Pressure regulator for semiconductor

manufacturing process

Products
Catalogue
 The First Name in Performance.
The Last Word in High Purity.

YUTAKA ENGINEERING CORPORATION, better known as and manufacturing techniques are constantly evolving to
Crown, was founded in 1956 by President and CEO, meet the future challenges of the industry's next generation
Yoshitake Toyokawa. Yoshitake's objectives were to provide requirements at a competitive price. The product line
products with sincerity, enthusiasm and originality from a continues to grow year by year with additional innovative
company with excellent service and technical support. These components which compliment our offering.
goals have continued to guide the company throughout the
years. Today, YUTAKA continues to strive towards our goals. We
are still working to improve our already high standards of
In 1956, YUTAKA began producing pressure regulators and quality, performance and reliability backed by service and
flowmeters intended solely for the general industry. These support.
products were designed and manufactured exclusively for
the welding gas applications. In 1980, the company's
efforts have remained focused on meeting the ever changing
needs of the high purity applications. Our products designs

For the
Hi-Technology

▲ Head Office in Tokyo ▲ Matsumoto Factory ▲ Integrated Gas System

Selection Table by Pressure and Flow Rate

L Series R Series D Series

For For For For For For

Cylinder Point of Use Cylinder Point of Use Cylinder Point of Use

L L2
L L1
RH1
High Flow L61 LM1 LM2-D
R61 RH2
(More than 400NL /min) L62 LM2 RH2-D
RLD
LH1
LH 2

Medium Flow R35

L88 L35 R72 RH2-D
(100～400NL/min) R36

L25
L20
Standard Flow L26 R20 R25
L21
(10～100NL/min) L18 R81 R26
L81
L18H

L96
Small Flow
(Absolute
(Less than 10NL/min)
Pressure)

[ NOTE]
· Product availability and specifications contained herein are subject to change without notice. Consult local distributor or factory for potential revisions.
· To complete ordering information, select “SS” or “SH” in the “MATERIAL” category.
· Seat Materials: Special fluoroplastics are recommended for Chlorine (Cl2) service.
· Seat Materials: Vespel®is recommended for Nitrous Oxide(N2O) service.
· Stainless steel internals are recommended for Carbon Monoxide (CO) or Nickel Carbonyl service.
· Crown/YUTAKA®and e-flow®are registered trademarks of YUTAKA ENGINEERING CORPORATION.
· Hastelloy®is a registered trademark of Haynes International, Inc.
· Vespel®and VITON®are registered trademarks of DuPont Company.
·  -VCR®, VCR®and Swagelok®are registered trademarks of Swagelok Marketing CO.
S
·  -JSK®and JSK®are registered trademarks of SANKO KOGYO CO., LTD.
S
·  JR®is a registered trademark of Fujikin Incorporated.
U
·  hen selecting a regulator, the total system design must be considered to assure safe, trouble-free regulator performance. Regulator function, materials compatibility,
W
adequate ratings, proper installation, operation and maintenance are the responsibility of the system designer and user.
· C ustom fittings, porting, testing and dimension options are also available upon customer request.
· D o not mix or interchange parts with those of other manufacturers.
 High Purity High Performance High Pressure Regulator
L20 Series INLET PRESSURE
2175PSIG (15MPaG)
1160PSIG (8MPaG)
145PSIG (1MPaG)
1.1 160
150
1.0
140
0.9 130
OUTLET PRESSURE (PSIG)

L20 Series
120
0.8
110
0.7 100
0.6 90
80
RoHS Directive Products
0.5 70
0.4 60

High Pressure Regulator

50
0.3 40
0.2 30
20 INLET PRESSURE
0.1
10
2175PSIG (15MPaG)
0 0
0 50 100 150 200 1160PSIG
250 (8MPaG)
MPaG 145PSIG (1MPaG)
Inlet Pressure 1.1 Max.24 MPaG (Max.3,480
160
FLOW (LPM) (N₂) PSIG)
150
Outlet Pressure 1.0 Max.0.99 MPaG (Max.144 PSIG)
140 Washer for Panel Mount
0.9 130
(Pressure Range: 0～0.2 MPa, 0～0.4 MPa, 0～0.6 MPa,
OUTLET PRESSURE (PSIG)

120

5.47” (139mm)
0.8 Threaded holes for the Nut for Panel Mounting
0～0.99 MPa)

3.4” (86mm)
110
0.7 rear surface installation.
100 Fine Control K
2-M5×0.8-7.0mm
Supply Pressure Effect
0.6 0.00021
90 MPaG (0.03 PSIG) per 0.1 MPaG (14.5 PSIG) (0.276in.) deep.
80
0.5 70
Proof Pressure 31.5
60
MPa (4,567 PSI), 1.5 MPa (Outlet Side)
0.4
50
CV 0.3 0.09
40
0.2 30
Temperature –10˚C
20 to +40˚C
0.1 1.46”dia (
10 −11 0.874”
Outboard Leakage 0 1×10
0 Pa・m3/sec・He (1×10−10 atm・cc/sec・He) (22.2mm) 1.89”dia 0.689” 1.30” Required
0 50 100 150 200 250
MPaG (48mm dia) (17.5mm) (33mm) 4.72”
Internal Volume 4.67 cc (0.28 in3 ) w/o fittings
FLOW (LPM) (N₂)
(120mm)
Approximate weight 1.29 kg (2 lbs.14 oz.) Washer fo

Installation Threaded holes on the rear surface or Panel mounting

5.47” (139mm)
Threaded holes for the Nut for Pa

3.4” (86mm)
rear surface installation.
[ NOTE] Fine Control Knob for 2-M5×0.8-7.0mm
High Solution Manual (0.276in.) deep.
1MPa = 10.2 kgf/cm2 = 145.04 PSI
Delivery Pressure
1MPa = 7504.36 mmHg = 295.4 inHg Adjustment

Bonnet (B)
0.874”
(22.2mm) 1.89”dia 0.689” 1.30”
Square Load Spring Tied Diaphragm (Optional)
(48mm dia) (17.5mm) (33mm) 4.72”
Cross sectional drawing (120mm)
Bonnet (A)
Nut and Washer for
Panel Mounting
Cap
O-ring
Fine Control Knob for
Seat Retainer
High Solution Manual
Delivery Pressure Diaphragm Linked
Diaphragm Seat
Adjustment Poppet Design for
(Metal to metal seal [ NOTE]
to atmosphere.) Positive Shutoff
Poppet Operating the Tied Diaphragm
Bonnet (B)
Type: In order to minimize
Spring premature wear of regulator’s
Square Load Spring internal parts. Be sure not to
close regulator while under
Bonnet (A) pressure.
Nut and Washer for
Panel Mounting
Cap
O-ring Permanent lot number and
serial number marking Seat Retainer

Diaphragm Seat FlowDiaphragm

characteristics
Linked
Poppet Design for
(Metal to metal seal
to atmosphere.) Positive Shutoff
INLET PRESSURE
Poppet
2175PSIG (15MPaG)
1160PSIG (8MPaG)
145PSIG (1MPaG)
Spring
1.1 160
150
1.0
140
0.9 130
OUTLET PRESSURE (PSIG)

120
0.8
110
0.7 100
0.6 90
Permanent lot number and 80
0.5 70
serial number marking
0.4 60
50
0.3 40
[ NOTE]
0.2 30
· A void turning the control knob excessively. 0.1
20
10
· S eries L25,L26 are recommended for Chroline (CL 2) service and Nitrous 0 0
0 50 100 150 200 250
Oxide (N2O) service. MPaG
FLOW (LPM) (N₂)
· No filter in this unit.
[ NOTE]
· These tests were performed at ambient conditions.

2
 L20 Series

Outline drawing
5.95” (151mm)

OUTLET PRESSURE GAUGE INLET PRESSURE GAUGE

Washer for Panel Mounting

5.47” (139mm)

Threaded holes for the Nut for Panel Mounting

3.4” (86mm)

rear surface installation.

2-M5×0.8-7.0mm Fine Control Knob [ NOTE]
(0.276in.) deep. · Dimensions are in inches
1/4 face seal-MALE 1/4 face seal-MALE and (mm) for reference
only.
OUTLET INLET · Face to face length of the
male and female are the
0.874” 1.46”dia (37mm dia) Hole
Required For Panel Mounting
same.
(22.2mm) 1.89”dia 0.689” 1.30”
(17.5mm) (33mm) 4.72” 3.70” · Subject to change without
(48mm dia)
(120mm) (94mm) notice.

Materials of construction Wetted surface finishes

MODEL & TYPE L20SS L20SH L20SS-CO Standard Ra
32µin. (0.80μm) or less
Wetted Parts (GRADE “B”)
Body SUS316L Optional Ra
7µin. (0.18μm) or less
Poppet & Seat Retainer SUS316L Hastelloy® C-22 SUS316L (GRADE “A”)

Diaphragm Hastelloy® C-22 SUS316L

Seat PCTFE
Spring SUS316 Hastelloy® C-22 SUS316
Standard connections
Gasket to seal for gauge Ni SUS316
1/4” face to face length of the male and female
Non-wetted Parts
are the same.……………………………………… 3.70in. (94mm)
Diaphragm Linked Bonnet (A) SUS316
Poppet Design for
1/4” Tube stubs and other connections available
Bonnet (B) Nickel Plated Brass
Positive Shutoff as options.
Cap SUS304
Control Knob ABS Resin [NOTE]

O-ring NBR · A ny combination of Face Seal male and/or female fittings are
available for inlet and outlet.
· S ize and configuration of pressure gauge port is 1/4” Face Seal
male.

Ordering information
PORTING
MATERIAL GRADE 2 2 Ports PORT TYPE
SERIES SS SUS A Electropolish 3 3 Ports W Welding Port
L L Series SH Hastelloy®C-22 B Standard 4 4 Ports G Special Specification GAS APPLICATION
CO Corbon Monoxide Gas
INLET OUTLET
PRESSURE PRESSURE
GAUGE GAUGE Inlet Outlet

L 2 0
SEAT MATERIALS

INLET/OUTLET
MAX. INLET PRESSURE PRESSURE GAUGE OUTLET PRESSURE RANGE Type Size Configuration I Vespel
16 24MPa 5A 0～25MPa 10 0～0.99MPa 1 W21－14 R Right M Male E PEEK
10 14.8MPa H8 0～16MPa 06 0～0.6MPa 2 W22－14 L Left F Female
A5 0～2.5MPa 04 0～0.4MPa 6 W26－14
MODEL 2J 0～1.6MPa 02 0～0.2MPa
2 VCR 2 1/8 OPTIONS
20 High Pressure Regulator A2 0～1MPa
3 S-JSK 4 1/4 A Tied Diaphragm
B6 0～0.6MPa
4 JSK 6 3/8
B3 0～0.3MPa 2 IN/OUT Reverse Position
6 SWL 8 1/2
2K －0.1～0～1.6MPa Q Electropolish (GRADE"A")
7 UJR 0 Others
2R －0.1～0～1MPa
G Special Specification
R6 －0.1～0～0.6MPa 9 0 0 Others
R3 －0.1～0～0.3MPa
GE Others

3
 High Purity High Performance Point-of-Use Pressure Regulator
L25 Series
INLET PRESSURE
870PSIG (6.0MPaG)
145PSIG (1.0MPaG)
1.1 160
150
1.0
140

L25 Series
0.9 130
OUTLET PRESSURE (PSIG)

0.8 120
110
0.7 100
90
RoHS Directive Products
0.6
80
0.5 70

Point-of-Use Pressure Regulator

0.4
0.3
60
50
40
0.2 30
20 INLET PRESSURE
0.1
10 870PSIG (6.0MPaG)
0 0 145PSIG
Inlet Pressure 0 Max.6 MPaG (Max.870
50 PSIG) 100 120 (1.0MPaG)
MPaG 160 1.1
FLOW (LPM) (N₂)
150
Outlet Pressure Max.0.99 MPaG (Max.144 PSIG)
140
1.0
Washer for Panel Mo
0.9 (Pressure Range: 0～0.2 MPa, 0～0.4 MPa, 0～0.6 MPa,
130
OUTLET PRESSURE (PSIG)

6.02” (153mm)
3.94” (100mm)
0.8 120 Nut for Panel Mountin
0～0.99 MPa)
110 Threaded holes for the
0.7 100 rear surface installation.
Supply Pressure Effect
0.6 0.0008 MPaG (0.12 PSIG) per 0.1 MPaG (14.5 PSIG)
90 2-M5×0.8-7.0mm Fine Control
80 (0.276in.) deep.
0.5
Proof Pressure 22.2 MPa (3,215 PSI)
70
0.4 60 1
CV 0.3 0.15
50
40
Temperature 0.2 –10˚C to +40˚C
30
20
0.1
10 −11
Outboard Leakage 0 1×10
0
Pa・m3/sec・He (1×10−10 atm・cc/sec・He) 0.874”
0 50 100 120 (22.2mm) 0.689” 1.30” 1.46”dia (37mm dia
Internal Volume MPaG 4.67 cc (0.28 in3 ) w/o fittings 1.89”dia
FLOW (LPM) (N₂) (17.5mm) (33mm) 4.72” Required For Pane
(48mm dia)
Approximate weight 0.96 kg (2 lbs. 2 oz.) (120mm) Washer

6.02” (153mm)
3.94” (100mm)
Installation Threaded holes on the rear surface or Panel mounting Threaded holes for the Nut for P
rear surface installation.
[ NOTE] 2-M5×0.8-7.0mm
Fine Control Knob for (0.276in.) deep.
1MPa = 10.2 kgf/cm2 = 145.04 PSI
High Solution Manual
1MPa = 7504.36 mmHg = 295.4 inHg Delivery Pressure
Adjustment

Bonnet (B)
0.874”
(22.2mm) 0.689” 1.30” 1.46”
1.89”dia
(17.5mm) (33mm) 4.72” Requ
Cross sectional drawing Square Load Spring Tied Diaphragm (Optional) (48mm dia)
(120mm)

Bonnet (A)
Nut and Washer for
Panel Mounting
Cap
Fine Control Knob for
O-ring
High Solution Manual
Seat Retainer
Delivery Pressure
Adjustment Diaphragm Linked
Diaphragm Seat Poppet Design for
(Metal to metal seal [ NOTE]
Positive Shutoff
to atmosphere.) Bonnet (B)
Poppet Operating the Tied Diaphragm
Type: In order to minimize
Spring premature wear of regulator’s
Square Load Spring
internal parts. Be sure not to
close regulator while under
Bonnet (A)
Nut and Washer for pressure.
Panel Mounting
Cap
O-ring
Permanent lot number and Seat Retainer
serial number marking
FlowPoppet
characteristics
Diaphragm Linked
Diaphragm Seat Design for
(Metal to metal seal
Positive Shutoff
to atmosphere.)
Poppet INLET PRESSURE
870PSIG (6.0MPaG)
145PSIG (1.0MPaG)
Spring 1.1 160
150
1.0
140
0.9 130
OUTLET PRESSURE (PSIG)

0.8 120
110
0.7 100
0.6 90
80
Permanent lot number and 0.5 70
serial number marking 0.4 60
50
0.3
40
[ NOTE] 0.2 30
20
· A void turning the control knob excessively. 0.1
10
· For purging at 870 PSIG (6 MPaG) and higher, operate the unit in consideration 0 0
0 50 100 120
of changing the outlet pressure by the supply pressure effect. MPaG
FLOW (LPM) (N₂)
· No filter in this unit.
[ NOTE]
· These tests were performed at ambient conditions.

4
 L25 Series

Outline drawing
OUTLET PRESSURE GAUGE

Washer for Panel Mounting

6.02” (153mm)
3.94” (100mm)

Threaded holes for the Nut for Panel Mounting

rear surface installation. [ NOTE]
2-M5×0.8-7.0mm Fine Control Knob
· Dimensions are in inches
(0.276in.) deep.
and (mm) for reference
1/4 face seal-MALE 1/4 face seal-MALE only.
· Face to face length of the
OUTLET INLET male and female are the
same.
0.874”
(22.2mm) 0.689” 1.30” 1.46”dia (37mm dia) Hole · Subject to change without
1.89”dia 3.70”
(17.5mm) (33mm) 4.72” Required For Panel Mounting (94mm) notice.
(48mm dia)
(120mm)

Materials of construction Wetted surface finishes

MODEL & TYPE L25SS L25SH L25SH-CL2 L25SS-N2O L25SS-CO L25SS-NH3 Standard Ra
32µin. (0.80μm) or less
Wetted Parts (GRADE “B”)
Body SUS316L Optional Ra
7µin. (0.18μm) or less
Poppet & Seat (GRADE “A”)
®
SUS316L Hastelloy C-22 SUS316L
Retainer
Hastelloy®
Diaphragm Hastelloy® C-22 SUS316L
C-22 Standard connections
Special Special
Seat PCTFE Vespel® PCTFE
Fluoroplastics Fluoroplastics
1/4” face to face length of the male and female
Spring SUS316 Hastelloy® C-22 SUS316
are the same.……………………………………… 3.70in. (94mm)
Gasket to seal
for gauge
Ni SUS316 Ni 1/4” Tube stubs and other connections available
Diaphragm Linked as options.
Poppet Design for Non-wetted Parts
Positive Shutoff
Bonnet (A) SUS316 [NOTE]
Bonnet (B) Nickel Plated Brass · A ny combination of Face Seal male and/or female fittings are
available for inlet and outlet.
Cap SUS304
· S ize and configuration of pressure gauge port is 1/4” Face Seal
Control Knob ABS Resin male.
O-ring NBR

Ordering information
GAS APPLICATION
PORTING
MATERIAL GRADE 2 2 Ports PORT TYPE NH3 Ammonia Gas
SERIES SS SUS A Electropolish 3 3 Ports W Welding Port CO Corbon Monoxide Gas
L L Series SH Hastelloy®C-22 B Standard 4 4 Ports G Special Specification CL2 Chlorine Gas
N2O Nitorous Oxide Gas
INLET OUTLET
PRESSURE PRESSURE
GAUGE GAUGE Inlet Outlet

L 2 5
SEAT MATERIALS

INLET/OUTLET
MAX. INLET PRESSURE PRESSURE GAUGE OUTLET PRESSURE RANGE Type Size Configuration I Vespel
04 6MPa 5A 0～25MPa 10 0～0.99MPa 1 W21－14 R Right M Male E PEEK
01 0.99MPa H8 0～16MPa 06 0～0.6MPa 2 W22－14 L Left F Female
2A 0～10MPa 04 0～0.4MPa 6 W26－14
6B 0～6MPa 02 0～0.2MPa
2 VCR 2 1/8 OPTIONS
A5 0～2.5MPa
3 S-JSK 4 1/4 A Tied Diaphragm
2J 0～1.6MPa
MODEL 4 JSK 6 3/8
A2 0～1MPa 2 IN/OUT Reverse Position
25 Point-of-Use Pressure Regulator 6 SWL 8 1/2
B6 0～0.6MPa Q Electropolish (GRADE"A")
7 UJR 0 Others
B3 0～0.3MPa
G Special Specification
2K －0.1～0～1.6MPa 9 0 0 Others
2R －0.1～0～1MPa
R6 －0.1～0～0.6MPa
R3 －0.1～0～0.3MPa
R1 －0.1～0～0.1MPa
GE Others

5
High Purity High Performance High Pressure Regulator
L21 Series

L21 Series RoHS Directive Products

High Pressure Regulator

INLET PRESSURE
2175PSIG (15.0MPaG)
870PSIG (6.0MPaG)
Inlet Pressure Max.24 MPaG (Max.3,480 PSIG) 145PSIG (1.0MPaG)
Outlet Pressure1.0 150 Max.0.99 MPaG (Max.144 PSIG)
140
0.9130 (Pressure Range: 0～0.2 MPa, 0～0.4 MPa, 0～0.6 MPa,
120
0～0.99 MPa)
OUTLET PRESSURE (PSIG)

0.8
110
0.7 100
Supply Pressure
0.6 Effect
90 0.0005 MPaG (0.0725 PSIG) per 0.1 MPaG (14.5 PSIG)
80
Proof Pressure0.5 70 31.5 MPa (4,567 PSI), 1.5 MPa (Outlet Side)
0.4 60
CV 0.3
50 0.09
40
0.2 30
Temperature 20 –10˚C to +40˚C
0.1
10
Outboard Leakage
0 0 1×10−11 Pa・m3/sec・He (1×10−10 atm・cc/sec・He) OUT
0 100 200 300 400 500
MPaG GAU
Internal Volume 4.75 cc (0.29 in3 ) w/o fittings
FLOW (LPM) (N₂)

Approximate weight 1.4 kg (3 lbs. 1 oz.)

4.41”(112mm)
Installation Threaded holes on the rear surface or Panel mounting Threaded holes for the

5.47”(139mm)
rear surface installation.
2-M5×0.8-7.0mm Fine Control K
[ NOTE] (0.276in.) deep.
1MPa = 10.2 kgf/cm2 = 145.04 PSI
1MPa = 7504.36 mmHg = 295.4 inHg

1.06”
(27mm)
0.874”
(22.2mm) 0.689”
1.89”dia (17.5mm) 5.35”(136mm)
(48mm dia)
Cross sectional drawing Flow characteristics
INLET PRESSURE
2175PSIG (15.0MPaG)
870PSIG (6.0MPaG)
145PSIG (1.0MPaG)
150
1.0
140
0.9 130
120
OUTLET PRESSURE (PSIG)

0.8
110
0.7 100
0.6 90
80
Fine Control Knob for 0.5 70
High Solution Manual 0.4 60
Delivery Pressure 50
0.3
Adjustment 40
0.2 30
20
0.1
10
Square Load Spring 0 0
0 100 200 300 400 500
MPaG
FLOW (LPM) (N₂)
Diaphragm
(Metal to metal seal Bonnet
to atmosphere.) [ NOTE]
· These tests were performed at ambient conditions.
Seat Retainer Seat

Poppet

Spring

Body

[ NOTE]
· A void turning the control knob excessively.
· S eries L25,L26 are recommended for Chroline (CL 2) service and Nitrous
Oxide (N2O) service.
· No filter in this unit.

Fine Control Knob for

High Solution Manual
Delivery Pressure
Adjustment

6
Square Load Spring
 L21 Series

Outline drawing

5.95”(151mm)
OUTLET PRESSURE
GAUGE

INLET PRESSURE
4.41”(112mm)

GAUGE
Threaded holes for the
5.47”(139mm)

rear surface installation. [ NOTE]

2-M5×0.8-7.0mm Fine Control Knob
· Dimensions are in inches
(0.276in.) deep.
and (mm) for reference
1/4 face seal-MALE 1/4 face seal-MALE
only.
· Face to face length of the
OUTLET INLET male and female are the
1.06” M ad
e in J a p an

(27mm) same.
0.874”
(22.2mm) 0.689” · Subject to change without
1.89”dia (17.5mm) 5.35”(136mm) 3.70”(94mm) notice.
(48mm dia)

Materials of construction Wetted surface finishes

MODEL & TYPE L21SS L21SH L21SS-CO Standard Ra
32µin. (0.80μm) or less
Wetted Parts (GRADE “B”)
Body SUS316L Optional Ra
7µin. (0.18μm) or less
Poppet & Seat Retainer SUS316L Hastelloy® C-22 SUS316L (GRADE “A”)

Diaphragm Hastelloy® C-22 SUS316L

Seat PCTFE
Spring SUS316 Hastelloy® C-22 SUS316
Standard connections
Gasket to seal for gauge Ni SUS316
1/4” face to face length of the male and female
Non-wetted Parts
are the same.……………………………………… 3.70in. (94mm)
Bonnet SUS316, C3604BD
1/4” Tube stubs and other connections available
Control Knob ABS Resin
as options.
O-ring NBR
[NOTE]
· A ny combination of Face Seal male and/or female fittings are
available for inlet and outlet.
· S ize and configuration of pressure gauge port is 1/4” Face Seal
male.

Ordering information
GRADE PORTING
MATERIAL U Ultra 2 2 Ports PORT TYPE
SERIES SS SUS A Electropolish 3 3 Ports W Welding Port
L L Series SH SUS＋Hastelloy® B Standard 4 4 Ports G Special Specification GAS APPLICATION
G Special Specification CO Corbon Monoxide Gas
INLET OUTLET
PRESSURE PRESSURE
GAUGE GAUGE Inlet Outlet

L 2 1
INLET/OUTLET
MAX. INLET PRESSURE PRESSURE GAUGE OUTLET PRESSURE RANGE Type Size Configuration OPTIONS
16 24MPa 5A 25MPa 10 0～0.99MPa 2 VCR 2 1/8 M Male 2 IN/OUT Reverse Position
14 21MPa H8 16MPa 06 0～0.6MPa 3 S-JSK 4 1/4 F Female M Front Panel Mounting
10 14.8MPa 2A 10MPa 04 0～0.4MPa 4 JSK 6 3/8 Q Electropolish (GRADE"A")
6B 6MPa 02 0～0.2MPa 7 UJR 0 Others
A5 2.5MPa 8 YR
MODEL
2J 1.6MPa
21 High Pressure Regulator 9 0 0 Others
A2 1MPa
B6 0.6MPa
B3 0.3MPa
2K －0.1～0～1.6MPa
2R －0.1～0～1MPa
R6 －0.1～0～0.6MPa
R3 －0.1～0～0.3MPa
GE Others

7
High Purity High Performance Point-of-Use Pressure Regulator
L26 Series

L26 Series RoHS Directive Products

Point-of-Use Pressure Regulator

INLET PRESSURE
145PSIG (1.0MPaG)
73PSIG (0.5MPaG)
Inlet Pressure Max.6 MPaG (Max.870 PSIG) 43.5PSIG (0.3MPaG)
Outlet Pressure 60
Max.0.99 MPaG (Max.140 PSIG)
0.4
(Pressure Range: 0～0.2 MPa, 0～0.4 MPa, 0～0.6 MPa,
50
0～0.99 MPa)
OUTLET PRESSURE (PSIG)

0.3
40
Supply Pressure Effect 0.001 MPaG (0.145 PSIG) per 0.1 MPaG (14.5 PSIG)
30
Proof Pressure
0.2 22.2 MPa (Inlet side)
CV 20 0.21
0.1
Temperature 10 –10˚C to +40˚C
−11
Outboard Leakage
0 0
0
1×10
10 20
Pa・m303/sec・He
40
(1×10
50
−10
60
atm・cc/sec・He)
70 80 90 100
MPaG
Internal Volume 4.75 cc (0.29 in3 ) w/o fittings
FLOW (LPM) (N₂)

Approximate weight 1.0 kg (2 lbs. 3 oz.)

Threaded holes for the

4.96”(126mm)
Installation Threaded holes on the rear surface or Panel mounting

6.02”(153mm)
rear surface installation.
2-M5×0.8-7.0mm
(0.276in.) deep.
[ NOTE] Fine Con
1MPa = 10.2 kgf/cm2 = 145.04 PSI
1MPa = 7504.36 mmHg = 295.4 inHg

1.06”
(27mm)
0.874”
(22.2mm) 0.689”
Cross sectional drawing Flow characteristics 1.89”dia
(48mm dia)
(17.5mm) 5.35”(136mm

INLET PRESSURE
145PSIG (1.0MPaG)
73PSIG (0.5MPaG)
43.5PSIG (0.3MPaG)

60
0.4
50
OUTLET PRESSURE (PSIG)

0.3
40

Fine Control Knob for 0.2 30

High Solution Manual
Delivery Pressure 20
Adjustment 0.1
10

0 0
Square Load Spring 0 10 20 30 40 50 60 70 80 90 100
MPaG
FLOW (LPM) (N₂)
Diaphragm
(Metal to metal seal Bonnet
to atmosphere.) [ NOTE]
· These tests were performed at ambient conditions.
Seat Retainer Seat

Poppet

Spring

Body

[ NOTE]
· A
 void turning the control knob excessively.
· N
 o filter in this unit.

Fine Control Knob for

High Solution Manual
Delivery Pressure
Adjustment

8
Square Load Spring
 L26 Series

Outline drawing
OUTLET PRESSURE
GAUGE

Threaded holes for the

4.96”(126mm)
6.02”(153mm)

rear surface installation.

2-M5×0.8-7.0mm
(0.276in.) deep.
Fine Control Knob [ NOTE]
1/4 face seal-MALE 1/4 face seal-MALE · Dimensions are in inches
and (mm) for reference
only.
· Face to face length of the
OUTLET INLET
1.06” Mad
e in Japan male and female are the
(27mm)
0.874” same.
(22.2mm) 0.689” 3.70”(94mm) · S ubject to change without
1.89”dia (17.5mm) 5.35”(136mm)
(48mm dia)
notice.

Materials of construction Wetted surface finishes

MODEL & TYPE L26SS L26SH L26SH-CL2 L26SS-N2O L26SS-CO L26SS-NH3 Standard Ra
32µin. (0.80μm) or less
Wetted Parts (GRADE “B”)
Body SUS316L Optional Ra
7µin. (0.18μm) or less
Poppet & Seat (GRADE “A”)
SUS316L Hastelloy® C-22 SUS316L
Retainer
Hastelloy®
Diaphragm Hastelloy® C-22 SUS316L
C-22 Standard connections
Special Special
Seat PCTFE Vespel® PCTFE
Fluoroplastics Fluoroplastics
1/4” face to face length of the male and female
Spring SUS316 Hastelloy® C-22 SUS316
are the same.……………………………………… 3.70in. (94mm)
Gasket to seal
Ni SUS316 Ni 1/4” Tube stubs and other connections available
for gauge
Non-wetted Parts as options.
Bonnet SUS304 [NOTE]
Control Knob ABS Resin · A ny combination of Face Seal male and/or female fittings are
O-ring NBR available for inlet and outlet.
· S ize and configuration of pressure gauge port is 1/4” Face Seal
male.

Ordering information
PORTING GAS APPLICATION
MATERIAL GRADE 2 2 Ports PORT TYPE NH3 Ammonia Gas
SERIES SS SUS A Electropolish 3 3 Ports W Welding Port CO Corbon Monoxide Gas
L L Series SH SUS＋Hastelloy® B Standard 4 4 Ports G Special Specification CL2 Chlorine Gas
N2O Nitorous Oxide Gas
INLET OUTLET
PRESSURE PRESSURE
GAUGE GAUGE Inlet Outlet

L 2 6
SEAT MATERIALS

INLET/OUTLET
MAX. INLET PRESSURE PRESSURE GAUGE OUTLET PRESSURE RANGE Type Size Configuration I Vespel
04 6MPa 2A 0～10MPa 10 0～0.99MPa 2 VCR 2 1/8 M Male E PEEK
02 2MPa 6B 0～6MPa 06 0～0.6MPa 3 S-JSK 4 1/4 F Female
01 0.99MPa A5 0～2.5MPa 04 0～0.4MPa 4 JSK 6 3/8 OPTIONS
2J 0～1.6MPa 02 0～0.2MPa 6 SWL 8 1/2 2 IN/OUT Reverse Position
A2 0～1MPa 7 UJR 0 Others Q Electropolish (GRADE"A")
B6 0～0.6MPa
9 0 0 Others G Special Specification
MODEL B3 0～0.3MPa
26 Point-of-Use Pressure Regulator 2K －0.1～0～1.6MPa
2R －0.1～0～1.0MPa
R6 －0.1～0～0.6MPa
R3 －0.1～0～0.3MPa
GE Others

9
High Purity High Performance Point-of-Use Pressure Regulator
L35 Series

L35 Series RoHS Directive Products

Medium Flow Rate Applications

Inlet Pressure Max.6 MPaG (Max.870 PSIG)

Outlet Pressure Max.0.9 MPaG (Max.130.5 PSIG)
(Pressure Range: 0～0.2 MPa, 0～0.4 MPa, 0～0.6 MPa,
0～0.9 MPa)
INLET PRESSURE
Supply Pressure Effect 0.0007 MPaG (0.10 PSIG) per 0.1 MPaG (14.5 PSIG) 145PSIG (1.0MPaG)
102PSIG (0.7MPaG)
Proof Pressure 9 MPa (1,305 PSI) 0.9 130
73PSIG (0.5MPaG)

120
CV 0.21 0.8
110
OUTLET PRESSURE (PSIG)

Temperature –10˚C to +40˚C 0.7 100

90
0.6
Outboard Leakage 1×10−11 Pa・m3/sec・He (1×10−10 atm・cc/sec・He)
80
0.5 70
Internal Volume 11.3 cc (0.68 in3 ) w/o fittings 0.4 60
50
Approximate weight 1.95 kg (4 lbs. 5 oz.) 0.3 40
0.2 30
Installation Threaded holes on the rear surface or
20
Panel mounting
0.1
10
[ NOTE] 0 0
0 100 200 300 400 500
1MPa = 10.2 kgf/cm2 = 145.04 PSI MPaG
FLOW (LPM) (N₂)
1MPa = 7504.36 mmHg = 295.4 inHg

Cross sectional drawing Flow characteristics

INLET PRESSURE
145PSIG (1.0MPaG)
102PSIG (0.7MPaG)
73PSIG (0.5MPaG)
0.9 130
Fine Control Knob for 120
0.8
High Solution Manual 110 O
OUTLET PRESSURE (PSIG)

Delivery Pressure 0.7 100

Adjustment 90
0.6
80
0.5 70
0.4 60
Washer for
50
0.3 40 Threaded holes for the Nut for Pan
Square Load Spring
6.61”(168mm)
4.17”(106mm)

0.2 30 rear surface installation.

Diaphragm 20 2-M5×0.8-7.0mm
0.1
F
10 (0.276in.) deep.
Metal to metal 0 0
seal to 0 100 200 300 400 500
atmosphere MPaG
Seat FLOW (LPM) (N₂)

Poppet [ NOTE]
Seat Retainer
· These tests were performed at ambient conditions.
0.874”
(22.2mm) 1.46”dia (37 mm
0.728” 1.89”(48mm) Required For P
2.36”dia
(60mm dia) (18.5mm)
4.96”(126mm)

[ NOTE]
· A
 void turning the control knob excessively. Fine Control Knob for
· N
 o filter in this unit. High Solution Manual
Delivery Pressure
Adjustment

Threaded holes for the

Square Load Spring
6.61”(168mm)
4.17”(106mm)

rear surface installation.

Diaphragm 2-M5×0.8-7.0mm
(0.276in.) deep.
Metal to metal
seal to
atmosphere Seat

10
Poppet
Seat Retainer
200 300 400 500
FLOW (LPM) (N₂)

L35 Series

Outline drawing
OUTLET PRESSURE GAUGE

Washer for Panel Mounting

Threaded holes for the Nut for Panel Mounting
6.61”(168mm)
4.17”(106mm)

rear surface installation.

2-M5×0.8-7.0mm
Fine Control Knob
(0.276in.) deep. [ NOTE]
· Dimensions are in inches
1/4 face seal-MALE 1/4 face seal-MALE
and (mm) for reference
only.
OUTLET INLET · Face to face length of the
male and female are the
0.874”
(22.2mm) same.
1.46”dia (37 mm dia) Hole
1.89”(48mm) Required For Panel Mounting · Subject to change without
2.36”dia 0.728” 4.88”(124mm)
(18.5mm) notice.
(60mm dia) 4.96”(126mm)

Materials of construction Wetted surface finishes

MODEL & TYPE L35SS L35SH L35SH-CL2 L35SS-N2O L35SS-CO L35SS-NH3 Standard Ra
32µin. (0.80μm) or less
Wetted Parts (GRADE “B”)
Body SUS316L Optional Ra
7µin. (0.18μm) or less
Poppet & Seat (GRADE “A”)
®
SUS316L Hastelloy C-22 SUS316L
Retainer
Hastelloy®
Diaphragm Hastelloy® C-22 SUS316L
C-22
Standard connections
Special Special
Seat PCTFE Vespel® PCTFE
Fluoroplastics Fluoroplastics
1/4” face to face length of the male and female
Spring SUS316
are the same.……………………………………… 4.88in. (124mm)
Gasket to seal
Ni SUS316 Ni 1/4” Tube stubs and other connections available
for gauge
Non-wetted Parts as options.
Bonnet SUS304 3/8”, 1/2” face to face length of the male and female
Control Knob ABS Resin are the same.………………………………………… 5.2in. (132mm)
O-ring NBR [NOTE]
· A ny combination of Face Seal male and/or female fittings are
available for inlet and outlet.
· S ize and configuration of pressure gauge port is 1/4” Face Seal
male.

Ordering information
PORTING GAS APPLICATION
MATERIAL GRADE 2 2 Ports PORT TYPE NH3 Ammonia Gas
SERIES SS SUS A Electropolish 3 3 Ports W Welding Port CO Corbon Monoxide Gas
L L Series SH SUS＋Hastelloy® B Standard 4 4 Ports G Special Specification CL2 Chlorine Gas
N2O Nitorous Oxide Gas
INLET OUTLET
PRESSURE PRESSURE
GAUGE GAUGE Inlet Outlet

L 3 5
SEAT MATERIALS

INLET/OUTLET
MAX. INLET PRESSURE PRESSURE GAUGE OUTLET PRESSURE RANGE Type Size Configuration I Vespel
04 6MPa 2A 0～10MPa 09 0～0.9MPa 1 W21－14 R Right M Male E PEEK
01 0.99MPa 6B 0～6MPa 06 0～0.6MPa 2 W22－14 L Left F Female F PFA
A5 0～2.5MPa 04 0～0.4MPa 6 W26－14
OPTIONS
2J 0～1.6MPa 02 0～0.2MPa
2 VCR 2 1/8 2 IN/OUT Reverse Position
A2 0～1MPa
3 S-JSK 4 1/4 Q Electropolish (GRADE"A")
B6 0～0.6MPa
4 JSK 6 3/8
MODEL B3 0～0.3MPa G Special Specification
6 SWL 8 1/2
35 Point-of-Use Pressure Regulator 2K －0.1～0～1.6MPa
7 UJR 0 Others
2R －0.1～0～1MPa
R6 －0.1～0～0.6MPa 9 0 0 Others
R3 －0.1～0～0.3MPa
R1 －0.1～0～0.1MPa
GE Others

11
High Purity High Performance High Pressure Regulator
L61 Series

L61 Series RoHS Directive Products

High Flow Rate Applications

Inlet Pressure Max.24 MPaG (Max.3,480 PSIG)

Outlet Pressure Max.0.8 MPaG (Max.116 PSIG)
(Pressure Range: 0～0.2 MPa, 0～0.4 MPa, 0～0.6 MPa,
0～0.8 MPa)
INLET PRESSURE
Supply Pressure Effect 0.0006 MPaG (0.087 PSIG) per 0.1 MPaG (14.5 PSIG) 1160PSIG (8.0MPaG)
290PSIG (2.0MPaG)
Proof Pressure 31.5 MPa (4,567 PSI), 1.5 MPa0.9(Outlet
130 Side)
120
CV 0.07 0.8
110
OUTLET PRESSURE (PSIG)

0.7 100
Temperature –10˚C to +40˚C 90
0.6
80
Outboard Leakage 1×10−11 Pa・m3/sec・He (1×10−10 0.5
atm・cc/sec・He)
70
3
Internal Volume 32.3 cc (1.97 in ) w/o fittings 0.4 60
50
0.3
Approximate weight 4.7 kg (10 lbs. 6 oz.) 40
0.2 30
Installation Threaded holes on the rear surface or20Panel mounting
0.1
10
0 0
[ NOTE] 0 100 200 300 400 500 600 700 800 900 1000
MPaG
1MPa = 10.2 kgf/cm2 = 145.04 PSI FLOW (LPM) (N₂)
1MPa = 7504.36 mmHg = 295.4 inHg

Cross sectional drawing Flow characteristics

INLET PRESSURE
1160PSIG (8.0MPaG)
290PSIG (2.0MPaG)
0.9 130
120
0.8
Fine Control Knob for 110
High Solution Manual
OUTLET PRESSURE (PSIG)

0.7 100
Delivery Pressure 90
0.6
Adjustment 80
0.5 70 OUTLET PRESSURE GAUGE
0.4 60
50
0.3 40
0.2 30
Threaded holes for the Washer for Panel Mounting
20
Square Load Spring 0.1 rear surface installation. Nut for Panel Mounting
Diaphragm 10
2-M6×1-10mm
6.54”(166mm)
3.94”(100mm)

0 0
0
(0.394in.)
100
deep.
200 300 400 500 600 700 800 900 Fine 1000
Control Knob
Metal to metal MPaG
seal to FLOW (LPM) (N₂)
1/2 face
atmosphere
[ NOTE]
Seat
Poppet Guide · These tests were performed at ambient conditions.
OUTLE
Poppet
Seat Retainer
1.42” 1.46”dia (37mm dia) Hole
(36mm) 0.886” 2.05” Required For Panel Mounting
(22.5mm) (52mm)
3.11”dia 5.24”
(79mm dia) (133mm)

Fine Control Knob for

[ NOTE] High Solution Manual
· A
 void turning the control knob excessively. Delivery Pressure
Adjustment
· N
 o filter in this unit.

Threaded holes for the Wa

Square Load Spring rear surface installation.
Diaphragm 2-M6×1-10mm
6.54”(166mm)
3.94”(100mm)

(0.394in.) deep.
Metal to metal
seal to
atmosphere

Seat
Poppet Guide
Poppet
12
Seat Retainer
1.42” 1
0.886” 2.05” R
 FLOW (LPM) (N₂)

L61 Series

for
ual Outline drawing
6.57”(167mm)
OUTLET PRESSURE GAUGE INLET PRESSURE
GAUGE

Threaded holes for the Washer for Panel Mounting

ring rear surface installation. Nut for Panel Mounting
2-M6×1-10mm
6.54”(166mm)
3.94”(100mm)

(0.394in.) deep. Fine Control Knob

[ NOTE]
1/2 face seal-MALE 1/2 face seal-MALE · Dimensions are in inches
and (mm) for reference
eat
only.
OUTLET INLET
pet · Face to face length of the
male and female are the
1.42” 1.46”dia (37mm dia) Hole same.
(36mm) 0.886” 2.05” Required For Panel Mounting
(22.5mm) (52mm) 5.98”(152mm) · Subject to change without
3.11”dia 5.24”
(79mm dia)
notice.
(133mm)

Materials of construction Wetted surface finishes

MODEL & TYPE L61SS L61SH L61SS-CO Standard Ra
32µin. (0.80μm) or less
Wetted Parts (GRADE “B”)
Body SUS316L Optional Ra
7µin. (0.18μm) or less
Poppet SUS316 Hastelloy® C-22 SUS316 (GRADE “A”)

Seat Retainer SUS316L Hastelloy® C-22 SUS316L

Diaphragm Hastelloy® C-22 SUS316L
Seat PCTFE
Standard connections
Spring SUS316
Gasket to seal for gauge Ni SUS316
1/4” face to face length of the male and female
are the same.……………………………………… 4.96in. (126mm)
Non-wetted Parts
1/4” Tube stubs and other connections available
Bonnet SUS304
as options.
Control Knob ABS Resin
3/8”, 1/2” face to face length of the male and female
O-ring NBR
are the same.……………………………………… 5.98in. (152mm)
[NOTE]
· A ny combination of Face Seal male and/or female fittings are
available for inlet and outlet.
· S ize and configuration of pressure gauge port is 1/4” Face Seal
male.

Ordering information
PORTING
MATERIAL GRADE 2 2 Ports PORT TYPE
SERIES SS SUS A Electropolish 3 3 Ports W Welding Port
L L Series SH Hastelloy®C-22 B Standard 4 4 Ports G Special Specification GAS APPLICATION
CO Corbon Monoxide Gas
INLET OUTLET
PRESSURE PRESSURE
GAUGE GAUGE Inlet Outlet

L 6 1
INLET/OUTLET
MAX. INLET PRESSURE PRESSURE GAUGE OUTLET PRESSURE RANGE Type Size Configuration OPTIONS
16 24MPa 5A 0～25MPa 08 0～0.8MPa 1 W21－14 R Right M Male 2 IN/OUT Reverse Position
10 14.8MPa H8 0～16MPa 06 0～0.6MPa 2 W22－14 L Left F Female Q Electropolish (GRADE"A")
2A 0～10MPa 04 0～0.4MPa 6 W26－14
G Special Specification
MODEL 6B 0～6MPa 02 0～0.2MPa
2 VCR 2 1/8
61 High Pressure Regulator A5 0～2.5MPa
3 S-JSK 4 1/4
2J 0～1.6MPa
4 JSK 6 3/8
A2 0～1MPa
6 SWL 8 1/2
B6 0～0.6MPa
7 UJR 0 Others
B3 0～0.3MPa
C CVC
2K －0.1～0～1.6MPa
2R －0.1～0～1MPa 9 0 0 Others
R6 －0.1～0～0.6MPa
R3 －0.1～0～0.3MPa
R1 －0.1～0～0.1MPa
GE Others

13
High Purity High Performance High Pressure Regulator
L62 Series

L62 Series RoHS Directive Products

High Flow Rate Applications (Needle Type)

INLET PRESSURE
2146PSIG (14.8MPaG)
1160PSIG (8.0MPaG)
Inlet Pressure Max.24 MPaG (Max.3,480 PSIG)
435PSIG (3.0MPaG)
Outlet Pressure 0.6 Max.0.8 MPaG (Max.116 PSIG)
80
0.5 (Pressure Range: 0～0.2 MPa, 0～0.4 MPa, 0～0.6 MPa,
70
OUTLET PRESSURE (PSIG)

0～0.8 MPa)
0.4 60
Supply Pressure Effect 0.001
50 MPaG (0.145 PSIG) per 0.1 MPaG (14.5 PSIG)
0.3
Proof Pressure 31.5
40 MPa (4,567 PSIG)
0.2 30
CV 0.11
20
Temperature 0.1 –10˚C
10
to +40˚C
−11
Outboard Leakage 0 1×10
0 Pa・m3/sec・He (1×10−10 atm・cc/sec・He)
0 100 200 300 400 500 600 700 800 900 1000 1100 1200
Threaded holes for the
Internal Volume MPaG 32.3 cc (1.97 in3 ) w/o fittings
FLOW (LPM) (N₂) rear surface installation.
Approximate weight 4.7 kg (10 lbs. 6 oz.) 2-M6×1-10mm
(0.394in.) deep.
Installation Threaded holes on the rear surface or Panel mounting

[ NOTE]
1MPa = 10.2 kgf/cm2 = 145.04 PSI
1MPa = 7504.36 mmHg = 295.4 inHg

1.42” 0.886”
(36mm) (22.5mm) 2.05”(52mm)

Cross sectional drawing Flow characteristics 3.11”dia

(79mm dia)
5.24”(133mm)

INLET PRESSURE
2146PSIG (14.8MPaG)
1160PSIG (8.0MPaG)
435PSIG (3.0MPaG)
0.6
80
0.5 70
OUTLET PRESSURE (PSIG)

Fine Control Knob for 60

0.4
High Solution Manual
50
Delivery Pressure
0.3
Adjustment 40

0.2 30

Diaphragm 20
Square Load Spring 0.1
10
0 0
Metal to metal 0 100 200 300 400 500 600 700 800 900 1000 1100 1200
seal to MPaG FLOW (LPM) (N₂)
atmosphere
Seat [ NOTE]
Seat Retainer
· These tests were performed at ambient conditions.
Poppet

Spring

Body

[ NOTE]
· A
 void turning the control knob excessively.
· N
 o filter in this unit.

Fine Control Knob for

High Solution Manual
Delivery Pressure
Adjustment

Diaphragm
Square Load Spring
14
Metal to metal
seal to
 L62 Series

Outline drawing
Washer for Panel Mounting

Threaded holes for the Nut for Panel Mounting

rear surface installation.
2-M6×1-10mm
(0.394in.) deep.
Fine Control Knob

1/2 face seal-MALE 1/2 face seal-MALE [ NOTE]

· Dimensions are in inches
and (mm) for reference
OUTLET INLET only.
· Face to face length of the
male and female are the
same.
1.42” 0.886” 1.46”dia (37mm dia) Hole
(36mm) (22.5mm) 2.05”(52mm) Required For Panel Mounting 5.98”(152mm) · Subject to change without
notice.
3.11”dia 5.24”(133mm)
(79mm dia)

Materials of construction Wetted surface finishes

MODEL & TYPE L62SS L62SH L62SS-CO L62SS-I Standard Ra
32µin. (0.80μm) or less
Wetted Parts (GRADE “B”)
Body SUS316L Optional Ra
7µin. (0.18μm) or less
Poppet & Seat (GRADE “A”)
SUS316L Hastelloy® C-22 SUS316L
Retainer
Diaphragm Hastelloy® C-22 SUS316L Hastelloy® C-22
Seat PCTFE Vespel® Standard connections
Spring SUS316
Gasket to seal 3/8”, 1/2” face to face length of the male and female
Ni SUS316 Ni
for gauge are the same.……………………………………… 5.98in. (152mm)
Non-wetted Parts
[NOTE]
Bonnet SUS304
· A ny combination of Face Seal male and/or female fittings are
Control Knob ABS Resin available for inlet and outlet.
O-ring NBR · S ize and configuration of pressure gauge port is 1/4” Face Seal
male.

Ordering information
PORTING
MATERIAL
GRADE 2 2 Ports PORT TYPE
SS SUS
SERIES A Electropolish 3 3 Ports W Welding Port
SUS＋
L L Series SH Hastelloy®C-22 B Standard 4 4 Ports G Special Specification GAS APPLICATION
CO Corbon Monoxide Gas
INLET OUTLET
PRESSURE PRESSURE
GAUGE GAUGE Inlet Outlet

L 6 2
SEAT MATERIALS

INLET/OUTLET
MAX. INLET PRESSURE PRESSURE GAUGE OUTLET PRESSURE RANGE Type Size Configuration I Vespel
16 24MPa 5A 0～25MPa 08 0～0.8MPa 1 W21－14 R Right M Male E PEEK
13 20MPa HB 0～16MPa 06 0～0.6MPa 2 W22－14 L Left F Female
10 14.8MPa 2A 0～10MPa 04 0～0.4MPa 6 W26－14
OPTIONS
6B 0～6MPa 02 0～0.2MPa
2 VCR 2 1/8 2 IN/OUT Reverse Position
A5 0～2.5MPa
MODEL 3 S-JSK 4 1/4 Q Electropolish (GRADE"A")
2J 0～1.6MPa
62 High Pressure Regulator 4 JSK 6 3/8
A2 0～1MPa G Special Specification
6 SWL 8 1/2
B6 0～0.6MPa
7 UJR 0 Others
B3 0～0.3MPa
C CVC
2K －0.1～0～1.6MPa
2R －0.1～0～1.0MPa 9 0 0 Others
R6 －0.1～0～0.6MPa
R3 －0.1～0～0.3MPa
GE Others

15
High Purity High Performance High Pressure Regulator
L81 Series

L81 Series RoHS Directive Products

High Pressure Regulator INLET PRESSURE

1160PSIG (8.0MPaG)
218PSIG (1.5MPaG)
130 0.9
120
0.8
110
Inlet Pressure Max.24 MPaG (Max.3,480 PSIG)

OUTLET PRESSURE (PSIG)

0.7 100
Outlet Pressure Max.0.8 MPaG (Max.116 PSIG)0.6 90
80
(Pressure Range: 0～0.2 MPa, 0.5 0～0.470MPa, 0～0.6 MPa, INLET PRESSURE
0～0.8 MPa) 0.4 60 1160PSIG (8.0MPaG)
50 218PSIG (1.5MPaG)
Supply Pressure Effect 0.000007 MPaG (0.10 PSIG) per
0.9 0.3 0.1 MPaG
130
40 (14.5 PSIG)
120
Proof Pressure 31.5 MPa (4,567 PSIG) 0.8 0.2
110
30
20
OUTLET PRESSURE (PSIG)

0.7 100
CV 0.03 0.1 10
90
0.6 0 0
Temperature –10˚C to +40˚C 80 0 10 20 30 40 50 60 70 80 90 100
0.5 MPaG
−11 3 70
−10
Outboard Leakage 1×10 Pa・m /sec・He (1×10 60 atm・cc/sec・He) FLOW (LPM) (N₂)
0.4
Internal Volume 8.9 cc (0.54 in3 ) w/o fittings 50
0.3 40
Approximate weight 2.0 kg (4 lbs. 7 oz.) 0.2 30
20
Installation Threaded holes on the rear 0.1 surface
10
or Panel mounting
0 0 1.46”dia (37mm dia)
0 10 20 30 40 50 60 70 80 90 100 Hole Required For Panel Mounting
[ NOTE] MPaG
FLOW (LPM) (N₂)
1MPa = 10.2 kgf/cm2 = 145.04 PSI
1MPa = 7504.36 mmHg = 295.4 inHg
Nut for Panel
Mounting
1.46”dia (37mm Washer for

5.63”(143mm)
Fine Control Knob for dia)

3.50”(89mm)
High Solution Manual Panel
Hole Required For Panel Mounting
Delivery Pressure Tied Diaphragm (Optional) Mounting
Cross sectional drawing Adjustment

Nut for Panel

Mounting
Washer for

5.63”(143mm)
Fine Control Knob for

3.50”(89mm)
High Solution Manual Panel
1.61”
Mounting
Delivery Pressure (41mm)
Adjustment 2.40”(61mm) 4.53
6.93”(176mm)
Metal to metal seal
to atmosphere Diaphragm Linked
Seat Poppet Design for
Positive Shutoff
Poppet 1.77”
1.61” (45mm)
(41mm) 2.40”(61mm) 4.53”(115mm)
[ NOTE]
6.93”(176mm)
Metal to metal seal Operating the Tied Diaphragm
to atmosphere Diaphragm Linked Type: In order to minimize
Seat Poppet Design for
premature wear of regulator’s
Positive Shutoff
Poppet internal parts. Be sure not to
Poppet
Seat close regulator while under
pressure.
Metal to metal seal
to atmosphere

Poppet Flow characteristics

Seat
INLET PRESSURE
Metal to metal seal 1160PSIG (8.0MPaG)
to atmosphere 218PSIG (1.5MPaG)
0.9 130
120
0.8
110
OUTLET PRESSURE (PSIG)

0.7 100
90
0.6
80
0.5 70
0.4 60
50
[ NOTE] 0.3 40
· A void turning the control knob excessively. 0.2 30
20
· No filter in this unit. 0.1 10
0 0
0 10 20 30 40 50 60 70 80 90 100
MPaG
FLOW (LPM) (N₂)

[ NOTE]
· These tests were performed at ambient conditions.

1.46”
Hole
16
 L81 Series

70 80 90 100

Outline drawing
1.46”dia (37mm dia)
Hole Required For Panel Mounting 6.06”(154mm)
INLET PRESSURE GAUGE
OUTLET PRESSURE GAUGE

Nut for Panel

Mounting
Washer for
5.63”(143mm)
3.50”(89mm)

Panel
Fine Control Knob [ NOTE]
Mounting
· Dimensions are in inches
and (mm) for reference
1/4 face seal-MALE 1/4 face seal-MALE only.
· Face to face length of the
OUTLET INLET male and female are the
1.77” same.
1.61” (45mm)
(41mm) · Subject to change without
2.40”(61mm) 4.53”(115mm) 3.94”(100mm) notice.
6.93”(176mm)

Materials of construction Wetted surface finishes

MODEL & TYPE L81SS L81SH L81SS-N20 L81SS-CO L81SS-NH3 Standard Ra
32µin. (0.80μm) or less
Wetted Parts (GRADE “B”)
Body SUS316L Optional Ra
7µin. (0.18μm) or less
Poppet & Seat Hastelloy ® (GRADE “A”)
SUS316L SUS316L
Retainer C-22
Hastelloy®
Diaphragm Hastelloy® C-22 SUS316L
C-22
Standard connections
Special
Seat PCTFE Vespel® PCTFE
Fluoroplastics
1/4” face to face length of the male and female
Hastelloy®
Spring SUS316
C-22
SUS316 are the same.……………………………………… 3.94in. (100mm)
Gasket to seal
1/4” Tube stubs and other connections available
Ni SUS316 Ni
for gauge as options.
Non-wetted Parts [NOTE]
Bonnet SUS316 · A ny combination of Face Seal male and/or female fittings are
Control Knob ABS Resin available for inlet and outlet.
O-ring NBR · S ize and configuration of pressure gauge port is 1/4” Face Seal
male.

Ordering information
PORTING
2 2 Ports
MATERIAL
GRADE 3 3 Ports PORT TYPE
SS SUS GAS APPLICATION
SERIES A Electropolish 4 4 Ports W Welding Port
SUS＋ NH3 Ammonia Gas
L L Series SH Hastelloy®C-22 B Standard 5 5 Ports G Special Specification
N2O Nitorous Oxide Gas
INTERMEDIATE- CO Corbon Monoxide Gas
INLET STAGE OUTLET
PRESSURE PRESSURE PRESSURE
GAUGE GAUGE GAUGE Inlet Outlet

L 8 1
SEAT MATERIALS

MAX. INLET PRESSURE INLET/OUTLET PRESSURE GAUGE OUTLET PRESSURE RANGE Type Size Configuration FIRST STAGE SECOND STAGE
16 24MPa 5A 0～25MPa 08 0～0.8MPa 1 W21－14 R Right M Male II Vespel Vespel
10 14.8MPa H8 0～16MPa 06 0～0.6MPa 2 W22－14 L Left F Female FF PFA PFA
2A 0～10MPa 04 0～0.4MPa 6 W26－14
MODEL 6B 0～6MPa 02 0～0.2MPa OPTIONS
81 High Pressure Regulator A5 0～2.5MPa 2 VCR 2 1/8 A Tied Diaphragm
2J 0～1.6MPa 3 S-JSK 4 1/4
INTERMEDIATE-STAGE 2 IN/OUT Reverse Position
A2 0～1MPa SETTING PRESSURE 4 JSK 6 3/8
Q Electropolish (GRADE"A")
B6 0～0.6MPa 15 1.5MPa 6 SWL 8 1/2
B3 0～0.3MPa 10 0.99MPa 7 UJR 0 Others G Special Specification
2K －0.1～0～1.6MPa 07 0.7MPa
2R －0.1～0～1MPa 05 0.5MPa 9 0 0 Others
R6 －0.1～0～0.6MPa 04 0.4MPa
R3 －0.1～0～0.3MPa 03 0.3MPa
R1 －0.1～0～0.1MPa 00 Others
GE Others

17
High Purity High Performance High Pressure Regulator
L88 Series

L88 Series RoHS Directive Products

High Pressure Regulator

(Recommended for B2H6 , NF3 Service)
Inlet Pressure Max.24 MPaG (Max.3,480 PSIG)
Outlet Pressure Max.0.99 MPaG (Max.144 PSIG)
(Pressure Range: 0～0.2 MPa, 0～0.4 MPa, 0～0.6 MPa, INLET PRESSURE
580PSIG (4.0MPaG)
0～0.99 MPa)
290PSIG (2.0MPaG)
Supply Pressure Effect 0.00075 MPaG (0.109 PSIG) per 0.1 MPaG (14.5 PSIG) 145PSIG (1.0MPaG)
0.6 90
Proof Pressure 31.5 MPa (4,567 PSIG) 80
OUTLET PRESSURE (PSIG)

0.5
CV 0.10 70
0.4 60
Temperature –10˚C to +40˚C 50
−11 3 0.3
−10
Outboard Leakage 1×10 Pa・m /sec・He (1×10 atm・cc/sec・He)
40
0.2 30
Internal Volume 12.58 cc (0.77 in3 ) w/o fittings 20
0.1
Approximate weight 2.4 kg (5 lbs. 5 oz.) 10
0 0
Installation Threaded holes on the rear surface
MPaG or Panel
0 mounting
100 200 300 400 500
FLOW (LPM) (N₂)

[ NOTE]
1MPa = 10.2 kgf/cm2 = 145.04 PSI
1MPa = 7504.36 mmHg = 295.4 inHg

Cross sectional drawing Flow characteristics

INLET PRESSURE
580PSIG (4.0MPaG)
Fine Control Knob for 290PSIG (2.0MPaG)
High Solution Manual 145PSIG (1.0MPaG)
Delivery Pressure 0.6 90
Adjustment 80
OUTLET PRESSURE (PSIG)

0.5 70
60 1.46”dia (37mm dia)
0.4
Hole Required For Panel Mounting
50
0.3
40 OUTLET PRESSURE GAUGE
0.2 30
20
0.1
Metal to metal seal 10
Nut for Panel
to atmosphere 0 0
0 100 Mounting 200 300 400 500
MPaG
5.39” (137mm)

WasherFLOW
for (LPM) (N₂)
3.35” (85mm)

Panel Fine Control Knob

Mounting
Seat [ NOTE]
· These tests were performed at ambient conditions. 1/4 face sea
Poppet

OUTLE

1.97” 1.97”
Poppet (50mm) (50mm)
2.95”(75mm)
Seat 7.68”(195mm)

Metal to metal seal

to atmosphere Fine Control Knob for
High Solution Manual
Delivery Pressure
Adjustment

1.46”dia (37mm dia)

Hole Required For Panel Mounting

[ NOTE] OUTL

· A void turning the control knob excessively.

· No filter in this unit. Metal to metal seal Nut for Panel
to atmosphere Mounting
5.39” (137mm)

Washer for
3.35” (85mm)

Panel Fine Co
Mounting
Seat

Poppet
18
 L88 Series

Outline drawing
5.87”(149mm)
1.46”dia (37mm dia)
Hole Required For Panel Mounting INLET PRESSURE GAUGE
OUTLET PRESSURE GAUGE

Nut for Panel

Mounting
5.39” (137mm)

Washer for
3.35” (85mm)

Panel Fine Control Knob

Mounting

1/4 face seal-MALE 1/4 face seal-MALE

[ NOTE]
· Dimensions are in inches
OUTLET INLET
and (mm) for reference
only.
1.97” 1.97” · Subject to change without
(50mm) 2.95”(75mm) (50mm) 3.46”(88mm)
notice.
7.68”(195mm)

Materials of construction Wetted surface finishes

MODEL & TYPE L88SS L88SH Standard Ra
32µin. (0.80μm) or less
Wetted Parts (GRADE “B”)
Body SUS316L Optional Ra
7µin. (0.18μm) or less
Poppet & Seat Retainer SUS316L Hastelloy® C-22 (GRADE “A”)

Diaphragm Hastelloy® C-22

Seat PTFE
Spring SUS316
Standard connections
Gasket to seal for gauge Ni
1/4” face to face length of the male and female
Non-wetted Parts
are the same. (Male)………………………… 3.46in. (88mm)
Bonnet SUS316
1/4” face to face length of the male and female
Control Knob ABS Resin
are the same. (Female)…………………… 4.13in. (105mm)
O-ring NBR
[NOTE]
· A ny combination of Face Seal male and/or female fittings are
available for inlet and outlet.
· S ize and configuration of pressure gauge port is 1/4” Face Seal
male.

Ordering information
PORTING
GRADE 2 2 Ports
MATERIAL
A Electropolish 3 3 Ports PORT TYPE
SS SUS
SERIES B Standard 4 4 Ports W Welding Port
SUS＋
L L Series SH Hastelloy®C-22 G Others 5 5 Ports G Special Specification
GAS APPLICATION
INTERMEDIATE- NF3 Nitrogen Trifluoride
INLET STAGE OUTLET
PRESSURE PRESSURE PRESSURE
GAUGE GAUGE GAUGE Inlet Outlet

L 8 8
SEAT MATERIALS

MAX. INLET PRESSURE INLET/OUTLET PRESSURE GAUGE OUTLET PRESSURE RANGE Type Size Configuration FIRST STAGE SECOND STAGE
16 24MPa 5A 0～25MPa 10 0～0.99MPa 1 W21－14 R Right M Male CC PCTFE PCTFE
10 14.8MPa H8 0～16MPa 06 0～0.6MPa 2 W22－14 L Left F Female FF PFA PFA
2A 0～10MPa 04 0～0.4MPa 6 W26－14
MODEL 6B 0～6MPa 02 0～0.2MPa OPTIONS
88 High Pressure Regulator A5 0～2.5MPa 2 VCR 2 1/8 2 IN/OUT Reverse Position
2J 0～1.6MPa 3 S-JSK 4 1/4 Q Electropolish (GRADE"A")
INTERMEDIATE-STAGE
A2 0～1MPa SETTING PRESSURE 4 JSK 6 3/8
G Special Specification
B6 0～0.6MPa 30 3MPa 6 SWL 8 1/2
B3 0～0.3MPa 7 UJR 0 Others
2K －0.1～0～1.6MPa
2R －0.1～0～１MPa 9 0 0 Others
R6 －0.1～0～0.6MPa
R3 －0.1～0～0.3MPa
R1 －0.1～0～0.1MPa
GE Others

19
High Purity High Performance Absolute Pressure Regulator
15 0.1

L96 Series ＊1
10

OUTLET PRESSURE (MPaG)

5 ＊2

L96 Series
0 0
＊3
5
10 –5
15
20 –10

Absolute Pressure Regulator

25 OUTLE
–0.1
30 –15 0 5 10 15
inHgG PSIG FLOW (LPM) (N₂)
15 0.1
＊1
Threaded holes for the

5.47”(139mm)
Inlet Pressure Max.1.0 MPaG (145 PSIG)

3.40”(86mm)
10 rear surface installation.
2-M5×0.8-7.0mm
Outlet Pressure -0.1 MPaG to 0.2 MPaG (-30 in HgG to 29.0 PSIG)
OUTLET PRESSURE (MPaG)

5 ＊2 (0.276in.) deep. Bonnet

Proof Pressure 22.2 MPa (3,219 PSI)
0
CV 0 0 0.07 ＊3
5
Temperature 10 –5
–10˚C to +40˚C
Outboard Leakage15 1×10−11 Pa・m3/sec・He (1×10−10 atm・cc/sec・He) 0.874”
20
1.30”
–10 (22.2mm)
Internal Volume 5.739 cc (0.35 in3 ) w/o fittings 1.89”dia 0.689” (33mm)
25 (48mm dia) (17.5mm) OUTLE
–0.1 5.31”(135mm)
Approximate weight
30 –15 1.6 kg0 (3 lbs. 8 oz.) 5 10 15
inHgG PSIG FLOW (LPM) (N₂)
Installation Threaded holes on
Highthe rearIndicator
Solution surface
for the Marking the
[ NOTE] Operating Pressure Range Threaded holes for the

5.47”(139mm)
3.40”(86mm)
rear surface installation.
1MPa = 10.2 kgf/cm2 = 145.04 PSI 2-M5×0.8-7.0mm
1MPa = 7504.36 mmHg = 295.4 inHg Fine Control Knob for (0.276in.) deep. Bonnet
High Solution Manual
Delivery Pressure
Adjustment

Mark of the Indicator

Cross sectional drawing 0.874”
(22.2mm) 1.89”dia 0.689”
1.30”
(33mm)
Tape Colored(48mm
Orangedia) (17.5mm) 5.31”(135mm)
Load Spring

Positive・Negative
High Solution Indicator
Load Spring
for the Marking the
Operating Pressure Range
Diaphragm

Fine Control Knob for

Metal to metal seal
High Solution Manual
to atmosphere
Delivery Pressure
Adjustment
Seat Retainer

Seat

Poppet Position in the Plus Range Mark of the Indicator Position in the Minus Range

Tape Colored Orange

Load Spring

Positive・Negative
Spring
Load Spring
Flow characteristics
Body
15 0.1
Diaphragm
＊1

Metal to metal seal 10

to atmosphere
OUTLET PRESSURE (MPaG)

5 ＊2
Seat Retainer
0 0 0
Seat
＊3
5
Poppet Position in the Plus Range Position in the Minus Range
10 –5
15
20 –10
25
Spring –0.1
30 –15 0 5 10 15
Body inHgG PSIG FLOW (LPM) (N₂)

[ NOTE] [ NOTE]
· A void turning the control knob excessively. · ＊1
 Inlet Pressure=0.2MPaG (29.0 PSIG)
· No filter in this unit. ＊2 Inlet Pressure=0.1MPaG (14.5 PSIG)
＊3 Inlet Pressure=0.1MPaG (14.5 PSIG)
· Flow curves below 0 MPaG (0 PSIG) in the outlet pressure are under vacuumizing
the outlet side.
· These tests were performed at ambient conditions.

High Solution Indicator

20 for the Marking the
Operating Pressure Range
 L96 Series

Outline drawing
5.95”(151mm)

INLET PRESSURE GAUGE

OUTLET PRESSURE GAUGE

Threaded holes for the

5.47”(139mm)
3.40”(86mm)

rear surface installation.

2-M5×0.8-7.0mm Fine Control Knob
(0.276in.) deep. Bonnet

1/4 face seal-MALE 1/4 face seal-MALE

[ NOTE]
· Dimensions are in inches
OUTLET INLET and (mm) for reference
only.
0.874” 1.30” · S ubject to change without
(22.2mm) 1.89”dia 0.689” (33mm) 3.70”(94mm) notice.
(48mm dia) (17.5mm) 5.31”(135mm)

Materials of construction Wetted surface finishes

MODEL & TYPE L96SS L96SH L96SS-CO Standard Ra

32µin. (0.80μm) or less
Wetted Parts (GRADE “B”)
Body SUS316L Optional Ra
7µin. (0.18μm) or less
Poppet & Seat Retainer SUS316L Hastelloy® C-22 SUS316L (GRADE “A”)
Mark of the Indicator
Diaphragm Hastelloy® C-22 SUS316L
Seat PCTFE
Tape Colored Orange
Spring SUS316L
Standard connections
Gasket to seal for gauge Ｎｉ SUS316L
1/4” face to face length of the male and female
Non-wetted Parts
are the same.……………………………………… 3.70in. (94mm)
Bonnet（B) Chromium Plated Brass
1/4” Tube stubs and other connections available
Cap SUS304
as options.
Stem Nickel Plated Brass
Control Knob Chromium Plated Brass [NOTE]
· A ny combination of Face Seal male and/or female fittings are
available for inlet and outlet.
· S ize and configuration of pressure gauge port is 1/4” Face Seal
on in the Plus Range Position in the Minus Range
male.

Ordering information
GRADE
A Electropolish PORTING
MATERIAL 2 2 Ports PORT TYPE
B Standard
SERIES SS SUS 3 3 Ports W Welding Port
Not certified
L L Series SH Hastelloy®C-22 C particle counts 4 4 Ports G Special Specification GAS APPLICATION
CO Corbon Monoxide
INLET OUTLET
PRESSURE PRESSURE
GAUGE GAUGE Inlet Outlet

L 9 6
SEAT MATERIALS

INLET/OUTLET
MAX. INLET PRESSURE PRESSURE GAUGE OUTLET PRESSURE RANGE Type Size Configuration I Vespel
01 0.99MPa 2K －0.1～0～1.6MPa V2 －0.1～0～0.2MPa 2 VCR 2 1/8 M Male E PEEK
2R －0.1～0～1.0MPa V1 －0.1～0～0.1MPa 3 S-JSK 4 1/4 F Female
R6 －0.1～0～0.6MPa 4 JSK 6 3/8 OPTIONS
R3 －0.1～0～0.3MPa 6 SWL 8 1/2 2 IN/OUT Reverse Position
R1 －0.1～0～0.1MPa 7 UJR 0 Others Q Electropolish (GRADE"A")
MODEL
GE Others
96 Absolute Pressure Regulator 9 0 0 Others G Special Specification

21
High Purity High Performance Point-of-Use Pressure Regulator
LH1 Series

LH1 Series RoHS Directive Products

High Flow Rate Applications

Inlet Pressure Max.6 MPaG (Max.870 PSIG)

Outlet Pressure Max.0.8 MPaG (Max.116 PSIG)
INLET PRESSURE
(Pressure Range: 0～0.2 MPa, 0～0.4 MPa, 0～0.6 MPa, 145PSIG (1.0MPaG)
102PSIG (0.7MPaG)
0～0.8 MPa)
73PSIG (0.5MPaG)
0.8
Supply Pressure Effect 0.0019 MPaG (0.28 PSIG) per 0.1 MPaG
110(14.5 PSIG)
0.7 100
Proof Pressure 9.0 MPa (1,305 PSI)
OUTLET PRESSURE (PSIG)
0.6 90
CV 0.7 80
0.5
70
Temperature –10˚C to +40˚C
0.4 60
Outboard Leakage 1×10−11 Pa・m3/sec・He (1×10−10 atm・cc/sec・He)
50
0.3
40
Internal Volume 32.3 cc (1.95 in3) w/o fittings 0.2 30
Approximate weight 4.7 kg (10 lbs. 6 oz.) 0.1
20
10
Installation Threaded holes on the rear surface0 or Panel
0
mounting
MPaG 0 100 200 300 400 500 600 700 800 900 1000
FLOW (LPM) (N₂)
[ NOTE]
1MPa = 10.2 kgf/cm2 = 145.04 PSI
1MPa = 7504.36 mmHg = 295.4 inHg

Cross sectional drawing Flow characteristics

INLET PRESSURE
145PSIG (1.0MPaG)
102PSIG (0.7MPaG)
73PSIG (0.5MPaG)
0.8
110
Fine Control Knob for
0.7 100
High Solution Manual
Delivery Pressure
OUTLET PRESSURE (PSIG)

0.6 90
Adjustment 80
0.5
70
0.4 60
50
Diaphragm 0.3
40
0.2 30
Threaded holes for the
Metal to Square Load Spring 20
4.61”(117mm)

0.1 rear surface installation.

metal seal
7.17”(182mm)

10 2-M6×1-10mm
to atmosphere
0 0 (0.394in.) deep.
MPaG 0 100 200 300 400 500 600 700 800 900 1000
FLOW (LPM) (N₂)
Poppet Guide Seat
[ NOTE]
Seat Retainer Poppet
· These tests were performed at ambient conditions.

0.886”
1.42” (22.5mm)
(36mm) 3.11”dia 5.24”(133
(79mm dia)

[ NOTE]
· A void turning the control knob excessively.
· S eries LH2 are recommended for Chroline (CL2) service and Nitrous Oxide
(N2O) service. Fine Control Knob for
High Solution Manual
· No filter in this unit. Delivery Pressure
Adjustment

Diaphragm

Threaded holes for the

Metal to Square Load Spring rear surface installation.
metal seal
7.17”(182mm)

2-M6×1-10mm
to atmosphere
(0.394in.) deep.

Poppet Guide Seat

22 Seat Retainer Poppet
 LH1 Series

Outline drawing
OUTLET PRESSURE
GAUGE

Washer for Panel Mounting

Threaded holes for the Nut for Panel Mounting

4.61”(117mm)

rear surface installation.

7.17”(182mm)

2-M6×1-10mm Fine Control Knob

(0.394in.) deep.

1/2 face seal-MALE 1/2 face seal-MALE

[ NOTE]
OUTLET INLET · Dimensions are in inches
and (mm) for reference
only.
2.05” · Subject to change without
0.886” (52mm) 5.98”(152mm)
1.42” (22.5mm) notice.
(36mm) 3.11”dia 5.24”(133mm)
(79mm dia)

Materials of construction Wetted surface finishes

MODEL & TYPE LH1SS LH1SH LH1SS-CO Standard Ra
32µin. (0.80μm) or less
Wetted Parts (GRADE “B”)
Body SUS316L Optional Ra
7µin. (0.18μm) or less
Poppet SUS316 ®
Hastelloy C-22 SUS316 (GRADE “A”)

Seat Retainer SUS316L Hastelloy® C-22 SUS316L

Diaphragm Hastelloy® C-22 SUS316L
Seat PCTFE
Standard connections
Spring SUS316
3/8”, 1/2” face to face length of the male and female
Gasket to seal for gauge Ni SUS316
are the same.……………………………………… 5.98in. (152mm)
Non-wetted Parts
Bonnet SUS304 [NOTE]
· A ny combination of Face Seal male and/or female fittings are
Control Knob ABS Resin
available for inlet and outlet.
O-ring NBR · S ize and configuration of pressure gauge port is 1/4” Face Seal
male.

Ordering information
PORTING
MATERIAL GRADE 2 2 Ports PORT TYPE
SERIES SS SUS A Electropolish 3 3 Ports W Welding Port
L L Series SH Hastelloy®C-22 B Standard 4 4 Ports G Special Specification GAS APPLICATION
CO Corbon Monoxide
INLET OUTLET
PRESSURE PRESSURE
GAUGE GAUGE Inlet Outlet

L H 1
INLET/OUTLET
MAX. INLET PRESSURE PRESSURE GAUGE OUTLET PRESSURE RANGE Type Size Configuration OPTIONS
04 6MPa 2A 0～10MPa 08 0～0.8MPa 1 W21－14 R Right M Male 2 IN/OUT Reverse Position
01 0.99MPa 6B 0～6MPa 06 0～0.6MPa 2 W22－14 L Left F Female Q Electropolish (GRADE"A")
A5 0～2.5MPa 04 0～0.4MPa 6 W26－14
G Special Specification
2J 0～1.6MPa 02 0～0.2MPa
2 VCR 2 1/8
A2 0～1MPa
MODEL 3 S-JSK 4 1/4
B6 0～0.6MPa
H1 Point-of-Use Pressure Regulator 4 JSK 6 3/8
B3 0～0.3MPa
6 SWL 8 1/2
2K －0.1～0～1.6MPa
7 UJR 0 Others
2R －0.1～0～1MPa
C CVC
R6 －0.1～0～0.6MPa
R3 －0.1～0～0.3MPa 9 0 0 Others
R1 －0.1～0～0.1MPa
GE Others

23
High Purity High Performance Point-of-Use Pressure Regulator
LH2 Series

LH2 Series RoHS Directive Products

High Flow Rate Applications (Needle Type)

Inlet Pressure Max.6 MPaG (Max.870 PSIG)

Outlet Pressure Max.0.8 MPaG (Max.116 PSIG)
(Pressure Range: 0～0.2 MPa, 0～0.4 MPa, 0～0.6 MPa,
INLET PRESSURE
0～0.8 MPa) 145PSIG (1.0MPaG)
102PSIG (0.7MPaG)
Supply Pressure Effect 0.0019 MPaG (0.28 PSIG) per 0.1 MPaG (14.5 PSIG) 73PSIG (0.5MPaG)
0.8
Proof Pressure 9.0 MPa (1,305 PSI) 110
0.7 100
CV 0.60
OUTLET PRESSURE (PSIG)

0.6 90
80
Temperature –10˚C to +40˚C 0.5 70
Outboard Leakage 1×10−11 Pa・m3/sec・He (1×10−10 60
0.4 atm・cc/sec・He)
50
3 0.3
Internal Volume 32.3 cc (1.95 in ) w/o fittings 40
0.2 30
Approximate weight 4.7 kg (10 lbs. 6 oz.) 20
0.1
10
Installation Threaded holes on the rear surface0 or0 Panel mounting
MPaG 0 100 200 300 400 500 600 700 800 900 1000

[ NOTE] FLOW (LPM) (N₂)

1MPa = 10.2 kgf/cm2 = 145.04 PSI

1MPa = 7504.36 mmHg = 295.4 inHg

Cross sectional drawing Flow characteristics

INLET PRESSURE
145PSIG (1.0MPaG)
102PSIG (0.7MPaG)
73PSIG (0.5MPaG)
0.8
110
0.7 100
OUTLET PRESSURE (PSIG)

90
Fine Control Knob for 0.6
80
High Solution Manual 0.5 70
Delivery Pressure
0.4 60
Adjustment
50
0.3
40
Diaphragm
0.2 30
20
0.1 Threaded holes for the
Metal to Square Load Spring 10
4.61”(117mm)

metal seal 0 0 rear surface installation.

7.17”(182mm)

MPaG 0 100 200 3002-M6×1-10mm

400 500 600 700 800 900 1000
to atmosphere
(0.394in.)FLOW
deep.
(LPM) (N₂)

Seat [ NOTE]
Seat Retainer Poppet · These tests were performed at ambient conditions.

Spring 0.886” (5
1.42” (22.5mm)
Body (36mm) 3.11”dia 5.24”(133mm
(79mm dia)

[ NOTE]
· A
 void turning the control knob excessively.
· N
 o filter in this unit.
Fine Control Knob for
High Solution Manual
Delivery Pressure
Adjustment

Diaphragm

Metal to Threaded holes for the

Square Load Spring
metal seal rear surface installation.
7.17”(182mm)

to atmosphere 2-M6×1-10mm
(0.394in.) deep.

Seat

Seat Retainer Poppet

24
 LH2 Series

Outline drawing
OUTLET PRESSURE
GAUGE

Washer for Panel Mounting

Threaded holes for the Nut for Panel Mounting

rear surface installation. 4.61”(117mm)
7.17”(182mm)

2-M6×1-10mm Fine Control Knob

(0.394in.) deep.
[ NOTE]
1/2 face seal-MALE 1/2 face seal-MALE
· Dimensions are in inches
and (mm) for reference
only.
OUTLET INLET
· Face to face length of the
male and female are the
same.
2.05”
0.886” (52mm) 5.98”(152mm) · Subject to change without
1.42” (22.5mm)
(36mm) 3.11”dia 5.24”(133mm) notice.
(79mm dia)

Materials of construction Wetted surface finishes

MODEL & TYPE LH2SS LH2SH LH2SS-C0 LH2SH-CL2 LH2SS-N20 LH2SS-NH3 Standard Ra
32µin. (0.80μm) or less
Wetted Parts (GRADE “B”)
Body SUS316L Optional Ra
7µin. (0.18μm) or less
Hastelloy® Hastelloy® (GRADE “A”)
Poppet SUS316 SUS316 SUS316
C-22 C-22
Hastelloy® Hastelloy®
Seat Retainer SUS316L SUS316L SUS316L
®
C-22 C-22 Standard connections
Diaphragm Hastelloy C-22 SUS316L Hastelloy® C-22
Special 3/8”, 1/2” face to face length of the male and female
Seat PCTFE Fluoroplastics Vespel®
Fluoroplastics
are the same.……………………………………… 5.98in. (152mm)
Spring SUS316
Gasket to seal [NOTE]
Ni SUS316 Ni
for gauge · A ny combination of Face Seal male and/or female fittings are
Non-wetted Parts available for inlet and outlet.
· S ize and configuration of pressure gauge port is 1/4” Face Seal
Bonnet SUS304
male.
Control Knob ABS Resin
O-ring NBR

Ordering information
PORTING GAS APPLICATION
MATERIAL GRADE 2 2 Ports PORT TYPE NH3 Ammonia
SERIES SS SUS A Electropolish 3 3 Ports W Welding Port CO Corbon Monoxide
L L Series SH Hastelloy®C-22 B Standard 4 4 Ports G Special Specification CL2 Chlorine
N2O Nitorous Oxide
INLET OUTLET
PRESSURE PRESSURE
GAUGE GAUGE Inlet Outlet

L H 2
SEAT MATERIALS

INLET/OUTLET
MAX. INLET PRESSURE PRESSURE GAUGE OUTLET PRESSURE RANGE Type Size Configuration I Vespel
04 6MPa 2A 0～10MPa 08 0～0.8MPa 1 W21－14 R Right M Male E PEEK
01 0.99MPa 6B 0～6MPa 06 0～0.6MPa 2 W22－14 L Left F Female
A5 0～2.5MPa 04 0～0.4MPa 6 W26－14
2J 0～1.6MPa 02 0～0.2MPa OPTIONS
2 VCR 2 1/8
A2 0～1MPa 2 IN/OUT Reverse Position
MODEL 3 S-JSK 4 1/4
B6 0～0.6MPa Q Electropolish (GRADE"A")
H2 Point-of-Use Pressure Regulator 4 JSK 6 3/8
B3 0～0.3MPa 8 1/2
6 SWL G Special Specification
2K －0.1～0～1.6MPa A 3/4
7 UJR
2R －0.1～0～1MPa B 1
C CVC
R6 －0.1～0～0.6MPa 0 Others
R3 －0.1～0～0.3MPa
9 0 0 Others
R1 －0.1～0～0.1MPa
GE Others

25
High Purity High Performance Point-of-Use Pressure Regulator
LM1 Series

LM1 Series RoHS Directive Products

High Flow Rate Applications

Inlet Pressure Max.2 MPaG (Max.290 PSIG)

Outlet Pressure Max.0.8 MPaG (Max.116 PSIG) INLET PRESSURE
(Pressure Range: 0～0.2 MPa, 0～0.4 MPa, 0～0.6 MPa, 102PSIG (0.7MPaG)
73PSIG (0.5MPaG)
0～0.8 MPa) 0.6
80
Proof Pressure 3.0 MPa (435 PSI)
0.5
70
CV 1.81
OUTLET PRESSURE (PSIG)

0.4 60
Temperature –10˚C to +40˚C
−9 3 −8 50
Outboard Leakage 1×10 Pa・m /sec・He (1×10
0.3
atm・cc/sec・He)
40
Approximate weight 5.5 kg (12 lbs. 2 oz.)
0.2 30
Installation Threaded holes on the rear surface
20
0.1
[ NOTE] 10
1MPa = 10.2 kgf/cm2 = 145.04 PSI
0 0
1MPa = 7504.36 mmHg = 295.4 inHg MPaG 0 500 1000 1500 2000 2500 3000
FLOW (LPM) (N₂)

Cross sectional drawing Flow characteristics

INLET PRESSURE
102PSIG (0.7MPaG)
73PSIG (0.5MPaG)
0.6
80
Fine Control Knob for 0.5
High Solution Manual 70
OUTLET PRESSURE (PSIG)

Delivery Pressure
0.4 60
Adjustment
50
0.3
Square Load Spring 40
Threaded holes for the 4.65”dia
0.2 30 (118mm dia
rear surface installation.
20 2-M6×1-10mm
Bonnet Body
4.72”(120mm)

0.1 (0.394in.) deep.

8.03”(204mm)

10 B
Diaphragm
0 0
Seat Retainer MPaG 0 500 1000 1500 2000 2500 3000
FLOW (LPM) (N₂)
Seat

[ NOTE]
· These tests were performed at ambient conditions. 3.86”dia
(98mm dia)

1.42” 1.10”
(36mm) (28mm) 5.35”(136mm)
Poppet
6.97”(177mm
Spring

Body

[ NOTE]
Fine Control Knob for
· A
 void turning the control knob excessively. High Solution Manual
· N
 o filter in this unit. Delivery Pressure
Adjustment

Square Load Spring

Threaded holes for the
rear surface installation.
2-M6×1-10mm
Bonnet
(0.394in.) deep.
8.03”(204mm)

Diaphragm

Seat Retainer

Seat

3.86”dia
(98mm dia)
26 1.42”
(36mm) (2
Poppet
PM) (N₂)

LM1 Series

Outline drawing
OUTLET PRESSURE
GAUGE

Threaded holes for the 4.65”dia

rear surface installation. (118mm dia)
2-M6×1-10mm
Body
4.72”(120mm)

(0.394in.) deep.
8.03”(204mm)

Bonnet
1/2 face seal-FEMALE 1/2 face seal-FEMALE [ NOTE]
· Dimensions are in inches

4.65”(118mm)
and (mm) for reference
OUTLET INLET only.
· Face to face length of the
3.86”dia
(98mm dia) male and female are the
same.
1.42” 1.10” · Subject to change without
(36mm) 5.35”(136mm) 6.22”(158mm)
(28mm)
notice.
6.97”(177mm)

Materials of construction Wetted surface finishes

MODEL & TYPE LM1SS Standard Ra
32µin. (0.80μm) or less
Wetted Parts (GRADE “B”)
Body SUS316L Standard Ra
roughness on machined surface
Poppet SUS316 (GRADE “C”)

Diaphragm Hastelloy® C-22

Seat PCTFE
Gasket to seal for gauge Ni Standard connections
Gasket PTFE
Non-wetted Parts 1/2” face to face length of the male and female are
Bonnet Nickel Plated Brass the same.……………………………………………… 6.22in. (158mm)
Control Knob SUS304 3/4” face to face length of the male and female are
O-ring NBR the same.………………………………………… 7.22in. (183.5mm)
JIS 10k-25A flange face to face length
……………………………………………………………… 8.78in. (223mm)

[NOTE]
· A ny combination of Face Seal male and/or female fittings are
available for inlet and outlet.
· S ize and configuration of pressure gauge port is 1/4” Face Seal
male.

Ordering information
PORTING PORT TYPE
GRADE
2 2 Ports W Welding Port
B Standard
SERIES MATERIAL 3 3 Ports P Screw Port
Not certified
L L Series SS SUS C particle counts 4 4 Ports G Special Specification

INLET OUTLET
PRESSURE PRESSURE
GAUGE GAUGE Inlet Outlet

L M 1
INLET/OUTLET
MODEL (LM1 Series) MAX. INLET PRESSURE PRESSURE GAUGE OUTLET PRESSURE RANGE Type Size Configuration OPTIONS
Point-of-Use 02 2MPa A5 0～2.5MPa 08 0～0.8MPa 0 NPT 6 3/8 M Male 2 IN/OUT Reverse Position
M1 Pressure Regulator
01 0.99MPa 2J 0～1.6MPa 06 0～0.6MPa 2 VCR 8 1/2 F Female Q Electropolish (GRADE"A")
99 Others A2 0～1MPa 04 0～0.4MPa 6 SWL A 3/4 B Tube Stub
G Special Specification
B6 0～0.6MPa 02 0～0.2MPa 7 UJR B 1
B3 0～0.3MPa 8 YR 0 Others
2K －0.1～0～1.6MPa T TOM
2R －0.1～0～1.0MPa P Tube Stub
R6 －0.1～0～0.6MPa
L Flange 6 10K-10A 0 Flange
R3 －0.1～0～0.3MPa
P Tube Stub 8 10K-15A A Tube Stub
GE Others
A 10K-20A
B 10K-25A
C 10K-32A
D 10K-40A
E 10K-50A
0 Others

9 0 0 Others

27
High Purity High Performance Point-of-Use Pressure Regulator
LM2 Series

LM2 Series
High Flow Rate Applications (Needle Type)

Inlet Pressure Max.2 MPaG (Max.290 PSIG)

Outlet Pressure Max.0.8 MPaG (Max.116 PSIG)
(Pressure Range: 0～0.2 MPa, 0～0.4 MPa, 0～0.6 MPa,
0～0.8 MPa) INLET PRESSURE
102PSIG (0.7MPaG)
Supply Pressure Effect 0.016 MPaG (2.32 PSIG) per 0.1 MPaG (14.5 PSIG) 73PSIG (0.5MPaG)
0.8
Proof Pressure 3.0 MPa (435 PSI), 1.5 MPa (Outlet
110 Side)
0.7 100
CV 1.69
90
0.6
OUTLET PRESSURE (PSIG)

Temperature –10˚C to +40˚C 80

Outboard Leakage Welding (W): 1×10−11 Pa・m3 0.5

/sec・He70 (1×10
−10
atm・cc/sec・He)
Screw (P): 1×10−9 Pa・m3 /sec ・He (1×10
0.4
60 −8
atm・cc/sec・He)
50
Approximate weight 5.0 kg (11 lbs. 0 oz.) 0.3 40
Installation Threaded holes on the rear0.2surface
30
20
[ NOTE] 0.1
10
1MPa = 10.2 kgf/cm2 = 145.04 PSI 0 0
MPaG 0 500 1000 1500 2000 2500 3000
1MPa = 7504.36 mmHg = 295.4 inHg
FLOW (LPM) (N₂)

Cross sectional drawing Flow characteristics

INLET PRESSURE
102PSIG (0.7MPaG)
73PSIG (0.5MPaG)
0.8
110
Fine Control Knob for 0.7 100
High Solution Manual
Delivery Pressure 90
0.6
OUTLET PRESSURE (PSIG)

Adjustment 80
0.5 70

Square Load Spring 0.4

60
50 Threaded holes for the
0.3 rear surface installation.
5.55”(141mm)

40
2-M6×1-10mm
0.2 30 (0.394in.) deep. Body
Bonnet
7.402”(188mm)

20
0.1
Bonnet
Diaphragm 10
3.50”dia (89mm dia)

Seat Retainer 0 0
MPaG 0 500 1000 1500 2000 2500 3000
FLOW (LPM) (N₂)
Seat

[ NOTE]
· These tests were performed at ambient conditions.

1.42” 1.83” 1.22”

Poppet (36mm) (46.5mm) (31mm) 5.67”(144mm)
Spring 7.17”(182mm)

Body

[ NOTE] Fine Control Knob for

· A
 void turning the control knob excessively. High Solution Manual
· N
 o filter in this unit. Delivery Pressure
Adjustment

Square Load Spring

Threaded holes for the
rear surface installation.
5.55”(141mm)

2-M6×1-10mm
Bonnet (0.394in.) deep.
7.402”(188mm)

Diaphragm
3.50”dia (89mm dia)

Seat Retainer

Seat

28
0 2000 2500 3000
PM) (N₂)

LM2 Series

Outline drawing
OUTLET PRESSURE
GAUGE

Threaded holes for the

rear surface installation.
5.55”(141mm)

2-M6×1-10mm Fine Control knob for High

(0.394in.) deep. Body
7.402”(188mm)

Bonnet
3/4 face seal-FEMALE 3/4 face seal-FEMALE
3.50”dia (89mm dia)

[ NOTE]

4.65”(118mm)
· Dimensions are in inches
and (mm) for reference
OUTLET INLET
only.
· Face to face length of the
male and female are the
1.42” 1.83” 1.22” same.
(36mm) (46.5mm) (31mm) 5.67”(144mm) 6.89”(175mm) · Subject to change without
7.17”(182mm) 8.386”(213mm) notice.

Materials of construction Wetted surface finishes

MODEL & TYPE LM2SSB LM2SSC Standard Ra
32µin. (0.80μm) or less
Wetted Parts (GRADE “B”)

Body SUS316L Standard Ra

roughness on machined surface
(GRADE “C”)
Poppet & Seat Retainer SUS316L
Diaphragm Hastelloy® C-22
Seat PTFE
Spring SUS316
Standard connections
Gasket to seal for gauge Ni
Gasket PTFE
1/2” NPT body length………………………… 3.50in. (89mm)
Non-wetted Parts
3/4”, 1/2” face to face length of the male and female
Bonnet Nickel Plated Brass
are the same.……………………………………… 6.89in. (175mm)
Control Knob SUS304
O-ring NBR [NOTE]
· A ny combination of Face Seal male and/or female fittings are
available for inlet and outlet.
· S ize and configuration of pressure gauge port is 1/4” Face Seal
male.

Ordering information
PORTING PORT TYPE
GRADE
2 2 Ports W Welding Port SEAT MATERIALS
B Standard
SERIES MATERIAL Not certified 3 3 Ports P Screw Port C PCTFE
L L Series SS SUS C particle counts 4 4 Ports G Special Specification F PFA
NH3 Special Fluoroplastic
INLET OUTLET
PRESSURE PRESSURE
GAUGE GAUGE Inlet Outlet

L M 2 SS
INLET/OUTLET
MODEL MAX. INLET PRESSURE PRESSURE GAUGE OUTLET PRESSURE RANGE Type Size Configuration OPTIONS
Point-of-Use 02 2MPa A5 0～2.5MPa 08 0～0.8MPa 0 NPT 6 3/8 M Male Q Electropolish (GRADE"A")
M2
Pressure Regulator 01 0.99MPa 2J 0～1.6MPa 06 0～0.6MPa 2 VCR 8 1/2 F Female G Special Specification
99 Others A2 0～1MPa 04 0～0.4MPa 6 SWL A 3/4 B Tube Stub
B6 0～0.6MPa 7 UJR B 1
2K －0.1～0～1.6MPa 8 YR 0 Others
2R －0.1～0～1.0MPa T TOM
R6 －0.1～0～0.6MPa P Tube Stub
GE Others
L Flange 6 10K-10A 0 Flange
P Tube Stub 8 10K-15A A Tube Stub
A 10K-20A
B 10K-25A
C 10K-32A
D 10K-40A
E 10K-50A
0 Others

9 0 0 Others

29
High Purity High Performance Point-of-Use Pressure Regulator
LL1 Series

LL1 Series
High Flow Rate Applications

Inlet Pressure Max.2 MPaG (Max.290 PSIG)

Outlet Pressure Max.0.8 MPaG (Max.116 PSIG)
Supply Pressure Effect 0.00158 MPaG (0.229 PSIG) per 0.1 MPaG (14.5 PSIG)
Proof Pressure 3.0 MPa (435 PSI)
CV 1.69 INLET PRESSURE
102PSIG (0.7MPaG)
Temperature –10˚C to +40˚C 0.6
80
Outboard Leakage 1×10−9 Pa・m3/sec・He (1×10−8 atm・cc/sec・He)
0.5 70
(GRADE"B")
OUTLET PRESSURE (PSIG)

60
Approximate weight 8.4 kg (18 lbs. 8 oz.) 0.4
50
Installation Threaded holes on the rear surface
0.3
40

[ NOTE] 0.2 30
1MPa = 10.2 kgf/cm2 = 145.04 PSI 20
1MPa = 7504.36 mmHg = 295.4 inHg 0.1
10

0 0
MPaG 0 500 1000 1500 2000 2500 3000
FLOW (LPM) (N₂)

Cross sectional drawing Flow characteristics

INLET PRESSURE
102PSIG (0.7MPaG)
0.6
80
Fine Control Knob for
High Solution Manual 0.5 70
Delivery Pressure
OUTLET PRESSURE (PSIG)

Adjustment 0.4
60

50
0.3
40

0.2 30

20
0.1 Body
10 Threaded holes for the
rear surface installation. Bonnet
0 0 2-M8×1.25-12mm
MPaG 0 500 1000 1500 2000 2500 3000 4.65”d
Diaphragm (0.472in.) deep.
4.53”(115mm)

Square Load Spring FLOW (LPM) (N₂)

7.80”(198mm)

Fin
fo
Metal to metal [ NOTE]
seal to atmosphere Seat · These tests were performed at ambient conditions.
Poppet

Seat Retainer

Fine Control Knob for 4.53”dia

High Solution Manual (115mm dia)
2.36”
Delivery Pressure (60mm)
Adjustment 1.22” 8.35”(212mm)
(31mm) 10.157”(258

[ NOTE] Threaded holes for the

· A
 void turning the control knob excessively. rear surface installation.
2-M8×1.25-12mm
Diaphragm (0.472in.) deep.
4.53”(115mm)

Square Load Spring

7.80”(198mm)

Metal to metal
seal to atmosphere Seat

Poppet

Seat Retainer

4.53”dia
(115mm dia)
2.36”
(60mm) 1.22”
30 (31mm)
LPM) (N₂)

LL1 Series

Outline drawing

OUTLET PRESSURE
Body
Threaded holes for the GAUGE
rear surface installation. Bonnet
2-M8×1.25-12mm INLET PRESSURE
(0.472in.) deep. 4.65”dia (118mm dia) GAUGE
4.53”(115mm)

3/4 face seal-MALE

7.80”(198mm)

Fine Control knob

for High 1.90”dia 3/4 face seal-MALE
(48.2mm dia)
[ NOTE]
· Dimensions are in inches
OUTLET INLET and (mm) for reference

3.15”(80mm)
only.
· Face to face length of the
4.53”dia male and female are the
(115mm dia)
2.36” same.
(60mm) 1.22” 8.35”(212mm) 1.81” 8.27”(210mm) · Subject to change without
(31mm) (46mm)
10.157”(258mm) notice.

Materials of construction Wetted surface finishes

MODEL & TYPE LL1SS Standard Ra

32µin. (0.80μm) or less
Wetted Parts (GRADE “B”)
Body SUS316L Standard Ra
roughness on machined surface
Poppet & Seat Retainer SUS316L (GRADE “C”)

Diaphragm Hastelloy® C-22

Seat PTFE
Spring SUS316
Standard connections
Gasket to seal for gauge Ni
3/4” face to face length of the male and female are
O-ring VIT0N®
the same.……………………………………………… 8.27in. (210mm)
Non-wetted Parts
JIS 10k-25A flange face to face length
Bonnet SUS304 ……………………………………………………………… 9.45in. (240mm)
Control Knob Aluminum
[NOTE]
· A ny combination of Face Seal male and/or female fittings are
available for inlet and outlet.
· S ize and configuration of pressure gauge port is 1/4” Face Seal
male.

Ordering information
PORTING PORT TYPE
GRADE
2 2 Ports W Welding Port
B Standard
SERIES MATERIAL 3 3 Ports P Screw Port
Not certified
L L Series SS SUS C particle counts 4 4 Ports G Special Specification

INLET OUTLET
PRESSURE PRESSURE
GAUGE GAUGE Inlet Outlet

L L 1
INLET/OUTLET
MODEL MAX. INLET PRESSURE PRESSURE GAUGE OUTLET PRESSURE RANGE Type Size Configuration OPTIONS
02 2MPa A5 0～2.5MPa 08 0～0.8MPa 2 VCR 6 3/8 M Male 2 IN/OUT Reverse Position
L1 Point-of-Use
Pressure Regulator 01 0.99MPa 2J 0～1.6MPa 06 0～0.6MPa 3 S-JSK 8 1/2 F Female Q Electropolish (GRADE"A")
A2 0～1MPa 04 0～0.4MPa 4 JSK A 3/4 B Tube Stub
G Special Specification
B6 0～0.6MPa 02 0～0.2MPa 6 SWL B 1
B3 0～0.3MPa 7 UJR 0 Others
2K －0.1～0～1.6MPa L Flange 6 10K-10A 0 Flange
2R －0.1～0～1.0MPa P Tube Stub 8 10K-15A A Tube Stub
R6 －0.1～0～0.6MPa A 10K-20A
R3 －0.1～0～0.3MPa B 10K-25A
GE Others C 10K-32A
D 10K-40A
E 10K-50A
0 Others

9 0 0 Others

31
High Purity High Performance Point-of-Use Pressure Regulator
LL2 Series

LL2 Series RoHS Directive Products

High Flow Rate Applications INLET PRESSURE

102PSIG (0.7MPaG)
0.6
80
Inlet Pressure 0.5 70 Max.2 MPaG (Max.290 PSIG)
OUTLET PRESSURE (PSIG)

Outlet Pressure0.4 60 Max.0.8 MPaG (Max.116 PSIG)

50
Supply Pressure Effect 0.00162 MPaG (0.235 PSIG) per 0.1 MPaG (14.5 PSIG)
0.3
40
Proof Pressure 3.0 MPa (435 PSI)
0.2 30
CV 20 2.42
0.1
Temperature 10 –10˚C to +40˚C
0 0
Outboard Leakage
MPaG 0 1×10−9 Pa・m
1000
3
/sec・He
2000(1×10
−8
atm・cc/sec・He)
3000 4000 5000
FLOW (LPM) (N₂)
(GRADE"B")
Approximate weight 12.2 kg (26 lbs. 14 oz.) Threaded holes for the Body

(P.C
P.C D. 10
rear surface installation.

.D. 5m
.
Installation Threaded holes on the rear surface 2-M8×1.25-12mm
Bon

4.1 m)
(0.472in.) deep.

8.543”(217mm)

3”
[ NOTE]
1MPa = 10.2 kgf/cm2 = 145.04 PSI

(115mm dia)
1MPa = 7504.36 mmHg = 295.4 inHg

4.53”dia
2.36”

Cross sectional drawing Flow characteristics (60mm) 4-0.748”dia

(4-19mm dia)
9.488”(241

11.024”(280mm
INLET PRESSURE
102PSIG (0.7MPaG)
Fine Control Knob for 0.6
High Solution Manual
80
Delivery Pressure
0.5 70
Adjustment
OUTLET PRESSURE (PSIG)

0.4 60

50
Square Load Spring 0.3
40

0.2 30

20
0.1
10

0 0
Bonnet MPaG 0 1000 2000 3000 4000 5000
FLOW (LPM) (N₂)

[ NOTE]
Diaphragm
· These tests were performed at ambient conditions.
Seat Retainer Seat

Spring

[ NOTE]
Fine Control Knob for
· A
 void turning the control knob excessively. High Solution Manual
Delivery Pressure
Adjustment

Square Load Spring

Bonnet

Diaphragm
32
Seat Retainer Seat
 LL2 Series

Outline drawing

OUTLET PRESSURE
JIS 10K-40A Flange GAUGE JIS 10K-40A Flange

Threaded holes for the Body 4.65”dia

(P.C
P.C D. 10
rear surface installation. .D. 5m (118mm dia)
.

2-M8×1.25-12mm
Bonnet
4.1 m)

(0.472in.) deep. Fine Control knob

8.543”(217mm)

3”

5.51”dia (140mm dia)

[ NOTE]
(115mm dia)
4.53”dia

· D i m e n s i o n s a re i n
OUTLET INLET
inches and (mm) for
reference only.
· Face to face length of
0.630”(16mm)
2.36” 3.50”dia the male and female
(60mm) 4-0.748”dia 9.488”(241mm) (89mm dia) 9.606”(244mm) are the same.
(4-19mm dia)
· S ubject to change
11.024”(280mm) without notice.

Materials of construction Wetted surface finishes

MODEL & TYPE LL2SS Standard Ra
32µin. (0.80μm) or less
Wetted Parts (GRADE “B”)
Body SUS316L Standard Ra
roughness on machined surface
Poppet & Seat Retainer SUS316L (GRADE “C”)

Diaphragm Hastelloy® C-22

Seat PTFE
Spring SUS316
Standard connections
Gasket to seal for gauge Ni
JIS 10k-40A flange face to face length
PTFE
O-ring …………………………………………………………… 9.606in. (244mm)
FKM
Non-wetted Parts [NOTE]
Bonnet SUS304 · A ny combination of Face Seal male and/or female fittings are
Control Knob A6063S available for inlet and outlet.
· S ize and configuration of pressure gauge port is 1/4” Face Seal
male.

Ordering information
PORTING PORT TYPE
GRADE
2 2 Ports W Welding Port
B Standard
SERIES MATERIAL Not certified 3 3 Ports P Screw Port
L L Series SS SUS C particle counts 4 4 Ports G Special Specification

INLET OUTLET
PRESSURE PRESSURE
GAUGE GAUGE Inlet Outlet

L L 2
INLET/OUTLET
MODEL MAX. INLET PRESSURE PRESSURE GAUGE OUTLET PRESSURE RANGE Type Size Configuration OPTIONS
02 2MPa A5 0～2.5MPa 08 0～0.8MPa 2 VCR 6 3/8 M Male 2 IN/OUT Reverse Position
L2 Point-of-Use
Pressure Regulator 01 0.99MPa 2J 0～1.6MPa 06 0～0.6MPa 3 S-JSK 8 1/2 F Female Q Electropolish (GRADE"A")
99 Others A2 0～1MPa 04 0～0.4MPa 4 JSK A 3/4
G Special Specification
B6 0～0.6MPa 02 0～0.2MPa 6 SWL B 1
B3 0～0.3MPa 7 UJR 0 Others
2K －0.1～0～1.6MPa L Flange 6 10K-10A 0 Flange
2R －0.1～0～1.0MPa 8 10K-15A
R6 －0.1～0～0.6MPa A 10K-20A
R3 －0.1～0～0.3MPa B 10K-25A
GE Others C 10K-32A
D 10K-40A
E 10K-50A
0 Others

9 0 0 Others

33
High Purity High Performance Point-of-Use Pressure Regulator
L18 Series

L18 Series RoHS Directive Products

Miniature Pressure Regulator

Standard Flow Rate Applications

Inlet Pressure Max.0.99 MPaG (Max.144 PSIG)

Outlet Pressure Max.0.7 MPaG (Max.102 PSIG)
(Pressure Range: 0～0.2 MPa, 0～0.4MPa, 0～0.6MPa,
0～0.7MPa) INLET PRESSURE
144PSIG (0.99MPaG)
Supply Pressure Effect 0.0007 MPaG (0.102 PSIG) per 0.05 MPaG (0.102 PSIG) 73PSIG (0.5MPaG)
0.6
Proof Pressure 1.5 MPa (218 PSI)
80
Temperature –10˚C to +40˚C 0.5
70
Outboard Leakage 1×10−11 Pa・m3/sec・He (1×10−10 atm・cc/sec・He)
OUTLET PRESSURE (PSIG)

0.4 60
Approximate weight IGS: 420 g (0 lbs. 15 oz.), Welding: 360 g (0 lbs. 13 oz.)
50
Installation Threaded holes on the0.3
rear surface
40

[ NOTE] 0.2 30
1MPa = 10.2 kgf/cm2 = 145.04 PSI
20
1MPa = 7504.36 mmHg = 295.4 inHg 0.1
10

0 0
MPaG 1 10 20 30 40 50
FLOW (LPM) (N₂)

Cross sectional drawing Flow characteristics

INLET PRESSURE
144PSIG (0.99MPaG)
73PSIG (0.5MPaG)
0.6
80
0.5 Fine Control Knob for High Solution
Fine Control Knob for 70
Manual Delivery Pressure Adjustment
High Solution Manual
OUTLET PRESSURE (PSIG)

Delivery Pressure 0.4 60

Adjustment
50
0.3
Bonnet 40

3.54”(90mm)
0.2 30
Square Load Spring
20
O-ring 0.1
10 1/4 face seal-FEMALE 1/4 face seal-FEMA
Diaphragm (Metal to metal
seal to atmosphere) 0 0
MPaG 1 10 20 30 40 50

OUTLET FLOW (LPM) (N₂) INLET

Seat Retainer
[ NOTE]
2.91”(74mm) 0.445”
Seat
· These tests were performed at ambient conditions. (11.3mm)
Threaded holes for the rear surface installation.
Poppet
2-M5X0. 8-7.0mm (0.276in.) deep.

Spring
(34mm dia)
1.34”dia

Body Fine Control Knob for High Solution

Fine Control Knob for Manual Delivery Pressure Adjustment
High Solution Manual
Delivery Pressure 0.591”
Adjustment (15mm)

Bonnet

Square Load Spring

[ NOTE]
· A O-ring
 void turning the control knob excessively. 1/4 face seal-FEMALE
· N
 o filter in this unit. Diaphragm (Metal to metal
seal to atmosphere)

OUTLET
Seat Retainer

2.91”(74m
Seat

34 Poppet
Threaded holes for the rear surface installation.
2-M5X0. 8-7.0mm (0.276in.) deep.
20 30 40 50 L18 Series
FLOW (LPM) (N₂)

Outline drawing
Fine Control Knob for High Solution
Manual Delivery Pressure Adjustment

□1.54”(□39mm)
3.54”(90mm)
Fine Control Knob for
High Solution Manual
Delivery Pressure
Adjustment
1/4 face seal-FEMALE 1/4 face seal-FEMALE

OUTLET INLET

3.58”(91mm)
2.91”(74mm) 0.445” [ NOTE]
(11.3mm)
· Dimensions are in inches

2.09”(53mm)
Threaded holes for the rear surface installation.
2-M5X0. 8-7.0mm (0.276in.) deep. and (mm) for reference
only.
· Face to face length of the
(34mm dia)
1.34”dia

male and female are the

same.
· Subject to change without
OUTLET INLET
0.591” notice.
(15mm) 0.315”(8mm)

Materials of construction Wetted surface finishes

MODEL & TYPE L18SS L18SH L18SV L18VH L18SH-CL2 Standard Ra
3.2µin. (0.08μm) or less
Wetted Parts (GRADE “S”)
Body SUS316L SUS316L V.I.M SUS316L
Hastelloy® ®
Poppet SUS316L SUS316L Hastelloy C-22
C-22 Standard connections
®
Diaphragm Hastelloy C-22
Seat PCTFE Fluoroplastics 1/4” face to face length of the male and female are
Gasket to seal the same.……………………………………………… 2.91in. (74mm)
Ni
for gauge
[NOTE]
Non-wetted Parts
· A ny combination of Face Seal male and/or female fittings are
Bonnet Chromium Plated Brass
available for inlet and outlet.
Control Knob Chromium Plated Brass · S ize and configuration of pressure gauge port is 1/4” Face Seal
O-ring NBR male.

Ordering information
MATERIAL PORTING PORT TYPE
SERIES SS SUS GRADE 2 2 Ports W Welding Port
L L Series SH SUS＋Hastelloy®C-22 S S 3 3 Ports G Special Specification
GAS APPLICATION

INLET OUTLET CL2 Chlorine Gas

PRESSURE PRESSURE
GAUGE GAUGE Inlet Outlet

L 1 8 S 2 0 1 0

MODEL MAX. INLET PRESSURE OUTLET PRESSURE RANGE Type Size Configuration OPTIONS
18 Point-of-Use Pressure Regulator 01 0.99MPa 07 0～0.7MPa 2 VCR 4 1/4 M Male G Special Specification
06 0～0.6MPa 7 UJR 0 Others F Female
04 0～0.4MPa 8 YR 0 Others
02 0～0.2MPa F Flat Seal
U UPG

9 0 0 Others

35
High Purity High Performance Point-of-Use Pressure Regulator
L18H Series

L18H Series RoHS Directive Products

Miniature Pressure Regulator

Medium Flow Rate Applications INLET PRESSURE
73PSIG (0.5MPaG)
58PSIG (0.4MPaG)
43.5PSIG (0.3MPaG)
0.4

Inlet Pressure 50
Max.0.99 MPaG (Max.144 PSIG)
Outlet Pressure0.3 Max.0.7 MPaG (Max.102 PSIG)
OUTLET PRESSURE (PSIG)

40 (Pressure Range: 0～0.2 MPa, 0～0.4 MPa, 0～0.6 MPa,

0～0.7 MPa) Fine Control Knob for High Solution
Manual Delivery Pressure Adjustment
30
Proof Pressure0.2 1.5 MPa (218 PSI)
Temperature 20
–10˚C to +40˚C
Outboard Leakage
0.1 1×10−11 Pa・m3/sec・He (1×10−10 atm・cc/sec・He)
Approximate weight 10 0.36 kg (0 lbs. 13 oz.)
Installation Threaded holes on the rear surface
0 0
MPaG 0 10 20 30 40 50 60 70 80 90 100
[ NOTE] FLOW (LPM) (N₂) 1/4 face seal-MALE
1MPa = 10.2 kgf/cm2 = 145.04 PSI
1MPa = 7504.36 mmHg = 295.4 inHg
OUTLET

2.91”(74mm)

Threaded holes for the rear surface installation.

Cross sectional drawing Flow characteristics 2-M5X0. 8-7.0mm (0.276in.) deep.

INLET PRESSURE
73PSIG (0.5MPaG)
58PSIG (0.4MPaG)
Fine Control Knob for 43.5PSIG (0.3MPaG)
0.4
High Solution Manual
Delivery Pressure 0.591”
50
(15mm)
Adjustment

0.3
OUTLET PRESSURE (PSIG)

40
Bonnet

0.2 30
Square Load Spring

Diaphragm 20

0.1
Metal to metal 10
seal to atmosphere

0 0
Seat Retainer MPaG 0 10 20 30 40 50 60 70 80 90 100
Seat
FLOW (LPM) (N₂)
Poppet
[ NOTE]
· These tests were performed at ambient conditions.

Body

[ NOTE]
· A
 void turning the control knob excessively.
· N
 o filter in this unit. Fine Control Knob for
High Solution Manual
Delivery Pressure
Adjustment

Bonnet

Square Load Spring

Diaphragm

Metal to metal
seal to atmosphere
36
Seat Retainer
Seat
 L18H Series
INLET PRESSURE
73PSIG (0.5MPaG)
58PSIG (0.4MPaG)
43.5PSIG (0.3MPaG)

Outline drawing

Fine Control Knob for High Solution

Manual Delivery Pressure Adjustment

3.54”(90mm)
70 80 90 100
1/4 face seal-MALE 1/4 face seal-MALE

OUTLET INLET

2.91”(74mm)
0.445”
(11.3mm)
Threaded holes for the rear surface installation.
2-M5X0. 8-7.0mm (0.276in.) deep.
[ NOTE]
· Dimensions are in inches and (mm)

(34mm dia)
for reference only.

1.34”dia
· F ace to face length of the male
and female are the same.
· Subject to change without notice.
0.591”
(15mm)

Materials of construction Wetted surface finishes

MODEL & TYPE L18HSS L18HSH L18HSV L18HVH L22HSH-CL2 Standard Ra (GRADE “S”) 3.2µin. (0.08μm) or less
Wetted Parts
Standard Ra (GRADE “A”) 7µin. (0.18μm) or less
Body SUS316L SUS316L V.I.M SUS316L
Standard Ra (GRADE “B”) 32µin. (0.80μm) or less
Hastelloy®
Poppet SUS316L SUS316L Hastelloy® C-22
C-22
Diaphragm Hastelloy® C-22
Seat PCTFE Fluoroplastics Standard connections
Gasket to seal
Ni
for gauge 1/4” face to face length of the male and female
Non-wetted Parts are the same.……………………………………… 2.91in. (74mm)
Bonnet Chromium Plated Brass
[NOTE]
Control Knob Chromium Plated Brass
· A ny combination of Face Seal male and/or female fittings are
O-ring NBR available for inlet and outlet.
· S ize and configuration of pressure gauge port is 1/4” Face Seal
male.

Ordering information
GRADE
MATERIAL S S PORTING PORT TYPE
SERIES SS SUS A Electropolish 2 2 Ports W Welding Port
L L Series SH SUS＋Hastelloy®C-22 B Standard 3 3 Ports G Special Specification
GAS APPLICATION
CL2 Chlorine Gas
INLET OUTLET
PRESSURE PRESSURE
GAUGE GAUGE Inlet Outlet

L 1 8 H 0 1 0
SEAT MATERIALS

MODEL MAX. INLET PRESSURE OUTLET PRESSURE RANGE CONNECTION F PFA

18H Point-of-Use Pressure Regulator 01 0.99MPa 07 0～0.7MPa 8 4 M YR1/4 Male
OPTIONS
06 0～0.6MPa F 4 0 Flat Seal 1/4
G Special Specification
04 0～0.4MPa U 4 0 UPG1/4
02 0～0.2MPa 2 4 M VCR1/4 Male
2 4 F VCR1/4 Female
9 0 0 Others

37
 High Performance High Pressure Regulator
R20 Series

INLET PRESSURE
1450PSIG (10MPaG)
145PSIG (1MPaG)

R20 Series
1.1
150
1.0
140
0.9 130
120
OUTLET PRESSURE (PSIG)

0.8
110
0.7 100

High Pressure Regulator

0.6 90
80
0.5 70
0.4 60
50
0.3 40
0.2 30
Inlet Pressure
0.1
20 Max.24 MPaG (Max.3,480 PSIG) OUT
10 INLET PRESSURE
0 1450PSIG (10MPaG)
Outlet Pressure
0
0 Max.0.99
50 MPaG
100 (Max.144 150PSIG) 200 250
MPaG 145PSIG (1MPaG)
1.1 (Pressure Range: 0～0.2
FLOW MPa, 0～0.4 MPa, 0～0.6 MPa,
(LPM) (N₂)
150
1.0
1400～0.99 MPa) Washer for
0.9 130 Threaded holes for the

5.31”(135mm)
Supply Pressure Effect 1200.00086 MPaG (0.12 PSIG) per 0.1 MPaG (14.5 PSIG) Nut for Pan

3.23”(82mm)
rear surface installation.
OUTLET PRESSURE (PSIG)

0.8
110 2-M5×0.8-7.0mm F
Proof Pressure 0.7 10031.5 MPa (4,567 PSI), 1.5 MPa (Outlet Side) (0.276in.) deep.
0.6 90
CV 0.5
800.08
70
60
Temperature 0.4
50
–10˚C to +40˚C
0.3 40
Outboard Leakage0.2 30
Screw (P); 1×10−9 Pa・m3/sec・He (1×10−8 atm・cc/sec・He)
20Welding (W); 1×10−11 Pa・m3/sec・He (1×10−10 atm・cc/sec・He) 0.874”
0.1
10 (22.2mm) 0.689”
0 3 1.89”dia
Internal Volume 0 4.67
0 cc (0.2850 in ) w/o fittings
100 150 200 250 (48mm dia) (17.5mm) 4.65”(118mm)
MPaG
FLOW (LPM) (N₂)
Approximate weight 1.29 kg (2 lbs.14 oz.) 1.34”(34mm)

Installation Threaded holes on the rear surface or Panel mounting Threaded holes for the

5.31”(135mm)
3.23”(82mm)
rear surface installation.
[ NOTE] 2-M5×0.8-7.0mm
(0.276in.) deep.
1MPa = 10.2 kgf/cm2 = 145.04 PSI
1MPa = 7504.36 mmHg = 295.4 inHg Fine Control Knob for
High Solution Manual
Delivery Pressure
Adjustment

0.874”
Bonnet (22.2mm)
1.89”dia 0.689”
Tied Diaphragm (Optional) (48mm dia) (17.5mm)
Cross sectional drawing Square Load Spring 1.34”(34mm)
4.65”(118mm

Nut and Washer for

Panel Mounting
Cap
O-ring

Diaphragm Seat
(Metal to metal seal
to atmosphere.) Fine Control Knob for Diaphragm Linked
Seat High
Retainer
Solution Manual Poppet Design for
Delivery Pressure Positive Shutoff [ NOTE]
Poppet
Adjustment Operating the Tied Diaphragm
Type: In order to minimize
Spring Bonnet
premature wear of regulator’s
internal parts. Be sure not to
Square Load Spring close regulator while under
Nut and Washer for
Panel Mounting pressure.
Cap
O-ring
Filter
Diaphragm Seat
(Metal to metal seal Permanent lot number and
to atmosphere.) serial number marking Seat Retainer Flow characteristics
Diaphragm Linked
Poppet Design for
Positive Shutoff
Poppet
INLET PRESSURE
1450PSIG (10MPaG)
Spring 145PSIG (1MPaG)
1.1
150
1.0
140
0.9 130
120
OUTLET PRESSURE (PSIG)

0.8
110
0.7 100
0.6 90
Filter 80
0.5 70
Permanent lot number and 0.4 60
serial number marking 50
0.3 40
[ NOTE] 0.2 30
20
· A void turning the control knob excessively. 0.1
10
· S eries R25, R26 are recommended for Chroline (CL 2) service and Nitrous 0 0
0 50 100 150 200 250
Oxide (N2O) service. MPaG
FLOW (LPM) (N₂)

[ NOTE]
· These tests were performed at ambient conditions.

38
 R20 Series

Outline drawing
5.75”(146mm)

OUTLET PRESSURE GAUGE INLET PRESSURE GAUGE

Washer for Panel Mounting

Threaded holes for the
5.31”(135mm)

Nut for Panel Mounting

3.23”(82mm)

rear surface installation.

2-M5×0.8-7.0mm Fine Control Knob
(0.276in.) deep.
1/4 face seal-MALE 1/4 face seal-MALE

[ NOTE]
OUTLET INLET · Dimensions are in inches
0.874” 1.46”dia (37mm dia) Hole
and (mm) for reference
(22.2mm) 0.689” Required For Panel Mounting only.
1.89”dia 3.23”(82mm)
(48mm dia) (17.5mm) 4.65”(118mm)
(Male Face to Male Face Length) · Subject to change without
3.90”(99mm)
1.34”(34mm) (Female Face to Female Face Length) notice.

Materials of construction Wetted surface finishes

MODEL & TYPE R20SS R20SH R20SS-CO Standard Ra
32µin. (0.80μm) or less
Wetted Parts (GRADE “B”&“C”)
Body SUS316L Optional Ra
7µin. (0.18μm) or less
Poppet & Seat Retainer SUS316L Hastelloy® C-22 SUS316L (GRADE “A”)

Diaphragm SUS316L Hastelloy® C-22 SUS316L

Seat PCTFE
Spring SUS316
Standard connections
Gasket PCTFE and PTFE
1/4” NPT body length………………………… 1.93in. (48mm)
Gasket to seal for gauge Ni SUS316
Non-wetted Parts
1/4” face to face length of the male and female
m Linked
Bonnet Nickel Plated Brass
are the same. (Male)………………………… 3.23in. (82mm)
esign for
hutoff
Cap Nickel Plated Brass
1/4” face to face length of the male and female
are the same. (Female)…………………… 3.90in. (99mm)
Control Knob ABS Resin
O-ring NBR 1/4” sus tube fitting length……………… 4.37in. (111mm)
[NOTE]
· A ny combination of Face Seal male and/or female fittings are
available for inlet and outlet.
· S ize and configuration of pressure gauge port is 1/4” Face Seal
male.

Ordering information
GRADE
A Electropolish PORTING PORT TYPE
MATERIAL
2 2 Ports W Welding Port
SS SUS B Standard
SERIES 3 3 Ports P Screw Port
SUS＋ Not certified
SH Hastelloy®C-22 C particle counts 4 4 Ports G Special Specification
R R Series GAS APPLICATION
CO Corbon Monoxide
INLET OUTLET
PRESSURE PRESSURE
GAUGE GAUGE Inlet Outlet

R 2 0
SEAT MATERIALS

INLET/OUTLET
MAX. INLET PRESSURE PRESSURE GAUGE OUTLET PRESSURE RANGE Type Size Configuration I Vespel
16 24MPa 5A 0～25MPa 10 0～0.99MPa 1 W21－14 R Right M Male E PEEK
10 14.8MPa H8 0～16MPa 06 0～0.6MPa 2 W22－14 L Left F Female
OPTIONS
A5 0～2.5MPa 04 0～0.4MPa 6 W26－14
A Tied Diaphragm
2J 0～1.6MPa 02 0～0.2MPa
MODEL 0 NPT 2 1/8
A2 0～1MPa 2 IN/OUT Reverse Position
20 High Pressure Regulator 2 VCR 4 1/4
B6 0～0.6MPa Q Electropolish (GRADE"A")
3 S-JSK 6 3/8
B3 0～0.3MPa T Vacuum-Proof
4 JSK 8 1/2
2K －0.1～0～1.6MPa
6 SWL 0 Others G Special Specification
2R －0.1～0～1.0MPa
7 UJR
R6 －0.1～0～0.6MPa
R3 －0.1～0～0.3MPa 9 0 0 Others
GE Others

39
 High Performance Point-of-Use Pressure Regulator
R25 Series
INLET PRESSURE
138PSIG (0.95MPaG)
73PSIG (0.5MPaG)
43.5PSIG (0.3MPaG)

R25 Series
80
0.5
70
OUTLET PRESSURE (PSIG)

60
0.4
50

Point-of-Use Pressure Regulator

0.3
40

0.2 30

20
0.1
Inlet Pressure 10
Max.6 MPaG (Max.870 PSIG) INLET PRESSURE
138PSIG (0.95MPaG)
Outlet Pressure
0 Max.0.99 MPaG (Max.144 PSIG) 73PSIG (0.5MPaG)
0 50 100 43.5PSIG (0.3MPaG)
MPaG (Pressure Range: 0～0.2 MPa, 0～0.4 MPa, 0～0.6 MPa,
80 FLOW (LPM) (N₂)
0.5 0～0.99
70
MPa)
Washer for Pa
Supply Pressure Effect 0.00178 MPaG (0.27 PSIG) per 0.1 MPaG (14.5 PSIG) Threaded holes for the

5.83”(148mm)
3.74”(95mm)
OUTLET PRESSURE (PSIG)

0.4
60
rear surface installation. Nut for Panel
Proof Pressure 31.5
50 MPa (4,567 PSI), 1.5 MPa (Outlet Side) 2-M5×0.8-7.0mm
Fine
(0.276in.) deep.
CV 0.3 0.12
40

Temperature 0.2 –10˚C

30 to +40˚C
Outboard Leakage Screw
20 (P); 1×10−9 Pa・m3/sec・He (1×10−8 atm・cc/sec・He)
0.1
Welding
10 (W); 1×10−11 Pa・m3/sec・He (1×10−10 atm・cc/sec・He) 0.874”
1.
1.89”dia Re
(22.2mm) 0.689”
Internal Volume 0 4.67 cc (0.28 in3 ) w/o fittings (48mm dia) (17.5mm) 4.65”(118mm)
0 50 100
MPaG
Approximate weight 0.96 kg (2 lbs. 2 oz.) FLOW (LPM) (N₂) 1.34”(34mm)

Installation Threaded holes on the rear surface or Panel mounting

Threaded holes for the

5.83”(148mm)
3.74”(95mm)
rear surface installation.
[ NOTE] 2-M5×0.8-7.0mm
1MPa = 10.2 kgf/cm2 = 145.04 PSI Fine Control Knob for (0.276in.) deep.
1MPa = 7504.36 mmHg = 295.4 inHg High Solution Manual
Delivery Pressure
Adjustment

0.874”
(22.2mm) 1.89”dia 0.689”
Bonnet Tied Diaphragm (Optional) (48mm dia) (17.5mm) 4.65”(118mm
Nut and Washer forCross sectional drawing 1.34”(34mm)
Panel Mounting
Square Load Spring
O-ring
Cap

Fine Control Knob for

Diaphragm w/Teflon® Seat
High Solution Manual
Delivery Pressure Diaphragm Linked
Seat Retainer
Adjustment Poppet Design for [ NOTE]
Positive Shutoff
Poppet Operating the Tied Diaphragm
Type: In order to minimize
Spring
premature wear of regulator’s
Bonnet
Nut and Washer for internal parts. Be sure not to
Panel Mounting close regulator while under
Square Load Spring
pressure.
O-ring
Cap
Filter
Diaphragm w/Teflon® Permanent lot number and Seat
serial number marking
Seat Retainer
FlowDiaphragm
characteristics
Linked
Poppet Design for
Positive Shutoff INLET PRESSURE
Poppet 138PSIG (0.95MPaG)
73PSIG (0.5MPaG)
Spring 43.5PSIG (0.3MPaG)
80
0.5
70
OUTLET PRESSURE (PSIG)

60
0.4
50

Filter 0.3
40
Permanent lot number and
0.2 30
serial number marking
20
[ NOTE] 0.1
10
· A void turning the control knob excessively.
· For purging at 870 PSIG (6 MPaG) and higher, operate the unit in consideration 0
0 50 100
MPaG
of changing the outlet pressure by the supply pressure effect. FLOW (LPM) (N₂)

[ NOTE]
· These tests were performed at ambient conditions.

40
 R25 Series

Outline drawing
OUTLET PRESSURE GAUGE

Washer for Panel Mounting

Threaded holes for the
5.83”(148mm)
3.74”(95mm)

rear surface installation. Nut for Panel Mounting

2-M5×0.8-7.0mm
Fine Control Knob
(0.276in.) deep.

1/4 face seal-MALE 1/4 face seal-MALE

[ NOTE]
· Dimensions are in inches
OUTLET INLET
1.46”dia (37mm dia) Hole and (mm) for reference
0.874” Required For Panel Mounting only.
(22.2mm) 1.89”dia 0.689” 3.23”(82mm)
(48mm dia) (17.5mm) 4.65”(118mm) (Male Face to Male Face Length) · Subject to change without
1.34”(34mm) 3.90”(99mm) notice.
(Female Face to Female Face Length)

Materials of construction Wetted surface finishes

MODEL & TYPE R25SS R25SH R25SH-CL2 R25SS-N20 R25SS-CO Standard Ra
32µin. (0.80μm) or less
Wetted Parts (GRADE “B”&“C”)
Body SUS316L Optional Ra
7µin. (0.18μm) or less
Poppet & Seat (GRADE “A”)
SUS316L Hastelloy® C-22 SUS316L
Retainer
Diaphragm SUS316L Hastelloy® C-22 SUS316L

Seat PCTFE
Special
Vespel® PCTFE
Standard connections
Fluoroplastics
Spring SUS316 1/4” NPT body length………………………… 1.93in. (48mm)
Gasket PCTFE and PTFE 1/4” face to face length of the male and female
hragm Linked
pet Design for Gasket to seal are the same. (Male)………………………… 3.23in. (82mm)
ive Shutoff Ni SUS316
for gauge
1/4” face to face length of the male and female
Non-wetted Parts
are the same. (Female)…………………… 3.90in. (99mm)
Bonnet Nickel Plated Brass
1/4” sus tube fitting length……………… 4.37in. (111mm)
Cap Nickel Plated Brass
Control Knob ABS Resin [NOTE]
O-ring NBR · A ny combination of Face Seal male and/or female fittings are
available for inlet and outlet.
· S ize and configuration of pressure gauge port is 1/4” Face Seal
male.

Ordering information
GRADE
A Electropolish PORTING PORT TYPE
MATERIAL
2 2 Ports W Welding Port
SS SUS B Standard GAS APPLICATION
SERIES 3 3 Ports P Screw Port
SUS＋ Not certified CO Corbon Monoxide
SH Hastelloy®C-22 C particle counts 4 4 Ports G Special Specification
R R Series
CL2 Chlorine
N2O Nitorous Oxide
INLET OUTLET
PRESSURE PRESSURE
GAUGE GAUGE Inlet Outlet

R 2 5
SEAT MATERIALS

INLET/OUTLET T PTFE
MAX. INLET PRESSURE PRESSURE GAUGE OUTLET PRESSURE RANGE Type Size Configuration
I Vespel
04 6MPa 5A 0～25MPa 10 0～0.99MPa 1 W21－14 R Right M Male
E PEEK
01 0.99MPa H8 0～16MPa 06 0～0.6MPa 2 W22－14 L Left F Female
0～10MPa F PFA
2A 04 0～0.4MPa 6 W26－14
6B 0～6MPa 02 0～0.2MPa OPTIONS
0 NPT 2 1/8 A Tied Diaphragm
A5 0～2.5MPa
2 VCR 4 1/4
2J 0～1.6MPa
MODEL 3 S-JSK 6 3/8 2 IN/OUT Reverse Position
A2 0～1MPa
4 JSK 8 1/2 Q Electropolish (GRADE"A")
25 Point-of-Use Pressure Regulator B6 0～0.6MPa
6 SWL 0 Others T Vacuum-Proof
B3 0～0.3MPa
－0.1～0～1.6MPa 7 UJR
2K G Special Specification
2R －0.1～0～1.0MPa 9 0 0 Others
R6 －0.1～0～0.6MPa
R3 －0.1～0～0.3MPa
R1 －0.1～0～0.1MPa
GE Others

41
High Performance Point-of-Use Pressure Regulator
R26 Series

R26 Series
Point-of-Use Pressure Regulator
INLET PRESSURE
145PSIG (1.0MPaG)
Inlet Pressure Max.2 MPaG (Max.290 PSIG) 102PSIG (0.7MPaG)
73PSIG (0.5MPaG)
Outlet Pressure Max.0.99 MPaG (Max.144 PSIG) 43.5PSIG (0.3MPaG)
0.6
(Pressure Range: 0～0.2 MPa, 0～0.4 MPa, 0～0.6 MPa,
80
0.5 0～0.99 MPa)
70
OUTLET PRESSURE (PSIG)

Supply Pressure
0.4
Effect
60 0.0019 MPaG (0.27 PSIG) per 0.1 MPaG (14.5 PSIG)
Proof Pressure 50 22.2 MPa (3,219 PSI)
0.3
40
CV 0.18
0.2 30
Temperature 20
–10˚C to +40˚C
0.1
Outboard Leakage 10 Screw (P); 1×10−9 Pa・m3/sec・He (1×10−8 atm・cc/sec・He)
0 0 Welding (W); 1×10−11 Pa・m3/sec・He (1×10−10 atm・cc/sec・He)
MPaG 0 50 100 150 200
Approximate weight 1.1 kg (21 lbs. 7 oz.) FLOW (LPM) (N₂)

Installation Threaded holes on the surface

4.76”(121mm)
Threaded holes for the
(OPTIONS: Surface panel mounting) rear surface installation.

5.83”(148mm)
2-M5×0.8-7.0mm
(0.276in.) deep.
[ NOTE]
1MPa = 10.2 kgf/cm2 = 145.04 PSI
1MPa = 7504.36 mmHg = 295.4 inHg

22.2
1.06”
(27mm)
0.874”
(22.2mm) 1.89”dia 0.689”
(48mm dia) (17.5mm)
Cross sectional drawing Flow characteristics 4.80”(122mm)

INLET PRESSURE
Fine Control Knob for
145PSIG (1.0MPaG)
High Solution Manual
102PSIG (0.7MPaG)
Delivery Pressure 73PSIG (0.5MPaG)
Adjustment 43.5PSIG (0.3MPaG)
0.6
80
0.5
70
OUTLET PRESSURE (PSIG)

0.4 60

50
0.3
40

0.2 30

20
Square Load Spring 0.1
10
O-ring 0 0
0 50 100 150 200
Bonnet MPaG
FLOW (LPM) (N₂)
Diaphragm
Seat [ NOTE]
Seat Retainer · These tests were performed at ambient conditions.
Poppet

Spring

Body
[ NOTE]
· A void turning the control knob excessively.
· For purging at 870 PSIG (6 MPaG) and higher, operate the unit in consideration Fine Control Knob for
High Solution Manual
of changing the outlet pressure by the supply pressure effect.
Delivery Pressure
· N o filter in this unit. Adjustment

42
Square Load Spring
O-ring
 R26 Series

Outline drawing
OUTLET PRESSURE GAUGE

4.76”(121mm)
Threaded holes for the
rear surface installation.
5.83”(148mm)

2-M5×0.8-7.0mm Fine Control Knob

(0.276in.) deep.
1/4 face seal-MALE 1/4 face seal-MALE

[ NOTE]
22.2 OUTLET INLET · Dimensions are in inches
M ad

1.06” e in J apan

(27mm) and (mm) for reference

0.874” only.
(22.2mm) 1.89”dia 0.689” 3.23”(82mm)
(48mm dia) (17.5mm)
(Male Face to Male Face Length) · Subject to change without
4.80”(122mm) 3.90”(99mm)
(Female Face to Female Face Length) notice.

Materials of construction Wetted surface finishes

MODEL & TYPE R26SS R26SS-CO Standard Ra
32µin. (0.80μm) or less
Wetted Parts (GRADE “B”)
Body SUS316L Optional Ra
7µin. (0.18μm) or less
Poppet & Seat Retainer SUS316L (GRADE “A”)

Diaphragm SUS316L
Seat PTFE
Spring SUS316
Standard connections
Gasket PTFE
1/4” NPT body length………………………… 1.93in. (48mm)
Gasket to seal for gauge Ni SUS316
1/4” face to face length of the male and female
Non-wetted Parts
are the same. (Male)………………………… 3.23in. (82mm)
Bonnet Nickel Plated Brass
1/4” face to face length of the male and female
Control Knob ABS Resin
are the same. (Female)…………………… 3.90in. (99mm)
O-ring NBR
1/4” sus tube fitting length……………… 4.37in. (111mm)
[NOTE]
· A ny combination of Face Seal male and/or female fittings are
available for inlet and outlet.
· S ize and configuration of pressure gauge port is 1/4” Face Seal
male.

Ordering information
GRADE
A Electropolish PORTING PORT TYPE
2 2 Ports W Welding Port
B Standard
SERIES MATERIAL 3 3 Ports P Screw Port
Not certified
R R Series SS SUS C particle counts 4 4 Ports G Special Specification

INLET OUTLET
PRESSURE PRESSURE
GAUGE GAUGE Inlet Outlet

R 2 6
INLET/OUTLET
MAX. INLET PRESSURE PRESSURE GAUGE OUTLET PRESSURE RANGE Type Size Configuration OPTIONS
02 2MPa 6B 0～6MPa 10 0～0.99MPa 0 NPT 2 1/8 M Male 2 IN/OUT Reverse Position
01 0.99MPa A5 0～2.5MPa 06 0～0.6MPa 2 VCR 4 1/4 F Female Q Electropolish (GRADE"A")
2J 0～1.6MPa 04 0～0.4MPa 3 S-JSK 6 3/8 M Surface Panel Mounting
2K －0.1～0～1.6MPa 02 0～0.2MPa 4 JSK 0 Others
G Special Specification
2R －0.1～0～1.0MPa 6 SWL
MODEL R6 －0.1～0～0.6MPa 7 UJR
26 Point-of-Use Pressure Regulator R3 －0.1～0～0.3MPa
9 0 0 Others
GE Others

43
High Performance Point-of-Use Pressure Regulator
R35 Series

R35 Series RoHS Directive Products

Medium Flow Applications

Inlet Pressure Max.6 MPaG (Max.870 PSIG)

Outlet Pressure Max.0.99 MPaG (Max.144 PSIG)
(Pressure Range: 0～0.2 MPa, 0～0.4 MPa, 0～0.6 MPa,
0～0.99 MPa)
Supply Pressure Effect 0.0006 MPaG (0.087 PSIG) per 0.1 MPaG (14.5 PSIG) INLET PRESSURE
145PSIG (1.0MPaG)
Proof Pressure 9 MPa (1,305 PSI) 102PSIG (0.7MPaG)
87PSIG (0.6MPaG)
CV 0.35 0.6
90

80
Temperature –10˚C to +40˚C
0.5
70
OUTLET PRESSURE (PSIG)

Outboard Leakage Screw (P); 1×10−9 Pa・m3/sec・He (1×10−8 atm・cc/sec・He)

60
Welding (W); 1×10−11 Pa・m3/sec・He0.4(1×10−10 atm・cc/sec・He)
50
Internal Volume 19.74 cc (1.2 in3) w/o fittings 0.3
40
Approximate weight 1.95 kg (4 lbs. 5 oz.) 0.2 30

Installation Threaded holes on the rear surface or Panel

20 mounting
0.1
10
[ NOTE] 0 0
0 100 200 300 400 500
1MPa = 10.2 kgf/cm2 = 145.04 PSI MPaG
FLOW (LPM) (N₂)
1MPa = 7504.36 mmHg = 295.4 inHg

Cross sectional drawing Flow characteristics

INLET PRESSURE
145PSIG (1.0MPaG)
102PSIG (0.7MPaG)
87PSIG (0.6MPaG)
90
0.6
Fine Control Knob for 80
High Solution Manual 0.5
70
OUTLET PRESSURE (PSIG)

Delivery Pressure
Adjustment 60
0.4
50
0.3
40
Square Load Spring
0.2 30

20 Was
0.1 Threaded holes for the Nut
3.98”(101mm)

10
rear surface installation.
6.42”(163mm)

Bonnet 0 2-M5×0.8-7.0mm
0
MPaG 0 100 200 300
(0.276in.) deep. 400 500
Diaphragm FLOW (LPM) (N₂)

Seat [ NOTE]
Seat Retainer
Poppet · These tests were performed at ambient conditions.

0.874”
(22.2mm) 1.46
0.728” Requ
2.36”dia
(18.5mm) 4.84”(123mm)
(60mm dia)
1.89”(48mm)
Body

[ NOTE]
Fine Control Knob for
· A void turning the control knob excessively. High Solution Manual
· For purging at 870 PSIG (6 MPaG) and higher, operate the unit in consideration Delivery Pressure
Adjustment
of changing the outlet pressure by the supply pressure effect.
· No filter in this unit.

Square Load Spring

Threaded holes for the

3.98”(101mm)

rear surface installation.

6.42”(163mm)

Bonnet 2-M5×0.8-7.0mm
(0.276in.) deep.
Diaphragm

Seat
Seat Retainer
44 Poppet
FLOW (LPM) (N₂)

R35 Series

Outline drawing
OUTLET PRESSURE GAUGE

Washer for Panel Mounting

Threaded holes for the Nut for Panel Mounting
rear surface installation. 3.98”(101mm)
6.42”(163mm)

2-M5×0.8-7.0mm Fine Control Knob

(0.276in.) deep.

1/4 face seal-MALE 1/4 face seal-MALE

[ NOTE]
OUTLET INLET · Dimensions are in inches
and (mm) for reference
0.874”
(22.2mm) 1.46”dia (37 mm dia) Hole only.
2.36”dia 0.728” Required For Panel Mounting · Subject to change without
(18.5mm) 4.84”(123mm) 4.09”(104mm)
(60mm dia) notice.
1.89”(48mm)

Materials of construction Wetted surface finishes

MODEL & TYPE R35SS R35SH R35SH-CL2 R35SS-N20 R35SS-CO Standard Ra
32µin. (0.80μm) or less
Wetted Parts (GRADE “B”&“C”)
Body SUS316L Optional Ra
7µin. (0.18μm) or less
Poppet & Seat (GRADE “A”)
®
SUS316L Hastelloy C-22 SUS316L
Retainer
Diaphragm SUS316L Hastelloy® C-22 SUS316L

Seat PCTFE
Special
Vespel® PCTFE
Standard connections
Fluoroplastics
Spring SUS316 1/4” NPT body length………………………… 2.36in. (60mm)
Gasket PTFE 1/4” face to face length of the male and female
Gasket to seal
Ni SUS316 are the same. (Male)………………………… 4.09in. (104mm)
for gauge
1/4” face to face length of the male and female
Non-wetted Parts
are the same. (Female)…………………… 4.33in. (110mm)
Bonnet Nickel Plated Brass
3/8”, 1/2” face to face length of the male and female
Control Knob ABS Resin
are the same.……………………………………… 4.72in. (120mm)
O-ring NBR
3/8” sus tube fitting length……………… 4.96in. (126mm)
[NOTE]
· A ny combination of Face Seal male and/or female fittings are
available for inlet and outlet.
· S ize and configuration of pressure gauge port is 1/4” Face Seal
male.

Ordering information
GRADE
A Electropolish PORTING PORT TYPE
MATERIAL
2 2 Ports W Welding Port
SS SUS B Standard
SERIES 3 3 Ports P Screw Port GAS APPLICATION
SUS＋ Not certified
R R Series SH Hastelloy®C-22 C particle counts 4 4 Ports G Special Specification CO Corbon Monoxide
CL2 Chlorine
INLET OUTLET N2O Nitorous Oxide
PRESSURE PRESSURE
GAUGE GAUGE Inlet Outlet

R 3 5
SEAT MATERIALS

INLET/OUTLET T PTFE
MAX. INLET PRESSURE PRESSURE GAUGE OUTLET PRESSURE RANGE Type Size Configuration
2A 0～10ＭＰａ 10 0～0.99MPa I Vespel
04 6MPa 1 W21－14 R Right M Male
6B 0～6ＭＰａ 06 0～0.6MPa 2 W22－14 L Left F Female E PEEK
01 0.99MPa
A5 0～2.5ＭＰａ 04 0～0.4MPa 6 W26－14 F PFA
2J 0～1.6ＭＰａ 02 0～0.2MPa
A2 0～1ＭＰａ 0 NPT 2 1/8 OPTIONS
B6 0～0.6ＭＰａ 2 VCR 4 1/4 A Tied Diaphragm
MODEL
B3 0～0.3ＭＰａ 3 S-JSK 6 3/8
35 Point-of-Use Pressure Regulator 2 IN/OUT Reverse Position
2K －0.1～0～1.6ＭＰａ 4 JSK 8 1/2
Q Electropolish (GRADE"A")
2R －0.1～0～1.0ＭＰａ 6 SWL 0 Others
T Vacuum-Proof
R6 －0.1～0～0.6ＭＰａ 7 UJR
R3 －0.1～0～0.3ＭＰａ
G Special Specification
R1 －0.1～0～0.1ＭＰａ 9 0 0 Others
GE Others

45
High Performance Point-of-Use Pressure Regulator
R36 Series

R36 Series
Medium Flow Rate Applications

Inlet Pressure Max.2 MPaG (Max.290 PSIG)

Outlet Pressure Max.0.99 MPaG (Max.144 PSIG)
(Pressure Range: 0～0.2 MPa, 0～0.4 MPa, 0～0.6 MPa,
0～0.99 MPa) INLET PRESSURE
145PSIG (1.0MPaG)
Supply Pressure Effect 0.0034 MPaG (0.49 PSIG) per 0.1 MPaG (14.5 PSIG) 102PSIG (0.7MPaG)
73PSIG (0.5MPaG)
Proof Pressure 9 MPa (1,305 PSI) 43.5PSIG (0.3MPaG)
0.6
CV 0.62 80
0.5
Temperature –10˚C to +40˚C 70
OUTLET PRESSURE (PSIG)

Outboard Leakage Screw (P); 1×10−9 Pa・m3/sec・He

0.4
60 −8 atm・cc/sec・He)
(1×10
Welding (W); 1×10−11 Pa・m3/sec・He (1×10
50
−10
atm・cc/sec・He)
0.3
Approximate weight 1.7 kg (3 lbs. 12 oz.) 40

30
Installation Threaded holes on the surface
0.2

(OPTIONS: Surface panel mounting)

20
0.1
10
[ NOTE]
0 0
0 100 200 300 400 500
1MPa = 10.2 kgf/cm2 = 145.04 PSI MPaG
FLOW (LPM) (N₂)
1MPa = 7504.36 mmHg = 295.4 inHg

Cross sectional drawing Flow characteristics

INLET PRESSURE
145PSIG (1.0MPaG)
102PSIG (0.7MPaG)
Fine Control Knob for 73PSIG (0.5MPaG)
High Solution Manual 43.5PSIG (0.3MPaG)
0.6
Delivery Pressure
Adjustment 80
0.5
70
OUTLET PRESSURE (PSIG)

60
0.4
50
0.3
40
Threaded holes for the
30 rear surface installation.
5.08”(129mm)

0.2
2-M5×0.8-7.0mm
O-ring Square Load Spring 20
(0.276in.) deep.
6.50”(165mm)

0.1
10
Bonnet
Diaphragm
0 0
0 100 200 300 400 500
MPaG
FLOW (LPM) (N₂)
Seat Retainer Seat

Poppet [ NOTE]
(36mm)
1.42”

· These tests were performed at ambient conditions.

0.874”
(22.2mm)
2.52”dia
0.728”
(64mm dia) (18.5mm)
Spring 5.04”(128m

Body

[ NOTE] Fine Control Knob for

· A void turning the control knob excessively. High Solution Manual
Delivery Pressure
· No filter in this unit. Adjustment

Threaded holes for the

rear surface installation.
2-M5×0.8-7.0mm
O-ring Square Load Spring (0.276in.) deep.
6.50”(165mm)

Bonnet
Diaphragm

46 Seat
Seat Retainer
Poppet
00 300 400 500
FLOW (LPM) (N₂)

R36 Series

Outline drawing
OUTLET PRESSURE GAUGE

Threaded holes for the

rear surface installation.
5.08”(129mm)

2-M5×0.8-7.0mm Fine Control Knob

(0.276in.) deep.
6.50”(165mm)

3/8, 1/2 3/8, 1/2

face seal-MALE face seal-MALE

OUTLET INLET [ NOTE]

(36mm)

Mad
e in J a p an
1.42”

· Dimensions are in inches

0.874”
(22.2mm) and (mm) for reference
2.52”dia only.
0.728” 4.72”(120mm)
(64mm dia) (18.5mm) · Subject to change without
5.04”(128mm) notice.

Materials of construction Wetted surface finishes

MODEL & TYPE R36SS R36SS-CO Standard Ra
32µin. (0.80μm) or less
Wetted Parts (GRADE “B”)
Body SUS316L Optional Ra
7µin. (0.18μm) or less
Poppet & Seat Retainer SUS316L (GRADE “A”)

Diaphragm SUS316L
Seat PCTFE
Spring SUS316 Standard connections
Gasket PTFE
Gasket to seal for gauge Ni SUS316
3/8” NPT body length………………………… 2.52in. (64mm)
Non-wetted Parts
3/8”, 1/2” face to face length of the male and female
are the same.……………………………………… 4.72in. (120mm)
Bonnet Nickel Plated Brass
Control Knob ABS Resin 3/8” sus tube fitting length……………… 5.24in. (133mm)
O-ring NBR [NOTE]
· A ny combination of Face Seal male and/or female fittings are
available for inlet and outlet.
· S ize and configuration of pressure gauge port is 1/4” Face Seal
male.

Ordering information
GRADE
A Electropolish PORTING PORT TYPE
2 2 Ports W Welding Port
B Standard
SERIES MATERIAL Not certified 3 3 Ports P Screw Port
R R Series SUS C particle counts 4 4 Ports G Special Specification
SS

INLET OUTLET
PRESSURE PRESSURE
GAUGE GAUGE Inlet Outlet

R 3 6
INLET/OUTLET
MAX. INLET PRESSURE PRESSURE GAUGE OUTLET PRESSURE RANGE Type Size Configuration OPTIONS
02 2MPa 6B 0～6MPa 10 0～0.99MPa 0 NPT 4 1/4 M Male 2 IN/OUT Reverse Position
01 0.99MPa A5 0～2.5MPa 06 0～0.6MPa 2 VCR 6 3/8 F Female Q Electropolish (GRADE"A")
2J 0～1.6MPa 04 0～0.4MPa 3 S-JSK 0 Others M Surface Panel Mounting
2K －0.1～0～1.6MPa 02 0～0.2MPa 4 JSK
G Special Specification
2R －0.1～0～1.0MPa 6 SWL
MODEL
R6 －0.1～0～0.6MPa 7 UJR
36 Point-of-Use Pressure Regulator R3 －0.1～0～0.3MPa
9 0 0 Others
GE Others

47
High Performance High Pressure Regulator
R61 Series

R61 Series
High Flow Rate Applications

Inlet Pressure Max.24 MPaG (Max.3,480 PSIG)

Outlet Pressure Max.0.99 MPaG (Max.144 PSIG)
(Pressure Range: 0～0.2 MPa, 0～0.4 MPa, 0～0.6 MPa,
0～0.99 MPa)
Supply Pressure Effect 0.001 MPaG (0.145 PSIG) per 0.1 MPaG (14.5 PSIG) INLET PRESSURE
1160PSIG (8.0MPaG)
Proof Pressure 31.5 MPa (4,567 PSI), 1.5 MPa (Outlet Side) 290PSIG (2.0MPaG)
145PSIG (1.0MPaG)
CV 0.31 0.6
80
Temperature –10˚C to +40˚C 0.5
70
OUTLET PRESSURE (PSIG)

Outboard Leakage Screw (P); 1×10−9 Pa・m3/sec・He (1×10−8 atm・cc/sec・He)

60
0.4
Welding (W); 1×10−11 Pa・m3/sec・He (1×10−10 atm・cc/sec・He)
50
Internal Volume 25.3 cc (1.54 in3 ) w/o fittings 0.3
40
Approximate weight 2.0 kg (4 lbs. 7 oz.) 0.2 30

Installation Threaded holes on the rear surface or Panel

20 mounting
0.1
10
[ NOTE]
2 0 0
1MPa = 10.2 kgf/cm = 145.04 PSI MPaG 0 100 200 300 400 500 600 700 800 900
1MPa = 7504.36 mmHg = 295.4 inHg FLOW (LPM) (N₂)

Cross sectional drawing Flow characteristics

INLET PRESSURE
1160PSIG (8.0MPaG)
290PSIG (2.0MPaG)
145PSIG (1.0MPaG)
Fine Control Knob for 0.6
High Solution Manual 80
Delivery Pressure 0.5
Adjustment 70
OUTLET PRESSURE (PSIG)

0.4 60

50
0.3
OUTLET PRESSU
40
Threaded holes for the
Square Load Spring 0.2 30 rear surface installation.
2-M6×1-10.0mm
20 Washer for Panel Mo
0.1
(0.394in.) deep.
Nut for Panel Mount
3.62”(92mm)

10
6.22”(158mm)

0 0 Fine Cont
Bonnet 0 100 200 300 400 500 600 700 800 900
Diaphragm MPaG
FLOW (LPM) (N₂) 1
O-ring
Seat [ NOTE]
· T
 hese tests were performed at ambient conditions.
Poppet
1.42” M36×1.5
Seat Retainer Spring (36mm) 2.83”dia 0.945”
(72mm dia) (24mm) 5.79”(147mm)
2.48”(63mm)

Body Fine Control Knob for

High Solution Manual
Delivery Pressure
Filter Adjustment

[ NOTE]
· Avoid turning the control knob excessively.

Threaded holes for the

Square Load Spring rear surface installation.
2-M6×1-10.0mm
(0.394in.) deep.
3.62”(92mm)
6.22”(158mm)

Bonnet
Diaphragm

O-ring
48 Seat

Poppet
 R61 Series

Outline drawing
OUTLET PRESSURE GAUGE INLET PRESSURE GAUGE
Threaded holes for the
rear surface installation.
2-M6×1-10.0mm
Washer for Panel Mounting
(0.394in.) deep.
Nut for Panel Mounting
3.62”(92mm)
6.22”(158mm)

Fine Control Knob

1/4 face seal-MALE 1/4 face seal-MALE

[ NOTE]
· Dimensions are in inches
OUTLET INLET
and (mm) for reference
only.
1.42” M36×1.5
(36mm) 2.83”dia
· Subject to change without
0.945”
(72mm dia) (24mm) 4.17”(106mm) notice.
5.79”(147mm)
2.48”(63mm)

Materials of construction Wetted surface finishes

MODEL & TYPE R61SS Standard Ra
32µin. (0.80μm) or less
Wetted Parts (GRADE “B”&“C”)
Body SUS316 Optional Ra
7µin. (0.18μm) or less
Poppet & Seat Retainer SUS316 (GRADE “A”)

Diaphragm SUS316L
Seat PCTFE
Spring SUS316
Standard connections
Gasket PTFE
1/4” NPT body length………………………… 2.83in. (72mm)
Gasket to seal for gauge Ni
1/4” face to face length of the male and female
Non-wetted Parts
are the same. (Male)………………………… 4.17in. (106mm)
Bonnet Chromium Plated Brass
1/4” face to face length of the male and female
Control Knob ABS Resin
are the same. (Female)…………………… 4.84in. (123mm)
O-ring NBR
3/8”, 1/2” face to face length of the male and female
are the same.……………………………………… 5.20in. (132mm)
[NOTE]
· A ny combination of Face Seal male and/or female fittings are
available for inlet and outlet.
· S ize and configuration of pressure gauge port is 1/4” Face Seal
male.

Ordering information
GRADE
A Electropolish PORTING PORT TYPE
2 2 Ports W Welding Port
B Standard
SERIES MATERIAL Not certified 3 3 Ports P Screw Port
R R Series SS SUS C particle counts 4 4 Ports G Special Specification

INLET OUTLET
PRESSURE PRESSURE
GAUGE GAUGE Inlet Outlet

R 6 1
INLET/OUTLET
MAX. INLET PRESSURE PRESSURE GAUGE OUTLET PRESSURE RANGE Type Size Configuration OPTIONS
16 24MPa 5A 0～25MPa 10 0～0.99MPa 1 W21－14 R Right M Male 2 IN/OUT Reverse Position
10 14.8MPa H8 0～16MPa 06 0～0.6MPa 2 W22－14 L Left F Female Q Electropolish (GRADE"A")
2A 0～10MPa 04 0～0.4MPa 6 W26－14
G Special Specification
6B 0～6MPa 02 0～0.2MPa
0 NPT 2 1/8
A5 0～2.5MPa 2 VCR 4 1/4
MODEL 2J 0～1.6MPa 3 S-JSK 6 3/8
61 High Pressure Regulator A2 0～1MPa 4 JSK 8 1/2
B6 0～0.6MPa 6 SWL 0 Others
B3 0～0.3MPa 7 UJR
2K －0.1～0～1.6MPa
9 0 0 Others
2R －0.1～0～1MPa
R6 －0.1～0～0.6MPa
R3 －0.1～0～0.3MPa
R1 －0.1～0～0.1MPa
GE Others

49
High Performance High Pressure Regulator
R72 Series

R72 Series
High Delivery Pressure Regulator

Inlet Pressure Max.21 MPaG (Max.3046 PSIG)

Outlet Pressure Max.15 MPaG (Max.2176 PSIG)
(Pressure Renge:0～4 MPa, 0～6 MPa, 0～10 MPa, 0～15 MPa) INLET PRESSURE
2320PSIG (16.0MPaG)
Supply Pressure Effect 0.007 MPaG (0.1 PSIG) per
15 0.12175
MPaG (14.5 PSIG)
14 2030
Proof Pressure 31.5 MPa (4567 PSIG), 22.5
13 MPa
1885 (Outlet Side)
12 1740
Temperature –10˚C to +40˚C
OUTLET PRESSURE (PSIG)

11 1595
−9 10
3 1450 −8
Outboard Leakage Screw (P); 1×10 Pa・m /sec・He9 1305(1×10 atm・cc/sec・He)
−11 3
Welding (W); 1×10 Pa・m 8 1160
/sec・He (1×10−10 atm・cc/sec・He)
7 1015
Internal Volume 3.66 cc (0.22 in3) w/o fittings
6 870
5 725
Approximate weight 1.9 kg (4 lbs. 3 oz.) 4 580
3 435
Installation Threaded holes on the rear 2 surface290 or Panel mounting
1 145
[ NOTE] 0 0
MPaG 0 100 200 300 400 500
1MPa = 10.2 kgf/cm2 = 145.04 PSI FLOW (LPM) (N₂)
1MPa = 7504.36 mmHg = 295.4 inHg

Cross sectional drawing Flow characteristics

INLET PRESSURE
2320PSIG (16.0MPaG)
15 2175
14 2030
13 1885
12 1740 5.75”(146
Fine Control Knob for
OUTLET PRESSURE (PSIG)

11 1595 OUTLET PRESSURE

High Solution Manual
10 1450 GAUGE
Delivery Pressure
9 1305
Adjustment
8 1160
7 1015 Fine Control Knob
6 870
5 725
Washer for Panel Mounting
3.23”(82mm)

Threaded holes for the

5.2”(132mm)

4 580
Square Load Spring rear surface installation.
3 435 Nut for Panel
2-M5×0.8-7.0mm
2 290 Mounting
(0.276in.) deep. 1/4 face seal
1 145
0 0
-MALE
Bonnet
2.17"(110mm)

MPaG 0 100 200 300 400 500

Diaphragm FLOW (LPM) (N₂) OUTLET

O-ring Seat Retainer

0.874” [ NOTE]
Seat
(22.2mm)
Poppet · 1.89”dia
These tests were performed at ambient conditions.
(48mm dia) 0.728” 3.23”(82
Spring 5.87"(149mm)
(18.5mm)
1.46”dia (37mm dia) Hole
1.58"(40mm) Required For Panel Mounting
OUT IN

Body
Filter

[ NOTE]
· Avoid turning the control knob excessively.
Fine Control Knob for
High Solution Manual OUTLET P
Delivery Pressure
Adjustment

Fine Control Knob

Washer for Panel Mounting

3.23”(82mm)

Threaded holes for the

5.2”(132mm)

Square Load Spring rear surface installation.

2-M5×0.8-7.0mm Nut for Panel
Mounting
(0.276in.) deep.

Bonnet

Diaphragm

O-ring Seat Retainer

0.874”
50 Seat
(22.2mm)
Poppet 1.89”dia
(48mm dia) 0.728” 5.87"(149mm)
Spring
PaG 0 100 200 300 400 500
FLOW (LPM) (N₂)

R72 Series

Outline drawing
ontrol Knob for 5.75”(146mm)
Solution Manual OUTLET PRESSURE INLET PRESSURE
ry Pressure GAUGE GAUGE
ment

Fine Control Knob

Washer for Panel Mounting

3.23”(82mm)

Threaded holes for the

5.2”(132mm)

e Load Spring rear surface installation.

2-M5×0.8-7.0mm Nut for Panel
Mounting
(0.276in.) deep. 1/4 face seal 1/4 face seal
-MALE -MALE
et

2.17"(110mm)
OUTLET INLET

Retainer [ NOTE]
0.874” · Dimensions are in inches
(22.2mm)
et 1.89”dia and (mm) for reference
(48mm dia) 0.728” 3.23”(82mm) only.
g 5.87"(149mm)
(18.5mm)
1.46”dia (37mm dia) Hole · Subject to change without
1.58"(40mm) Required For Panel Mounting notice.

Materials of construction Wetted surface finishes

MODEL & TYPE R72SS R72SS-CO Standard Ra
32µin. (0.80μm) or less
Wetted Parts (GRADE “B”&“C”)
Body SUS316L Optional Ra
7µin. (0.18μm) or less
Poppet SUS316L (GRADE “A”)

Seat Retainer SUS316

Diaphragm SUS316L
Seat PCTFE
Standard connections
Spring SUS316
1/4” NPT body length………………………… 1.93in. (48mm)
Gasket PTFE
1/4” face to face length of the male and female
Gasket to seal for gauge Ni SUS316
are the same. (Male)………………………… 3.23in. (82mm)
Non-wetted Parts
1/4” face to face length of the male and female
Bonnet SUS304
are the same. (Female)…………………… 3.90in. (99mm)
Control Knob SUS304
1/4” sus tube fitting length……………… 4.37in. (111mm)
[NOTE]
· A ny combination of Face Seal male and/or female fittings are
available for inlet and outlet.
· S ize and configuration of pressure gauge port is 1/4” Face Seal
male.

Ordering information
GRADE
A Electropolish PORTING PORT TYPE
2 2 Ports W Welding Port
B Standard
SERIES MATERIAL 3 3 Ports P Screw Port
Not certified
R R Series SUS C particle counts 4 4 Ports G Special Specification
SS GAS APPLICATION
CO Corbon Monoxide
INLET OUTLET
PRESSURE PRESSURE
GAUGE GAUGE Inlet Outlet

R 7 2
SEAT MATERIALS

INLET/OUTLET OUTLET Type Size Configuration I Vespel

MAX. INLET PRESSURE PRESSURE GAUGE PRESSURE RANGE
1 W21－14 R Right M Male
14 21MPa 7A 35MPa 1E 0～15MPa
2 W22－14 L Left F Female
13 20MPa 5A 25MPa E8 0～12MPa OPTIONS
6 W26－14
11 16.5MPa H8 16MPa 1M 0～10MPa 2 IN/OUT Reverse Position
10 14.8MPa 2A 10MPa 60 0～ 6MPa 0 NPT 1 1/16 Q Electropolish (GRADE"A")
NO GAUGE OR PORT(S)ONLY 6B 6MPa 40 0～ 4MPa 2 VCR 2 1/8
G Special Specification
A8 4MPa 3 S-JSK 4 1/4
NO GAUGE OR PORT(S)ONLY
A5 2.5MPa 4 JSK 6 3/8
MODEL GE Others 6 SWL 8 1/2
72 High Pressure Regulator WITH GAUGE(S) 7 UJR 0 Others
C CVC

9 0 0 Others

51
High Performance Two-Stage Pressure Regulator
R81 Series
INLET PRESSURE
1160PSIG (8.0MPaG)
290PSIG (2.0MPaG)
0.5
70

R81 Series 0.4 60

OUTLET PRESSURE (PSIG)

50
0.3
40

Minimizes Supply Pressure Effect 0.2 30

20
0.1
10

Inlet Pressure Max.24 MPaG (Max.3,480 PSIG) 0 0

0 10 20 30 40 50 60 70 80 90 100
MPaG
Outlet Pressure Max.0.6 MPaG (Max.87 PSIG) FLOW (LPM) (N₂) INLET PRESSURE
(Pressure Range: 0～0.2 MPa, 0～0.4 MPa, 0～0.6 MPa) 1160PSIG (8.0MPaG)
290PSIG (2.0MPaG)
Supply Pressure Effect 0.00004 MPaG (0.0058 PSIG)
0.5 per 0.1 MPaG (14.5 PSIG)
70
Proof Pressure 31.5 MPa (4,567 PSIG)
0.4 OUTLET PRESSURE (PSIG) 60
Temperature –10˚C to +40˚C
50
Outboard Leakage Screw (P); 1×10−9 Pa・m3/sec・He (1×10−8 atm・cc/sec・He)
0.3
(1×10−10 atm・cc/sec・He)
Welding (W); 1×10−11 Pa・m3/sec・He40
Internal Volume 14.5 cc (0.88 in3) w/o fittings
0.2 30

Approximate weight 2.4 kg (5 lbs. 5 oz.) 20

Washer for
0.1
Panel Mounting
Installation Threaded holes on the rear
Finesurface or Panel mounting

3.35”(85mm)
Control10Knob for
Nut for Body
High Solution Manual

5.43”(138mm)
0 0
Panel Mounting
[ NOTE] Delivery Pressure
0 10 20 30 40 50 60 70 80 90 100
MPaG
Adjustment
1MPa = 10.2 kgf/cm2 = 145.04 PSI FLOW (LPM) (N₂)

1MPa = 7504.36 mmHg = 295.4 inHg

1.46”dia (37mm dia) Hole

Required For Panel Mounting 2.24”(57mm)
1.69”(43mm)
Tied Diaphragm (Optional) 7.76”(197mm) O
Cross sectional drawing 2.87”(73mm)
Poppet
Washer for
Panel Mounting

3.35”(85mm)
Fine Control Knob for
Nut for Body
High Solution Manual

5.43”(138mm)
Panel Mounting
Delivery Pressure Diaphragm Linked
Adjustment Poppet Design for
Positive Shutoff

Poppet
Filter
1.46”dia (37mm dia)[ NOTE]
Hole
Required For Panel Mounting 2.24”(57mm)
Operating the Tied Diaphragm
1.69”(43mm)
Type: In order to minimize
7.76”(197mm)
Diaphragm Linked
premature wear of regulator’s
2.87”(73mm)
Poppet Design for
Poppet Positive Shutoff internal parts. Be sure not to
close regulator while under
pressure.

Diaphragm Linked
Poppet Design for
Positive Shutoff
Flow characteristics
Poppet
Filter INLET PRESSURE
1160PSIG (8.0MPaG)
290PSIG (2.0MPaG)
0.5
70
Diaphragm Linked
Poppet Design
0.4 for 60
OUTLET PRESSURE (PSIG)

Positive Shutoff
50
0.3
40

0.2 30
[ NOTE]
20
· A
 void turning the control knob excessively. 0.1
10

0 0
0 10 20 30 40 50 60 70 80 90 100
MPaG
FLOW (LPM) (N₂)

[ NOTE]
· These tests were performed at ambient conditions.

52 Washer for
Panel Mounting
)
 R81 Series
50 60 70 80 90 100
M) (N₂)

Outline drawing
5.87”(149mm)

OUTLET PRESSURE GAUGE INLET PRESSURE GAUGE

Washer for
Panel Mounting
3.35”(85mm)

Nut for Body

5.43”(138mm)

Panel Mounting Fine Control Knob

1/4 face seal-MALE 1/4 face seal-MALE

[ NOTE]
OUTLET INLET · Dimensions are in inches
1.46”dia (37mm dia) Hole and (mm) for reference
Required For Panel Mounting 2.24”(57mm) only.
3.46”(88mm)
1.69”(43mm) · Subject to change without
7.76”(197mm) notice.
2.87”(73mm)

Materials of construction Wetted surface finishes

MODEL & TYPE R81SS R81SH R81SS-N20 R81SS-CO Standard Ra
32µin. (0.80μm) or less
Wetted Parts (GRADE “B”&“C”)
Body SUS316L Optional Ra
7µin. (0.18μm) or less
Poppet SUS316L Hastelloy® C-22 SUS316L (GRADE “A”)

Seat Retainer SUS316 Hastelloy® C-22 SUS316

Diaphragm SUS316L Hastelloy® C-22 SUS316L
Seat PCTFE Vespel® PCTFE
Standard connections
Spring SUS316
1/4” NPT body length………………………… 2.13in. (54mm)
PTFE and PCTFE and
Gasket PCTFE and PTFE 1/4” face to face length of the male and female
Vespel® PTFE
Gasket to seal are the same. (Male)………………………… 3.46in. (88mm)
Ni SUS316
for gauge 1/4” face to face length of the male and female
Non-wetted Parts are the same. (Female)…………………… 4.13in. (105mm)
Bonnet Nickel Plated Brass
[NOTE]
Control Knob ABS Resin
· A ny combination of Face Seal male and/or female fittings are
O-ring NBR available for inlet and outlet.
· S ize and configuration of pressure gauge port is 1/4” Face Seal
male.

Ordering information
PORTING
GRADE
A Electropolish 2 2 Ports PORT TYPE
MATERIAL
3 3 Ports W Welding Port
SS SUS B Standard
SERIES 4 4 Ports P Screw Port
SUS＋ Not certified
SH Hastelloy®C-22 C particle counts G Special Specification
R R Series 5 5 Ports
GAS APPLICATION
INTERMEDIATE- CO Corbon Monoxide
INLET STAGE OUTLET
PRESSURE PRESSURE PRESSURE N2O Nitorous Oxide
GAUGE GAUGE GAUGE Inlet Outlet

R 8 1
SEAT MATERIALS

FIRST STAGE SECOND STAGE

MAX. INLET PRESSURE INLET/OUTLET PRESSURE GAUGE OUTLET PRESSURE RANGE Type Size Configuration
II Vespel Vespel
16 24MPa 5A 0～25MPa 06 0～0.6MPa 1 W21－14 R Right M Male
EE PEEK PEEK
10 14.8MPa 4A 0～20MPa 04 0～0.4MPa 2 W22－14 L Left F Female
H8 0～16MPa 02 0～0.2MPa 6 W26－14 OPTIONS
MODEL 2A 0～10MPa
0 NPT 2 1/8 A Tied Diaphragm
81 Two-Stage Pressure Regulator 6B 0～6MPa INTERMEDIATE-STAGE 2 VCR 4 1/4 2 IN/OUT Reverse Position
A5 0～2.5MPa SETTING PRESSURE
3 S-JSK 6 3/8 Q Electropolish (GRADE"A")
2J 0～1.6MPa 15 1.5MPa
4 JSK 8 1/2
A2 0～1MPa 10 0.99MPa
6 SWL 0 Others G Special Specification
B6 0～0.6MPa 07 0.7MPa
7 UJR
B3 0～0.3MPa 05 0.5MPa
2K －0.1～0～1.6MPa 04 0.4MPa 9 0 0 Others
2R －0.1～0～1MPa 03 0.3MPa
R6 －0.1～0～0.6MPa 00 Others
R3 －0.1～0～0.3MPa
R1 －0.1～0～0.1MPa
GE Others

53
High Performance Point-of-Use Pressure Regulator
RH1 Series

RH1 Series
High Flow Rate Applications

Inlet Pressure Max.6 MPaG (Max.870 PSIG)

Outlet Pressure Max.0.99 MPaG (Max.144 PSIG)
(Pressure Range: 0～0.2 MPa, 0～0.4 MPa, 0～0.6 MPa,
0～0.99 MPa)
Supply Pressure Effect 0.0019 MPaG (0.28 PSIG) per 0.1 MPaG (14.5 PSIG)
INLET PRESSURE
Proof Pressure 9.0 MPa (1,305 PSI) 145PSIG (1.0MPaG)
102PSIG (0.7MPaG)
CV 0.69 0.6
80
Temperature –10˚C to +40˚C 0.5
70
Outboard Leakage Screw (P); 1×10−9 Pa・m3/sec・He (1×10−8 atm・cc/sec・He)
60
OUTLET PRESSURE (PSIG)

0.4
Welding (W); 1×10−11 Pa・m3/sec・He (1×10−10 atm・cc/sec・He)
50
Internal Volume 47.2 cc (2.85 in3) w/o fittings 0.3
40

Approximate weight 2.7 kg (5 lbs. 15 oz.) 0.2 30

Installation Threaded holes on the rear surface or Panel

20 mounting
0.1
10
[ NOTE]
0 0
0 5 00 1000 1500
1MPa = 10.2 kgf/cm2 = 145.04 PSI MPaG
FLOW (LPM) (N₂)
1MPa = 7504.36 mmHg = 295.4 inHg

Cross sectional drawing Flow characteristics

INLET PRESSURE
145PSIG (1.0MPaG)
102PSIG (0.7MPaG)
0.6
80
0.5
Fine Control Knob for 70
High Solution Manual
60
OUTLET PRESSURE (PSIG)

Delivery Pressure 0.4

Adjustment 50
0.3
40

0.2 30
Square Load Spring 20
0.1 Threaded holes for the
10 rear surface installation.
2-M6×1-8.0mm
4.37”(111mm)

0 0
0 5 00 (0.315in.) deep. 1000 1500
6.93”(176mm)

Bonnet MPaG
FLOW (LPM) (N₂)
Diaphragm
[ NOTE]
Seat
Seat Retainer · These tests were performed at ambient conditions.
Poppet
Spring

M
1.42” 2.36”(60mm)
(36mm) 0.886”
3.11”dia 5.59”(142mm)
(22.5mm)
Body (79mm dia)

Fine Control Knob for

[ NOTE] High Solution Manual
Delivery Pressure
· A void turning the control knob excessively.
Adjustment
· No filter in this unit.

Square Load Spring

Threaded holes for the
rear surface installation.
2-M6×1-8.0mm
4.37”(111mm)

(0.315in.) deep.
6.93”(176mm)

Bonnet
Diaphragm

Seat
Seat Retainer
54 Poppet
Spring
 RH1 Series

Outline drawing
OUTLET PRESSURE GAUGE

Threaded holes for the Washer for Panel Mounting

rear surface installation. Nut for Panel Mounting
2-M6×1-8.0mm
4.37”(111mm)

(0.315in.) deep. Fine Control Knob

6.93”(176mm)

1/2 face seal-MALE 1/2 face seal-MALE

OUTLET INLET [ NOTE]

· Dimensions are in inches
and (mm) for reference
M36×1.5 only.
2.36”(60mm) 5.51”(140mm)
1.42” · Subject to change without
(36mm) 0.886”
3.11”dia 5.59”(142mm) notice.
(22.5mm)
(79mm dia)

Materials of construction Wetted surface finishes

MODEL & TYPE RH1SS RH1SH Standard Ra
32µin. (0.80μm) or less
Wetted Parts (GRADE “B”&“C”)
Body SUS316L Optional Ra
7µin. (0.18μm) or less
Poppet & Seat Retainer SUS316 Hastelloy® C-22 (GRADE “A”)

Diaphragm SUS316L
Seat PTFE
Spring SUS316 Standard connections
Gasket PTFE
3/8” NPT body length………………………… 3.11in. (79mm)
Gasket to seal for gauge Ni
3/8”, 1/2” face to Face length of the male and female
Non-wetted Parts
are the same.………………………………………… 5.51in. (140mm)
Bonnet Chromium Plated Brass
3/8”, 1/2” Tube stubs and other connections available
Control Knob ABS Resin
as options.
O-ring NBR
[NOTE]
· A ny combination of Face Seal male and/or female fittings are
available for inlet and outlet.
· S ize and configuration of pressure gauge port is 1/4” Face Seal
male.

Ordering information
GRADE
A Electropolish PORTING PORT TYPE
MATERIAL
2 2 Ports W Welding Port
SS SUS B Standard
SERIES 3 3 Ports P Screw Port
SUS＋ Not certified
R R Series SH Hastelloy®C-22 C particle counts 4 4 Ports G Special Specification

INLET OUTLET
PRESSURE PRESSURE
GAUGE GAUGE Inlet Outlet

R H 1
INLET/OUTLET
MAX. INLET PRESSURE PRESSURE GAUGE OUTLET PRESSURE RANGE Type Size Configuration OPTIONS
04 6MPa 2A 0～10MPa 10 0～0.99MPa 1 W21－14 R Right M Male 2 IN/OUT Reverse Position
2 W22－14 L Left F Female
01 0.99MPa 6B 0～6MPa 06 0～0.6MPa Q Electropolish (GRADE"A")
6 W26－14
99 Others A5 0～2.5MPa 04 0～0.4MPa 1 1/16
0 NPT 2 1/8 G Special Specification
2J 0～1.6MPa 02 0～0.2MPa 2 VCR 4 1/4
A2 0～1MPa 3 S-JSK 6 3/8
MODEL B6 0～0.6MPa 4 JSK 8 1/2
6 SWL A 3/4
H1 Point-of-Use Pressure Regulator B3 0～0.3MPa 7 UJR B 1
2K －0.1～0～1.6MPa C CVC 0 Others
2R －0.1～0～1.0MPa F Flat Seal
U UPG
R6 －0.1～0～0.6MPa T TOM
R3 －0.1～0～0.3MPa Flange 6 10K-10A 0
L
R1 －0.1～0～0.1MPa 8 10K-15A
GE Others A 10K-20A
B 10K-25A
C 10K-32A
D 10K-40A
E 10K-50A
0 Others

9 0 0 Others

55
High Performance Point-of-Use Pressure Regulator
RH2 Series

RH2 Series
High Flow Rate Applications

Inlet Pressure Max.2 MPaG (Max.290 PSIG)

Outlet Pressure Max.0.99 MPaG (Max.144 PSIG)
(Pressure Range: 0～0.2 MPa, 0～0.4 MPa, 0～0.6 MPa,
0～0.99 MPa) INLET PRESSURE
145PSIG (1.0MPaG)
Supply Pressure Effect 0.0082 MPaG (1.19 PSIG) per 0.1 MPaG (14.5 PSIG) 102PSIG (0.7MPaG)
73PSIG (0.5MPaG)
Proof Pressure 22.2 MPa (3,215 PSI) 43.5PSIG (0.3MPaG)
0.6
CV 0.84 80
0.5
Temperature –10˚C to +40˚C 70
OUTLET PRESSURE (PSIG)

Outboard Leakage Screw (P); 1×10−9 Pa・m3/sec・He0.4(1×1060

−8
atm・cc/sec・He)
Welding (W); 1×10−11 Pa・m3/sec・He (1×10
50 −10
atm・cc/sec・He)
0.3
40
Approximate weight 2.8 kg (6 lbs. 5 oz.)
0.2 30
Installation Threaded holes on the rear surface
20
(OPTIONS: Surface panel mounting)
0.1
10
0 0
[ NOTE] 0 200 400 600 800 1000 1200 1400 1600 1800
MPaG
1MPa = 10.2 kgf/cm2 = 145.04 PSI FLOW (LPM) (N₂)
1MPa = 7504.36 mmHg = 295.4 inHg

Cross sectional drawing Flow characteristics

INLET PRESSURE
145PSIG (1.0MPaG)
102PSIG (0.7MPaG)
73PSIG (0.5MPaG)
43.5PSIG (0.3MPaG)
0.6
80

Fine Control Knob for 0.5

70
OUTLET PRESSURE (PSIG)

High Solution Manual

60
Delivery Pressure 0.4
Adjustment 50
0.3
40

0.2 30
Threaded holes for the
5.37”(136.5mm)

20 rear surface installation.

0.1 2-M6×1-7.0mm
10
7.09”(180mm)

Square Load Spring (0.276in.) deep.

0 0
MPaG 0 200 400 600 800 1000 1200 1400 1600 1800
Diaphragm
FLOW (LPM) (N₂)
Bonnet
[ NOTE]
Seat
Seat Retainer Poppet · These tests were performed at ambient conditions.
(43.5mm)
1.71”

1.42” 0.886”
Spring (36mm) 3.11”dia 5.67”(144
(22.5mm)
Body (79mm dia)

[ NOTE]
· A void turning the control knob excessively.
· No filter in this unit. Fine Control Knob for
High Solution Manual
Delivery Pressure
Adjustment

Threaded holes for the

rear surface installation.
2-M6×1-7.0mm
7.09”(180mm)

Square Load Spring (0.276in.) deep.

Diaphragm

56 Bonnet

Seat
 RH2 Series

Outline drawing
OUTLET PRESSURE GAUGE

Threaded holes for the

rear surface installation. 5.37”(136.5mm)
2-M6×1-7.0mm Fine Control Knob
7.09”(180mm)

(0.276in.) deep.

3/8, 1/2 3/8, 1/2

face seal-MALE face seal-MALE

OUTLET INLET
(43.5mm)

M ad
e in J a pan
1.71”

[ NOTE]
· Dimensions are in inches
and (mm) for reference
5.51”(140mm) only.
1.42” 0.886” · Subject to change without
(36mm) 3.11”dia (22.5mm) 5.67”(144mm)
notice.
(79mm dia)

Materials of construction Wetted surface finishes

MODEL & TYPE RH2SSC RH2SS-CO Standard Ra
32µin. (0.80μm) or less
Wetted Parts (GRADE “B”)
Body SUS316L Optional Ra
7µin. (0.18μm) or less
Poppet & Seat Retainer SUS316L (GRADE “A”)

Diaphragm SUS316L
Seat PCTFE
Spring SUS316 Standard connections
Gasket PTFE
Gasket to seal for gauge Ni SUS316
1/2” NPT body length………………………… 3.11in. (79mm)
3/8”, 1/2” face to face length of the male and female
Non-wetted Parts
are the same.……………………………………… 5.51in. (140mm)
Bonnet Chromium Plated Brass
1/2” sus tube fitting length……………… 5.98in. (152mm)
Control Knob ABS Resin
O-ring NBR [NOTE]
· A ny combination of Face Seal male and/or female fittings are
available for inlet and outlet.
· S ize and configuration of pressure gauge port is 1/4” Face Seal
male.

Ordering information
GRADE
A Electropolish PORTING PORT TYPE
2 2 Ports W Welding Port
B Standard
SERIES MATERIAL 3 3 Ports P Screw Port
Not certified
R R Series SUS C particle counts 4 4 Ports G Special Specification
SS

INLET OUTLET
PRESSURE PRESSURE
GAUGE GAUGE Inlet Outlet

R H 2 S S
INLET/OUTLET
MAX. INLET PRESSURE PRESSURE GAUGE OUTLET PRESSURE RANGE Type Size Configuration OPTIONS
02 2MPa 6B 0～6MPa 10 0～0.99MPa 0 NPT 4 1/4 M Male 2IN/OUT Reverse Position
2 VCR 6 3/8 F Female
01 0.99MPa A5 0～2.5MPa 06 0～0.6MPa Q Electropolish (GRADE"A")
3 S-JSK 8 1/2
99 Others 2J 0～1.6MPa 04 0～0.4MPa 4 JSK 0 Others M Surface Panel Mounting
A2 0～1MPa 02 0～0.2MPa 6 SWL
7 UJR G Special Specification
B6 0～0.6MPa
MODEL B3 0～0.3MPa L Flange 6 10K-10A 0 Flange
H2 Point-of-Use Pressure Regulator 2K －0.1～0～1.6MPa 8 10K-15A
A 10K-20A
2R －0.1～0～1.0MPa B 10K-25A
R6 －0.1～0～0.6MPa C 10K-32A
R3 －0.1～0～0.3MPa D 10K-40A
E 10K-50A
GE Others 0 Others
9 0 0 Others

57
High Performance Point-of-Use Dome Loaded Pressure Regulator
RLD Series

RLD Series
Dome Loaded Pressure Regulator
Designed for Remote Operation in INLET PRESSURE
102PSIG (0.7MPaG)
73PSIG (0.5MPaG)

High Flow Rate Applications 0.6

80
43.5PSIG (0.3MPaG)

0.5
70

OUTLET PRESSURE (PSIG)

Inlet Pressure Max.2 MPaG (Max.290 PSIG)
0.4 60

50
Outlet Pressure Max.0.8 MPaG (Max.116 PSIG)
0.3
40
CV 11.3
0.2 30
Approximate weight 19 kg (41ｌbs. 14 oz.)
20
0.1
[ NOTE] 10

1MPa = 10.2 kgf/cm2 = 145.04 PSI 0 0

0 2000 4000 6000 8000 10000 12000 14000 16000 18000 20000
MPaG
1MPa = 7504.36 mmHg = 295.4 inHg
FLOW (LPM) (N₂)

Cross sectional drawing Flow characteristics

INLET PRESSURE
102PSIG (0.7MPaG)
73PSIG (0.5MPaG)
Fine Control Knob for
43.5PSIG (0.3MPaG)
High Solution Manual 0.6
Delivery Pressure
80
Adjustment
0.5
70
OUTLET PRESSURE (PSIG)

Dome Loaded Pressure Regulator 60

0.4
O
50
0.3
40
Bonnet
0.2 30

20 Fla
0.1
9.685”(246mm)

Diaphragm 10

0 0 Fine Control Knob

Seat Retainer 0 2000 4000 6000 8000 10000 12000 14000 16000 18000 20000
MPaG
FLOW (LPM) (N₂)
Seat
[ NOTE]
OUTLET
· These tests were performed at ambient conditions.
(75mm)
2.95”

Threaded holes for the 1.57”

rear surface in stallation
Poppet 2-M12×1.75-15mm (40mm)
(0.591in.)deep.
5.24”(133mm)
Spring 1.06” 9.291”(236mm)
(27mm)
Fine Control Knob for 1.81”(46mm)
Body High Solution Manual
Delivery Pressure
Adjustment
[ NOTE]
· A void turning the control knob excessively. Dome Loaded Pressure Regulator
· No filter in this unit.

Bonnet
9.685”(246mm)

Diaphragm

Seat Retainer

Seat
(75mm)
2.95”

Threaded holes for the 1.57”

rear surface in stallation
Poppet 2-M12×1.75-15mm (40mm)
(0.591in.)deep.
5.24”(133mm)
58 Spring 1.06” 9.291”(236m
(27mm)
1.81”(46mm)
Body
FLOW (LPM) (N₂)

RLD Series

Outline drawing
OUTLET PRESSURE GAUGE

Flange Flange
9.685”(246mm)

Fine Control Knob

[ NOTE]
OUTLET INLET · Dimensions are in inches
and (mm) for reference
(75mm)
2.95”

only.
· Face to face length of the
Threaded holes for the 1.57” male and female are the
rear surface in stallation 5.91”(150mm) 5.91”(150mm)
2-M12×1.75-15mm (40mm) same.
(0.591in.)deep. 11.811”(300mm)
5.24”(133mm) · Subject to change without
1.06” 9.291”(236mm)
(27mm) notice.
1.81”(46mm)

Materials of construction Wetted surface finishes

MODEL & TYPE RLDSS Standard Ra
roughness on machined surface
Wetted Parts (GRADE “C”)
Body SUS316
Poppet & Seat Retainer SUS316
Diaphragm GYLON® Standard connections
Seat PTFE
Spring SUS316 JIS 10k-40A flange face to face length
…………………………………………………………… 11.81in. (300mm)
Gasket to seal for gauge Ni
O-ring VITON® JIS 10k-50A flange face to face length
…………………………………………………………… 11.81in. (300mm)
Non-wetted Parts
Bonnet SUS316 [NOTE]
Control Knob ABS Resin · A ny combination of Face Seal male and/or female fittings are
available for inlet and outlet.
· S ize and configuration of pressure gauge port is 1/4” Face Seal
male.

Ordering information
PORTING PORT TYPE
2 2 Ports W Welding Port
GRADE
SERIES MATERIAL 3 3 Ports P Screw Port
Not certified
R R Series SUS C particle counts 4 4 Ports G Special Specification
SS

INLET OUTLET
PRESSURE PRESSURE
GAUGE GAUGE Inlet Outlet

R L D
SEAT MATERIALS

INLET/OUTLET
MODEL MAX. INLET PRESSURE PRESSURE GAUGE OUTLET PRESSURE RANGE Type Size Configuration F PFA
Dome Loaded 02 2MPa A5 0～2.5MPa 02 0～0.2MPa 0 NPT 8 1/2 M Male
LD
Pressure Regulator 01 0.99MPa 2J 0～1.6MPa 04 0～0.4MPa 2 VCR A 3/4 F Female OPTIONS
99 Others A2 0～1MPa 06 0～0.6MPa 3 S-JSK B 1 B Nominal 2 IN/OUT Reverse Position
Diameter
B6 0～0.6MPa 08 0～0.8MPa 4 JSK C 1・1/4 Q Electropolish (GRADE"A")
B3 0～0.3MPa 6 SWL 0 Others
G Special Specification
2K －0.1～0～1.6MPa 7 UJR
2R －0.1～0～1.0MPa P Flat Seal
R6 －0.1～0～0.6MPa
L Flange 6 10K-10A 0 Flange
R3 －0.1～0～0.3MPa
GE Others
P Flat Seal 8 10K-15A A Nominal
Diameter
A 10K-20A
B 10K-25A
C 10K-32A
D 10K-40A
E 10K-50A
0 Others

9 0 0 Others

59
High Performance Point-of-Use Auto Pressure Regulator
RH2-D Series

RH2-D Series
Point-of-Use Auto Pressure Regulator

Inlet Pressure Max.2 MPaG (Max.290 PSIG)

Outlet Pressure Max.0.99 MPaG (Max.144 PSIG)
(Pressure Range: 0～0.2 MPa, 0～0.4 MPa, 0～0.6 MPa,
0～0.99 MPa)
Pressure controller YP100
Power source DC24 V ±10% INLET PRESSURE
102PSIG (0.7MPaG)
Power consumption 200 mA or less 100

External communication 4-20 mA, RS485 90

0.6
80
OUTLET PRESSURE (PSIG)

Pressure sensor input 4-20 mA, 1-5 V 0.5 70

Air supply pressure 0.4～0.6 MPa 0.4
60
50
Air supply pressure
0.157'' (4.0 mm) Push-In Fitting
0.3 40
connection
0.2 30

[ NOTE] 20
0.1
1MPa = 10.2 kgf/cm2 = 145.04 PSI 10

1MPa = 7504.36 mmHg = 295.4 inHg 0 0

MPaG 0 200 400 600 800 1000 1200 1400 1600 1800
FLOW (LPM) (N₂)

Cross sectional drawing Flow characteristics

INLET PRESSURE
Dome Pressure In
102PSIG (0.7MPaG)
100
90
0.6
80
OUTLET PRESSURE (PSIG)

0.5 70
Controller
60
0.4 Threaded holes for the rear surface installation.
Piston 50 2-M6×1-7.0mm (0.276in.) deep. )
0.3 dia
40 m
m
Cover 30 (79
0.2 ia
”d
Diaphragm
20
. 11
3
3.43”dia (87mmdia)

0.1
10

PTFE Packing 0 0
MPaG 0 200 400 600 800 1000 1200 1400 1600 1800
Seat Retainer FLOW (LPM) (N₂)

[ NOTE]
· These tests were performed at ambient conditions.
3.82” (97mm) Dome
1.42” (36mm) 7.2” (183mm) Pressur
Seat

0.886” (22.5mm)
Dome Pressure In
Example of use
Poppet
Controller
Spring
Feed back signal
Threaded holes for the rear surface installation.
Body Piston (4～20 mA, 1～5 V)
2-M6×1-7.0mm (0.276in.) deep. )
[ NOTE] Pressure dia
m
controller 9 m
· A void turning the control knob excessively. Cover Air IN (7
YP100 ia
· No filter in this unit. ”d
11
Diaphragm 3.
3.43”dia (87mmdia)

Pressure
PTFE Packing sensor

Seat Retainer
OUTLET INLET
Regulator

1.42” (36mm)
Seat

0.886” (22.5mm)

60
600 800 1000 1200 1400 1600 1800
FLOW (LPM) (N₂)

RH2-D Series

Outline drawing

Threaded holes for the rear surface installation.

2-M6×1-7.0mm (0.276in.) deep. )
dia
m
m Pressure Controller
(79
dia YP-100
1 1”
3. 1/2 face seal-MALE 1/2 face seal-MALE
3.43”dia (87mmdia)

ALM C/C

OUTLET ▲ M
▲ INLET

3.82” (97mm) 0.157” (4.0mm) 2.76” (70mm) 2.76” (70mm)

Dome
Push-In Fitting
1.42” (36mm) 7.2” (183mm) Pressure Inlet 5.51” (140mm)

0.886” (22.5mm)
②Sensor Connector (6 pin) [ NOTE]
· D imensions are in inches
and (mm) for reference
only.
①Power Connector (5 pin) · Subject to change without
notice.

Materials of construction Wetted surface finishes

MODEL & TYPE RH2SS-D Optional Ra
7µin. (0.18μm) or less
Wetted Parts (GRADE “A”)
Body SUS316L Standard Ra
32µin. (0.80μm) or less
Poppet SUS316L (GRADE “B”)

Seat Retainer SUS316L

Diaphragm SUS316L
Seat PCTFE Standard connections
Spring SUS316
Gasket to seal for gauge Ni
1/2” NPT body length………………………… 3.11in. (79mm)
3/8”, 1/2” face to face length of the male and female
Packing PTFE
are the same.……………………………………… 5.51in. (140mm)
Non-wetted Parts
1/2” sus tube fitting length……………… 5.98in. (152mm)
Bonnet C3604B
Pressure controller YP100 [NOTE]
O-ring NBR · A ny combination of Face Seal male and/or female fittings are
available for inlet and outlet.
· S ize and configuration of pressure gauge port is 1/4” Face Seal
male.

Ordering information
GRADE
A Electropolish PORTING PORT TYPE
2 2 Ports W Welding Port
B Standard DOME
SERIES MATERIAL 3 3 Ports P Screw Port
Not certified D Non Controller
R R Series SUS C particle counts 4 4 Ports G Special Specification
SS
DY YP100 (Direct)
DN YP100 (Separate)
INLET OUTLET
PRESSURE PRESSURE
GAUGE GAUGE Inlet Outlet

R H 2 S S
INLET/OUTLET
MAX. INLET PRESSURE PRESSURE GAUGE OUTLET PRESSURE RANGE Type Size Configuration OPTIONS
02 2MPa 6B 0～6MPa 10 0～0.99MPa 0 NPT 4 1/4 M Male Q Electropolish (GRADE"A")
2 VCR 6 3/8 F Female
01 0.99MPa A5 0～2.5MPa 06 0～0.6MPa G Special Specification
3 S-JSK 8 1/2
99 Others 2J 0～1.6MPa 04 0～0.4MPa 4 JSK 0 Others
A2 0～1MPa 02 0～0.2MPa 6 SWL
B6 0～0.6MPa 7 UJR
MODEL B3 0～0.3MPa 9 0 0 Others
H2 Point-of-Use Auto Pressure Regulator 2K －0.1～0～1.6MPa
2R －0.1～0～1.0MPa
R6 －0.1～0～0.6MPa
R3 －0.1～0～0.3MPa
GE Others

GRADE PORTING PORT TYPE DOME

A Electropolish 2 2Ports W WeldingPort D NON CONTROLLER
SERIES MATERIAL B Standard 3 3Ports P ねじ込みポート DY YP100(DIRECT) 61
R Rseries SS SUS C Not certified 4 4Ports G Special Specification DN YP100(SEPARATE)
particle counts.
High Performance Point-of-Use Auto Pressure Regulator
LM2-D Series

LM2-D Series
Point-of-Use Auto Pressure Regulator

Inlet Pressure Max.2 MPaG (Max.290 PSIG)

Outlet Pressure Max.0.8 MPaG (Max.116 PSIG)
(Pressure Range: 0～0.2 MPa, 0～0.4 MPa, 0～0.6 MPa,
0～0.8 MPa)
Pressure controller YP100
Power source DC24 V ±10%
INLET PRESSURE
Power consumption 200 mA or less 102PSIG (0.7MPaG)
100
External communication 4-20 mA, RS485 90
0.6
Pressure sensor input 4-20 mA, 1-5 V 80
OUTLET PRESSURE (PSIG)

0.5 70
Air supply pressure 0.4～0.6 MPa
60
0.4
Air supply pressure 50
0.157'' (4.0 mm) Push-In Fitting
connection 0.3 40

0.2 30
[ NOTE] 20
1MPa = 10.2 kgf/cm2 = 145.04 PSI 0.1
10
1MPa = 7504.36 mmHg = 295.4 inHg 0
0
MPaG 0 500 1000 1500 2000 2500
FLOW (LPM) (N₂)

Cross sectional drawing Flow characteristics

Dome Pressure In INLET PRESSURE
102PSIG (0.7MPaG)
100
90
0.6
80
OUTLET PRESSURE (PSIG)

0.5 70
Controller
60
0.4
Piston 50 Threaded holes for the rear surface installation.
0.3 40 2-M6×1-10.0mm (0.394in.) deep.
Cover
0.2 30
89

20
φ

3.66”dia (93mm dia)

0.1
10

0 0
PTFE Packing MPaG 0 500 1000 1500 2000 2500
FLOW (LPM) (N₂)
Seat Retainer

[ NOTE]
Seat
· These tests were performed at ambient conditions.
3.66” (93mm) Do
Pr
7.36” (187mm)
1.42” (36mm)

1.22” (31mm)
Dome Pressure In
Example of use

Poppet
Controller Feed back signal
Spring
(4～20 mA, 1～5 V)
Body Piston Pressure Threaded holes for the rear sur
controller 2-M6×1-10.0mm (0.394in.) de
Cover Air IN
YP100
[ NOTE]
89
φ

· A
 void turning the control knob excessively.
3.66”dia (93mm dia)

Pressure
· N
 o filter in this unit. sensor
PTFE Packing

OUTLET
Seat Retainer INLET
Regulator

Seat

1.42” (36mm)

1.22” (31mm
62
 1500 2000 2500
LPM) (N₂)

LM2-D Series

Outline drawing

Threaded holes for the rear surface installation. Pressure Controller YP-100
2-M6×1-10.0mm (0.394in.) deep.

3/4 face seal-MALE 3/4 face seal-MALE

89
φ

3.66”dia (93mm dia)

ALM C/C

OUTLET ▲ M
▲ INLET

0.157” (4.0mm) [ NOTE]

Push-In Fitting 3.44” (87.5mm) 3.44” (87.5mm)
3.66” (93mm) Dome
Pressure Inlet 6.89” (175mm)
· Dimensions are in inches
7.36” (187mm) and (mm) for reference
1.42” (36mm)
②Sensor Connector (6 pin) only.
1.22” (31mm)
· Face to face length of the
male and female are the
same.
①Power Connector (5 pin) · Subject to change without
notice.

Materials of construction Wetted surface finishes

MODEL & TYPE LM2-D Standard Ra
32µin. (0.80μm) or less
Wetted Parts (GRADE “B”)

Body SUS316L Standard Ra

7µin. (0.18μm) or less
(GRADE “C”)
Poppet SUS316L
Seat Retainer SUS316L
Diaphragm
Hastelloy® C-22
(Metal to metal seal to atmosphere)
Seat PTFE Standard connections
Spring SUS316
Gasket to seal for gauge Ni
1/2” NPT body length………………………… 3.50in. (89mm)
Packing PTFE 3/4”, 1/2” face to face length of the male and female
Non-wetted Parts are the same.……………………………………… 6.89in. (175mm)
Bonnet C3604B [NOTE]
Pressure controller YP100 · A ny combination of Face Seal male and/or female fittings are
O-ring NBR available for inlet and outlet.
· S ize and configuration of pressure gauge port is 1/4” Face Seal
male.

Ordering information
PORTING PORT TYPE
GRADE MATERIAL
2 2 Ports W Welding Port DOME
B Standard
MATERIAL 3 3 Ports P Screw Port D Non Controller
Not certified
SS SUS C particle counts 4 4 Ports G Special Specification DY YP100 (Direct)
DN YP100 (Separate)
INLET OUTLET
PRESSURE PRESSURE
GAUGE GAUGE Inlet Outlet

LM 2 SS
INLET/OUTLET
MODEL MAX. INLET PRESSURE PRESSURE GAUGE OUTLET PRESSURE RANGE Type Size Configuration OPTIONS
Point-of-Use Auto 02 2MPa A5 0～2.5MPa 10 0～0.99MPa 0 NPT 6 3/8 M Male Q Electropolish (GRADE"A")
LM2 Pressure Regulator 01 0.99MPa 2J 0～1.6MPa 09 0～0.9MPa (130psi) 2 VCR 8 1/2 F Female G Special Specification
(Needle Type) 99 Others A2 0～1MPa 08 0～0.8MPa 6 SWL A 3/4
B6 0～0.6MPa 06 0～0.6MPa (90psi) 7 UJR B 1
2K －0.1～0～1.6MPa 04 0～0.4MPa (60psi) 0 Others
2R －0.1～0～1.0MPa
R6 －0.1～0～0.6MPa 9 0 0 Others
GE Others

GRADE PORTING PORT TYPE DOME

MATERIAL 2 2Ports W WeldingPort D NON CONTROLLER
MATERIAL B Standard 3 3Ports P ねじ込みポート DY YP100(DIRECT)
SS SUS C Not certified 4 4Ports G Special Specification DN YP100(SEPARATE)
particle counts.

63
INLET OUTLET inlet outlet
PRESSURE PRESSURE
GAUGE GAUGE
 ADDRESS : 5-17-5 KUGAHARA, OHTA-KU, TOKYO 146-0085, JAPAN
PHONE : 81-3-3753-1651 FAX : 81-3-3751-5177
http://www.yutaka-crown.com

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An ISO 14001 Environmental System Certified Company
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YUTAKA / Edupress Printing Printed in Japan CAT.No.245 2018 10 (The Second edition) E