VLSI2
VLSI2
VLSI2
Where W and L are width and length of the wire, and tdi and ԑdi representthe thickness
of the dielectric layer and its permittivity.
SiO2 is the dielectric material of choice in integrated circuits. (ԑ = ԑrԑ0; ԑ0 = 8.854 x 10-12
F/m is the permittivity of free space, and ԑr the relative permittivity of the insulating
material).
Fig: The fringing-field capacitance. The model decomposes the capacitance into two contributions: a parallel-
plate capacitance, and a fringing capacitance, modelled by a cylindrical wire with a diameter equal to the
thickness of the wire
Simplified model approximates the capacitance as the sum of two components: a
parallel-plate capacitance determined by the orthogonal field between a wire of width
w and the ground plane, in parallel with the fringing capacitance modeled by a
cylindrical wire with a dimension equal to the interconnect thickness H. The resulting
approximation is simple and works well in practice.
With w=W-H/2, a good approximation for the width of the parallel-plate capacitor.
Fig: Capacitance of interconnect wire as a function of (W/tdi), including fringing-field effects. Two values of
H/tdiare considered. Silicon-dioxide with ԑr = 3.9 is used asdielectric. (tdi is the dielectric thickness)
For larger values of (W/H) the total capacitance approaches the parallel-plate model.
For (W/H) smaller than 1.5, the fringing component becomes the dominant
component. The fringing capacitance can increase the overall capacitance by a factor
of more than 10 for small line widths.
Total capacitance levels off to a constant value of approximately 1 pF/cm for line
widths smaller than the insulator thickness. In other words, the capacitance is no
longer a function of the width.
It is a good model for semiconductor interconnections when the number of
interconnect layers was restricted to 1 or 2.
Today’s processes offer many layers of interconnect, which are packed quite densely.
This is illustrated in Figure below
Fig: Interconnect capacitance as a function of design rules. It consists of a capacitance to ground and an
inter-wire capacitance
Interconnect Capacitance Design Data
Table: Wire area and fringe capacitance values for typical 0.25 mm CMOS process. Thetable rows
represent the top plate of the capacitor, the columns the bottom plate. Thearea capacitances are
expressed in F/µm2, while the fringe capacitances (given in the shaded rows) are in F/µm.
Resistance
The resistance of a wire is directly proportional to its length L and inversely
proportional to its cross-section A. The resistance R of a rectangular conductor can be
expressed as
Where the constant ρ is the resistivity of the material (in W-m).
Since H is a constant for a given technology
The advantage of the silicided gate is a reduced gate resistance. Similarly, silicided
source and drainregions reduce the source and drain resistance of the device.
Transitions between routing layers add extra resistance to a wire, called the
contactresistance. The preferred routing strategy is thus to keep signal wires on a
single layerwhenever possible and to avoid excess contacts or via’s.
It is possible to reduce the contactresistance by making the contact holes larger.
Current tends to concentratearound the perimeter in a larger contact hole. This effect,
called current crowding, puts apractical upper limit on the size of thecontact.
The following contact resistances (for minimum-size contacts) are typical for a 0.25
mm process:
o 5-20 Ω for metal or polysilicon ton+, p+, and metal to polysilicon;
o 1-5 Ω for via’s (metal-to-metal contacts)
At very high frequencies skin effect comes into play such that the resistance becomes
frequency-dependent. High-frequency currents tend to flow primarily on the surface
of a conductor with the current density falling off exponentially with depth into the
conductor.
The skin depth(δ) is defined as the depth where the current falls off to a value of e-1 of
its nominal value, and is given by
withf the frequency of the signal and µ the permeability of the surrounding dielectric
(permeability of free space, or µ = 4πx10-7 H/m). For Aluminium at 1GHz, the skin
depth is equal to 2.6 µm.
Fig: The skin-effect reduces the flow of the currentto the surface of the wire.
The effect can be approximated by assuming that the current flows uniformly in
anouter shell of the conductor with thickness δ for a rectangular wire.
Assuming that the overall cross-section of the wire is now limited to approximately
2(W+H)δ, we obtain the following expression for the resistance (per unit length) athigh
frequencies (f > fs):
Fig: Skin-effect induced increase in resistance as a function of frequency and wire width. All simulations
were performed for a wire thickness of 0.7 µm
Skin-effect is only an issue for wider wires. Since clocks tend to carry the highest-
frequency signals on a chip and also are fairly wide to limit resistance, the skin effect is
likely to have its first impact on these lines.
This is a real concern for GHz-range design, as clocks determine the overall
performance of the chip (cycle time, instructions per second, etc.).
Another major design concern is that the adoption of better conductors such as
Copper may move the on-set of skin-effects to lower frequencies.
Inductance
Consequences of on-chip inductance include ringing and overshoot effects, reflections
of signals due to impedance mismatch, inductive coupling between lines, and
switching noise due to Ldi/dt voltage drops.
The inductance of a section of a circuit can always be evaluated with its definition,
which states that a changing current passing through an inductor generates a voltage
drop ΔV
It is possible to compute the inductance of a wire directly from its geometry and
itsenvironment. A simpler approach relies on the fact that the capacitance c and the
inductancel (per unit length) of a wire are related by the following expression
Cl=ԑµ
with ԑ and µ are the permittivity and permeability of the surrounding dielectric.
Expression is valid only if the conductor is completely surrounded by a uniform
dielectric medium. This is most often not the case.
When the wire is embedded in different dielectric materials, it is possible to adopt
“average” dielectric constants and Eq. Cl=ԑµ can be used to get an approximate value
of the inductance.
The constant product of permeability and permittivity also defines the speed ѵ at
which an electromagnetic wave can propagate through the medium
Table: Dielectric constants and wave-propagation speeds for various materials used in electronic circuits.
The relative permeability mr of most dielectrics is approximately equal to 1.
Inductance becomes an issue in integrated circuits for frequencies that are well above
1 GHz.
Fig: Distributed versus lumped capacitance model of wire. C lumped = Lxcwire, with L the length of the
wire and cwire the capacitance per unit length. The driver is modeled as a voltage source and a source
resistanceRdriver.
Figure: RC chain
The voltage at node i of this network can be determined by solving the following set of
partial differential equations:
Where V is the voltage at a particular point in the wire, and x is the distance between
thispoint and the signal source.
Assuming that the leakage conductance g equals 0, which is true for most insulating
materials and eliminating the current i yields the wave propagation equation
Where r, c, and l are the resistance, capacitance, and inductance per unit length
respectively.
The overall cell is about 200 µm on a side. The pad is the large (100 × 75 µm) rectangle
consisting of a sandwich of metal1 and metal2 connected with many vias.
The SiO2 overglass covering the metal2 is etched away over the pad so the bond wire
can be connected directly to the pad.
Two large metal2 rectangles cover most of the pad. The upper one with the legs
sticking up is GND, while the lower is VDD.
The bidirectional pad schematic is shown in Figure below
Figure (a) is an output driver that takes a low swing input voltage and produces a
higher-swing output voltage. It uses a CVSL structure consisting of four high-voltage
transistors indicated in bold. The inverter uses low-voltage transistors and the low-
voltage power supply. The output Y can be followed by a high-voltage inverter or
buffer to deliver more uniform rise/fall times.
Figure (b) is an input receiver that takes a high-swing input voltage and produces a
lower-swing voltage for core circuits. It consists of a simple inverter using highvoltage
transistors that can withstand the large gate voltages.
To avoid the need for high-voltage transistors, some output drivers use stacked
transistors. Figure below shows a cascode driver for a 3.3 V output in a 2.5 V process.
The inner (cascode) transistors are tied to supplies in such a way that V gs and Vds across
an individual transistor never exceed 2.5 V even though the output has a larger swing.
If the voltages on the cascode transistors are provided externally rather than
generated internally, the system must apply them in the proper sequence to avoid
momentarily exposing the I/O circuitry to damaging electric fields.