Product Catalog

Your solutions for flow

measurements

www.Siargo.com

2013 SIARGO LTD.

 Siargo Ltd.

THE COMPANY
Siargo specializes MEMS flow sensing technology and manufactures MEMS
flow sensors, modules, and system products that are shipped worldwide. Our
global technical team is working 24/7 and ready to provide timely solutions to
your even very special requirements.

Our patented low power and integrated flow system technology and know-hows
excel in many applications for flow measurements. We are committed to meet
our customers needs and offer the value-added features at a very competitive
cost.

Achieved by our proprietary MEMS integration and package technology, the

sensors can measure gas flow in a pipe diameter from 0.5 mm up to 2 m and with
a flow speed from 5 mm/sec up to 75 m/sec without sacrificing measurement
accuracy.

Our products have been deployed to utility gas metering, automotive

applications, medical gas sensing, food and pharmaceutical industry gas
management, environmental and analytical instrumentation, to name just a
few.

Innovation continuously leads the product technology

Quality precisely ensures the product performance

Service timely provides the product technical supports

Integrated mass Package

flow sensors technology
enable the enables
rangeability applications

Network capability Trace flow

detection Ultra-low power
provides easy data
capability consumption
process

Low pressure loss

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Siargo Ltd.

T he MEMS flow sensors bear a number of merits compared to the traditional thermal
mass flow sensors. It is because not only the sensor manufacture process ensures a
high degree of consistency among each individual sensor, but also the process allows
integration of additional features that could significantly enhance the functionality and
extend the application scopes.

MEMS mass flow sensors have become one of the choices for flow measurement since 1980s.
Up to date, the applications are however applicable to clean gases with a limited measurable
flow speed. Since its inception in the earlier 2004, Siargo has been dedicated to develop state-
of-the-art MEMS mass flow sensors as well as its package technology aiming to enhance the
product performance, functions as well as reliability. Our sensors focus on the innovative
integrations and product performance that enables various applications in many challenging
circumstances.

Our flow sensing products feature

Integrated multiple mass flow sensors with extended dynamic rangeability
Ultra low power consumption
High sensitivity at low flow regime
Innovative package technology that provides self-flow conditioning
Standard and user friendly interfaces
Low pressure loss
Easy and ready for networking
User friendly installation
Ex ia IIC T4 / Ex d IIB T4 and up to IP66 rating

Flow direction

Time-averaged velocity profile boundary

Free stream Turbulent

Laminar

Inserted sensor

Sensor

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Contents
Mass Flow Sensors

FS1015 Series Mass Flow Sensors 5

FS4001 Series Mass Flow Sensors 7
FS4003/08 Series Mass Flow Sensors 9
FS5001 Series Mass Flow Sensors 11
FS6022 Series Mass Flow Sensors 13
FS7002 Series Mass Flow/Clog Sensors 15
FS8001 Series Mass Flow Sensors 16

Mass Flow Meters

MF4000 Series Manifold Mass Flow Meters 17

MF5000 Series Mass Flow Meters 19
MF5200 Series Oxygen Flow Meters 21
MF5600 Series Mass Flow Meters with Detachable Display 23
MF5700 Series Portable Mass Flow Meters 25
MF5806 Series Oxygen Flow Meters 27
In-line Mass Flow Meters 29
Insertion Mass Flow Meters 31
Low Pressure Mass Flow meter 33

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Siargo Mass Flow Products - Gas Flow Sensor FS1015 Series

FS1015 Series
Gas Flow Sensors

The Products

FS1015 series mass flow sensors are specially designed for medical equipment flow monitor and control
applications, and are made with Siargo's world leading proprietary MEMS mass flow sensors and the smart
electronic control system. The sensors directly measure mass flow in the designed channel with a low pressure
loss. The current models can be readily applied to ventilators and anesthesia equipments.
FS1015 can measure a flow up to 150 SLPM. ISO-15mm connection is readily applicable to ventilators and/or
anesthesia equipments.

Features and Applications

! MEMS thermal mass flow sensor
! Excellent rangeability with integrated multiple sensing elements
! High stability at null and full scale
! Fast response
! Low power consumption
! Low pressure loss

Mechanical Dimensions

5 4 3 2 1

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Siargo Mass Flow Products - Gas Flow Sensor FS1015 Series

Specifications

Parameter FS1015 Unit

Flow Range 0 ~ 100; 0 ~ 150 SLPM

Accuracy ± (2.0 + 0.5 FS) %

Repeatability 0.5 %
Response Time 8 (Max.) msec

Power Supply 5 (± 1%) Vdc

Output Linear: Analog 0.5 ~ 4.5 Vdc

Pressure Drop (Max.) 1300 Pa

Max. Working Pressure 0.2 MPa

Working Temperature -10 ~ +55 ℃

Storage Temperature -20 ~ +65 ℃
Humidity < 95 %RH (No icing or condensation)

Mechanical Connection ISO - 15 mm

Pins Out 5 Pins, NS-TECH CD R-5
Calibration* Air @ 20 °C, 101.325 kPa
Weight 21.5 g

* For other gases calibration, please contact Siargo.

Product Selection

FS1015CL
Gas (A - air; C - CO2; N - N2; O - O2; R - Ar;
for other gases, please contact manufacturer.)

Connection (ISO - ISO 15mm)

Max. scale Flow Rate* (Selectable: 100 or 150 SLPM)

* Max. flow rate number only, for example, 100 meaning full scale flow rate of 100 SLPM;
For CO2, selectable: 100SLPM (without 150 SLPM).

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Siargo Mass Flow Products - Gas Flow Sensor FS4001 Series

FS4001 Series
Gas Flow Sensors

The Products

FS4001 series mass flow sensors are manufactured using Siargo s proprietary MEMS flow sensor and
package technology. The sensors are specially designed for low flow rate range applications from 0 ~ 30 sccm
up to 0 ~ 1000 sccm. The maximum flow rate for each model is manufactured via specially designed package
as well as smart electronics so that the optimal sensitivity would be achieved.

The packaging enclosure is made of the chemically inert and thermally stable polycarbonate material. The
maximum over pressure rating is 5 bar (73 psi) that is benefitted from Siargo s unique MEMS sensor chip
structure, special packaging technology and the rugged sensor housing.

Features and Applications

! Low mass flow range from 0 ~ 30 sccm up to 0 ~ 1000 sccm

! Outstanding accuracy of ±1.5 %
! Fast response (4 ms selectable)
! Pressure rating up to 5 bar (73 psi)
! Analog and/or digital user interface
! Easy installation

Mechanical Dimensions

5 1
4 3 2

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Siargo Mass Flow Products - Gas Flow Sensor FS4001 Series

Specifications

Parameter FS4001 Unit

Flow Range 0 ~ 30, 100, 200, 500, 1000 sccm

Turn-down Ratio 100:1

Accuracy ± (1.5 + 0.5 FS) %
Repeatability 0.25 %
Null Shift ± 30 mV

Output Shift ± 0.12 %/℃

Response Time 65 (Default, 4, 8, 16, 33, 131 selectable) msec

Power Supply 8 ~ 18 Vdc, 50 mA

Output Linear: RS232, Analog 0.5 ~ 4.5 Vdc

Pressure Drop (Max.) 350 Pa

Max. Working Pressure 0.5 MPa

Working Temperature -10 ~ +55 ℃

Storage Temperature -20 ~ +65 ℃

Humidity <95 %RH (No icing or condensation)
Calibration* Air @ 20 ℃, 101.325 kPa

Weight 15 g

* For other gases calibration, please contact Siargo.

Product Selection

FS4001

Gas (A - air; C - CO2; E - He; H - H2; N - N2; O - O2; R - Ar;

For other gases, please contact Siargo.)

Output** ( V - analog output; CV - analog output and RS232)

Max. flow rate* (selectable: 30, 100, 200, 500 or 1000 sccm)

Product Series Name

* Max. flow rate number only, for example, 100 means max. flow rate of 100 sccm.
For CO2, selectable: 30, 100, 200, 500 or 750 sccm (without 1000sccm);
** The sensor standard output is analog, while digital output is optional.

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Siargo Mass Flow Products - Gas Flow Sensor FS5001 Series

FS5001 Series
Gas Flow Sensors

The Products

FS5001 series mass flow sensors are designed for general purpose flow monitoring and control
applications. The sensors directly measure mass flow in the designed channel with trace flow detection
capability. The lowest flow it can detect is 20 μ L/min. These sensors can readily be applied for manifold flow
assembly, leak detection, HVAC control, clean room air flow or nitrogen flush monitoring and control,
environmental equipments such as air sampler, analytical instrumentation such as GC spectrometer.
FS5001 can be configured to measure flow full scale from 100 sccm to 1000 sccm (1 SLPM). With a full
spectrum of customizable adaptors, it can be plug-and-play in many applications.

Features and Applications

! Low mass flow detectable from 0 ~ 100 sccm up to 0 ~ 1000 sccm

! Outstanding accuracy of 1.5%

! Response time < 100 ms
! Pressure rating up to 5 bar (73 psi)
! Output: analog or both analog and digital

Mechanical Dimensions

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Siargo Mass Flow Products - Gas Flow Sensor FS5001 Series

Specifications

Parameter FS5001 Unit

Flow Range 0 ~ 100, 200, 500, 1000 sccm

Turn-down Ratio 100:1

Accuracy ± (2.0 + 0.5 FS) %
Repeatability 0.5 %
Null Shift ± 30 mV

Output Shift ± 0.12 %/℃

Response Time 100 (default, 50, 200, 500, 1000 selectable) msec

Power Supply 8 ~ 15 Vdc, 50 mA

Output Linear: I2C, Analog 0.5 ~ 4.5 Vdc

Pressure Drop (Max.) 900 Pa

Working Pressure -0.08~+0.5 MPa

Working Temperature -10 ~ +55 ℃

Storage Temperature -20 ~ +65 ℃

Humidity <95 %RH (No icing or condensation)
Calibration* Air @ 20 ℃, 101.325 kPa

* For other gases calibration, please contact Siargo.

Product Selection

FS5001

Gas (A - air; C - CO2; E - He; H - H2; N - N2; O - O2; R - Ar;

For other gases, please contact Siargo.)

Output** ( V - analog output; EV - analog output and I2C)

Max. flow rate* (selectable: 100, 200, 500 or 1000 sccm)

Product Series Name

* Max. flow rate number only, for example, 100 means max. flow rate of 100 sccm.
For CO2, selectable: 100, 200, 500 or 750 sccm (without 1000sccm);
** The sensor standard output is analog, while digital output is optional.

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Siargo Mass Flow Products - Gas Flow Sensor FS6022 Series

FS6022 Series
Gas Flow Sensors

The Products

FS6022 series mass flow sensors are manufactured using Siargo's proprietary MEMS flow sensor and
package technology. The sensors are specially designed for the application of medical equipment such as
personal ventilators and CPAP machines for flow monitoring and control with two flow rate ranges of 0 ~ 250 SLPM
and 0 ~ 300 SLPM, respectively. The compact package design enables a large dynamic flow range with a flow
resistance less than <0.5 cmH2O/L/sec. This package withstands a maximum pressure of 0.2 MPa (29 psi) without
compromising performance.

The mechanical interface is the standard ISO-22 mm combined male/female medical connector that allows the
sensor to be readily applied to equipment with a minimal possible dead space.

Features
! Mass flow range: 0 ~ 250 SLPM, 0 ~ 300 SLPM
! Fast response time: 8 ms typical
! Highly sensitive in small flow rate
! Low power consumption
! Specially designed for medical equipment
! Sterilizable for reuse

Mechanical Dimensions

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Siargo Mass Flow Products - Gas Flow Sensor FS6022 Series

Specifications

Parameter FS6022A FS6022B Unit

Flow Range 0 ~ 250; 0 ~ 300 0 ~ ±250; 0 ~ ±300 SLPM
Turn-down Ratio 100 : 1
Accuracy ± (2.0 + 0.5FS) %
Repeatability 0.5 %Reading
Null Shift ± 30 mV
Output Shift ± 0.12 %/°C
Response Time 8 ms
Output Linear: Analog 0 ~ 5 Vdc, RS232(TTL) Linear: Analog 0 ~ 2.5/2.5~5 Vdc, RS232(TTL)

Max. Flow Resistance <0.5 cmH2O/L/sec

Max. Operation Pressure 0.2 MPa

Power Supply 5 (± 1%) Vdc
Operating Current < 10 (no output load) mA

Working Temperature 0 ~ +60 °C

Storage Temperature -25 ~ +85 °C
Humidity < 95 %RH (No icing or condensation)

Mechanical Connection ISO - 22 mm

Pins Out 5 Pins, NS-TECH CD R-5
Calibration* Air @ 20 °C, 101.325 kPa
g
Weight 30.0
* For other gases calibration, please contact Siargo.

Product Selection

FS6022
Gas (A - air; B - N2O; C - CO2; N - N2; O - O2; R - Ar;
for other gases, please contact manufacturer.)

Output** (C - RS232(TTL); V - analog output; Options: V / CV)

Connection (ISO - ISO 22mm)

Max. Flow Rate* (selectable, 250 or 300 SLPM)

A - uni-directional; B - bi-directional;

* Max. flow rate number only, for example, 250 meaning full scale flow rate of 250SLPM;
For CO2 and N2O, selectable: 150 or 200 SLPM (without 250 and 300 SLPM) ;
** The sensor shipped with standard analog output. Digital output is optional.

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Siargo Mass Flow Products - Gas Flow/Clog Sensor FS7002 Series

FS7002 Series
Mass Flow/Clog Sensors

The Products

FS7002 series mass flow/clog sensors can be used for open air space flow measurement or applied for clog
sensing in an open space configuration. The sensor can measure air flow up to 10 m/sec with a fast response. The
compact design make the installation an easy task. Examples are clog sensing in LCD projector; HVAC air flow
monitoring, air fresher and fan status monitoring.

Features and Mechanical Dimensions

! Measure open space air flow up to 10 m/sec

! Fast response < 20 msec
! Compact miniature design
! Excellent sensitivity
! Bi-direction capability
! Additional customization available

Specifications

FS7002 - B FS7002 - C
Flow Range 0~5 0 ~ 10 m/sec
Repeatability 3% 2% %FS
Response time 20 ms
Power Supply 5±5% Vdc
Output Nonlinear, Analog
Null Output 0.2~0.8 Vdc
Full Scale Output 2.5~3.3 Vdc
Working Temperature -10 ~ +70 ℃
Storage Temperature -20 ~ +80 ℃
Humidity < 95%RH (No icing or condensation)
Insulation Resistance 20MΩ between the package case and the lead terminals (under 500 Vdc)

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Siargo Mass Flow Products - Gas Flow Sensor FS8001 Series

FS8001 Series
Gas Flow Sensors

Features
! High sensitivity
! Low pressure drop

! Miniature design for easy installation

Specification Typical Analog Output

Parameter FS8001-A FS8001-B Unit

Flow Range 0~500 sccm
6000
Accuracy ±6%FS
Analog output (mV)
Repeatability ±2%FS 5000
Response Time 5 ms
4000
Power Supply 12~24 VDC
Power consumption <12 mA 3000
Output Non-line ar analog voltage
2000
Output voltage 0.5~4.5 1.0~5.0 VDC
Max. Working Pressure 0.3 MPa 1000
Working Temperature 0~55 °C Mass Flow (sccm)
0
Storage Temperature -20~+65 °C 0 100 200 300 400 500
Humidity <95%RH, no icing or condensation
SM03B-SRSS-TB (JST)
Connector
Socket: 03SR-3S (JST)

Mechanical Dimensions and Electrical Connection

Connector: SM03B-SRSS-TB (JST)

Made by J.S.T. Mfg. Co., Ltd.

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