Small Size Flow Sensor

Quick response and miniature size New Product
Small size flow sensor

FSM2 Series
SMALL SIZE FLOW SENSOR RAPIFLOW® FSM2 SERIES
CC-886A 6
Safety precautions
Always read this section before starting use.
When designing and manufacturing a device using CKD products, the manufacturer is obligated to check that device
safety mechanism, pneumatic control circuit, or water control circuit and the system operated by electrical control that
controls the devices is secured.
It is important to select, use, handle, and maintain the product appropriately to ensure that the CKD product is used safely.
Be sure to observe the description given under DANGER, WARNING and CAUTION to assure safety of the equipment.
Check that device safety is ensured, and manufacture a safe device.
WARNING
1 This product is designed and manufactured as a general industrial machine part.
It must be handled by an operator having sufficient knowledge and experience in handling.
2 Use this product in accordance of specifications.
This product must be used within its stated specifications. It must not be modified or machined.
This product is intended for use as a general-purpose industrial device or part. It is not intended for use
outdoors or for use under the following conditions or environment.
(Note that this product can be used when CKD is consulted prior to use and the customer consents to CKD
productspecifications. The customer must provide safety measures to avoid risks in the event of problems.)
•Use for special applications requiring safety including nuclear energy, railroad, aviation, ship, vehicle, medical
equipment, equipment or applications coming into contact with beverage or food, amusement equipment,
emergency shutoff circuits, press machine, brake circuits, or for safeguard.
•Use for applications where life or assets could be adversely affected, and special safety measures are required.
3 Observe corporate standards, regulations, etc., related to the safety of device design and control, etc.
ISO 4414, JIS B 8370 (pneumatic system rules)
Principles for pneumatic cylinder selection and use
Including High Pressure Gas Maintenance Law, Occupational Safety and Sanitation Laws, other safety rules,
body standards and regulations, etc.
4 Do not handle, pipe, or remove devices before confirming safety.
•Inspect and service the machine and devices after confirming safety of the entire system related to this product.
•Note that there may be hot or charged sections even after operation is stopped.
•When inspecting or servicing the device, turn off the energy source (air supply or water supply), and turn off power to the facility.
Discharge any compressed air from the system, and pay enough attention to possible water leakage and leakage of electricity.
•When starting or restarting a machine or device that incorporates pneumatic components, make sure that the
system safety, such as pop-out prevention measures, is secured.
5 Observe warnings ad cautions on the pages below to prevent accidents.
Ŷ The safety cautions are ranked as "DANGER", "WARNING" and "CAUTION" in this section.
DANGER:When a dangerous situation may occur if handling is mistaken leading to fatal or
serious injuries, or when there is a high degree of emergency to a warning.
WARNING:When a dangerous situation may occur if handling is mistaken leading to fatal or
serious injuries.
CAUTION:When a dangerous situation may occur if handling is mistaken leading to minor
injuries or physical damage.
Even items described under CAUTION may cause serious results.

In any case, important information that must be observed is explained.
Disclaimer
1 Term of warranty
"Warranty Period" is one (1) year from the first delivery to the customer.
2 Scope of warranty
In case any defect attributable to CKD is found during the Warranty Period, CKD shall, at its own discretion,
repair the defect or replace the relevant product in whole or in part, according to its own judgement.
This Limited Warranty will not apply to:
(1)Product abuse/misuse contrary to conditions/environment recommended in its catalogs/specifications
(2) Failure caused by other than the delivered product
(3) Use other than original design purposes.
(4) Third-party repair/modification
(5) Failure caused by reason that is unforeseeable with technology put into practical use at the time of delivery
(6) Failure attributable to force majeure.
In no event shall CKD be liable for business interruptions, loss of profits, personal injury, costs of delay or for
any other special, indirect, incidental or consequential losses, costs or damages.
3 Compatibility confirmation
In no event shall CKD be liable for merchantability or fitness for a particular purpose, notwithstanding any
disclosure to CKD of the use to which the product is to be put.
Intro5
Safety precautions
Pneumatic components: Warnings, cautions
Always read this section before starting use.
Design & Selection
Working fluid WARNING

Corrosive environment
DANGER Do not use this product in an environment containing
Do not use this product with flammable fluids. corrosive gases such as sulfurous acid.
Ambient temperature, fluid temperature
WARNING Keep the ambient temperature and fluid temperature within 0
This product cannot be used as a business meter. to 50˚C.Even if the temperature is within the specified range,
This product does not conform to measurement laws, do not use it if the ambient temperature and fluid temperature
and cannot be used for commercial purposes. Use this could suddenly change and cause dew to condense.
sensor for factory applications. Maximum working pressure and working flow rate range
Do not use fluids other than the applicable fluid Use this product within the specified range, because use
because accuracy cannot be guaranteed. exceeding the maximum working pressure and working flow
Compressed air from the compressor contains drainage rate range could result in failure.
(water, oxidized oil, foreign substances, etc.), so install Drip-proof environment
a filter, air dryer, and oil mist filter (microalescer) on This product's protective structure is IP40 or equivalent. Do
the primary side (upstream) of the sensor. The sensor's not install it where it could be exposed to water, salt, dust, or
meshing rectifies flow in the pipe. It does not filter out cutting chips, or a compressed or decompressed environment.
foreign substances, so provide a filter. This product cannot be used where the temperature changes
sharply or in a highly humid environment where internal
Recommended circuit damage could be caused by dew condensation.
Flow unit
Source pressure
Air dryer Filter Regulator Oil mist Flow Sensor
Filter FSM Series CAUTION
(micro alescer)
This product's flow rate is measured at a mass flow
When using a valve on the primary side of this
unaffected by temperature or pressure. The unit is l/min,
product, use only an oil-prohibited specification
but this is the display when the mass flow is converted to
valve. This sensor could malfunction or fail if exposed
volumetric flow at 20°C 1 barometric pressure (101 kPa)
to splattering grease, oil, etc. Also, there is a risk of
abrasion dust entering the sensor depending on the
valve. Install a filter to prevent the dust from entering Withstand pressure
the sensor.
Vaporize liquidified gas before use. Entry of liquidified CAUTION
gas into this product will result in damage. Withstanding pressure differs for each series.
Note this when selecting the series.
Overflow
Working Environment
CAUTION
DANGER
With each series, no problem will occur in the sensor,
Flammable environment even in an overflow double the measurement range.
Do not use this product in an explosive gas If dynamic pressure is applied near the maximum
environment. The structure is not explosion- w o r k i n g p r e s s u r e ( w h e n a p r e s s u r e d i ff e r e n c e
proof, and explosions or fires could occur. exceeding the maximum working pressure is applied
between primary and secondary sides), a problem
could occur with the sensor. If dynamic pressure is
applied, such as when a workpiece is filled for leakage
inspection, provide a bypass circuit or restrictor so
that dynamic pressure is not applied to the sensor.
Intro6
FSM2 Series
near the push in fitting.
Use for vacuum confirmation, etc.
When the vacuum confirmation sensor is switched
from a pressure sensor (switch) to a flow sensor
CAUTION
(switch), sensor output (switch output) logic will be
When using this product to confirm vacuum, etc., reversed. See the drawing below.
select the flow range based on the working vacuum Check that this is not a problem withthe PLC
pressure and vacuum nozzle. Refer to "Methods for sequence program, etc.
calculating theoretic flow" on page 32 for details. If source pressure or vacuum source is not supplied
When using this product to confirm suction, etc., when device power is turned on, "flow 0" = "sensor
provide an air filter on the upstream of the suction sid output (switch output) on" status is set at the flow
to prevent the entry of foreign matter. sensor (switch). Make sure this does not cause a
When using this product to confirm suction consider problem with the PLC sequence program, etc.
the atmospheric dew point and this product's ambient
Pressure sensor (switch) Flow sensor (switch)
temperature, and use under conditions in which dew
ON at setpoint and over ON at setpoint or less
does not condense in pipes.
Suction confirmation
When using this product to confirm vacuum, etc., ON ON
response speed may be delayed by the capacity of
the pipe between the vacuum nozzle and this product.
In this case, take measures to reduce piping capacity.
When this product is used for vacuum applications OFF OFF
such as air supply, do not bend the tube near the Atmospheric pressure side High vacuum side Flow 0 side Large flow rate side
push in fitting. When this product is used for vacuum
applications such as air supply, do not bend the tube
Installation & Adjustment
Wiring Check that sealing tape or adhesive does not

get inside during piping.
CAUTION When winding fluorine resin sealing tape around threads, wind
sealing tape once or twice, leaving two to three threads open
Complete piping and installation before starting wiring. at the end of the screw. Press the tape with your nail to stick
When piping, check that the fluid's direction matches the it onto threads. When using liquid sealing agent, leave one or
direction indicated on the component. two threads open from the end, and avoid applying too much.
Check that the sealing agent does not get on device threads.
When installing the sensor on piping, see the torque
below so that excessive screw-in torque or load torque is Seal tape Solid/liquid sealant
not applied to the connection port. Solid Solid
[Reference value] liquid liquid
sealant sealant
Port thread Tightening torque N•m

M5 0.5 to 1.0
Rc1/8(G1/8) 3 to 5
Rc1/4 6 to 8 (Good) (Poor) (Good) (Poor)
Rc1/2 16 to 18
Clean out pipe with air blow to remove foreign Connect a fitting even when using the metal
substances, swarf, etc., before piping. The rectifier or body type with the out side opened. The port
sensor chip could be damaged if a large amount of filter could come off.
foreign matter, swarf, etc., occurs. When using a push in fitting, accurately insert tube
Attach a wrench to metal sections when tightening pipes and confirm that it does not become dislocated
so that pressure is not applied to the resin section. even when pulled. Cut tube at a right angle with a
dedicated cutter before use.
Installation
CAUTION
The integrated display flow meter has an LCD display.
It may be difficult to read depending on the angle.
Intro7
FSM2 Series
Specific precautions

This product can be installed in any direction; Stop the control device and machine devices, and turn the
top, bottom, left, or right. power off before wiring. Starting operation suddenly could
Horizontal mounting (through hole) Vertical mounting ( female thread on bottom) result in unpredictable operation and hazards. Conduct an
set screw energized test with control devices and machine devices
stopped, and set target switch data. Discharge electrostatic
accumulated in personnel or tools before and during work.
Connect and wire bend-resistant material, such as robot wire
set screw
material, for movable sections.
Do not use this product at levels exceeding the power voltage
set screw
range. If voltage exceeding this range is applied or if AC power
Tighten the set screw with a torque of 0.5 Nm.
Bracket mounting (dedicated bracket)

is applied, the controller could rupture or burn.
Separate this product and its wiring as far away as possible
from sources of noise such as high-voltage lines. Provide
separate measures for surge applied to the power cable. The
display or output could fluctuate.
set screw Do not short-circuit the load. This product could rupture or burn.
set screw
Connect either the plus or minus side of the power supply to
the F.G. For metal body (stainless steel, aluminum) power
Port size: push-in Φ4, Φ6, Φ8, Φ10 Port size: Rc1/2
Rc1/8, Rc1/4, M5
supplies, use DC-stabilized power separated from the AC
Discrete bracket model no: FSM2-LB2.
Discrete bracket model no: FSM2-L1. primary side. Connect either the plus or minus side of the
power supply to the F.G. A varistor (limit voltage 40 V) is
Panel mount
connected between the metal body internal power circuit and
metal body to prevent dielectric breakdown of the sensor. Do
set screw
not conduct a withstand voltage test or insulation resistance
test between the internal power circuit and metal body.
Disconnect wiring if this testing is required. An excessive
potential difference between power and metal body will burn
Complete the piping before mounting.
internal parts. After installation, connecting and wiring the
Excess stress will be applied to the sensor if piped after mounting it, resulting in damage to
metal body, electrical welding of the device or frame, or short-
the parts.Avoid vibration as much as possible if the product is mounted on a panel. Especially
circuit accidents, etc., could cause welding current, excessive
when using using SUS body models, the vibration may be amplified and result in damage.
high voltage caused by welding, or surge voltage, etc., to run
Wiring through wiring or ground line connected between such devices,
damaging lines or devices. Conduct work such as electric
DANGER welding after removing this product and F.C connection of the
Use power voltage and output within the specified voltage. wiring.
If voltage exceeding the specified voltage is applied, the sensor Connected load
Output impedance for the analog output voltage output type is
could malfunction or be damaged, or electrical shock or fire could
approximately 1K. If the impedance of the connected load is low, the
occur.Do not use a load exceeding the output rating. Failure to margin of error of the output value will increase. Use after conﬁrming
observe this could result in damage to the output or fire. the margin of error with the impedance of the connected load in
account. (This does not apply to analog output current output type)
WARNING
'ZCORNG
Check wire colors when wiring. Incorrect wiring connections FSM2-‫غ‬V Output impedance :Ro=1KΩ
could result in sensor damage, problems, and malfunctions. Load internal impedance :Rx=1MΩ
Check wiring insulation. 4Q
Output‫ޓޓޓ‬㧩㧔㧙‫ޓޓޓޓ‬㧕×100%
value
Check that wires do not contact other circuits and that there 4Q㧗4Z
Margin of error
are no ground faults or insulation faults across terminals. An -ǡ
‫ޓޓޓ‬㧩㧔㧙‫ޓޓޓޓޓޓ‬㧕×100% of output value
-ǡ㧗/ǡ
over current could flow in and damage the sensor. approx. 0.1%
Use a DC stabilized power supply, within the specified rating, Adjustment
insulated from the AC power supply. Failure to insulate the
power supply could result in electrical shock. If power is not CAUTION
stabilized, the peak value could be exceeded. This could
If switches are operated when flow is not stable, such
damage the product or impair accuracy.
as pulsating, operation may be unstable. In this case,
Attach a connector cover after connecting connectors.
provide sufficient margin between the two setting
Check that stress is not directly applied to cable leadout or
values and avoid setting switches in an unstable area.
connector sections.
Intro8
FSM2 Series
During Use & Maintenance
WARNING Beware of sneak current.

When the flow sensor's power is shared with an
Analog output accuracy is also affected by self generation inductive load that generates a surge, such as a
of heat cause by energizing in addition to temperature solenoid valve or relay, if the circuit is cut off while
characteristics. Provide enough stand-by time (5minutes the inductive load is functioning, the surge current
and over after energizing) before staring operation. could enter the output circuit and cause damage,
This product does not use speed control for four seconds after power depending on where the surge absorption element
is turned on to complete self-diagnostics. Provide a control circuit and is installed.
program that ignore signals for four seconds after power is turned on.
Circuit shut-off due to
disconnection or emergency stop
CAUTION Surge absorbing element Surge absorbing element
(to be installed later) (integrated)
If a problem occurs during operation, immediately
turn power off, stop use, and contact your dealer.
Relay
Flow Sensor Solenoid
valve
Keep this product's flow within the rated flow range.
Use this product within the working pressure range.
circuit
Main
ON
If the output setting value is changed, control
system devices could operate unintentionally. Stop PLC
devices before changing settings. Surge current PLC output
Regularly inspect the product at least once a year

or more, and confirm that it is operating correctly. Take the following measures to prevent damage
Do not disassemble or modify this product. Doing from surge current that is led in:
so could result in faults. Separate the power supply for output including the
This case is made of resin. Do not use solvent, inductive load, such as the solenoid valve and relay, and
alcohol or any other detergent in cleaning to input, such as the speed controller.
remove contamination, etc. This may damage the If the power can not be separated from the inductive load,
install a surge suppressor per load. The surge suppressor
resin. Wipe off dirt with a rag soaked in a diluted
connected to PLC, etc. merely protects the unit connected.
neutral detergent solution and wrung out well. Connect surge suppressors to the points as following to
Check backflow currents caused by broken wiring reduce damages when lines are disconnected.
or wiring resistance. If other devices, including
a flow sensor, are connected to the same power
as the flow sensor, and the switch output wire
and power line's minus side are temporarily short
components
Input
components
Input
components
Input
circuited to check the operation of the control

panel's input unit, or if the power line's minus side
is broken, a backflow current could flow to and
damage the flow sensor switch output circuit.
Diode for preventing When the devices are connected to a connector,

reverse flow Control panel
Flow Sensor the output circuit could be damaged by the above
phenomenon if the connector is disconnected
PLC input
components
Other
circuit
Main
while the power is ON. Turn power OFF before

connecting or disconnecting the connector.
Current from Test switch Even if the flow range is exceeded, analog output
other Disconnection or short circuit
components
will continue. If an integrated display is used, "Hi"
or "Lo" is displayed. When using a separate display,
Take countermeasures as followings to prevent the bar display will blink.
damages caused by reverse current. However, this accuracy will not be guaranteed.
Do not concentrate current to the power line, especially, (-) Do not press the display section if you are using
side power line, and use wire as fat as possible. the integrated display model. Failure to observe
Limit the number of devices connected to the same power
this could cause faults.
source as the flow sensor.
Insert a diode parallel to the flow sensor's output line to
prevent current backflow.
Insert a diode parallel to the flow sensor power line's
minus side to prevent current backflow.
Intro9
FSM2 Series
Specific precautions: FSM with integrated needle valve -*N Series
Design & Selection
CAUTION The flow path in the needle valve is not

completely free of dust generation. A final clean
This valve can not be used as a stop valve that
filter should be used in circuits where dust
has no leakage. Due to its structure, a few
generation could be a problem.
leakage has been allowed.
CAUTION
Do not turn the dial forcibly when fully closing
or opening it (0.05 N.m or less). Do not use the
lock nut to adjust the needle. This is a possible
cause of damage to the needle.
CAUTION
The needle may rotate due to vibration, resulting
in change of flow rate.
Intro10
FSM2 Series
Specific precautions: Separate display FSM2-D Series
Design & Selection
CAUTION
Only voltage output (1 to 5V) type sensors are compatible. It will not operate properly if current output
type or other voltage output types are connected. Use FSM2-AV* when using FSM2.
CAUTION
Connect the e-con connector after cutting the half stripped section on the end. Insert the wire deep in the
connector and pressure weld it using tools such as pliers.
Coating on the electric wire does not need to be removed.
Observe the pin no. and the color of the wire before pressure welding.
Incorrect wiring will result in malfunctioning and damage of the separate display.
Pressure weld
Insert the using pliers, etc.
cable deeply
4
3
2
1
1
Blue
White Blue
Black White
Brown Black
Brown
e-con connector
Match the color
Refer to page 30 for model no.
4 conductor cable and the number
(FSM2-C4*) Do not mistake the
order of the color
1- Brown, 2- Black,
3- White, 4-Blue
Hold the connector instead of the cable when connecting or disconnecting the cable.
The cable may short circuit, snap or have a bad contact, resulting in damage or malfunctioning of the sensor and the separate display.
Do not apply load over 15N on the cable.
Intro11
FSM2 Series
Specific precautions: Miniature inline filter FSM-VFM Series
CAUTION Replacing the element

Do not use this product for vacuum circuits that
could come in contact with acids, alkalines, CAUTION
carboxlyic acid, other organic compounds,
screw-lock agent, solvent, or alcohol solutions,
Element
or air containing these substances. Fitting
The body could be damaged, and cause a Fitting fixing pin

hazardous situation.
Use designated tubing and plastic plugs.
z Tube outer diameter precision
•Polyamide tube ......................... within ±0.1mm
•Polyurethane tube
(up to ĭ6) .......................... within ±0.1mm
+0.1
(over ĭ8) .......................... mm or less
-0.15
Pull out the fitting fixing pin using a blunt jig, etc.
z Recommended models The fitting fixing pin must reused, so do not lose it.
Plastic plug GWP*-B Series Pull out the fitting.
Soft nylon tube F15** Series Replace the element, and insert the fitting.
Polyurethane tube U95** Series Insert the insertion ring into urethane tubing with a
New urethane tube NU-04, 06 Series finger.
Refer to the "Pneumatic, Vacuum and Auxiliary

Components" No. CB-24SA "Precautions for
fitting and tubes" for precautions for the push in
fitting.
Regularly inspect the polyamide case for cracks,
damage, and other deterioration. Clean and
replace as necessary.
Filter element clogging will decrease vacuum
source conductance. Regularly inspect, clean,
and replace the element.
Return the container to atmospheric pressure
before removing the body to clean or replace,
etc., the filter element.
The flow direction is oriented. Check the arrow
on the body during reassembly.
Check that the required vacuum degree is
attained in the circuit after reassembly.
Use a household-grade neutral detergent to
clean the body, then rinse with water.
Intro12
Small size flow sensor FSM2
Integrated display type/Separate display type
FSM2 Series
zResin body type (flow range: 500mƐ/min to 200Ɛ/min)
zAluminum body type (flow range: 500mƐ/min, 100Ɛ/min)
zStainless body type (flow range: 500mƐ/min to 200Ɛ/min)
Integrated display type (resin/aluminum body type)
Integrated display type (resin/aluminum body)

Descriptions
FSM2-[*1][*2][*3][*4]-[*5][*6]-[*7]
Full scale flow 005 010 020 050 100 200 500 101 201 501 102
005 500mƐ/min z
010 1Ɛ/min z
020 2Ɛ/min z
050 5Ɛ/min z
Flow range
100 10Ɛ/min z
Note 1
*4 200 20Ɛ/min z
500 50Ɛ/min z
101 100Ɛ/min z
201 200Ɛ/min z
501 500Ɛ/min z
102 1000Ɛ/min z
H04 ĭ4 push-in fitting/resin z z z z z z
Port H06 ĭ6 push-in fitting/resin z z z z z z z
size/body *5 H08 ĭ8 push-in fitting/resin z z z
material H10 ĭ10 push-in fitting/resin z z
A15 Rc1/2 /resin z z
Integrated needle valve type Note 11 *6*6 N z z z z z z z z z
Type of display 4 digits+ 4 digits 2 color LCD
0 to 500 0 to 1000 0 to 2.00 0 to 5.00 0 to 10.00 0 to 20.0 0 to 50.0 0 to 100.0 0 to 200 0 to 500 0 to 1000
F
Flow display Display mƐ/min mƐ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min
*3
Note 1, Note 2 range -500 to.500 -1000 to.1000 -2.00 to 2.00 -5.00 to 5.00 -10.00 to 10.00 -20.0 to 20.0 -50.0 to 50.0 -100.0 to 100.0 -200 to 200 -500 to 500 -1000 to 1000
R
mƐ/min mƐ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min
Display resolution 1mƐ/min 0.01Ɛ/min 0.1Ɛ/min 1Ɛ/min
Display range 9999999mƐ 99999.99Ɛ 999999.9Ɛ 9999999Ɛ
Integration
Display resolution 1mƐ 0.01Ɛ 0.1Ɛ 1Ɛ
Note 3
Integrated pulse output rate 5mƐ 10mƐ 0.02Ɛ 0.05Ɛ 0.1Ɛ 0.2Ɛ 0.5Ɛ 1Ɛ 2Ɛ 5Ɛ 10Ɛ
Operating Conditions
Working fluid Note 4 Clean air(JIS B 8392-1.1.1 to 5.6.2), compressed air(JIS B 8392-1.1.1~1.6.2), nitrogen gas
Max. working pressure 0.7MPa
Min. working pressure -0.09MPa
Withstanding pressure 1MPa
Ambient temperature/humidity 0 to 50°C, 90%RH or less
Working fluid temperature 0 to 50°C(with no dew condensation)
Precision scope of guarantee 3 to 100% F.S.
Precision
Linearity (display/analog output) ±3%F.S. or less (secondary atmospheric release 25°C)

Pressure characteristics ±5%F.S or less (-0.09 to 0.7MPa, where reference for secondary atmospheric release)
Temperature characteristics ±0.2%F.S./°C or less(15 to 35°C, where 25°C is reference)
Repeatability ±1%F.S. or less
Response time Note 5 50ms or less
N 2 point output (NPN open collector output, 50mA or less, voltage drop 2.4V or less)
Switch output *1
Output
P 2 point output (PNP open collector output, 50mA or less, voltage drop 2.4V or less)
V 1 to 5V voltage output 1 point (connected load impedance 50kȍ or more)
Analog output *2
A 4 to 20mA current output 1 point (connected load impedance 0 to 300ȍ)
V 12 to 24VDC (10.8 to 26.4V)
Power voltage Note 6 *2
A 24VDC (21.6 to 26.4V)
Current consumption Note 7 50mA or less
Lead wire ĭ3.7 AWG26 equivalent 5 conductor (connector), isolator outer diameter ĭ1.0
Functions Flow display, flow display peak hold, switch output, analog output, others
Mounting
Mounting direction Horizontal or vertical

Strait piping section Not required
Protective structure IEC standards IP40
Protective circuit Note 8 Power supply reverse connection prevention, switch output reverse connection prevention, switch output load short-circuit protection
EMC directive Compliant
H04 Approx. 50g (approx. 80g for models with needle valve)
Weight (body only) *5 H08 Approx. 70g (approx. 110g for models with needle valve)
A15 Approx. 115g
P70 Particle generation prevention Note 9
Clean specification *7
P80 Oil-prohibited Note 10
1
FSM2 Series
Specifications
Integrated display type (SUS body type)
Integrated display type (SUS body)
Descriptions
FSM2-[*1][*2][*3][*4]-[*5][*6][*7]-[*8]
Full scale flow 005 010 020 050 100 200 500 101 201
005 500mƐ/min z
010 1Ɛ/min z
020 2Ɛ/min z
Flow range
050 5Ɛ/min z
Note 1
*4 100 10Ɛ/min z
200 20Ɛ/min z
500 50Ɛ/min z
101 100Ɛ/min z
201 200Ɛ/min z
S06 Rc1/8 SUS z z z z z z z
Port (no CO2)
size/body *5 S08 Rc1/4 SUS z z z
Air only
material
SM5 M5 SUS (Custom order) z z z z z z
(no CO2)
Integrated needle valve type Note 11 *7 N z z z z z z z z z
0 to 500 0 to 1000 0 to 2.00 0 to 5.00 0 to 10.00 0 to 20.0 0 to 50.0 0 to 100.0 0 to 200
F
Flow display Display mƐ/min mƐ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min
*3
Note 1, Note 2 range -500 to 500 -1000 to 1000 -2.00 to 2.00 -5.00 to 5.00 -10.00 to 10.00 -20.0 to 20.0 -50.0 to 50.0 -100.0 to 100.0 -200 to 200
R
mƐ/min mƐ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min
Display resolution 1mƐ/min 0.01Ɛ/min 0.1Ɛ/min 1Ɛ/min
Display range 9999999mƐ 99999.99Ɛ 999999.9Ɛ 9999999Ɛ
Integration
Display resolution 1mƐ 0.01Ɛ 0.1Ɛ 1Ɛ
Note 3
Integrated pulse output rate 5mƐ 10mƐ 0.02Ɛ 0.05Ɛ 0.1Ɛ 0.2Ɛ 0.5Ɛ 1Ɛ 2Ɛ
Blank Clean air(JIS B 8392-1.1.1 to 5.6.2), compressed air(JIS B 8392-1.1.1~1.6.2), nitrogen gas
Working fluid
*6 AR Argon
Note 4
C2 Carbon dioxide
Withstanding pressure 1.5MPa
Working fluid temperature 0 to 50°C (with no dew condensation)
Precision
Linearity (display/analog output) ±3%F.S. or less (secondary atmospheric release 25°C)

Temperature characteristics ±0.2%F.S./°C or less (15 to 35°C, where 25°C is reference)
Response time Note 5 50ms or less
Switch output *1
Output
Analog output *2
V 12 to 24VDC (10.8 to 26.4V)
A 24VDC (21.6 to 26.4V)
Functions Flow display, flow display peak hold, switch output, analog output, others
Mounting

Straight piping section Not required
Protective circuit Note 8 Power supply reverse connection prevention, switch output reverse connection prevention, switch output load short-circuit protection
S06 Approx. 95g (approx. 160g for models with needle valve)
Weight (body only) *5 S08 Approx. 115g (approx. 200g for models with needle valve)
SM5 Approx. 140g
Note 1: Converted to volumetric flow at 20°C 1 barometric pressure (101 kPa)

Note 2: Flow display less than approx. ±1% F.S is zero adjusted.
Note 3: Integrated flow is a calculated(reference) value It will be reset if power is turned off.
Note 4: When using compressed air, use clean air that complies to JIS B 8392-1:2003 Class 1.1.1 to 1.6.2. Compressed air from the compressorcontains drainage (water, oxidized oil, foreign matter, etc.). Install a filter
(filtration: 5 m), air dryer (minimum pressure dew point: 10°C or less), and oil mist filter (maximum oil concentration: 0.1 mg/m3) on the primary side of this product to maintain product functions.
<Recommended circuit> Oil mist filter
Pressure source Filter (micro alescer)
Recommended components
Air filter: F Series
Oil mist filter: M Series
Air dryer Regulator FSM2 Series
When using for gas other than compressed air, use dry gas that does not contain corrosive elements such as chlorine, sulfur, or acids, and clean gas that does not contain dust or oil mist.
Note 5: Response time is set in seven stages from 50 ms or less to 1.5 s.
Note 6: Power voltage specifications differ for the voltage output and current output.
Note 7: Current for 24 VDC connection with no load connected. Consumed current varies with the load connection.
Note 8: This product’s protective circuit is effective only against specific incorrect connections and load short circuits. It does not necessarily provide protection against all incorrect connections.
Note 9: <P70> Particle generation prevention (product surface degreased and cleaned before packaging) Heat seal packed into an antistatic bag in a clean bench over class 1000.
Note 10: <P80> Oil prohibited (wet areas degreased and cleaned in addition to P70 specifications) Refer to "internal structure and parts list" for wet area material.
Note 11: This valve can not be used as a stop valve that has no leakage. Specifications allow leakage to a certein degree.
2
FSM2 Series
Separate display type (resin/aluminum body type)
Separate display type (resin/aluminum body)

Descriptions
FSM2-A[*1][*2][*3]-[*4]-[*5]
Full scale flow 005 010 020 050 100 200 500 101 201 501 102
005
500mƐ/min z
010
1Ɛ/min z
020
2Ɛ/min z
050
5Ɛ/min z
Flow 100
10Ɛ/min z
range *3 200
20Ɛ/min z
Note 1 500
50Ɛ/min z
101
100Ɛ/min z
201
200Ɛ/min z
501
500Ɛ/min z
102
1000Ɛ/min z
ĭ4 push-in fitting/resin
H04 z z z z z z
Port ĭ6 push-in fitting/resin
H06 z z z z z z z
size/body ĭ8 push-in fitting/resin
*4 H08 z z z
material ĭ10 push-in fitting/resin
H10 z z
A15
Rc1/2 /resin z z
F Unidirectional
Flow direction *2
R Bidirectional
Working fluid Note 2 Clean air (JIS B 8392-1.1.1 to 5.6.2°), compressed air (JIS B 8392-1.1.1~1.6.2), nitrogen gas
Withstanding pressure 1MPa
Working fluid temperature 0 to 50°C(with no dew condensation)
Precision
Linearity (display/analog output) ±3%F.S. or less (secondary atmospheric release 25 °C)

Response time 50ms or less
Type of display Flow display bar
Output

Analog output *1
V 12 to 24VDC (10.8 to 26.4V)
A 24VDC (21.6 to 26.4V)
Functions Analog output, error display, flow display bar
Mounting

Protective circuit Note 5 Power supply reverse connection prevention
H04 Approx. 40g
H06 Approx. 40g
Weight (body only) *4 H08 Approx. 60g
H10 Approx. 65g
A15 Approx. 145g
3
FSM2 Series
Specifications
Separate display type (SUS body type)
Integrated display type (SUS body)
Descriptions
FSM2-A[*1][*2][*3]-[*4][*5]-[*6]
Full scale flow 005 010 020 050 100 200 500 101 201
005 500mƐ/min z
010 1Ɛ/min z
020 2Ɛ/min z
Flow 050 5Ɛ/min z
range *3 100 10Ɛ/min z
Note 1 200 20Ɛ/min z
500 50Ɛ/min z
101 100Ɛ/min z
201 200Ɛ/min z
S06 Rc1/8 SUS z z z z z z z
(no CO2)
Port
size/body *4 S08 Rc1/4 SUS z z z
Air only
material
SM5 M5 SUS (Custom order) z z z z z z
(no CO2)
F Unidirectional
Flow direction *2
R Bidirectional
Blank Clean air (JIS B 8392-1.1.1 to 5.6.2), compressed air (JIS B 8392-1.1.1~1.6.2), nitrogen gas
Working fluid
*5 AR Argon
Note 2
C2 Carbon dioxide
Withstanding pressure 1.5MPa
Ambient temperature/humidity 0~50°C, 90%RH or less
Working fluid temperature 0 to 50°C (with no dew condensation)
Precision
Linearity (display/analog output) ±3%F.S. or less (secondary atmospheric release 25 °C)

Response time 50ms or less
Type of display Flow display bar
Output

Analog output *1
V 12 to 24VDC (10.8 to 26.4V)
A 24VDC (21.6 to 26.4V)
Functions Analog output, error display, flow display bar
Mounting

S06 Approx. 85g
Weight (body only) *4 S08 Approx. 105g
SM5 Approx. 135g
Note 1: Converted to volumetric flow at 20°C 1 barometric pressure (101 kPa)
Note 2: When using compressed air, use clean air that complies to JIS B 8392-1:2003 Class 1.1.1 to 1.6.2. Compressed air from the compressorcontains
drainage (water, oxidized oil, foreign matter, etc.). Install a filter (filtration: 5 m), air dryer (minimum pressure dew point: 10°C or less), and oil mist
filter (maximum oil concentration: 0.1 mg/m3) on the primary side of this product to maintain product functions.
<Recommended circuit> Oil mist filter
Pressure source Filter (micro alescer)
Recommended components
Air filter: F Series
Oil mist filter: M Series
Air dryer Regulator FSM2 Series
When using for other than compressed air, use dry gas that does not contain corrosive elements such as chlorine, sulfur, or acids, and clean gas that does not contain dust or
oil mist.
Note 3: Power voltage specifications differ for the voltage output and current output.
Note 5: This product’s protective circuit is effective only against specific incorrect connections and load short circuits. It does not necessarily provide protection against all incorrect
connections.
Note 7: <P80> Oil prohibited (wet areas degreased and cleaned in addition to P70 specifications) Refer to "internal structure and parts list" for wet area material.
4
FSM2 Series
Separate display specification
Separate display
Descriptions
FSM2-D-[*1][*2]-*-[*3]
500mƐ/min, 1Ɛ/min, 2Ɛ/min, 4Ɛ/min, 5Ɛ/min, 10Ɛ/min, 12Ɛ/min,
20 Ɛ/min, 25 Ɛ/min, 32 Ɛ/min, 50 Ɛ/min, 100 Ɛ/min, 200 Ɛ/min,
Settable flow range Note 1
500 Ɛ/min, 1000 Ɛ/min, 1500Ɛ/min
5mƐ/min, 10mƐ/min, 50mƐ/min, 100mƐ/min
Ambient temperature/humidity 0 to 50°C

Input voltage 1 to 5V
Switch output *1
Output
Analog output *2
V DC12 to 24V (10.8 to 26.4V)
Power voltage *2
A DC24V (21.6 to 26.4V)
Current consumption Note 2 40mA or less (DC24V,load disconnected)
Functions flow display, flow display peak hold, switch output, analog output, others
EMC directive compliant
Accessory Connector for sensor (e-con) 1pcs., applicable cable AWG24 to 26, isolator outer diameter ĭ1.0 to 1.2
Weight (body only) Approx. 40g
Clean specification Note 4 *3 P70 Particle generation prevention
Note 1: If a separate display type FSM2 is connected, it will detect flow range, flow direction and gas type automatically. (at default setting)
It is also compatible with the flow range of FSM-H, FSM-V, WFK3000. However, only FSM2 can be detected automatically so manually configure the flow range, flow direction and
gas type before use.
Refer to the "Display for each flow range" below to find out the flow range that can be connected.
Also, the previous setting for flow range, etc. will remain even if you change the sensor. Use after resetting if you change the sensor.
Note 3: This product’s protective circuit is effective only against specific incorrect connections and load short circuits. It does not necessarily provide protection against all incorrect connections.
Note 5: A cable with a different thickness is required to connect to FSM-V or WFK3000 so an e-con connector with the appropriate size will be required separately. Contact our sales office or
distributor.
The included e-con connector is compatible with FSM and FSM-H.
Display for each flow range

0 to. 0 to.
0 to. 0 to. 0 to. 0 to. 0 to. 0 to. 0 to. 0 to. 0 to. 0 to. 0 to. 0 to. 0 to. 0 to. 0 to. 0 to. 0 to. 0 to.
500 1000
Unidirectional 2.00 4.00 5.00 10.00 12.0 20.0 25.0 32.0 50.0 100.0 200 500 1000 1.50 5.00 10.00 50.0 100.0
mƐ/ mƐ/
Flow display
Ɛ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min m3/min mƐ/min mƐ/min mƐ/min mƐ/min
min min
Display
range -500 -1000 -2.00 -5.00 -10.00 -20.0 -50.0 -100.0 -200 -500 -1000 -1.50 -5.00 -10.00 -50.0 -100.0
to to to to to to to to to to to to. to. to to to
Bidirectional ʊ ʊ ʊ ʊ
500 1000 2.00 5.00 10.00 20.0 50.0 100.0 200 500 1000 1.50 5.00 10.00 50.0 100.0
mƐ/min mƐ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min Ɛ/min m3/min mƐ/min mƐ/min mƐ/min mƐ/min
Display resolution 1mƐ/min 0.01Ɛ/min 0.1Ɛ/min 1Ɛ/min 0.01m3/min 0.01mƐ/min 0.1mƐ/min

Integration
Display range 9999999mƐ 99999.99Ɛ 999999.9Ɛ 9999999Ɛ 99999.99m3 99999.99mƐ 999999.9mƐ

Display resolution 1mƐ 0.01Ɛ 0.1Ɛ 1Ɛ 0.01m3 0.01mƐ 0.1mƐ
Integrated pulse output rate 5mƐ 10mƐ 0.02Ɛ 0.04Ɛ 0.05Ɛ 0.1Ɛ 0.12Ɛ 0.2Ɛ 0.25Ɛ 0.32Ɛ 0.5Ɛ 1Ɛ 2Ɛ 5Ɛ 10Ɛ 15Ɛ 0.05mƐ 0.1mƐ 0.5mƐ 1mƐ
*Only voltage output(1 to 5V) type sensors are compatible. Connecting current output types and voltage output types of different voltage will result in malfunctioning.
5
6
FSM2 Series
How to order
zIntegrated display type, separate display type, integated needle valve type
FSM2 A V R 005 S06 AR 1 B K N P70
Symbol Descriptions
A Output type
A Output type A Note 1 Separate display type (analog output 1 point only) (models with needle valve not available)
N Integrated display type (switch output(NPN) 2 points, analog output 1 point)
P Integrated display type (switch output(PNP) 2 points, analog output 1 point)
B Analog output type
B Analog output type V Voltage output (1 to 5V)
Note 2 A Current output (4 to 20mA)
C Flow direction
C Flow direction
F Unidirectional
R Bidirectional (models with needle valve not available)
D Flow range (full scale flow)
D Flow range
005 500Ɛ/min
010 1 Ɛ/min
020 2 Ɛ/min
* Refer to the table on the following page 050 5 Ɛ/min
for the combinations of flow range, 100 10 Ɛ/min
port size (body materials) and gas class. 200 20 Ɛ/min
500 50 Ɛ/min
101 100 Ɛ/min
201 200 Ɛ/min
501 500 Ɛ/min (models with needle valve not available)
102 1000 Ɛ/min (models with needle valve not available)
E Port size (body material)
E Port size
H04 Push-in fitting ĭ4 (resin)
(Body material)
Note 3
S06 Rc1/8 (SUS)
S08 Rc1/4 (SUS)
A15 Rc1/2 (aluminum) (models with needle valve not available)
SM5 M5 (SUS) (models with needle valve not available)
Example of model number F Gas types

F Gas Blank Air, nitrogen gas
FSM2-NVF005-S06AR1BKN-P70 types
AR Argon
Model name: Small size flow sensor FSM2 C2 Carbon dioxide
A Output type : Integrated display type (NPN) G Cable
B Analog output type : Voltage output (1 to 5V) G Cable Blank None
C Flow direction : Unidirectional 1 1m
D Flow range : 500mƐ/min 3 3m
E Port size (body material) : Rc1/8 (SUS)
H Bracket
F Gas types : Argon H Bracket
Blank None
G Cable : 1m B With bracket
H Bracket : With bracket P Note 1 With panel mounting option
I Traceability : With company certification
J with needle valve : With needle valve
I Traceability
I Traceability
K Clean specification : Particle generation prevention Blank None
T Traceability Certificate, system diagram, inspection results included
K with company certification
Cautions for model No. selection J with needle valve
J With needle Blank None
Note 1: If A Output type "A" is selected, H Panel mount
valve
option "P" can not be selected. N Integrated needle valve type
Also, A Output type "A" does not include a separate
display. K Clean specification
Note 2: Select "V" when using FSM2-D as a separate K Clean Blank None
display for a separate display type. specification
P70 Particle generation prevention
Note 3: H Panel mount option "P" can not be selected if
P80 Oil prohibited
port size is E "A15"
7
FSM2 Series
How to order
zCombinations of flow range, port size (body material), gas type
H04 H06 H08 H10 S06 S08 A15 SM5
005 ٨ٟ ٨ٟ ٨٤ٌٟ ٨٤ٌ
010 ٨ٟ ٨ٟ ٨٤ٌٟ ٨٤ٌ
020 ٨ٟ ٨ٟ ٨٤ٌٟ ٨٤ٌ FGas types
050 ٨ٟ ٨ٟ ٨٤ٌٟ ٨٤ٌ ٨ :Air, nitrogen gas
D 100 ٨ٟ ٨ٟ ٨٤ٌٟ ٨٤ٌ ٤ :Argon
200 ٨ٟ ٨ٟ ٨٤ٌٟ ٨٤ٌ ٌ Carbon dioxide
Flow
range 500 ٨ٟ ٨ٟ ٨٤ٌٟ ٨٤ٌٟ : not available
101 ٨ٟ ٨ٟ ٨٤ٌٟ
201 ٨ٟ ٨ٟ ٨‫ޓޓ‬ٟ Jwith needle valve
501 ٨ ٟ Integrated needle
102 ٨ valve type Note 11
zCombination of port size and clean room specifications

H04 H06 H08 H10 S06 S08 A15 SM5
K Clean P70 ٨ ٨ ٨ ٨ ٨ ٨ ٨ ٨ ٨ :available
specification P80 ٨ ٨ ٨ ٨ ٨ ٨ :Consult with CKD for details.
Discrete option model no.

FSM2 LB1 P70 Symbol Descriptions Symbol Descriptions
A Option B Clean specification
A Option LB1 Bracket for ĭ4, ĭ6, ĭ8, ĭ10, Rc1/8, Rc1/4, M5 Blank None
LB2 Bracket for Rc1/2 P70 Particle generation prevention
B Clean specification KHS Panel mounting kit for integrated display type, separate display type
KHS-N Panel mounting kit set (needle valve integrated type)
C51 5 conductor cable 1m for integrated display type, separate display type
C41 4 conductor cable 1m for separate display type
C43 4 conductor cable 3m for separate display type
Note 1: FSM2-*-A15*
ƔSeparate display
FSM2 D N V 3 P P70
A Output type Discrete option model no.

B Analog output type FSM2 KHS P70
C Cable
D Bracket A Option
E Clean specification B Clean specification
Symbol Descriptions Symbol Descriptions

A Output type A Option
N Integrated display type (switch output(NPN) 2 points, analog output 1 point) KHS Panel mounting kit
P Integrated display type (switch output(PNP) 2 points, analog output 1 point) C51 5 conductor cable 1m for integrated display type, separate display type
B Analog output type EC 5 pieces of e-con (connector for sensor)
V Voltage output (1 to 5V)
A Current output (4 to 20mA) B Clean specification
Blank None
C Cable P70 Particle generation prevention
Blank None
1 1m
3 3m
D Bracket
Blank None
P With panel mounting option
E Clean specification
Blank None
P70 Particle generation prevention
*1Only voltage output(1 to 5V) type sensors are compatible.
*2 Select FSM2-AV*.
8
FSM2 Series
Internal structure and parts list
zIntegrated display type Resin body ĭ5 push-in fitting
1 2 3
14
4
13
12
11 10 9 8 7
Main parts list *Parts materials are subject to change without notice.
No. Parts name Material No. Parts name Material
1 LCD cover Acryl resin 8 Resin body Polyamide resin
2 LCD - 9 Sensor chip Semiconductor chip
3 Switch EPDM 10 Rectifier plate Stainless steel
4 Circuit board spacer Polycarbonate resin 11 Port filter Stainless steel
5 Module holder Polyamide resin 12 Sensor substrate Alumina
6 Push-in fitting - 13 PCB -
7 Sensor gasket Fluoro rubber 14 Case ABS resin
zSeparate display type SUS body Port size Rc1/4

1 2
14
5
13
12
6
11 10 9 8 7
1 Front sheet PET film 8 Spacer Stainless steel
2 Case ABS resin 9 Port filter Stainless steel
3 PCB - 10 Rectifier plate Stainless steel
4 Module holder Polyamide resin 11 Sensor chip Semiconductor chip
5 C ring Stainless steel 12 Stainless steel body Stainless steel
6 O-ring holder Stainless steel 13 Sensor gasket Fluoro rubber
7 O-ring Fluoro rubber 14 Sensor substrate Alumina
9
FSM2 Series
zSeparate display type Aluminum body Port size Rc1/2
1 2
14
5
13
6
12
11 10 9 8 7
1 Front sheet PET film 8 Spacer Aluminum
2 Case ABS resin 9 Port filter Stainless steel
3 PCB - 10 Rectifier plate Stainless steel
4 Module holder Polyamide resin 11 Sensor chip Semiconductor chip
5 C ring Stainless steel 12 Aluminum body Aluminum
6 O-ring holder Stainless steel 13 Sensor gasket Fluoro rubber
7 O-ring Fluoro rubber 14 Sensor substrate Alumina
10
FSM2 Series
zWith needle valve (resin body) FSM2-*-H*N
1
Sensor section Note 1
2
15 14 13 12 11 10 9
1 Knob Polybutylene terephthalate 9 Fitting fixing pin Stainless steel
2 Lock nut Brass/nickeling 10 Needle valve body Polyamide resin
3 Needle guide Brass/nickeling 11 Port filter Stainless steel
4 Needle Brass/nickeling Note 2 12 O-ring Fluoro rubber
5 Fixing pin Stainless steel 13 Orifice Brass/nickeling Note 3
6 O-ring Fluoro rubber (fluorine resin coating) 14 Fitting fixing pin Stainless steel
7 O-ring Fluoro rubber (fluorine resin coating) 15 O-ring Fluoro rubber (fluorine resin coating)
8 Fitting -
Note 1: Refer to page 9 for the main sensor parts.
Note 2: FSM2-*005/010/020 are stainless steel.
Note 3: FSM2-*005/010/020 are PTFE.
zWith needle valve (SUS body) FSM2-*-S*N
1
Sensor section Note 1
2
13 12 11 10 9 8
1 Knob Polybutylene terephthalate 8 Needle valve body Stainless steel
2 Lock nut Brass/nickeling 9 Port filter Stainless steel
3 Needle guide Stainless steel 10 O-ring Fluoro rubber
4 Needle Stainless steel 11 Orifice PTFE
5 Fixing pin Stainless steel 12 Spring pin Stainless steel
6 O-ring Fluoro rubber (fluorine resin coating) 13 O-ring Fluoro rubber (fluorine resin coating)
7 O-ring Fluoro rubber (fluorine resin coating)
Note 1: Refer to page 9 for the main sensor parts.
11
FSM2
Series
Internal structure and parts list Internal structure and parts list
zSeparate display FSM2-D-*
1 3
2
6 5
1 2 3 4
1 LCD cover Acryl resin 5 Rear cover Polyamide resin
2 LCD - 6 PCB -
3 Switch EPDM 7 Case ABS resin
4 Circuit board spacer Polycarbonate resin
12
FSM2 Series
Dimensions (integrated display type)
Integrated display type, port size: push-in fitting ĭ4, ĭ6
zFSM2-N/P*-H04/H06* (full scale flow: 0.5, 1, 2, 5, 10, 20, 50Ɛ/min)
17
15 55
1.5
37
(24.2)
3.6
8.5
2-Φ3.4 through hole 27

Φ4 or Φ6
(A)
Push-in fitting
9.5
Model no. Fitting (A) dimensions

FSM2-N/P*-H04* Push-in fitting ĭ4 64
2-M3 depth 5 15.5 FSM2-N/P*-H06* Push-in fitting ĭ6 65

zFSM2-N/P*-H08/H10* (full scale flow: 50, 100, 200Ɛ/min)
17
15 55
1.5
43
(30.2)
3.6
13

Φ8 or Φ10
(A)
Push-in fitting
9.5

FSM2-N/P*-H08* Push-in fitting ĭ8 70.6
2-M3 depth 5 15.5 FSM2-N/P*-H10* Push-in fitting ĭ10 82.1
13
FSM2 Series
Dimensions
Integrated display type Port size: Rc1/8, M5
zFSM2-N/P*-S06/SM5* (full scale flow: 0.5, 1, 2, 5, 10, 20, 50Ɛ/min)
17
15 55
1.5
37
(24.2)
3.6
8.5
Rc 1/8 or M5
9.5
2-M3 depth 5 15.5
Integrated display type Port size: Rc1/4

zFSM2-N/P*-S08* (full scale flow: 50, 100, 200Ɛ/min)
17
15 55
1.5
43
(30.2)
3.6
13
2-Φ3.4 through hole

27
Rc 1/4
9.5
2-M3 depth 5 15.5
14
FSM2 Series
zFSM2-N/P*-A15* (full scale flow: 500, 1000Ɛ/min)
30
80
1.5
50
(37)
30
15
Rc 1/2
2-M3 depth 5
13
30
15
FSM2 Series
Dimensions
Dimensions (separate display type)
Separate display type, port size: push-in fitting ĭ4, ĭ6
zFSM2-A*-H04/H06* (full scale flow: 0.5, 1, 2, 5, 10, 20, 50Ɛ/min)
17
15 55
(24.2)
29
3.6
8.5

Φ4 or Φ6
Push-in fitting (A)
9.5

FSM2-A*-H04* Push-in fitting ĭ4 64
2-M3 depth 5 FSM2-A*-H06* Push-in fitting ĭ6 65
15.5

zFSM2-N/P*-S08* (full scale flow: 50, 100, 200Ɛ/min)
17
15 55
(30.2)
35
3.6
13

Φ8 or Φ10
Push-in fitting (A)
9.5

FSM2-A*-H08* Push-in fitting ĭ8 70.6
2-M3 depth 5 15.5 FSM2-A*-H10* Push-in fitting ĭ15 82.1
16
FSM2 Series
Integrated display type Port size: Rc1/8, M5
zFSM2-A*-S06/SM5* (full scale flow: 0.5, 1, 2, 5, 10, 20, 50Ɛ/min)
17
15 55
(24.2)
29
3.6
8.5
Rc 1/8 or M5
9.5
2-M3 depth 5 15.5
Separate display type Port size: Rc1/4

zFSM2-A*-S08* (full scale flow: 50, 100, 200Ɛ/min)
17
15 55
(30.2)
35
3.6
13
Rc 1/4
9.5
2-M3 depth 5 15.5
17
FSM2 Series
Dimensions
zFSM2-A*-A15* (full scale flow: 500, 1000Ɛ/min)
30
80
42
(37)
30
15
Rc 1/2
2-M3 depth 5
30 13
18
FSM2 Series
Dimensions (integrated display type, integrated needle valve type)
zFSM2-N/P*-H04/H06*N (full scale flow: 0.5, 1, 2, 5, 10, 20, 50Ɛ/min)
17
(10.5 to 19)
15 70
8
27.5
37
(24.2)
17
8.5
27
Φ4 or Φ6 55
80
Push-in fitting
(A)
2-Φ3. 4 through hole

9.5

2-M3 depth 5 FSM2-N/P*-H04* Push-in fitting ĭ4 89
15.5 FSM2-N/P*-H06* Push-in fitting ĭ6 90

zFSM2-N/P*-H08/H10*N (full scale flow: 50, 100, 200Ɛ/min)
17
(10.5 to 19)
15 70
8
27.5
43
(30.2)
23
13
27
55
Φ8 or Φ10 86
Push-in fitting (A)

9.5

2-M3 depth 5 FSM2-N/P*-H08* Push-in fitting ĭ8 101.6
15.5
FSM2-N/P*-H10* Push-in fitting ĭ10 113.1
19
FSM2 Series
Dimensions
Dimensions (integrated display type, integrated needle valve type)
Integrated display type, Port size: Rc1/8
zFSM2-N/P*-S06N (full scale flow: 0.5, 1, 2, 5, 10, 20, 50Ɛ/min)
17
(10.5 to 19)
15 70
8
27.5
37
(24.2)
17
8.5
27
55
Rc1/8 80

9.5
15.5
2-M3 depth 5
Integrated display type, Port size: Rc1/4

zFSM2-N/P*-S08/*N (full scale flow: 50, 100, 200Ɛ/min)
17
(10.5 to 19)
15 70
8
27.5
43
(30.2)
23
13
27
55
86
Rc1/4
9.5
15.5
2-M3 depth 5
20
FSM2 Series
Dimensions with optional equipment: (B: with bracket)
zFSM2-N/P*-H04/H06/S06/SM5*B (full scale flow: 0.5, 1, 2, 5, 10, 20, 50Ɛ/min)
30
R1.75 6
3.5
18.5
14.5
27
23
17
1.5
42
(29.2)
13.5
1
8.6
5
27
Integrated display type, port size: push-in fitting ĭ8, ĭ10, Rc1/4
zFSM2-N/P*-H08/H10* (full scale flow: 50, 100, 200Ɛ/min)
30
R1.75 6
3.5
18.5
14.5
27
23
17
15 55
1.5
48
(35.2)
18
1
8.6
5
27
21
FSM2 Series
Dimensions with options
zFSM2-N/P*-A15*B (full scale flow: 500, 1000Ɛ/min)
65
30
R1.75 6
25
20
30
40
50
80
1.5
55
(42)
35
20
1

zFSM2-A*-H04/H06/S06/SM5*B (full scale flow: 0.5, 1, 2, 5, 10, 20, 50Ɛ/min)
30
R1.75 6
3.5
18.5
14.5
27
23
17
15 55
(29.2)
34
13.5
1
8.6
5
27
22
FSM2 Series
Separate display type, port size: push-in fitting ĭ8, ĭ10, Rc1/4
zFSM2-A*-H08/H10/S08*B (full scale flow: 50, 100, 200Ɛ/min)
30
R1.75 6
3.5
18.5
14.5
27
23
17
(35.2) 15 55
40
18
1
8.6
5
27

zFSM2-A*-A15*B (full scale flow: 500, 1000Ɛ/min) 65
30
R1.75
6
25
20
40
50
30
80
47
(42)
35
20
1
23
FSM2 Series
Dimensions
Integrated needle valve type, port size: push-in fitting ĭ4, ĭ6, Rc1/8
zFSM2-N/P*-H04/H06/S06*BN (full scale flow: 0.5, 1, 2, 5, 10, 20, 50Ɛ/min)
30
R1.75 6
3.5
18.5
14.5
27
23
17
1.5
42
(29.2)
13.5
5
8.6
1
27
30
Integrated needle valve type, port size: push-in fitting ĭ8, ĭ10, Rc1/4
zFSM2-N/P*-H08/H10/S08*BN (full scale flow: 50, 100, 200Ɛ/min)
30
R1.75 6
3.5
18.5
14.5
27
23
17
15 55
1.5
48
(35.2)
18
5
8.6
1
27
30
24
FSM2 Series
Dimensions with optional equipment (P: panel mounting kit)
zIntegrated display type
78
71 (panel cut dimensions)
61 Individual installation
4-R 57.5±0.5
1o
r le
ss
22.5±0.5
28
18
1.4
2-Fixing screw Panel vessel holder Panel vessel
Contact installation
Tightening torque 0.06Nm
4-R 57.5±0.5
1o
r le
20
4
ss
B
15 A
28
22.5+28×（n−1）
Panel holder
Model no. A B
FSM2-N/P*-H04/H06/S06/SM5* 40.5 28.5
28
FSM2-N/P*-H08/H10/S08* 46.5 30.0

*Can not be mounted on FSM-N/P*-A15*.
Panel thickness 6mm or less
zIntegrated needle valve type

95
(Panel cut dimensions)
88
Individual installation
78 4-
R1 74.5±0.5
or
le
ss
28
18
22.5±0.5
Panel vessel
Panel vessel holder
1.4
2-Fixing screw
Contact installation
Tightening torque 0.06Nm 4-
R1 74.5±0.5
or
le
4
ss
B
15
A
22.5±0.5
28
Panel holder
22.5+28×（n−1）
Model no. A B
FSM2-N/P*-H04/H06/S06*N 40.5 28.5
28
FSM2-N/P*-H08/H10/S08*N 46.5 30.0
25
FSM2 Series
Option dimensions
Option dimensions
zBracket
Model no.: FSM2-LB1 Model no.: FSM2-LB2
(full scale flow: 0.5, 1, 2, 5, 10, 20, 50, 100, 200Ɛ/min) (full scale flow: 500, 1000Ɛ/min)
65
55
30 1
R1.75 30
2-Φ3.5
6 1
3.5
4
8.4
18.5
14.5
27
17
9.5
40
13
30
50
15.5 2-Φ3.5 5
*M3 for fixing (length: 6mm) 2 set scews included
3.5
R1.75 6
5
*M3 for fixing (length: 6mm) 2 set scews included
zCable option
Model no.: FSM2-LB2
5 conductor cable for integrated display type FSM2-N/P*-*, separate display type FSM2-D.
L 25 Terminal No. Cable color
30 or less 1 Brown
Connector cover
5-AWG26 Material: EPDM 2 Black
Half stripped 3 White
4 Gray
5 Blue
(3.7)
Contact: JST Halogen free electric wire 5 Model no. L dimensions

5-SSHL-002T-P0.2 FSM2-C51 1040±20
Housing: JST FSM2-C53 3040±20
GHR-05V-S
Model no.: FSM2-C41, C43

4 conductor cable for separate display type FSM2-A*-*
L 25 Terminal No. Cable color
30 or less 1 Brown
Connector cover
4-AWG26 Material: EPDM 2 Black
Half stripped 3 White
4 Blue
(3.7)
Model no. L dimensions

Contact: JST Halogen free electric wire 5 FSM2-C41 1040±20
4-SSHL-002T-P0.2 FSM2-C43 3040±20
Housing: JST
GHR-04V-S
26
FSM2 Series
Separate display dimensions
zFSM2-D-*
17
55
27
7
1.6
23
33
21
25
2-Φ2.6 depth 7
zDimensions with panel mounting kit option

78
71 (Panel cut dimensions)
Individual installation
61
4-R 57.5±0.5
1o
r le
ss
22.5±0.5
28
18
Opening width Contact installation

Panel vessel holder
1.4
22.5 Panel vessel

2-Fixing screw 4-R 57.5±0.5
1o
Tightening torque 0.06Nm r le
ss
4
20
30.5
15
28
22.5+28×（n−1）
3.5
When e-con (sensor side connector) is connected

Panel holder
28
27
28
FSM2 Series
Internal circuit and examples of load connection
z FSM2-N*-* (integrated display type NPN output)
FSM2-D-N*-* (separate display NPN output)
Using CH2 as SW output Using CH2 as external input
(Brown) Power supply + (Brown) Power supply +

1 1
(Black) CH1 Load
Load SW output 1
2 2
(Black) CH1
SW output 1 Load +
Main circuit
+
Main circuit
(White) CH2 (White) CH2 -

- External input
SW output 2 3
3
R* (Gray) Analog output
R* (Gray) Analog output 4
4
Load Load
(Blue) Power supply - (Blue) Power supply -
5 5
*Analog output voltage output type R approx. 1KΩ

Analog output current output type R approx. 100Ω
Terminal Optional
Title
No. cable color
Brown Power + (voltage output: 12 to 24V, current output: 24V)
Black CH1 (switch output 1: max 50mA)
White CH2 (switch output 2: max50mA, or external input)
(FSM2 side) Analog output Voltage output: 1-5V load impedance 50kȍ or more
Gray Current output: 4-20mA load impedance 300ȍ or
less
Blue Power supply - (GND)
z FSM2-P*-* (integrated display type PNP output)

FSM2-D-P*-* (separate display NPN output)
Using CH2 as SW output Using CH2 as external input

1 1
(Black) CH1 (Black) CH1

SW output 1 SW output 1
2 2
+ (White) CH2 +
Main circuit
(White) CH2
Main circuit
Load External input Load

SW output 2 3
3 - -
Load
R* (Gray) Analog output R* (Gray) Analog output
4 4
Load Load
5 5
(Blue) Power supply - (Blue) Power supply -
*Analog output voltage output type R approx. 1KΩ
Terminal Optional
Title
No. cable color
Brown Power + (voltage output: 12 to 24V, current output: 24V)
Black CH1 (switch output 1: max 50mA)
White CH2 (switch output 2: max50mA, or external input)
(FSM2 side) Analog output Voltage output: 1-5V load impedance 50kȍ or more
Gray Current output: 4-20mA load impedance 300ȍ or
less
29
FSM2 Series
Technical data
Internal circuit and examples of load connection

zFSM2-A*-* (separate display type)
(Brown) Power supply + Terminal Optional
Title
No. cable color
R*
Brown Power + (voltage output:12 to 24V, current
(Black) Analog output
+ output: 24V)
Main circuit
- Analog output Voltage output: 1 to 5V

Load
load impedance 50kȍ or more
(White) N.C. Black
(Model no. detection signal) Current output: 4 to 20mA
(Blue) Power supply -
load impedance 300kȍ or less
N.C. (Model judgment signal; Not connected
*Analog output voltage output type R approx. 1KΩ White
when used as discrete unit.)
(FSM2 side)
zHow to connect separate display and FSM2 separate display type zHow to connect separate display and FSM separate display type
e-con Sumitomo 3M wire mount plug e-con Sumitomo 3M wire mount plug
37104-3122-000 FL 37104-3122-000 FL

1 1
Separate display (Black) Sensor FSM2 Separate display type Separate display (Black) Sensor
2 2 FSM Separate display type FSM
（FSM2-D-*） (White) Model no. detection signal Voltage output type（FSM2-AV*）（FSM2-D-*） Not connected （FSM-A-*-* / FSM-H-A-*-*）
3 3
(Blue) Power supply - (Current output type can not be connected) (Blue) Power supply -
4 4
e-con Sumitomo 3M mini-clamp boardmount socket e-con Sumitomo 3M mini・clamp board mount socket
Straight Solder Tails 37204-62Ｂ3-004 PL Straight Solder Tails 37204-62Ｂ3-004 PL
An appropriate e-con connector is required separately to ,

Analog output characteristics connect FSM-V or WFK to the sensor since the cable thickness is different
Voltage output type Unidirectional Current output type Unidirectional
5 20
Analog output
Analog output
3 12
(V) (mA)
1 4
0 F.S. flow 0 F.S. flow

Flow (l/min) Flow (l/min)
Voltage output type Bidirectional Current output type Bidirectional
5 20
Analog output
Analog output
3 12
(V) (mA)
1 4
-F.S. flow 0 F.S. flow -F.S. flow 0 F.S. flow
(l/min) Flow (l/min)

The integrated bidirectional display can be switched to unidirectional output by setting the button. Refer to page 41 for details.
30
FSM2 Series
Pressure loss characteristics (air, nitrogen gas)
zFSM2-*005-* zFSM2-*010-*
0.1 0.2
0.1MPa 0.1MPa
0.09 0.18
0.08 0.16
Pressure loss
Pressure loss
0.07 0.14
0.06 0.12
0.05 0.3MPa 0.1 0.3MPa
0.04 (kPａ) 0.08
(kPａ)
0.03 0.5MPa 0.5MPa
0.06
0.02 0.04
0.01 0.02
0 0
0 0.1 0.2 0.3 0.4 0.5 0 0.2 0.4 0.6 0.8 1
zFSM2-*020-* zFSM2-*050-*
0.5 1.6
0.45
0.1MPa 1.4
0.1MPa
0.4
1.2
Pressure loss
0.35
Pressure loss
0.3 1
0.25 0.8
0.3MPa 0.3MPa
0.2
(kPａ) (kPａ) 0.6
0.15 0.5MPa 0.5MPa
0.4
0.1
0.05 0.2
0 0
0 0.5 1 1.5 2
0 1 2 3 4 5
Flow (l/min)
Flow (l/min)
zFSM2-*100-* zFSM2-*200-*
4.5 5
4 4.5 0.1MPa
0.1MPa
3.5 4
Pressure loss
Pressure loss
3 3.5
2.5 3
0.3MPa 2.5
2
2 0.3MPa
(kPａ) (kPａ)
1.5
0.5MPa 1.5
1 0.5MPa
1
0.5
0.5
0
0
0 2 4 6 8 10 0 5 10 15 20
31
FSM2 Series
Technical data
Pressure loss characteristics (air, nitrogen gas)
zFSM2-*500-* zFSM2-*101-*
6 8
0.1MPa
7
5 0.1MPa
6
Pressure loss
Pressure loss
4
5
3 4
0.3MPa 0.3MPa
(kPａ) (kPａ) 3
2
0.5MPa 0.5MPa
2
1
1
0 0
0 10 20 30 40 50 0 20 40 60 80 100
zFSM2-*201-* zFSM2-*501-*
30 12
0.1MPa
25 10 0.3MPa
Pressure loss
Pressure loss
20 8
0.5MPa
15 6
0.3MPa 0.7MPa
(kPａ)
(kPａ) 4
10
0.5MPa
2
5
0
0
0 100 200 300 400 500
0 50 100 150 200
zFSM2-*102-*
40
0.3MPa
35
30
Pressure loss
25 0.5MPa
20
0.7MPa
(kPａ) 15
10
0
0 200 400 600 800 1000
Flow (l/min)
32
FSM2 Series
Pressure loss characteristics (argon)
zFSM2-*005-*AR zFSM2-*010-*AR
0.16 0.3
0.1MPa
0.14 0.1MPa 0.25
0.12
Pressure loss
Pressure loss
0.2
0.1
0.08 0.15
0.3MPa 0.3MPa
(kPａ) 0.06 (kPａ)
0.1
0.5MPa 0.5MPa
0.04
0.05
0.02
0 0
0 0.1 0.2 0.3 0.4 0.5 0 0.2 0.4 0.6 0.8 1
0.7 2.5
0.1MPa
0.6 0.1MPa
2
Pressure loss
Pressure loss
0.5
1.5
0.4
0.3MPa
0.3 0.3MPa 1
(kPａ) (kPａ)
0.5MPa
0.2 0.5MPa
0.5
0.1
0 0
0 0.5 1 1.5 2 0 1 2 3 4 5
6 7
0.1MPa 0.1MPa
5 6
Pressure loss
Pressure loss
5
4
4
3
0.3MPa 0.3MPa
3
(kPａ) (kPａ)
2 0.5MPa
0.5MPa 2
1 1
0 0
0 5 10 0 5 10 15 20
10 14
9 0.1MPa 0.1MPa
12
8
Pressure loss
Pressure loss
7 10
6 8
5
0.3MPa 0.3MPa
6
4
(kPａ) (kPａ)
3 0.5MPa 4 0.5MPa
2
2
1
0 0
0 10 20 30 40 50 0 20 40 60 80 100
33
FSM2 Series
Technical data
Pressure loss characteristics (carbon dioxide)
zFSM2-*005-*C2 zFSM2-*010-*C2
0.1 0.2
0.09 0.18 0.1MPa
0.1MPa
0.08 0.16
Pressure loss
Pressure loss
0.07 0.14
0.06 0.12
0.05 0.1
0.3MPa 0.3MPa
0.04
(kPａ) (kPａ) 0.08
0.03 0.5MPa 0.06 0.5MPa
0.02 0.04
0.01 0.02
0 0
0 0.1 0.3 0.5 0 0.5 1
zFSM2-*020-*C2 zFSM2-*050-*C2
0.5 1.8
0.1MPa
0.45 0.1MPa 1.6
0.4 1.4
Pressure loss
Pressure loss
0.35
1.2
0.3
1
0.25
0.3MPa 0.8 0.3MPa
(kPａ) 0.2 (kPａ) 0.6
0.15 0.5MPa 0.5MPa
0.4
0.1
0.05 0.2
0 0
0 0.5 1 1.5 2 0 1 3 5
zFSM2-*100-*C2 zFSM2-*200-*C2
1.6 1.6
0.1MPa 0.1MPa
1.4 1.4
1.2 1.2
Pressure loss
Pressure loss
1 1
0.8 0.3MPa 0.8

0.3MPa
(kPａ) 0.6 (kPａ) 0.6
0.5MPa 0.5MPa
0.4 0.4
0.2 0.2
0 0
0 5 10 0 5 10 15 20
zFSM2-*500-*C2 zFSM2-*101-*C2
3.5 12
0.1MPa 0.1MPa
3 10
2.5
Pressure loss
Pressure loss
8
2
6
1.5 0.3MPa 0.3MPa
(kPａ) (kPａ)
4
1 0.5MPa 0.5MPa
0.5 2
0 0
0 10 30 50 0 50 100
34
FSM2 Series
Needle valve flow characteristics (air, nitrogen gas)
zFSM2-*005/010/020 (resin body) zFSM2-*050/100 (resin body)
10 35
9 0.5MPa
0.5MPa 30
8
25
Flow [l/min(ANR)]
7
Flow [l/min(ANR)]
6 20
5
15
4
3 0.1MPa 10 0.1MPa
2
5
1
0 0
0 2 4 6 8 10 12 14 0 2 4 6 8 10 12 14
Needle rotation Needle rotation
zFSM2-*200/500-H04/H06 (resin body) zFSM2-*500/101/201-H08/H10 (resin body)

200 350
180 0.5MPa
300
160
0.5MPa
140 250
Flow [l/min(ANR)]
Flow [l/min(ANR)]
120
200
100
150
80
60 100 0.1MPa
0.1MPa
40
50
20
0 0
0 2 4 6 8 10 12 14 0 2 4 6 8 10 12 14
zFSM2-*005/010/020 (SUS body) zFSM2-*050/100 (SUS body)

10 35
9 0.5MPa
0.5MPa 30
8
7 25
Flow [l/min(ANR)]
Flow [l/min(ANR)]
6
20
5
15
4
3 0.1MPa 10 0.1MPa
2
5
1
0 0
0 2 4 6 8 10 12 14 0 2 4 6 8 10 12 14
zFSM2-*200/500-S06 (SUS body) zFSM2-*500/101/201-S08 (SUS body)

200 350
0.5MPa 0.5MPa
180
300
160
140 250
Flow [l/min(ANR)]
Flow [l/min(ANR)]
120
200
100
150
80
60 0.1MPa
0.1MPa 100
40
50
20
0 0
0 2 4 6 8 10 12 14 0 2 4 6 8 10 12 14
Note: These values are typical values; it does not guarantee the characteristics.
35
36
FSM2 Series
Display/operating section names and functions
zIntegrated display type
Main display section (green/red) Flow unit display (green) Output (OUT1) display (green) Output (OUT2) display (green)
࡮Displays set value and flow ࡮Displays flow unit. ࡮Illuminates when CH1 output is ON. ࡮Illuminates when CH2 output is ON.
࡮Display color can be changed. Flashes when an overcurrent is detected. Flashes when an overcurrent is detected.
࡮Displays the upper3 digits during
integrated flow display
ٌ(UP) key
࡮Sequentially displays the CH1 data when the flow rate
is displayed.
࡮Displays the maximum value during peak hold operation.
࡮When selecting a mode, determines the mode.
࡮Used to count up numbers, etc. when setting each data.
ٖ㧔DOWN㧕 key
࡮Sequentially displays the CH2 data when the flow rate
MODE key Sub-display section (green/red) is displayed.
࡮Used to enter each setting mode. ࡮Displays the flow direction and operation status ࡮Displays the minimum value during peak hold operation.
࡮Used to return to the flow display. ࡮Display color can be changed. Use to count down the value, etc., when setting each data.
࡮Used to turn off peak hold oeration ࡮Displays the lower 4 digits during
integrated flow display
<Example of display> FSM2-NVR100-*is used in this example.

Indication LCD indication
Instantaneous flow display

Reverse direction
10L/min(ANR)
*If bidirectional setting is used

(Note: "Lo" will be indicated on unidirectional models)
Integrated flow display

at 99999.99L
*Values will return to "0.00" if it goes beyond "99999.99"

(It will be reset)
37
FSM2 Series
Operation
zSeparate display type
Flow display bar

L/min ・Turns ON according to the flow rate.
GAS: 0 20 40 60 80 100 ・Flashes during an overcurrent.
Air, N2
<Example of display> FSM2-A*F101-* is used in this example.

Flow Unidirectional type Bidirectional type
0%F.S.
L/min L/min
GAS: 0 20 40 60 80 100 GAS: −100 −60 −20 0 20 60 100
Air, N2 Air, N2
+60%F.S.
(forward direction)
L/min L/min
GAS: 0 20 40 60 80 100 GAS: −100 −60 −20 0 20 60 100
Air, N2 Air, N2
+120%F.S.
(forward direction)
L/min L/min
Flashes if there is a GAS: 0 20 40 60 80 100 GAS: −100 −60 −20 0 20 60 100
overflow. *Flashes at Air, N2 Air, N2
±+10%F.S. or more
-60%F.S.
(reverse direction)
L/min L/min
GAS: 0 20 40 60 80 100 GAS: −100 −60 −20 0 20 60 100
Air, N2 Air, N2
-120%F.S.
(reverse direction)
L/min L/min
Flashes if there is a GAS: 0 20 40 60 80 100 GAS: −100 −60 −20 0 20 60 100
overflow. *Flashes at Air, N2 Air, N2
±+10%F.S. or more
38
FSM2 Series
Explanation of function (Integrated display type)
Some functions and settings are completed when the normal flow is displayed, and some after entering setting mode. The setting
mode is divided into standard setting mode and detailed setting mode based on the frequency of use.
zNormal operation
Descriptions Explanation Default setting
Instantaneous flow display Instantaneous flow is displayed. -
Integrated flow display The switch output function includes one to turn the switch ON and OFF when Instantaneous flow
the specified count value is exceeded, and an integrated pulse function that display
outputs a pulse after a set count value.
It will be reset if power is turned off. Can be reset with button operation or external input.
Peak hold function Maximum and minimum values for the flow rate within a set interval is displayed. Peak hold OFF
Key lock function Key operations are disabled to prevent incorrect operation. Key lock invalid
Error display function The status of errors is displayed when trouble or error occurs. -
zStandard setting mode

Switch output function Two-point switch output enables 7 operation patterns, and operation stop CH1, CH2 both
can be set. set to switch OFF
Forced output function Switch output is forcibly turned on to check line connections and default -
operation of the input device.
Zero adjust function Zero point deviation is corrected. Adjusted value: 0
zDetailed setting mode

Select flow direction Set the flow direction. Bidirectional setting
(available only on integrated The direction is set to bidirectional, single forward direction, or single
display type bidirectional type) reverse direction.
Select CH2 operation Select CH2 function Switch output
Select whether to use CH2 as switch output or as external input (count value reset/auto reference).
Auto-reference function When CH2 is set to auto reference, the switch output's threshold can be given Auto-reference function
external input or button operations. The threshold is changed automatically when OFF
the switch's threshold changes.
Response time setting Set the response time. Response time: 50ms
The response time is set in 7 stages from 50 ms to 1.5 s. Chattering or incorrect
operations caused by sudden changes in the flow or noise are prevented.
Display speed setting The digital display's update cycle is set in 3 stages from 250 ms to 1 s. Display speed: 250ms
Display blinking is minimized by lengthening the display update cycle.
Sub display setting Set the sub-display section's display. Flow direction display
The method used can be switched to flow direction, flow unit, or gas type.
Display color setting Set the display color. For both main and sub,
The display color for the normal display and switch output ON is set. Normal display: green
Switch ON: red
Hysteresis setting Set switch setting value hysteresis. Hysteresis: 1% F.S.
Use this if flow pulsates and the switch chatters near the threshold.
Flow unit setting Select the display unit from the standard state or reference state. Flow unit: ANR
Standard state (ANR): Flow converted to volumetric flow at 20°C 1 barometric pressure
Reference state (NOR): Flow converted to volumetric flow at 0°C 1 barometric pressure (Note 1)
ECO MODE setting ECO MODE is selectable. ECO MODE OFF
If no button is pressed for one minute, the mode changes to ECO and the
backlight turns off, minimizing current consumption.
Reset settings Settings are set to the default. The separate display will automatically detect flow range -
if a FSM2 separate display type that has been reset is turned on while connected.
Model selection (separate display only) Select flow range, flow direction and gas type. Disabled setting (Note 2)
(Note 1) The reference status display is a calculated (reference) value.

(Note 2) The default setting is "disabled". If the setting is not complete, it will start from model seection mode after turning it on. Always use after setting.
FSM2 separate display type will detect the display automatically only when there are no setting input (default setting)
39
FSM2 Series
Operation
Switch output function

Switch output functions are selected from 7 switch operations based on the application. Functions can be used with both CH1 and
CH2.
Operation pattern name Explanation Operation waveform LCD display
Window operation 1 Switch output goes ON within the <Sub-display section>

ON
(ON within specified specified range.
OFF
range)
ON set value OFF setting Flow
Window operation 2 Switch output goes ON outside of the ON

(ON out of specified specified range.
OFF
range)
OFF setting ON set value Flow
Hysteresis operation 1 Hysteresis is set randomly, and when ON

(Lower flow rate side the flow exceeds the designated
OFF
ON) level, switch output goes OFF.
ON set value OFF setting Flow
Hysteresis operation 1 Hysteresis is set randomly, and when ON

(Larger flow rate side the flow exceeds the designated
OFF
ON) level, switch output goes ON.
OFF setting ON set value Flow
Integration output 1 Switch output goes ON when higher ON

(ON above integrated than the set integration value.
OFF
flow)
Integration set value Integrated flow
Integration output 2 The switch goes off when higher than ON

(OFF below integrated the set integration value.
OFF
flow)
Integration set value Integrated flow
Integrated pulse output An integrated pulse is output at each preset ON 40msec

integration value. Refer to specifications for
OFF
details on the preset integration value.
(pages 1, 2) Preset integration value
Integrated
flow
Switch operation OFF This is switch operation OFF status.
40
FSM2 Series
Auto-reference function
When CH2 is set to auto reference, the switch output's threshold can be given external input or button operations. The threshold is
changed automatically when the switch's threshold changes, such as when work changes. The input value is the flow rate when the
external input is turned ON.
The CH2 switch setting is disabled during auto reference operation.
Input no. Operation pattern name Explanation Operation waveform LCD display
ON above input The switch turns ON when higher <Main display section>
value than the read value. ON

(threshold: input value) OFF
Input value Flow

<Sub-display section>
1 points
OFF above input The switch goes off when higher
value than the read value. ON
(threshold: input value) OFF
Input value Flow
ON above the The switch goes ON when higher

mean value of 2 than the value midway between ON
points two points. OFF
(Threshold value:("input 1"+ "input2"/2)
Input value Input value Flow
OFF above the The switch goes OFF when higher

ON
mean value of 2 than the value midway between
points two points. OFF
(Threshold value:("input 1"+ "input2"/2)
2 points
ON between 2 The switch goes ON between two
points read points. ON
(threshold: input value 1: input value 1) OFF

(threshold: input value 2: input value 2)
OFF between 2 The switch goes OFF between two

points read points. ON
(threshold: input value 1: input value 1) OFF
(threshold: input value 2: input value 2)
41
FSM2 Series
Operation
Flow direction selection (integrated bidirectional display only)

With an integrated bidirectional display, the flow direction is set with button operations.
Flow direction LCD display Analog output characteristics
<Bidirectional> (main display section)

(V) (mA)
5 20
Analog output
Minus displayed when direction is reversed. 3 12
(sub-display section)
1 4
-F.S. flow 0 F.S. flow

The direction of the arrow changes (reverse direction) (ℓ/min) (forward direction)
depending on the flow direction.
<Unidirectional (forward)>
(main display section) (V) (mA)
5 20
Analog output
3 12
1 4
0 F.S. flow
(ℓ/min) (forward direction)
<Unidirectional (reverse)>
(V) (mA)
(main display section)
5 20
Analog output
3 12
1 4
0 F.S. flow
(ℓ/min) (reverse direction)
42
FSM2 Series
How FSM2 Series works
The FSM2 Series incorporates a platinum sensor chip (3 mm x 3.5 mm) machined with silicon micromachining. The sensor is thermally
insulated from the silicon substrate. The heating capacity is extremely low, enabling high sensitivity with a high speed response.
At the same time, this plastic foam layer serves to gravity-settle liquid drops in the inside. At the sensor, two temperature sensors are
arranged with a heater in between. Platinum, which has a resistance that changes based on temperature, is used for the temperature
sensor. When the heater is turned on and heated, the temperature distribution is symmetrical to the center of the heater if there
is a flow. When flow is received, the symmetrical property of temperature distribution is lost, and temperature upstream from the
heater drops, and that downstream rises. If flow is reversed, the temperature difference (resistance value difference) is reversed. A
bidirectional flow is thus detected. This is suitable for detecting relatively small flows.
(Without flow) (With flow)

Temperature sensor 1 Temperature sensor 2 FLOW
Heater
R1 Rh R2 R1 Rh R2
Temperature Temperature distribution symmetrical Temperature Symmetry of temperature distribution are lo

Resistance Resistance
R1 R2 R1 R2
5V 5V
Vo l t a g e Vo l t a g e
R1 R1
V out V out
2.5V 2.5V
R2 R2
V out V out
43
FSM2 Series
Technical data
1 How to select flow sensor

Use this as a guide to selecting the flow range when using a flow sensor to confirm suction and release with a suction nozzle or for
leakage tests, etc.
The flow is calculated by the nozzle’s (pin hole) effective sectional area, and the pressure difference inside and outside the nozzle.
P2: Vacuum P1: Pressurize
z When P1 1.89P2 (sonic)
Q=113.2×S×P1
zWhen P1 < 1.89P2 (subsonic)

Q＝226.4×S× P2（P1−P2）
Q : Flow Ɛ/min. Suction nozzle

P1 : Absolute primary pressure MPa
P2 : Absolute secondary pressure MPa P1: Atmospheric pressure P2: Atmospheric pressure
S : Nozzle (pin hole) effective sectional area mm2
P1: Pressurize
Pin hole
P2: Atmospheric pressure
zExample of calculation
The following table gives the flow calculation values when using ĭ0.1 to 2 nozzle diameter and variable P2.
P1(MPa) P1(MPa) P1(MPa) P1(MPa) Sonic/ Flow calculation values (Ɛ/min)

Absolute Gauge Absolute Gauge subsonic
pressure pressure pressure pressure velocity ĭ0.1 ĭ0.2 ĭ0.3 ĭ0.4 ĭ0.5 ĭ0.7 ĭ1 ĭ1.5 ĭ2
0.1013 0 0.0313 -0.07 Sonic 0.090 0.360 0.810 1.440 2.250 4.411 9.002 20.254 36.007
velocity
0.1013 0 0.0413 -0.06 Sonic 0.090 0.360 0.810 1.440 2.250 4.411 9.002 20.254 36.007
velocity
0.1013 0 0.0513 -0.05 Sonic 0.090 0.360 0.810 1.440 2.250 4.411 9.002 20.254 36.007
velocity
Suction
0.1013 0 0.0613 -0.04 Subsonic 0.088 0.352 0.792 1.408 2.200 4.312 8.800 19.801 35.202
velocity
0.1013 0 0.0713 -0.03 Subsonic 0.082 0.329 0.740 1.315 2.055 4.028 8.220 18.494 32.878
velocity
0.1013 0 0.0813 -0.02 Subsonic 0.072 0.287 0.645 1.147 1.792 3.512 7.166 16.125 28.666
velocity
0.1013 0 0.0913 -0.01 Subsonic 0.054 0.215 0.483 0.859 1.343 2.631 5.370 12.083 21.480
velocity
0.1113 0.01 0.1013 0 Subsonic 0.057 0.226 0.509 0.905 1.414 2.772 5.657 12.727 22.626
velocity
0.1213 0.02 0.1013 0 Subsonic 0.080 0.320 0.720 1.280 2.000 3.920 8.000 17.999 31.998
velocity
0.1413 0.04 0.1013 0 Subsonic 0.113 0.453 1.018 1.810 2.828 5.543 11.313 25.454 45.252
velocity
Blow (leakage inspection)
0.1613 0.06 0.1013 0 Subsonic 0.139 0.554 1.247 2.217 3.464 6.789 13.856 31.175 55.423
velocity
0.1813 0.08 0.1013 0 Subsonic 0.160 0.640 1.440 2.560 4.000 7.840 15.999 35.998 63.996
velocity
0.2013 0.1 0.1013 0 Sonic 0.179 0.716 1.610 2.862 4.472 8.765 17.888 40.248 71.552
velocity
0.3013 0.2 0.1013 0 Sonic 0.268 1.071 2.410 4.284 6.694 13.119 26.774 60.242 107.096
velocity
0.4013 0.3 0.1013 0 Sonic 0.357 1.426 3.209 5.706 8.915 17.474 35.660 80.236 142.641
velocity
0.5013 0.4 0.1013 0 Sonic 0.445 1.782 4.009 7.127 11.137 21.828 44.547 100.230 178.186
velocity
0.6013 0.5 0.1013 0 Sonic 0.534 2.137 4.809 8.549 13.358 26.182 53.433 120.224 213.731
velocity
(CAUTION)
z If there is leakage in piping, etc., the actual flow will be larger than the calculated value. Take pipe leakage into account when selecting the flow.
z If there is a section thinner than the suction nozzle diameter in piping, the flow will be restricted, and may be less than the calculated value. It may not
be possible to check suction, etc.
z The effective section area is a guideline. If the nozzle is long and thin, the effective sectional area will be smaller than the nozzle's opening.
z The response speed is determined by the piping volume content between the flow sensor and the suction nozzle (pin hole). During high-speed
detection, set the flow sensor near the suction nozzle, or reduce the volume content when possible.
44
FSM2 Series
Suction confirmation
1 Response time
Response time during suction confirmation is Pressure sensor

3 way valve
determined by the piping's volumetric capacity and
the vacuum pump's exhaust capacity, etc. Pressure source (20kPa)
When using piping shown at right, for example, the FSM2

dependence of response time on piping is as shown Nozzle (Φ0.25)
Vacuum source (-70kPa)
below. Based on this, to shorten response time, the
piping's volumetric capacity should be minimized.
A B
Test piping
Suction Suction Release (blow) Suction

5.5
5
Analog voltage output (V)
Gas released
4.5 0.5(l/min) 0.5(l/min)
from piping B
4
0(l/min)
3.5
3
-0.3(l/min) A:Φ4×40 B:Φ4×40
2.5
2 Gas is filled A:Φ4×40 B:Φ4×1000
in piping B
1.5
A:Φ4×1000 B:Φ4×40
1
0.5
0 100 200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400
Time (msec)
Dependency of response on piping
2 Using collet nozzle
A collet nozzle is often used when the workpiece to be picked up should not be
directly seated against the nozzle. The collet nozzle is shaped like a pyramid so when Nozzle
the workpiece is picked up, a gap forms at the four corners. This causes leakage
during pick up. If the effective sectional area of the piping, including valve and joints,
etc., is smaller than the collet nozzle and workpiece gap (effective sectional area),
flow is determined by the piping's effective sectional area, and the difference in flow
during suction and when suction is disabled is low. In this case, suction is accurately A-A Cross section Workpiece
confirmed by keeping the effective sectional area of piping larger than the effective
sectional area of the gap between the collet nozzle and workpiece.
A A
Collet nozzle
45
Dedicated for small size flow sensor FSM2
Miniature inline filter
FSM-VFM Series
Main features
This inline filter is dedicated for compact flow sensor FSM2 Series. The content volume is small so high-speed responseis not
obstructed when confirming suction.
zLow profile, miniature size

zEasy-to-replace element
zPolyamide resin, with outstanding chemical resistance, used for the body
zThe transparent case enables element contamination to be checked from outside.
Specifications
Descriptions FSM-VFM-H22 FSM-VFM-H44 FSM-VFM-M55
Working fluid Clean air (JIS B 8392-1.1.1 to 5.6*1.2), compressed air (JIS B 8392-1.1.1~1.6.2)
Applicable tube outer diameter ĭ1.8 (fiber tube) ĭ4 (push-in) Port size M5
Withstanding pressure MPa 0.75
Working pressure range MPa -0.1 to 0.5
Ambient temperature range °C 0 to 50
Case Polyamide
Material
Element Polypropylene, polyethylene
Filtration rating ȝm 10
Product weight g 5.2 9.5 4.2
Recommended flow rate Ɛ/min 10 Note 2
Note 1: Refer to the Compressed air quality classes according to JIS B 8392-1: 2003 on page 2.
Note 2: The pressure loss will increase when the flow exceeds 10L/min., so use at 10L/min. or less.
How to order
FSM VFM H44 B
Model no.
Symbol Descriptions
A Tube outer diameter
A Tube outer
diameter H22 ĭ1.8 (fiber tube)
H44 ĭ4 (fiber tube)
M55 Port size
B Accessory
B Accessory
Blank None
B Bracket
zMaintenance part model No.

FSM VFM B
(Flat headed cross cut tapping screw M2.5 x 6: 1 pc.)
zMaintenance part model No.

FSM VFM E
(Element: 5 pcs., fitting fixing pin: 1 pc.)
46
FSM-VFM Series
Dimensions
zFSM-VFM-H22 zFSM-VFM-H44 zFSM-VFM-H55
Φ10
Φ10
Φ10
10
10
10
37.8 43.8 37
zFSM-VFM-B (bracket)
4.8 6.8
4
Mounting hole
8
16
Φ2.6
8
Filter body
14
8.3
Holding section
6.8 6.8
13.6
Flow characteristics (FSM-VFM-H44)

2.5
2
Pressure loss
1.5
0.1MPa
1
0.3MPa
(kPa)
0.5
0
1 2 3 4 5 6 7 8 9 10 11
Flow (l/min)
zWhen using the fiber tube, the pressure loss may increase depending on the piping conditions.
Cautions
zThis filter has an orientation.
When using this filter to confirm suction, etc., use a check valve to prevent the flow of dirt.
(example of circuit)
Switching valve
FSM
Vacuum FSM2 Filter Nozzle
source
Pressure
source
zRefer to Intro page 10 for the other precautions and element replacement methods.
47
48
49
FSM Series
Related products
Related products
Small size flow sensor FSM Series Catalog No.CB-024S
Compact flow sensor 2 series compatible with various applications
FSM-H Series
Compact/high speed, extremely small flow rate
Extremely small flow at 1 mƐ/min. or less is detected at high speed
Positive and negative pressure combination
FSM-V Series
Miniature and ultra high speed response
5ms quick response is possible
Inline clean filter FCS500/FCS1000 Series Catalog No.CC-722
Appropriate as final filter of different clean applications (Air and inert gas)
High accuracy filtration 0.01ȝm and removal ratio 99.99%
The hollow fiber membrane enables a filtration accuracy of 0.01
ȝm and efficient removal of 99.99%.
Long service life
Life has been increased to about five times that of the
flatmembrane.
Compact, lightweight and large flow rate
The filtration area is 3 to 10 times larger than a flat membrane
with the same capacity, so pressure loss is low even in highflows.
The filter is compact and light-weight even for the same flow.
Oil-prohibited specifications
The entire part has been degreased and cleaned. All steps from
assembly to packing are done in a cleanroom.
Easy maintenance
A transparent case is used for the resin type, enabling element
contamination to be visually confirmed.
Wide variation
2 series, with flow 500 or 1000, are available. These are made
of resin or stainless steel. Push-in fitting, male or female thread
piping are also available.
50
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The goods and their replicas, or the technology and software in this catalog are subject to complementary export
regulations by Foreign Exchange and Foreign Trade Law of Japan.
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C CKD Corporation 2010 All copy rights reserved.
2010.9.DEC
2010.3.GZZ

Small Size Flow Sensor

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Quick response and miniature size New Product

Small size flow sensor

SMALL SIZE FLOW SENSOR RAPIFLOW® FSM2 SERIES

Even items described under CAUTION may cause serious results.

Design & Selection

Working fluid WARNING

Installation & Adjustment

Wiring  Check that sealing tape or adhesive does not

Port thread Tightening torque N•m

Installation & Adjustment

Bracket mounting (dedicated bracket)

WARNING  Beware of sneak current.

 Regularly inspect the product at least once a year

circuited to check the operation of the control

Diode for preventing When the devices are connected to a connector,

while the power is ON. Turn power OFF before

Design & Selection

CAUTION The flow path in the needle valve is not

Installation & Adjustment

During Use & Maintenance

Design & Selection

Installation & Adjustment

During Use & Maintenance

CAUTION Replacing the element

The body could be damaged, and cause a Fitting fixing pin

 Refer to the "Pneumatic, Vacuum and Auxiliary

Integrated display type (resin/aluminum body type)

Integrated display type (resin/aluminum body)

Linearity (display/analog output) ±3%F.S. or less (secondary atmospheric release 25°C)

Mounting direction Horizontal or vertical

Linearity (display/analog output) ±3%F.S. or less (secondary atmospheric release 25°C)

Mounting direction Horizontal or vertical

Note 1: Converted to volumetric flow at 20°C 1 barometric pressure (101 kPa)

Separate display type (resin/aluminum body)

Linearity (display/analog output) ±3%F.S. or less (secondary atmospheric release 25 °C)

V 1 to 5V voltage output 1 point (connected load impedance 50kȍ or more)

Mounting direction Horizontal or vertical

Linearity (display/analog output) ±3%F.S. or less (secondary atmospheric release 25 °C)

V 1 to 5V voltage output 1 point (connected load impedance 50kȍ or more)

Mounting direction Horizontal or vertical

Ambient temperature/humidity 0 to 50°C

Display for each flow range

Display resolution 1mƐ/min 0.01Ɛ/min 0.1Ɛ/min 1Ɛ/min 0.01m3/min 0.01mƐ/min 0.1mƐ/min

Display range 9999999mƐ 99999.99Ɛ 999999.9Ɛ 9999999Ɛ 99999.99m3 99999.99mƐ 999999.9mƐ

Example of model number F Gas types

zCombination of port size and clean room specifications

Discrete option model no.

A Output type Discrete option model no.

Symbol Descriptions Symbol Descriptions

zSeparate display type SUS body Port size Rc1/4

zWith needle valve (SUS body) FSM2-*-S*N

zSeparate display FSM2-D-*

2-Φ3.4 through hole 27

Model no. Fitting (A) dimensions

Integrated display type, port size: push-in fitting ĭ8, ĭ10

2-Φ3.4 through hole 27

Model no. Fitting (A) dimensions

2-Φ3.4 through hole 27

Integrated display type Port size: Rc1/4

Wiring Check that sealing tape or adhesive does not

WARNING Beware of sneak current.

Regularly inspect the product at least once a year

CAUTION The flow path in the needle valve is not

Refer to the "Pneumatic, Vacuum and Auxiliary

zWith needle valve (SUS body) FSM2--SN

FSM2-N/P-H08/H10/S08 46.5 30.0

FSM2-N/P-H08/H10/S08N 46.5 30.0

z FSM2-P- (integrated display type PNP output)

zFSM2-200/500-H04/H06 (resin body) zFSM2-500/101/201-H08/H10 (resin body)

zFSM2-005/010/020 (SUS body) zFSM2-050/100 (SUS body)

zFSM2-200/500-S06 (SUS body) zFSM2-500/101/201-S08 (SUS body)

<Example of display> FSM2-AF101- is used in this example.