FSM3 Series(New manual manufacturing lot number：№0601-※※※～)(6MB)

SMALL SIZE FLOW SENSOR
RAPIFLOW® FSM3 Series
・LCD display type

・Bar display type
・IO-Link type
INSTRUCTION MANUAL
SM-662466-A/6
取扱説明書
SM-358642
• Read this Instruction Manual before using the product.

• Especially, read the safety notes carefully.
• Keep this Instruction Manual in a safe and convenient place for future reference.
SM-662466-A/6 PREFACE
PREFACE
Thank you for purchasing CKD's "RAPIFLOW® FSM3 Series" compact size flow rate sensor.
This Instruction Manual contains basic items such as installation and usage instructions in order to
ensure optimal performance of the product. Please read this Instruction Manual thoroughly and use the
product properly.
Keep this Instruction Manual in a safe place and be careful not to lose it.
Product specifications and appearances presented in this Instruction Manual are subject to change
without notice.
• The product is intended for users who have basic knowledge about materials, piping, electricity, and
mechanisms of pneumatic components. CKD shall not be responsible for accidents caused by
persons who selected or used the product without knowledge or sufficient training.
• Since there are a wide variety of customer applications, it is impossible for CKD to be aware of all of
them. Depending on the application or usage, the product may not be able to exercise its full
performance or an accident may occur due to fluid, piping, or other conditions. It is the responsibility
of the customer to check the product specifications and decide how the product shall be used in
accordance with the application and usage.
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SM-662466-A/6 SAFETY INFORMATION
SAFETY INFORMATION
When designing and manufacturing a device using this product, the customer is responsible to
manufacture a safe device. To achieve this, please verify the safety of electric control system is secured,
which controls the mechanical mechanism of the device and, pneumatic pressure control circuit or water
control circuit.
To ensure the safety of device design and control, observe organization standards, relevant laws and
regulations including the followings.
ISO 4414, JIS B 8370 and JFPS 2008 (the latest edition of each standard)
High Pressure Gas Safety Law, Occupational Safety and Health Law, and other safety regulations,
organization standards and regulations.
In order to use our products safely, it is important to select, use, handle, and maintain the products
properly.
Observe the warnings and precautions described in this Instruction Manual to ensure device safety.
Although various safety measures have been adopted in the product, customer's improper handling may
lead to an accident. To avoid this,
thoroughly read and understand this Instruction Manual before using the product.
To explicitly indicate the severity and likelihood of a potential harm or damage, precautions are classified
into three categories: "DANGER", "WARNING", and "CAUTION".
Indicates an imminent hazard. Improper handling will cause death or serious

DANGER injury to people.
Indicates a potential hazard. Improper handling may cause death or serious
WARNING injury to people.
Indicates a potential hazard. Improper handling may cause injury to people or
CAUTION damage to property.
Note that some items described as "CAUTION" may lead to serious results depending on the situation.
Since each item provides important information, it must be observed.
Other general precautions and tips on using the product are indicated by the following icon.
Indicates general precautions and tips on using the product.
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Precautions on Product Use
WARNING
This product must be handled only by those who have enough knowledge and experience.
This product was designed and manufactured as a general industrial machinery equipment and
parts.
This product must be used within its stated specifications.
Do not use out of the specifications unique to this product. In addition, never modify or additionally
machine this product.
This product is intended for use in general industrial machinery equipment or parts. It is not
intended for use in outdoors or for use under the following conditions or environments.
(Note that this product can be used when CKD is consulted prior to its usage and the customer
consents to CKD product specifications. However, even in that case, the customer should provide
safety measures to avoid danger to prevent danger in the event of failures.)
• Devices and usage that directly contact nuclear power, railways, aviation, ships, vehicles,
medical machines, beverages and foods.
• Use for applications requiring safety, including amusement, emergency cutoff circuits, press
machines, brake circuits, and items used for safety measures.
• Use for applications where life or assets could be significantly affected, and special safety
measures are required.
Do not handle this product, and remove piping / devices before confirming the safety.
• Conduct inspections and maintenance of machines and devices only after confirming the safety
of all systems related to this product. Also, turn the power OFF of supply air, supply water, and
applicable facilities that are energy sources. Make sure to exhaust compressed air inside the
system and be cautious of water and electricity leakages.
• As it is possible that there are high temperature parts and charged parts even after operation is
stopped, be cautious when handling this product and removing piping / devices.
• Before starting / restarting machines and devices that a pneumatic pressure device is used,
make sure to confirm the system safety is secured with pop-out prevention measures, etc.
Always adopt a fail safe mechanism when this product is used under a condition that a failure
leads to significant accidents.
CAUTION
Withstand pressure differs depending on each series.
Make sure to select the right product.
Be cautious of the followings when using with dynamic pressure near the maximum working
pressure.
With each series, the sensor can handle an overflow double the measures range. If dynamic
pressure is applied near the maximum working pressure (when a pressure difference exceeding
the max. working pressure is applied between primary and secondary sides), the sensor may
operate abnormally. If dynamic pressure is applied, such as when a work piece is filled for leakage
inspection, provide a bypass circuit or restrictor so that dynamic pressure is not applied to the
sensor.
The needle valve cannot be used as the stop valve that leakage is required to be zero.
The specifications of this product allows leakage to some extent.
The flow path is not completely free of dust generation.
A final clean filter should be used in circuits where dust generation could be a problem.
Use in a normal flow that does not include irregular fluctuations.
Measuring the pulsating flow rate may cause errors in the measured flow rate. Restrict the flow
rate with the fixed orifice and needle valve, etc., and use it in a laminar flow state.
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CAUTION
The flow rate is fluctuating, the measured flow rate value will also fluctuate.
If the actual flow rate is fluctuating, the measured flow rate value will also fluctuate.
Either increase the FSM3 display cycle or response time, or average the analog output on the
device. In particular, note that control valves such as solenoid valves can be easily generated
when used near a circuit or pump that opens and closes quickly and frequently.
Be cautious of the followings when using for suction verification, etc.
[1] Mount an air filter upstream from suction in compliance with use conditions to prevent the entry
of foreign matter.
[2] Consider the atmospheric dew point and the product’s ambient temperature, and use the
product under conditions in which dew does not condense in pipes.
[3] When this product is used for vacuum applications such as air suction, do not bend the tube
near the push-in fitting.
If stress is applied to the tube near the push-in fitting, insert an insertion ring into the tube, and
connect the tube to the push-in fitting.
[4] When the confirmation sensor is switched from a pressure sensor (switch) to a flow rate sensor
(switch), sensor output (switch output) logic will be reversed. (Refer to the drawing below.)
Note that the PLC sequence program must be changed or revised.
If source pressure or vacuum source is not supplied when device power is turned on, “flow rate
0” = “sensor output (switch output) ON” status is set at the flow rate sensor (switch). Check that
this is not a problem with the PLC sequence program, etc.
Pressure sensor (switch) Flow rate sensor (switch)
ON at setting value or more ON at setting value or less
verification
Suction
Atmospheric High vacuum Flow rate Flow rate

pressure side side 0 side large side
[5] Select the flow rate range based on the operating vacuum pressure and suction nozzle
diameter.
Refer to “3.4 Flow rate theory calculation method”.
[6] Response speed may be delayed by the piping volume between the suction nozzle and this
product. In this case, take countermeasures to reduce piping capacity.
Precautions regarding used fluid
DANGER
Do not make a gas flow within the explosion limit.
Explosion accident may be generated.
When using a product with no oil-prohibited processing, do not flow oxygen gas.
It may cause fires. In addition, even if a product is treated with oil-prohibited processing, when a
gas except for oxygen gas is flowed once, do not use with oxygen gas again.
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WARNING
Do not use this product as a transaction meter.
As it does not comply with Japanese Measurement Law and equivalent regulations of other
countries, do not use for commercial transactions. Use the product only as the sensor for industry
fields.
Appropriate fluid temperature is within 0 to 50°C.
Do not use in places where dew is generated by sudden temperature change even within the
temperature range.
Do not use fluids besides applicable fluids.
When fluids besides applicable fluids are used, the accuracy specification cannot be guaranteed.
Be cautious of purification level of fluid.
• Use dry gas which does not contain corrosive elements such as chlorine, sulfur or acids, and
which is clean and does not contain dust or oil mist.
• Depending on the fluid, retaining the fluid for a long time could adversely affect the performance.
Do not seal the fluid in the pipe for long periods of time.
• If this product is contaminated by foreign objects (dust and water drops inside piping, oil mist,
etc.), the accuracy and control performance may deteriorate and cause failure. If it may be
contaminated by foreign objects, attach a filter, air dryer and oil mist filter on the primary side
(upstream) of this product.
• When using compressed air, use clean air that complies with JIS B 8392-1：2012(ISO 8573-1：
2010) [Class 1:1:1 to 1:6:2].
• As drain (water, oxidized oil and foreign objects) may be contained in the compressed air from
the compressor, use this product by attaching a filter air dryer and oil mist filter (Micro-Alessa)
on the primary side (upstream).
The mesh (wire mesh) inside this product is to rectify the flow inside piping, and therefore, it
cannot be used to remove the flowed-in foreign objects.
<Recommended circuit>
Oil mist filter
Filter (Micro-Alessa)
Pneumatic Air dryer Flow rate sensor

Regulator
pressure FSM3 Series
source
Use this product after verifying the working pressure range and flow rate range.
• If used in maximum working pressure or more, minimum working pressure or less, and outside
of specified flow rate range, it may cause failures.
• If energized in a vacuum state of -0.09 MPa or less, the sensor’s heat dissipation will suffer,
leading to degradation of the sensor.
When using a valve on the primary side of this product, use a valve with oil-prohibited
specification and attach a filter.
This product may malfunction and result in failure due to grease on the valve, diffused oil, and
abrasion powder generated from the valve.
When using the valve with liquified gases such as carbon dioxide, always vaporize the gas.
Faults could result if the liquified gas enters this product.
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Precautions regarding maintenance
CAUTION
Do not use solvents, alcohol, and cleaning detergents to clean this product.
The case is made of resin. The resin could absorb these chemicals. Wipe off dirt with a rag soaked
in a diluted neutral detergent solution and wrung out well.
Verify the flow rate accuracy periodically.
It is recommended to verify the flow rate accuracy periodically. Depending on the customer’s use
environment and condition, the accuracy may fluctuate from the first time. Also, if used for a long
time, the accuracy may fluctuate due to sensor chip deterioration.
Displayed flow rate on this product is a value of mass flow rate converted to volume flow rate.
It is displayed by converting measured mass flow rate to the volume flow rate at 20°C, 1
atmospheric pressure (101kPa), and relative humidity 65% RH (Gas types besides air uses
20°C, 1 atmospheric pressure (101kPa), and 0% RH).
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SM-662466-A/6 CONTENTS
CONTENTS
PREFACE ........................................................................................................................... i
SAFETY INFORMATION .................................................................................................. ii
Precautions on Product Use .......................................................................................... iii
Precautions regarding used fluid ................................................................................... iv
Precautions regarding maintenance .............................................................................. vi
CONTENTS ..................................................................................................................... vii
1. PRODUCT OVERVIEW ............................................................................................. 1
1.1 Model No. display ............................................................................................... 1
1.1.1 LDC display type (FSM3-L Series) ................................................................ 1
1.1.2 Bar display (FSM3-B series) ......................................................................... 7
1.1.3 IO-Link (FSM3-C Series) ............................................................................. 13
1.1.4 Option .......................................................................................................... 17
1.2 Specifications .................................................................................................... 18
1.2.1 LCD display type ......................................................................................... 18
1.2.2 Bar display type ........................................................................................... 24
1.2.3 IO-Link type ................................................................................................. 30
1.3 Communication specification ............................................................................ 34
1.3.1 General ........................................................................................................ 34
1.3.2 On demand data .......................................................................................... 35
1.3.3 Parameter and commands .......................................................................... 37
1.3.4 Process data IN ........................................................................................... 39
1.3.5 Observation ................................................................................................. 39
1.3.6 Diagnosis ..................................................................................................... 40
1.4 Dimensions ....................................................................................................... 41
1.4.1 LDC display type ......................................................................................... 41
1.4.2 Bar display type ........................................................................................... 48
1.4.3 IO-Link type ................................................................................................. 53
1.4.4 Option .......................................................................................................... 57
1.4.5 Products weight ........................................................................................... 59
1.5 Option (ATEX Compliant) ................................................................................. 61
2. INSTALLATION ....................................................................................................... 62
2.1 Installation Environment ................................................................................... 62
2.2 Mounting Method .............................................................................................. 64
2.3 Piping Method ................................................................................................... 66
2.3.1 Cleaning the pipes ....................................................................................... 66
2.3.2 Sealant......................................................................................................... 66
2.3.3 Piping direction ............................................................................................ 66
2.3.4 Tightening .................................................................................................... 67
2.3.5 EXA connection method .............................................................................. 68
2.4 Wiring method ................................................................................................... 69
2.4.1 LDC display (NPN output) ........................................................................... 71
2.4.2 LDC display type (PNP output) ................................................................... 72
2.4.3 Copying setting values ................................................................................ 73
2.4.4 Bar display type ........................................................................................... 73
2.4.5 Connection between Bar display type and separate display device ............... 74
2.4.6 IO-link type .................................................................................................. 74
2.5 Analog output characteristics ........................................................................... 75
3. USAGE ..................................................................................................................... 76
3.1 How to use the LCD display (FSM3-L series) .................................................. 79
3.1.1 Names and functions of display/operation section ..................................... 79
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SM-662466-A/6 CONTENTS
3.1.2 Explanation of functions .............................................................................. 79

3.1.3 How to operate ............................................................................................ 82
3.1.4 How to key operate environment-resistant specifications......................... 108
3.2 Use method of bar display type (FSM3-B series) .......................................... 109
3.2.1 Names of display section .......................................................................... 109
3.3 How to use the IO-Link type (FSM3-C series)................................................ 110
3.3.1 Names of display section .......................................................................... 110
3.3.2 Explanation of functions (IO-Link type) ..................................................... 110
3.4 Flow rate logic calculation method .................................................................. 111
4. TROUBLESHOOTING........................................................................................... 112
4.1 Error code (LCD display type) ........................................................................ 112
4.2 Error code (Bar display type) .......................................................................... 114
4.3 Error code (IO-Link type) ................................................................................ 114
4.4 Troubleshooting .............................................................................................. 115
5. WARRANTY PROVISIONS ................................................................................... 118
5.1 Warranty conditions ........................................................................................ 118
5.2 Warranty period............................................................................................... 118
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SM-662466-A/6 1. PRODUCT OVERVIEW
1. PRODUCT OVERVIEW
1.1 Model No. display
1.1.1 LDC display type (FSM3-L Series) Code Content

◼ Resin body type [A] Display
L Liquid crystal display
[B] Flow rate range (full scale flow rate)
FSM3 - L 005 U 1 BH 1 A 1 N - B M R - P80 005 500 mL/min 500 50 L/min
010 1000 mL/min 101 100 L/min
020 2 L/min 201 200 L/min
Model No. 050 5 L/min 501 500 L/min
100 10 L/min 102 1000 L/min
200 20 L/min
[A] Display
[C] Flow direction *2
[C] Flow direction U Uni-direction
B Bi-direction
[B] Flow rate range [D] Body material/applicable fluids
(full scale flow rate) [D] Body material/applicable fluids Body material Applicable fluids
1 Resin Air (gas type can be switched)
[E] Connection port size
<Example of model No.> [E] Connection port size BH Push-in (for φ 4 mm tube) AF G1/8 *3
FSM3-L005U1BH1A1N-BMR-P80 CH Push-in (for φ 6 mm tube) BF G1/4 *3
Model: RAPIFLOW FSM3 Series DH Push-in (for φ 8 mm tube) CF G1/2 *3
[A] Display : Liquid crystal display EH Push-in (for φ 10 mm tube) AB G1/8 *4
[B] Flow rate range (full scale flow rate) HH Push-in (for φ 1/4” tube) BB G1/4 *4
: 500 mL/min
JH Push-in (for φ 3/8” tube) CB G1/2 *4
[C] Flow direction : Uni-direction
AA Rc1/8 AC NPT1/8
[D] Body material/applicable fluids
: Resin/air BA Rc1/4 BC NPT1/4
[E] Connection port size CA Rc1/2 CC NPT1/2
: Push-in [F] Piping direction
(φ4 mm for tube) [F] Piping direction 1 Straight
[F] Piping direction : Straight
2 Elbow *5
[G] Output specifications
: Analog voltage output x 1 [G] Output specifications
NPN switch output x 1 [G] Output specifications Analog output Switch output Setting copy function
With setting copy function A 1 point (NPN) Yes
[H] Unit specifications : SI units only B 1 point 2 points (NPN) ―
[I] Valve option : None (Voltage output)
C 1-5 V 1 point (PNP) Yes
[J] Lead wire : 5-conductor 3 m
[K] Mounting attachments D 2 points (PNP) ―
: DIN rail mount E 1 point (NPN) Yes
F 1 point 2 points (NPN) ―
[L] Attached documents : Inspection certification
(Current output)
[M] Clean-room specifications G 4-20 mA 1 point (PNP) Yes
: Oil-prohibited process H 2 points (PNP) ―
[H] Unit specifications
■Precautions for model No. selection [H] Unit specifications 1 SI units only
*1: Refer to the correspondence table on the following page when 2 With unit switching function (overseas models only) *6
selecting the model.
*2: For “B: bi-direction” models on the flow direction, [I] Valve option [I] Valve option *2
is “N: None” only. Note that “T: with needle valve” and “E: EXA [I] Valve option N None
connecting fitting” cannot be selected.
*3: The G screw connection shape complies with ISO16030. T With needle valve (only for models 200 L or less)
*4: Check G screw connection shape with "1.4 Dimensions" when E EXA connecting fitting (EXA sold separately) *7, *8, *9
selecting.
(The G screw connection shape complies with JIS B 2351-1 O [J] Lead wire
type) [J] Lead wire Blank None
*5: Note that the elbow fitting will interfere with the case when A 5-conductor 1 m
installed upward and with the DIN rail installation when installed
B 5-conductor 3 m
downward.
*6: Models with the unit switching function are not sold in Japan. [K] Mounting attachments 注 10､注 11
*7: Connection to solenoid valve (EXA series) is possible with the [K] Mounting
dedicated fitting.
Blank None
Refer to "1.4 Dimensions". attachment H Bracket 1 (for models 200 L or less)
*8: Be sure to set EXA to the OUT side of the product. s J Bracket 2 (for 500 or 1000 L models)
Use a lead wire for the EXA coil option. K Panel mounting (for sensor products of models 200 L or less)
The DIN terminal box cannot be mounted because it will cause
interference. L Panel mounting (for needle valves of models 200 L or less)
After making sure it is connected firmly, confirm that there is no M DIN rail mounting (for models 200 L or less)
mis-connection and external leakage.
*9: [M] Clean-room specifications “P.70” and “P.80” cannot be [L] Attached documents
selected. [L] Attached Blank None
*10: Note that the bracket mounting position may interference with documents R Company certification
the elbow fitting.
S Company certification + Traceability certification
*11: Optional parts are provided with the product. They are not
mounted to the product. [M] Clean-room specifications
*12: The product surface is degreased and cleaned before packaging, [M] Clean-room Blank None
and heat-sealed into an antistatic bag on a clean bench (Class specifications
1000 or more). P70 Anti-dust generation *12
*13: In addition to P.70 specifications, the gas contact parts are P80 Oil-prohibited processing *13
degreased and cleaned.
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Compatibility table of flow rate range and port size, needle valve option, and EXA connection fitting
[E] Port size [F] Piping direction
[B] Flow rate range
 :Port compatibility  :Needle valve option compatibility :EXA connection fitting compatibility
Compatibility table of port size and clean-room specifications

Blank
[M] Clean-room
specifications
Blank
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◼ Stainless steel body type Code Content
FSM3 - L 005 U 2 AA 1 A 1 N - B M R - P80 [A] Display

L Liquid crystal display
005 500 mL/min 500 50 L/min
010 1000 mL/min 101 100 L/min
020 2 L/min 201 200 L/min
100 10 L/min 102 1000 L/min
200 20 L/min
[A] Display
B Bi-direction
2 SUS Air (Gas type can be switched)
3 SUS Oxygen (Oil-prohibited specification) *3
[E] Port size
[E] Port size AA Rc1/8
BA Rc1/4
CA Rc1/2
AF G1/8 *4
BF G1/4 *4
CF G1/2 *4
AB G1/8 *5
BB G1/4 *5
CB G1/2 *5
[F] Piping direction AC NPT1/8
BC NPT1/4
CC NPT1/2
AD 1/4” double barbed fitting (50 L/min or less)
BD 1/4” double barbed fitting (50 to 200 L/min)
AE 1/4” JXR male fitting (50 L/min or less)
BE 1/4” JXR male fitting (50 to 200 L/min)
<Example of model No.> [F] Piping direction

1 Straight
FSM3-L005U2AA1A1N-BMR-P80
Model: RAPIFLOW FSM3 Series [G] Output specifications
[A] Display : Liquid crystal display Analog output Switch output Setting copy function
[B] Flow rate range : 500 mL/min A 1 point (NPN) Yes
[C] Flow direction : Uni-direction B 1 point 2 points (NPN) ―
[D] Body material/applicable fluids (Voltage output)
C 1-5 V 1 point (PNP) Yes
: SUS/air
[E] Port size : Rc1/8 D 2 points (PNP) ―
[F] Piping direction : Straight E 1 point (NPN) Yes
F 1 point 2 points (NPN) ―
[G] Output specifications (Current output)
: Analog voltage output x 1 G 4-20 mA 1 point (PNP) Yes
NPN switch output x 1 H 2 points (PNP) ―
With setting copy function
[H] Unit specifications : SI units only [H] Unit specifications
[I] Valve option : None
[H] Unit specifications 1 SI units only
[J] Lead wire : 5-conductor 3 m 2 With unit switching function (overseas models only) *6
[K] Mounting attachments [I] Valve option *2, *10
: DIN rail mount [I] Valve option N None
[L] Attached documents
T With needle valve (only for models 200 L or less)
: Inspection certification
[M] Clean-room specifications [J] Lead wire
: Oil-prohibited processing [J] Lead wire Blank None
A 5-conductor 1 m
B 55-conductor 3 m3m
[K] Mounting attachments 注7
■Precautions for model No. selection [K] Mounting Blank None
*1: Refer to the correspondence table on the following page when attachments
selecting the model. H Bracket 1 (for models 200 L or less)
*2: For the model that the flow direction is “B: Bi-direction” and the J Bracket 2 (for 500 or 1000 L models)
application fluid is oxygen, “[I] Valve option” becomes “N: None” K Panel mounting (for sensor products of models 200 L or less)
only.
Note that “T: With needle value” cannot be selected. L Panel mounting (for needle valves of models 200 L or less)
*3: “3: Oxygen” cannot be selected with 500 L/min and 1000 L/min M DIN rail mounting (for models 200 L or less)
models.
*4: The G screw connection shape complies with ISO 16030. [L] Attached documents
*5: Check the G screw connection shape with "1.4 Dimensions" [L] Attached Blank None
when selecting. documents R Inspection certification
(The G screw connection shape complies with JIS B 2351-1 O type)
*6: Models with the unit switching function are not sold in Japan. S Inspection certification + Traceability certification
*7: Optional parts are provided with the product. They are not [M] Clean-room specifications *10
mounted to the product. [M] Clean-room Blank None
*8: The product surface is degreased and cleaned before packaging,
and heat-sealed into an antistatic bag on a clean bench (Class
specifications P70 Anti-dust generation *8
1000 or more). P80 Oil-prohibited processing *9
*9: In addition to P.70 specifications, the contact gas parts are
*10: This cannot be selected on an oxygen type (blank only).
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Flow rate range and port size

[E] Port size
1/4” Double 1/4” JXR

barbed fitting Male fitting
[B] Flow rate range
 :Connection port compatibility  :Needle valve option compatibility
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◼ Environment-resistant specifications Code Content

[A] Display
FSM3 - L 005 U 4 AA 1 A 1 N - B J R - P80 - EX L Liquid crystal display
005 500 mL/min 500 50 L/min
010 1000 mL/min 101 100 L/min
020 2 L/min 201 200 L/min
100 10 L/min 102 1000 L/min
200 20 L/min
[A] Display
B Bi-direction
SUS Air
4
(Environment-resistant specs) (Gas type can be switched)
SUS Oxygen (Oil-prohibited
5
(Environment-resistant specs) specification) *2
[E] Port size
BA Rc1/4
CA Rc1/2
AF G1/8 *3
BF G1/4 *3
CF G1/2 *3
AC NPT1/8
BC NPT1/4
CC NPT1/2
[F] Piping direction
[F] Piping direction 1 Straight
[G] Output specifications Analog output Switch output Setting copy function
A 1 point (NPN) Yes
B 1 point 2 points (NPN) ―
(Voltage output)
<Example of model No.> C 1-5 V 1 point (PNP) Yes
FSM3-L005U4AA1A1N-BJR-P80-EX D 2 points (PNP) ―
Model: RAPIFLOW FSM3 Series E 1 point (NPN) Yes
[A] Display : Liquid crystal display F 1 point 2 points (NPN) ―
(Current output)
[B] Flow rate range : 500 mL/min G 4-20 mA 1 point (PNP) Yes
[C] Flow direction : Uni-direction H 2 points (PNP) ―
: SUS [H] Unit specifications
(Environment
-resittant specs)/air 2 With unit switching function (overseas models only) *4
[E] Port size : Rc1/8
[I] Valve option
[F] Piping direction : Straight [I] Valve option N None
: Analog voltage output x 1 [J] Lead wire
NPN switch output x 1 [J] Lead wire Blank None
With setting copy function A 5-conductor 1 m
[H] Unit specifications : SI units only B 5-conductor 3 m
[J] Lead wire : 5-conductor 3 m [K] Mounting attachments *5
[K] Mounting attachments [K] Mounting Blank None
: Bracket 2 attachments J Bracket 2
: Inspection certification [L] Attached documents
[L] Attached Blank None
[M] Clean-room specifications
: Oil-prohibited processing
documents R Inspection certification
[#] Option (ATEX Compliant) S Inspection certification + Traceability certification
: ATEX Compliant
[M] Clean-room specifications *8
[M] Clean-room Blank None
■Precautions for model No. selection specifications P70 Anti-dust generation *6
*1: Refer to the correspondence table on the following page when P80 Oil-prohibited processing *7
*2: “3: Oxygen” cannot be selected with 500 L/min and 1000 L/min [#] Option (ATEX Compliant)
models. [*] Option Blank None
*3: The G screw connection shape complies with ISO 16030. (ATEX Compliant) EX ATEX Compliant *9
*4: Models with the unit switching function are not sold in Japan.
mounted to the product.
1000 or more).
*9: Refer to “Option (ATEX Compliant)” on page 61 for
specifications.
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1.1.2 Bar display (FSM3-B series)

◼ Resin body type
FSM3 - B 005 U 1 BH 1 J 1 N - D H S - P70

Code Content
Model No. [A] Display
[A] Display B Bar display
[B] Flow rate range 005 500 mL/min 500 50 L/min
(full scale flow rate) 010 1000 mL/min 101 100 L/min
020 2 L/min 201 200 L/min
050 5 L/min 501 500 L/min
100 10 L/min 102 1000 L/min
200 20 L/min
B Bi-direction
[D] Body material/applicable fluids Body material Applicable fluids
1 Resin Air
[E] Port size
[E] Port size BH Push-in (for φ 4 mm tube) AF G1/8 *4
<Example of model No.> CH Push-in (for φ 6 mm tube) BF G1/4 *4
FSM3-B005U1BH1J1N-DHS-P70 DH Push-in (for φ 8 mm tube) CF G1/2 *4
<Example of model No.> EH Push-in (for φ 10 mm tube) AB G1/8 *5
[A] Display : Bar display HH Push-in (for φ 1/4” tube) BB G1/4 *5
[B] Flow rate range : 500 mL/min JH Push-in (for φ 3/8” tube) CB G1/2 *5
[C] Flow direction : Uni-direction AA Rc1/8 AC NPT1/8
[D] Body material/applicable fluids BA Rc1/4 BC NPT1/4
: Resin/air
CA Rc1/2 CC NPT1/2
[E] Port size : Push-in
(φ 4 mm for tube) [F] Piping direction
[F] Piping direction : Straight [F] Piping direction 1 Straight
[G] Output specifications 2 Elbow *6
: Analog voltage output x 1
[H] Unit specifications : SI units only [G] Output specifications *2
[I] Valve option : None [G] Output specifications J Analog voltage output x 1
[J] Lead wire : 4-conductor 3 m K Analog current output x 1
[K] Mounting attachments
: Bracket 1 [H] Unit specifications
[L] Attached documents [H] Unit specifications 1 SI units only
: Inspection certification [I] Valve option *3
+ Traceability certification [I] Valve option N None
[M] Clean-room specifications
E EXA connecting fitting (EXA sold separately) *7, *8, *9
: Anti-dust generation
[J] Lead wire
[J] Lead wire Blank None
■Precautions for model No. selection C 4-conductor 1 m
*1: Refer to the correspondence table on the following page when D 4-conductor 3 m
*2: When using in combination with the separate display device [K] Mounting attachments *10, *11
(FSM2-D), select “J: Analog voltage output x 1”. Blank None
*3: The [I] Valve option of the model with the flow direction “B: H Bracket 1 (for models 200 L or less)
Bi-direction” is “N: None” only. Note that “E: EXA connection
fitting” cannot be selected. [K] Mounting J Bracket 2 (for 500 or 1000 L models)
*4: The G screw connection shape complies with ISO 16030. attachments M DIN rail mounting (for models 200 L or less)
*5: Check the G screw connection shape with "1.4 Dimensions"
when selecting.
(The G screw connection shape complies with JIS B 2351-1 O [L] Attached Blank None
type) documents R Inspection certification
*6: Note that the elbow fitting interferes with the case when installed S Inspection certification + Traceability certification
upward and with the DIN rail installation when installed
downward. [M] Clean-room specifications
*7: Connection to solenoid valve (EXA series) is possible with the [M] Clean-room Blank None
dedicated fitting.
Refer to "1.4 Dimensions". specifications P70 Anti-dust generation *12
*8: Be sure to set EXA to the OUT side of the product. P80 Oil- prohibited processing *13
Use a lead wire for the EXA coil option.
The DIN terminal box cannot be mounted because it will cause interference.
After making sure it is connected firmly, confirm that there is no mis-connection
and external leakage.
*9: [M] Clean-room specifications “P.70” and “P.80” cannot be selected.
*10: The option of “Panel mounting” cannot be selected.
Note that the bracket mounting position may interference with the elbow type
fitting.
*11: Optional parts are provided with the product. They are not mounted to the
product.
*12: The product surface is degreased and cleaned before packaging, and
heat-sealed into an antistatic bag on a clean bench (Class 1000 or more).
*13: In addition to P.70 specifications, the contact parts are degreased and cleaned.
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Compatibility table of flow rate range and port size, and EXA connection fitting
[B] Flow rate range
 :Port compatibility :EXA connection fitting compatibility

Blank
[M] Clean-room
specifications
Blank
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◼ Stainless steel body type

FSM3 - B 005 U 2 AA 1 J 1 N - D H S - P70
Code Content
[A] Display
[A] Display B Bar display
Model No. [B] Flow rate range (full scale flow rate)
020 2 L/min 201 200 L/min
050 5 L/min 501 500 L/min
100 10 L/min 102 1000 L/min
200 20 L/min
[C] Flow direction
B Bi-direction
[D] Body material/applicable fluids Body material Applicable fluid
2 SUS Air
3 SUS Oxygen (Oil- prohibited specification) *3
[E] Port size
BA Rc1/4
CA Rc1/2
AF G1/8 *4
BF G1/4 *4
CF G1/2 *4
AB G1/8 *5
BB G1/4 *5
CB G1/2 *5
AC NPT1/8
BC NPT1/4
CC NPT1/2
BD 1/4” double barbed fitting (50 to 200 L/min)
<Example of model No.>
AE 1/4” JXR male fitting (50 L/min or less)
FSM3-B005U2AA1J1N-DHS-P70
BE 1/4” JXR male fitting (50 to 200 L/min)
Model: RAPIFLOW FSM3 Series
[A] Display : Bar display [F] Piping direction
[B] Flow rate range : 500 mL/min [F] Piping direction 1 Straight
[C] Flow direction : Uni-direction
[D] Body material/applicable fluids [G] Output specifications *2
: SUS/air
[G] Output specifications J Analog voltage output x 1
[E] Port size : Rc1/8 K Analog current output x 1
[F] Piping direction : Straight [H] Unit specifications
: Analog voltage output x 1
[H] Unit specifications : SI units only [I] Valve option
[I] Valve option : None [I] Valve option N None
[J] Lead wire : 4-conductor 3 m
[K] Mounting attachments [J] Lead wire
: Bracket 1 [J] Lead wire Blank None
[L] Attached documents C 4-conductor 1 m
: Inspection certification D 4-conductor 3 m
+ Traceability certification
[M] Clean-room specifications [K] Mounting attachments *6
: Anti-dust generation [K] Mounting Blank None
attachments H Bracket 1 (for models 200 L or less)
J Bracket 2 (for 500 or 1000 L models)
■Precautions for model No. selection M DIN rail mounting (for models 200 L or less)
*1: Refer to the correspondence table on the following page when [L] Attached documents
selecting the model. [L] Attached Blank None
*2: When using in combination with the separate display device
(FSM2-D), select “J: Analog voltage output x 1”.
documents R Inspection certification
*3: “3: Oxygen” cannot be selected with 500 L/min and 1000 L/min S Inspection certification + Traceability certification
models.
*4: The G screw connection shape complies with ISO 16030. [M] Clean-room specifications *9
*5: Check the G screw connection shape with "1.4 Dimensions" [M] Clean-room Blank None
when selecting. specifications P70 Anti-dust generation *7
(The G screw connection shape complies with JIS B 2351-1 O P80 Oil- prohibited processing *8
type)
1000 or more).
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[E] Port size

barbed fitting male fitting
[B] Flow rate range
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◼ Environment-resistant specifications
Code Content
[A] Display
FSM3 - B 005 U 4 AA 1 J 1 N - D J S - P70 - EX B Bar display
005 500 mL/min 500 50 L/min
010 1000 mL/min 101 100 L/min
020 2 L/min 201 200 L/min
100 10 L/min 102 1000 L/min
200 20 L/min
[A] Display
[C] Flow direction
B Bi-direction
SUS Air
4
(Environment-resistant specs) (Gas type can be switched)
SUS Oxygen (Oil-prohibited
5
(Environment-resistant specs) specification) *3
[E] Port size
BA Rc1/4
CA Rc1/2
AF G1/8 *4
BF G1/4 *4
CF G1/2 *4
AC NPT1/8
BC NPT1/4
CC NPT1/2
[F] Piping direction
[F] Piping direction 1 Straight
[G] Output specifications *2
[G] Output specifications J Analog voltage output x 1
K Analog current output x 1
[H] Unit specifications
<Example of model No.> [H] Unit specifications 1 SI units only
FSM3-B005U4AA1J1N-DJS-P70-EX
[I] Valve option
Model: RAPIFLOW FSM3 Series [I] Valve option
[A] Display : Bar display N None
[B] Flow rate range : 500 mL/min [J] Lead wire
[C] Flow direction : Uni-direction [J] Lead wire Blank None
[D] Body material/applicable fluids C 4-conductor 1 m
: SUS
D 4-conductor 3 m
(Environment-resittantspecs)
/air [K] Mounting attachments *5
[E] Port size : Rc1/8 [K] Mounting Blank None
[F] Piping direction : Straight attachments J Bracket 2
: Analog voltage output x 1 [L] Attached documents
[H] Unit specifications : SI units only [L] Attached Blank None
[I] Valve option : None documents R Inspection certification
[J] Lead wire : 4-conductor 3 m S Inspection certification + Traceability certification
[M] Clean-room specifications *8
: Bracket 2
[M] Clean-room Blank None
: Inspection certification specifications P70 Anti-dust generation *6
+ Traceability certification P80 Oil-prohibited processing *7
[M] Clean-room specifications [#] Option (ATEX Compliant)
: Anti-dust generation [*] Option Blank None
[#] Option (ATEX Compliant) (ATEX Compliant) EX ATEX Compliant *9
: ATEX Compliant
■Precautions for model No. selection

*1: Refer to the correspondence table on the following page when
*2: When using in combination with a separated display (FSM2-D),
select “J”.
*3: “3: Oxygen” cannot be selected with 500 L/min and 1000 L/min
models.
*4: The G screw connection shape complies with ISO 16030.
1000 or more).
*9: Refer to “Option (ATEX Compliant)” on page 61 for
specifications.
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1.1.3 IO-Link (FSM3-C Series)

◼ Resin body type
FSM3 - C 005 U 1 BH 1 L 1 N - G H R - P70

Code Content
Model No. [A] Display
[A] Display C IO-Link
020 2 L/min 201 200 L/min
050 5 L/min 501 500 L/min
100 10 L/min 102 1000 L/min
200 20 L/min
[C] Flow direction
B Bi-direction
[D] Body material/applicable fluids Body material Applicable fluid
1 Resin Air (Gas type can be switched)
[E] Port size
[E] Port size BH Push-in (for φ 4 mm tube) AF G1/8 *2
CH Push-in (for φ 6 mm tube) BF G1/4 *2
DH Push-in (for φ 8 mm tube) CF G1/2 *2
EH Push-in (for φ 10 mm tube) AB G1/8 *3
HH Push-in (for φ 1/4” tube) BB G1/4 *3
JH Push-in (for φ 3/8” tube) CB G1/2 *3
AA Rc1/8 AC NPT1/8
<Example of model No.> BA Rc1/4 BC NPT1/4
FSM3-C005U1BH1L1N-GHR-P70 CA Rc1/2 CC NPT1/2
Model: RAPIFLOW FSM3 Series [F] Piping direction
[A] Display : IO-Link [F] Piping direction 1 Straight
[B] Flow rate range : 500 mL/min
[C] Flow direction : Uni-direction 2 Elbow *4
[D] Body material/applicable fluids [G] Output specifications
: Resin/air [G] Output specifications L IO-Link communication
[E] Port size : Push-in
(φ 4 mm for tube) [H] Unit specifications
[F] Piping direction : Straight [H] Unit specifications 1 SI units only
[G] Output specifications [I] Valve option
: IO-Link [I] Valve option N None
[H] Unit specifications : SI units only
[I] Valve option : None [J] Lead wire
[J] Lead wire : M12 Lead wire with both ends [J] Lead wire Blank None
connector (3 m) G M12 Lead wire with both ends connector (3 m)
: Bracket 1 [K] Mounting attachments *5, *6
[L] Attached documents [K] Mounting Blank None
: Inspection certification attachments H Bracket 1 (for models 200 L or less)
[M] Clean-room specifications J Bracket 2 (for models 500 or 1000 L)
: Anti-dust generation
M DIN rail mounting (for models 200 L or less)
[L] Attached Blank None
■Precautions for model No. selection documents R Inspection certification
*1: During selection, always check the compatibility table on the S Inspection certification + traceability certificate
next page.
*2: The G screw connection shape complies with ISO 16030. [M] Clean-room specifications
*3: Check the G screw connection shape with "1.4 Dimensions" [M] Clean-room Blank None
when selecting. specifications P70 Anti-dust generation *7
(The G screw connection shape complies with JIS B 2351-1 O
type) P80 Oil- prohibited processing *8
*4: Note that the elbow fitting will interfere with the case when
installed upward and with the DIN rail installation when installed
downward.
*5: Note that the bracket mounting position may interference with
the elbow type fitting.
*6: Optional parts will come with the product. They are not
preassembled.
*7: Product surface is degreased before packaging and heat-sealed
into an antistatic bag on the clean bench (Class 1000 and over).
*8: The contact gas parts are degreased and washed in addition to
the specifications on P.70.
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[B] Flow rate range
 :Port size compatibility

Blank
[M] Clean-room
specifications
Blank
14 2022-12-12

FSM3 - C 005 U 2 AA 1 L 1 N - G H R - P70
Code Content
[A] Display
[A] Display C IO-Link
Model No. [B] Flow rate range (full scale flow rate)
020 2 L/min 201 200 L/min
050 5 L/min 501 500 L/min
100 10 L/min 102 1000 L/min
200 20 L/min
[C] Flow direction
B Bi-direction
[D] Body material/applicable fluids Body material Applicable fluids
2 SUS Air (Gas type can be switched)
3 SUS Oxygen (Oil-prohibited specifications)*2
[E] Port size

BA Rc1/4
CA Rc1/2
AF G1/8 *3
BF G1/4 *3
CF G1/2 *3
AB G1/8 *4
BB G1/4 *4
CB G1/2 *4
AC NPT1/8
BC NPT1/4
CC NPT1/2
<Example of model No.> BD 1/4” double barbed fitting (50 to 200 L/min)
FSM3-C005U2AA1L1N-GHR-P70 AE 1/4” JXR male fitting (50 L/min or less)
Model: RAPIFLOW FSM3 Series BE 1/4” JXR male fitting (50 to 200 L/min)
[A] Display : IO-Link
[B] Flow rate range : 500 mL/min [F] Piping direction
[C] Flow direction : Uni-direction [F] Piping direction 1 Straight
: SUS/air [G] Output specifications L IO-Link
[E] Port size : Rc1/8
[F] Piping direction : Straight [H] Unit specifications
[G] Output specifications [H] Unit specifications 1 SI units only
: IO-Link
[H] Unit specifications : SI units only [I] Valve option
[I] Valve option N None
[J] Lead wire : M12 Lead wire with both ends [J] Lead wire
connector (3 m) [J] Lead wire Blank None
G M12 Lead wire with both ends connector (3 m)
: Bracket 1
[L] Attached documents [K] Mounting attachments *5
: Inspection certification [K] Mounting Blank None
[M] Clean-room specifications attachments H Bracket 1 (for models 200 L or less)
: Anti-dust generation J Bracket 2 (for 500 or 1000 L models)
M DIN rail mounting (for models 200 L or less)
■Precautions for model No. selection [L] Attached Blank None
*1: Refer to the correspondence table on the following page when documents R Inspection certification
selecting the model. S Inspection certification + Traceability certification
*2: “3: Oxygen” cannot be selected with 500 L/min and 1000 L/min
models. [M] Clean-room specifications *8
*3: The G screw connection shape complies with ISO16030. [M] Clean-room Blank None
*4: Check the G screw connection shape with "1.4 Dimensions"
when selecting.
specifications P70 Anti-dust generation *6
(The G screw connection shape complies with JIS B2351-1 O P80 Oil- prohibited processing *7
type)
1000 or more).
*8: The oxygen type cannot be selected (blank only).
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[E] Port size

barbed fitting Male fitting
[B]Flow rate range
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1.1.4 Option
Code Content
[A] Option
FSM3 - K - P70 A 5-conductor cable 1 m (for LCD display)
B 5-conductor cable 3 m (for LCD display)
C 4-conductor cable 1 m (for bar display)
[B] Clean-room specifications D 4-conductor cable 3 m (for bar display)
[A] Option G M12 both ends connector cable (3 m) (for IO-Link)
Bracket 1 (for models with a flow rate range below
H
200 L/min)
Bracket 2 (for models with a flow rate range of 500 L/min
J
or 1000 L/min)
Panel mounting kit 1 (for sensor unit models with a flow
K
rate range below 200 L/min)
Panel mounting kit 2 (for needle valves integrated models
L
with a flow rate range below 200 L/min)
DIN rail mounting kit (for models with a flow rate range
M
below 200 L/min)
[B] Clean-room specifications
Blank None
P70 Anti-dust generation
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1.2 Specifications
1.2.1 LCD display type

◼ Resin body type
FSM3-[A][B][C][D][E][F][G][H][I] - [ ]
Item [B]
005 010 020 050 100 200 500 101 201 501 102
U Uni-direction
Flow direction [C]
B Bi-direction
15 to 500 30 to 1000 0.06 to 0.15 to 0.30 to 0.6 to 20.0 1.5 to 50.0 3.0 to 15 to 500 30 to
Measured U mL mL 2.00 L 5.00 L 10.00 L L L 100.0 L
6 to 200 L
L 1000 L
flow rate -1000 to -2.00 to -5.00 to -10.00 to -20.0 to -50.0 to -100.0 to -1000 to
[B] -500 to -15
-30 -0.06 -0.15 -0.30 -0.6 -1.5 -3.0 -200 to -6 -500 to -15 -30
range B 15 to 500
30 to 1000 0.06 to 0.15 to 0.30 to 0.6 to 20.0 1.5 to 50.0 3.0 to 6 to 200 L 15 to 500 L 30 to
(/min) *1 mL
mL 2.00 L 5.00 L 10.00 L L L 100.0 L 1000 L
Display type 4-digit + 4-digit 2-color LCD
Flow rate -49 to 549 -99 to -0.19 to -0.49 to -0.99 to -1.9 to -4.9 to -9.9 to -19 to 219 -49 to 549 -99 to
U mL 1099 mL 2.19 L 5.49 L 10.99 L 21.9 L 54.9 L 109.9 L L L 1099 L
display range [B] -549 to 549 -1099 to -2.19 to -5.49 to -10.99 to -21.9 to -54.9 to -109.9 to -219 to -549 to -1099 to
(/min) *2 B mL 1099 mL 2.19 L 5.49 L 10.99 L 21.9 L 54.9 L 109.9 L 219 L 549 L 1099 L
Display range 0 to ±9999999 mL 0.00 to ±99999.99 L 0.0 to ±999999.9 L 0 to ±9999999 L
Integration
display *3 Pulse output
5 mL 10 mL 0.02 L 0.05 L 0.1 L 0.2 L 0.5 L 1L 2L 5L 10 L
rate
Clean air (JIS B 8392-1, 2012 1.1.1 to 5.6.2), Compressed air (JIS B 8392-1, 2012 1.1.1 to 1.6.2),
Applicable Nitrogen gas
fluids *4
Argon, carbon dioxide, gas mixture (argon + carbon dioxide) -
Working Temperature
0 to 50°C (no condensation)
conditions range
Pressure
-0.09 to 0.75 MPa
range
Withstanding
1 MPa
pressure
Operating ambient
0 to 50°C, 90%RH or less
temperature/humidity
Storage temperature -10 to 60°C
Within ±3% F.S. (Secondary side atmosphere releasing)
Accuracy *6
(Scope of warranty depends on the "Measured flow rate range")
Repeatability
Accuracy *5 *7
(Fluid: in dry air) Temperature
Within ±0.2% F.S./°C (15 to 35°C, base temperature 25°C)
characteristics
Pressure Within ±5% F.S. (Base
Within ±5% F.S. (Secondary side atmosphere releasing standard)
characteristics pressure 0.35 MPa)
Response time *8 50 msec or below (Response time set to OFF)
A, B, E, F NPN open collector output (50 mA or less, voltage drop 2.4 V or less)
Switch output
C, D, G, H PNP open collector output (50 mA or less, voltage drop 2.4 V or less)
Analog output A, B, C, D 1 to 5 V voltage output (connection load impedance 50 kΩ and over)
[G]
*9 E, F, G, H 4 to 20 mA current output (connection load impedance 0 to 300 Ω)
Power supply A, B, C, D 12 to 24 VDC (10.8 to 26.4 V) ripple rate 1% or less
voltage *10 E, F, G, H 24 VDC (21.6 to 26.4 V) ripple rate 1% or less
Current consumption *11 45 mA or less
Lead wire φ3.7, AWG26 or equivalent x 5-conductor (connector connection), insulator outer diameter φ 1.0
Holding functions *12 (1) Gas type switching, (2) setting copy function, (3) flow rate integration, (4) peak hold, etc.
Protection structure IP40-equivalent (IEC standards)
Power reverse connection protection, switch output reverse connection protection, switch output load
Protection circuit *13
short-circuit protection
Vibration resistance 10 to 150 Hz, max. 100 m/s2, XYZ direction, for 2 hours respectively
EMC Directive EN55011, EN61000-6-2, EN61000-4-2/3/4/6/8
Mounting
Unrestricted in vertical/horizontal direction
orientation *14
Mounting Straight piping
installation Not required
section *15
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*1: The value converted to volumetric flow rate at standard condition (20°C 1 barometric pressure (101 kPa) relative humidity 65%).
(For gas other than air, 20°C 1 barometric pressure (101 kPa), relative humidity 0%)
*2: The displays of each flow rate are as shown below.
“Lo” display “0” display Measured flow rate range “Hi” display
Uni-direction
“Lo” display Measured flow rate range “0” display Measured flow rate range “Hi” display
Bi-direction
*3: The integrating flow is a calculated (reference) value. When using the integrated value saving function, be careful that the number
of times saved does not exceed the number of access times of the storage element (the limit is 1 million times). (Changes of
various settings are counted in number of accesses.)
Usage time
Times saved = < 1 million times
5 minutes
When instantaneous flow rate is below 1%, it is not counted as integrated flow rate.
*4: Use dry gas which does not contain corrosive elements such as chlorine, sulfur or acids, and clean gas which does not contain dust
or oil mist. When using compressed air, use clean air that complies with JIS B 8392-1:2012 Class 1.1.1 to 1.6.2. Compressed air
from the compressor contains drain (water, oil oxide, foreign substances, etc.). To maintain the function of this product, install a filter,
air dryer (min. pressure dew point 10°C or less), and oil mist filter (max. oil content concentration 0.1 mg/m3) on the primary side
(upstream side) of this product.
[Recommended circuit]
Oil mist filter
Air pressure Air dryer Flow rate sensor

Regulator
source FSM3 Series
*5: Compressed air is used for adjusting and inspecting of this product. Accuracy for gas types other than air is a guideline.
*6: The accuracy is based on CKD’s basic flow rate mater. It does not show absolute accuracy.
Repeatability, temperature characteristics, and pressure characteristics are not included for accuracy ±3% F.S.
Consider separately according to the working environment and working conditions.
*7: Repeatability over a short period of time. Changes over time are not included. (Refer to the product specifications sheet for details.)
*8: Actual response time may differ depending on piping conditions. Setting response time can be selected between 50 msec and
1.5 sec.
*9: The output impedance of the analog output section is approx. 1 kΩ. If the impedance of the connecting load is small, the output
value and error increase. Check the error with the impedance of the connecting load before using.
*10: The power supply voltage specifications differ for the voltage output type and current output type.
*11: Current when 24 VDC is connected and no load is applied. The current consumption will vary depending on how the load is
connected.
*12: Gas can be switched to argon, carbon dioxide, argon 80% + carbon dioxide 20% with the gas switching function (Note the gas
switching function is not available on 500 L/min and 1000 L/min models).
The full-scale flow rate becomes half of the flow rate range after switching to carbon dioxide gas. Also, an output type can be
selected for analog output.
Flow Measuring flow range (/min)
Gas type
direction 005 010 020 100 200 500 101 201
 Air Uni-direction 15 to 500 mL 30 to 1000 mL 0.06 to 2.00 L 0.30 to 10.00 L 0.6 to 20.0 L 1.5 to 50.0 L 3.0 to 100.0 L 6 to 200 L
 Nitrogen
 Argon -500 to -15 mL -1000 to -30 mL -2.00 to 0.06L -10.00 to -0.30 L -20.0 to -0.6 L -50.0 to -1.5 L -100.0 to -3.0 L -200 to -6 L
 Argon 80% Bi-direction
+ Carbon dioxide 20% 15 to 500 mL 30 to 1000 mL 0.06 to 2.00 L 0.30 to 10.00 L 0.6 to 20.0 L 1.5 to 50.0 L 3.0 to 100.0 L 6 to 200 L
Uni-direction 15 to 250 mL 30 to 500 mL 0.06 to 1.00 L 0.30 to 5.00 L 0.6 to 10.0 L 1.5 to 25.0 L 3.0 to 50.0 L 6 to 100 L
 Carbon dioxide -250 to -15 mL -500 to -30 mL -1.00 to -0.06 L -5.00 to -0.30 L -10.0 to -0.6 L -25.0 to -1.5 L -50.0 to -3.0 L -100 to -6 L
Bi-direction
15 to 250 mL 30 to 500 mL 0.06 to 1.00 L 0.30 to 5.00 L 0.6 to 10.0 L 1.5 to 25.0 L 3.0 to 50.0 L 6 to 100 L
Analog output
Flow
Gas type Output type A Output type B
direction
Voltage Current Voltage Current
 Carbon Uni-direction 1 to 3 V 4 to 12 mA 1 to 5 V 4 to 20 mA
dioxide Bi-direction 2 to 4 V 8 to 16 mA 1 to 5 V 4 to 20 mA
The "Copy function" setting is selected at "[G] Output specifications".

Note that the "External input" function is not available on models in which the "Setting copy function" is available.
*13: The protection circuit of this product is effective only for specific error connections and load short-circuit. It is not designed to protect
from any error connections.
*14: This product measures the change in heat distribution caused by flow.
When this product is mounted in vertical orientation, convection flow can influence heat distribution or cause the zero point to
deviate.
*15: Accuracy may be affected by the piping conditions. For more accurate measurement, install a straight pipe with a piping inner
diameter ten times longer.
With the 500 L/min and 1000 L/min models, use piping with an internal diameter of 9 mm or more. If it is less than 9 mm, accuracy
may be negatively affected.
*16: For the mass, refer to “1.4.5 Products weight”.
19 2022-12-12

FSM3-[A][B][C][D][E][F][G][H][I]－[ ]
Item [B]
005 010 020 050 100 200 500 101 201 501 102
U Uni-direction
Flow direction [C]
B Bi-direction
15 to 30 to 1000 0.06 to 0.15 to 0.30 to 0.60 to 1.5 to 50.0 3.0 to 30 to 1000
U 500 mL mL 2.00 L 5.00 L 10.00 L 20.0 L L 100.0 L
6 to 200 L 15 to 500 L
L
Measured flow
-500 to -1000 to -2.00 to -5.00 to -10.00 to -20.0 to -50.0 to -100.0 to -1000 to
rate range [B] -15 -30 -0.06 -0.15 -0.30 -0.6 -1.5 -3.0 -200 to -6 -500 to -15, -30,
(/min) *1 B 15 to 30 to 1000 0.06 to 0.15 to 0.30 to 0.6 to 20.0 1.5 to 50.0 3.0 to 100.0 6 to 200 L 15 to 500 L 30 to 1000
500 mL mL 2.00 L 5.00 L 10.00 L L L L L
Flow rate -49 to -99 to 1099 -0.19 to -0.49 to -0.99 to -1.9 to 21.9 -4.9 to 54.9 -9.9 to -49 to 549 -99 to
U 549 mL mL 2.19 L 5.49 L 10.99 L L L 109.9 L
-19 to 219 L
L 1099 L
display range [B] -549 to -1099 to -2.19 to -5.49 to -10.99 to -21.9 to -54.9 to -109.9 to -219 to 219 -549 to 549 -1099 to
(/min) *2 B 549 mL 1099 mL 2.19 L 5.49 L 10.99 L 21.9 L 54.9 L 109.9 L L L 1099 L
0 to ±9999999
Display range 0.00 to ±99999.99 L 0.0 to ±999999.9 L 0 to ±9999999 L
Integration display mL
*3 Pulse output
5 mL 10 mL 0.02 L 0.05 L 0.1 L 0.2 L 0.5 L 1L 2L 5L 10 L
rate
Nitrogen gas
Applicable Argon, carbon dioxide, gas mixture (argon + carbon dioxide) -
fluids *4 Oxygen gas (When oxygen specifications are selected, the clean-room
specifications of [M] cannot be selected. Specifications automatically become -
Working oil-prohibited specifications.)
conditions Temperature
range
Pressure -0.09 to 0.75
-0.09 to 1.00 MPa
range MPa
Withstanding
1.5 MPa
pressure
Operating ambient
Accuracy *6
Repeatability
Accuracy *5 *7
(Fluid: In dry air) Temperature
characteristics
Within ±5% F.S. (Where secondary side atmosphere releasing standard)
Switch output
[G]
Holding function *12 (1) Gas type switching, (2) setting copy function, (3) flow rate integration, (4) peak hold, etc.
Power reverse connection protection, switch output reverse connection protection,
switch output load short-circuit protection
Mounting
orientation *14
section *15
20 2022-12-12
Uni-direction
Bi-direction
*3: The integrating flow rate is a calculated (reference) value. When using the integration saving function, be careful that the number of
saving times does not exceed the number of access times of the storage element (the limit is 1 million times). (Changes of various
settings are counted in number of accesses.)
Usage time
5 minutes
When instantaneous flow rate is below 1%, it is not counted as integrating flow rate.
*4: Use dry gas which does not contain corrosive elements such as chlorine, sulfur or acids, and clean which does not contain dust or
oil mist. When using compressed air, use clean air that complies with JIS B 8392-1:2012 Class 1.1.1 to 1.6.2. Compressed air from
the compressor contains drain (water, oil oxide, foreign substances, etc.). To maintain the function of this product, install a filter, air
dryer (min. pressure dew point 10°C or less), and oil mist filter (max. oil content 0.1 mg/m 3) on the primary side (upstream side) of
this product.
Oil mist filter
Air pressure Air Flow rate sensor

source dryer Regulator FSM3 Series
The sensor for oxygen gas is custom model. To prevent ignition accident, do not allow oxygen to flow again when a fluid other than
oxygen has flown even once.
*6: The accuracy is based on CKD’s basic flow rate meter. It does not show absolute accuracy.
Repeatability, temperature characteristics, and pressure characteristics are not included for the accuracy ±3% F.S.
*8: Actual response time may differ depending on piping conditions. Setting response time can be selected between 50 msec and 1.5
sec.
values and error increase. Check the error with the impedance of the connecting load before using.
*11: Current when 24 VDC is connected and no load is connected. The current consumption will vary depending on how the load is
connected.
*12: Gas can be changed to argon, carbon dioxide, argon 80% + carbon dioxide 20% with the gas change function. (Note the gas
Gas type
direction 005 010 020 100 200 500 101 201
 Nitrogen
 Argon -500 to -15 mL -1000 to -30 mL -2.00 to 0.06 L -10.00 to -0.30 L -20.0 to -0.6 L -50.0 to -1.5 L -100.0 to -3.0 L -200 to -6 L
Bi-direction
Analog output
Flow
Gas type Output type A Output type B
direction
Voltage Current Voltage Current
 Carbon Uni-direction 1 to 3 V 4 to 12 mA 1 to 5 V 4 to 20 mA
dioxide Bi-direction 2 to 4 V 8 to 16 mA 1 to 5 V 4 to 20 mA
The "Setting copy function" is selected with "[G] Output specifications".

*13: This product’s protection circuit is effective only for the specific misconnections and load short-circuits. It does not provide
protection for all misconnections.
When this product is mounted in vertical orientation, convection flow can influence the heat distribution and cause the zero point to
deviate.
*15: Accuracy may be affected by the piping conditions. For more accurate measurement, install a straight pipe with a piping internal
*16: For mass, refer to “1.4.5 Products weight”.
21 2022-12-12
FSM3-[A][B][C][D][E][F][G][H][I]－[ ]
Item [B]
005 010 020 050 100 200 500 101 201 501 102
U Uni-direction
Flow direction [C]
B Bi-direction
U 500 mL mL 2.00 L 5.00 L 10.00 L 20.0 L L 100.0 L
6 to 200 L 15 to 500 L
L
Measured flow
-500 to -1000 to -2.00 to -5.00 to -10.00 to -20.0 to -50.0 to -100.0 to -1000 to
rate range [B] -15 -30 -0.06 -0.15 -0.30 -0.6 -1.5 -3.0 -200 to -6 -500 to -15, -30,
(/min) *1 B 15 to 30 to 1000 0.06 to 0.15 to 0.30 to 0.6 to 20.0 1.5 to 50.0 3.0 to 100.0 6 to 200 L 15 to 500 L 30 to 1000
500 mL mL 2.00 L 5.00 L 10.00 L L L L L
Flow rate -49 to -99 to 1099 -0.19 to -0.49 to -0.99 to -1.9 to 21.9 -4.9 to 54.9 -9.9 to -49 to 549 -99 to
U 549 mL mL 2.19 L 5.49 L 10.99 L L L 109.9 L
-19 to 219 L
L 1099 L
display range [B] -549 to -1099 to -2.19 to -5.49 to -10.99 to -21.9 to -54.9 to -109.9 to -219 to 219 -549 to 549 -1099 to
(/min) *2 B 549 mL 1099 mL 2.19 L 5.49 L 10.99 L 21.9 L 54.9 L 109.9 L L L 1099 L
0 to ±9999999
Display range 0.00 to ±99999.99 L 0.0 to ±999999.9 L 0 to ±9999999 L
Integration display mL
*3 Pulse output
5 mL 10 mL 0.02 L 0.05 L 0.1 L 0.2 L 0.5 L 1L 2L 5L 10 L
rate
Nitrogen gas
range
-0.09 to 1.00 MPa
range MPa
Withstanding
1.5 MPa
pressure
Operating ambient
Accuracy *6
Repeatability
Accuracy *5 *7
characteristics
Within ±5% F.S. (Where secondary side atmosphere releasing standard)
Switch output
[G]
Holding function *12 (1) Gas type switching, (2) setting copy function, (3) flow rate integration, (4) peak hold, etc.
Protection structure *13 IP65-equivalent (IEC standards)
Power reverse connection protection, switch output reverse connection protection,
switch output load short-circuit protection
Mounting
orientation *15
section *16
22 2022-12-12
Uni-direction
Bi-direction
*3: The integrating flow rate is a calculated (reference) value. When using the integration saving function, be careful that the number of
saving times does not exceed the number of access times of the storage element (the limit is 1 million times). (Changes of various
settings are counted in number of accesses.)
Usage time
5 minutes
When instantaneous flow rate is below 1%, it is not counted as integrating flow rate.
this product.
Oil mist filter
Air pressure Air Flow rate sensor

source dryer Regulator FSM3 Series
*6: The accuracy is based on CKD’s basic flow rate meter. It does not show absolute accuracy.
*8: Actual response time may differ depending on piping conditions. Setting response time can be selected between 50 msec and 1.5
sec.
*11: Current when 24 VDC is connected and no load is connected. The current consumption will vary depending on how the load is
connected.
*12: Gas can be changed to argon, carbon dioxide, argon 80% + carbon dioxide 20% with the gas change function. (Note the gas
The "Setting copy function" is selected with "[G] Output specifications".

*13: Be sure to read the precautions in “Option (ATEX Compliant)” on page 61, “Installation Environment” on page 62 and “USAGE” on
page 76.
It is IP64 in ATEX evaluation.
When this product is mounted in vertical orientation, convection flow can influence the heat distribution and cause the zero point to
deviate.
23 2022-12-12
1.2.2 Bar display type

◼ Resin body type
FSM3-[A][B][C][D][E][F][G][H][I]-[ ]
Item [B]
005 010 020 050 100 200 500 101 201 501 102
U Uni-direction
Flow direction [C]
B Bi-direction
15 to 500 30 to 1000 0.06 to 0.15 to 0.30 to 10.00 0.60 to 1.5 to 3.0 to 6 to 200 15 to 500 30 to 1000
Measured U mL mL 2.00 L 5.00 L L 20.0 L 50.0 L 100.0 L L L L
flow rate -500 to -2.00 to -5.00 to -10.00 to -20.0 to -50.0 to -100.0 to -200 to -500 to -1000 to
[B] -15
-1000 to -30
-0.06 -0.15 -0.30 -0.6 -1.5 -3.0 -6 -15 -30
range B 30 to 1000
15 to 500 0.06 to 2.00 0.15 to 5.00 0.30 to 10.00 0.6 to 20.0 1.5 to 50.0 3.0 to 6 to 200 15 to 500 30 to 1000
(/min) *1 mL
mL
L L L L L 100.0 L L L L
Display type LED bar display
Applicable Clean air (JIS B 8392-1, 2012 1.1.1 to 5.6.2), Compressed air (JIS B 8392-1, 2012 1.1.1 to 1.6.2),
fluids *2 Nitrogen gas
Temperature
range
Used fluid
Pressure
-0.09 to 0.75 MPa
range
Withstanding
1 MPa
pressure
Operating ambient
Within ±3%F.S. (Secondary side atmosphere releasing)
Accuracy *3
Repeatability
Within ±1%F.S. (Secondary side atmosphere releasing)
*4
Accuracy
Temperature
characteristics
Pressure Within ±5% F.S. Within ±5% F.S. (Base
characteristics (Where secondary side atmosphere releasing standard) pressure 0.35 MPa)
Response time *5 50 msec or below
Analog output J 1 to 5 V voltage output (connection load impedance 50 kΩ and over)
*6 K 4 to 20 mA current output (connection load impedance 0 to 300 Ω)
[G]
Power supply J 12 to 24 VDC (10.8 to 26.4 V) ripple rate 1% or less
voltage *7 K 24 VDC (21.6 to 26.4 V) ripple rate 1% or less
Lead wire φ3.7, AWG26 or equivalent x 4-conductor (connector), insulator outer diameter φ1.0
Protection circuit *9 Power supply reverse connection protection
Mounting
orientation *10
section *11
24 2022-12-12
*1: The value converted to volumetric flow rate at standard condition (20 °C 1 barometric pressure (101 kPa) relative humidity 65%).
(For gas other than air, 20 °C 1 barometric pressure (101 kPa), relative humidity 0%)
this product.
Oil mist filter

Regulator
source FSM3 Series
*5: Actual response time may differ depending on piping conditions.
*7: The power supply voltage specifications differ for the voltage output and current output.
*8: Current for when 24 VDC is connected and no load is applied. The current consumption will vary depending on how the load is
connected.
When this product is mounted in vertical orientation, convection flow can influence the heat distribution or cause the zero point to
deviate.
25 2022-12-12

FSM3-[A][B][C][D][E][F][G][H][I]-[ ]
Item [B]
005 010 020 050 100 200 500 101 201 501 102
U Uni-direction
Flow direction [C]
B Bi-direction
15 to 500 30 to 1000 0.06 to 0.15 to 0.30 0.60 to 1.5 to 50.0 3.0 to 30 to 1000
U mL mL 2.00 L 5.00 L 10.00 L 20.0 L L 100.0 L
6 to 200 L 15 to 500 L
L
Measured flow
-1000 to -2.00 to -5.00 to -10.00 to -20.0 to -50.0 to -100.0 to -1000 to
rate range [B] -500 to -15
-30 -0.06 -0.15 -0.30 -0.6 -1.5 -3.0 -200 to -6
-500 to
-30,
(/min) *1 B 15 to 500
30 to 1000 0.06 to 0.15 to 0.30 to 0.6 to 20.0 1.5 to 50.0 3.0 to 6 to 200 L
-15,
30 to 1000
mL 15 to 500 L
mL 2.00 L 5.00 L 10.00 L L L 100.0 L L
Nitrogen gas
Applicable
Oxygen gas (When oxygen specifications are selected, the clean-room
fluids *2
specifications of [M] cannot be selected. -
Specifications automatically become oil-prohibited specifications.)
Working
Temperature
conditions 0 to 50°C (no condensation)
range
-0.09 to 1.00 MPa
range MPa
Withstanding
1.5 MPa
pressure
Operating ambient
Within ±3% F.S. (Secondary side released to atmosphere)
Accuracy *3
Repeatability
*4
Accuracy
Temperature
characteristics
Within ±5% F.S. (Where secondary side atmosphere releasing)
[G]
Mounting
orientation *10
section *11
26 2022-12-12
air dryer (min. pressure dew point 10°C or less), and oil mist filter (max. oil content 0.1 mg/m3) on the primary side (upstream side)
of this product.
Oil mist filter

Regulator
source FSM3 Series
1.5 sec.
connected.
deviate.
27 2022-12-12
FSM3-[A][B][C][D][E][F][G][H][I]-[ ]
Item [B]
005 010 020 050 100 200 500 101 201 501 102
U Uni-direction
Flow direction [C]
B Bi-direction
15 to 500 30 to 1000 0.06 to 0.15 to 0.30 0.60 to 1.5 to 50.0 3.0 to 30 to 1000
U mL mL 2.00 L 5.00 L 10.00 L 20.0 L L 100.0 L
6 to 200 L 15 to 500 L
L
Measured flow
-1000 to -2.00 to -5.00 to -10.00 to -20.0 to -50.0 to -100.0 to -1000 to
rate range [B] -500 to -15
-30 -0.06 -0.15 -0.30 -0.6 -1.5 -3.0 -200 to -6
-500 to
-30,
(/min) *1 B 15 to 500
30 to 1000 0.06 to 0.15 to 0.30 to 0.6 to 20.0 1.5 to 50.0 3.0 to 6 to 200 L
-15,
30 to 1000
mL 15 to 500 L
mL 2.00 L 5.00 L 10.00 L L L 100.0 L L
Nitrogen gas
Applicable
Oxygen gas (When oxygen specifications are selected, the clean-room
fluids *2
specifications of [M] cannot be selected. -
Specifications automatically become oil-prohibited specifications.)
Working
Temperature
conditions 0 to 50°C (no condensation)
range
-0.09 to 1.00 MPa
range MPa
Withstanding
1.5 MPa
pressure
Operating ambient
Within ±3% F.S. (Secondary side released to atmosphere)
Accuracy *3
Repeatability
*4
Accuracy
Temperature
characteristics
[G]
Protection structure *9 IP65-equivalent (IEC standards)
Mounting
orientation *11
section *12
28 2022-12-12
air dryer (min. pressure dew point 10°C or less), and oil mist filter (max. oil content 0.1 mg/m 3) on the primary side (upstream side)
of this product.
Oil mist filter

Regulator
source FSM3 Series
1.5 sec.
connected.
*9: Be sure to read the precautions in “Option (ATEX Compliant)” on page 61, “Installation Environment” on page 62 and “USAGE” on
page 76.
It is IP64 in ATEX evaluation.
deviate.
29 2022-12-12
1.2.3 IO-Link type

◼ Resin body type
FSM3-[A][B][C][D][E][F][G][H][I]－[ ]
Item [B]
005 010 020 050 100 200 500 101 201 501 102
U Uni-direction
Flow direction [C]
B Bi-direction
15 to 500 30 to 1000 0.06 to 0.15 to 0.30 to 0.60 to 1.5 to 50.0 3.0 to 30 to 1000
Measured U mL mL 2.00 L 5.00 L 10.00 L 20.0 L L 100.0 L
6 to 200 L 15 to 500 L
L
flow rate -1000 to -2.00 to -5.00 to -10.00 to -20.0 to -50.0 to -100.0 to -1000 to
[B] -500 to -15
range B 15 to 500
-30 -0.06 -0.15 -0.30 -0.6 -1.5 -3.0 -200 to -6 -500 to -15 -30
30 to 1000 0.06 to 0.15 to 0.30 to 0.6 to 20.0 1.5 to 50.0 3.0 to 6 to 200 L 15 to 500 L 30 to 1000
(/min) *1 mL
mL 2.00 L 5.00 L 10.00 L L L 100.0 L L
Display type LED display (power lamp and status lamp)
Applicable Nitrogen gas
fluids *2
Argon, carbon dioxide, gas mixture (argon + carbon dioxide) -
Temperature
Used fluids 0 to 50°C (no condensation)
range
Pressure
-0.09 to 0.75 MPa
range
Withstanding
1 MPa
pressure
Operating ambient
Accuracy *4
Repeatability
Accuracy *3 *5
characteristics
Power supply voltage 18 to 30 VDC ripple rate 1% or less
Lead wire *8 M12 both ends connector cable (3 m) AWG#23 or equivalent x 4-conductor
Saving function *9 (1) Gas type switching, (2) flow rate integration, (3) peak hold, etc.
Vibration resistance *11 10 to 150 Hz, max. 100 m/s2, XYZ direction, for 2 hours respectively
Mounting
orientation *12
section *13
30 2022-12-12
*1: The value converted to volumetric flow rate at standard condition (20 °C 1 barometric pressure (101 kPa) relative humidity 65%).
(For gas other than air, 20 °C 1 barometric pressure (101 kPa), relative humidity 0%)
air dryer (min. pressure dew point 10 °C or less), and oil mist filter (max. oil content 0.1 mg/m 3) on the primary side (upstream side)
of this product.
Oil mist filter
Filter
(Micro-Alessa)

Regulator
source FSM3 Series
*6: Actual response time may differ depending on piping conditions. Setting response time can be selected from between 50 msec to
1.5 sec.
connected.
*8: The male side is straight and the female side is angle (refer to “1.4.4 Option”).
Tighten the M12 connector with 0.5 N・m or less torque.
Note if tightened with excessive force, it may break.
*9: Gas can be changed to argon, carbon dioxide, argon 80% + carbon dioxide 20% with the gas change function. Full scale flow rate
and analog output after changing gas is as follows.
(Note that the gas type switching function is not available for the 500 L/min model and 1000 L/min model)
Gas type
direction 005 010 020 100 200 500 101 201
 Nitrogen
Bi-direction
The integrating flow is a calculated (reference) value.
When using the integration saving function, be careful that the number of saving times does not exceed the number of access times
of the storage element (the limit is 1 million times). (Changes to the settings are counted in number of accesses.)
Usage time
5 minutes
*11: Communication errors may be generated due to vibration conditions. Install in places where there is no vibration.
*12: This product measures the changes in heat distribution caused by flow.
deviate.
31 2022-12-12

FSM3-[A][B][C][D][E][F][G][H][I]－[ ]
Item [B]
005 010 020 050 100 200 500 101 201 501 102
Flow U Uni-direction
[C]
direction B Bi-direction
Measured U 500 mL mL 2.00 L 5.00 L 10.00 L 20.0 L L 100.0 L
6 to 200 L 15 to 500 L
L
flow rate -500 to -1000 to -2.00 to -5.00 to -10.00 to -20.0 to -50.0 to -100.0 to -1000 to
[B]
range B
-15 -30 -0.06 -0.15 -0.30 -0.6 -1.5 -3.0 -200 to -6 -500 to -15, -30,
15 to 30 to 1000 0.06 to 0.15 to 0.30 to 0.6 to 20.0 1.5 to 50.0 3.0 to 6 to 200 L 15 to 500 L 30 to
(/min) *1 500 mL mL 2.00 L 5.00 L 10.00 L L L 100.0 L 1000L
Display type LED bar display (power lamp and status lamp)
Nitrogen gas
range
Pressure
-0.09 to 1.00 MPa -0.09 to 0.75 MPa
range
Withstanding
1.5 MPa
pressure
Operating ambient
Accuracy *4
Repeatability
*5
Accuracy *3
Temperature
characteristics
Pressure Within ±5% F.S. (Where secondary side atmosphere releasing Within ±5% F.S. (Base
characteristics standard) pressure 0.35MPa)
Power supply voltage 18 to 30 VDC ripple rate 1% or less
M12 lead wire with both ends connector (3 m)
Lead wire *8
AWG#23 or equivalent x 4-conductor
Saving function *9 *10 (1) Gas type switching, (2) flow rate integration, (3) peak hold, etc.
Vibration resistance *12 10 to 150 Hz, max. 100 m/s2, XYZ direction, for 2 hours respectively
Mounting
orientation *12
installation section Not required
*13
32 2022-12-12
*1: The value converted to volumetric flow rate at standard condition (20°C 1 barometric pressure (101 kPa) relative humidity 65%RH).
(For gas other than air, 20°C 1 barometric pressure (101 kPa), relative humidity 0%RH)
air dryer (min. pressure dew point 10 °C or less), and oil mist filter (max. oil content 0.1 mg/m 3) on the primary side (upstream side)
of this product.
Oil mist filter

Regulator
source FSM3 Series
Repeatability, temperature characteristics, and pressure characteristics are not included for an accuracy ±3% F.S.
1.5 sec.
*7: Current for when 24 VDC is connected and no load is applied. The current consumption will vary depending on how the load is
connected.
*8: The male side is straight and the female side is angle (refer to “1.4.4 Option”).
Tighten the M12 connector with 0.5 N・m or less torque.
Note if tightened with excessive force, it may break.
*9: Gas can be changed to argon, carbon dioxide, argon 80% + carbon dioxide 20% with the gas change function. The full-scale flow
rate and analog output are as follows. Note that the gas switching function is not available for the 500 L/min mode and 1000 L/min
model)
Gas type
direction 005 010 020 100 200 500 101 201
 Nitrogen
Bi-direction
The integrating flow is a calculated (reference) value.
When using the integration saving function, be careful that the number of saving times does not exceed the number of access times
of the storage element (the limit is 1 million times).
(Changes to the settings are counted in number of accesses.)
Usage time
5 minutes
*11: Communication errors may be generated due to vibration conditions. Install in places where there is no vibration.
deviate.
33 2022-12-12
1.3 Communication specification

1.3.1 General
Item Details Item Details
Communication protocol IO-Link Min. Cycle Times 5 ms
Communication protocol revision V1.1 Data Storage 1 kbyte
Transmission speed COM2 (38.4 kbps) SIO Mode support Non
Port type Class A Device ID Refer to the table below.
Process Data length (input) 4 bytes
Process Data length (output) 0 bytes
◼ Device ID
Device ID is different per flow rate range and flow direction.
Flow rate Device ID Device ID
Flow rate range Product ID
range (Decimal) (Hex)
Uni-direction FSM3-C005U 2170881 0x212001
500 mL/min
Bi-direction FSM3-C005B 2170882 0x212002
1000 mL/min
2 L/min
5 L/min
10 L/min
Bi-direction FSM3-C100B 2170890 0x21200A
Uni-direction FSM3-C200U 2170891 0x21200B
20 L/min
Bi-direction FSM3-C200B 2170892 0x21200C
Uni-direction FSM3-C500U 2170893 0x21200D
50 L/min
Bi-direction FSM3-C500B 2170894 0x21200E
Uni-direction FSM3-C101U 2170895 0x21200F
100 L/min
200 L/min
500 L/min
1000 L/min
500 mL/min Uni-direction FSM3-C005U3 2170903 0x212017
O2type Bi-direction FSM3-C005B3 2170904 0x212018
1000 mL/min Uni-direction FSM3-C010U3 2170905 0x212019
O2type Bi-direction FSM3-C010B3 2170906 0x21201A
2 L/min Uni-direction FSM3-C020U3 2170907 0x21201B
O2type Bi-direction FSM3-C020B3 2170908 0x21201C
5 L/min Uni-direction FSM3-C050U3 2170909 0x21201D
O2type Bi-direction FSM3-C050B3 2170910 0x21201E
10 L/min Uni-direction FSM3-C100U3 2170911 0x21201F
20 L/min Uni-direction FSM3-C200U3 2170913 0x212021
*Download the IO-Link setting file (IODD) from our company’s home page (https://www.ckd.co.jp/)).
34 2022-12-12
1.3.2 On demand data

◼ Identification
Vendor ID: 855 (Decimal number) / 357 (Hexadecimal number)
Index Sub Index Item Value Access Data length Format
0x0010 0 Vendor Name CKD Corporation R 64 bytes String
0x0011 0 Vendor Text https://www.ckd.co.jp/ R 64 bytes String
0x0012 0 Product Name FSM3-C020U1BH1L1 *1 R 40 bytes String
0x0013 0 Product ID FSM3-C020U *1 R 64 bytes String
Small Size Flow Sensor
0x0014 0 Product Text R 64 bytes String
RapiFlow, 2L/min *1
0x0015 0 Serial- Number ****-*** *2 R 16 bytes String

0x0016 0 Hardware Revision 100.100 R 64 bytes String
0x0017 0 Firmware Revision 100.100 R 64 bytes String
Application
0x0018 0 Application Specific Tag R/W 32 bytes String
Specific Tag
R: Read out
R/W: Read out / Writing
*1 A reference example: 2L/min and uni-direction type are used as the main description.
*2 Serial number
* * ** - ***
Manufacturing No.:
Year (last two
Day: 01 to 31 001 to 999
digits of a year)
Month: 1-9
X: Oct.
Y: Nov.
Z: Dec.
35 2022-12-12
◼ Flow rate range for each model

Instantaneous flow rate Integration flow rate
Model No. Decimal Decimal
Integration
Display range Output value point Output value point
display range
position position
FSM3-C005U -50 to 550 mL/min -50 to 550 0 0
FSM3-C010U -100 to 1100 mL/min -100 to 1100 to 9999999 mL to 9999999
None None
FSM3-C005B -550 to 550 mL/min -550 to 550 -9999999 -9999999
FSM3-C010B -1100 to 1100 mL/min -1100 to 1100 to 9999999 mL to 9999999
FSM3-C020U -0.20 to 2.20 L/min -20 to 220
0 0
FSM3-C050U -0.50 to 5.50 L/min -50 to 550
to 99999.99 L to 9999999
FSM3-C100U -1.00 to 11.00 L/min -100 to 1100 Second Second
FSM3-C020B -2.20 to 2.20 L/min -220 to 220 digit digit
-99999.99 -9999999
FSM3-C050B -5.50 to 5.50 L/min -550 to 550
to 99999.99 L to 9999999
FSM3-C100B -11.00 to 11.00 L/min -1100 to 1100
FSM3-C200U -2.0 to 22.0 L/min -20 to 220
0 0
FSM3-C500U -5.0 to 55.0 L/min -50 to 550
to 999999.9 L to 9999999
FSM3-C101U -10.0 to 110.0 L/min -100 to 1100
First digit First digit
FSM3-C200B -22.0 to 22.0 L/min -220 to 220
-999999.9 -9999999
FSM3-C500B -55.0 to 55.0 L/min -550 to 550
to 999999.9 L to 9999999
FSM3-C101B -110.0 to 110.0 L/min -1100 to 1100
FSM3-C201U -20 to 220 L/min -20 to 220
0 0
FSM3-C501U -50 to 550 L/min -50 to 550
to 9999999 L to 9999999
FSM3-C102U -100 to -1100 L/min -100 to 1100
None None
FSM3-C201B -220 to 220 L/min -220 to 220
-9999999 -9999999
FSM3-C501B -550 to 550 L/min -550 to 550
to 9999999 L to 9999999
FSM3-C102B -1100 to 1100 L/min -1100 to 1100
・When IODD is not used, a flow rate value is input/output with a numerical value without decimal
points.
Conduct conversion noting the number of digits.
・When IODD is used, a flow rate value is input/output with a numerical value with decimal
points.
・In case of the uni-direction type, when the instantaneous flow rate value is negative, no
addition and no deduction are performed on the integrated flow rate value.
36 2022-12-12
1.3.3 Parameter and commands
◼ Common specification
Sub Data
Index Item Value Access Format
Index length
Refer to “Table 1” shown

0x0002 0 System Command W 1 byte UInteger8
below.
0x0000: No lock
0x000C 0 Device Access Locks 0x0001: parameter lock R/W 2 bytes Record
0x0002: Date storage lock
0x0020 0 Error Count 0 R 2 bytes UInteger16
0x0024 0 Device Status 0 R 1 byte UInteger8
Array of 3
0x0025 0 Detailed Devices Status Refer to “Diagnosis” R 33 bytes
Octetstring
R: Read out
W: Write
R/W: Read out / Write
Table 1 System commands

Value Command Contents
0x82 Restore Factory Settings Set the setting value to the factory state.
0xA0 Peak Hold Q Reset Reset peak value of instantaneous flow rate. (Max. value/Min. value)
0xA3 Peak Hold Q Start Start logging of instantaneous flow rate. (Max. value/Min. value)
0xA4 Peak Hold Q Stop Stop logging of instantaneous flow rate. (Max. value/Min. value)
0xA5 Integration Flow Start Start measurement of integrated flow rate.
0xA6 Integration Flow Stop Stop measurement of integrated flow rate.
0xA2 Integration Flow Reset Reset the integrated flow rate.
0xA7 Zero Adjust Start Adjust current value as zero point.
0xA8 Zero Adjust Reset Return the zero point adjustment value to the initial value.
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◼ Individual specification
Data
Index Sub Index Item Value DS Access Format
length
1: AIR / 2: AR /
0x0100 0 Gas type 3: CO2 / 7: MAG(8:2) / 〇 R/W 2 bytes Integer16
10: O2 *1
0x0101 0 Flow direction 0: Uni-direction / 2: Bi-direction － R 2 bytes Integer16
8: 50 ms /
Moving average 16: 80 ms / 32: 120 ms /
0x0102 0 ○ R/W 2 bytes Integer16
(Response time) 64: 200 ms / 128: 400 ms /
256: 800 ms / 512: 1500 ms
0x0103 0 Flow rate standard 0: ANR / 1: NOR ○ R/W 2 bytes Integer16
0: None
Switch output CH1
1: Window1 (NO)
Operation mode
0x0104 0 2: Window2 (NC) ○ R/W 2 bytes Integer16
setting
3: Hysterisis1 (NO)
*2, *3
4: Hysterisis2 (NC)
Depend on flow rate range
0x0105 0 Switch output CH1 0 L/min ○ R/W 2 bytes Integer16
Lower limit value *Refer to “1.3.2 On demand data”.
0x0106 0 Switch output CH1 (2%F.S.) L/min ○ R/W 2 bytes Integer16
Upper limit value *Refer to “1.3.2 On demand data”.
0: None
Switch output CH2
1: Window1 (NO)
Operation mode
0x0107 0 2: Window2 (NC) ○ R/W 2 bytes Integer16
setting
3: Hysterisis1 (NO)
*2, *3
4: Hysterisis2 (NC)
0x0108 0 Switch output CH2 0 L/min ○ R/W 2 bytes Integer16
Lower limit value *Refer to “1.3.2 On demand data”.
0x0109 0 Switch output CH2 (2%F.S.) L/min ○ R/W 2 bytes Integer16
Upper limit value *Refer to “1.3.2 On demand data”.
1: 1% F.S. / 2: 2% F.S. /
Switch output
3: 3% F.S. / 4: 4% F.S. /
0x010A 0 CH1/ CH2 ○ R/W 2 bytes Integer16
5: 5% F.S. / 6: 6% F.S. /
Hysteresis
7: 7% F.S. / 8: 8% F.S.
* R: Read out, W: Write, R/W: Read out / Write, DS: Data storage
* : Default value (The flow direction value is a fixed value. Depending on a selected type, the value is determined)
*1: “10: O2” can be used with the oxygen type.
Also, in case of the oxygen type, the default value is “10: O2”, and changing to other gas types is not possible.
*2: Make sure to avoid the lower limit value ≥ upper limit value. Also, when in the Window mode, set the setting value by avoiding a
hysteresis value ≥ (upper limit - lower limit).
Since the settings of switch output cannot be performed, when five seconds have passed in the state, it becomes Warning. For
detail, refer to “1.3.6 Diagnosis”.
*3: Refer to below for the operation waveform of each mode.
Window1(NO) Hysterisis1(NO)
Lower limit Upper limit Flow Rate Lower limit Upper limit Flow Rate
setting value setting value setting value setting value
Window2(NC) Hysterisis2(NC)
Lower limit Upper limit Lower limit Upper limit Flow Rate
Flow Rate
setting value setting value setting value setting value
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1.3.4 Process data IN

PD PD0 PD1
Bit 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16
MSB LSB
Date name Instantaneous flow rate <Flow Rate>
Data range Refer to the instantaneous flow rate output value in “1.3.2 On demand data”.
Format Integer16
PD PD2 PD3
Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0
Switch
Warn ― ― ― ― ― ― ― ―
Error ― ― ― ― output
-ing
Date name 2 1
Data range True/False Unused
Format Boolean
1.3.5 Observation
Sub Data
Index Item Value Access Format
Index length
0x0400 0 Peak Hold Q Max Refer to the
instantaneous flow rate
R 2 bytes Integer16
0x0401 0 Peak Hold Q Min output value in “1.3.2
On demand data”.
Refer to the integrated
0x0404 0 Integration Flow flow rate output value in R 4 bytes Integer32
“1.3.2 On demand data”.
0 to 9,999,999 h
0x0405 0 Operating Time R 4 bytes Integer32
【0 to 9,999,999】
0: Integrated flow rate not
measured
0x0406 0 Integration Flow Status R 2 bytes Integer16
1: Measuring the
integrated flow rate
0: Data not collected
0x0407 0 Peak Hold Status R 2 bytes Integer16
1: Collecting data
0: No processing
0x0408 0 Zero Adjust Status R 2 bytes Integer16
1: Processing
*R: Read out
*1: Able to count the launching time for 10 years or more.
Calculation: 9,999,999h÷7,488h≒1335.5 Year
24 h/Day x 26 Day/Month x 12 months = 7,488 h/Year
39 2022-12-12
1.3.6 Diagnosis
Event Device
Type Contents Measures
code status
0x4210 Warning Out of Temperature of IO-Link driver is high Check the connection.
specification
0x5111 Warning Out of Supply voltage drop Check the power supply voltage.
specification (Approx. 18V or less)
0x8000 Error Failure ROM / RAM error Turn the power supply ON again.
0x8320 Error Failure Memory read out / writing error Turn the power supply ON again.
0x8C10 Warning Out of Exceeding the measured flow rate range Set the flow rate within the
specification Uni-direction: Exceeding 110% F.S. measurement range.
Less than -10% F.S.
Bi-direction: Exceeding 110% F.S.
Less than -10% F.S.
Sensor broken ・Turn the power supply ON again.
・Replace the main body.
0x8D02 Error Failure Sensor broken ・Turn the power supply ON again.
・Replace the main body.
0x8D03 Warning Function Exceeding the zero adjust possible range Operate after setting the flow rate to
Check (Flow rate ≥ |10%F.S.|) zero.
0x8D04 Warning Out of Error of threshold setting in switch output 1 Reset the threshold value.
specification ・Five seconds or more at Lower limit ≥ upper limit
・Five seconds or more at Hysteresis
≥ (Upper limit – lower limit)
(Window mode only)
0x8D05 Warning Out of Error of threshold setting in switch output 2 Reset the threshold value.
specification ・Five seconds or more at Lower limit ≥ upper limit
・Five seconds or more at Hysteresis
≥ (Upper limit – lower limit)
(Window mode only)
40 2022-12-12
1.4 Dimensions
1.4.1 LDC display type
◼ Resin body type
Port size: Straight type φ 4 mm, φ 6 mm, φ1/4”, Rc1/8, G1/8, NPT1/8
●FSM3 – L[B][C]1/BH1/CH1/HH1/AA1/AF1/AB1/AC1 (Full scale flow rate: 500 mL/min, 1,2,5,10,20,50 L/min)
G screw shape (AB)
End surface
The 15° surface is the seal surface.

Note that it is not the end surface seal. Also, be
sure to confirm that the screw depth of the fitting
matches before use.
φ 2-3.4 penetration
Model No. Fitting Dimensions (A)

FSM3-L1BH1 Push-in φ 4 mm (65)
FSM3-L1CH1 Push-in φ 6 mm (67.2)
FSM3-L1HH1 Push-in 1/4” (70.4)
FSM3-L1AA1 Rc1/8 (75)
2-M3 depth 5 FSM3-L1AF1 G1/8 (87)
FSM3-L1AB1 G1/8 (87)
FSM3-L1AC1 NPT1/8 (75)
Port size: Straight φ 8 mm, φ 10 mm, φ 3/8”, Rc1/4, G1/4, NPT1/4

●FSM3 – L[B][C]1/DH1/EH1/JH1/BA1/BF1/BB1/BC1 (Full scale flow rate：50,100,200L/min)
*The dedicated adaptor for the EXA connection type is the secondary side (the right in the figure below).
G screw shape (BB)
End surface

matches before use.
φ 2-3.4 penetration

2-M3 depth 5 FSM3-L1DH1 Push-in φ 8 mm (70.6)
FSM3-L1EH1 Push-in φ 10 mm (82.1)
FSM3-L1JH1 Push-in 3/8” (83.4)
FSM3-L1BA1 Rc1/4 (75)
FSM3-L1BF1 G1/4 (89)
FSM3-L1BB1 G1/4 (89)
FSM3-L1BC1 NPT1/4 (75)
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Port size: Straight Rc1/2, G1/2, NPT1/2

●FSM3 – L[B][C]1/CA1/CF1/CB1/CC1 (Full scale flow rate: 500, 1000 L/min)
G screw shape (CB)
End surface
Note that it is not the end surface seal. Also, be sure to
confirm that the screw depth of the fitting matches before use.
G screw shape (CF)

Seal surface
End seal surface is the seal surface.

2-M3 depth 3
FSM3-L1CA1 Rc1/2 (80)
FSM3-L1CF1 G1/2 (80)
FSM3-L1CB1 G1/2 (95.4)
FSM3-L1CC1 NPT1/2 (80)
Connection diameter: Elbow type φ 4 mm, φ 6 mm, φ 1/4”, Rc1/8, G1/8, NPT1/8
●FSM3 – L[B][C]1/BH2/CH2/HH2/AA2/AF2/AB2/AC2 (Full scale flow rate: 500 mL/min,1,2,5,10,20,50 L/min)
*The shape of upper surface and bottom surface of the main body is
identical with the straight type.

FSM3-L1BH2 Push-in φ 4 mm (9.5)
FSM3-L1HH2 Push-in 1/4” (12.2)
FSM3-L1AA2 Rc1/8 (14.5)
FSM3-L1AF2 G1/8 * (20.5)
FSM3-L1AB2 G1/8* * (20.5)
2-φ3.4 penetration FSM3-L1AC2 NPT1/8 (14.5)
*For the G shape, refer to the straight type.
Connection diameter: Elbow type φ 8 mm, φ 10 mm, φ 3/8”, RC1/4, G1/4, NPT1/4
●FSM3 – L[B][C]1/DH2/EH2/JH2/BA2/BF2/BB2/BC2 (Full scale flow rate: 50,100,200 L/min)
*The shape of upper surface and bottom surface of the

main body is identical with the straight type.

FSM3-L1DH2 Push-in φ 8 mm (13.6)
FSM3-L1EH2 Push-in φ 10 mm (19.3)
FSM3-L1JH2 Push-in 3/8” (20.0)
FSM3-L1BA2 Rc1/4 (15.8)
FSM3-L1BF2 G1/4 * (22.8)
FSM3-L1BB2 G1/4 * (22.8)
FSM3-L1BC2 NPT1/4 (15.8)
2-φ3.4 penetration
42 2022-12-12
Dimensions with needle valve

Connection diameter: φ 4 mm, φ 6 mm, φ 1/4”, Rc1/8, G1/8, NPT1/8
●FSM3 – L[B][C]1/BH1/CH1/HH1/AA1/AF1/AB1/AC1/[G][H]T (Full scale flow rate: 500 mL/min,1,2,5,10,20,50 L/min)
G screw shape (AB)

*The shape of upper surface and bottom surface of
the main body is identical with the straight type.
End surface
The 15° surface is the seal

2-φ3.4 penetration surface.
Note that it is not the end
surface seal. Also, be sure to
confirm that the screw depth of
the fitting matches before use.
Connection diameter: φ 8 mm, φ 10 mm, φ 3/8”, Rc1/4, G1/4, NPT1/4

●FSM3－L[B][C]1/DH1/EH1/JH1/BA1/BF1/BB1/BC1/[G][H]T (Full scale flow rate: 50,100,200 L/min)
G screw shape (BB)

End surface

surface.
Note that it is not the end
2-φ3.4 penetration surface seal. Also, be sure to
confirm that the screw depth of
the fitting matches before use.
●FSM3 – L[B][C]1/BH2/CH2/HH2/AA2/AF2/AB2/AC2/[G][H]T (Full scale flow rate: 500 mL/min,1,2,5,10,20,50 L/min)

2-φ3.4 penetration *For the G shape, refer to the straight type.
●FSM3－L[B][C]1/DH2/EH2/JH2/BA2/BF2/BB2/BC2/[G][H]T (Full scale flow rate: 50,100,200 L/min)


2-φ3.4 penetration
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Connection diameter: Straight type Rc1/8, G1/8, NPT1/8 Connection diameter: Straight type G1/8
●FSM3 – LሾBሿሾCሿ23 /AA1/AB1/AC1 ●FSM3 – LሾBሿሾCሿ23 /AF1
(Full scale flow rate: 500 mL/min,1,2,5,10,20,50 L/min)
G screw shape (AB) Connection diameter: Straight type G1/8 (AF1)
2-φ3.4 penetration End surface 2-φ3.4 penetration

Note that it is not the end surface
seal. Also, be sure to confirm that
the screw depth of the fitting
matches before use.
2-M3 depth 5
2-M3 depth 5
Connection diameter: Straight 1/4” double barbed fitting Connection diameter: Straight 1/4” JXR male fitting
●FSM3 – LሾBሿሾCሿ23 /AD1 ●FSM3 – LሾBሿሾCሿ23 /AE1
(Full scale flow rate: 500 mL/min,1,2,5,10,20,50 L/min) (Full scale flow rate: 500 mL/min,1,2,5,10,20,50 L/min)
2-φ3.4 penetration
2-φ3.4 penetration
2-M3 depth 5
2-M3 depth 5

Connection diameter: Rc1/8, G1/8, NPT1/8, 1/4” double barbed fitting, 1/4” JXR male fitting
●FSM3 – LሾBሿሾCሿ23 /A AA1/AF1/AB1/AC1/AD/AE[G][H] (Full scale flow rate: 500 mL/min,1,2,5,10,20,50 L/min)
G screw shape (AB*needle valve side)
*Refer to the figure above for the G screw
(AB) shape on the sensor side. The 15° surface is the seal surface.
Note that it is not the end surface seal.
Also, be sure to confirm that the screw
depth of the fitting matches before use.
2-M3 depth 5
*The shape of upper
surface and bottom
surface of the main body
is identical with the
straight type.
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Connection diameter: Straight Rc 1/4, G1/4, NPT1/4 Connection diameter: Straight G1/4 (BF1)
●FSM3 – LሾBሿሾCሿ23 / BA1/BB1/BC1 ●FSM3 – LሾBሿሾCሿ23 / BF1
(Full scale flow rate: 50,100,200 L/min) (Full scale flow rate: 50,100,200 L/min)
G screw shape (BB) Connection diameter: Straight type G1/4 (BF1)
2-φ3.4 penetration
2-φ3.4 penetration
End surface
2-M3 depth 5 The 15° surface is the seal surface.

Note that it is not the end surface 2-M3 depth 5
seal. Also, be sure to confirm that
matches before use.
Connection diameter: Connection diameter:

Straight type 1/4” double barbed fitting Straight type 1/4” JXR male fitting
●FSM3 – LሾBሿሾCሿ23 / BD1 ●FSM3 – LሾBሿሾCሿ23 / BE1
2-φ3.4 penetration 2-φ3.4 penetration
2-M3 depth 5
2-M3 depth 5

Connection diameter: Rc1/4, G1/4, NPT1/4, 1/4” double barbed fitting, 1/4” JXR male fitting
●FSM3 – LሾBሿሾCሿ23 / BA1/BF1/BB1/BC1/BD/BE [G][H] (Full scale flow rate: 50,100,200 L/min)
G screw shape (BB*needle valve side) The 15° surface is the seal surface.
*Refer to the figure above for the G Note that it is not the end surface
screw (BB) shape on the sensor side. seal. Also, be sure to confirm that
matches before use.
2-φ3.4 penetration
End surface

45 2022-12-12
Connection diameter: Straight type Rc1/2, G1/2, NPT1/2

●FSM3 – L[B][C]2/CA1/CF1/CB1/CC1
(Full scale flow rate: 500,1000 L/min)
G screw shape (CB)
End surface

2-M3 depth 3 sure to confirm that the screw depth of the fitting
matches before use.

FSM3-L2CA1 Rc1/2 (80)
FSM3-L2CF1 G1/2 (80)
FSM3-L2CB1 G1/2 (95.4)
FSM3-L2CC1 NPT1/2 (80)
46 2022-12-12
47 2022-12-12

◼ Resin body type
Connection diameter: Straight type φ 4 mm, φ 6 mm, φ 1/4”, Rc1/8, G1/8, NPT1/8
●FSM3 – B[B][C]1/BH1/CH1/HH1/AA1/AF1/AB1/AC1 (Full scale flow rate: 500 mL/min,1,2,5,10,20,50 L/min)
Rc 1/8,NPT1/8,G1/8(AB1) G screw shape (AB)
End surface

Note that it is not the end surface seal. Also, be sure
to confirm that the screw depth of the fitting
matches before use.
2-φ3.4 penetration

FSM3-B1BH1 Push-in φ 4 mm (65)
2-M3 depth 5 FSM3-B1CH1 Push-in φ 6 mm (67.2)
FSM3-B1HH1 Push-in 1/4” (70.4)
FSM3-B1AA1 Rc1/8 (75)
FSM3-B1AF1 G1/8 (87)
FSM3-B1AB1 G1/8 (87)
FSM3-B1AC1 NPT1/8 (75)
●FSM3 – B[B][C]1/DH1/EH1/JH1/BA1/BF1/BB1/BC1 (Full scale flow rate: 50,100,200 L/min)
*The dedicated adapter for the EXA connection type is the secondary side (the right in the figure below).
Rc 1/4,NPT1/4,G1/4(AB1) G screw shape (BB)
End surface

to confirm that the screw depth of the fitting
matches before use.
2-φ3.4 penetration
2-M3 depth 5
FSM3-B1DH1 Push-in φ 8 mm (70.6)
FSM3-B1EH1 Push-in φ 10 mm (82.1)
FSM3-B1JH1 Push-in 3/8” (83.4)
FSM3-B1BA1 Rc1/4 (75)
FSM3-B1BF1 G1/4 (89)
FSM3-B1BB1 G1/4 (89)
FSM3-B1BC1 NPT1/4 (75)
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●FSM3 – B[B][C]1/CA1/CF1/CB1/CC1 (Full scale flow rate: 500,1000 L/min)
G screw shape (CB)

surface.
Note that it is not the end surface
seal. Also, be sure to confirm
that the screw depth of the fitting
End surface matches before use.
G screw shape (CF)

Seal surface
End surface seal surface is the seal surface.

2-M3 depth 3
FSM3-B1CA1 Rc1/2 (80)
FSM3-B1CF1 G1/2 (80)
FSM3-B1CB1 G1/2 (95.4)
FSM3-B1CC1 NPT1/2 (80)
●FSM3 – B[B][C]1/BH2/CH2/HH2/AA2/AF2/AB2/AC2 (Full scale flow rate: 500 L/min,1,2,5,10,20,50 L/min)
*The shape of upper surface and bottom surface of the main body is
identical with the straight type.
FSM3-B1BH2 Push-in φ 4 mm (9.5)
FSM3-B1CH2 Push-in φ 6 mm (10.6)
FSM3-B1HH2 Push-in 1/4” (12.2)
FSM3-B1AA2 Rc1/8 (14.5)
FSM3-B1AF2 G1/8 * (20.5)
FSM3-B1AB2 G1/8 * (20.5)
FSM3-B1AC2 NPT1/8 (14.5)
2-φ3.4 penetration *For the G screw type, refer to the straight type.
●FSM3 – B[B][C]1/DH2/EH2/JH2/BA2/BF2/BB2/BC2 (Full scale flow rate: 50,100,200 L/min)

FSM3-B1DH2 Push-in φ 8 mm (13.6)
2-φ3.4 penetration FSM3-B1EH2 Push-in φ 10 mm (19.3)
FSM3-B1JH2 Push-in 3/8” (20.0)
FSM3-B1BA2 Rc1/4 (15.8)
FSM3-B1BF2 G1/4 * (22.8)
FSM3-B1BB2 G1/4 * (22.8)
FSM3-B1BC2 NPT1/4 (15.8)
*For the G screw type, refer to the straight type.
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●FSM3 – BሾBሿሾCሿ23 / AA1/AB1/AC1 (Full scale flow rate: 500 mL/min,1,2,5,10,20,50 L/min)
G screw shape (AB)
2-φ3.4 penetration
End surface

2-M3 depth 5 to confirm that the screw depth of the fitting
matches before use.
Connection diameter: Straight type G1/8

●FSM3 – BሾBሿሾCሿ23 / AF1 (Full scale flow rate: 500 mL/min,1,2,5,10,20,50 L/min)
2-φ3.4 penetration
2-M3 depth 5
Connection diameter: Straight type 1/4” double Connection diameter: Straight type 1/4” JXR male
barbed fitting fitting
●FSM3 – BሾBሿሾCሿ23 / AD1 ●FSM3 – BሾBሿሾCሿ23 / AE1
(Full scale flow rate: 500 mL/min,1,2,5,10,20,50 L/min) (Full scale flow rate: 500 mL/min,1,2,5,10,20,50 L/min)
2-φ3.4 penetration
2-φ3.4 penetration
2-M3 depth 5
2-M3 depth 5
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Connection diameter: Straight type Rc1/4, G1/4, NPT1/4 Connection diameter: Straight G1/4
●FSM3 – BሾBሿሾCሿ23 /
BA1/BB1/BC1 ●FSM3 – BሾBሿሾCሿ23 / BF1
G screw shape (BB)
2-φ3.4 penetration
2-φ3.4 penetration
End surface
2-M3 depth 5 The 15° surface is the seal surface.

2-M3 depth 5
Connection diameter: Straight type 1/4” double barbed fitting Port size: Straight 1/4” JXR male fitting
●FSM3 – BሾBሿሾCሿ23 / BD1 (Full scale flow rate: 50,100,200 L/min) ●FSM3 – BሾBሿሾCሿ23 / BE1 (Full scale flow rate: 50,100,200 L/min)
2-M3 depth 5 2-M3 depth 5

G screw shape (CB)
●FSM3 – BሾBሿሾCሿ23 / A1/CB1/CC1 (Full scale flow rate: 500,1000 L/min)
End surface

matches before use.
Dimensions
Model No. Fitting
(A)
FSM3-B2CA1 Rc1/2 (80)
2-M3 depth 5
FSM3-B2CF1 G1/2 (80)
FSM3-B2CB1 G1/2 (95.4)
FSM3-B2CC1 NPT1/2 (80)
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1.4.3 IO-Link type

◼ Resin body type
●FSM3 – C[B][C]1/BH1/CH1/HH1/AA1/AF1/AB1/AC1 (Full scale flow rate: 500 mL/min, 1,2,5,10,20,50 L/min)
G screw shape (AB)
M12 connector, 4-pin
End surface

confirm that the screw depth of the fitting matches before
use.
2-φ3.4 penetration

FSM3-C1BH1 Push-in φ 4 mm (65)
FSM3-C1CH1 Push-in φ 6 mm (67.2)
FSM3-C1HH1 Push-in 1/4” (70.4)
2-M3 depth 5
FSM3-C1AA1 Rc1/8 (75)
FSM3-C1AF1 G1/8 (87)
FSM3-C1AB1 G1/8 (87)
FSM3-C1AC1 NPT1/8 (75)
●FSM3 – C[B][C]1/DH1/EH1/JH1/BA1/BF1/BB1/BC1 (Full scale flow rate: 50,100,200 L/min)
G screw shape (BB)
End surface

confirm that the screw depth of the fitting matches before
use.
2-φ3.4 penetration
2-M3 depth 5 Model No. Fitting Dimensions (A)

FSM3-C1DH1 Push-in φ 8 mm (70.6)
FSM3-C1EH1 Push-in φ 10 mm (82.1)
FSM3-C1JH1 Push-in 3/8” (83.4)
FSM3-C1BA1 Rc1/4 (75)
FSM3-C1BF1 G1/4 (89)
FSM3-C1BB1 G1/4 (89)
FSM3-C1BC1 NPT1/4 (75)
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●FSM3 – C[B][C]1/CA1/CF1/CB1/CC1 (Full scale flow rate: 500,1000 L/min)
G screw shape (CB)

End surface
G screw shape (CF)

Seal surface
End surface seal surface is the seal surface.

FSM3-C1CA1 Rc1/2 (80)
2-M3 depth 3
FSM3-C1CF1 G1/2 (80)
FSM3-C1CB1 G1/2 (95.4)
FSM3-C1CC1 NPT1/2 (80)
●FSM3 – C[B][C]1/BH2/CH2/HH2/AA2/AF2/AB2/AC (Full scale flow rate: 500 L/min,1,2,5,10,20,50 L/min)
*The shape of upper surface and bottom surface of the main

body is identical with the straight type.
2-φ3.4 penetration
FSM3-L1BH2 Push-in φ 4 mm (9.5)
FSM3-L1HH2 Push-in 1/4” (12.2)
FSM3-L1AA2 Rc1/8 (14.5)
FSM3-L1AF2 G1/8 (20.5)
FSM3-L1AB2 G1/8 (20.5)
FSM3-L1AC2 NPT1/8 (14.5)
●FSM3 – C[B][C]1/DH2/EH2/JH2/BA2/BF2/BB2/BC2 (Full scale flow rate: 50,100,200 L/min)
2-φ3.4 penetration *The shape of upper surface and bottom surface of the main
body is identical with the straight type.
FSM3-C1DH2 Push-in φ 8 mm (13.6)
FSM3-C1EH2 Push-in φ 10 mm (19.3)
FSM3-C1JH2 Push-in 3/8” (20.0)
FSM3-C1BA2 Rc1/4 (15.8)
FSM3-C1BF2 G1/4 (22.8)
FSM3-C1BB2 G1/4 (22.8)
FSM3-C1BC2 NPT1/4 (15.8)
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●FSM3 – CሾBሿሾCሿ23 / AA1/AB1/AC1 (Full scale flow rate: 500 L/min, 1,2,5,10,20,50 L/min)
G screw shape (AB)

2-φ3.4 penetration
End surface

2-M3 depth 5 matches before use.
Connection diameter: Straight type G1/8

●FSM3 – CሾBሿሾCሿ23 /AF1 (Full scale flow rate: 500 L/min, 1,2,5,10,20,50 L/min)
2-φ3.4 penetration
2-M3 depth 5

Straight type 1/4” Double barbed fitting Straight type 1/4” JXR male fitting
●FSM3 – CሾBሿሾCሿ23 /AD1 ●FSM3 – CሾBሿሾCሿ23 /AE1
(Full scale flow rate: 500 L/min, 1,2,5,10,20,50 L/min) (Full scale flow rate: 500 L/min, 1,2,5,10,20,50 L/min)
2-φ3.4 penetration
2-φ3.4 penetration
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Connection diameter: Straight type Rc1/4, G1/4, NPT1/4 Connection diameter: Straight type G1/4
●FSM3 – CሾBሿሾCሿ23 /BA1/BB1/BC1 (Full scale flow rate: 50,100,200 L/min) ●FSM3 – CሾBሿሾCሿ23 /CF1
(Full scale flow rate: 50,100,200 L/min)
G screw shape (BB)
End surface

matches before use.

Straight type 1/4” double barbed fitting Straight type 1/4” JXR male fitting
●FSM3 – CሾBሿሾCሿ23 /BD1 (Full scale flow rate: 50,100,200 L/min) ●FSM3 – CሾBሿሾCሿ23 /BE1 (Full scale flow rate: 50,100,200 L/min)
Connection diameter: Straight type Rc1/2, G1/2, NPT1/2 G screw shape (CB)
●FSM3 – BሾBሿሾCሿ23 /CA1/CB1/CC1 (Full scale flow rate: 500,1000 L/min)
End surface

Note that it is not the end surface seal. Also, be sure to confirm
that the screw depth of the fitting matches before use.

FSM3-C2BA1 Rc1/2 (80)
FSM3-C2BF1 G1/2 (80)
FSM3-C2BB1 G1/2 (95.4)
2-M3 depth 5 FSM3-C2BC1 NPT1/2 (80)
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1.4.4 Option
●FSM3-A,B ●FSM3-C,D
5-conductor lead wire 4-conductor lead wire (For Bar indicator type)
(For LCD indicator type, Separated indicator type)
30 or less
30 or less Connector cover
Connector cover Material: EPDM
Material: EPDM
Half strip
Half strip
Contact: J.S.T Mfg. Co., Ltd. Contact: J.S.T Mfg. Co., Ltd.
Housing: J.S.T Mfg. Co., Ltd. Housing: J.S.T Mfg. Co., Ltd.
1 Brown
2 Black 1 Brown
Model No. L dimensions Weight g 3 White Model No. L dimensions Weight g 2 Black
FSM3-A 1040 ± 20 21 4 Gray FSM3-C 1040 ± 20 19 3 White
FSM3-B 3040 ± 20 57 5 Blue FSM3-D 3040 ± 20 52 4 Blue
●FSM3-G
(M12 Lead wire with both side connector)
M12 connector (male)
M12 connector (female)
1 Brown
2 White
3 Blue
4 Black
●FSM3-M
DIN rail mounting kit
Top hat type rail
Model No. Dimensions (A)

FSM3-1/BH1/CH1/HH1/AA1/AF1/AB1/AC1/AD1/AE1 18.5
FSM3-1/DH1/EH1/JH1/BA1/BF1/BB1/BC1/BD1/BE1 23.0
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●FSM3-H ●FSM3-J
Bracket 1 (For 200 L or less model) Bracket 2 (For 500 L and 1000 L models)
Model No. Dimensions (A)

FSM3-1/BH1/CH1/HH1/AA1/AF1/AB1/AC1/AD1/AE1 13.5
FSM3-1/DH1/EH1/JH1/BA1/BF1/BB1/BC1/BD1/BE1 18.0
●FSM3-K
Panel mounting kit 1 (For LCD indicator type, Separated indicator type) [Panel cut dimensions]
Single mount
 LCD indicator  Separated indicator
4R-1 or less
Adhered mount
4R-1 or less
Panel Holder
Panel Holder
●FSM3-L
Panel mounting kit 2 (For Needle valve integrated type)
 Needle valve integrated type [Panel cut dimensions]
Adhered mount
Dimensions Dimensions
Model No.
(A) (B)
FSM3-1/BH2/CH2/HH2/AA2/
28.5 40.5
AB2/AC2//N/T
FSM3-1/DH2/EH2/JH2/BA2/
Panel Holder 30 46.5
BB2/BC2//N/T
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1.4.5 Products weight

◼ Resin body type
[Unit: g]
Fitting LCD indicator type
Bar display
No needle With needle IO-Link type
Model Content type
valve valve
BH1 Push-in (φ 4 mm straight) 60 90 50 50
CH1 Push-in (φ 6 mm straight) 50 80 40 50
DH1 Push-in (φ 8 mm straight) 80 120 70 80
EH1 Push-in (φ 10 mm straight) 80 120 70 80
HH1 Push-in (φ 1/4 inch straight) 60 90 50 50
JH1 Push-in (φ 3/8 inch straight) 80 120 70 80
AA1 Rc1/8 Straight 60 90 50 50
BA1 Rc1/4 Straight 60 100 50 60
CA1 Rc1/2 Straight 120 - 110 120
AF1 G1/8 Straight 70 100 60 70
BF1 G1/4 Straight 85 125 75 85
CF1 G1/2 Straight 120 - 110 120
AB1 G1/8 Straight 60 90 50 60
BB1 G1/4 Straight 70 110 60 70
CB1 G1/2 Straight 140 - 130 140
AC1 NPT1/8 Straight 50 80 50 50
BC1 NPT1/4 Straight 60 100 50 60
CC1 NPT1/2 Straight 120 - 110 120
BH2 Push-in (φ 4 mm elbow) 70 100 60 60
CH2 Push-in (φ 6 mm elbow) 60 90 50 60
DH2 Push-in (φ 8mm elbow) 100 140 90 90
EH2 Push-in (φ 10 mm elbow) 100 140 90 100
HH2 Push-in (φ 1/4 inch elbow) 70 100 60 60
JH2 Push-in (φ 3/8 inch elbow) 100 140 90 100
AA2 Rc1/8 elbow 70 100 60 60
BA2 Rc1/4 elbow 80 120 70 80
AF2 G1/8 elbow 80 110 70 80
BF2 G1/4 elbow 105 145 95 105
AB2 G1/8 elbow 70 100 60 70
BB2 G1/4 elbow 90 130 80 90
AC2 NPT1/8 elbow 70 100 60 60
BC2 NPT1/4 elbow 80 120 70 80
◼ SUS body type

[Unit: g]
Fitting LCD indicator type
Bar display
No needle With needle IO-Link type
Model Content type
valve valve
AA1 Rc1/8 Straight 100 165 90 95
BA1 Rc1/4 Straight 115 200 105 110
CA1 Rc1/2 Straight 420 - 410 420
AF1 G1/8 Straight 155 220 145 150
BF1 G1/4 Straight 190 275 180 185
CF1 G1/2 Straight 420 - 410 420
AB1 G1/8 Straight 100 165 90 95
BB1 G1/4 Straight 110 195 100 105
CB1 G1/2 Straight 440 - 430 440
AC1 NPT1/8 Straight 100 165 90 95
BC1 NPT1/4 Straight 115 200 105 110
CC1 NPT1/2 Straight 420 - 410 420
1/4 inch double barbed joint
AD1 155 220 145 150
(500 mL/min to 50 L/min)
1/4 inch double barbed joint
BD1 190 275 180 190
1/4 inch JXR male joint
AE1 155 220 145 150
1/4 inch JXR male joint
BE1 190 275 180 190
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60 2022-12-12
1.5 Option (ATEX Compliant)

WARNING
Attach the product to grounded metal. Wipe it with a damp cloth.
There is a possibility that the electrostatic charge could be drained.
In an explosive atmosphere, never unplug and plug back in this product while it is being
energized.
In an explosive atmosphere, never loosen the cover bolts and never open the protective cover
while it is being energized.
Do not disassemble and modify this product.
It may cause failure.
◼ The following should be observed.

Ⅱ 3G Ex ec ⅡC T6 Gc 0°C≦Ta≦50°C
◼ Working conditions
1) There is a possibility that the electrostatic charge could be drained. Attach the product to grounded
metal. Wipe it with a damp cloth.
2) The cable fastening parts of this product do not have enough fastening function. The user shall
provide additional clamping of the cable to ensure that pulling is not transmitted to the terminations.
3) The protective cover of this product can be opened and closed, but it has an explosion protection
structure only when the protective cover is closed and the cover bolts are tightened to the specified
torque.
Protective cover
Cover bolts
Specified torque: 0.6N･m±10%
◼ Temperature rating of measurement fluid

From a point of view of explosion protection, the upper limit temperature of measurement fluid is 50°C.
◼ ATEX Directive 2014/34/EU

EN standards for explosive atmospheres
EN IEC 60079-0:2018
EN IEC 60079-7:2015/A1:2018
◼ Self-declaration No.
EX-307
61 2022-12-12
SM-662466-A/6 2. INSTALLATION
2. INSTALLATION
2.1 Installation Environment
WARNING
Do not use in a corrosive gas atmosphere such as sulfurous acid gas.
This product shall be used in the ambient temperature 0 to 50°C.
Even within the temperature range, do not use in places where temperature changes suddenly
causing dew condensation.
Do not install this product where moisture, salt, dust, and chip powder, and in a pressurized
and depressurized environment. (Excluding environmental-resistant specifications)
The degree of protection of this product is equivalent to IP40. Also, the product cannot be used
where temperature change is rapid and the humidity is high as failure may be generated by dew
inside the main body.
The degree of protection of environmental-resistant specifications is equivalent to IP65. Note that
this product cannot be used in environments where it will be constantly exposed to water, or in
water or where water or oil may radiate violently.
CAUTION
Always conduct piping and installation before wiring.
Before installing piping, clean out the pipes using air blower to remove all foreign objects and
cutting chips from the pipes.
The rectifier or platinum sensor may be damaged if foreign objects, cutting chips, etc., enter in
piping.
Also, connect fitting when the stainless steel body type is used to release on the OUT side.
The port filter may disengage.
When using a pushed-in fitting, insert the tube firmly, and then check the tube does not get
removed when pulled.
Cut the tube in right angle with the dedicated cutter.
Be cautious when using on steel pipe connection.
The core in the IN side steel pipe and OUT side steel pipe may deviates resulting in excessive load
applied to the body, and cause external leakage and product damage. The screw-in fitting of the
resin body type is especially used for the pushed-in fitting for pneumatic pressure. Do not use this
product on pneumatic pressure circuit of steel pipe connection.
Be cautious of interference when the elbow fitting is mounted downward.
If the elbow fitting is mounted downward, it may interfere with the DIN rail mount and bracket.
Verify there is no gas leakage after piping is done.
When using this product with oxygen gas, be cautious of the following points.
• Piping work should be conducted by those who have special knowledge and skills on oxygen
gas handling.
• Use only piping that treated with oil-prohibited processing.
• Before installing this product, remove dust, burr, etc. on the piping.
• Install a filter on the primary side of this product.
Do not install a regulator/solenoid valve, etc., immediately before this product.
Drifting may be generated causing an error. When necessary, install a straight pipe section.
Make sure that the leakage detection fluid does not get into the case.
When a leakage inspection is conducted on the piping, make sure the leakage detection fluid does
not get into the case.
62 2022-12-12
CAUTION
Do not turn the elbow fitting or screw-in fitting more than necessary.
Elbow fitting or screw-in fitting of resin body type can be rotated about 10 times, but do not rotated
the fitting except when changing the orientation during installation. If it is rotated more than
necessary the seal parts may get caught or worn, causing external leakage.
Be cautious of flow rate changes caused by installation posture of the main body.
Though this product can be used for both “vertically and horizontally”, the flow rate may fluctuate
due to installation posture difference and piping condition.
Do not install the main bodies close to each other.
Self-heat generation of each product can cause the temperature of product main body to rise,
promoting characteristic changes and resin material changes. When placing side by side, secure a
space for 10 mm or more.
Be cautious how the LCD type flow rate display part is looked.
Since liquid crystal is used on the flow rate display part, it may be hard to read in certain angles.
Do not apply excessive force to the knob on the needle valve.
When closing/opening the knob to the end, do not turn the knob with excessive force (0.05 N・m or
less). Also, do not pick the lock nut when adjusting the needle. It may cause needle snagging and
damage.
Do not overly tighten the knob of the needle valve.
If it is tightened too tightly when fully-opened, the setting flow rate may fluctuate. Be cautious of
tightening the knob too tightly.
Verify the lock nut of the needle valve is not loosened.
If the lock nut is loosened, the speed control of the actuator may not be possible.
Do not turn the needle too much.
The needle valve comes with the retaining mechanism; however, if the needle is turned too much,
it may cause damage.
63 2022-12-12
2.2 Mounting Method

・It may be difficult to view the LCD, depending on the angle.
・This product can be installed with any direction; vertical, horizonal, left, and right orientation.
・The tightening torque for screws should be 0.5 N・m.
Lateral mounting Vertical mounting

(use of through hole) (use of female thread on bottom surface)
Installed screw
Installed screw
Installed
screw
The mounting tightening torque shall be 0.5 N・m.
Bracket mounting
(use of dedicated bracket)
Installed screw
Installed screw
FSM3 - *005 to 201 FSM3 - *501 to 102/

Single item model No.: FSM3-H Environment-resistant specifications
Single item model No.: FSM3-J
DIN rail mount
FSM3 - *005 to 201

Single item model No.: FSM3-M
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Panel mounting (non-needle valve)
FSM3 - *005 to 201 (non-needle valve)

Single item model No.: FSM3-K
Panel mounting (with needle valve)
FSM3 - *005 to 201 (with needle valve)

Single item model No.: FSM3-L
[1] [2] [3]

The panel vessel is inserted from the The panel vessel is inserted from the Insert the sensor from the back side
front side of the panel. For panel cut back side of the panel (hang it on the of the panel.
dimension, refer to the appearance panel vessel notch), and fix with the
dimensions figure. screw.
Panel Screw
Panel vessel Panel vessel holder Sensor
[4] [5]
The panel holder is inserted from the Push the panel holder until the
back side of the panel. sensor is firmly fixed, and attach the
connector.
Panel holder
・Please fix the panel vessel using a tightening torque of 0.06 N・m.
・Please do the piping work before panel mounting. Do not add excessive stress to parts of the panel mount. It
may damage the parts.
・When mounting the panel, please ensure that vibration is not applied to the product.
・For panel cutout dimensions, refer to “1.4.4 Option”.
65 2022-12-12
2.3 Piping Method
2.3.1 Cleaning the pipes

Before installing piping, clean out the pipes using air blower to remove all foreign objects and cutting
chips from the pipes. The rectifier or platinum sensor could be damaged if foreign objects, cutting chips,
etc., enter the pipes.
2.3.2 Sealant
Apply seal tape or sealant about two ridges or more inside from the tip of a screw. If it protrudes the top
of the screw part of piping, the pieces of seal tape and remaining parts of sealant may enter inside piping
and devices due to screwing-in causing failure.
When using a seal tape, put it around the reverse direction of the screw’s direction, push it with your
finger, and adhere it to the screw.
When using a liquid sealant, be cautious that it does not attach to the resin part. The resin part may
break causing failure and malfunctions. Also, do not apply a sealant on a female screw side.
シールテープ
Sealant tape 固形/液状シール剤
Solid/liquid sealant
Remain two
ridges
2 山残す
Appropriate
適切不適切
Inappropriate 適切
Appropriate 不適切
Inappropriate
・As a part of sealant may remain on the screw part once the piping is removed once, remove
when re-piping is done.
・When using the clean-room specification, be cautious of seal materials against the used
system.
2.3.3 Piping direction

Piping should be conducted by matching the fluid’s direction and the direction indicated on the body.
Flow direction
Flow direction
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2.3.4 Tightening
• When mounting on piping, do not apply excessive screwing, torque and load torque on the connection
board. Also, use a wrench on the metallic part of the body at piping to avoid force on the resin part.
• When tightening the fitting, use a wrench catcher to the metal board.
• The tightening torque of the fitting is as follows.
Connection diameter Tightening torque N･m

Rc1/8, G1/8, NPT1/8 3 to 5
Rc1/4, G1/4, NPT1/4 6 to 8
Rc1/2, G1/2, NPT1/2 16 to 18
◼ Tightening of 1/4” double barbed fitting, 1/4” JWR male fitting

<1/4” double barbed fitting>
4) Check the front ferrule, back ferrule and nut are attached correctly.
5) Insert the tube to the end of the main body, and tighten the nut with your finger as much as possible.
(This position is called the finger tight position.)
6) Tighten 1 and 1/4 rotations from the finger tight position using the tool.
チューブ
Tube
フロントフェルール
Front ferrule Back ferrule
バックフェルール Nut
ナット
<1/4” JXR male fitting>

1) Insert the gasket with holder to the gland.
The gasket gets on and maintained on the bead correctly.
(In case of the gasket without holder, insert into the female nut)
2) Assemble each part and tighten the nut with your finger as much as possible
(this position is called the finger tight position)
3) Hold the main body firmly, and tighten the female nut 1/8 rotations from the finger tight position
(when gasket material is nickel and SUS316).
In case of other materials, contact your nearest sales dealer and agency.
Nut
Bead
Gasket
Holder
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2.3.5 EXA connection method

To connect the EXA-02-□2C-□ (sold separately) and the EXA connection fitting type of FSM3, remove
the fitting fixation pin on IN side of EXA, and after inserting the dedicated connection fitting of OUT side
of FSM3 to the end, fix with the fitting fixation pin firmly again.
EXA-02-□2C-□
IN side
FSM3
Fitting fixation pin
Fitting (IN side)
・To avoid influence of grease and oil flowing, always attach EXA on the OUT side of FSM3.
・Use the lead wire type (without lamp/surge compressor) for the coil option of EXA.
As interference occurs in the terminal box, the DIN terminal box type cannot be attached.
・Before using this product, always check for disconnection and external leakage.
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2.4 Wiring method
DANGER
Do not use by exceeding the power supply voltage range.
If voltage exceeding the power supply voltage range indicated in the specification is applied, it may
cause malfunction, damage of this product, electric shock and fire.
Do not connect the load exceeding the output ratings.
It may cause damage and fire of output circuit.
WARNING
Check the wire colors when wiring.
Mis-wiring leads to damage, failure and malfunction of this product. Always check the colors of
wires in the operation manual and conduct wiring.
Check insulation of wiring.
Avoid contacting with other circuit, ground faults and insulation failure between terminals.
Overcurrent may flow in this product causing damage.
This product uses the DC regulated power supply within rating insulated from the AC power
supply.
If the power supply is not insulated, it may cause electric shock.
The peak value may exceed the rating in the unregulated power source. It may cause damage this
product and accuracy may be worsened.
Perform wiring after stopping control device and the machinery device, and turning the power
supply OFF.
Sudden operation is dangerous as it may cause unexpected movement.
First, conduct an electrification test while the control device and machinery device are OFF, and
perform necessary data settings.
Before working and during working, discharge the static electricity electrified on human body, tools
and devices. On the moving parts, connect and conduct wiring with flexible wires such as wires for
a robot.
Install this product and wiring away from the noise sources as much as possible such as
strong electric lines.
Take separate measures for the surge on the power line.
Do not use this product by exceeding the power supply voltage range.
If voltage over the specification range is applied or 100 V AC is applied, the product may cause
damage, electric shock, and fire.
Do not short circuit the load.
It may cause damage and fire.
For the power source for the stainless steel body type (including environment-resistant
specifications), use a DC regulated power source completely insulated from the AC primary
side, and use one of + side and – side as the F.G. connection.
Between the internal power source circuit of stainless steel body type and stainless steel body, a
varistor (approx. 40 V DC in regulated voltage) is connected for insulation damage prevention of
this product. Do not conduct a withstand voltage test and insulation resistance test between the
internal power supply circuit of the stainless steel body type and stainless steel body. If these tests
are required, perform after removing the wiring. Excessive potential difference between the power
supply and stainless steel body result in burning of internal parts. If electric welding of devices and
frames are performed for installation of stainless steel body type, connection, and after wiring, and
a short circuit accident occurs, excessive high voltage and surge voltage at welding current and
welding flows to the wiring, earth lines and fluid route connected between above devices causing
electric line and device damage. Works such as electric welding shall be performed after removing
all F.G. connections of the product and electric wiring.
Do not mis-wire power source polarity.
It may cause damage and burn out.
69 2022-12-12
WARNING
Use the impedance of connection load after verification.
The output impedance of the analog output voltage output type is approx. 1 kΩ. If the impedance
of the connecting load is low, the output error increases. Check for an error with the impedance of
the connecting load before using.
(The analog output current output type is excluded.)
[Example of calculation]
FSM3 (Voltage output) impedance: 𝑅𝑜 = 1𝑘𝛺
Load internal impedance ∶ 𝑅𝑥 = 1𝑀𝛺
𝑅𝑜
Output value = (1 − ) × 100%
𝑅𝑜 + 𝑅𝑥
1𝑘𝛺
= (1 − ) × 100% ⇒ Output error approx. 0.1%
1𝑘𝛺 + 1𝑀𝛺
Check that stress (7 N and over) is not applied to cable pulling out section or connectors.
It may cause malfunction. Connector cover
Always attach the connector cover after connecting the connector.
After connecting the 4-core/5-core cable, attach the connector cover.
Turn the power source OFF before inserting/removing the cable.
Make sure to turn the power OFF before inserting/removing the cable.
Do not rotate the M12 connector.
The M12 lead wire with both-end connector does not rotate. Do not try to rotate it.
When matching the M12 connector, match the position of the convex part of the connector
terminal on the main body side and the concave part of the cable connector terminal.
After inserting firmly, hold the knurled part not to damage the threads, and tighten by turning
clockwise.
Do not tighten the M12 connector too tightly.
If it is screwed in excessively, it may damage the connector on the main body side.
Recommended torque: 0.4 to 0.49 N・m
The length of the M12 connector cable shall be 20 m or less.
When extending the cable, the cable length between the master and device (this product) should
be 20 m or less.
Insulate unused wires so that they do not contact with other wires.
If an unused wire contacts the gland by error, the product may be damaged and malfunctioned.
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2.4.1 LDC display (NPN output)

◼ FSM3-L*****B/F (One analog, 2 switches)
(Brown) Power supply +
1
１
Load
2
(Black) CH1
SW output 1 Load
Main circuit
Using CH2 as +
switch output (White) CH2

SW output 2
-
3
(Gray) Analog output

4
Load
(Blue) Power supply -
5

1
Load
2
Using CH2 as (Black) CH1
SW output 1
external input
Main circuit
+
(White) CH2
External input -
3

4
(Blue) Load
Power supply -
5
◼ FSM3-L*****A/E (One analog, One switch, With copy function)

1
Load
2
(Black) CH1
Model with the SW output 1
Main circuit
copy function +
(White) CH2
Copy terminal -
* When using the copy function, 3
please refer to “2.4.3 Copying (Gray) Analog output

R*
setting values”. 4
(Blue) Load
Power supply -
5
* Analog output voltage output type R: approx. 1 kΩ

Analog output current output type R: approx. 100 Ω
Main body Pin Option
connector Name
No. cable color
[1] Brown Power supply (+) (Voltage output: 12 to 24 V, current output:24 V)
[2] Black CH1 (NPN transistor output 1: max50 mA)
[3] White CH2 (NPN transistor output: max50 mA or External input or Copy terminal)
Voltage output: 1 to 5 V load impedance 50 kΩ or over
[1][2][3][4][5] [4] Gray Analog output
Current output: 4 to 20 mA load impedance 300 Ω or less
(FSM3 side) [5] Blue Power supply – (GND)
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2.4.2 LDC display type (PNP output)

◼ FSM3－FSM3-L*****D/H (One analog, 2 switches)
1
(Black) CH1
SW output 1
2
Main circuit
+
Using CH2 as (White) CH2
SW output 2 Load
switch output 3 -
Load
4
(Blue) Load
Power supply
5

1
(Black) CH1
SW output 1
2
Main circuit
+
Using CH2 as (White) CH2
External input Load
external input 3 -

4
(Blue) Load
Power supply
5
◼ FSM3-L*****C/G (One analog, One switch, Copy function)

1
(Black) CH1
SW output 1
2
Model with the
Main circuit
(White) CH2 +
copy function Copy terminal Load

3 -
* When using the copy function,

please refer to “2.4.3 Copying R* (Gray) Analog output
4
setting values” (Blue)
Power supply
Load
5
* Analog output voltage output type R: approx. 1 kΩ

Analog output current output type R: approx. 100 Ω
Main body Pin Option
connector Name
No. cable color
[1] Brown Power supply (+) (Voltage output: 12 to 24 V, current output:24 V)
[2] Black CH1 (NPN transistor output 1: max50 mA)
[3] White CH2 (NPN transistor output: max50 mA or External input or Copy terminal)
[1][2][3][4][5] Voltage output: 1 to 5 V load impedance 50 kΩ or over
[4] Gray Analog output
(FSM3 side) [5] Blue Power supply – (GND)
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2.4.3 Copying setting values

◼ FSM3-L*****A/C/E/G/** (LCD indicator type, with copy function)
Power supply + Power supply +

SW output 1 SW output 1
Copy terminal Copy terminal
Setting copy
Analog output Analog output
Power supply - Power supply -
FSM3 (master) FSM3 (slave)
+ -
・Connect CH1 (SW output 1) on the master side and CH2 (copy terminal) of the slave side, turn the power of the
sensor ON, and use the copy setting function (F.93). This connection shall be used on when using the copy
setting function is used.
・If copying is performed while load is connected on CH1 or the switch is operated while CH1 and CH2 are
connected, the device side may perform unexpected operation, and device and FSM3 may be damaged. Do
not use while connecting to the copy terminal.
・For details of the copy setting function, refer to "F.93: Copy function".

◼ FSM3-B*****J/K (Bar display)
(Black) Analog output

Main circuit
+
-
R*
Load
(White) Model
identifying signal
Main body connector
* Analog output voltage output R: approx. 1 kΩ

[1] [2] [3] [4] Analog output current output R: approx. 100 Ω
Pin Option
Name
No. cable color
[1] Brown Power supply (+) (Voltage output: 12 to 24 V, current output: 24 V)
Voltage output: 1 to 5 V load impedance 50 kΩ or over
[2] Black Analog output
[3] White N.C. when using the single unit of the model identifying signal.
[4] Blue Power supply – (GND)
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2.4.5 Connection between Bar display type and separate display device
E-con Sumitomo 3M Wire mount plug

Separate display device FSM3
(Black) Sensor
LED Bar indicator type
(White) Model identifying signal Voltage output type
(Blue) Power supply - (The current output type cannot be
connected)
E-con Sumitomo 3M Mini-Clamp Board Mount Socket

Straight type, 1 row type 37204-62B3-004 PL
・When the FSM3 bar display type and FSM2 separate display device are connected, the flow rate range, flow
direction, and gas type are automatically identified (in factory setting).
・"Gas type setting" function in the FSM2 separate display device is different from the "Gas type switching"
function in which the sensor is switched according to a gas type.
When the “Gas type switching” function is necessary, use the LCD display type.
・When connecting the FSM3 bar display type oxygen, the gas type display is “Ai” (Air, N2); however, it can be
used without trouble.
・For operation of the FSM2 separate display device, refer to Separate Display Device Operation Manual
D2-180166.
2.4.6 IO-link type

◼ FSM3-C*****L** (IO-link type)
(FSM3 side) [3] Blue

Option
No. cable Name
color
[1] Brown Power supply (+) (18 to 30V DC)
[2] White
[2] White N.C.
[1] Brown [3] Blue Power supply – (GND)
[4] Black C/Q (IO-Link)
[4] Black
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2.5 Analog output characteristics
Flow direction Voltage output type Current output type

[Bi- direction]
(V) (mA)
5 20
Analog output
Analog output
3 12
1 4
-100% 0 100% -100% 0 100%

Flow rate Flow rate Flow rate Flow rate
Flow rate (L/min) Flow rate (L/min)
[Uni-direction] (V) (mA)

5 20
Analog output
Analog output
3 12
1 4
0 100% 0 100%
Flow rate Flow rate
Flow rate (L/min) Flow rate (L/min)
・0 to 100% for the uni-direction type and -100 to 100% for the bi-direction type are the full scale.
The bi-direction type of LCD display type can be switched to uni-direction output with the button setting (forward
and reverse directions)
The value after switching is a reference value.
・In the LCD display type, the output type of the analog output when switched to carbon dioxide gas is selected
from type A or type B.
Type A: Voltage output; 1-3 V (uni-direction type), 2-4 V (bi-direction type)
Current output; 4-12 mA (uni-direction type), 8-16 mA (bi-direction type)
Type B: Voltage output; 1-5 V, current output; 4-20 mA
・Analog output is also output outside the range of measured flow rate. It will be outside the accuracy guarantee.
Output possible range: the lower limit is approx. 0.6 V and upper limit is approx. 5.4 V for the voltage type, and
the lower limit is approx. 2.4 mA and upper limit is approx. 21.6 mA for the current type.
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3. USAGE
WARNING
When using, perform warming-up (five minutes or more after electrification).
Output accuracy is influenced by self-heating with electrification in addition to temperature
characteristics.
When changing the setting values, change after stopping the equipment.
The control device may conduct unexpected operations.
Do not disassemble and modify this product.
It may cause failure.
Observe the use conditions for CE conformity.
This product is a CE compliant product that complies with EMC directives. The followings are
required as the compliance conditions to the conformity standard EN 61000-6-2 regarding
immunity applied to this product.
• Use a cable that a pair of power source line and signal line, and it is evaluated as the signal line.
• Surge immunity measures are implemented on the device side.
CAUTION
Even when exceeding the measured flow rate range, analog input is performed.
In case of LCD display type for the display, it is displayed “Hi” or “Lo”. In case of bar display type,
the bar display blinks. However, please note that it will be out of accuracy guarantee. For details on
display, refer to the section on display and error code.
Avoid switch settings in areas where flow rate is unstable such as fluid pulsation.
If the switch is operated when the flow rate is unstable, the operation becomes unstable. In the
case, there should be enough interval between two setting values or avoid switch settings in
unstable areas, and then check the switch operation is stable before using.
Pay attention to the reverse current caused by disconnected wires/wiring resistance.
If other devices, including a flow rate sensor, are connected to the same power sensor as the flow
rate sensor, and the switch output wire and power cable minus (-) side are short-circuited to check
the operation of the control panel's input unit, or if the power cable's minus (-) side is disconnected,
reverse current could flow to the flow rate sensor's switch output circuit and cause damage.
Diode for reverse Control panel

prevention
PLC input
circuit
Main
component
Another
Flow sensor
Current from
Test SW or
another
short circuit
component Disconnection
Take countermeasures as followings to prevent damages caused by reverse current.

[1] Avoid centralizing current at the power cable, especially the minus side power cable, and use a
thick cable as much as possible.
[2] Limit the number of devices connected to the same power supply as the flow rate sensor.
[3] Insert a diode parallel to the flow rate sensor's output line to prevent the reverse current.
[4] Insert a diode parallel to the flow rate sensor power wire's minus (-) side to prevent the reverse
current.
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CAUTION
When using the LCD display, do not press down on the display section.
This may lead to failure.
This product uses a micro-sensor chip, and must be installed where it will not be subject to
dropping, impact or vibration.
Handle this product as a precision component during installation and transportation.
If an abnormality is generated during operation, stop using this product promptly, turn the
power OFF, and contact the sales dealer.
For approx. five seconds immediately after electrification, use the control circuit and program
to ignore signals.
Immediately after electrification, as this product performs self-diagnosis, it does not perform any
flow rate control operation for approx. five seconds.
The flow rate of this product should be used within the range of rated flow rate.
This product should be used within the range of operating pressure.
If this product shares the power source with an inductive load that surge current is
generated, implement measures for surge current wraparound.
When this product shares the power source with an inductive load that surge current such as
solenoid valve and relay is generated, if the circuit is shut in the operating state of inductive load,
the surge current wraparounds the output circuit depending on the installation position of surge
absorption element causing failure.
Circuit cutoff with

disconnection or
Surge absorbing emergency stop
Surge absorbing
element (retrofitted) element (built-in)
Solenoid
Current controller Relay valve
circuit
Main
Surge current PLC output
Implement countermeasures as followings to prevent damages caused by surge current

wraparound.
• Separate the power source between the output system that becomes inductive load such as
solenoid valve and relay and input system such as flow rate controller.
• When the power source cannot be separated, install an element for surge absorption directly for
all inductive loads. The surge absorption element connected to PLC is to protect the device only.
• As shown in the figure below, connect a surge absorption element on each of power source
wires to prepare for disconnection in an unspecified location.
device
device
device
Input
Input
Input
When devices are connected to the connector, turn the power OFF when removing and attaching
the connector. If the connector is removed during electrification, surge current wraparounds
causing damages on the output circuit.
When it has a needle valve, the needle may rotate due to vibration causing the flow rate to
fluctuate.
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CAUTION
Do not turn the fitting while applying fluid pressure on this product.
It may cause external leakage. Also, do not turn the fitting while using this product.
Install the protective cover correctly.
The explosion-proof and protective structures function with the protective cover (transparent
cover) correctly attached. Regularly confirm that the cover bolt (M3) for fixing the protective cover
is tightened to the following torque. Also, when opening and closing the protective cover, make
sure that there is no floating or displacement of the protective cover and that there is no adhered
foreign matter, etc., on the seal surface. Tighten and fix with the following torque.
Protective cover
Cover bolts
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3.1 How to use the LCD display (FSM3-L series)

3.1.1 Names and functions of display/operation section
Main display section (green/red)
Output (OUT1) display (green)
・Displays flow rate and setting values. Flow rate unit display
・Turns on when CH1 output is ON.
・The display color can be switched with settings. ・Displays the flow rate unit.
・Blinks together with the background during overcurrent
・When CH1 output is ON, the lighting color changes.
detection.
Output(OUT2) display(green)
・Turns on when CH2 output is ON.
・Blinks together with the background during overcurrent
detection.
＋ Key
・Starts integration of peak hold and integrated flow rate.
・Sequentially changes the function selection screens.
・When setting data, this key is used to count up the values,
etc.
・Used to verify CH1 output settings.
－ Key
MODE key Sub-display section (green/red) ・Stops integration of peak hold and integrating flow rate.
・Used to enter the setting mode. ・Displays the flow direction, reference ・Sequentially changes the function selection screens.
・Used to determine a value and move state, gas type and numbering. ・When setting data, this key is used to count down the values,
an operating digit. ・The display color can be switched with etc.
・Used to return to flow rate display. settings. ・Used to verify CH2 output settings.
・When CH2 output is ON, the lighting color
changes.
Knob
・Adjusts the flow rate.
Lock nut
・Used when fixing the position of the
knob.
・The integrated flow rate value is displayed on the main screen and sub-screen.
・When the display is reversed with “F.07: Display reverse setting”, the main display and sub-display are reversed respectively.
Please note that + key and - key operations are not reversed even when the display is reversed.
・When “ON Red/OFF Green” and “ON Green/OFF Red” are set with “F.05: Display color setting”, the screen color changes
when the switch output is ON.
When CH1 is ON, the lighting color of the main screen changes, and when CH2 is ON, the lighting color of the sub-screen
changes.
3.1.2 Explanation of functions

For functions and various settings, there are cases to conduct during normal flow rate display and after
entering the setting mode.
The setting mode is divided to the SET mode and maintenance mode according to the use frequency.
When verifying the setting contents, the setting monitor mode is used.
◼ Normal operation (RUN mode)

Item Description Factory setting
Instantaneous flow rate Display
The instantaneous flow rate is displayed.
display (Measurement)
Max. and min. values for the flow rate within a set interval are displayed.
There are measurement/stop states, and during the measurement state,
Peak hold function Non-display (Stop)
values are acquired.
When the power is turned ON: Stop
By setting the power, discharge pressure, flow rate of the compressor, as
well as the power <=> CO2 conversion coefficient, you can learn how much
CO2 discharge rate display Non-display (Stop)
CO2 is discharged. (Calculated reference value) Can be used only when the
gas type is set to “Air”.
Displays the integrated flow rate.
There are the measurement state/stop state, and calculation on the
integrated flow rate is conducted during the measurement state.
Non-display
Integrated flow rate display When the power is turned ON, it is in the measurement state.
(Measurement)
As the switch output functions, the switch can be turned ON/OFF on the set
integrated value or more, and there is the integration pulse function that
outputs pulse per specified integration value.
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◼ SET mode
No. Item Description Factory setting
Selection of CH1 Select the function of CH1.
F.01 No switch output
operation You can set switch output operation and set the integrated pulse.
Select the function of CH2.
Selection of CH2
F.02 Select if CH2 is used as switch output or external input (integrated No switch output
operation
value reset / auto reference).
You can choose to acquire integrated flow rate values Consecutive
Integrated
F.03 consecutively or at set times. acquisition
functions setting
You can also decide whether or not to save that data. (Note1) Data holding: OFF
Set the sub-display section’s display method.
Sub-screen display
F.04 Can be switched to “flow direction”, “reference state”, “gas type”, Flow direction
setting
or “number” display.
Set the display color. (Red, Green) At normal display:
Display color
F.05 The display color when the switch output is ON can be set during Green
setting
normal display. At switch ON: Red
Flow rate direction Set the flow direction.
F.06 setting Setting is possible for bi-direction, one-side forward direction and Bi-direction
(Bi-direction type only) one-side reverse direction.
Display reverse
F.07 The LCD display can be vertically reversed. Standard display
function
Select the standard state or reference state.
Standard state (ANR): Flow rate converted to volume of 20°C, 1
atm and 65%RH.
Reference state
F.08 (For a gas type except for air is 20°C, 1 ANR
setting
atm and 0%RH)
Reference state (NOR): Flow rate converted to volume of 0°C, 1
atm and 0%RH.
A unit can be set.
Unit setting For domestic: L/min
F.09 Select from "L/min" or "cf/h (cf/min)". (cf/min for 1000L/min type
(For overseas only) For overseas: L/min
only)
The digital display refresh cycle can be set in three stages from
Display cycle
F.10 0.25 s to 1 s. If the display flicks, it may be improved by setting a 0.5sec
setting
longer display refresh cycle.
Sets the response time.
Analog output
Response can be set in seven stages from 0.05 s to approx. 1.5 s.
F.11 setting response 0.05sec
Chattering and mis-operation caused by sudden flow rate changes
time
or noise are prevented.
F.12 Numbering setting You can set the numbering. 0000
The measured gas can be changed.
F.13 Gas type switching (0.5 to 200 L/min type only. Oxygen type has no gas type Air
switching）
ECO mode can be selected.
If the buttons are not operated for approx. one minute, the ECO
F.14 ECO mode setting OFF
mode will activate and turn OFF the display's backlight. Current
consumption can be reduced with this mode.
・Power: 0.20 kW
・Pressure: 0.10 MPa
CO2 emission can be calculated. Set your compressor power,
CO2 discharge rate ・Flow rate: 100 L/min
F.15 discharge pressure, discharge flow rate, and CO2 conversion
calculation setting ・Conversion
coefficient.
coefficient: 0.000 kg
(CO2)/kWh
Key lock method and PIN number method can be set.
F.16 Lock setting OFF
Select according to the use purpose.
You can choose to acquire peak bottom values consecutively or at Consecutive
F.17 Peak hold setting set times. acquisition
You can also decide whether or not to save the data (Note 1). Hold data: OFF
Note1: Data is saved every 5 minutes. Please be careful that the number of saving times does not exceed
the number of access times of the storage element (the limit is 1 million times). (Changes to
various settings are also counted in the number of accesses.)
Saved times = Usage time / 5min (< 1 million times)
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◼ Maintenance mode
No. Item Description Factory setting
Forced output Use this function to forcibly turn the switch output ON and confirm
F.91 －
function the wiring connection and initial operation of the input device.
Zero adjustment Adjusted value：
F.92 The zero point deviation is corrected (Range: Within ±10%F.S.)
function 0 L/min
Operations and set values can be easily copied between two
F.93 Copy function FSM3. (Copying is only possible between products with the same －
model No.)
F.99 Reset function Return the settings to the factory settings. －
◼ Setting monitor mode

Setting monitor The contents set in the SET mode can be checked.
－
function (The contents cannot be edited)
Able to verify the zero adjusted value, flow rate range, gas type,
flow rate reference, flow direction, switch output type, and number
Model display function －
of switch output points.
(Current setting values instead of factory setting are displayed)
◼ Effects of setting values

When settings are done to change a flow rate value (Table 1), the setting of function to refer to the flow
rate value (Table 2) is cleared.
When conducting settings, perform the settings that change a flow rate value first, and then the setting of
function that the flow rate refers.
Also, it is cleared when confirmed without changing the settings.
When verifying the setting value, use the setting monitor mode.
Table 1 Settings that change a flow rate value

No. Item
Flow rate direction
F.06
setting
Reference state
F.08
setting
F.09 Unit setting
F.13 Gas type switching
Table 2 Function that refers a flow rate value

No. Item Setting after clearing
Selection of CH1 No switch output
F.01
operation
Selection of CH2 No switch output
F.02
operation
Peak value bottom value: Reset
－ Peak hold function
Measurement state: Stop
Integrated flow Integrated flow rate value: Reset
－
rate function Measurement state: Stop
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3.1.3 How to operate

◼ Normal operation (RUN mode） * When no instruction is provided on how to press a key,
it means to press the key once.
＜RUN display screen＞
If the key pressed once in the RUN display screen, the user enters to the change screen of RUN mode.
Press the key to switch the mode, and key to confirm.
Press and hold

<RUN display screen> for one second
or more
CH1 lower limit set value display CH1 upper limit set value display
<Instantaneous flow rate display> Alternate
<Instantaneous flow rate display>
Press and hold
for one second
or more
Alternate
<Peak bottom display> While pressing, the setting is alternately displayed.

Peak value When you release your hand, it returns to <RUN display screen>.
<Peak hold display>
Bottom value
Press and hold

for one second Start measurement
Status display (Start/Stop) Press and hold

for one second
Alternate Stop measurement
display
Return to
<RUN display screen>
Instantaneous flow rate (Simple)
Reset
Measuring
Stopping
<CO2 discharge amount display> *1 <CO2 discharge amount display>
Press and hold

for one second
Start integration
<Integrated flow rate display>

Measuring Press and hold
for one second
<Integrated flow rate display> Stop integration
Return to
Stopping
Reset
*When CH2 is “Integration reset”,

it can be reset with external input.
*1 When the gas type is besides “Air”, it does not change to CO2 discharge amount display.
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● Instantaneous flow rate display
While pushing and

Instantaneous flow rate display holding for one CH1 data display
second or more
<Sub: Flow direction> Alternate
<Sub: Reference state>

While pushing and
holding for one CH2 data display
second or more CH2 lower limit set value display CH2 upper limit set value display
Alternate
<Sub: Gas type>
While pressing the setting is displayed alternately. When the

<Sub: Numbering> key is released, it returns to <Instantaneous flow rate display>.
<At auto-reference>
1 second 3 seconds 5 seconds

or more or more or more
To <RUN Display selection screen> To <SET mode> To <Setting monitor mode> To < Maintenance mode>
・The display update cycle of instantaneous flow rate value can be changed with "F.10: Display cycle setting".
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CH1 and CH2 data display
<At Window operation (1) setting>

Lower limit set value Upper limit set value
Alternate
<At integrated output (1) setting>

Integrated set value
Alternate
<At integrated pulse setting>
<At integrated clear setting> (CH2 only)
<At auto-reference external input setting> (when key is pushed)

Lower limit loading value Upper limit loading value
<At auto-reference external input setting> (when key is pushed)
・CH1 settings are displayed with the key, and CH2 settings are displayed with the key.
・When the CH1 settings are displayed, “1” output display turns ON, and for the CH2 settings, “2” output display turns ON.
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● Peak hold function
Able to know the maximum value and minimum value indicated by the flow rate value.
There are the measurement/stop states, and values are acquired at the measurement state.
Also, press the 1 button to switch to the instantaneous flow rate display.
Instantaneous flow rate display
Peak bottom display (Simple)
<Peak value>
<Measuring>
2 seconds later
<Bottom value> One

second <Stopping>
later
2 seconds later
State display
<Measuring> <Stopping>
Press and hold Press and hold

for one second for one second
<Start measurement> <Stop measurement> <Reset measurement>
1 second or more 3 seconds or more 5 seconds or more
・The peak value, bottom value and state display are switched automatically.
・Immediately after power is turned ON, it is “Stop measurement”. To start measurement, perform “Start measurement”.
・The display update cycle of the peak value and bottom value is one second.
・The display update cycle of instantaneous flow rate display (Simple) can be changed with "F.10: Display cycle setting".
・The instantaneous flow rate display (Simple) blinks while measurement is stopped.
・When settings are done with "F.06: Flow direction setting", "F.08: Reference state setting", "F.09: Unit setting" and "F.13: Gas
type switch function", the peak value and bottom value are reset, and it becomes “Stop measurement”. When conducting
measurement, perform above settings first.
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● CO2 discharge amount display
The compressor’s power consumption is calculated from the integrated flow rate value, and calculate
CO2 discharge amount by multiplying the discharge coefficient of electricity.
By setting the compressor capacity (power, discharge pressure and discharge flow rate) and CO2
conversion coefficient with "F.15: CO2 discharge amount calculation setting" to make the integrated flow
rate in the measurement state, display the CO2 discharge amount.
This setting cannot be used for other gas types than “Air”.
CO2 discharge amount display
<Except for 500 mL/min type, 1000 mL/min type>
<500 mL/min type, 1000 mL/min type>

・Calculation of CO2 discharge amount is conducted only when the gas type is “Air”.
・If a flow direction changes during calculation, a correct calculation cannot be performed.
・CO2 discharge amount is automatically calculated from the integrated flow rate value. Please note that calculation of CO 2
discharge amount is also stopped/reset if the integrated flow rate is stopped/reset.
・Depending on the flow rate range, the unit of CO2 discharge amount display differs.
In case of 500 mL/min and 1000 mL/min range: “g”
For other ranges: “kg”
・The maximum value of CO2 discharge amount display is “99.99” (kg or g) regardless of a flow rate range.
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● Integrated flow rate display Press and hold

for one second
Start integration
Integrated flow rate display
<Measuring>
Press and hold
for one second
Stop integration
<Stopping>
Reset

・Immediately after the power is turned ON, it is “Measurement” state.

・The integrated flow rate value blinks during “Stop measurement”.
・The display update cycle of integrated flow rate value can be changed with "F.10: Display cycle setting".
・When CH2 is set to “Integration Reset”, the integrated flow rate value is reset at external input ON (40 msec Save). In case of
integration reset through external input, it becomes in the “measurement” state after reset, and then measurement of
integrated flow rate starts.
・In case of integration reset by manual operation, if it is “Stop measurement”, it remains as “Stop measurement”, and if it is
“Measuring”, it remains as “Measuring”.
・When settings are done with "F.06: Flow direction setting", "F.08: Reference state setting", "F.09: Unit setting" and "F.13: Gas
type switch function", the integrated flow rate value is reset, and it becomes “Stop measurement”. When conducting
measurement, perform above settings first.
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◼ SET mode
< RUN display screen > When pressing and holding the key for 2 seconds (keep pressing) in the RUN display state,
the user enters to the SET mode.
Press the key to switch the mode, and press the key to confirm.
In each setting screen, press the + key to return to the SET mode selection screen.
By pressing the + key in the SET mode selection screen, the user returns to the RUN display.
Press and hold
for 2 seconds If no key operation is performed for approx. one minute in the SET mode, it returns to the RUN display.
<Unit setting (Overseas model only)>
<SET mode selection screen>
F.09:
<CH1 operation> Unit 2 setting screen
F.01: To Page 97
CH1 Operation setting screen
To Page 89
<Display cycle setting>
F.10:
Display cycle setting screen
<CH2 operation>
To Page 98
F.02:
CH2 Operation setting screen
To Page 90 <Analog output response time setting>
F.11: Analog output response
<Integration setting> time setting screen
To Page 98
F.03:
Integration setting screen
To Page 94 <Numbering setting>

F.12: Numbering
setting screen
<Sub-screen display setting>
To Page 98
F.04:
Sub-screen setting screen
To Page 94 <Gas type change setting>
F.13: Gas type change
selection screen
<Display color setting>
To Page 99
F.05:
Display color setting screen
To Page 94 <ECO mode setting＞

F.14:
Eco-mode setting screen
<Flow direction setting (Bi-direction type only)>
To Page 99
F.06: Flow rate direction
selection setting screen
To Page 95 <CO2 discharge amount setting>
F.15: CO2 discharge

amount setting screen
＜Display reverse setting＞
To Page 100
F.07: Display reverse
setting screen <Lock setting>
To Page 96
F.16:
Lock setting screen
<Reference state setting> To Page 101
F.08:
Unit 1 setting screen <Peak hold setting>
To Page 96
F.17:
Peak hold setting screen
To Page 102
<CH1 operation>Return to setting
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● F.01: CH1 Operation setting

Select a function of CH1.
Able to set the switch output operation and integrated pulse.
<Setting selection screen>
Not used
Press and Press and Press and

hold for one hold for one hold for one
second second second
Window operation (1) ON value setting OFF value setting Hysteresis setting
*1 *1
hold for one
Switch output second
hold for one
second
hold for one
second
Window operation (2) OFF value setting ON value setting Hysteresis setting
Press and
*1 *1
Press and
hold for one hold for one
second second
Hysteresis operation (1) ON value setting OFF value setting
Press and Press and

second second
Hysteresis operation (2) OFF value setting ON value setting
Press and
hold for one
On value setting second
Integrated output (1) 7 digits
Press and
hold for one
OFF value setting second
Return to SET mode

Shift of digits selection screen
Integrated pulse
Return to SET mode
selection screen UP
DOWN
* Return with ＋ or move to the RUN mode with no operation for approx. 1 minute.
* When settings are done with "F.06: Flow direction setting", "F.08: Reference state setting", "F.09: Unit
setting" and "F.13: Gas type switch function", the switch setting is reset. When conducting switch
setting, perform above settings first.
*1 When a hysteresis setting value is larger than the upper and lower limit value width of the threshold,
the switch does not operate correctly.
Make sure to set it as:
(Upper limit – lower limit) > 2 x Hys.
In factory setting, the hysteresis is set to "1 P" = "1%".
In the range that a setting cannot be performed, the main screen lights up in red.
When trying to set within the range that cannot be set, the main screen blinks and the user cannot
move to the next operation.
Make sure to set within the range that setting can be performed.
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● F.02: CH2 operation setting

Selects a function of CH2. Select/set if CH2 is used as the switch output or external input (integrated value reset and
auto-reference).
<Setting selection screen> * When settings are done with "F.06: Flow direction setting", "F.08: Reference state setting",
Not used "F.09: Unit setting" and "F.13: Gas type switch function", the switch setting is reset. When
conducting switch setting, perform above settings first.
hold for one hold for one hold for one
second second second
Window operation (1) ON value setting OFF value setting Hysteresis setting
Switch output
*1 *1
Press and Press and
hold for one Press and hold for one
second hold for one second
second
Window operation (2) OFF value setting ON value setting Hysteresis setting
*1 *1
Press and
Press and hold for one
hold for one second
second
Hysteresis operation (1) ON value setting OFF value setting
Press and Press and

second second
Hysteresis operation (2) OFF value setting ON value setting
Press and
hold for one
ON value setting second
Press and
hold for one
OFF value setting second
Shift of digits Return to SET mode

Integrated pulse UP selection display
Return to SET mode
selection display DOWN
Integrated value reset Select input method Selection of number of inputs Selection of operating waveform
External input 1-point input Input value or more ON

*2
Auto reference
Input value or more OFF
*3
Bottom input 2-point input Hysteresis setting
Press and
hold for
one
*1: If the set value of hysteresis is larger than the width of the upper second
and lower limits of the threshold value, the switch will not operate
properly.
Selection of operating waveform
Please set:
(Upper limit - lower limit) > 2 × Hys 2-point more than 2-point more than
average ON average OFF
At factory setting, the hysteresis is set to "1 P" = (1%F.S.).
In the range that a setting cannot be performed, the main screen
lights up in red. Return to the
When trying to set within the range that cannot be set, the main instantaneous flow
screen blinks and the user cannot move to the next operation. rate screen in the
2-point interval OFF 2-point interval ON
Make sure to set within the range that setting can be performed. auto-reference mode.
*2 When the external output is ON (40 msec Save), an integrated

value is cleared.
Also, it becomes “Integration START” after clearing.
*3 For details on auto-reference function, refer to “Supplement (2):

Auto-reference function”.
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Supplement [1]: Switch output function

Depending on the application, you can choose from 8 types of switch operation.
Operation pattern LCD display
No. Description Operation waveform
name (Sub-display)
1 Switch operation OFF Switch operation is the ON
OFF state.
OFF
Flow rate
2 Window operation (1) The switch output turns ON
(Inside range ON) ON within the specified
OFF
Note1, 2, 3 range.
Lower limit value Upper limit value Flow rate
3 Window operation (2) The switch output turns ON

(Outside range ON) ON outside the specified
Note1, 2, 3 range. OFF
4 Hysteresis operation Set the hysteresis, and ON

(1) the switch output turns
(Flow rate small side OFF at the specified flow OFF
ON) rate or more.
Note1, 3
5 Hysteresis operation Set the hysteresis, and ON
(2) the switch output turns
(Flow rate large side ON at the specified flow OFF
ON) rate or more. Lower limit value Upper limit value Flow rate
Note1, 3
6 Integrated output (1) The switch turns ON at
ON
(Setting value or more the set integrated flow or
ON) more. OFF
Note4 Integrated set point value Integrated flow rate
7 Integrated output (2) The switch turns OFF at ON

(Setting value or more the set integrated flow or
OFF) more. OFF
Note4 Integrated set point value Integrated flow rate
8 Integrated pulse output The integrated pulse is Approx.

ON 40 msec
Note5, 6 output.
OFF
Pulse output rate Note 5

Note1: The range of 0 to 100% of the full scale flow rate is the settable range.
Note2: Hysteresis can be set for the upper and lower limits of window operation (1) or (2). Hysteresis can be set from 1 to
8% F.S.
Note3: When setting is done to be Lower setting value > Upper limit setting value, it is set by replacing the upper limit and
lower limit value automatically.
Note4: The displayable range of integrated flow rate is the settable range.
Note5: For pulse output rate, refer to “Pulse output rate” under "1.2 Specifications".
Note6: At integrated pulse output, the output display (OUT1, 2) also flashes according to the pulse output.
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Supplement (2): Auto-reference function

The auto-reference function loads the measuring flow rate and make it a threshold value of the switch
output.
Loading is done with a button operation or the external input of CH2, and it is outputs from CH1.
When a workpiece changes and the threshold value of the switch changes, a threshold value can be
changed automatically.
Loading method with the button

・1-point input: Press and hold the key for 2 seconds and load the instantaneous flow rate at the time.
・2-point input: Press and hold the key for 2 seconds and load the instantaneous flow rate at the time
as the upper limit value.
Press and hold the key for 2 seconds to load the instantaneous flow rate at the time as
the lower limit value.
Loading method with the external input

・1-point input: When the external output is ON (40 msec Save), load the instantaneous flow rate at the
time.
・2-point input: When the external output is ON (40 msec Save), load the instantaneous flow rate at the
time. The size relationship of the latest two points is compared, and the upper limit value
and lower limit value are automatically judged.
(Example)
Loading value Lower limit value Upper limit value
(mL/min) (mL/min) (mL/min)
Initial value 0 0
1st 123 0 123
2nd 234 123 234
3rd 45 45 234
4th 345 45 345
5th 456 345 456
6th -50 -50 456
7th -211 -211 -50
8th -100 -211 -100
9th -300 -300 -100 The initial value is zero both in the upper and
10th 0 -300 0 lower limits.
・While setting "F.02: CH2 operation setting" to auto-reference, "F.01: CH1 Operation setting" becomes invalid
and cannot be operated.
When setting "F.01: CH1 Operation setting", set "F.02: CH2 operation setting" to other than auto-reference.
・Loading with the button is possible only during instantaneous flow rate display. Loading with the external input
is possible during RUN display.
・The values loaded with auto-reference are cleared when the power is turned OFF. Perform setting again.
・After loading, loaded values are displayed.
・The values loaded with auto-reference can be checked also with the setting monitor mode.
・In case of external input, ON/OFF pulse is output from CH1 as the loading verification at the time of loading.
・While pressing and holding the key for one second, the loaded values can be displayed (at the loading time
with the external input only).
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Auto-reference function
No. of
Operation
input Description Operation waveform LCD display
pattern name
points
Loaded value or Turn the loaded value or above
above ON ON. ON
(Threshold: Loaded value)
OFF
Loaded value Flow rate

1 point
(1-P) Input value or Turn the loaded value or above
above OFF OFF. ON
(Threshold: Loaded value) OFF
Loaded value Flow rate
Central value or Turn the central value of 2

above of 2 points points or above ON. ON
ON
OFF
(Threshold:
(loaded 1 + loaded 2)/2) Loaded Loaded Flow
value value rate
Central value or Turn the central value of 2
above of 2 points points or above OFF. ON
OFF OFF
(Threshold:
(loaded 1 + loaded 2)/2) Loaded Loaded Flow
value value rate
2 points
Between 2 Turn between the 2 points ON.
(2-P)
points ON (Threshold 1: Loaded value 1) ON
(Threshold 2: Loaded value 2)
OFF
Loaded Loaded Flow

value value rate
Between 2 Turn between the 2 points

points OFF OFF. ON
(Threshold 1: Loaded value 1)
(Threshold 2: Loaded value 2) OFF
Loaded Loaded Flow

value value rate
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● F.03: Integration setting

The user can select whether to acquire an integrated flow rate value consecutively or perform time
setting. Also, the user can select to save an integrated flow rate value.
Measurement method setting Data saving setting
Consecutive Do not save
Return to SET
mode selection
display
Time setting Input time Save
Press and hold

for 1 second
Shift of digits
UP
DOWN
・Time setting is a function that the state automatically becomes “Integration STOP” when “Integration START” state continues
for a set time.
The passing time is reset once switched from “Integration START” -> “Integration STOP”, and the power is turned ON again.
From the moment it becomes “Integration START” again, the setting time and integrated flow rate value are acquired
(Immediately after launched when the power is turned ON again).
・For saving of the integrated flow rate value, the moment the setting is confirmed while data saving is turned ON is regarded
as the first saving time, and data are saved every 5 minutes afterwards. When the power is turned ON again, the time is
reset, and launched time is regarded as the first time and data are saved every 5 minutes afterwards.
・When integration reset is performed, saving data are also reset.
・Saving of the integrated flow rate value is performed even in the “Integration STOP” state.
● F.04: Sub-screen display setting

Set the display contents of the sub-screen.
"Flow direction", "Reference state", "Gas type" and "Numbering" display can be switched.
Flow direction Reference condition Gas type Numbering
Return to SET
mode selection
screen
・The sub-screen setting is applied only at instantaneous flow rate display.

・When "F.02: CH2 operation setting" is set to “Auto-reference setting”, the sub-screen is displayed as “A.rEF”
regardless the setting of "F.04: Sub-screen display setting".
● F.05: Display color setting

Set the display color. (Red/ Green)
During the normal display, the display color when the switch output is ON can be set.
ON : Red / ON : Green /
OFF : Green OFF : Red Always red Always green
Return to SET
mode selection
screen
・The display color setting can be applied only during the RUN mode. It is always green during the SET mode,
setting monitor mode, and maintenance mode.
・When set to “ON Red / OFF Green” and “ON Green / OFF Red”, the screen color changes when the switch
output is ON.
The main screen color changes when CH1 is ON, and the sub-screen color changes when CH2 is ON.
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● F.06: Flow direction setting

(Bi-direction type only. Uni-direction type is not displayed.)
Select the flow direction. Bi-direction, uni-direction, and uni-reverse direction can be selected.
Bi-direction Forward direction Reverse direction
Return to SET
mode selection
screen
・When a flow direction is set, the setting values below are cleared. Always set a flow direction first.
・Switch setting
・Peak bottom value
・Integrated flow rate value
For detail, refer to "3.1.2 Explanation of functions".
List of flow direction

Flow direction LCD display Analog output characteristics
<Bi-direction> Minus (-) is shown for the reverse
(V) (mA)
direction.
5 20
Analog output
3 12
1 4
According to the flow direction, -F.S. flow rate 0 F.S. flow rate
the arrow switches. （L/min）
<Uni-direction (forward direction)> (V) (mA)
5 20
Analog output
3 12
1 4
0 F.S. flow rate

(L/min)
<Uni-direction (reverse direction)> (V) (mA)

5 20
Analog output
3 12
1 4
0 F.S. flow rate

(L/min)
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● F.07: Display reverse setting

The top and bottom of LCD display can be reversed.
Standard Reversed
Return to SET
mode selection
screen
・Even when the display is reversed, the key operation remains the same. If operation is performed with the
key in the standard display, it is also performed with the key in the reverse display. Please note that key
operations do not get reversed.
● F.08: Reference state setting

Flow rate unit (standard state ANR /reference state NOR) is switched.
・Standard state ANR: 20°C, 1 atm and humidity 65%RH
(Gas type except for air: 0°C, 1 atm and humidity 0%RH)
・Reference state NOR: 0°C, 1 atm and humidity 0%RH
Standard state Reference state

(ANR) (NOR)
Return to SET
mode selection
screen
・When a flow rate unit is set, the setting values below are cleared. Always set a flow rate unit first.
・Switch setting
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● F.09: Unit setting

(For overseas model only – Unit specification “2”)
The unit can be set from “L/min” and “cf/h”.
(For 1000 L/min type, “cf/min” can be set instead of “cf/h”)
L/min cf/h cf/min
Or
Return to SET
mode selection
screen
・When a unit is set, the setting values below are cleared. Always set a unit first.
・Switch setting
・When it is changed to “cf/h” in the 500 mL/min type, for the display purpose, the minus “-“ display is not used
and “a dot on the upper left” is used instead.
Minus display
Full scale flow rate after changing the unit

Model No. Full scale flow rate
［B］ L/min (mL/min) cf/h (cf/min)
005 500 mL/min 1.059 cf/h
010 1000 mL/min 2.12 cf/h
020 2.00 L/min 4.24 cf/h
050 5.00 L/min 10.59 cf/h
100 10.00 L/min 21.2 cf/h
200 20.0 L/min 42.4 cf/h
500 50.0 L/min 105.9 cf/h
101 100.0 L/min 212 cf/h
201 200 L/min 424 cf/h
501 500 L/min 1059 cf/h
102 1000 L/min 3.53 cf/min
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● F.10: Display cycle setting

The display cycle of the digital display can be changed in 3 levels from 0.25 s to 1 s. If the display flicks,
it can be improved by setting the long display update cycle.
0.25sec 0.5sec 1sec

Return to SET
mode selection
screen
・The applicable range of display cycle setting is the instantaneous flow rate display, integrated flow rate display,
and the instantaneous flow rate display during the peak hold function.
Please note that the setting is not applied to other displays.
● F.11: Analog output response time setting

Set the response time. It can be changed in 7 levels from 0.05 sec to 1.50 sec.
It prevents chattering and error operation due to sudden flow rate change and noise.
0.05sec 0.08sec 0.12sec 0.20sec
Return to SET
mode selection
0.40sec 0.80sec 1.50sec screen
・In addition to analog output, the setting is applied also on the display and switch output.
・The response time is an estimate time. The actual response speed changes due to piping.
● F.12: Numbering setting

Able to assign any unique number to each product.
Press and
Shift of digits hold for 1
second
UP
Return to SET
DOWN mode selection
screen
・Can be set between 0 to 9999.

・The numbering setting is not copied with the setting copy function.
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● F.13: Gas type switch function

Able to switch a gas type to measure.
This function can be used with the flow rate range: 500 mL/min to 200 L/min type.
Oxygen type has no gas type switching.
Air
Return to SET
mode selection
screen
Argon
Return to SET
mode selection
screen
Type A
Return to SET
mode selection
screen
Carbon dioxide gas
Type B
Return to SET
mode selection
screen
Mixed gas
Return to SET
mode selection
screen
・Gas ratio of the mixed gas is Ar 80% + CO2 20%.

・When CO2 is selected, select the output type from type A or type B.
Type A: Voltage output 1-3 V (Uni-direction type) 2-4 V (Bi-direction type)
Current output 4-12 mA (Uni-direction type) 8-16 mA (Bi-direction type)
Type B: Voltage output 1-5 V, current output 4-20 mA
● F.14: ECO mode setting

Can select the ECO mode.
When the ECO mode is ON, the mode switches to the ECO mode if there was no key operation approx.
1 minute, the backlight on the display turns OFF, and only the unit display “L” is lit. The power current
consumption can be reduced.
Press any key to turn them ON again.
ECO mode ON ECO mode OFF
Return to SET
mode selection
screen
・The restoration operation responds when a key is pressed within one second. Please note it does not respond
with pressing and holding.
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● F.15: CO2 discharge amount calculation setting

Perform settings to calculate the CO2 discharge amount.
The input values are the compressor’s power, discharge pressure, discharge flow rate, and conversion
coefficient (kg (CO2)/kWh).
Set the compressor’s power, discharge pressure, discharge flow rate, and CO2 conversion coefficient of
the compressor being used.
This setting cannot be used for other gas types than “Air”.
For the calculation result display of CO2 discharge amount, refer to "CO2 discharge amount display".
Press and
Press and Press and Press and hold for one
hold for one Compressor's hold for one Compressor's hold for one CO2 conversion second
Compressor's second discharge second flow rate input coefficient input
second
power input (kW) pressure input (MPa) (L/min) (kg(CO2)/kwh) Return to SET
mode selection
screen
Shift of digits
UP
DOWN
Integrated flow rate (L)

× Compressor’s power (kW)
L (Discharge pressure(MPa) + 0.1013)
Compressor flow rate ( )×
min 0.1013
÷ 60 × CO2 conversion coefficient (kg(CO2 )⁄kWh)
Reference: Coefficient of Chubu Electric Power is 0.457kg (CO2)/kWh (2018FY)
・Calculation of CO2 discharge amount is performed only when the gas type is “Air”.
・If the flow direction changes during calculation, correct calculation cannot be performed.
・CO2 conversion coefficient differs depending on electric power companies.
・When the unit is “cf/h (cf/min)”, the compressor flow rate is set with the unit “cf/min”.
In addition, the integrated flow rate value is calculated with “cf”.
・CO2 discharge amount is calculated automatically from the integrated flow rate value. Please note if the
integrated flow rate is stopped/reset, the CO2 discharge amount calculation also stops/resets.
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● F.16: Lock setting

This setting is for the lock. Error operation can be prevented by making key operation invalid.
There are two types of lock method to select: Key lock method and PIN number method, and each has
different releasing method.
In case of the PIN number method, a PIN code is set at lock setting.
Key lock OFF

Return to SET mode
selection screen
Key lock method

Return to SET mode
Press and hold selection screen
for one second
or more Shift of digits
PIN number method Pin code setting
Return to SET mode UP
selection screen
DOWN
・PIN code can be set between 0 to 9999.

・After releasing the lock, it is locked again if no key operation is performed for approx. 10 seconds. To release
the lock completely, set to “Key lock OFF”.
・While locked, it does not switch to the SET mode and maintenance mode, and the user can use only the RUN
mode and setting monitor mode.
Also, it is possible to verify the display in the RUN mode, and the integration start/stop/reset cannot be
conducted (Display change from instantaneous flow rate display -> integrated flow rate display is possible).
Lock releasing method (Key lock method)

“Loc” is displayed when key operation is performed and operation cannot be conducted.
While “Loc” is displayed, press all keys to release the key lock.
After releasing the key lock, it is locked again if no operation is performed for approx. 10 seconds.
Press and hold
RUN mode
for 5 seconds Key locked state Key lock released
or or
・Key lock releasing operation is accepted only while “Loc” is displayed.

・The display time of “Loc” and “unL” is approx. one second.
・Set to “Key lock OFF” to completely release the lock including the re-locking.
Lock releasing method (PIN number method)

When any key is pressed, the PIN code input screen is displayed.
Enter the PIN code determined during setting to release the lock.
After the lock is released, it is locked again if no operation is performed for approx. 10 seconds.
Press and hold Press and hold
for 5 seconds Pin code input for one second Lock releasing
RUN mode
or or Success
Failed to release
Shift of digits
Fail
UP
DOWN
・Set to “Key lock OFF” to release the lock completely including the re-locking.
・If you forgot your PIN code, contact the sales dealer.
・The PIN code is not copied with the setting copy function.
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● F.17: Peak hold setting
Able to select to acquire peak hold values consecutively or specify time. Also, it can be selected if the
peak hold value should be saved.
Measurement method setting Data saving setting

Continuous Not saved
Return to SET
Press and mode selection
hold for one screen
second
Time setting Enter time Save
Shift of digits
UP
DOWN
・Time setting is a function that it automatically becomes “Peak hold STOP” from the “Peak hold START” state
after a set time duration.
If it switches from “Peak Hold START” -> “Peak hold STOP” and the power is re-applied, the time duration is
reset. From the time it becomes “Peak hold START” again, the set time and peak bottom values are acquired.
(In case of power re-application, from immediately after it was launched)
・For saving the peak bottom value, when the setting is confirmed while data saving is ON, the first saving is
performed, and then data are saved in 5 minutes interval afterwards. When the power is re-applied, the time is
reset, and the first time is when it is launched, and then data are saved in 5 minutes interval.
・When a peak hold reset is conducted, the saved data are also reset.
・Saving of the peak bottom values is also conducted during the “Peak hold STOP” state.
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◼ Maintenance mode
Press and Press and

hold for 2 hold for 5
seconds seconds
<Function selection screen>

While pressing
Forced output for one second
or more
While pressing
for one second
or more
While pressing for

one second or more
Zero adjust execution
confirmation
Zero adjust Not execute
Press and hold for

5 seconds
(Load offset values) Offset value zero One
Execute Offset value display confirmation second
Success later
One
Zero adjust error second
Fail later
Flow rate ±10% F.S. or more

Copy function Waiting to send
Sending side Sending success After 5
seconds
With copy
function only
Waiting to receive
Receiving side Receiving success After 5
Success seconds
Setting copy error After 5

Fail seconds
Reset execution confirmation
Reset Not execute
Press and hold

for 5 seconds
Execute Reset completion
After 5 seconds
*1 Pressing + on all screens except <Function selection screen> returns to <Function selection screen>.
(However, this operation is not accepted during copying)
*2 Pressing + on all screens of <Function selection screen> returns to <RUN display screen>.
*3 Resetting will restore the factory default settings.
*4 When approx. one minute passes without operation, the screen returns to <RUN display screen>.
*5 In case of model number without copy function, selection screen of F.93 (copy function) is not displayed.
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● F.91: Forced output function
The switch output is forced to turn ON, and used for wiring connections and initial operation verification
of input devices.
While pressing and
holding for one
second or more <CH1 output>
While pressing and

holding for one
second or more
<Forced output> <CH2 output>
While pressing and

holding for one
second or more
<CH1,2 output>
・The main screen flashes during CH1 output, and sub-screen flashes during CH2 output.
・In case of the model number with the copy function (Ⓖ Output specification “A,C,E,G”) or CH2 setting is
“Integration reset” and “Auto-reference”, “CH2” in the sub-screen is not displayed and output cannot be
conducted.
・The display color follows "F.05: Display color setting".
・To prevent error operation, output is made by pressing and holding for one second or more.
● F.92: Zero adjust function
Correct the deviation of zero point (Range: Within ±10%F.S.)

Zero adjust execution confirmation
<Zero adjust> Not execute
Press and hold for

5 seconds
(Load offset value)
Offset value zero One
Execute Offset value display confirmation second
Success later
One
Zero adjust error second
Fail later
Offset flow rate±10%F.S. or more
・Make sure to set the flow rate to zero, and then load the offset value.
・When zero adjust is successful, after the screen is displayed that the offset value is zero, it returns to “F.92”
display.
・When the offset flow rate is ±10%F.S. or more, “E02” is displayed and the zero adjust fails.
・The loaded offset value can be verified with "Model display" of the setting monitor mode.
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● F.93: Copy function
Between two FSM3s, operations and setting values can be easily copied.
(Copying is possible between the products of the identical model number)
Waiting to send
<Copy function> Sending side Sending success After
5 seconds
Waiting to receive
Receiving side Receiving success After
Success 5 seconds
Setting copy error After

Fail 5 seconds
Copy procedure
(1) Prepare a copy source FSM3 (master) and copy destination FSM3 (slave).
(2) Referring to "2.4.3 Copying setting values", perform wiring.
(3) Enter “F.93”, and match the master side and slave side to the display by
operating the key and key.
(4) Press the slave side first, and then press the master side . It becomes the waiting to
receive/send state.
(5) When copying succeeds on the slave side, is displayed and it fails, is
displayed.
is displayed on the master side regardless of success/failure.
・The model numbers the copy function can be used are Ⓖ output specification “A,C,E,G”.
・The copy function copy the settings of F.01 to F.17 of the SET mode.
However, "F.12: Numbering setting" and "F.16: Lock setting" are not copied.
・In step (4), make sure to operate from the slave side first. If operation is done from the master side, the copy
signal cannot be received causing failure.
・Conditions for copy failure are the following two reasons.
・The model number between the master and slave is different.
・The slave side does not receive the copy signal in waiting to receive state, and it passes 10 seconds.
● F.99: Reset function

Returns to the factory setting state.
Reset execution confirmation
<Reset> Not execute
Press and hold

for 5 seconds
Execute Reset completion After
5 seconds
・For the factory setting values, refer to "3.1.2 Explanation of functions".
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◼ Setting monitor mode

< RUN display screen >
In the instantaneous flow rate display state, if you press and hold key for 3 seconds (keep
pressing), it enters into the setting monitor mode.
Press the key to enter the selection screen, switch to the function you want to check with
the key, press the key and check the contents.
Press and Press and hold
for 3 seconds It returns to the RUN display screen after 30 seconds have elapsed without operation.
hold for 2
seconds
Every time the key is

pressed, the setting contents
<Setting monitor mode selection screen> are displayed sequentially.
<Display cycle setting>
<CH1 operation setting display> F10:
F.01: Display cycle setting
CH1 operation setting confirmation
confirmation
<Analog output response time setting display>

<CH2 operation setting display (no copying function only)> F11: Analog output
F.02: Response time setting
CH2 operation setting confirmation
confirmation
<Numbering setting display>

<Integration setting display> F12: Numbering
F.03: setting
Integration setting confirmation
confirmation
<Gas type switching function display>

<Sub-screen setting display> F13: Gas type
F.04: changing setting
Sub-screen setting confirmation
confirmation
<Eco-mode setting display>

<Display color setting display> F14:
F.05: Eco-mode setting
Display color confirmation
confirmation
<CO2 discharge amount calculation setting display>

<Flow rate direction selection display (bi-direction type only)> F15: CO2 discharge
amount setting
F.06: Flow rate direction
confirmation
selection setting
confirmation
<Lock setting>
<Display reverse setting display> F16:
F.07: Lock setting
Display reverse setting confirmation
confirmation
<Peak hold setting display>

<Display reverse setting display> F17: Peak hold
F.08: setting
Unit 1 setting confirmation
confirmation
<Model display>
<Unit setting display> Model
setting
F.09： confirmation
Unit 2 setting
confirmation
Return to <CH1 operation setting display>
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● Model display
A model (the current setting state) can be confirmed.
It shows in the order of “Zero adjust value”, “Flow rate amount range + gas type”, “Flow rate reference
+ flow direction” and “Output specification + No. of output points”.
Flow rate range + Flow rate reference Output specification +
Zero adjust value gas type + flow direction No. of output points
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3.1.4 How to key operate environment-resistant specifications

Environment-resistant specifications can be key operated by opening the protective cover.
Loosen the two cover bolts and open the protective cover as shown in the figure below.
Protective cover
Cover bolts
Excluding key operating, use this product with the protective cover is closed and the cover bolts are
tighten and fixed with the specified torque.
When opening and closing the protective cover, make sure that there is no floating or displacement of
the protective cover and that there is no adhered foreign matter, etc., on the seal surface. Tighten and fix
with the specified torque.
・The protective cover may come off from the main unit, but this is not a malfunction. Please reattach and use.
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3.2 Use method of bar display type (FSM3-B series)

3.2.1 Names of display section
Flow rate bar display

・It turns ON according to the flow rate.
・It flashes at overflow rate.
<Display example> The display is in case of FSM3-B101□□□□□□□.

Flow rate Uni-direction type Bi-direction type
(Forward direction)
(Forward direction)
Blinks at overflow.
*It blinks with
+110%F.S. or more.
(Reverse direction)
(Reverse direction)
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3.3 How to use the IO-Link type (FSM3-C series)

3.3.1 Names of display section
Power lamp (green)
・Lights when power supply is ON.
・Blinks during IO-Link communication.
Status lamp (Green, Orange, Red)
・OFF… Turns OFF when the flow rate is within ±3%.
・Green… Turns ON within the measurement flow rate
range.
・Orange… Overflow rate from 100%F.S. or more to less
than 110%F.S.
・Red… Overflow rate with 110%F.S. or more.
3.3.2 Explanation of functions (IO-Link type)

Instantaneous flow rate
Displays the instantaneous flow rate. -
display
Integrated flow rate
Displays the integration flow counted after indication to start logging. Stop
display
Instantaneous flow rate
Displays the maximum and minimum instantaneous flow rate values
peak value display Stop
by providing instruction to start/stop of logging.
(Peak hold function)
Error display Displays the error details. -
Warning display
Displays the warning details. -
(warning)
Displays the total power ON time from the start. This time is not reset
Power ON time display even if the power turns off. (Also not reset when using the reset -
setting)
The switch output operation function can be set.
Switch output function This function can be used to monitor whether the flow rate is within Not set
the set range or monitor whether it exceeds the set flow rate.
Select the flow rate reference.
Standard state (ANR): Converted into volumetric flow rate at 20°C,
1 atmospheric pressure, relative humidity
65%.
Setting of flow rate
(For gases other than air, it is 20°C, 1 ANR
reference
atmospheric pressure, 0%RH).
Reference state (NOR): Converted into volumetric flow rate at 0°C,
1 atmospheric pressure, relative humidity
0%.
The measured gas can be changed.
Gas type switching Air
(The oxygen type does not have the gas type switching function)
The travel average when measuring can be set.
Changing travel
The average can be set in seven steps from 50 msec to 1500 msec.
average 50 msec
Chattering and mis-operation caused by sudden flow rate changes or
(Response time setting)
noise are prevented.
Parameter Lock can be set, which disables changing the parameters
of the unit. Data Storage Lock can be set, which prohibits uploading
Lock setting Not set
and downloading set values to the master.
(Parameter Lock and Data Storage Lock and be set simultaneously)
Zero adjust function The zero point deviation is corrected. (Within ± 10%) Not set
Uploading set values to the master and downloading set values from
Data storage function -
the master are possible. (Can be copied by the same model No.)
Return to the factory settings. (Cannot reset while parameter lock is
Reset function -
enabled)
Unit identification The model No., serial No., and other information can be checked
-
function over the network.
For details and communication specifications, refer to "1.3 Communication specification"
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3.4 Flow rate logic calculation method

Use for flow rate range selection estimate when using a flow rate
sensor for attaching/detaching of suction nozzle. A flow rate can
⚫ Calculating flow rate from the effective be calculated from the pressure difference and inside/outside of
sectional area the effective sectional area of nozzle (pinhole).
• For P1 ≥ 1.89P2 (sound velocity)

Q = 113.2×S×P1 P2 : Vacuum P1 : Pressurization
• For P1 < 1.89P2 (subsonic velocity)

Q = 226.4×S× P2 (P1-P2)
⚫ Q : Flow rate L/min

⚫ P1 : Primary side absolute pressure MPa P1 : Atmospheric Suction nozzle P2 : Atmospheric
pressure
⚫ P2 : Secondary side absolute pressure MPa pressure
P1 : Pressurization
⚫ S : Effective sectional area of nozzle
(pinhole) mm2
⚫ Calculation example P2 : Atmospheric pressure

Pinhole
The figure below shows the calculated value of flow rate when the nozzle diameter is φ0.1 to 2 and
P1 or P2 is varied.
P1 (MPa) P1 (MPa) P2 (MPa) P2 (MPa) Sound Flow rate calculation value ( /min)
velocity/
Absolute Gauge Absolute Gauge Subsonic φ0.1 φ0.2 φ0.3 φ0.4 φ0.5 φ0.7 φ1 φ1.5 φ2
pressure pressure pressure pressure velocity
0.1013 0 0.0313 -0.07 Sound velocity 0.090 0.360 0.810 1.440 2.250 4.411 9.002 20.254 36.007
0.1013 0 0.0413 -0.06 Sound velocity 0.090 0.360 0.810 1.440 2.250 4.411 9.002 20.254 36.007
0.1013 0 0.0513 -0.05 Sound velocity 0.090 0.360 0.810 1.440 2.250 4.411 9.002 20.254 36.007
Subsonic
0.1013 0 0.0613 0.088 0.352 0.792 1.408 2.200 4.312 8.800 19.801 35.202
Suction
-0.04 velocity
Subsonic
0.1013 0 0.0713 -0.03 velocity 0.082 0.329 0.740 1.315 2.055 4.028 8.220 18.494 32.878
Subsonic
0.1013 0 0.0813 -0.02 velocity 0.072 0.287 0.645 1.147 1.792 3.512 7.166 16.125 28.666
Subsonic
0.1013 0 0.0913 -0.01 velocity
0.054 0.215 0.483 0.859 1.343 2.631 5.370 12.083 21.480
Subsonic
0.1113 0.01 0.1013 0 velocity 0.057 0.226 0.509 0.905 1.414 2.772 5.657 12.727 22.626
Subsonic
0.1213 0.02 0.1013 0 velocity 0.080 0.320 0.720 1.280 2.000 3.920 8.000 17.999 31.998
Subsonic
0.1413 0.04 0.1013 0 velocity 0.113 0.453 1.018 1.810 2.828 5.543 11.313 25.455 45.252
Subsonic
Blow (leakage test)
0.1613 0.06 0.1013 0 velocity 0.139 0.554 1.247 2.217 3.464 6.789 13.856 31.175 55.423
Subsonic
0.1813 0.08 0.1013 0 velocity 0.160 0.640 1.440 2.560 4.000 7.840 15.999 35.998 63.996
Sound
0.2013 0.1 0.1013 0 velocity 0.179 0.716 1.610 2.862 4.472 8.765 17.888 40.248 71.552
Sound
0.3013 0.2 0.1013 0 velocity 0.268 1.071 2.410 4.284 6.694 13.119 26.774 60.242 107.096
Sound
0.4013 0.3 0.1013 0 velocity 0.357 1.426 3.209 5.706 8.915 17.474 35.660 80.236 142.641
Sound
0.5013 0.4 0.1013 0 velocity 0.445 1.782 4.009 7.127 11.137 21.828 44.547 100.230 178.186
Sound
0.6013 0.5 0.1013 0 velocity 0.534 2.137 4.809 8.549 13.358 26.182 53.433 120.224 213.731
(Caution)
･When there is a leakage in piping, the flow rate that actually flows is larger than the calculated value. When selecting a flow
rate, consider the leakage amount in piping.
･When there is a part narrower than the suction nozzle diameter in the middle of piping, the flow rate is squeezed causing it to
be lower than the calculated value.
･The effective sectional area is an estimate. When the nozzle is narrow, the effective sectional area becomes smaller than the
opening area of the nozzle.
･The response speed is determined by internal volume of piping from the flow rate sensor to the suction nozzle (pinhole). When
performing a high speed detection, place the flow rate sensor near the suction nozzle so that the inner volume of piping can be
reduced as much as possible.
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4. TROUBLESHOOTING
4.1 Error code (LCD display type)
Error code Cause Countermeasures
The flow rate exceeds the Reduce the instantaneous flow rate value to
flow rate display range. within the flow rate range.
Check that the flow rate is within the flow range
and turn the power supply ON again.
If it still does not return to normal, the product
Sensor chip is damaged. may be faulty. Please replace the product.
Also, if you feel any abnormality in the product,
please stop using it and contact the nearest
CKD sales office.
The flow rate is below the
Increase the instantaneous flow rate value to
lower limit of the flow rate
within the flow rate range.
display range.
Check that the flow rate is within the flow range
and turn the power supply ON again.
Sensor chip is damaged. may be faulty. Please replace the product.
CKD sales office.
Turn the power supply ON again.
An error occurred during may be faulty. Please replace the product.
CPU processing. Also, if you feel any abnormality in the product,
CKD sales office.
The range at which zero
Make sure to set the flow rate to zero, and then
adjustment is possible is
perform the zero adjustment.
exceeded.
An error occurred during
may be faulty. Please replace the product.
EEPROM reading or
writing.
CKD sales office.
An error occurred during may be faulty. Please replace the product.
memory reading or writing. Also, if you feel any abnormality in the product,
CKD sales office.
Sensor failure has may be faulty. Please replace the product.
occurred. Also, if you feel any abnormality in the product,
CKD sales office.
Setting copy failed. Check the connection and try again.
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Button operations are
Release the lock before operation.
locked.
Enter the set PIN number.
* Be careful not to forget your PIN number.
A pin number is set.
If you have forgotten your PIN code, please
contact your nearest CKD sales office.
Blinking of display The switch output’s Check whether load current exceeds the rating.
(Switch output is overcurrent protection Correctly connect, then turn the power ON
not output) circuit has operated. again.
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4.2 Error code (Bar display type)

The third from left blinks An error occurred Turn the power supply ON again.
during memory reading If it still does not return to normal, the product
or writing. may be faulty. Please replace the product.
CKD sales office.
[Uni-direction] All blink The flow rate exceeds Reduce the instantaneous flow rate value to
the flow rate display within the flow rate range.
range.
[Bi- direction] The right Sensor failure Check that the flow rate is within the flow range
half blinks and turn the power supply ON again.
CKD sales office.
[Uni-direction] The The flow rate is below Increase the instantaneous flow rate value to
leftmost blinks the lower limit of the within the flow rate range.
flow rate display range.
[Bi- direction] The left Sensor failure Check that the flow rate is within the flow range
half blinks and turn the power supply ON again.
CKD sales office.
4.3 Error code (IO-Link type)

Refer to “1.3.6 Diagnosis”.
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4.4 Troubleshooting
Trouble Cause Corrective action
Wrong connection of power source. Connect the rated power supply correctly.
Please press either the MODE key or the + key or - key to
confirm that it will light again. (Do not push the button for a
It is in eco-mode. long time.)
During the Eco-mode, the backlight of the display turns OFF
No flow display unless the button is operated for about 1 minute.
(LCD display type) It may be difficult to see depending
Change the mounting direction and change the viewing angle.
on the angle.
Malfunction caused by noise. Keep the FSM3 main unit and cable away from noise source.
The external wiring is disconnected. Please reconfirm / repair the external wiring.
Output circuit is broken (damage on
Replace FSM3.
the main body)
Replace FSM3.
the main body)
IODD file is not imported to IO-link Download the latest IODD file from the CKD homepage, and
master. Or the IODD file is incorrect. then import that into the IO-Link master.
The flow rate may be out of the display range. Check for any
No flow display errors or warnings. The status is also able to check with the
(IO-Link type) The flow rate is out of the display status lamp on the FSM3. Lights green when the flow rate is
range. within the measurement range, lights orange when the flow
rate is 100% to less than 110%, and lights red when the flow
rate is 110% or more.
When communication is in progress, the power lamp on the
FSM3 is blinking green. If it is lit green, communication is not
No communication. progress, so check if FSM3 is connected to the IO-Link
master. Also, check that the settings required for
communication have been completed.
Wrong connecting line. Please reconfirm the external wiring and rewire.
Check the wiring of the connected device.
[Example]
The connected device and the analog output of FSM3 are
No analog output Analog GND line is not connected.
connected, but GND is not connected.
(LCD display type and
Or the connected device and analog output of FSM3 GND
bar display type)
were not in common GND.
Replace FSM3.
the main body)
Please use the "F.91: Forced output function" and check the
I/O with the connected device. As a result of the I/O check, if
Wrong connecting line.
there is no conduction, check the cable color and correctly
re-wire.
Make sure that it matches the specification of the connected
device.
Output specification does not match.
(For example, it does not operate normally if FSM3 is NPN
(NPN and PNP)
No switch output specification and the input unit of PLC on the connection
(LCD display type) destination is PNP specification.)
Malfunction caused by noise. Keep the main unit and cable away from noise source.
The external wiring is disconnected. I/O with the connected device. As a result of the I/O check, if
there is no conduction, replace the rewiring or wiring.
Output circuit is broken (damage on I/O with the connected device. As a result of the I/O check, if
the main body) there is no problem with wiring and there is no conduction,
replace FSM3.
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Fluid leakage Check piping for leakage.
Foreign objects are in the main body and correct flow rate
Foreign objects are mixed inside the cannot be viewed correctly. Replace FSM3.
main body. When installing the main body, make sure that there is no
(Foreign objects sticking to sensor foreign object in the piping or the port of the main unit, and use
chip.) a filter so that foreign objects do not get mixed in the main
body.
Flow display does not Sensor chip inside the main body is
Replace FSM3.
reach 0. broken.
The zero point is shifted. Fluid outside the specification is Please use with the fluid that this product supports.
(Common to all types) flowing. It cannot be used correctly with fluids outside specifications.
Make sure that the fluid and gas type setting are correct.
Incorrect the gas type setting. If the gas type setting is incorrect, measurement cannot be
performed correctly.
Please adjust the zero point and correct the zero point.
The zero point is shifted.
(Bar display type has no zero adjustment function.)
Please use it after energizing (= warm up) for more than 5
FSM3 lack of electrification
minutes when using. If there is no energization (= warming up)
(insufficient warming up).
for more than 5 minutes, the zero point may be shifted.
Foreign objects are mixed inside the main body and it is not
possible to measure the correct flow rate. Please replace
The flow rate indication
Foreign objects are mixed inside the FSM3. When installing the main body, make sure that there is
does not change from 0.
main body and they are clogged. no foreign object in the piping or the port of the main body, and
(All types)
use a filter so that foreign object does not get mixed in the
main body.
Reduce pulsation by providing a tank etc..
Change the response time. (*1)
The fluid is pulsating.
Change the display cycle. (*2)
The measured flow rate Increase the hysteresis setting. (*1)
is not stable. The power supply voltage is Supply rated voltage.
abnormal.
*1: Excluding bar type. (Insufficient voltage, insufficient
Secure the current capacity of the power supply.
*2: LCD type only. current capacity)
The flow rate is at the boundary of Change the response time. (*1)
display resolution. Change the display cycle. (*2)
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Foreign objects are mixed inside the main body and it is not
Foreign objects are mixed inside the possible to measure the correct flow rate. Please replace
main body. FSM3. When installing the main body, make sure that there is
(Foreign objects sticking to sensor no foreign object in the piping or the port of the main body, and
chip.) use a filter so that foreign object does not get mixed in the
main body.
Malfunction caused by noise. Keep the main unit and cable away from noise source.
Sensor chip inside the main body is
Replace FSM3.
broken.
This product accuracy is ±3% of flow rate range (full scale
flow rate). Measuring small flows with high flow rate range
The flow rate range type being used
type will result in poor accuracy.
is large.
Please reselect to the flow range type corresponding to the
measured flow rate and replace it.
It is considered that the equipment causing the uneven flow is
Flow indicator is wrong,
installed on the primary side of this product. If there is the
Feel it is inaccurate.
uneven flow, it may cause errors, so please provide a straight
(All types) The flow is disturbed, the uneven
pipe part between this product and the primary side
flow is occurring.
equipment.
[Examples of instrument that causing the uneven flow]
Regulator, solenoid valve, flow rate control valve, controller.
Flow rate standard of FSM3 remains at ANR setting, and there
is a difference in measurement when flow rate is set with flow
Difference between ANR and NOR
meter based on NOR.
Change the flow standard of FSM3 to NOR.
Please use it after energizing (= warming up) for more than 5
Insufficient FSM3 warm-up
minutes when using. If there is no energization (= warming up)
(insufficient warming up)
for more than 5 minutes, the zero point may be shifted.
Fluid outside the specification is Please use with the fluid that this product supports.
flowing It cannot be used correctly with fluids outside specifications,
Please check whether the fluid to be used and gas type setting
Incorrect gas type setting are correct.
If cannot be used correctly if the gas type setting is incorrect.
Process data is input to the IO- Link master in an array of
1Byte (8bit). Depending on the IO-Link master, the flow rate
cannot be displayed correctly unless the array of 1Byte (8bit)
is inverted. See the example below.
Process data of FSM3
FSM側プロセスデータの並び
MSB LSB
31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Decimal
10進数
Flow indicator is wrong, 0 0 0 0 0 0 1 1 1 1 1 0 1 0 0 0 1000
Process data is not imported
Feel it is inaccurate. 1Byte(8bit) 1Byte(8bit)
correctly on the IO-link master.
(IO-Link types) Process
マスター側 data
of IO-Link master
プロセスデータの並び
MSB LSB NG
23 22 21 20 19 18 17 16 31 30 29 28 27 26 25 24 Decimal
10進数
1 1 1 0 1 0 0 0 0 0 0 0 0 0 1 1 59395
入れ変えずに
1Byte(8bit) 1Byte(8bit)
左から順に読むと
If the array is not inverted, the wrong flow rate is displayed.

Check your IO-Link master.
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SM-662466-A/6 5. WARRANTY PROVISIONS
5. WARRANTY PROVISIONS
5.1 Warranty conditions
◼ Warranty coverage
If the product specified herein fails for reasons attributable to CKD within the warranty period specified
below, CKD will promptly provide a replacement for the faulty product or a part thereof or repair the faulty
product at one of CKD’s facilities free of charge.
However, following failures are excluded from this warranty:
• Failure caused by handling or use of the product under conditions and in environments not conforming
to those stated in the catalog, the Specifications, or this Instruction Manual.
• Failure caused by incorrect use such as careless handling or improper management.
• Failure not caused by the product.
• Failure caused by use not intended for the product.
• Failure caused by modifications/alterations or repairs not carried out by CKD.
• Failure that could have been avoided if the customer’s machinery or device, into which the product is
incorporated, had functions and structures generally provided in the industry.
• Failure caused by reasons unforeseen at the level of technology available at the time of delivery.
• Failure caused by acts of nature and disasters beyond control of CKD.
The warranty stated herein covers only the delivered product itself. Any loss or damage induced by
failure of the delivered product is excluded from this warranty.
◼ Confirmation of product compatibility

It is the responsibility of the customer to confirm compatibility of the product with any system, machinery,
or device used by the customer.
◼ Others
The terms and conditions of this warranty stipulate basic matters.
When the terms and conditions of the warranty described in individual specification drawings or the
Specifications are different from those of this warranty, the specification drawings or the Specifications
shall have a higher priority.
5.2 Warranty period

The product is warranted for one (1) year from the date of delivery to the location specified by the
customer
118 2022-12-12

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SMALL SIZE FLOW SENSOR

RAPIFLOW® FSM3 Series

・LCD display type

• Read this Instruction Manual before using the product.

Indicates an imminent hazard. Improper handling will cause death or serious

Indicates general precautions and tips on using the product.

Precautions on Product Use

Atmospheric High vacuum Flow rate Flow rate

Precautions regarding used fluid

Pneumatic Air dryer Flow rate sensor

Precautions regarding maintenance

3.1.2 Explanation of functions .............................................................................. 79

1.1.1 LDC display type (FSM3-L Series) Code Content

Compatibility table of port size and clean-room specifications

◼ Stainless steel body type Code Content

FSM3 - L 005 U 2 AA 1 A 1 N - B M R - P80 [A] Display

<Example of model No.> [F] Piping direction

Flow rate range and port size

1/4” Double 1/4” JXR

 :Connection port compatibility  :Needle valve option compatibility

◼ Environment-resistant specifications Code Content

Flow rate range and port size

1.1.2 Bar display (FSM3-B series)

FSM3 - B 005 U 1 BH 1 J 1 N - D H S - P70

 :Port compatibility :EXA connection fitting compatibility

Compatibility table of port size and clean-room specifications

◼ Stainless steel body type

Flow rate range and port size

[E] Port size

1/4” Double 1/4” JXR

■Precautions for model No. selection

Flow rate range and port size

1.1.3 IO-Link (FSM3-C Series)

FSM3 - C 005 U 1 BH 1 L 1 N - G H R - P70

Flow rate range and port size

 :Port size compatibility

Compatibility table of port size and clean-room specifications

◼ Stainless steel body type

[E] Port size

Flow rate range and port size

1/4” Double 1/4” JXR

1.2.1 LCD display type

Air pressure Air dryer Flow rate sensor

The "Copy function" setting is selected at "[G] Output specifications".

◼ Stainless steel body type

Air pressure Air Flow rate sensor

The "Setting copy function" is selected with "[G] Output specifications".

Air pressure Air Flow rate sensor

The "Setting copy function" is selected with "[G] Output specifications".

1.2.2 Bar display type

Air pressure Air dryer Flow rate sensor

◼ Stainless steel body type

Air pressure Air dryer Flow rate sensor

Air pressure Air dryer Flow rate sensor

1.2.3 IO-Link type

Air pressure Air dryer Flow rate sensor

◼ Stainless steel body type

Air pressure Air dryer Flow rate sensor

1.3 Communication specification

1.3.2 On demand data

0x0015 0 Serial- Number **-* *2 R 16 bytes String