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SEMICONDUCTOR TECHNICAL DATA

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Motorola Preferred Device

The MPX5050/MPXV5050G series piezoresistive transducer is a stateoftheart

monolithic silicon pressure sensor designed for a wide range of applications, but
particularly those employing a microcontroller or microprocessor with A/D inputs. This
patented, single element transducer combines advanced micromachining techniques,
thinfilm metallization, and bipolar processing to provide an accurate, high level analog
output signal that is proportional to the applied pressure.

INTEGRATED
PRESSURE SENSOR
0 to 50 kPa (0 to 7.25 psi)
0.2 to 4.7 Volts Output

Features

UNIBODY PACKAGE

2.5% Maximum Error over 0 to 85C

Ideally suited for Microprocessor or MicrocontrollerBased Systems
Temperature Compensated Over 40 to +125C
Patented Silicon Shear Stress Strain Gauge
Durable Epoxy Unibody Element
EasytoUse Chip Carrier Option

MPX5050D
CASE 867

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SMALL OUTLINE PACKAGE

SURFACE MOUNT
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MPX5050GP
CASE 867B

MPXV5050GP
CASE 1369

Figure 1. Fully Integrated Pressure Sensor

Schematic

MPXV5050DP
CASE 1351
MPX5050DP
CASE 867C

PIN NUMBER
1

N/C

N/C

VS

N/C

Gnd

N/C

Vout

N/C

NOTE: Pins 1, 5, 6, 7, and 8 are

internal device connections. Do not
connect to external circuitry or
ground. Pin 1 is noted by the notch
in the lead.

PIN NUMBER
1

Vout

N/C

Gnd

N/C

VS

N/C

NOTE: Pins 4, 5, and 6 are internal

device connections. Do not connect
to external circuitry or ground. Pin 1
is noted by the notch in the lead.

REV 6

Motorola Sensor Device Data

Motorola, Inc. 2002

  


MAXIMUM RATINGS(NOTE)
Parametrics

Symbol

Value

Unit

Pmax

200

kPa

Storage Temperature

Tstg

40 to +125

Operating Temperature

TA

40 to +125

Maximum Pressure (P1 > P2)

NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device.

OPERATING CHARACTERISTICS (VS = 5.0 Vdc, TA = 25C unless otherwise noted, P1 > P2. Decoupling circuit shown in Figure 4
required to meet electrical specifications.)
Characteristic
Pressure
Supply

Symbol

Min

Typ

Max

Unit

POP

50

kPa

VS

4.75

5.0

5.25

Vdc

Range(1)

Voltage(2)

Supply Current

Io

7.0

10.0

mAdc

Minimum Pressure Offset(3)

@ VS = 5.0 Volts

(0 to 85C)

Voff

0.088

0.20

0.313

Vdc

Full Scale Output(4)

@ VS = 5.0 Volts

(0 to 85C)

VFSO

4.587

4.70

4.813

Vdc

Full Scale Span(5)

@ VS = 5.0 Volts

(0 to 85C)

VFSS

4.50

Vdc

2.5

%VFSS

Accuracy(6)
Sensitivity

V/P

90

mV/kPa

Response Time(7)

tR

1.0

ms

Output Source Current at Full Scale Output

Io+

0.1

mAdc

20

ms

0.5

%VFSS

WarmUp
Offset

Time(8)

Stability(9)

NOTES:
1. 1.0kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range.
3. Offset (Voff) is defined as the output voltage at the minimum rated pressure.
4. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure.
5. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
6. Accuracy (error budget) consists of the following:
Linearity:
Output deviation from a straight line relationship with pressure over the specified pressure range.
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from
minimum or maximum rated pressure at 25C.
TcSpan:
Output deviation over the temperature range of 0 to 85C, relative to 25C.
TcOffset:
Output deviation with minimum pressure applied, over the temperature range of 0 to 85C, relative
to 25C.
Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS at 25C.
7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
8. Warmup Time is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized.
9. Offset Stability is the products output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.

MECHANICAL CHARACTERISTICS
Typ

Unit

Weight, Basic Element (Case 867)

Characteristics

4.0

grams

Weight, Basic Element (Case 1369)

1.5

grams

Motorola Sensor Device Data

  


Figure 3 illustrates the Differential/Gauge Sensing Chip in
the basic chip carrier (Case 867). A fluorosilicone gel isolates
the die surface and wire bonds from the environment, while
allowing the pressure signal to be transmitted to the sensor
diaphragm.
The MPX5050/MPXV5050G series pressure sensor operating characteristics, and internal reliability and qualification
tests are based on use of dry air as the pressure media. Media, other than dry air, may have adverse effects on sensor
performance and longterm reliability. Contact the factory for

information regarding media compatibility in your application.

Figure 2 shows the sensor output signal relative to pressure input. Typical, minimum, and maximum output curves
are shown for operation over a temperature range of 0 to
85C using the decoupling circuit shown in Figure 4. The
output will saturate outside of the specified pressure range.
Figure 4 shows the recommended decoupling circuit for
interfacing the output of the integrated sensor to the A/D input of a microprocessor or microcontroller. Proper decoupling of the power supply is recommended.

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Motorola Sensor Device Data

Figure 4. Recommended power supply decoupling

and output filtering.
For additional output filtering, please refer to
Application Note AN1646.

  


Transfer Function
Nominal Transfer Value: Vout = VS (P x 0.018 + 0.04)
+/ (Pressure Error x Temp. Factor x 0.018 x VS)
VS = 5.0 V 0.25 Vdc

Temperature Error Band

MPX5050/MPXV5050G Series


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PRESSURE (P1) / VACUUM (P2) SIDE IDENTIFICATION TABLE
Motorola designates the two sides of the pressure sensor
as the Pressure (P1) side and the Vacuum (P2) side. The
Pressure (P1) side is the side containing fluorosilicone gel
which protects the die from harsh media. The Motorola MPX
Part Number

pressure sensor is designed to operate with positive differential pressure applied, P1 > P2.
The Pressure (P1) side may be identified by using the
table below:
Pressure (P1)
Side Identifier

Case Type

MPX5050D

867

Stainless Steel Cap

MPX5050DP

867C

Side with Part Marking

MPX5050GP

867B

Side with Port Attached

MPXV5050GP

1369

Side with Port Attached

MPXV5050DP

1351

Side with Part Marking

ORDERING INFORMATION UNIBODY PACKAGE (MPX5050 SERIES)

MPX Series
Device Type

Options

Order Number

Case Type

Device Marking

Basic Element

Differential

867

MPX5050D

MPX5050D

Ported Elements

Differential Dual Ports

867C

MPX5050DP

MPX5050DP

Gauge

867B

MPX5050GP

MPX5050GP

ORDERING INFORMATION SMALL OUTLINE PACKAGE (MPXV5050G SERIES)

Device Type
Ported Elements

Options

Case No.

MPX Series Order No.

Packing Options

Marking

Side Port

1369

MPXV5050GP

Trays

MPXV5050G

Dual Port

1351

MPXV5050DP

Trays

MPXV5050G

Motorola Sensor Device Data

  


PACKAGE DIMENSIONS
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Motorola Sensor Device Data

  


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Motorola Sensor Device Data

  


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Motorola Sensor Device Data

  


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CASE 135101
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Motorola Sensor Device Data

  



NOTES

10

Motorola Sensor Device Data

  



NOTES

Motorola Sensor Device Data

11

  



Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding
the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit,
and specifically disclaims any and all liability, including without limitation consequential or incidental damages. Typical parameters can and do vary in different
applications and actual performance may vary over time. All operating parameters, including Typicals must be validated for each customer application by
customers technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are not designed,
intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life,
or for any other application in which the failure of the Motorola product could create a situation where personal injury or death may occur. Should Buyer purchase
or use Motorola products for any such unintended or unauthorized application, Buyer shall indemnify and hold Motorola and its officers, employees,
subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or
indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Motorola was negligent
regarding the design or manufacture of the part. Motorola and the Stylized M Logo are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal
Opportunity/Affirmative Action Employer.
MOTOROLA and the Stylized M Logo are registered in the US Patent & Trademark Office. All other product or service names are the property of their respective
owners.

Motorola, Inc. 2002.
How to reach us:
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ASIA/PACIFIC: Motorola Semiconductors H.K. Ltd.; Silicon Harbour Centre, 2 Dai King Street, Tai Po Industrial Estate, Tai Po, N.T., Hong Kong. 85226668334
Technical Information Center: 18005216274
HOME PAGE: http://www.motorola.com/semiconductors/

12

Motorola Sensor Device Data

MPX5050/D