Frequency Response of Thin Film Chip Resistors

V I S H AY I N T E R T E C H N O L O G Y, I N C .
Resistive Products
Technical Note
Frequency Response of Thin Film Chip Resistors

ABSTRACT
EXPERIMENTAL
High frequency measurements from 0.1 GHz to 40 GHz were

performed on industry standard flip chip thin film resistors
from Vishay Thin Film. The results of these measurements
are reported in this paper. A lumped circuit model is
presented that accurately predicts the response of various
part values and case sizes. The results of the measurements
and model are combined to demonstrate basic design
guidelines for microwave thin film resistors.
Precision thin film resistors from 50 to 1000 were

constructed on high performance 99.5 % alumina substrates
with case sizes of 0201, 0402, and 0603, (see table 1) and
two termination methods (i) flip chip and (ii) wrap around, see
figure 1. The resistive material was physical vapor deposited
(PVD) nickel-chrome (NiCr) with a 50 ppm thermal
coefficient of resistance (TCR). An optimized laser trim was
used to provide a balanced resistor with low internal parasitic
effects. The resistor element was protected with overcoats
designed for electrical, mechanical, and environmental
protection.
INTRODUCTION
As the industry extends products into the GHz range, an
understanding and improvement of resistive products
performance needs to be extended into this range.
Historically, thin film resistors have been used in areas
requiring high-precision, long-term stability, and low
temperature
coefficient
of
resistance.
Frequency
performance of thin film resistors, in excess of 100 MHz,
typically involves a roll-off of the impedance to either
inductive or capacitive-dominated values, commonly
referred to as parasitic impedance. (1)(2)(3)(4)
Microwave frequency measurements were made on various
thin film part values and case sizes. Correlation of the
experimental data to a mathematical lumped circuit model
demonstrated a relation of parasitic impedance to case size,
DC resistance, and trim style. Extrapolation of the model to
different part values and higher frequencies was used to
predict roll-off performance and demonstrate design
guidelines for high-frequency (0.1 GHz to 100 GHz) thin film
resistors.
High frequency testing was performed on parts mounted to

quartz test boards. Quartz test boards were chosen to
minimize the contribution of the board effects at high
frequencies. The quartz test boards were fabricated using
microstrip technology; the RF ground plane is located on the
reverse side. All parts were mounted on identical boards and
tested independently, see figure 2. Wrap around parts were
mounted with the resistor up and flip chip parts were
mounted with the resistor down, see figures 1 and 2.
Fig. 1 - Termination styles:

Left - flip chip, resistor down
Right - wrap around, resistor up
TABLE 1 - PARAMETERS FOR DIFFERENT

CASE SIZES UTILIZED
LENGTH WIDTH
(inch/
(inch/
mm)
mm)
RESISTOR
AREA
(inch2/
mm2)
MODEL INTERNAL
COEFFICIENTS
C
(pF)
L
(nH)
0.0206
1.73 x 10-5
10-3
0201
0.02/
0.51
0.01/
0.25
0.00004/
0.02581
0402
0.04/
1.02
0.02/
0.51
0.000352/
0.22710
0.0262
0402
(wrap)
0.04/
1.02
0.02/
0.51
0.000352/
0.22710
0.0392
0.1209
0603
0.064/
1.626
0.032/
0.813
0.000816/
0.52645
0.0403
0.0267
Document Number: 60107

Revision: 04-Feb-09
1.89 x
Fig. 2 - Mounting on resistors on RF

grounded quartz substrates for testing
Left - flip chip, resistor down
Right - wrap around, resistor up
For technical questions, contact: thin-film@vishay.com
www.vishay.com
1
TECHNICAL NOTE
CASE
SIZE
Technical Note
Vishay
C: internal shunt capacitance
L: internal inductance
LC
R: resistance
LC
LC: external connection inductance

CG
CG
CG: external capacitance to ground
Fig. 3 - Lumped equivalent circuit used for modeling, a transmission line model was added
for the resistors landing pad and the test substrates mounting pad effects
Modelithics, Inc. was contracted to perform S-parameter

measurements. The S-parameter data was then used to
extract the lumped circuit topology shown in figure 3, where
the chips contact pads are included in the transmission line
model of the test substrates mounting pads. The topology
from figure 3 has been used by other experimentalist, the
terms are described as (i) internal capacitance as a coupling
of the pads, (ii) external capacitance as a coupling to the
boards ground plane, (iii) internal and external inductance as
the finite length of the resistor and pads, and (iv) internal
inductance is also affected by the skin effect, or the
decreasing of the effective thickness resistor as the
frequency increases and is frequency depedent. (2)(4)(6)(7)
TECHNICAL NOTE
RESULTS
Figures 4 through 6 show the impedance response
normalized to the device value for 0201, 0402 and 0603 case
sizes. These graphs show that the resistors tend to have
either a dominant shunt capacitance, or series inductance,
depending on the resistor value. These results are in
agreement with other publications. (1)(8) Papers where only
values lower than 100 were measured tend to correlate the
observed series inductance to the skin effect or surface
impedance used in waveguide and resonant cavity
applications. (2)(4)(5)(9)(10) These papers note that the
increasing impedance is proportional to the square root of
the frequency. (2)(4) The skin effect however does not support
the decreasing impedance for higher resistor values. We
have chosen instead to model the results with a lumped
circuit mathematical representation, figure 3. To model the
observed decreasing impedance a fixed internal impedance
was included in the topology (see figure 3) to describe the
finite length of the resistor and provide a mechanism for the
observed increasing impedance of lower ohm resistor
values. (2)(4)(6)(7)
The fitted results for the lumped circuit model are plotted with
the data in figures 4 to 6. The fitted model coefficient values
are listed in table 1 and figure 7. The fitted results of part
values above 100 are typically very good. Fitted results of
the part values less than 100 do not completely describe
all the parts, i.e. the 0201 case has a small peak at about
30 GHz that is not described by the model, see inset in
figure 4.
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Fig. 4 - 0201 flip chip

The minor peak for the smaller parts at 30 GHz is not accurately
modeled by the circuit of figure 3 (see inset). This is the smallest
case size tested and had the best impedance performance.
Fig. 5 - 0402 case size

Both the (a) wrap and (b) flip chip terminations are plotted. The flip
chip outperforms the wrap termination. The 75 flip chip
demonstrates the 0201 difficulty with modeling small peaks.

Revision: 04-Feb-09
Technical Note
Vishay

Peaks are seen in all the case sizes, particularly for 100
and less. The external and internal inductive, resistive, and
capacitive (LRC) equivalent circuits, shown in figure 3, can
describe this peak mathematically. Large peaks; such as
with the 0402 wrap; are modeled very well by this circuit and
small peaks; such as exhibited with the 0201 case size; are
more difficult to model without modifications to this circuit.
Fig. 8 - Case size comparison of 0201, 0402, and 0603

Plot (a) is 50 , (b) 100 , (c) 500 , and (d) 1000 .
The 0201 case size clearly out performs 0402 and 0603 case size.
Fig. 6 - 0603 flip chip

The 100 , and to some extent the 200 part, demonstrate the
0201 difficulty with modeling small peaks above 25 GHz.
Fig. 9 - Prediction of devices from the model for (a) 0402 wrap, (b)
0402 flip chip, and (c) 0402 flip chip with L-cut trim. By extending the
range of the model results indicates the presence and approximate
location of the peak observed with some of the tested devices.
As the case size is increased the performance and therefore

the model coefficients are affected. Figure 8 plots the
impedance performance for different part values and case
sizes. The smallest case size, 0201, performs better than
both the 0402 and 0603 case sizes for all part values. The
differences in the 0402 and 0603 case sizes are moderate
and occasionally reversed and may be related to the device
dimensions. The maximum area the resistor can cover for
each case size is given in table 1. The ratios of the resistor
area by case size (0603 : 0402 : 0201) are 1 : 2.32 : 20.4. The
dimension change to 0201 from 0603 or 0402 is significant
and can explain the large difference in device performance.
Revision: Revision: 04-Feb-09
Modeling results extending beyond the measurement range

can be used to predict the LRC peak location and magnitude.
Figure 9 extends the model to 150 GHz for the 0402 case
size; (a) 50 wrap, (b) 50 flip, and the (c) 100 L-cut. The
wrap termination data displays an almost complete peak; the
flip and L-cut chips show different regions of the peak and its
predicted location and magnitude. The flip chip data has the
real part displaying a positive slope with an inflection point in
the imaginary data the model continues beyond these points
and predicts a 60 GHz peak. An L-cut on a 100 flip chip has
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TECHNICAL NOTE
Fig. 7 - Modeling coefficients from figure 1. The large difference

in impedances for case sizes clearly demonstrates the
importance to minimize the footprint of the device.
The external modeling coefficients, figure 7, show similar

results to the case size impedance performance, figure 8.
The external coefficients are clearly dependant on case size
and part values. The smaller case size gives smaller
coefficients and the inductance coefficients increase for
increasing part value while the capacitance coefficients
remain relatively constant. The internal coefficients do not
have a large dependency on size or part value; rather their
average values are included in table 1.
Technical Note
Vishay

the imaginary part displaying a positive slope with a inflection
point in the real data; the model continuing beyond 40 GHz
predicts the same 60 GHz peak with a larger magnitude.
Terminations were tested for the 0402 case size, figure 3.
The impedance frequency response for the flip style was less
dependant on part value from 50 to 200 . The use of
microstrip test boards caused the wrap around termination
ground plane to be located further away from the resistor
than the flip chip. The additional distance from the ground
plane and increase in lead length will affect the resultant
performance of the device. (5)
Trim methods were tested on the 100 , 0402 and 0603

products, figure 10. A plunge cut with a bend at the end for
fine trim (L-cut) and a block pattern with a two or more
straight plunge cuts to form a serpentine pattern (S-cut) were
tested and compared to the standard edge sense trimming,
figure 11. The balanced edge sense trim outperformed the
S-cut, which out preformed the L-cut. In the case of the 0402
the edge and S-cut were similar, while for the 0603 the S-cut
was more similar to the L-cut.
CONCLUSIONS
Performance at high frequency is dependent on the case
size, trim method, part value and termination style. The
reduction in parasitic impedance for smaller cases sizes is
consistent with the smaller landing pads and device
dimension. The large change between 0201 and the 0402
and 0603 can be related to significant reduction in maximum
resistor area. The ratios of the maximum areas for the
resistors by case size (0603 : 0402 : 0201) are 1 : 2.32 : 20.4.
The small change in device area for the 0402 and 0603 case
sizes is most likely related to the small differences and
occasional reversal in the device performance.
Fig. 10 - Comparison of trim methods for the (a) 0402

and (b) 0603 case sizes. The edge sense trim has
the best impedance performance.
Trim style does affect the impedance performance. The

difference between an S- and L-cut is not quantifiable or
consistent, but their impedance performance is reduced from
that of balanced edge sense trimmed method used for the
standard resistors. The difference in S- and L-performance
may be related to the depth o location of the trim in the
resistor structure for two different trim styles, this was not
monitored or recorded. Vishay Thin Film has made
standardized the balanced edge sense trim method for its FC
series high frequency thin film chip resistors.
(a)
(b)
TECHNICAL NOTE
Previous papers have described resistors with a skin effect

type model. We have found the various impedance
responses for different part values are not completely
supported by a skin effect only model. We have utilized a
lumped circuit model with capacitor and inductors to model
and predict the frequency response of standard flip chip
resistors manufactured by Vishay Thin Film (FC series).
Termination style differences, wrap and flip, can be

enhanced by the type of test boards used. The microstrip
style used has the RF-ground plane located on the backside
of the board. The flip chips were mounted with the resistors
down and the wrap terminations with the resistors up. Thus
the amount of material and its effective dielectric constant
between the resistor and ground was different in these two
cases, and can affect the RF performance of the device.
Vishay Thin Film provides both wrap and flip terminations in
its FC series high frequency thin film chip resistors.
(c)
Fig. 11 - Trim methods: (a) balanced edge sense,

(b) L-cut, and (c) S-cut
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4
We would like to thank Modelithics, Inc., Tampa, FL, for all

the high frequency measurements and analytic modeling.

Revision: 04-Feb-09

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V I S H AY I N T E R T E C H N O L O G Y, I N C .