Pressure

Freescale Semiconductor Data Sheet: Technical Data

Document Number: MPX2202 Rev 8, 10/2012

200 kPa On-Chip Temperature Compensated Silicon Pressure Sensors

The MPX2202 devices series are silicon piezoresistive pressure sensor providing a highly accurate and linear voltage output directly proportional to the applied pressure. The sensor is a single monolithic silicon diaphragm with the strain gauge and a thin-film resistor network integrated on chip. The chip is laser trimmed for precise span and offset calibration and temperature compensation. They are designed for use in applications such as pump/ motor controllers, robotics, level indicators, medical diagnostics, pressure switching, barometers, altimeters, etc.

MPX2202 Series
0 to 200 kPa (0 to 29 psi) 40 mV Full Scale (Typical)

Application Examples
Pump/Motor Controllers Robotics Level Indicators Medical Diagnostics Pressure Switching Barometers Altimeters

Features
Temperature Compensated Over 0C to +85C Easy-to-Use Chip Carrier Package Options Available in Absolute, Differential and Gauge Configurations Ratiometric to Supply Voltage Available in Easy-to-Use Tape and Reel ORDERING INFORMATION
Case Device Name No. None Unibody Package (MPX2202 Series) MPX2202A 344 MPX2202DP 344C MPX2202AP MPX2202GP MPX2202ASX 344B 344B # of Ports Single Dual Gauge

Pressure Type Differential

Absolute

Device Marking MPX2202A MPX2202DP MPX2202AP MPX2202GP MPX2202A MPXV2202GP

344F Small Outline Package (MPXV2202 Series) MPXV2202GP 1369 MPXV2202DP MPXV2202GC6TI 1351 482A MPAK Package (MPXM2202 Series) MPXM2202D 1320 MPXM2202DT1 1320 MPXM2202A MPXM2202GS MPXM2202GST1 MPXM2202AS 1320 1320A 1320A 1320A

MPXV2202DP MPXV2202G MPXM2202D MPXM2202D MPXM2202A MPXM2202GS MPXM2202GS MPXM2202AS

2005-2008, 2012 Freescale Semiconductor, Inc. All rights reserved.

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UNIBODY PACKAGES

MPX2202A CASE 344-15

MPX2202AP/GP CASE 344B-01

MPX2202DP CASE 344C-01

MPX2202ASX CASE 344F-01

SMALL OUTLINE PACKAGES

MPAK

MPXV2202DP CASE 1351-01

MPXV2202GP CASE 1369-01

MPXV2202GC6T1 CASE 482A-01

MPXM2202A CASE 1320-02

MPXM2202GS/AS CASE 1320A-02

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Operating Characteristics
Table 1. Operating Characteristics (VS = 10 Vdc, TA = 25C unless otherwise noted, P1 > P2)
Characteristics Pressure Range(1) Absolute Pressure Range MPX2202A Differential Pressure Range MPX2202D Supply Voltage(2) Supply Current Full Scale Span(3) Offset(4) MPX2202D, MPXM2202D/G Series MPX2202A, MPXM2202A Series Sensitivity Linearity
(5)

Symbol POP POP VS Io VFSS

Min 20 0 38.5

Typ 10 6.0 40

Max 200 200 16 41.5

Unit kPa kPa Vdc mAdc mV

Voff V/P

-1.0 -2.0 -0.6 -1.0 -2.0 -1.0 1000 1400

0.2 0.1 0.5 1.0 20 0.5

1.0 2.0 0.4 1.0 2.0 1.0 2500 3000

mV

mV/kPa %VFSS

MPXM2202D/G, MPX2202D Series MPXM2202A, MPX2202A Series Pressure Hysteresis(5) (0 to 200 kPa) Temperature Hysteresis(5) (-40C to +125C) Temperature Effect on Full Scale Span(5) Temperature Effect on Offset(5) Input Impedance Output Impedance Response Time(6) (10% to 90%) Warm-Up Offset Stability(7) 1. 1.0 kPa (kiloPascal) equals 0.145 psi.

TCVFSS TCVoff Zin Zout tR

%VFSS %VFSS %VFSS mV ms ms %VFSS

2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self-heating. 3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 4. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 5. Accuracy (error budget) consists of the following: Linearity:Output deviation from a straight line relationship with pressure, using end point method, over the specified pressure range. Temperature Hysteresis:Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. Pressure Hysteresis:Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25C. TcSpan:Output deviation at full rated pressure over the temperature range of 0 to 85C, relative to 25C. TcOffset:Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85C, relative to 25C. 6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 7. Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.

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Maximum Ratings
Table 2. Maximum Ratings(1)
Rating Maximum Pressure (P1 > P2) Storage Temperature Operating Temperature Max Value 400 -40 to 125 -40 to 125 Unit kPa C C

1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.

Voltage Output versus Applied Differential

The differential voltage output of the sensor is directly proportional to the differential pressure applied. The absolute sensor has a built-in reference vacuum. The output voltage will decrease as vacuum, relative to ambient, is drawn on the pressure (P1) side. The output voltage of the differential or gauge sensor increases with increasing pressure applied to the pressure
VS 3 Thin Film Temperature Compensation and Calibration Circuitry 1 GND

(P1) side relative to the vacuum (P2) side. Similarly, output voltage increases as increasing vacuum is applied to the vacuum (P2) side relative to the pressure (P1) side. Figure 1 illustrates a block diagram of the internal circuitry on the stand-alone pressure sensor chip.

2 4

Sensing Element

+VOUT VOUT

Figure 1. Temperature Compensated and Calibrated Pressure Sensor Schematic

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On-Chip Temperature Compensation and Calibration

40 35 30 25 Output (mVDC) 20 15 10 5 0 kPa PSI -5 0

VS = 10 VDC TA = 25C P1 > P2 MAX

TYP Span Range (TYP) MIN

25

50 7.25

75

100 125 14.5 Pressure

150 21.75

175

200 29

Offset (TYP)

Figure 2. Output vs. Pressure Differential Figure 2 shows the output characteristics of the MPX2202 series at 25C. The output is directly proportional to the differential pressure and is essentially a straight line. The effects of temperature on full scale span and offset are very small and are shown under Operating Characteristics.

Silicone Gel Die Coat Wire Bond

Differential/Gauge Die P1

Stainless Steel Metal Cover Epoxy Case

Silicone Gel Die Coat Wire Bond

Absolute Die P1

Stainless Steel Metal Cover Epoxy Case

Lead Frame

Differential/Gauge Element P2

Bond Die

Lead Frame

Absolute Element P2

Die Bond

Figure 3. Cross Sectional Diagram (not to scale) Figure 3 illustrates the differential/gauge die in the basic chip carrier (Case 344). A silicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm. The MPX2202 series pressure sensor operating characteristics and internal reliability and qualification tests are based on use of dry air as the pressure media. Media other than dry air may have adverse effects on sensor performance and long term reliability. Contact the factory for information regarding media compatibility in your application. LINEARITY Linearity refers to how well a transducer's output follows the equation: Vout = Voff + sensitivity x P over the operating pressure range. There are two basic methods for calculating nonlinearity: (1) end point straight line fit (see Figure 4) or (2) a least squares best line fit. While a least squares fit gives the best case linearity error (lower numerical value), the calculations required are burdensome. Conversely, an end point fit will give the worst case error (often more desirable in error budget calculations) and the calculations are more straightforward for the user. Freescales specified pressure sensor linearities are based on the end point straight line method measured at the midrange pressure.

Least Squares Fit Exaggerated Performance Curve

Least Square Deviation Straight Line Deviation

Relative Voltage Output

End Point Straight Line Fit

Offset 0 50 Pressure (% Full Scale) 100

Figure 4. Linearity Specification Comparison

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PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Freescale designates the two sides of the pressure sensor as the Pressure (P1) side and the Vacuum (P2) side. The Pressure (P1) side is the side containing silicone gel which isolates the die from the environment. The Freescale MPX Table 3. Pressure (P1) Side Delineation
Part Number MPX2202A MPX2202DP MPX2202GP/AP MPX2202ASX MPX2202GP MPX2202DP MPXV2202GP MPXV2202DP MPXV2202GC6TI MPXM2202A/ATI/DT/DTI MPXM2202GS/GSTI/AS/ASTI Case Type 344 344C 344B 344F 1369 1351 1369 1351 482A 1320 1320A Stainless Steel Cap Side with Part Marking Side with Port Attached Side with Port Attached Side with Port Attached Side with Part Marking Side with Port Attached Side with Part Marking Side with Port Attached Side with Part Marking Side with Port Attached Pressure (P1) Side Identifier

pressure sensor is designed to operate with positive differential pressure applied, P1 > P2. The Pressure (P1) side may be identified by using the following table.

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PACKAGE DIMENSIONS

A
4 5

D 8 PL 0.25 (0.010)
M

T B

N B G
8 1

NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION A AND B DO NOT INCLUDE MOLD PROTRUSION. 4. MAXIMUM MOLD PROTRUSION 0.15 (0.006). 5. ALL VERTICAL SURFACES 5 TYPICAL DRAFT. DIM A B C D G H J K M N S V W INCHES MIN MAX 0.415 0.425 0.415 0.425 0.500 0.520 0.038 0.042 0.100 BSC 0.002 0.010 0.009 0.011 0.061 0.071 0 7 0.444 0.448 0.709 0.725 0.245 0.255 0.115 0.125 MILLIMETERS MIN MAX 10.54 10.79 10.54 10.79 12.70 13.21 0.96 1.07 2.54 BSC 0.05 0.25 0.23 0.28 1.55 1.80 0 7 11.28 11.38 18.01 18.41 6.22 6.48 2.92 3.17

V C H J K M
PIN 1 IDENTIFIER

T
SEATING PLANE

CASE 482A01 ISSUE A DATE 05/13/98

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PACKAGE DIMENSIONS
C R M
1

-AN
PIN 1
1 2 3 4

NOTES: 1. DIMENSIONING AND TOLERANCING PER ASME Y14.5M, 1994. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION -A- IS INCLUSIVE OF THE MOLD STOP RING. MOLD STOP RING NOT TO EXCEED 16.00 (0.630).
DIM A B C D F G J L M N R Y Z INCHES MILLIMETERS MIN MAX MIN MAX 0.595 0.630 15.11 16.00 0.514 0.534 13.06 13.56 0.200 0.220 5.08 5.59 0.016 0.020 0.41 0.51 0.048 0.064 1.22 1.63 0.100 BSC 2.54 BSC 0.014 0.016 0.36 0.40 0.695 0.725 17.65 18.42 30 NOM 30 NOM 0.475 0.495 12.07 12.57 0.430 0.450 10.92 11.43 0.048 0.052 1.22 1.32 0.106 0.118 2.68 3.00

-TJ
SEATING PLANE

G F
M

F Y

D 4 PL 0.136 (0.005)

T A

DAMBAR TRIM ZONE: THIS IS INCLUDED WITHIN DIM. "F" 8 PL

STYLE 1: PIN 1. 2. 3. 4.

GROUND + OUTPUT + SUPPLY - OUTPUT

STYLE 2: PIN 1. 2. 3. 4.

VCC - SUPPLY + SUPPLY GROUND

STYLE 3: PIN 1. 2. 3. 4.

GND -VOUT VS +VOUT

CASE 344-15 ISSUE AA UNIBODY PACKAGE

SEATING PLANE

-TR H N
PORT #1 POSITIVE PRESSURE (P1)

-AU L

NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH.
DIM A B C D F G H J K L N P Q R S U INCHES MILLIMETERS MIN MAX MIN MAX 1.145 1.175 29.08 29.85 0.685 0.715 17.40 18.16 0.305 0.325 7.75 8.26 0.016 0.020 0.41 0.51 0.048 0.064 1.22 1.63 0.100 BSC 2.54 BSC 0.182 0.194 4.62 4.93 0.014 0.016 0.36 0.41 0.695 0.725 17.65 18.42 0.290 0.300 7.37 7.62 0.420 0.440 10.67 11.18 0.153 0.159 3.89 4.04 0.153 0.159 3.89 4.04 0.230 0.250 5.84 6.35 0.220 0.240 5.59 6.10 0.910 BSC 23.11 BSC

-Q-

B
1 2 3 4

PIN 1

K
S

-P0.25 (0.010) J C
M

T Q

F G D 4 PL 0.13 (0.005)

T S

STYLE 1: PIN 1. GROUND 2. + OUTPUT 3. + SUPPLY 4. - OUTPUT

CASE 344B-01 ISSUE B UNIBODY PACKAGE

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PACKAGE DIMENSIONS
V R
PORT #2 PORT #1

-AU W H N
PORT #2 VACUUM (P2)

NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH.
DIM A B C D F G H J K L N P Q R S U V W INCHES MILLIMETERS MIN MAX MIN MAX 1.145 1.175 29.08 29.85 0.685 0.715 17.40 18.16 0.405 0.435 10.29 11.05 0.016 0.020 0.41 0.51 0.048 0.064 1.22 1.63 0.100 BSC 2.54 BSC 0.182 0.194 4.62 4.93 0.014 0.016 0.36 0.41 0.695 0.725 17.65 18.42 0.290 0.300 7.37 7.62 0.420 0.440 10.67 11.18 0.153 0.159 3.89 4.04 0.153 0.159 3.89 4.04 0.063 0.083 1.60 2.11 0.220 0.240 5.59 6.10 0.910 BSC 23.11 BSC 0.248 0.278 6.30 7.06 0.310 0.330 7.87 8.38

PORT #1 POSITIVE PRESSURE (P1)

-QSEATING PLANE

SEATING PLANE

PIN 1

1 2 3 4

-P-TJ C -T0.25 (0.010)

M

K S

T Q

F G D 4 PL

0.13 (0.005)

T S

STYLE 1: PIN 1. 2. 3. 4.

GROUND + OUTPUT + SUPPLY - OUTPUT

CASE 344C-01 ISSUE B UNIBODY PACKAGE

-AU -TR N -QSEATING PLANE PORT #2 VACUUM (P2)

NOTES: 1. DIMENSIONING AND TOLERANCING PER ASME Y14.5M, 1994. 2. CONTROLLING DIMENSION: INCH.
DIM A B C D F G H J K L N P Q R S U INCHES MILLIMETERS MIN MAX MIN MAX 1.145 1.175 29.08 29.85 0.685 0.715 17.40 18.16 0.305 0.325 7.75 8.26 0.016 0.020 0.41 0.51 0.048 0.064 1.22 1.63 0.100 BSC 2.54 BSC 0.182 0.194 4.62 4.93 0.014 0.016 0.36 0.41 0.695 0.725 17.65 18.42 0.290 0.300 7.37 7.62 0.420 0.440 10.67 11.18 0.153 0.159 3.89 4.04 0.153 0.158 3.89 4.04 0.230 0.250 5.84 6.35 0.220 0.240 5.59 6.10 0.910 BSC 23.11 BSC

L H
POSITIVE PRESSURE (P1)

B
1 2 3 4

K S

PIN 1

C J

-P0.25 (0.010)
M

F T Q
S

G D

4 PL

0.13 (0.005)

T S

STYLE 1: PIN 1. 2. 3. 4.

GROUND + OUTPUT + SUPPLY - OUTPUT

CASE 344D-01 ISSUE B UNIBODY PACKAGE

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PACKAGE DIMENSIONS

CASE 1351-01 ISSUE A SMALL OUTLINE PACKAGE

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CASE 1351-01 ISSUE A SMALL OUTLINE PACKAGE

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CASE 1369-01 ISSUE B SMALL OUTLINE PACKAGE

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PACKAGE DIMENSIONS

CASE 1369-01 ISSUE B SMALL OUTLINE PACKAGE

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PACKAGE DIMENSIONS

CASE 1320-02 ISSUE B MPAK

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PACKAGE DIMENSIONS

CASE 1320-02 ISSUE B MPAK

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PACKAGE DIMENSIONS

PIN 4

PIN 1

CASE 1320A-02 ISSUE A MPAK

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PACKAGE DIMENSIONS

CASE 1320A-02 ISSUE A MPAK

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REVISION HISTORY Revision number 7 Revision date 01/2012 Description of changes In Table 1. Operating Characteristics, in the Characteristic column under Pressure Range, added rows for Absolute Pressure Range MPX2202A and Differential Pressure Range MPX2202D devices Deleted references to device number MPXV2022GC6U throughout the document

10/2012

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MPX2202 Rev. 8 10/2012