Oerlikon Leybold Roots Blower Vacuum Pump Catalog

173.01.
02 Excerpt from the Leybold Vacuum Full Line Catalog Product Section C07 Edition 2006
C07
RUVAC
Roots Vacuum Pumps Single-Stage 250 - 13000 m3 x h-1 (147.3 - 7657 cfm)
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Roots Vacuum Pumps
Contents
General
Applications and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C07.03 General Information on Roots Vacuum Pumps . . . . . . . . . . . . . . . . . C07.04
Products
RUVAC WA/WAU Roots Vacuum Pumps with Air-Cooled Flange-Mounted Motors . . . . . . . . . . . . . . . . . . . . . . . . . C07.10 RUVAC WS/WSU Roots Vacuum Pumps with Air-Cooled Canned Motors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C07.16 RUVAC WS/WSU(W) PFPE Roots Vacuum Pumps with Water-Cooled Canned Motors . . . . . . . . . . . . . . . . . . . . . . . . . . . . C07.22 RUVAC WSLF Roots Vacuum Pumps for Laser Gas Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C07.28 RUVAC RA Roots Vacuum Pumps with Flange-Mounted Motors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C07.30
Accessories
Pressure Switches . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C07.34 Vacuum Pump Oils . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C07.35
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Leybold Vacuum Full Line Catalog 2006
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Contents
Roots Vacuum Pumps
Applications and Accessories

W S/ W SU (W )P FP E W SL F
R oo t Pu s V m acu ps um
W A/ W AU
W S/ W SU
Applications
Semiconductor production Vacuum coating Large scale research Chemistry/Pharmaceutical Metallurgy/Furnacesu Lamps and tubes manufacture Laser engineering Packaging Central vacuum supplies Freeze drying Leak testing systems Electrical engineering High purity gases/closed refrigerant cycles Mechanical engineering Automotive industry
I I I I I I I I I I I I I I
Page C07.09 C07.34
I I I I
I I I I I I I I I I I I I I I I I I I I I I I
Accessories
Frequency inverter RUVATRONIC RT Pressure switches
I I
R A
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Roots Vacuum Pumps
General
General Information on Roots Vacuum Pumps

Applications
For many years now Roots vacuum pumps have been well established in the area of vacuum technology. In combination with backing pumps, which compress against the atmosphere, these pumps offer the following advantages:
10 1000 m 3 x h-1 600 Pumping speed 400 200
-3
10
-2
10
-1
10
10
Torr 750 10
2
500
2,3
cfm
3 2 4 1
100
Shifting the Operating Pressure into the High Vacuum Range

As a rule of the thumb one may say that Roots vacuum pumps are capable of improving the attainable ultimate pressure of a pump system by a factor of 10. With two Roots vacuum pump stages and a corresponding backing pump it is possible to attain pressures in the range down to 10-5 mbar (0.75 x 10-5 Torr). Under certain circumstances this will make the use of additional high vacuum pumps (turbomolecular pumps or diffusion pumps) unnecessary.
100 2 10 -3
4 68
10 -2
10 -1
10 0 10 1 Pressure
10 2 mbar 10 3
1 Pumping speed of the backing pump 2 Pumping speed of the Roots pump system without pressure equalization line 3 Pumping speed of the Roots pumpsystem with pressure equalization line 4 Pumping speed gained by the pressure equalization line
Comparison of pumping speed characteristics with and without pressure equalization line
Multiplied Pumping Speed

Due to the non-contact rotation of the impellers, Roots vacuum pumps are able to run at higher speeds. Thus a high pumping speed is obtained with a relatively small size pump. Pumping speeds in excess of 1000 m3/h (589 cfm) can only be attained with Roots vacuum pumps. When selecting the right kind of backing pump (sizing) it will be possible to pump large quantities of gas in connection with smaller backing pumps. Energy consumption of such a pump system is much less compared to a single backing pump offering the same pumping speed.
Pump system with RA Roots vacuum pumps
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General
Roots Vacuum Pumps
The use of Roots vacuum pumps in the area of vacuum technology has resulted in further specializations and improvements: I Through an integrated bypass (pressure equalization line) it is also possible to utilize the pumping speed of the Roots vacuum pump at high pressures and large quantities of gas at an early stage. This reduces the pumpdown time especially for cyclic operation (see figure Comparison of pumping speed characteristics with and without pressure equalization line). I High-purity gases or hazardous gases impose strict requirements on the leak-tightness of the system. Canned motors are hermetically sealed. There are no
seals in contact with the atmosphere which might be subject to wear. This prevents leaks and failures due to oil leaks. A service life of over 20 000 hours without maintenance is quite common. I Tolerances and the quality of the balancing combined with forcefed lubricated bearings and toothed gears permit high speeds and the use of frequency converters. Thus it is possible to attain a high pumping speed while the process is in progress and to reduce the speed when the process has been stopped or while changing the batch. This results in a lower consumption of energy and a longer service life with uncompromised reliability.
I Conversion from vertical to horizontal flow is easily implemented and can be performed at the place where the pump has been installed. Thus the pump can be adapted more closely to the operating conditions of your system. Lately, a further characteristic is gaining prominence: Roots vacuum pumps are capable of compressing the media in the pump chamber without the presence of any further media. This mostly avoids interaction between different media in the pump itself and also in the connected vacuum chamber. Therefore I the medium which is pumped is not contaminated with lubricants or sealants; complex accessories (exhaust filters, separators, etc.) are not needed; I the lubricant in the side chambers is hardly affected, so that service life is not reduced; I backstreaming of oil from the backing pump into the connected vacuum chamber is prevented. The effective air cooling arrangement reduces operating costs to a minimum. Cooling water is not required. These characteristics make the Roots vacuum pump attractive for almost all rough and medium vacuum applications.
Pump system with RA Roots vacuum pump and SOGEVAC rotary vane vacuum pump
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Roots Vacuum Pumps
General
Semiconductor Technology
In the area of semiconductor technology, Roots vacuum pumps are found in etching processes among others, and in use with dry compressing vacuum pumps. The pumping speed of the combination of backing pumps amounts to 200 to 500 m3/h (118 to 295 cfm) and it ensures a cut-in pressure of 10-1 mbar (0.75 x 10-1 Torr) for the turbomolecular pump. In the case of dry compression, corrosive gases which also have a high particulate content must be pumped. Canned motors and PFPE fluids provide a good seal against the outside and allow long periods between servicing, high reliability and thus very low operating costs (WS PFPE types). Specific suitable for this processes and use in clean rooms are Roots vacuum pumps filled with PFPE and water-cooled motors. These kind of motor has only a little heat dissipatoion.
Operational diagram of a single-stage Roots vacuum pump (with vertical pumping action)
Due to the uncontrolled influx of gas, a high of pumping speed must be attained quickly, in order to keep the vacuum (1 to 30 mbar (0.75 to 22.5 Torr)) permanently available to all consumers. This in particular, is implemented by Roots vacuum pumps having a pressure equalization line (WAU types).
Laser Systems
Continuous circulation of the gas in order to remove heat from a closed cycle in which pressure differentials of up to 100 mbar (75 Torr) must be maintained. The tough requirements regarding purity necessitate a total absence of contamination by oil and dust. This is ensured by reducing the pressure level in the oil chambers as well as by coating the pump chamber. The pumps are assembled and tested under clean room conditions. The canned motor ensures a high degree of leak-tightness to the outside and permits operation in connection with a frequency converter (WSLF types).
Chemistry Central Vacuum Supply Systems

Large Roots vacuum pumps, usually in connection with single-stage rotary vane vacuum pumps serve several consumers of vacuum (packaging machines, for example) at the same time. Replacement of vapor jet or gas jet pumps on liquid ring pumps in drying and distillation plants is necessary for attaining the required operating pressure of about 1 mbar (0.75 Torr). Reduction of operating costs by entirely eliminating vapor or gas quantities includes separation of these on the pressure side (WA and RA types).
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General
Roots Vacuum Pumps
Operating Principle
Roots vacuum pumps, which are also called Roots blowers, are rotary plunger type pumps where two symmetrically shaped impellors rotate in opposite directions inside the pump housing. The figure-of-eight rotors are synchronized by a gear which ensures that the impellors are counter-rotating in such a way, that they are near to one another and to the housing without actual contacting. In rotor positions I and II (see figure Operational diagram of a singlestage Roots vacuum pump (with vertical pumping action)) the volume of the intake is increased. As the rotors turn further to position III a part of the volume is cut off from the intake side. In position IV this volume is opened to the exhaust side and gas under fore-vacuum pressure (higher than the intake pressure) flows in. This gas compresses the gas coming from the intake. As the rotors turn further the compressed gas is ejected through the exhaust flange. This process repeats itself twice for each rotor per full turn. As the rotors do not come into contact with the pumps housing Roots vacuum pumps may be operated at high speeds. Thus a high pumping speed is obtained from comparably small pumps. The pressure difference and the compression ratio between intake and exhaust is limited in Roots vacuum pumps. In practice the maximum attainable pressure difference is of significance only in the rough vacuum range (p > 10 mbar (p > 7.5 Torr)) where-as in the medium vacuum range (p < 1 mbar (p < 0.75 Torr)) the attainable compression ratio is of importance. Roots vacuum pumps from Leybold have been designed to specially meet the requirements of the fine vacuum range. They are normally used in connection with backing pumps (exception RAV) or in closed gas cycles (WSLF series).
Design
The pump chamber of Roots vacuum pumps is free of any sealing agents or lubricants. Only the toothed wheels of the synchronous gear are lubricated with oil. Toothed gear wheels and bearings of the RUVAC are placed in two side chambers which also contain the oil reservoir. These two side chambers are separated from the pump chamber by piston ring seals. Suitably designed oil supply systems in both chambers ensure that a sufficient quantity of oil is supplied to the gear wheels and bearings at all permissible speeds. Almost all RUVAC Roots vacuum pumps are designed for a horizontal and vertical pumping action.
Pump system consisting of RUVAC WAU 1001 and SOGEVAC SV 200
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Roots Vacuum Pumps
General
Types
Various types of Roots vacuum pumps have been developed to ensure optimum adaptation to the widely varying applications for this type of pump. I Flange mounted motor The drive shaft of the pump is directly connected to an electric motor via a flexible coupling. The required seal of the drive shaft against atmospheric pressure is obtained by oiled shaft seals. I Canned motor In the canned motor, rotor and stator pack are separated by a vacuum-tight can made of a nonmagnetic material. The rotor operates on the drive shaft of the pump in the vacuum, so that a shaft seal which would be subject to wear is not required. I Pressure equalization line The integrated pressure equalization line connects the exhaust flange to the intake flange through a differential pressure valve. This valve opens at a high pressure differential between the flanges. Part of the gas then flows through this line back to the intake flange. This is why the Roots vacuum pump may be switched on at atmospheric pressure together with the backing pump. This also increases the pumping speed of the pump combination at high intake pressures. I Special ACE vibration absorber These pumps are best used in applications involving frequent pumpdown cycles. The vibration absorber is of an oil sealed or filled design where minute amounts of oil may enter the vacuum system via the piston of the vibration attenuator.
RUVAC WA/WAU, WS/WSU

The series WA/WAU Roots vacuum pumps are provided with directly flange-mounted air-cooled standard three-phase motors. The oiled radial sealing rings of the RUVAC WA/WAU for sealing the shaft against the atmosphere are made of FPM (fluor caoutchouc). The WS/WSU series pumps are driven by air or water-cooled canned motors. Roots vacuum pumps of the series WAU/WSU are provided with an additional integrated pressure equalization line and a differential pressure valve. Pumps from these series are supplied with a vertical pumping action as standard.
Operation at any rotational speeds The frequency converter is equipped with a 0 to 10 V signal input and is thus in a position to control the rotational speed of the pump. Increasing the pumping speed The pump is prepared to handle a maximum rotational speed of 6000 rpm so that the frequency converter permits an increase in the nominal pumping speed of up to 100 %. Note Please enquire about possibly existing usage limits (process dependent).
RUVAC WSLF
The pumps of these series are especially adapted Roots vacuum pumps from the RUVAC WS series which are intended for operation with gas lasers. They are driven by a canned motor so that a shaft seal for sealing against atmospheric pressure is not required. Air-cooled series with nominal pumping speeds of 1000 m3 x h-1 (589 cfm) are available. The RUVAC WSLF series with increased motor ratings is intended for operation in connection with frequency converters. These pumps are available with nickel-plated or plasma-nitrated surface as standard. All pumps of these series are supplied with a horizontal pumping action. Vertical pumping action is available upon request.
RUVAC WS with FC
This type of pump is equipped with an integrated frequency converter fitted directly to the canned motor. The frequency converter has been specially matched to the pump. The main characteristics of the RUVAC WS are: Simulation of a pressure equalisation line The frequency converter has been matched to the pump so that the possibility of mechanically overloading it is excluded. In the case of a pressure difference which is too high, the rotational speed of the pump is automatically reduced until its load drops in to the permissible range. This WS type with integrated frequency converter can be switched on together with the backing pump at atmospheric pressure. In this way significantly shorter pumpdown times are attained. When using this mode of operation, the minimum pumping speed rating of the backing pump needs to be observed.
RUVAC RA
RA series Roots vacuum pumps are equipped with a directly flangemounted three-phase motor (RA 13000 via V-belt drive).
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General
Roots Vacuum Pumps
Backing Pumps
The backing pumps from Leybold listed in the following are recommended for connection to the RUVAC Roots vacuum pumps: I Rotary vane vacuum pumps - TRIVAC B with pumping speeds between 16 and 65 m3 x h-1 (9.4 and 38.3 cfm) - SOGEVAC with pumping speeds between 16 and 1200 m3 x h-1 (9.4 and 707 cfm) I Dry compressing piston vacuum pumps - EcoDry M with pumping speeds between 38 and 48 m3 x h-1 (22 and 28 cfm) I Dry compressing screw vacuum pumps - ScrewLine SP250 and SP630 with pumping speed of 250 and 630 m3 x h-1 (147 and 371 cfm) I Rotary piston vacuum pumps - E and DK with pumping speeds between 200 and 250 m3 x h-1 (117.8 and 147.3 cfm) I Roots vacuum pumps with pre-inlet cooling - RUVAC RAV G with pumping speeds between 250 and 8100 m3 x h-1 (147.3 and 4770.9 cfm) I Liquid ring vacuum pumps upon request
Accessories Frequency Inverter RUVATRONIC RT 5

The electronic frequency inverters RUVATRONIC RT 5/251 to 5/16000 have been designed specially for use in connection with Leybold Roots pumps of the RUVAC type. For each Roots vacuum pump size, a matching frequency inverter is available. The main characteristics of the RUVATRONIC RT 5 are: Simulation of a pressure equalisation line The software of the frequency inverters is adapted to each pump and ensures that the risk of mechanically overloading the pump can be excluded. In the case of too high pressure differences, the rotational speed will be decreased automatically until the load is reduced to within the pumps limits.RUVAC Roots vacuum pumps of the types WA, WS and RA (without pressure equalisation line) can be switched on together with the forepump at atmospheric pressure. Through this, the pumpdown time can be reduced drastically. The minimum pumping speed of the backing pump needs to be considered in this case. Operation at up to 3 predefined speeds Via floating contacts, the pump can be operated at one of the 3 predefined speeds. Switching over to another predefined speed is possible during operation. Operation at any rotational speed With a 0 to 10 V signal, any speed can be predefined to operate the pump between the minimum and maximum rotational speed. The software reliably ensures that the rotational speed cannot drop below the minimum speed or exceed the maximum speed. Increase in the pumping speed By operating the Roots vacuum pumps at frequencies over 50 Hz, the nominal pumping speed of the pumps can be increased. Depending on the type of pump, an increase between 20 and 100 % is possible. Note Please enquire about possible application limitations (process dependent).
Schematic section through a RUVAC WA/WS (left) and a RUVAC WAU/WSU (rights)
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Roots Vacuum Pumps
RUVAC WA/WAU
RUVAC WA/WAU Roots Vacuum Pumps with Air-Cooled Flange-Mounted Motors
RUVAC WAU 2001 single-stage Roots vacuum pump shown with ISO-K 160 collar flanges
Advantages to the User

I Two air-cooled series, each with four models I Reliable and trouble-free I Sealing rings with their housing can be readily replaced I Shaft seals and elastomer seals made of FPM/Viton I Air-cooled standard motors in accordance with IEC dimensions eg. NEMA dimensions I Easy to exchange with custom motors I Integrated pressure equalization line for protection against overloading at high pressures on WAU models I Pumping direction may be changed as required I ATEX versions compliant to 94/9/EC possible
Typical Applications
I For oil-free compression of gases and vapors in combination with a backing pump I Short cycle pumping processes also in the presence of large quantities of gas and vapor
Supplied Equipment
I RUVAC WA/WAU are supplied as standard for a vertical pumping action, horizontal pumping action upon request I Mineral oil N 62 is used as standard I Gasket in the intake flange with dirt sieve I The required oil filling is included in separate bottles
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RUVAC WA/WAU
Roots Vacuum Pumps
b8 a4 DN DN
DN h7 h1 d a5 a1
Type WA/WAU 251 WA/WAU 501 WA/WAU 501H WA/WAU 1001 WA/WAU 1001H WA/WAU 2001 WA/WAU 2001H mm in. mm in. mm in. mm in. mm in. mm in. mm in.
h2 h h3 b9 b6 DN b2 b b 1
a2 365 14.37 450 17.72 450 17.72 520 20.47 520 20.47 740 29.13 740 29.13 b4 230 9.06 271 10.67 271 10.67 320 12.60 320 12.60 422 16.61 422 16.61 h3 180 7.09 194 7.48 194 7.48 227 8.94 227 8.94 351 13.82 351 13.82 b5 170 6.69 201 7.91 201 7.91 246 7.91 246 7.91 292 11.50 292 11.50 h4 306 12.05 348 13.70 348 13.70 414 16.30 414 16.30 578 22.76 578 22.76 a3 14 0.55 14 0.55 14 0.55 16.5 0.65 16,5 0.65 18 0.71 18 0.71 b6 24 0.94 24 0.94 24 0.94 24 0.94 24 0.94 24 0.94 24 0.94 h52) 360 14.17 430 16.93 450 17.72 532 20.94 564 22.20 753 29.65 760 29.92 a4 209 8.23 237 9.33 237 9.33 298 11.73 298 11.73 367 14.45 367 14.45 b7 3) 305 12.01 390 15.35 414 16.30 494 19.45 524 20.63 638 25.12 642 25.28 h6 330 12.99 370 14.57 370 14.57 425 425 425 425 541 21.3 541 21.3
h5 h4
a2 a
DN/DN1 63 ISO-K 63 ISO-K 63 ISO-K 100 ISO-K 100 ISO-K 160 ISO-K 160 ISO-K
a3 b7
a
1)
b6 b9 b5 b4 b3
a5 120 4.72 155 6.10 155 6.10 180 6.10 180 6.10 220 8.66 220 8.66 b8 285 11.22 313 12 32 330 12 99 366 14.41 398 15.67 456 17.95 460 18.11 h7 307 12.09 332 13.07 350 13.78 392 15.43 424 16.69 523 20.59 530 20.87 a6 194 7.64 218 8.58 218 8.58 262 10.31 262 10.31 310 12.20 310 12.20 b9 7.5 0.30 7.5 0.30 7.5 0.30 7.5 0.30 7.5 0.30 7.5 0.30 7.5 0.30
2)
a1 405 15.94 486 19.13 486 19.13 560 22.05 560 22.05 800 31.50 800 31.50 b3 280 11.02 320 12.60 320 12.60 370 14.57 370 14.57 460 18.11 460 18.11 h2 280 11.02 320 12.60 320 12.60 370 14.57 370 14.57 460 18.11 460 18.11
729 28.70 825 32.48 825 32.48 1054 41.50 1054 41.50 1237 48.70 1237 48.70 b1 270 10.63 299 11 77 299 11 77 352 13 86 352 13.86 518 20.39 518 20.39 h 300 11.81 340 13.39 340 13.39 396 15.59 396 15.59 530 20.87 530 20.87 b2
790 31.10 918 36.14 918 36.14 1085 42.72 1085 42.72 1283 50.51 1283 50.51
b WA/WAU 251 WA/WAU 501 WA/WAU 501H WA/WAU 1001 WA/WAU 1001H WA/WAU 2001 WA/WAU 2001H mm in. mm in. mm in. mm in. mm in. mm in. mm in. 250 9.84 310 12.20 310 12.20 376 14.80 376 14.80 463 18.23 463 18.23 d WA/WAU 251 WA/WAU 501 WA/WAU 501H WA/WAU 1001 WA/WAU 1001H WA/WAU 2001 WA/WAU 2001H mm in. mm in. mm in. mm in. mm in. mm in. mm in. 50 2.00 50 2.00 50 2.00 50 2.00 50 2.00 50 2.00 50 2.00
210 8.27 229 9.02 229 9.02 278 10.94 278 10.94 388 15.28 388 15.28 h1 160 6.30 180 7.09 180 7.09 211 8.31 211 8.31 300 11.81 300 11.81
1) 2) 3)
This dimension a relates to pumps with the IEC motor used as standard by Leybold This dimension a relates to pumps with the NEMA motor used as standard by Leybold For RUVAC WAU only
DN1 = ND 6 pump flange in accordance with DIN 2501 DN1 = Collar flange with gasket for connecting ISO-K standard components Outside dimensions +/- 3mm
Dimensional drawing for the RUVAC WA/WAU pumps
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Roots Vacuum Pumps
RUVAC WA/WAU
Technical Data
Nominal pumping speed 1) Max. pumping speed with backing pump m3 x h-1 (cfm) m3 x h-1 (cfm) TRIVAC SOGEVAC
WA/WAU 251 50 Hz 60 Hz
253 (149) 210 (123.7) D 65 B 304 (179) 251 (148) D 65 B
WA/WAU(H) 501 50 Hz 60 Hz
505 (297.4) 410 (241) SV 200 606 (357) 530 (312) SV 200
Ultimate partial pressure 2) Ultimate total pressure 2) Permissible cut-in pressure 2) RUVAC WA
mbar (Torr) < 2 x 10-5 (< 1.5 x 10-5) < 2 x 10-5 (< 1.5 x 10-5) < 8 x 10-3 (< 6 x 10-3) < 8 x 10-3 (< 6 x 10-3) mbar (Torr) < 8 x 10-4 (< 6 x 10-4) < 8 x 10-4 (< 6 x 10-4) < 4 x 10-2 (< 3 x 10-2) < 4 x 10-2 (< 3 x 10-2)
mbar (Torr)
90 (67.5)
60 (45.0)
100 (75.0)
80 (60.0)
Max. permissible pressure difference during continuous operation 3) mbar (Torr) Main supply IEC motor NEMA motor (US version) Thermal class Motor power Nominal speed, approx. (50/60 Hz) Max. permissible speed Type of protection Oil filling for the bearing chamber 4) vertical pumping action, approx. horizontal pumping action, approx. kW (hp) rpm rpm IP
80 (60.0)
80 (60.0)
80 (60.0)
80 (60.0)
/Y /Y
V V
220-240 / 380-420 230 / 400 F 1.1 (1.5) 3000/3600 3600 55 1. Filling 5) / 2. Filling
220-277 / 380-480 200-230 / 460 F 1.1 (1.5) 3000/3600 3600 55 1. Filling 5) / 2. Filling
220-240 / 380-420 230 / 400 F 2.2 (3.0) 3000/3600 3600 55 1. Filling 5) / 2. Filling 0.9 (0.95) / 0.8 (0.85)
220-277 / 380-480 200-230 / 460 F 2.2 (3.0) 3000/3600 3600 55 1. Filling 5) / 2. Filling 0.9 (0.95) / 0.8 (0.85)
l (qt) 0.65 (0.69) / 0.6 (0.63) 0.65 (0.69) / 0.6 (0.63)
l (qt) 0.5 (0.53) / 0.45 (0.48) 0.5 (0.53) / 0.45 (0.48) 0.75 (0.79) / 0.7 (0.74) 0.75 (0.79) / 0.7 (0.74) Oil filling of the shaft sealing ring housing Connection flanges
6)
l (qt) DN DN
0.6 (0.63) 63 ISO-K 3" ANSI
0.6 (0.63) 63 ISO-K 3" ANSI 85/89 (187.4/196.2) < 64
1.0 (1.06) 63 ISO-K 3" ANSI
1.0 (1.06) 63 ISO-K 3" ANSI
Weight WA/WAU Noise level 7)

1) 2)
kg (lbs) 85/89 (187.4/196.2) dB(A) < 64
128/133 (282.2/293.3) 128/133 (282.2/293.3) < 67 < 67
3) 4) 5) 6) 7)
To DIN 28 400 and subsequent numbers With double-stage rotary vane vacuum pump TRIVAC, resp. single-stage rotary vane vacuum pump SOGEVAC (Type of backing pump look at max. pumping speed). When using 2-stage backing pumps the ultimate pressures will be correspondingly lower Applicable for ratio up to 1 : 10 between backing pump and Roots vacuum pump at 3000 rpm Authoriative, however, is the oil level at the oil-level glass After a complete disassembly US models ANSI flanges At an operating pressure below < 10-1 mbar (< 0.75 x 10-1 Torr)
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RUVAC WA/WAU
Roots Vacuum Pumps
Technical Data
Nominal pumping speed 1) Max. pumping speed with backing pump Ultimate partial pressure 2) Ultimate total pressure 2) Permissible cut-in pressure 2) RUVAC WA m3 x h-1 (cfm) m3 x h-1 (cfm) SOGEVAC
WA/WAU (H) 1001 50 Hz 60 Hz

1000 (589) 800 (470) SV 300 1200 (707) 1000 (588) SV 300
WA/WAU(H) 2001 50 Hz 60 Hz
2050 (1207.5) 1850 (1089) SV 630 F 2460 (1449) 2100 (1236) SV 630 F
mbar (Torr) < 8 x 10-3 (< 6 x 10-3) < 8 x 10-3 (< 6 x 10-3) < 8 x 10-3 (< 6 x 10-3) < 8 x 10-3 (< 6 x 10-3) mbar (Torr) < 4 x 10-2 (< 3 x 10-2) < 4 x 10-2 (< 3 x 10-2) < 4 x 10-2 (< 3 x 10-2) < 4 x 10-2 (< 3 x 10-2)
mbar (Torr)
60 (45.0)
45 (33.5)
30 (22.5)
25 (18.5)
Max. permissible pressure difference during continuous operation 3) mbar (Torr) Main supply IEC motor NEMA motor (US version) Thermal class Motor power Nominal speed, approx. (50/60 Hz) Max. permissible speed Type of protection Oil filling for the bearing chamber 4) vertical pumping action, approx. horizontal pumping action, approx. kW (hp) rpm rpm IP
80 (60.0)
80 (60.0)
50 (37.5)
50 (37.5)
/Y /Y
V V
220-240 / 380-420 230 / 400 F 4.0 (5.4) 3000/3600 3600 55 1. Filling 5) / 2. Filling
220-277 / 380-480 200-230 / 460 F 4.0 (5.4) 3000/3600 3600 55 1. Filling 5) / 2. Filling 2.0 (2.11) / 1.8 (1.90) 1.2 (1.27) / 1.1 (1.16)
380-420 / 655-725 400 / F 7.5 (10.0) 3000/3600 3600 55 1. Filling 5) / 2. Filling
440-480 / / 460 F 7.5 (10.0) 3000/3600 3600 55 1. Filling 5) / 2. Filling
l (qt) 2.0 (2.11) / 1.8 (1.90) l (qt) 1.2 (1.27) / 1.1 (1.16) Oil filling of the shaft sealing ring housing Connection flanges
6)
3.85 (4.07) / 3.6 (3.81) 3.85 (4.07) / 3.6 (3.81) 2.65 (2.75) / 2.4 (2.54) 2.65 (2.75) / 2.4 (2.54)
l (qt) DN DN
1.3 (1.37) 100 ISO-K 4" ANSI
1.3 (1.37) 100 ISO-K 4" ANSI
1.6 (1.69) 160 ISO-K 6" ANSI 400/406 (882/895.2) < 80
1.6 (1.69) 160 ISO-K 6" ANSI 400/406 (882/895.2) < 80
Weight WA/WAU Noise level 7)

1) 2)
kg (lbs) 220/225 (485.1/496.1) 220/225 (485.1/496.1) dB(A) < 75 < 75
3) 4) 5) 6) 7)
To DIN 28 400 and subsequent numbers With single-stage rotary vane vacuum pump SOGEVAC (Type of backing pump look at max. pumping speed). When using 2-stage backing pumps the ultimate pressures will be correspondingly lower Applicable for ratio up to 1 : 10 between backing pump and Roots vacuum pump at 3000 rpm Authoriative, however, is the oil level at the oil-level glass After a complete disassembly US models ANSI flanges At an operating pressure below < 10-1 mbar (< 0.75 x 10-1 Torr)
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Roots Vacuum Pumps
RUVAC WA/WAU
Ordering Information
Roots vacuum pump RUVAC WA (IEC motor) RUVAC WA (NEMA motor, US version) RUVAC WAU (IEC motor) RUVAC WAU (NEMA motor, US version) RUVAC WA, without motor RUVAC WAU, without motor RUVAC WAU(H) (IEC motor), with special ACE vibration absorber RUVAC WA/WAU, ATEX version RUVAC WS/WSU(H) seal kit Flange adapter set, consisting of Flange adapter with screws, bolts, washers and nuts for ANSI flange WA/WS pump WAU/WSU pump Frequency inverter RUVATRONIC (see description in Section General, paragraph Accessories)
WA/WAU 251
Part Part Part Part Part No. No. No. No. No. 117 917 117 917 117 20 20 21 21 24
WA/WAU(H) WA/WAU(H) WA/WAU(H) 501 1001 2001

Part No. 117 30 Part No. 917 30 Part No. 117 31 Part No. 917 31 Part No. 117 34 Part No. 155 008 Part Part Part Part Part Part No. No. No. No. No. No. 117 917 117 917 117 112 40 40 41 41 44 17 Part Part Part Part Part Part No. No. No. No. No. No. 117 917 117 917 112 113 50 50 51 51 54 22
upon request
Part No. 194 60
Part No. 118 31 Part No. 118 41 Part No. 118 51 upon request upon request upon request
Part No. 194 64 Part No. 194 68 Part No. 194 72
(3" ANSI) (3" ANSI) (4" ANSI) (6" ANSI) Part No. 200 03 179 Part No. 200 03 179 Part No. 200 03 180 Part No. 200 03 181 Part No. 200 03 179 Part No. 200 03 179 Part No. 200 03 180 Part No. 200 03 182 RT 5/251 Part No. 500 001 381 RT 5/501 Part No. 500 001 382 RT 5/1001 Part No. 500 001 383 RT 5/2001 Part No. 500 001 384
10 -5 10
3 m x h -1 4
10 -4
10 -3
10 -2
10 -1
10 0
10 1
Torr
750
5000 cfm 1000 500
Pumping speed
10 3
100
10 2
8 6 4 2
50
WAU 2001+SV 630F WAU 1001+SV 300 WAU 501 +SV 200 WAU 251 +D 65 B
10
10 1 2 4 68 10 -5 10 -4
10 -3
10 -2
10 -1
10 0
10 1
10 2 10 3 mbar
Total pressure Partial pressure
Pressure
Pumping speed of the RUVAC WA/WAU, 50 Hz
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RUVAC WA/WAU
Roots Vacuum Pumps
Notes
15 C07
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Roots Vacuum Pumps
RUVAC WS/WSU
RUVAC WS/WSU Roots Vacuum Pumps with Air-Cooled Canned Motors
Single-stage Roots vacuum pump RUVAC WSU 1001 shown with ISO-K 100 rotatable flanges

I Two series, each with four models I Highly leak-tight air-cooled pumps driven by a air-cooled canned motor I Lubricated with mineral oil. RUVAC WS/WSU PFPE with perfluoropolyether (PFPE) I WS and WS PFPE pumps are identical except for the lubricant and the shipping package I No thermal problems due to the speed independent cooling arrangement using a separately connected fan, thus no thermal problems at low speeds I Over-temperature switch in the stator coil of the motor I All elastomer seals made of FPM/Viton I Integrated pressure equalization line with differential pressure valve prevents overloading on WSU model I RUVAC WS 251 to 2001 for use with a frequency inverter for a wide frequency range I No shaft feedthrough to the atmosphere, thus particularly leaktight I Pumping direction may be changed as required
I For applications which require a high pumping speed at pressures between 10-2 and 10-4 mbar (0.75 x 10-2 and 0.75 x 10-4 Torr) I Used where the possibility of contamination due air ingress or pumped media leakage must be avoided I Suction or pumping of high-purity or radioactive gases I Is used in clean rooms were the air must not be recirculated by the motors fan
Supplied Equipment
I The required oil or PFPE filling is included in separate bottle I If no other type of oil is stated, then mineral oil N 62 is used as standard I Purged with nitrogen for corrosion protection I Gasket in the intake flange with integrated dirt sieve
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RUVAC WS/WSU
Roots Vacuum Pumps
b8 a4 DN DN
DN h7 h1 d a5 a1 a2 a
DN/DN1 mm in. mm in. mm in. mm in. mm in. mm1 in. mm in. mm in. 65 65 65 100 100 50 150 150 DN1 63 ISO-K 63 ISO-K 63 ISO-K 100 ISO-K 100 ISO-K 160 ISO-K 160 ISO-K 160 ISO-K a 694 27.32 752 29.61 752 29.61 885 34.84 885 34.84 1042 41.02 1042 41.02 1042 41.02 b2 210 8.27 229 9.02 229 9.02 278 10.94 278 10.94 388 15.28 388 15.28 388 15.28 h 300 11.81 340 13.39 340 13.39 396 15.59 396 15.59 530 20.87 530 20.87 530 20.87 b3 280 11.02 320 12.60 320 12.60 370 14.57 370 14.57 460 18.11 460 18.11 460 18.11 h1 160 6.3 180 7.09 180 7.09 211 8.31 211 8.31 300 11.81 300 11.81 300 11.81
h2 h h3 b9 b6 DN b2 b b 1 b6 b9 b5 b4 b3
a3 14 0.55 14 0.55 14 0.55 16,5 0.65 16,5 0.65 18 0.71 18 0.71 18 0.71 b5 170 6.69 201 7.91 201 7.91 246 9.69 246 9.69 292 11.50 292 11.50 292 11.50 h3 180 7.09 194 7.48 194 7.48 227 8.94 227 8.94 351 13.82 351 13.82 351 13.82 b6 24 0.94 24 0.94 24 0.94 24 0.94 24 0.94 24 0.94 24 0.94 24 0.94 h4 306 12.05 348 13.70 348 13.70 414 16.30 414 16.30 578 22.76 578 22.76 578 22.76 a4 212 8.35 237 9.33 237 9.33 298 11.73 298 11.73 367 14.45 367 14.45 367 14.45 b71) 305 12.01 390 15.35 414 16.30 494 19.45 524 20.63 638 25.12 642 25.28 h51) 360 14.17 430 16.93 450 17.72 532 20.94 564 22.20 760 29.92 753 29.65 a5 120 4.72 155 6.10 155 6.10 180 7.09 180 7.09 220 8.66 220 8.66 220 8.66 b8 285 11.22 313 12.32 330 12.99 366 14.41 398 15.67 456 17.95 460 18.11 h6 307 12.09 332 13.07 350 13.78 392 15.43 424 16.69 523 20.59 530 20.87
h5 h4
a3 b7
a1 405 15.94 486 19.13 486 19.13 560 22.05 560 22.05 800 31.50 800 31.50 800 31.50
Type WS/WSU 251 WS/WSU 501 WS/WSU 501H WS/WSU 1001 WS/WSU 1001H WS/WSU 2001 WS/WSU 2001H WS 2001 FC
a2 365 14.37 450 17.72 450 17.72 520 20.47 520 20.47 740 29.13 740 29.13 740 29.13 b4 230 9.06 271 10.67 271 10.67 320 12.60 320 12.60 422 16.61 422 16.61 422 16.61 h2 280 11.02 320 12.60 320 12.60 370 14.57 370 14.57 460 18.11 460 18.11 460 18.11
b WS/WSU 251 WS/WSU 501 WS/WSU 501H WS/WSU 1001 WS/WSU 1001H WS/WSU 2001 WS/WSU 2001H WS 2001 FC mm in. mm in. mm in. mm in. mm in. mm in. mm in. mm in. 250 9.84 310 1220 310 12.20 376 14.80 376 14.80 463 18.23 463 18.23 463 18.23 b9 WS/WSU 251 WS/WSU 501 WS/WSU 501H WS/WSU 1001 WS/WSU 1001H WS/WSU 2001 WS/WSU 2001H WS 2001 FC mm in. mm in. mm in. mm in. mm in. mm in. mm in. mm in. 7.5 0.30 7.5 0.30 7.5 0.30 7.5 0.30 7.5 0.30 7.5 0.30 7.5 0.30 7.5 0.30
b1 270 10.63 299 11.77 299 11.77 352 13.86 352 13.86 518 20.39 518 20.39 518 20.39 d 50 2.00 50 2.00 50 2.00 50 2.00 50 2.00 50 2.00 50 2.00 50 2.00
1)
For RUVAC WSU only Outside dimensions +/- 3mm Dimensional drawing for the RUVAC WS/WSU pumps
DN1 = ND 6 pump flange in accordance with DIN 2501 DN1 = Collar flange with gasket for connecting ISO-K standard components
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Roots Vacuum Pumps
RUVAC WS/WSU
Technical Data
Nominal pumping speed 1) Max. pumping speed with backing pump m3 x h-1 (cfm) m3 x h-1 (cfm) TRIVAC SOGEVAC
WS/WSU 251 50 Hz 60 Hz
253 (149) 210 (123.7) D 65 B 304 (179) 251 (148) D 65 B
WS/WSU(H) 501 50 Hz 60 Hz
505 (297.4) 410 (241) SV 200 606 (357) 530 (312) SV 200 < 8 x 10-3 (< 6 x 10-3) < 4 x 10-2 (< 3 x 10-2)
Ultimate partial pressure 2) Ultimate total pressure 2) Permissible cut-in pressure 2) RUVAC WS
mbar (Torr) < 2 x 10-5 (< 1.5 x 10-5) < 2 x 10-5 (< 1.5 x 10-5) < 8 x 10-3 (< 6 x 10-3) mbar (Torr) < 8 x 10-4 (< 6 x 10-4) < 8 x 10-4 (< 6 x 10-4) < 4 x 10-2 (< 3 x 10-2)
mbar (Torr)
90 (67.5)
60 (45.0)
100 (75.0)
80 (60.0)
Max. permissible pressure difference during continuous operation 3) mbar (Torr) Main supply /Y /Y Thermal class Motor power, 50/60 Hz Nominal speed, approx. (50/60 Hz) Max. permissible speed Type of protection Oil filling for the bearing chamber 4) PFPE vertical pumping action, approx. l (qt) horizontal pumping action, approx. l (qt) other oils vertical pumping action, approx. l (qt) horizontal pumping action, approx. l (qt) Connection flanges Weight WS/WSU Noise level 6)
1) 2)
80 (60.0)
80 (60.0)
80 (60.0)
80 (60.0)
V V
200 / 230 / 400 F
200-208 / 265 / 460 F 1.1 (1.5) / 1.4 (1.9) 3000/3600 6000 20 1. Filling 5) / 2. Filling
200 / 208-265 / 460 F 2.2 (3.0) / 2.4 (3.3) 3000/3600 6000 20 1. Filling 5) / 2. Filling
200-208 / 265 / 460 F 2.2 (3.0) / 2.4 (3.3) 3000/3600 6000 20 1. Filling 5) / 2. Filling
kW (hp) rpm rpm IP
1.1 (1.5) / 1.4 (1.9) 3000/3600 6000 20 1. Filling 5) / 2. Filling
0.6 (0.63) / 0.55 (0.58) 0.6 (0.63) / 0.55 (0.58) 0.85 (0.9) / 0.75 (0.79) 0.85 (0.9) / 0.75 (0.79) 0.5 (0.53) / 0.45 (0.48) 0.5 (0.53) / 0.45 (0.48) 0.75 (0.79) / 0.7 (0.74) 0.75 (0.79) / 0.7 (0.74)
0.65 (0.69) / 0.6 (0.63) 0.65 (0.69) / 0.6 (0.63)
0.9 (0.95) / 0.8 (0.85)
0.9 (0.95) / 0.8 (0.85)
0.5 (0.53) / 0.45 (0.48) 0.5 (0.53) / 0.45 (0.48) 0.75 (0.79) / 0.7 (0.74) 0.75 (0.79) / 0.7 (0.74) 63 ISO-K 90/95 (198.5/209.5) < 63 63 ISO-K 90/95 (198.5/209.5) < 63 63 ISO-K 63 ISO-K
DN kg (lbs) dB(A)
130/135 (286.7/297.7) 130/135 (286.7/297.7) < 63 < 63
3) 4) 5) 6)
To DIN 28 400 and subsequent numbers With double-stage TRIVAC, resp. single-stage rotary vane vacuum pump SOGEVAC or dry compressing vacuum pump ScrewLine (Type of backing pump look at max. pumping speed) When using 2-stage backing pumps the ultimate pressures will be correspondingly lower Applicable for ratio up to 1 : 10 between backing pump and Roots vacuum pump at 3000 rpm Authoriative, however, is the oil level at the oil-level glass After a complete disassembly At an operating pressure < 10-1 mbar (< 0.75 x 10-1 Torr)
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RUVAC WS/WSU
Roots Vacuum Pumps
Technical Data
Nominal pumping speed 2) Max. pumping speed with backing pump m3 x h-1 (cfm) m3 x h-1 (cfm) SOGEVAC ScrewLine Ultimate partial pressure
3)
W S / W S U ( H ) 1001
50 Hz
1000 (589) 800 (470) SV 300 < 8 x 10-3 (< 6 x 10-3) < 4 x 10-2 (< 3 x 10-2)
W S / W S U ( H ) 2001 W S F C 2001 1)
50 Hz
2050 (1207.5) 1850 (1089) SV 630 F < 8 x 10-3 (< 6 x 10-3) < 4 x 10-2 (< 3 x 10-2)
60 Hz
1200 (707) 1000 (588) SV 300 < 8 x 10-3 (< 6 x 10-3) < 4 x 10-2 (< 3 x 10-2)
60 Hz
2460 (1449) 2100 (1236) SV 630 F < 8 x 10-3 (< 6 x 10-3) < 4 x 10-2 (< 3 x 10-2)
until 100 Hz
4100 3200 (1883) SP 630 < 8 x 10-3 (< 6 x 10-3) < 4 x 10-2 (< 3 x 10-2)
mbar (Torr) mbar (Torr)
Ultimate total pressure 3)
Permissible cut-in pressure 3) RUVAC WS
mbar (Torr)
60 (45.0)
45 (33.5)
30 (22.5)
25 (18.5)
1013 (760.0)
Max. permissible pressure difference during continuous operation 4) mbar (Torr) Main supply /Y /Y Thermal class Motor power, 50/60 Hz kW (hp) rpm rpm IP V V
80 (60.0)
80 (60.0)
50 (37.5)
50 (37.5)
40 (30.0)
200 / 230 / 400 F 4.0/4.4 (5.4/6.0) 3000/3600 6000 20 1. Filling 7) / 2. Filling 1.95 / 1.75 (2.06 / 1.85) 1.2 / 1.1 (1.27 / 1.16) 2.0 / 1.8 2.11 / 1.90 1.2 / 1.1 1.27 / 1.16) 100 ISO-K 228/233 (502.7/513.8) < 68
200-208 / 265 / 460 F 4.0/4.4 (5.4/6.0) 3000/3600 6000 20 1. Filling 7) / 2. Filling 1.95 / 1.75 (2.06 / 1.85) 1.2 / 1.1 (1.27 / 1.16) 2.0 / 1.8 2.11 / 1.90) 1.2 / 1.1 (1.27 / 1.16) 100 ISO-K
200 / 230 / 400 F 7.5 /8.5) (10.0/11.6) 3000/3600 4200 5) 20 1. Filling 7) / 2. Filling 3.0 / 2.7 (3.17 / 2.85) 2.1 / 1.9 (2.22 / 2.00) 3.85 / 3.6 (4.07 / 3.81) 2.6 / 2.4 (2.75 / 2.54) 160 ISO-K
200-208 / 265 / 460 F 7.5/8.5 (10.0/11.6) 3000/3600 4200 5) 20 1. Filling 7) / 2. Filling 3.0 / 2.7 (3.17 / 2.85) 2.1 / 1.9 (2.22 / 2.00) 3.85 / 3.6 (4.07 / 3.81) 2.6 / 2.4 (2.75 / 2.54) 160 ISO-K
400 400 F 7.5/8.5 (10.0/11.6) to 6000 6000 20 1. Filling 7) / 2. Filling 3.0 / 2.7 (3.17 / 2.85) 2.1 / 1.9 (2.22 / 2.00) 3.5 / 3.3 (3.70 / 3.49) 2.4 / 2.2 (2.54 / 2.33) 160 ISO-K 466 (1028.70) < 72
Nominal speed, approx. (50/60 Hz) Max. permissible speed Type of protection Oil filling for the bearing chamber 6) PFPE vertical pumping action, approx.
l (qt) horizontal pumping action, approx. l (qt) other oils vertical pumping action, approx. l (qt) horizontal pumping action, approx. l (qt) DN kg (lbs) dB(A)
Connection flanges Weight WS/WSU
228/233 458/465 458/465 (502.7/513.8) (1009.9/1025.3) (1009.9/1025.3) < 68 < 72 < 72
Noise level 8)
1) 2) 3)
4) 5) 6) 7) 8)
FC = frequency controlled motor To DIN 28 400 and subsequent numbers With double-stage TRIVAC, resp. single-stage rotary vane vacuum pump SOGEVAC or dry compressing vacuum pump ScrewLine (Type of backing pump look at max. pumping speed) When using 2-stage backing pumps the ultimate pressures will be correspondingly lower Applicable for ratio up to 1 : 10 between backing pump and Roots vacuum pump at 3000 rpm Also 6000 rpm upon order Authoriative, however, is the oil level at the oil-level glass After a complete disassembly At an operating pressure < 10-1 mbar (< 0.75 x 10-1 Torr)
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Roots Vacuum Pumps
RUVAC WS/WSU
Roots vacuum pump RUVAC WS RUVAC WSU RUVAC WS PFPE RUVAC WSU PFPE RUVAC WSU PFPE (US version)
WS/WSU WS/WSU(H) WS/WSU(H) WS/WSU(H) WS FC 1) 251 501 1001 2001 2001

Part No. 117 22 Part No. 117 23 Part No. 117 27 Part No. 117 28 Part No. 117 32 Part No. 117 33 Part No. 117 37 Part No. 117 38 118 33
Kat.-Nr 194 66
Part No. 117 42 Part No. 117 43 Part No. 117 47 Part No. 200 00 763 Part No. 917 48 118 43
Part No. 194 70
Part No. 117 52 Part No. 117 53 Part No. 117 57 Part No. 200 03 123 Part No. 167 007 Part No. 150 95 Part No. 150 96 Part No. 118 53
Part No. 194 74
Part No. 155 020 Part No. 155 030

Part No. 194 74
RUVAC WS 2001, ANDEROL 555 (max. 100 Hz) RUVAC WS 2001, PFPE (max. 100 Hz) RUVAC WSU 2001, PFPE (max. 100 Hz) RUVAC WS FC, ANDEROL 555 RUVAC WS FC, PFPE RUVAC WSU(H) with special ACE vibration absorber RUVAC WS/WSU(H) seal kit

Part No. 194 62
Flange adapter set, consisting of flange adapter with screws, bolts, washers and nuts for ANSI flange WA/WS pump WAU/WSU pump Frequency inverter RUVATRONIC (see description in Section General, paragraph Accessories)
1)
(3" ANSI) Part No. 200 03 179 Part No. 200 03 179 RT 5/251 Part No. 500 001 381
(6" ANSI) Part No. 200 03 181
FC = Frequency Controlled Motor
10 -5 10
3 m x h -1 4
10 -4
10 -3
10 -2
10 -1
10 0
10 1
Torr
750
5000 cfm 1000 500
Pumping speed
10 3
100
10 2
8 6 4 2
50
WSU 2001+SV 630F WSU 1001+SV 300 WSU 501 +SV 200 WSU 251 +D 65 B
10
10 1 2 4 68 10 -5 10 -4
10 -3
10 -2
10 -1
10 0
10 1
10 2 10 3 mbar
Total pressure Partial pressure Pumping speed of the RUVAC WS/WSU, 50 Hz
Pressure
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RUVAC WS/WSU
Roots Vacuum Pumps
Notes
21 C07
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Roots Vacuum Pumps
RUVAC WS/WSU(W) PFPE
RUVAC WS/WSU (W) PFPE Roots Vacuum Pumps with Water-Cooled Canned Motors
Single-stage Roots vacuum pump RUVAC WS 501 W shown with ISO-K 63 rotatable flanges

I Two series, each with four models I Highly leak-tight air-cooled pumps driven by a water-cooled canned motor I RUVAC WS/WSU(W) PFPE lubricated with perfluoropolyether (PFPE) I WS and WS PFPE pumps are identical except for the lubricant and the shipping package I No thermal problems due to the speed independent cooling arrangement using a separately connected fan, thus no thermal problems at low speeds I Over-temperature switch in the stator coil of the motor I All elastomer seals made of FPM/Viton I Integrated pressure equalization line with differential pressure valve prevents overloading on WSU model I RUVAC WS 251 to 2001 for use with a frequency inverter for a wide frequency range I No shaft feedthrough to the atmosphere, thus particularly leaktight I Pumping direction may be changed as required
I For applications which require a high pumping speed at pressures between 10-2 and 10-4 mbar (0.75 x 10-2 and 0.75 x 10-4 Torr) I Used where the possibility of contamination due air ingress or pumped media leakage must be avoided I Suction or pumping of high-purity or radioactive gases I Is used in clean rooms were the air must not be recirculated by the motors fan
Supplied Equipment
I The required oil or PFPE filling is included in separate bottle (exceptions are marked) I PFPE is used as standard I Purged with nitrogen for corrosion protection I Gasket in the intake flange with integrated dirt sieve
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Roots Vacuum Pumps
b8 a4 DN DN
DN h7 h1 d a5 a1 a2 a
DN mm in. mm in. mm in. 63 ISO-K 100 ISO-K 160 ISO-K DN1 63 ISO-K 100 ISO-K 160 ISO-K a 738 29.06 793 31.22 958 437.72 b2 229 9.02 278 10.94 388 15.28 h 331 13.03 396 15.59 530 20.87 b3 305 12.01 370 14.57 460 18.11 h1 180 7.09 211 8.31 300 11.81
h2 h h3 b9 b6 DN b2 b b 1 b6 b9 b5 b4 b3
a2 450 17.72 520 20.47 740 29.13 b4 271 10.67 320 12.60 422 16.61 h2 305 12.01 370 14.57 460 18.11 b5 201 7.91 246 9.69 292 11.50 h3 194 7.64 227 8.94 351 13.82 a3 14 0.55 16,5 0.65 18 0.71 b6 24 0.94 24 0.94 24 0.94 h4 348 13.70 414 16.30 578 22.76 a4 237 9.33 298 11.73 367 14.45 b71) 494 19.45 638 25.12 h51) 532 20.94 760 29.92 a5 155 6.10 180 7.09 220 8.66 b8 366 14.41 456 17.95 h6 392 15.43 523 20.59
h5 h4
a3 b7
a1
Type WS 501 W WS/WSU 1001 W WS/WSU 2001 W
496 19.53 560 22.05 800 31.50
b WS 501 W WS/WSU 1001 W WS/WSU 2001 W mm in. mm in. mm in. 310 12.20 372 14.65 457 17.99 b9 WS/WSU 501 W WS/WSU 1001 W WS/WSU 2001 W mm in. mm in. mm in. 7.5 0.30 7.5 0.30 7.5 0.30
b1 299 11.77 352 13.86 518 20.39 d 50 2.00 50 2.00 50 2.00
1)
For RUVAC WSU ... W only Outside dimensions +/- 3mm Dimensional drawing for the RUVAC WS/WSU(W) PFPE pumps
DN1 = ND 6 pump flange in accordance with DIN 2501 DN1 = Collar flange with gasket for connecting ISO-K standard components
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Roots Vacuum Pumps
Technical Data
Nominal pumping speed 1) Max. pumping speed with backing pump Ultimate partial pressure 2) Ultimate total pressure 2) Permissible cut-in pressure 2) RUVAC WS m3 x h-1 (cfm) m3 x h-1 (cfm) SOGEVAC mbar (Torr) mbar (Torr)
WS 501 W
50 Hz
505 (297.4) 410 (241) SV 200 < 8 x 10-3 (< 6 x 10-3) < 4 x 10-2 (< 3 x 10-2)
60 Hz
606 (357) 530 (312) SV 200 < 8 x 10-3 (< 6 x 10-3) < 4 x 10-2 (< 3 x 10-2)
mbar (Torr)
100 (75)
80 (60)
Max. permissible pressure difference during continuous operation 3) mbar (Torr) Main supply /Y /Y Thermal class Motor power, 50/60 Hz Nominal speed, approx. (50/60 Hz) Max. permissible speed Type of protection Cooling water connection with inside thresd Cooling water consumption, min. at inlet temperature, max. 25 C kW (hp) rpm rpm IP
80 (60)
80 (60)
V V
200 / 230 / 400 F 2.2 (3.0) / 2.4 (3.3) 3000/3600 6000 40
200-208 / 265 / 460 F 2.2 (3.0) / 2.4 (3.3) 3000/3600 6000 40
1/4" 18 NPT
1/4" 18 NPT
l h-1
200
200
Max. permissible cooling water pressure bar Oil filling for the bearing chamber 4) PFPE vertical pumping action, approx. l (qt) horizontal pumping action, approx. l (qt) Connection flanges Weight WS Noise level 6)
1) 2)
6 1. Filling 5) / 2. Filling
6 1. Filling 5) / 2. Filling
0.85 (0.9) / 0.75 (0.79) 0.75 (0.79) / 0.7 (0.74) 63 ISO-K 130 (286.7) < 63
0.85 (0.9) / 0.75 (0.79) 0.75 (0.79) / 0.7 (0.74) 63 ISO-K 130 (286.7) < 63
DN kg (lbs) dB(A)
3) 4) 5) 6)
To DIN 28 400 and subsequent numbers With single-stage rotary vane vacuum pump SOGEVAC, resp. dry compressing vacuum pump ScrewLine (Type of backing pump look at max. pumping speed). When using 2-stage backing pumps the ultimate pressures will be correspondingly lower Applicable for ratio up to 1 : 10 between backing pump and Roots vacuum pump at 3000 rpm Authoriative, however, is the oil level at the oil-level glass After a complete disassembly At an operating pressure < 10-1 mbar (< 0.75 x 10-1 Torr)
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Roots Vacuum Pumps
Technical Data
Nominal pumping speed 1) Max. pumping speed with backing pump Ultimate total pressure 2) m3 x h-1 (cfm) m3 x h-1 (cfm) ScrewLine mbar (Torr)
WS/WSU 1001 W
50 Hz
1000 (589) 830 (489) SP 250 < 1 x 10-3 (< 7.5 x 10-4)
WS/WSU 2001 W
50 Hz
2050 (1207.5) 1780 (1044) SP 630 < 1 x 10-3 (< 7.5 x 10-4)
60 Hz
1200 (707) 1000 (588) SP 250 < 1 x 10-3 (< 7.5 x 10-4)
60 Hz
2460 (1449) 2080 (1224) SP 630 < 1 x 10-3 (< 7.5 x 10-4)
Permissible cut-in pressure 2) RUVAC WS
mbar (Torr)
50 (37.5)
20 (15.0)
23 (17.25)
18 (13.5)
Max. permissible pressure difference during continuous operation 3) mbar (Torr) Main supply /Y /Y Thermal class Motor power, 50/60 Hz kW (hp) rpm rpm IP
80 (60.0)
50 (37.5)
50 (37.5)
50 (37.5)
V V
200 / 230 / 400 F 4.0/4.4 (5.4/6.0) 3000/3600 6000 54
200-208 / 265 / 460 F 4.0/4.4 (5.4/6.0) 3000/3600 6000 54
200 / 230 / 400 F 7.5 /8.5 (10.2/11.6) 3000/3600 4200 54

4)
200-208 / 265 / 460 F 7.5/8.5 (10.2/11.6) 3000/3600 4200 4) 54
Nominal speed, approx. (50/60 Hz) Max. permissible speed Type of protection Cooling water connection with inside thresd Cooling water consumption, min. at inlet temperature, max. 25 C
2x G 3/8"
2x G 3/8"
2x G 1/2"
2x G 1/2"
l h-1
90
90
150
150
Max. permissible cooling water pressure bar Oil filling for the bearing chamber
5)
7 1. Filling / 2. Filling 1.95 / 1.75 (2.06 / 1.85) 1.2 / 1.1 (1.27 / 1.16) 100 ISO-K 228/233 (502.7/513.8) < 68
6)
6)
6)
7 1. Filling 6) / 2. Filling 3.0 / 2.7 (3.17 / 2.85) 2.1 / 1.9 (2.22 / 2.00) 160 ISO-K 458/465 (1009.9/1025.3) < 72
PFPE vertical pumping action, approx.
l (qt) horizontal pumping action, approx. l (qt) DN kg (lbs) dB(A)
Connection flanges Weight WS/WSU
Noise level 7)
1) 2)
3) 4) 5) 6) 7)
To DIN 28 400 and subsequent numbers With single-stage rotary vane vacuum pump SOGEVAC, resp. dry compressing vacuum pump ScrewLine (Type of backing pump look at max. pumping speed). When using 2-stage backing pumps the ultimate pressures will be correspondingly lower Applicable for ratio up to 1 : 10 between backing pump and Roots vacuum pump at 3000 rpm Also 6000 rpm upon order Authoriative, however, is the oil level at the oil-level glass After a complete disassembly At an operating pressure < 10-1 mbar (< 0.75 x 10-1 Torr)
25 C07
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Roots Vacuum Pumps
Roots vacuum pump RUVAC WS PFPE RUVAC WSU PFPE RUVAC WS/WSU(H) seal kit
WS 501 W
Part No. 128 60
Part No. 194 66
WS/WSU 1001 W
upon request upon request
Part No. 194 70 1) 1)
WS/WSU 2001 W
upon request upon request
Part No. 194 74 1) 1)
Flange adapter set, consisting of flange adapter with screws, bolts, washers and nuts for ANSI flange WA/WS pump WAU/WSU pump Frequency inverter RUVATRONIC (see description in Section General, paragraph Accessories)
1)
(3" ANSI) Part No. 200 03 179
RT 5/501 Part No. 500 001 382
prepared for PFPE, upon request with or without PFPE in a bottle
10 -5 10 4 m 3 x h-1
10 -4
10 -3
10 -2
10 -1
10 0
Torr
7.5 5000
Pumping speed
WS/WSU 2001 + SP630 WS/WSU 1001 + SP250 WS 501 + D 65 B
cfm
1000 500
10 3
100 10 2 8 6
4 2
50
10
2 4 68
10
10 -5
10 -4
10 -3
10 -2
10 -1 Pressure
10 0mbar 10 1
Total pressure Partial pressure
Pumping speed of the RUVAC WS/WSU (W) PFPE, 50 Hz
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Roots Vacuum Pumps
Notes
27 C07
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Roots Vacuum Pumps
RUVAC WSLF
RUVAC WSLF Roots Vacuum Pumps for Laser Gas Systems

Roots vacuum pumps driven by canned motors are available for gas laser systems.
RUVAC WSLF 1001 LF Roots vacuum pump

I A gas mixture of helium, nitrogen and carbon monoxide is continuously circulated at a reduced system pressure I High pumping speed from a small, quiet running pump I Operation with a frequency inverter is possible I Nickel-plated pump chamber surfaces I Through an additional vacuum pump the bear-ing chambers may be evacuated to a pressure lower than the pressure within the pumping chamber of the RUVAC I Water-cooled oil separating system I Integrated oil separating system for extended maintenance intervals
I Processing of ferrous and nonferrous materials like welding, cutting and surface refinement
Supplied Equipment
I Horizontal pumping action as standard I With oil pressure switch and oil drain facility I The required oil filling is included separately (special oil ANDEROL 2100 HTCL) I Purged with nitrogen for corrosion protection
Technical Note
I The gas circulation system must be very clean and entirely free of hydrocarbons
a4
DN
1)
2)
DN
h1
h b3 a5 a1 a2 a a3 b2 b1 b
DN WSLF 1001 mm in. 100 100 a5 WSLF 1001 mm in. 180 7.09
a 990 39.0 b 370 14.57
a1 560 22.05 b1 320 12.60 b2 246 9.69
a2 520 20.47 b3 24 0.94
a3 16,5 0.65 h 227 8.94
a4 360 14.17 h1 414 16.302
1) 2)
Connection for a vacuum pump 4 mm water connection for the oil separator
3)
DN = ND 6 3) pump flange to DIN 2501 ND = nominal pressure
Dimensional drawing for the RUVAC WSLF pumps
C07 28
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RUVAC WSLF
Roots Vacuum Pumps
Technical Data
50 Hz
Nominal pumping speed 1) m3 x h-1 (cfm) 1000 (589) Max. permissible pressure difference during continuous operation Main supply /Y Motor power Nominal speed Max. permissible speed Type of protection Oil filling of the bearing chambers Connection flange DIN 2501 Weight Cooling water pressure Cooling water throughput Hose connection for hose lx V kW (hp) rpm rpm IP l (qt) DN kg (lbs) bar (psi) h-1 (cfm) 200-230 / 400 7.5 (10.2) 3000 6000 20 1.2 (1.27) 100 275 (606.4) 1 - 5 (14.5 - 72.5) 200 (0.9) 6x1 mbar (Torr) 80 (60)
WSLF 1001
60 Hz
1200 (707)
80 (60)
200-265 / 460 8.5 (11.6) 3600 6000 20 1.2 (1.27) 100 275 (606.4) 1 - 5 (14.5 - 72.5) 200 (0.9) 6x1
RUVAC WSLF Roots vacuum pump RUVAC WSLF 1001 RUVAC WSLF seal kit
1)
WSLF 1001
Part No. 117 94
Part No. 194 70
To DIN 28 400 and subsequent numbers
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Roots Vacuum Pumps
RUVAC RA
RUVAC RA Roots Vacuum Pumps with Flange-Mounted Motors

Roots vacuum pumps offering a high pumping speed.
RUVAC RA 5001 single-stage Roots vacuum pump

I Oil immersed radial shaft seals made of FPM for sealing against the atmosphere I Use of universal IEC motors (50/60 Hz) I The motors fulfil in Europe (50 Hz) the efficiency requirements in accordance with EFF1 I In the USA (60 Hz) the motors are UL approved and fulfil the efficiency requirements in accordance with EPAC. I If required with external pressure equalisation line and differential pressure valve so that the pump may be switched on jointly with the backing pump at atmospheric pressure I Motors can easily be exchanged for special voltage motors. Explosion protected motors and motors for special main frequencies upon request I Over-temperature switch in the stator coil of the motor I Rugged dry compressing vacuum pump I Most reliable even under rough operating conditions I ATEX versions compliant to 94/9/EC possible
I Large vacuum systems like sintering and annealing furnaces which require multi-stage pumpsets I In large vacuum rectification systems Roots vacuum pumps with postcondensers for compressing of vapors
Custom Pumps
I If required the RA pumps are also available as C versions (chemical versions) I Pumps made of special materials may be specified as well as pressure burst resistant pumps I Custom designed pumps for pumping speeds of 250 m3/h to 2000 m3/h (147.3 to 1178 cfm)
Technical Note
For operation ordering of oil is necessary (see section Accessories)
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RUVAC RA
Roots Vacuum Pumps
a6 a5 a a1 a2
DN b b1 685 l1 2110* l 782 l2 DN 300 300 DN DIN 2532 2532 DIN
h d h2 h1
930 h
h 420 1
a3 a4
d1 DN b2
h2 220 RUVAC RA 13 000 RUVAC RA 13 000 * Breite Breite = 1000 * * Width = 1000
DN RA 3001 RA 5001 RA 7000 RA 9001 mm in. mm in. mm in. mm in. 200 200 250 300
a 980 38.58 1013 9.88 1143 45.0 1467 57.76 b1 538 21.18 652 25.67 652 25.67 810 31.89 l 2110 83.07 l1
a1 470 18.50 468 18.43 533 20.98 685 26.97 b2 600 23.62 720 28.35 720 28.35 830 32.68 l2 782 30.79
a2 510 20.08 545 21.46 610 24.02 782 30.79 dk6 35 1.38 42 1.65 42 1.65 55 2.17 h 930 36.61
a3 290 11.42 280 11.02 410 16.14 655 25.79 d1 23 0.91 23 0.91 23 0.91 27 1.06 h1 420 16.54
a4 350 13.78 360 14.17 490 19.29 800 31.50 h 500 19.69 630 24.80 630 24.80 710 27.95 h2 220 8.66
a5 1118 44.02 1151 45.31 1281 50.43 1612 63.46 h1 35 1.38 50 1.97 50 1.97 30 1.18
a6 1606 63.23 1639 64.53 1813 71.38 2204 86.77 h2 250 9.84 315 12.40 315 12.40 355 13.98
b RA 3001 RA 5001 RA 7000 RA 9001 mm in. mm in. mm in. mm in. 652 25.67 800 31.50 800 31.50 910 35.83 DN RA 13000 mm in. 300 300
685 26.97
DN = PN 10 pump flange to DIN-EN 1092-2 Outside dimensions +/- 3mm Dimensional drawing for the RUVAC RA pumps
10
-3
10
-2
10
-1
Torr 7.5
5000 cfm 1000 500
10
m xh
-1
Pumping speed
10
3
8 6 4
RA 13000 + 4 x SV 630 RA 9001 + 2 x SV 1200 RA 7001 + 1 x SV 1200 RA 5001 + 1 x SV 630 RA 3001 + 1 x SV 630
100
2 4 6 8
10
10 -3
10 -2
10 -1
10 0
mbar
10 1
Pressure
Pumping speed curves for the RUVAC RA, 50 Hz Leybold Vacuum Full Line Catalog 2006
31 C07
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Roots Vacuum Pumps
RUVAC RA
Technical Data
Nominal pumping speed 1) Max. pumping speed with backing pump Ultimate partial pressure 2) Ultimate total pressure 2) m3 x h-1 (cfm) m3 x (cfm) SOGEVAC mbar (Torr) mbar (Torr) h-1
RA 3001
50 Hz
3845 (2264) 3200 (1883) SV 630 F < 8 x 10-3 (< 6 x 10-3) < 4 x 10-2 (< 3 x 10-2)
RA 5001
50 Hz
5450 (3210) 4300 (2531) SV 630 F < 8 x 10-3 (< 6 x 10-3) < 4 x 10-2 (< 3 x 10-2)
60 Hz
4625 (2724 3850 (2266) SV 630 F < 8 x 10-3 (< 6 x 10-3) < 4 x 10-2 (< 3 x 10-2)
60 Hz
6560 (3864) 5200 (3061) SV 630 F < 8 x 10-3 (< 6 x 10-3) < 4 x 10-2 (< 3 x 10-2)
Max. permissible pressure difference during continuous operation 3) mbar (Torr) for < 3 min. mbar (Torr) Main supply /Y /Y /Y V V V
53 (39.8) 93 (69.8) 380 / 660 400 / 690 415 / F
53 (39.8) 93 (69.8) 440 / 460 / F 12.5 (17.0) 3000/3600 3600 55
53 (39.8) 93 (69.8) 380 / 660 400 / 690 415 / F 15.0 (20.4) 3000/3600 3600 55
53 (39.8) 93 (69.8) 440 / 460 / F 17.0 (23.1) 3000/3600 3600 55
Thermal class Motor power Nominal speed, 50 Hz Max. permissible speed Type of protection Oil filling, approx. vertical pumping action horizontal pumping action Connection flange suction side 4, 5) pressure side 4, 5) Adapter flange package suction side pressure side Weight complete, approx. kW (hp) rpm rpm IP
11.0 (15.0) 3000/3600 3600 55
l (qt) l (qt)
7.0 (7.4) 3.5 (3.7)
7.0 (7.4) 3.5 (3.7)
12.0 (12.7) 5.4 (5.7)
12.0 (12.7) 5.4 (5.7)
DN DN
200 200
200 200
200 200
200 200
DN DN kg (lbs)
250 ISO-K 160 ISO-K 580 (1278.9)
250 ISO-K 160 ISO-K 580 (1278.9)
250 ISO-K 160 ISO-K 770 (1697.9)
250 ISO-K 160 ISO-K 770 (1697.9)
Roots vacuum pump RUVAC RA with motor, coupling and lantern 6) RUVAC RA, ATEX version Adapter flange package for suction and pressure side, including centering ring with integrated dirt sieve in the intake flange Frequency inverter RUVATRONIC (see description in Section General, paragraph Accessories)
1) 2) 3) 4) 5) 6)
RA 3001
50 / 60 Hz
RA 5001
50 / 60 Hz
Part No. 119 50 upon request
Part No. 200 14 472 RT 5/3001 Part No. 500 001 385
Part No. 200 14 472 RT 5/5001 Part No. 500 001 386
To DIN 28 400 and subsequent numbers With single-stage rotary vane vacuum pumps SOGEVAC Valid for a ratio of 1 : 5 between backing pump and Roots vacuum pump According to DIN 2532 Without adapter flange to ISO-K flange Without oil filling
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Roots Vacuum Pumps
Technical Data
Nominal pumping speed 1) Max. pumping speed with backing pump or Ultimate partial pressure 2) Ultimate total pressure 2) m3 x h-1 (cfm) m3 x h-1 (cfm) SOGEVAC m3 x h-1 (cfm) mbar (Torr) mbar (Torr)
RA 7001
50 Hz
7337 (4321) 6100 (3590) SV 1200 < 8 x 10-3 (< 6 x 10-3) < 4 x 10-2 (< 3 x 10-2)
RA 9001
50 Hz
9567 (5635) 7500 (4414) 2 x SV 1200 < 1 x 10-2 (< 7.5 x 10-3) < 5 x 10-2 (< 3.8 x 10-2)
RA 13000
50 Hz
13000 (7657) 10000 (5890) 2500 (1473) < 1 x 10-2 (< 7.5 x 10-3) < 5 x 10-2 (< 3.8 x 10-2)
60 Hz
8819 (5194) 7200 (4238) SV 1200 < 8 x 10-3 (< 6 x 10-3) < 4 x 10-2 (< 3 x 10-2)
60 Hz
11484 (6762) 8900 (5239) 2 x SV 1200 < 1 x 10-2 (< 7.5 x 10-3) < 5 x 10-2 (< 3.8 x 10-2)
Max. permissible pressure difference during continuous operation 3) mbar (Torr) for < 3 min. mbar (Torr) Main supply /Y V V V
53 (39.8) 93 (69.8) 380 / 660 400 / 690 415 / F
53 (39.8) 93 (69.8) 440 / 460 / F 21.0 (28.6) 3000/3600 3600 55
66 (49.5) 133 (99.8) 380 / 660 400 / 690 415 / F 22.0 (30.0) 1500/1800 1800 55
66 (49.5) 133 (99.8) 440 / 460 / F 25.0 (34.0) 1500/1800 1800 55
53 (39.8) 93 (69.8) 380 / 660 400 / 690 415 / F 30.0 (40.8) 2000 2000 55
Thermal class Motor power Nominal speed, 50 Hz Max. permissible speed Type of protection Oil filling, approx. vertical pumping action horizontal pumping action Connection flange suction side 4, 5) pressure side 4, 5) Adapter flange package suction side pressure side Weight complete, approx. kW (hp) rpm rpm IP
18.5 (25.1) 3000/3600 3600 55
l (qt) l (qt)
12.0 (12.7) 5.4 (5.7)
12.0 (12.7) 5.4 (5.7)
11.0 (11.6) 7.6 (8.0)
11.0 (11.6) 7.6 (8.0)
11.0 (11.6) 7.6 (8.0)
DN DN
250 250
250 250
300 300
300 300
300 300
DN DN kg (lbs)
250 ISO-K 250 ISO-K 840 (1852.2)
250 ISO-K 250 ISO-K
320 ISO-K 250 ISO-K
320 ISO-K 250 ISO-K 1400 (3087.0
320 ISO-K 250 ISO-K upon request
840 (1852.2) 1400 (3087.0)
Roots vacuum pump RUVAC RA with motor, coupling and lantern 6) RUVAC RA, ATEX version Frequency inverter RUVATRONIC (see description in Section General, paragraph Accessories)
1) 2) 3) 4) 5) 6)
RA 7001
50 / 60 Hz
RA 9001
50 / 60 Hz
RA 13000
50 Hz

RT 5/7001 Part No. 500 001 387

RT 5/9001 Part No. 500 001 388
upon request
RT 5/13000 Part No. 500 001 389
To DIN 28 400 and subsequent numbers With single-stage rotary vane vacuum pumps SOGEVAC Valid for a ratio of 1 : 5 between backing pump and Roots vacuum pump According to DIN 2532 Without adapter flange to ISO-K flange Without oil filling
33 C07
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Roots Vacuum Pumps
Accessories
Pressure Switches
The RUVAC vacuum pumps may be switched on and off automatically through a pressure switch driven by a SV 110 switching amplifier and a contactor. The pressure switch may be installed in the intake of the RUVAC using a screw-in adaptor, an elbow and two centering and two clamping rings. Upon request the pressure switch may be set by Leybold to a fixed value. Please state this pressure value in your order.
Pressure switch PS 115, adjustable setting Pressure switch setting Accessories for fitting the PS pressure switch Screw-in adaptor DN 16 KF, M 16 x 1.5 mm (0.06 in.) Elbow DN 16 KF Centering ring DN 16 KF (2 are required) Clamping ring DN 16 KF (2 are required) SV 110 switching amplifier (for PS 114/115) Oil pressure switch for RUVAC WSLF 1001 and WS-PFPE
Pressure Switches
Part No. 160 04 Part No. 160 05
Part Part Part Part
No. No. No. No.
168 184 183 183
40 36 26 41
Part No. 160 78 Part No. 194 82
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Accessories
Roots Vacuum Pumps
Vacuum Pump Oils

Lubricating oils for rotary vacuum pumps need to fulfil demanding requirements. Their vapor pressure must be low also at high temperatures, water content and water uptake must be minimal. Their viscosity characteristics needs to be flat, lubricating properties need to be excellent and they must resist cracking upon being mechanically stressed. All the vacuum pump oils listed in the following have been subjected in our factory laboratories to very comprehensive tests closely resembling the conditions encountered in practice by the pumps from the RUVAC series. We therefore recommend the exclusive use of vacuum pump oils fully qualified by Leybold so as to ensure optimum performance of the Leybold vacuum pumps and also to ensure optimum oil change intervals. Under vacuum conditions lubricating oils, especially those with additives may behave quite differently than expected. Additives may adversely affect the attainable ultimate pressure and may react with the media being pumped. When using not suitably qualified third party oils, the oil change intervals and the performance of the vacuum pump may be reduced. Also unwanted deposits may occur which may even cause severe damage to the vacuum pump. For these reasons please understand that we must make our warranty commitment dependent on the use of oils which have been qualified by us. Damages caused by the use of not suitably qualified lubricating oils are not covered by our warranty. In order to adapt the pumps to the different applications of our customers, different types of oil are used in the RUVAC pumps. Please note that owing to differing properties not all types of oil may be used in all pumps of the RUVAC series. If you can not find the combination of pump and oil you require please ask us for a quotation.
Lubricant Types Mineral Oils

Mineral oils are products distilled and refined from crude oil. These do not consist of precisely defined compounds but rather consist of a complex mixture. The way in which the mineral oil is pre-treated and its composition are decisive as to the applications it will be suited for. Depending on the distribution of the hydrocarbons and the dominance of certain properties, mineral oils are grouped according to paraffin-base, naphthenic and aromatic. For the purpose of attaining especially low ultimate pressures, mineral oils must be selected on the basis of a core fraction. The thermal and chemical resistance of mineral oils has been found to be adequate in the majority of applications. They offer a high degree of compatibility with elastomers and resistance to hydrolysis.
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Roots Vacuum Pumps
Accessories
Synthetic Oils
Synthetic oils are produced by a chemical reaction. The group of synthetic oils includes liquids differing widely as to their chemical structure and composition. Correspondingly their physical and chemical properties differ considerably. Synthetic oils are used in those cases where special properties of the oil are required which can not be fulfilled by mineral oils. The oils given in the following belong to the group of synthetic oils:
Perfluorinated polyether (PFPE)

These are oils which are only composed of carbon (C), fluorine (F) and oxygen atoms (O). The existing C-O and C-F bonds are highly stable. For this reason PFPE oils are practically inert against all chemical and oxidising influences. Perfluorinated polyether will not polymerise under the influence of high energy radiation. PFPE is non-flammable. Leybold NC1/14 has the approval of BAM (Federal Institute for Materials Research and Testing) for pumping of pure oxygen. Perfluorinated polyether are used when pumping strongly reactive substances like oxygen (O2), fluorine (F2) and uranium hexafluoride (UF6). Regarding Lewis acids (for example, boron trifluoride (BF3), aluminum trichloride (AlCl3)) they are not completely inert. Here reactions may take place at temperatures over 100 C (212 F). Perfluorinated polyether are thermally highly stable. Thermal decomposition may only take place at temperatures of over 290 C (554 F). Caution: Perfluorinated polyether will when decomposed release toxic and corrosive gases: hydrogen fluoride (HF), carbonyl difluoride (COF2). For this reason open fires must be avoided in the workspace where PFPE is being used. Do not smoke in the workspace where PFPE is being used. Only suitably prepared pumps must be used in connection with perfluorinated polyether, since it is essential that the pumps be free of hydrocarbons. Changing from one basic type of oil to PFPE must be left exclusively to authorised Service Centers. The pump will have to be fully disassembled and carefully cleaned. Gaskets and filters will have to be exchanged and suitable greases will have to be used.
Ester Oils
Ester oils are organic compounds which excel especially through their high thermal resistance to cracking compared to mineral oils. Chemical resistance is generally quite good, but will depend on the type of ester oil. Elastomer compatibility and resistance against hydrolysis are not so good compared to mineral oils.
Safety data sheets are available to professional users from: e-mail "safety-data@leyboldvac.de" or Internet "www.leybold.com/safety-data".
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Accessories
Roots Vacuum Pumps
Overview Oils Application Data

Type of oil
Special Oil
Paraffin-base mineral oil, core faction, free of additives Standard oil
ANDEROL 555
Diester oil
Examples of areas of application and process media
Used at elevated temperatures. Pumping of air, chemically inert permanent gases For pumping air, chemically inert permanent (noble gases, for example), carbon gases (noble gases, for example), water dioxide CO2, carbon monoxide CO, aliphatic vapor compounds (for example, methane CH4, propane C3H8, ethylene C2H4), organic solvent vapors The ultimate pressures stated in our catalogs are based on operation of the pump with N62 (except for the PFPE pumps)
Remarks
Elastomer compatibility FPM (Viton) NBR (Perbunan) 1) EPDM
Suited Conditionally suited Not suited
Technical Data
Viscosity at 040 C (104 F) at 100 C (212 F) Flash point Vapor pressure at 020 C (068 F) at 100 C (212 F) Density at 15 C (59 F) Pour point Middle molecular weight mm2/s mm2/s C (F)
Special Oil
90 10 > 255 (491)
ANDEROL 555
94 9 250 (482)
mbar (Torr) mbar (Torr) g/ml C (F) g/mol
< 1 x 10-5 (< 0.75 x 10-5) < 3 x 10-3 (< 2.3 x 10-3) 0.88 2) < -9 (< -16) 550
7 x 10-5 (5.3 x 10-5) 1.5 x 10-3 (1.1 x 10-3) 0,96 -42 (-44) 530
01 litre (1.06 qt) 05 litres (5.29 qt) 20 litres (21.14 qt) 180 kg (397.35 lbs)
Special Oil
Part No. 177 01 Part No. 177 02 Part No. 177 03 Part No. 177 05
ANDEROL 555
Part No. 200 10 272 Part No. 200 10 891 Part No. 200 00 193
Please note that the technical data stated are only typical data. Slight variations from batch to batch must be expected. The technical data stated here can not be taken as assured properties 1) Resistance to decomposing is very much dependent on the share of acrylonitrile in the NBR 2) at 20 C (68 F) ANDEROL is a trademark of ANDEROL BV
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Roots Vacuum Pumps
Accessories
Application Data
Type of oil Examples of areas of application and process media
ANDEROL 2100 HTCL

Polyolester Used in the RUVAC WSLF for operation in connection with gas lasers
NC 1/14
Perfluorinated polyether PFPE For pumping strong oxidants like oxygen, O2, ozone O3, nitrogen oxides NOx and sulphur oxides (SO2, SO3) as well as reactive substances like halogens (for example fluorine F2, chlorine Cl2), hydrogen halides (for example hydrogen chloride HCl, hydrogen bromide HBr), uranium hexafluoride UF6 and conditionally Lewis acids (for example, boron trichloride BCl3) Use only PFPE modified pumps. For operation with PFPE we recommend the exclusive use of such pump types which are equipped with a split-pole motor Mixing with other types of oil must be absolutely avoided
Remarks
Technical Data
Viscosity at 040 C (104 F) at 100 C (212 F) Flash point Vapor pressure at 020 C (68 F) at 100 C (212 F) Density at 15 C (59 F) Pour point Middle molecular weight mm2/s mm2/s C (F)
ANDEROL 2100 HTCL

94 13 265 (509)
NC 1/14
47 5 2)
mbar (Torr) mbar (Torr) g/ml C (F) g/mol
5 x 10-5 (3.8 x 10-5) 8.5 x 10-4 (6.4 x 10-4) 0.92 -35 (-31) No known
3 x 10-7 (2.3 x 10-7) 6 x 10-4 (4.5 x 10-4) 1,89 3) -40 (-40) 2500
1 litre (1.06 qt)
ANDEROL 2100 HTCL

Part No. 200 14 333
NC 1/14
Part No. 177 38
Please note that the technical data stated are only typical data. Slight variations from batch to batch must be expected. The technical data stated here can not be taken as assured properties 1) Resistance to decomposing is very much dependent on the share of acrylonitrile in the NBR 2) Caution: Perfluorinated polyether will, when being decomposed at temperatures over 290 C (554 F), release toxic and corrosive gases For this reason open fires must be avoided in the workspace where PFPE is being used. Do not smoke in the workspace where PFPE is being used 3) at 20 C (68 F) ANDEROL is a trademark of ANDEROL BV
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Accessories
Roots Vacuum Pumps
Only available for purchase in North and South America
Application Data
Type of oil Examples of areas of application and process media
HE-200
Paraffin-base mineral oil, core faction, free of additives Standard oil for Leybold USA For pumping air, chemically inert permanent gases (noble gases, for example), water vapor, solvent vapors in the case of laboratory pumps operated with cold traps
HE-1600
Perfluorinated polyether PFPE For pumping strong oxidants like oxygen, O2, ozone O3, nitrogen oxides NOx and sulphur oxides (SO2, SO3) as well as reactive substances like halogens (for example fluorine F2, chlorine Cl2), hydrogen halides (for example hydrogen chloride HCl, hydrogen bromide HBr), uranium hexafluoride UF6 and conditionally Lewis acids (for example, boron trichloride BCl3) Use only correspondingly modified pumps. For operation with PFPE we recommend the exclusive use of such pump types which are equipped with a split-pole motor Mixing with other types of oil must be absolutely avoided Suited Suited Suited
Remarks
The ultimate pressures stated in operation of the pump with HE-200 (except for the PFPE pumps) Service life may be extended through the use of an oil filter
Technical Data
Viscosity at 40 C (104 F) Viscosity at 20 C (68 F) Viscosity at 100 C (212 F) Viscosity at 99 C (210 F) Flash point Vapor pressure at 100 C (212 F) Pour point Middle molecular weight mm2/s mm2/s mm2/s mm2/s C (F) mbar (Torr) C (F) g/mol
HE-200
58 9 224 (435) 3.9 x 10-4 (2.9 x 10-4) -10 (14) 480
HE-1600
140
7 Not known 2) 2.7 x 10-4 (2.0 x 10-4) -40 (40) 3000
01.0 litre (1 qt) 03.8 litres (1 gal) 18.9 litres (5 gal) 208 litres (55gal) 0.9 kg (2 lbs) 1.8 kg (4 lbs) 7.2 kg (16 lbs)
HE-200
Part No. 98 198 006 Part No. 98 198 007 Part No. 98 198 008 Part No. 98 198 010
HE-1600
Part No. 898 564-1 Part No. 898 564-2 Part No. 898 564-4
Please note that the technical data stated are only typical data. Slight variations from batch to batch must be expected. The technical data stated here can not be taken as assured properties 1) Resistance to decomposing is very much dependent on the share of acrylonitrile in the NBR 2) Caution: Perfluorinated polyether will, when being decomposed at temperatures over 290 C (554 F), release toxic and corrosive gases For this reason open fires must be avoided in the workspace where PFPE is being used. Do not smoke in the workspace where PFPE is being used Leybold Vacuum Full Line Catalog 2006
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Sales and Service Net Worldwide

Germany
Leybold Vacuum GmbH Bonner Strasse 498 D-50968 Cologne Phone: +49-221-347 1234 Fax: +49-221-347 1245 sales@leybold.com Leybold Vacuum GmbH Sales Area North/East Branch office Berlin Buschkrugallee 33 1. Obergeschoss D-12359 Berlin Phone: +49-30-435 609 0 Fax: +49-30-435 609 10 sales.berlin@leybold.com Leybold Vacuum GmbH Sales Area South/Southwest Branch office Munic Karl-Hammerschmidt-Strasse 38 D-85609 Aschheim/Dornach Phone: +49-89-357 33 90 Fax: +49-89-357 33 933 sales.muenchen@leybold.com service.muenchen@leybold.com Leybold Vacuum GmbH Sales Area West Branch office Cologne Emil-Hoffmann-Strae 43 D-50996 Cologne-Suerth Phone: +49-221-347 1270 Fax: +49-221-347 1291 sales.koeln@leybold.com Leybold Vacuum GmbH Service Center Emil-Hoffmann-Strae 43 D-50996 Cologne-Suerth Phone: +49-221-347 1439 Fax: +49-221-347 1945 service@leybold.com Leybold Vacuum GmbH Mobile after sales service Emil-Hoffmann-Strae 43 D-50996 Cologne-Suerth Phone: +49-221-347 1765 Fax: +49-221-347 1944 kundendienst@leybold.com Leybold Vacuum Dresden GmbH Zur Wetterwarte 50, Haus 304 D-01109 Dresden Service: Phone: +49-351-88 55 00 Fax: +49-351-88 55 041 info@leybold-dresden.de www.leybold-dresden.de
Europe
Belgium Leybold Vacuum Nederland B.V. Belgisch bijkantoor Leuvensesteenweg 542-9A B-1930 Zaventem Sales: Phone: +32-2-711 00 83 Fax: +32-2-720 83 38 sales.belgium@leybold.com Service: Phone: +32-2-711 00 82 Fax: +32-2-720 83 38 service.belgium@leybold.com France Leybold Vacuum France S.A. 7, Avenue du Qubec Z.A. de Courtaboeuf, B.P. 42 F-91942 Courtaboeuf Cedex Sales and Service: Phone: +33-1-69 82 48 00 Fax: +33-1-69 07 57 38 sales.orsay@leybold.com Leybold Vacuum France S.A. Valence Factory 640, Rue A. Bergs - B.P. 107 F-26501 Bourg-ls-Valence Cedex Phone: +33-4-75 82 33 00 Fax: +33-4-75 82 92 69 marketing.valence@leybold.com Great Britain Leybold Vacuum UK Ltd. Unit 2 Silverglade Business Park Leatherhead Road GB-Chessington Surrey KT9 2QL Sales: Phone: +44-13-7273 7310 Fax: +44-13-7273 7001 sales.uk@leybold.com Service: Phone: +44-13-7273 7320 Fax: +44-13-7273 7003 service.uk@leybold.com Italy Leybold Vacuum Italia S.p.A. 8, Via Trasimeno I-20128 Milano Sales: Phone: +39-02-27 22 31 Fax: +39-02-27 20 96 41 sales@leybold.it Service: Phone: +39-02-27 22 31 Fax: +39-02-27 20 96 41 service@leybold.it Field Service Base Z.I.Le Capanne I-05021 Acquasparta (TR) Phone: +39-0744-93 03 93 Fax: +39-0744-94 42 87 service@leybold.it Netherlands Leybold Vacuum Nederland B.V. Computerweg 7 NL-3542 DP Utrecht Sales and Service: Phone: +31-346-58 39 99 Fax: +31-346-58 39 90 sales.netherlands@leybold.com service.netherlands@leybold.com Spain Leybold Vacuum Spain, S.A. C/. Huelva, 7 E-08940 Cornell de Llobregat (Barcelona) Sales: Phone: +34-93-666 46 16 Fax: +34-93-666 43 70 sales.spain@leybold.com Service: Phone: +34-93-666 49 51 Fax: +34-93-685 40 10 Sweden Leybold Vacuum Scandinavia AB Box 9084 SE-40092 Gteborg Sales and Service: Phone: +46-31-68 84 70 Fax: +46-31-68 39 39 info@leybold.se Visiting/delivery address: Datavgen 57B SE-43632 Askim Switzerland Leybold Vacuum Schweiz AG Leutschenbachstrasse 55 CH-8050 Zrich Sales: Phone: +41-1-308 40 50 Fax: +41-1-302 43 73 sales@leybold.ch Service: Phone: +41-1-308 40 62 Fax: +41-1-308 40 60
Asia
P.R. China Leybold Vacuum (Tianjin) International Trade Co., Ltd. Beichen Economic Development Area (BEDA), No. 8 Western Shuangchen Road Tianjin 300400, China Sales and Service: Phone: +86-22-2697 0808 Fax: +86-22-2697 4061 Fax: +86-22-2697 2017 leybold@leybold.com.cn Leybold Vacuum (Tianjin) Equipment Manufacturing Co., Ltd. Beichen Economic Development Area (BEDA), No. 8 Western Shuangchen Road Tianjin 300400, China Phone: +86-22-2697 0808 Fax: +86-22-2697 4061 Fax: +86-22-2697 2017 leybold@leybold.com.cn Leybold Vacuum (Tianjin) International Trade Co., Ltd. Beijing Branch: 1-908, Beijing Landmark Towers 8 North Dongsanhuan Road Chaoyang District Beijing 100004, China Sales and Service: Phone: +86-10-6590-7607 Fax: +86-10-6590-7622 Leybold Vacuum (Tianjin) International Trade Co., Ltd. Shanghai Branch: Add: No. 33, 76 Futedong San Rd., Waigaoqiao FTZ , Shanghai 200131, China Sales and Service: Phone: +86-21-5064-4666 Fax: +86-21-5064-4668 leybold_sh@leybold.com.cn Leybold Vacuum (Tianjin) Guangzhou Branch: Add: G/F,#301 Building, 110 Dongguangzhuang Rd. Tianhe District, Guangzhou 510610, China Sales: Phone: +86-20-8723-7873 Phone: +86-20-8723-7597 Fax: +86-20-8723-7875 leybold_gz@leybold.com.cn India Leybold Vacuum India Pvt Ltd. A-215 Road No. 30 MIDC Wagle Industrial Estate Thane(W) - 400 604 Maharashtra India Sales and Service: Phone: +91-22-2581 2929 Fax: +91-22-2581 2626 ivt2004@yahoo.com Japan Leybold Vacuum Japan Co., Ltd. Head Office Tobu A.K. Bldg. 4th Floor 23-3, Shin-Yokohama 3-chome Kohoku-ku, Yokohama-shi Kanagawa-ken 222-0033 Sales: Phone: +81-45-4713330 Fax: +81-45-4713323 Leybold Vacuum Japan Co., Ltd. Osaka Branch Office MURATA Bldg. 7F 2-7-53, Nihi-Miyahara Yodogawa-ku Osaka-shi 532-0004 Sales: Phone: +81-6-6393-5211 Fax: +81-6-6393-5215 Leybold Vacuum Japan Co., Ltd. Tsukuba Technical S.C. Tsukuba Minami Daiichi Kogyo Danchi 21, Kasumi-no-Sato, Ami-machi, Inashiki-gun Ibaraki-ken, 300-0315 Service: Phone: +81-298-89-2841 Fax: +81-298-89-2838 Korea Leybold Vacuum Korea Ltd. #761-4, Yulkeum-ri, SungHwan-eup, Cheonan-City Choongchung-Namdo, 330-807, Korea Sales: Phone: +82-41-580-4420 Fax: +82-41-588-3737 Service: Phone: +82-41-580-4415 Fax: +82-41-588-3737 Singapore Leybold Vacuum Singapore Pte Ltd. No.1, International Business Park, B1-20B, The Synergy Singapore 609917 Sales and Service: Phone: +65-66652910 Fax: +65-65668202 vacuum@leyboldvac.com.sg Taiwan Leybold Vacuum Taiwan Ltd. No 416-1, Sec. 3 Chung-Hsin Rd., Chu-Tung Hsin-Chu, Taiwan, R.O.C. Sales and Service: Phone: +886-3-5833988 Fax: +886-3-5833999
America
USA Leybold Vacuum USA Inc. 5700 Mellon Road Export, PA 15632 info@leyboldvacuum.com Sales: Eastern & Central time zones Phone: +1-724-327-5700 Fax: +1-724-325-3577 Pacific, Mountain, Alaskan & Hawaiian time zones Phone: +1-480-752-9191 Fax: +1-480-752-9494 Service: Phone: +1-724-327-5700 Fax: +1-724-325-3577
Hotline Sales: +49-221-347 1234 Service: +49-221-347 1765

sales@leybold.com service@leybold.com
02.06
LV_08370_2006
Leybold Vacuum Products Inc. 5700 Mellon Road Export, PA. 15632-8900 Phone: 724-327-5700 Fax: 724-325-3577 info@leyboldvacuum.com
Leybold Vacuum GmbH Bonner Strasse 498 D-50968 Cologne Phone: +49-221 347- 0 Fax: +49-221 347-1250 info@leybold.com
vacuum
www.leybold.com
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Oerlikon Leybold Roots Blower Vacuum Pump Catalog

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Oerlikon Leybold Roots Blower Vacuum Pump Catalog

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173.01.

Roots Vacuum Pumps

Leybold Vacuum Full Line Catalog 2006

Roots Vacuum Pumps

Applications and Accessories

Leybold Vacuum Full Line Catalog 2006

Roots Vacuum Pumps

General Information on Roots Vacuum Pumps

Shifting the Operating Pressure into the High Vacuum Range

Multiplied Pumping Speed

Pump system with RA Roots vacuum pumps

Leybold Vacuum Full Line Catalog 2006

Roots Vacuum Pumps

Leybold Vacuum Full Line Catalog 2006

Roots Vacuum Pumps

Chemistry Central Vacuum Supply Systems

Leybold Vacuum Full Line Catalog 2006

Roots Vacuum Pumps

Pump system consisting of RUVAC WAU 1001 and SOGEVAC SV 200

Leybold Vacuum Full Line Catalog 2006

Roots Vacuum Pumps

RUVAC WA/WAU, WS/WSU

Leybold Vacuum Full Line Catalog 2006

Roots Vacuum Pumps

Accessories Frequency Inverter RUVATRONIC RT 5

Leybold Vacuum Full Line Catalog 2006

Roots Vacuum Pumps

RUVAC WA/WAU Roots Vacuum Pumps with Air-Cooled Flange-Mounted Motors

Advantages to the User

Leybold Vacuum Full Line Catalog 2006

Roots Vacuum Pumps

Dimensional drawing for the RUVAC WA/WAU pumps

Leybold Vacuum Full Line Catalog 2006

Roots Vacuum Pumps

l (qt) 0.65 (0.69) / 0.6 (0.63) 0.65 (0.69) / 0.6 (0.63)

0.6 (0.63) 63 ISO-K 3" ANSI

0.6 (0.63) 63 ISO-K 3" ANSI 85/89 (187.4/196.2) < 64

1.0 (1.06) 63 ISO-K 3" ANSI

1.0 (1.06) 63 ISO-K 3" ANSI

Weight WA/WAU Noise level 7)

kg (lbs) 85/89 (187.4/196.2) dB(A) < 64

128/133 (282.2/293.3) 128/133 (282.2/293.3) < 67 < 67

Leybold Vacuum Full Line Catalog 2006

Roots Vacuum Pumps

WA/WAU (H) 1001 50 Hz 60 Hz

380-420 / 655-725 400 / F 7.5 (10.0) 3000/3600 3600 55 1. Filling 5) / 2. Filling

440-480 / / 460 F 7.5 (10.0) 3000/3600 3600 55 1. Filling 5) / 2. Filling

1.3 (1.37) 100 ISO-K 4" ANSI

1.3 (1.37) 100 ISO-K 4" ANSI

1.6 (1.69) 160 ISO-K 6" ANSI 400/406 (882/895.2) < 80

1.6 (1.69) 160 ISO-K 6" ANSI 400/406 (882/895.2) < 80

Weight WA/WAU Noise level 7)

kg (lbs) 220/225 (485.1/496.1) 220/225 (485.1/496.1) dB(A) < 75 < 75

Leybold Vacuum Full Line Catalog 2006

Roots Vacuum Pumps

WA/WAU(H) WA/WAU(H) WA/WAU(H) 501 1001 2001

5000 cfm 1000 500

Total pressure Partial pressure

Pumping speed of the RUVAC WA/WAU, 50 Hz