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Mems PPT and Basic Idea

This document discusses MEMS (Micro Electro Mechanical Systems) based sensors. Some key points: - MEMS combines electrical and mechanical components on a chip to create miniature devices that can integrate multiple functionalities. This allows the creation of very small, low power, and low cost sensors. - Common MEMS sensors include accelerometers, pressure sensors, temperature sensors, and biological/chemical sensors. MEMS allows sensing of almost any parameter. - MEMS sensors have applications in areas like consumer electronics, automotive, medical devices, communications, and defense systems due to their small size, low power consumption, high sensitivity, low cost, and ability to be less invasive. - Specific examples of

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Partha Pratim Pathak
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467 views

Mems PPT and Basic Idea

This document discusses MEMS (Micro Electro Mechanical Systems) based sensors. Some key points: - MEMS combines electrical and mechanical components on a chip to create miniature devices that can integrate multiple functionalities. This allows the creation of very small, low power, and low cost sensors. - Common MEMS sensors include accelerometers, pressure sensors, temperature sensors, and biological/chemical sensors. MEMS allows sensing of almost any parameter. - MEMS sensors have applications in areas like consumer electronics, automotive, medical devices, communications, and defense systems due to their small size, low power consumption, high sensitivity, low cost, and ability to be less invasive. - Specific examples of

Uploaded by

Partha Pratim Pathak
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PPTX, PDF, TXT or read online on Scribd
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MEMS BASED

SENSORS
PARTHA PRATIM PATHAK
MONISH KUMAR CHOUDHURY
LAKHYA JYOTI PHUKON
RAJDEEP CHOUDHURY
ANKUR SHARMA
Introduction

MEMS deals with process based technologies used to fabricate
tiny integrated devices and systems that integrate
functionalities from different physical domains into one device.


MEMS applications include systems ranging from consumer
electronics, automative, medical, communication, defense
SENSORS
A device used to measure a physical quantity such as
temperature and convert it into an electrical signal of
some kind (e.g. a voltage), without modifying the
environment..

What can be sensed?
Almost Everything!!!
Commonly sensed parameters are :
Pressure
Temperature
Flow rate
Radiation
Chemicals
What is Mems?
MEMS is the acronym for Micro Electro Mechanical System

MEMS is a technique of combining Electrical and
Mechanical components together on a chip, to
produce a system of miniature dimensions..

By miniature, we mean dimensions less than the
thickness of human hair !!!!
Why MEMS for sensors?
Have lower power consumption

More sensitive to input variations

Cheaper due to mass production

Less invasive than larger devices
Comparison between conventional and MEMS
based inertial sensors
Parameters Conventional MEMS based
MASS 1587.5g 10g
SIZE 15X8X5cm 2X2X0.5cm
POWER 35W 1mW
COST Rs11,60,000 Rs29,000
APPLICATIONS OF MEMS AS SENSORS

ACCELEROMETER
PRESSURE SENSOR
TEMPERATURE SENSOR
BIOLOGICAL SENSORS
SOUND SENSOR(MICROPHONE)


ACCELEROMETER
A device that detects acceleration and tilt.
Accelerometers detect impact and deploy
automobile airbags t using MEMS technology.



Digital cameras employ them in their image
stabilization circuits.


MEMS Bio Sensors
MEMS based array that may be inserted
in the retina of a blind person to provide
partial sight.



Electronic tongue can sense a variety of
liquids.





MEMS PRESSURE SENSORS
MEMS temperature Sensors
Waterproof
Contact free (wireless)
Find use in household appliances (iron)
Can be used in tight ends

Focus: MEMS in Mobile Devices
Automotive MEMS Summary
Mems in oil exploration and related
applications
To find potential oil reserves
To detect oil leakage from pipelines
In cases of unfortunate oil spills

MEMS sensors can help to sense
information about the ocean
currents.
Using this it is possible to predict
how far the oil slick will be
transported.
This information can aid in clean
Finding potential oil and gas reserves
MEMS geophones and accelerometers can sense the vibrations
sent up from the earths belly.

An array of MEMS geophones are planted over a wide area on
the seabed.

Vibrations are intentionally produced on the ground surface
using some techniques.

The MEMS devices measure the reflection of these waves from
different layers in the earths belly.

These readings are then used to create a geological map, which
indicates the size and location of the oil/gas reservoir.

MEMS in marine military operations
An array of MEMS sensors spread on the ocean floor
could detect the presence of enemy submarines.

MEMS sensors (pressure sensors, accelerometers etc.)
are being used in anti-torpedo weapons on submarines
and ships.

MEMS sensors in torpedoes are responsible for
Detonating the torpedo at the right time
Hitting the target in a crowded environment
Prevent any premature explosion

FUTURE PROSPECT
It leads to the need for more sensors in cars, industrial
equipment and installation and, more sensors for our
ambient intelligence.

Increase in medical and pharmaceutical infrastructure in
developing countries leads to affordable devices for
diagnostics.

It has the potential to change our daily life as much as
computer.

MEMS Expansion in Recent Years
Conclusion

The medical, wireless technology and biotechnology
computer automotive and aerospace industries are only
a few that will benefit greatly from mems.

The enabling technology promises to create a new
categories of product

Mems will be the indispensable factor advancing
technology in the 21
st
century.

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