Clean Process Filters: E10 to U17 | HEPA/ULPA Panels

Megalam Fabsafe MD, MX, MG

Advantages
• Developed for safe use in • Individual efficiency test
microelectronic cleanrooms reports
and equipment • Zero leak guarantee
• Ideal for nanoparticle filtration • No organic outgassing from
(100 nm) test aerosol
• High dust holding capacity • Low outgassing adhesives
• 100% filter scan test for and gasket (no organic flame
guaranteed performance retardant)
• Filter scanned according • Manufactured and packed in
to EN1822, IEST or other cleanroom environment
required standards

Application: Microelectronic cleanrooms and equipment.

Nanoparticle filtration
Type: HEPA & ULPA filters
Frame: Extruded and anodised aluminium
Gasket: Low outgassing EPDM. Other on request
T I F I C AT
ER
EN Media: Glass fibre, Boron-free glass fibre
E
C

1822 Separator: Low outgassing hotmelt

Sealant: Low outgassing polyurethane
IN DIVIDUA LLY
CERTIFIE D

Faceguard: Powder coated expanded metal

Temperature/Humidity: Maximum 70°C / 100% RH
Test: 100% individual scan test according to EN1822, IEST RP-
CC007 or required standard
Test aerosol: PSL. Oil free
Fire rating: UL900
Remarks: Many frame options and dimensions are available on
request

Pressure drop Filter Efficiency Filter Efficiency Filter Efficiency

Model Name EN1822 Dimensions WxHxD (mm)
(Pa) Particle d=20nm Particle d=100-200nm Particle d=300nm

Fabsafe MD H13 H13 1170x 1170x 66 110 ≥99.99999% ≥99.95% ≥99.97%

Fabsafe MD H13 H13 1170x 570x 66 110 ≥99.99999% ≥99.95% ≥99.97%

Fabsafe MD H14 H14 1170x 1170x 66 130 ≥99.999999% ≥99.995% ≥99.997%

Fabsafe MD H14 H14 1170x 570x 66 130 ≥99.999999% ≥99.995% ≥99.997%

Fabsafe MX H14 H14 1170x 1170x 90 90 ≥99.999999% ≥99.995% ≥99.997%

Fabsafe MX H14 H14 1170x 570x 90 90 ≥99.999999% ≥99.995% ≥99.997%

As part of our program for continuous improvement, Camfil reserves the right to change specifications without notice.

Fabsafe MG H14 H14 1170x 1170x 110 60 ≥99.999999% ≥99.995% ≥99.999%

Fabsafe MG H14 H14 1170x 570x 110 60 ≥99.999999% ≥99.995% ≥99.999%

Fabsafe MD U15 U15 1170x 1170x 66 140 ≥99.9999999% ≥99.9995% ≥99.9997%

Fabsafe MD U15 U15 1170x 570x 66 140 ≥99.9999999% ≥99.9995% ≥99.9997%

Fabsafe MX U15 U15 1170x 1170x 90 110 ≥99.9999999% ≥99.9995% ≥99.9997%

Fabsafe MX U15 U15 1170x 570x 90 110 ≥99.9999999% ≥99.9995% ≥99.9997%

Fabsafe MG U15 U15 1170x 1170x 110 80 ≥99.9999999% ≥99.9995% ≥99.9999%

Fabsafe MG U15 U15 1170x 570x 110 80 ≥99.9999999% ≥99.9995% ≥99.9999%

Fabsafe MX U16 U16 1170x 1170x 90 130 ≥99.99999999% ≥99.99995% ≥99.99997%

Fabsafe MX U16 U16 1170x 570x 90 130 ≥99.99999999% ≥99.99995% ≥99.99997%

Fabsafe MG U16 U16 1170x 1170x 110 90 ≥99.99999999% ≥99.99995% ≥99.99999%

Fabsafe MG U16 U16 1170x 570x 110 90 ≥99.99999999% ≥99.99995% ≥99.99999%

*Other sizes available on request

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