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    Filmetrics Datasheet F54

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    chenjiayu199805

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    © All Rights Reserved
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    Filmetrics Datasheet F54

    Uploaded by

    chenjiayu199805
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    Filmetrics-Datasheet-F54

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    3 views2 pages

    Filmetrics Datasheet F54

    Uploaded by

    chenjiayu199805

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
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    F54

    Thin-Film Mapping Analyzer

    The Filmetrics Advantage Automated Thin-Film Thickness


    • World’s leader in tabletop thin-film Mapping System
       measurement
    Thin-film thickness of samples up to 450 mm in diameter are
    • 24-hour phone, e-mail, and online support
    mapped quickly and easily with the F54 advanced spectral
    • Intuitive analysis software standard with reflectance system. The motorized r-theta stage moves
    every system automatically to selected measurement points and provides
    thickness measurements as fast as two points per second. The
    Additional Features F54 has the same precision high-lifetime stage that performs
    • Built-in online diagnostics millions of measurements in our production systems.
    • Standalone software included
    Choose one of dozens of predefined polar, rectangular, or linear
    • Sophisticated history function for saving,
    map patterns, or create your own with no limit on the number
    reproducing, and plotting results of measurement points. The entire desktop system is set up in
    minutes and can be used by anyone with basic computer skills.

    Example Layers
    Virtually any smooth, non-metallic film may be measured.
    Examples include:
    SiO2 SiNX DLC Polysilicon
    Photoresist Polymer Layers Polyimide Amorphous Silicon

    Example Applications
    Semiconductor Fabrication LCD
    Photoresist Cell Gaps
    Oxides/Nitrides/SOI Polyimide
    Wafer Backgrinding ITO
    MEMS Optical Coatings
    Photoresist Hardness Coatings
    Silicon Membranes Anti-Reflection Coating
    AIN/ZnO Thin-Film Filter Filters
    A KLA Company
    F54
    Thin-Film Mapping Analyzer

    Measurement Specifications F54-UV F54-UVX F54 F54-EXR F54-NIR


    Thickness Range with 5X Objective*: - - 20nm-40μm 20nm-120μm 100nm-120µm
    Thickness Range with 10X Objective*1: 4nm-35µm 4nm-115µm 20nm-45μm 20nm-115μm 100nm-115µm
    Thickness Range with 15X Objective*1: 4nm-30μm 4nm-100μm 20nm-40μm 20nm-100μm 100nm-100µm
    Thickness Range with 50X Objective*: - - 20nm-2μm 20nm-4μm 100nm-4µm
    Min. Thickness to Measure n and k * : 2
    50 nm 50 nm 100 nm 100 nm 500 nm
    Accuracy*: The Greater of 1 nm or 0.2% 1 nm or 0.2% 2 nm or 0.2% 2 nm or 0.2% 3 nm or 0.4%
    Precision3: 0.02 nm 0.02 nm 0.2 nm 0.02 nm 0.1 nm
    Stability4: 0.05 nm 0.05 nm 0.05 nm 0.05 nm 0.12 nm
    General Specifications
    Spectrometer Wavelength Range: 190-1100 nm 190-1700 nm 380-1050 nm 380-1700 nm 950-1700 nm
    Light Source: External D2 + Halogen Internal Halogen
    Dimensions: 14W x 19D x 22H (in)
    35.5W x 48.3D x 55H (cm)
    Weight: 41 lbs. (19 kg)
    Power Requirements: 100 - 240 VAC, 50 - 60 Hz, 230 W
    500 μm 250 μm 100 μm 50 μm
    Computer Requirements Spot Size
    Aperture Aperture Aperture Aperture
    Processor Clock Speed: 1.4 GHz min
    5X Objective: 100 μm 50 μm 20 μm 10 μm
    Interface: USB 2.0
    Operating System 10X Objective: 50 μm 25 μm 10 μm 5 μm
    PC: Windows XP (SP2) - Latest Windows (64-bit) 15X Objective: 33 μm 17 μm 7 μm 3.5 μm
    Mac: OS X Lion - Latest Mac OS running Parallels 50X Objective: 10 μm 5 μm 2 μm 1 μm
    200 mm Chuck 300 mm Chuck
    * Material and microscope dependent
    1
    Reflective objective Sample Size: ≤ 200 mm diameter ≤ 300 mm diameter
    2
    Using 5X objective
    3
    1σ of 100 measurements of 1 µm SiO2-on-Si. Value is average of 1σ Speed (Typical 5 points - 5 sec. 5 points - 8 sec.
    over 20 days. with Vacuum 25 points - 14 sec. 25 points - 21 sec.
    4
    2σ of daily average of 100 measurements of 1 µm SiO2-on-Si, Chuck): 56 points - 29 sec. 56 points - 43 sec.
    measured over 20 days.

    Filmetrics – A KLA Company


    10655 Roselle St., San Diego, CA 92121
    Tel: (858) 573-9300 Fax: (858) 573-9400
    www.filmetrics.com
    A KLA Company Specifications subject to change without notice ©2019 KLA Corporation Rev. 08.18 Printed in the USA

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