror at 90 degree
in Figure 3. Theintervals.
VCMs can These
alsoare
be
used to position the mirror in the tip-tilt directions, as shown in Figure 3. The
used for positioning of the mirror in the axial direction. The tip-tilt motion is generated by supplying VCMs can also be used
for positioning
push-pull of the
currents to mirror in the axial
diametrically direction.
opposed VCMs. The tip-tilt
Axial motion
motion is generated
is generated by by supplying
supplying thepush-
same
pull currents to diametrically opposed VCMs. Axial motion is generated
current to each VCM. The sum of the tip-tilt and axial control currents is supplied to each VCM coil by supplying the samein
current
actual use.to each VCM. The sum of the tip-tilt and axial control currents is supplied to each VCM coil
in actual use.
3. Design and Fabrication of the Prototype FSM
3. Design and Fabrication of the Prototype FSM
3.1. Design of the VCM and Magnetic Suspension
3.1. Design of the VCM and Magnetic Suspension
The VCMs have to be compact and generate a sufficient force. Figure 5 shows the dimensions of
The VCMs
the designed VCM,havewhich
to be consists
compactofand twogenerate a sufficient
ring-shaped and two force. Figure 5 shows
column-shaped the dimensions
magnets, an inner and of
the designed
an outer coil, VCM, which consists
and magnetic of two
cores. The ringring-shaped
and disk cores andare twosandwiched
column-shaped betweenmagnets, an inner
the upper and
and
loweranpermanent
outer coil, magnets
and magnetic cores. the
to increase Thelateral
ring and disk cores
magnetic flux are
from sandwiched
the permanent between the upper
magnets to the
and
coils.lower permanent
The inner and outermagnets to increaseuse
coils effectively thethe
lateral magnetic
lateral magnetic flux
fluxfrom
fromthethepermanent
permanentmagnets
magnets to to
the coils. an
generate The inner
axial and outer
Lorentz force. coils effectively
The gap betweenuse the the
coil lateral
and themagnetic
core was setfluxtofrom the so
be large permanent
that there
magnets betono
wouldElectronics generate
2020, 9,an
possible axial
xcontact
FOR PEERLorentz
due force.
to the
REVIEW Themotion
tip-tilt gap between
of the the coil and the core was set to be large 5 of 11
mirror.
so that there would be no possible contact due to the tip-tilt motion of the mirror.
The column-shaped magnets are made of NdFeB (N45), and the ring-shaped ones are N35UH.
The number of coil windings on the inside and outside is 83, respectively. The diameter of the coil
wire is 0.4 mm. The core material is electromagnetic soft iron (SUY). The magnets and the cores were
assembled with epoxy adhesive. The shape of the high output VCM was analyzed using magnetic
field analysis software (ANSYS Maxwell, Ansys). The NdFeB magnet’s residual flux density and
coercive force were set to be at 1.26 T and 907 kA/m, respectively.
In the simulation, the current–force coefficient of the VCM at the center position was 1.26 N/A,
which was verified by measurement, as shown in Figure 6a. As shown in Figure 6b, the reduction in
force is about 9.9% for displacement by 1 mm, achieved by applying a current density of 5.4 A/mm2
through the VCM coil. This reduction is acceptable for the positioning controller.
The final dimensions of the designed magnetic suspension are shown in Figure 7. The NdFeB
magnet in the rotor is N40 and the cores are made of electromagnetic soft iron (SUY). The number of
turns in each magnetic suspension coil is 144, and the diameter of the coil wire is 0.315 mm.
The simulated stiffness of the magnetic suspension in the tip-tilt and axial directions were 3.1
Nm/rad and 4.2 N/mm, respectively. This stiffness of the magnetic suspension was determined by
Figure Figure 5. The design
5. The design and dimensions
and dimensions of the The
of the VCM. VCM. Theand
inner inner andcoils
outer outer coils effectively
effectively use theuse the lateral
lateral
considering the maximum force achieved with the designed VCMs. Simulation of the negative
magneticmagnetic
flux fromfluxthe
from the permanent
permanent rings. rings.
stiffness and current–force coefficient in the lateral direction found them to be 10.3 N/mm and 1.3
N/A, The respectively.
column-shaped magnets are made of NdFeB (N45), and the ring-shaped ones are N35UH.
The number of coil windings on the inside and outside is 83, respectively. The diameter of the coil
wire is φ0.4 mm. The core material is electromagnetic soft iron (SUY). The magnets and the cores were
assembled with epoxy adhesive. The shape of the high output VCM was analyzed using magnetic field
Electronics 2020, 9, 1997 5 of 11

analysis software (ANSYS Maxwell, Ansys). The NdFeB magnet’s residual flux density and coercive
force were set to be at 1.26 T and 907 kA/m, respectively.
In the simulation, the current–force coefficient of the VCM at the center position was 1.26 N/A,
which was verified by measurement, as shown in Figure 6a. As shown in Figure 6b, the reduction in
forceFigure
is about 9.9%
5. The for displacement
design and dimensionsbyof1the
mm, achieved
VCM. byand
The inner applying a current
outer coils density
effectively of 5.4
use the A/mm2
lateral
through the VCM
magnetic coil.the
flux from This reduction
permanent is acceptable for the positioning controller.
rings.

Figure 5. The design and dimensions of the VCM. The inner and outer coils effectively use the lateral
magnetic flux from the permanent rings.

Figure 6. The VCM characteristics: (a) Measured current–force relationship of the designed VCM;
Figure 6. The VCM characteristics: (a) Measured current–force relationship of the designed VCM; (b)
(b) measured and simulated force at each position with a current density of 5.4 mm2 /A in the VCM coil.
measured and simulated force at each position with a current density of 5.4 mm2/A in the VCM coil.

The final dimensions of the designed magnetic suspension are shown in Figure 7. The NdFeB
magnet in the rotor is N40 and the cores are made of electromagnetic soft iron (SUY). The number of
Figure 6. The VCM characteristics: (a) Measured current–force relationship of the designed VCM; (b)
turns in each magnetic suspension coil is 144, and the diameter of the coil wire is φ0.315 mm.
measured and simulated force at each position with a current density of 5.4 mm /A in the VCM coil.
2

Figure 7. The design and the dimensions of the magnetic suspension mechanism.

3.2. Prototype FSM

Figure 8a shows the configuration of the test rig, including the FSM, displacement sensors, and
Figure 7.Figure 7. Theand
The design design and the dimensions
the dimensions of the magnetic
of the magnetic suspensionsuspension mechanism.
mechanism.
adjustment jigs (micrometers). To easily evaluate the FSM performance, the displacement sensors
wereThetentatively
simulated
3.2. placed
Prototype FSMabove
stiffness of the
the dummy
magneticmirror. At theinfinal
suspension productand
the tip-tilt stage,
axialthe displacement
directions were
sensors should move to the lower surface of the mirror.
3.1 Nm/rad and 4.2 N/mm, respectively. This stiffness of the magnetic suspension was determined
Figure 8a shows the configuration of the test rig, including the FSM, displacement sensors, and
by considering the maximum force achieved with the designed VCMs. Simulation of the negative
adjustment jigs (micrometers). To easily evaluate the FSM performance, the displacement sensors
stiffness and current–force coefficient in the lateral direction found them to be 10.3 N/mm and
were tentatively placed above the dummy mirror. At the final product stage, the displacement
1.3 N/A, respectively.
sensors should move to the lower surface of the mirror.
3.2. Prototype FSM
Figure 8a shows the configuration of the test rig, including the FSM, displacement sensors,
and adjustment jigs (micrometers). To easily evaluate the FSM performance, the displacement sensors
 of duralumin. The diameter and mass of the dummy mirror, including parts of the magnetic
suspension and the VCMs, were 80 mm and 0.22 kg, respectively. Compared to actual mirror
materials such as quartz glass and beryllium, aluminum alloy for the dummy mirror has a larger
specific gravity and smaller Young’s modulus, so the experimental conditions are limiting from the
Electronics
viewpoint of9,extending
2020, 1997 the bandwidth. A plastic spacer to limit the lateral movement of the dummy6 of 11

mirror to 0.5 mm was inserted between the mirror and the stator. The touch-up current can be
reduced
were by limiting
tentatively the
placed air gap,
above and the mirror.
the dummy controller gains
At the canproduct
final be set higher. Two
stage, the micrometers
displacement were
sensors
attached to calibrate the lateral displacement
should move to the lower surface of the mirror. sensors.

Figure 8. The test rig using the magnetic suspension mechanism: (a) The configuration of the test
Figure 8. The test rig using the magnetic suspension mechanism: (a) The configuration of the test rig;
rig; (b) top view of the test rig without the displacement sensors; (c) side view of the suspended part
(b) top view of the test rig without the displacement sensors; (c) side view of the suspended part
including the dummy mirror.
including the dummy mirror.
Figure 8b,c show photographs of the assembled FSM without the displacement sensors and the
3.3. Controlmirror.
suspended SystemIn order to simplify the fabrication and the experiment, the test mirror was made of
duralumin.
A DSPThe diameter
system and mass
(DS1103, of thewas
dSPACE) dummyused mirror, including
to control parts of
the motion of the
the magnetic
mirror insuspension
the lateral,
and theand
axial, VCMs, were
tip-tilt 80 mm and
directions. The0.22 kg,AD/DA
16 bit respectively. Compared
converters to actual
were used, andmirror materials
the sampling such as
frequency
quartz glass and beryllium, aluminum alloy for the dummy mirror has a larger
was 20 kHz. The lateral displacement, measured by two eddy current displacement sensors (PU-05,specific gravity and
smaller
AEC), wasYoung’s modulus,
feedbacked so the
to the experimental
magnetic conditions
suspension. Four are limiting from
capacitance the viewpoint sensors
type displacement of extending
(C23-
the bandwidth. A plastic spacer to limit the lateral movement of the dummy mirror to
B, Lion Precision) precisely measure the axial displacements at 90 degree intervals at the same radius 0.5 mm was
inserted
on the surface of the dummy mirror. The tip-tilt and axial displacements of the dummy mirror air
between the mirror and the stator. The touch-up current can be reduced by limiting the are
gap, and theusing
calculated controller gains cansignals
the measured be set and
higher. Two
these micrometers
were feedbacked were attached
to the to calibrate
controller. the lateral
The sensor signal
displacement sensors.
noise is reduced using 2nd-order low-pass filters with a cutoff frequency of 5 kHz. PID controllers
are used for the tip-tilt, axial, and lateral movement control. The control parameter values were
3.3. Control System
determined experimentally to extend the servo bandwidth as much as possible and enable a stable
touch-up.
A DSP system (DS1103, dSPACE) was used to control the motion of the mirror in the lateral,
axial, and tip-tilt directions. The 16 bit AD/DA converters were used, and the sampling frequency
was 20 kHz. The lateral displacement, measured by two eddy current displacement sensors
(PU-05, AEC), was feedbacked to the magnetic suspension. Four capacitance type displacement
sensors (C23-B, Lion Precision) precisely measure the axial displacements at 90 degree intervals at
the same radius on the surface of the dummy mirror. The tip-tilt and axial displacements of the
dummy mirror are calculated using the measured signals and these were feedbacked to the controller.
The sensor signal noise is reduced using 2nd-order low-pass filters with a cutoff frequency of 5 kHz.
PID controllers are used for the tip-tilt, axial, and lateral movement control. The control parameter
Electronics 2020, 9, x FOR PEER REVIEW 7 of 11

The four VCMs and four electromagnets are each connected to independent voltage amplifiers
Electronics 2020, 9, 1997 7 of 11
(Output range: −28 to +28 V, DCV-304, Uniel-Denshi). Voltage control is applied in the lateral and
axial directions. In order to increase the servo bandwidth, current feedback using current transducers
(LA25-NP,
values wereLEM Corp., Tokyo,
determined Japan) was
experimentally applied
to extend toservo
the control the tip-tilt
bandwidth asmotion
much asmovement.
possible and enable
a stable touch-up.
4. Magnetic
The fourSuspension
VCMs and and
fourPositioning Testare each connected to independent voltage amplifiers
electromagnets
(Output range: −28 to +28 V, DCV-304, Uniel-Denshi). Voltage control is applied in the lateral and
4.1.
axialMagnetic Suspension
directions. In order to increase the servo bandwidth, current feedback using current transducers
(LA25-NP,
FigureLEM Corp.,
9 shows theTokyo,
tip-tilt Japan)
(θx, θy),was applied
axial (z), andtolateral
control(x,the
y) tip-tilt motion movement.
displacements of the dummy mirror
at startup. Only the lateral motion was actively controlled in this test. A bias current of 0.46 A was
4. Magnetic Suspension and Positioning Test
supplied to each VCM to compensate for the weight of the dummy mirror. In all directions, the
suspended
4.1. Magnetic dummy mirror moved from its initial position to the zero point. In the lateral directions,
Suspension
no overshoot was observed due to active control generating sufficient damping.
Figure
In 9 shows
the tip-tilt andtheaxial
tip-tilt (θx , θy ), the
directions, axialvibration
(z), and lateral (x, y) displacements
of the dummy mirror settledof the
downdummy
withinmirror
0.5 s
at startup.
after startupOnly
at 0.5 the lateral
s. This motion
residual was actively
vibration controlled in
can be suppressed in athis test. time
shorter A bias
usingcurrent of 0.46
the VCMs. A
This
was supplied to each VCM to compensate for the weight of the dummy
result shows that stable suspension of the dummy mirror can be realized without VCM control. mirror. In all directions,
the suspendedthe
Furthermore, dummy
smooth mirror
motionmoved from
of the its initial
dummy position
mirror to thethat
confirms zero point.non-contact
perfect In the lateralsuspension
directions,
no overshoot
was realized. was observed due to active control generating sufficient damping.

Figure 9. Startup response of the FSM using the magnetic suspension: (a) Translation in the X, Y, and Z
Figure 9. Startup response of the FSM using the magnetic suspension: (a) Translation in the X, Y, and
directions; (b) inclination in the tip-tilt (θx and θy) directions.
Z directions; (b) inclination in the tip-tilt (θx and θy) directions.
In the tip-tilt and axial directions, the vibration of the dummy mirror settled down within 0.5 s
4.2. Stiffness in the Tip-tilt and Axial Directions
after startup at 0.5 s. This residual vibration can be suppressed in a shorter time using the VCMs.
This The
resultpassive stiffness
shows that stableofsuspension
the magnetic of thesuspension
dummy mirror in the cantip-tilt and axial
be realized withoutdirections were
VCM control.
identified
Furthermore,usingtheone-degree-of-freedom
smooth motion of the dummy mass-spring-damper
mirror confirms models and thenon-contact
that perfect frequency responses
suspension to
displacements
was realized. in the theses directions from the input currents to the VCMs, as shown in Figure 10.
The natural frequencies in the θx and θy directions were almost the same, being at 26.0 and 25.7
4.2. Stiffness in theThe
Hz, respectively. Tip-tilt and Axial
natural Directions
frequency in the axial (Z) direction was 22.0 Hz. The designed mass
(0.216The
kg) passive
and the inertia moment (1.23
stiffness of the magnetic × 10−4 kgm 2) of the supported part, and the measured natural
suspension in the tip-tilt and axial directions were
frequencies were
identified using used to identify the mass-spring-damper
one-degree-of-freedom stiffness. The identified models stiffness
and theinfrequency
the tip-tilt and axial
responses to
directions
displacementswerein3.2–3.4 Nm/rad
the theses and 4.1
directions N/mm,
from respectively.
the input currents These
to the identified values in
VCMs, as shown areFigure
almost10.the
sameTheas the design
natural values given
frequencies in theinθSection 3.2.
x and θy directions were almost the same, being at 26.0 and 25.7 Hz,
respectively. The natural frequency in the axial to
Furthermore, no resonant frequency due (Z)elastic vibration
direction was 22.0modes
Hz. can
The be seen upmass
designed to 2 (0.216
kHz. The
kg)
measured interference
and the inertia moment between
(1.23 × 10thekgm
−4 tip-tilt
2 ) ofmovement
the supported shown
part,inand
thethe
gain plots is natural
measured less than −34.4 dB.
frequencies
The mirror
were used tosystem
identifycanthebestiffness.
regardedThe as identified
having a simple
stiffnessone-degree-of-freedom
in the tip-tilt and axialvibration
directions system
were
without any interference and can be easily controlled.
3.2–3.4 Nm/rad and 4.1 N/mm, respectively. These identified values are almost the same as the design
values given in Section 3.2.
Furthermore, no resonant frequency due to elastic vibration modes can be seen up to 2 kHz.
The measured interference between the tip-tilt movement shown in the gain plots is less than −34.4 dB.
The mirror system can be regarded as having a simple one-degree-of-freedom vibration system without
any interference and can be easily controlled.
Electronics 2020, 9, 1997 8 of 11
Electronics 2020, 9, x FOR PEER REVIEW 8 of 11
Electronics 2020, 9, x FOR PEER REVIEW 8 of 11

Figure 10.
Figure Frequencyresponses
10. Frequency responsesof ofthe
theFSMFSM using
using the
the magnetic
magnetic suspension:
suspension: (a)
(a)Bode
Bodeplotplotfrom
fromthe
the
Figure 10. Frequency responses of the FSM using the magnetic suspension: (a) Bode plot from the
VCMinput
VCM inputcurrent forθθxxand
current (I(Ixx))for andθθ ; (b)Bode
y;y(b) Bodeplot
plotfrom
fromthe
theVCM
VCMinput
inputcurrent
current(I(I ) forz.z.
z)zfor
VCM input current (Ix) for θx and θy; (b) Bode plot from the VCM input current (Iz) for z.
4.3.Stroke
4.3. StrokeTest
Test
4.3. Stroke Test
Figure 11 shows the tip-tilt and axial motions of the dummy mirror when 1 Hz reference sine
Figure 11 shows the tip-tilt and axial motions of the dummy mirror when 1 Hz reference sine
wavesFigure
waves were
11 shows
were input
input to
tothe
the tip-tilt and
thecontroller.
controller.The
axial motions
Thetip-tilt and
tip-tilt
of the
axial
and
dummy
strokes
axial
mirror
achieved
strokes
when
were
achieved were
1mrad
±20±20Hz reference
andand
mrad
sine
±500±500
µm,
waves were
respectively. input
These to the
strokescontroller. The
sufficiently tip-tilt
satisfy theand axial
design strokes
targets. achieved were ±20 mrad and ±500
μm, respectively. These strokes sufficiently satisfy the design targets.
μm, respectively. These strokes sufficiently satisfy the design targets.

Figure 11. Long stroke positioning of the FSM with the magnetic suspension: (a) Inclination in the θx
Figure 11. Long stroke positioning of the FSM with the magnetic suspension: (a) Inclination in the θx
direction;
Figure 11.(b) inclination
Long in the θy ; (c)
stroke positioning of displacement
the FSM within the
the Z direction.
magnetic suspension: (a) Inclination in the θx
direction; (b) inclination in the θy; (c) displacement in the Z direction.
direction; (b) inclination in the θy; (c) displacement in the Z direction.
4.4. Servo Bandwidth
4.4. Servo Bandwidth
4.4. Servo Bandwidth
Figure 12a shows the closed-loop frequency responses in the tip-tilt directions. The gain and
Figure
phaseFigure 12a
diagrams shows
in boththe closed-loop
directions frequency
are similar, andresponses
it is clear in thethere
that tip-tilt
is nodirections.
difference The gain and
between the
12a shows the closed-loop frequency responses in the tip-tilt directions. The gain and
phase
dynamicdiagrams in both directions
characteristics in each are similar,
tip-tilt direction.andTheit isservo
clearbandwidths
that there isare
no 1180
difference
Hz between
and 1210 Hz thein
phase diagrams in both directions are similar, and it is clear that there is no difference between the
the θ
dynamicx
dynamic and θ
characteristics
y directions,
characteristics
in each tip-tilt
respectively. direction.
The designThe servo
target ofbandwidths
1000 Hz wasare 1180
achieved
in each tip-tilt direction. The servo bandwidths are 1180 Hz and 1210 Hz in
Hz and
with 1210
simpleHzPIDin
the θx and θ
controllers y directions,
without having respectively.
to use notchThe design
filters target
to reduce theof 1000 Hz
signals was achieved
induced by higherwith simple
vibration PID
modes.
the θx and θy directions, respectively. The design target of 1000 Hz was achieved with simple PID
controllers
Figurewithout
12b showshaving
the toBodeuse notch filters to axial
reduce the signalsTheinduced
system by higher vibration
controllers without having to usediagram for the
notch filters to reduce direction.
the signals induced has a bandwidth
by higher vibrationof
modes.
220 Hz, which is more than sufficient for focus correction. Using the magnetic suspension, it is
modes.
Figure
possible to 12b showsthe
suppress theelastic
Bode diagram for the axial direction. Theelastic
system has a bandwidth
and theof 220
Figure 12b shows the Bodemodes diagram generated by conventional
for the axial direction. The system guideways,
has a bandwidth servo
of 220
Hz, which iscan
bandwidth more
be than sufficient
extended to a for focus correction.
sufficiently high frequencyUsing theamagnetic
with simple suspension,
control system itand
is possible
without
Hz, which is more than sufficient for focus correction. Using the magnetic suspension, it is possible
to suppress the
complicated elastic modes generated by conventional elastic guideways, and the servo bandwidth
tuning.
to suppress the elastic modes generated by conventional elastic guideways, and the servo bandwidth
can be extended to a sufficiently high frequency with a simple control system and without
can be extended to a sufficiently high frequency with a simple control system and without
complicated tuning.
complicated tuning.
 Electronics 2020,
Electronics 2020,9,
9,1997
x FOR PEER REVIEW 99 of
of 11
11
Electronics 2020, 9, x FOR PEER REVIEW 9 of 11

Figure 12. Reference characteristics of the FSM with the magnetic suspension; (a) Bode plot for the θx
Figure 12.
Figure Referencecharacteristics
12. Reference characteristics of the
the FSM
FSM with
with the
the magnetic
magnetic suspension;
suspension; (a)
(a) Bode
Bode plot
plot for
for the θxx
the θ
and θy directions; (b) Bode plot for of
the Z direction.
and θ directions; (b) Bode plot for the Z direction.
and θyydirections; (b) Bode plot for the Z direction.
4.5. Comparison
4.5. Comparison withwith an
an FSM
FSM Guided
Guided by
by aa Gimbal
Gimbal Mechanism
Mechanism
4.5. Comparison with an FSM Guided by a Gimbal Mechanism
For comparison,
For comparison,ananFSM FSM using
using a gimbal
a gimbal mechanism
mechanism and and flexure
flexure pivotspivots (5006-400,
(5006-400, Riverhawk
Riverhawk Corp.,
ForNew
Corp., comparison,
Hartford, anNY,
FSM using
USA) wasa gimbal
designed mechanism
and and flexure
prototyped, as pivots
shown in (5006-400,
Figure 13. Riverhawk
The mirror
New Hartford, NY, USA) was designed and prototyped, as shown in Figure 13. The mirror size
Corp., New Hartford,
size (80 NY, USA) was designed and prototyped, as shown in Figure 13.the
Thefeedback
mirror
(φ80 mm),mm),the the design
design andand allocation
allocation of of
thethe VCMs,
VCMs, thethecontroller
controller algorithm,
algorithm, and
and the feedback
size (80 mm),sensors
displacement the designaretheandsame
the allocation of used
the VCMs, the controller algorithm, and theparameters
feedback
displacement sensors are same asasthose
thoseused forfor thethe magnetic
magnetic suspension
suspension type.
type. TheThe
parameters of
displacement
of the PID sensors
controller are
for the
each same
axis as
were those used
adjusted for the magnetic
independently to suspension
increase the type. The
bandwidth parameters
by as much
the PID controller for each axis were adjusted independently to increase the bandwidth by as much as
of
asthe PID controller
possible. for eachcharacteristics
axis were adjusted independently to increase the bandwidth by as much
possible. TheThe reference
reference characteristics in theinθxtheandθθ x and θy directions are shown in Figure 14. The
y directions are shown in Figure 14. The moment
as possible.
moment The reference characteristics in the θ x and θy directions are shown in Figure 14. The
of inertiaofininertia
the θx in the θx direction,
direction, including including
the mirrortheand
mirrorthe and
gimbalthe ring,
gimbalis ring,
largeristhan
larger than
that in that
the θin
y
moment
the θ of inertia in the θx direction, including the mirror and the gimbal ring, is larger than that in
y direction. The servo bandwidth in the θx direction could not be made as wide as that in the θy
direction. The servo bandwidth in the θx direction could not be made as wide as that in the θy direction.
the θy direction.
direction. The servo
Furthermore, bandwidth
vibration in the θx direction could not be made asmirror
wide as thatexcited
in the θas
y
Furthermore, vibration modes othermodes
than theother thanmotion
tip-tilt the tip-tilt
of themotion
mirrorof the
were were
excited as calculated by
direction.
calculated Furthermore,
by shown
FEM and vibration
are shown modes other than the tip-tilt motion of the mirror were excited as
FEM and are in Figure 14b. in Figure
These have14b.anThese
effect have
on the anservo
effectbandwidth.
on the servo Bybandwidth.
adjusting theBy
calculated
adjusting by FEM
the controland are shownonly,
parameters in Figure
the 14b. These
bandwidth forhave
the an effect
FSM with on
the the servo
gimbal bandwidth.
mechanism By
could
control parameters only, the bandwidth for the FSM with the gimbal mechanism could not reach that
adjusting
not reachthethatcontrol
achievedparameters the only,
withsuspension. the bandwidth
magnetic suspension.for the FSM with the gimbal mechanism could
achieved with the magnetic
not reach that achieved with the magnetic suspension.

Figure
Figure 13. The test
13. The test rig
rig using
using aa gimbal
gimbal ring
ring and
and flexural
flexural pivots:
pivots: (a)
(a) Configuration
Configuration of
of the
the gimbal
gimbal
mechanism;
Figure 13. (b)
The configuration
test rig using of
a the test
gimbal rig;
ring (c) photograph
and flexural of the
pivots: test
(a)
mechanism; (b) configuration of the test rig; (c) photograph of the test rig. rig.
Configuration of the gimbal
mechanism; (b) configuration of the test rig; (c) photograph of the test rig.
Electronics 2020, 9, 1997 10 of 11
Electronics 2020, 9, x FOR PEER REVIEW 10 of 11

Figure 14.
Figure Reference characteristic
14. Reference characteristic of
of the
the FSM
FSM using
using gimbal
gimbal mechanism:
mechanism: (a)
(a) Bode
Bode plots
plots in the θθxx and
in the and
θ directions; (b) simulated vibration modes near the peak frequencies.
θyy directions; (b) simulated vibration modes near the peak frequencies.
5. Conclusions
5. Conclusions
An FSM with an 80 mm diameter mirror supported by a compact and simple magnetic suspension,
An FSM with an 80 mm diameter mirror supported by a compact and simple magnetic
allowing two-DOF lateral control of the mirror, and driven by four compact VCMs, allowing control in
suspension, allowing two-DOF lateral control of the mirror, and driven by four compact VCMs,
the tip-tilt and axial directions, was proposed, fabricated, and evaluated. The mirror was a dummy
allowing control in the tip-tilt and axial directions, was proposed, fabricated, and evaluated. The
mirror made of aluminum alloy. Rapid positioning of the mirror was achieved by controlling the VCMs
mirror was a dummy mirror made of aluminum alloy. Rapid positioning of the mirror was achieved
with simple PID compensators. The VCMs, which have inner and outer coils, and use the magnetic flux
by controlling the VCMs with simple PID compensators. The VCMs, which have inner and outer
from permanent magnet, were designed and tested. The driving ranges of the mirror were ±20 mrad
coils, and use the magnetic flux from permanent magnet, were designed and tested. The driving
and ±500 µm in the tip-tilt and axial directions, respectively. No large interference nor structural
ranges of the mirror were ±20 mrad and ±500 μm in the tip-tilt and axial directions, respectively. No
resonances, that would compromise the stability of the mirror, were not found. Servo bandwidths
large interference nor structural resonances, that would compromise the stability of the mirror, were
of more than 1 kHz and 200 Hz in the tip-tilt and axial directions of the mirror, respectively, were
not found. Servo bandwidths of more than 1 kHz and 200 Hz in the tip-tilt and axial directions of the
achieved. These ranges of movement and bandwidths satisfy the design targets for the mirror to be
mirror, respectively, were achieved. These ranges of movement and bandwidths satisfy the design
used on observation satellites.
targets for the mirror to be used on observation satellites.
A comparative experiment between the magnetically suspended mirror and a gimbal guided
A comparative experiment between the magnetically suspended mirror and a gimbal guided
mirrors showed the FSM dynamics using the magnetic suspension to be much simpler than those for
mirrors showed the FSM dynamics using the magnetic suspension to be much simpler than those for
the gimbal mechanism; thus, it was possible to show that the bandwidth could be easily widened,
the gimbal mechanism; thus, it was possible to show that the bandwidth could be easily widened,
and that the axial positioning for focus correction could be implemented.
and that the axial positioning for focus correction could be implemented.
In future work, in order to apply this method to an actual observation satellite, we need to develop
In future work, in order to apply this method to an actual observation satellite, we need to
a compact launch lock mechanism to withstand the vibration encountered during lunch and to have
develop a compact launch lock mechanism to withstand the vibration encountered during lunch and
built-in displacement sensors for the FSM. Furthermore, in order to withstand long-time use in space,
to have built-in displacement sensors for the FSM. Furthermore, in order to withstand long-time use
optimization of the material and structures, and durability and reliability tests under various conditions
in space, optimization of the material and structures, and durability and reliability tests under various
are necessary.
conditions are necessary.
Author Contributions: Conceptualization, T.S. and K.K.; methodology, T.S. and D.S.; software, D.S.; validation,
T.S. andContributions:
Author K.F.; formal analysis, T.S. and D.S.;
Conceptualization, T.S.investigation, D.S.; resources,
and K.K.; methodology, K.F.;
T.S. and data
D.S.; curation,
software, D.S.
D.S.; and K.F.;
validation,
writing—original draft preparation, T.S.; writing—review and editing, T.S.; visualization, T.S. and D.S.; supervision,
T.S.
T.S.; and K.F.;administration,
project formal analysis, T.S.funding
T.S.; and D.S.; investigation,
acquisition, D.S.;K.K.
T.S. and resources, K.F.; have
All authors data curation,
read and D.S. andtoK.F.;
agreed the
writing—original
published version of draft preparation, T.S.; writing—review and editing, T.S.; visualization, T.S. and D.S.;
the manuscript.
supervision,
Funding: This T.S.; project
research administration,
received T.S.;
no external funding acquisition, T.S. and K.K. All authors have read and
funding.
agreed to the published version of the manuscript.
Conflicts of Interest: The authors declare no conflict of interest.
Funding: This research received no external funding.

Conflicts of Interest: The authors declare no conflict of interest.

References
1. Inamori, T.; Wang, J.; Saisutjarit, P.; Nakasuka, S. Jitter reduction of reaction wheel by management of
angular momentum using magnetic torquers in nano- and micro-satellites. Adv. Space Res. 2013, 52, 222–
231.
Electronics 2020, 9, 1997 11 of 11

References
1. Inamori, T.; Wang, J.; Saisutjarit, P.; Nakasuka, S. Jitter reduction of reaction wheel by management of
angular momentum using magnetic torquers in nano- and micro-satellites. Adv. Space Res. 2013, 52, 222–231.
[CrossRef]
2. Shimizu, T.; Nagata, S.; Tsuneta, S.; Tarbell, T.; Edwards, C.; Shine, R.; Hoffmann, C.; Thomas, E.; Sour, S.;
Rehse, R.; et al. Image stabilization system for Hinode (Solar-B) Solar optical telescope. Sol. Phys. 2008, 249,
221–232. [CrossRef]
3. Akeno, K.; Shimizu, D.; Shinshi, T. A fast steering mirror driven by voice coil motors and supported by a super
elastic rod. In Proceedings of the 21st International Conference on Mechatronics Technology (ICMT 2017),
Ho Chi Minh City, Vietnam, 20–23 October 2017.
4. Asada, N.; Matsuki, H.; Minami, K.; Esashi, M. Silicon micromachined two-dimensional galvano optical
scanner. IEEE Trans. Magn. 1994, 30, 4647–4649. [CrossRef]
5. Loney, G.C. Design of a small-aperture steering mirror for high-bandwidth acquisition and tracking. Opt. Eng.
1990, 29, 1360–1365. [CrossRef]
6. Kluk, D.J.; Boulet, M.T.; Trumper, D.L. A high-bandwidth, high-precision, two-axis steering mirror with
moving iron actuator. Mechatronics 2012, 22, 257–270. [CrossRef]
7. Woody, S.; Smith, S. Design and performance of a dual drive system for tip-tilt angular control of a 300 mm
diameter mirror. Mechatronics 2006, 16, 389–397. [CrossRef]
8. Hafez, M.; Sidler, T.C.; Salathé, R.P.; Jansen, G.L.M.; Compter, J.C. Design, simulations and experimental
investigations of a compact single mirror tip/tilt laser scanner. Mechatronics 2000, 10, 741–760. [CrossRef]
9. Kodeki, K.; Fukushima, K.; Inoue, M.; Kashiwase, T.; Shimizu, T.; Sakao, T.; Kano, R.; Hara, H.; Nagata, S.;
Yoshida, T.; et al. Design and performance of tip-tilt mirror system for solar telescope. J. Spacecr. Rocket.
2004, 41, 868–876. [CrossRef]
10. Berta, A.; Hedding, L.R.; Hoffman, C.; Messaros, M. Development of a commercial line of high-performance
fast-steering mirrors. Opt. Scanning Des. Appl. 1999, 3787, 181–192.
11. Ostaszewski, M.A.; Summers, R.T. High-performance reactionless scan mechanism. In Proceedings of the
SPIE 1920, Albuquerque, NM, USA, 25 August 1993.
12. Shinshi, T.; Shimizu, D.; Kodeki, K.; Fukushima, K. A fast steering mirror driven by voice coil motors and
supported by magnetic suspension. In Proceedings of the 23rd International Conference on Mechatronics
Technology (ICMT 2019), Salerno, Italy, 23–26 October 2019.
13. Asama, J.; Shinshi, T.; Hoshi, H.; Takatani, S.; Shimokohbe, A. A new design for a compact centrifugal blood
pump with a magnetically levitated rotor. ASAIO J. 2004, 50, 550–556. [CrossRef] [PubMed]

Publisher’s Note: MDPI stays neutral with regard to jurisdictional claims in published maps and institutional
affiliations.

© 2020 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access
article distributed under the terms and conditions of the Creative Commons Attribution
(CC BY) license (http://creativecommons.org/licenses/by/4.0/).