Semiconductor Technology: ELCT 705 Midterm Exam (Fall 2014) Course Instructor: Dr. Hassan Mostafa
Semiconductor Technology: ELCT 705 Midterm Exam (Fall 2014) Course Instructor: Dr. Hassan Mostafa
Faculty of Information
Engineering & Technology (IET)
Electronics Engineering Dept.
Bar Code
Instructions:
1. Answer all questions.
2. The exam consists of xx questions in xx pages.
3. A cheat sheet is attached at end of this booklet.
4. The exam allowed time is 90 minutes.
5. Electronic calculators are allowed.
6. Clearly show all steps used in your solutions.
7. This is a closed book exam.
Please, do not write anything on this page
Question
Total Mark
Mark
Out of
Midterm Exam
Cheat sheet:
You may make use of the following
Semiconductor devices
Diode built-in voltage and
depletion region width:
Wafer Selection
Wafer resistivity:
CZ maximum pulling speed:
Segregation coefficient:
Photolithography
Photolithography and
Numerical Aperture:
Depth of focus:
Modulation Transfer Function:
Proximity system minimum feature size:
Resist contrast:
Resist critical MTF:
Midterm Exam
erfc(z) (0.56/z)*exp(-z2)
erfc(z) 1.12*z
for z>>1
for z<<1