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3D Measuring Laser Microscope

OLS4100
Bringing Answers to the Surface
Precise measurement. Faster operation. High-quality imaging.
LEXT OLS4100
Expanding the Boundaries of Laser Microscopy
Measurements and images you can count on. Every time.
Widely used in quality control, research, and development across an array of industries and applications,
OLYMPUS LEXT 3D measuring laser microscopes have set new standards in 3D laser microscopy. Now, as
demand grows for increased measurement precision and wider observation applicability, Olympus has
responded with the new LEXT OLS4100. Designed to facilitate faster, easier measurement and higher-quality
imaging, the OLS4100 is expanding the boundaries of laser microscopy.
The new OLYMPUS LEXT OLS4100. Going beyond the borders of possibility.
Advantages of Laser Scanning Microscopes
Superior Metrology
High-Quality Imaging
Systematic Workflow via Intuitive GUI
Basic Principles of the LEXT OLS4100
Sample Applications
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Superior
Metrology
Systematic Workflow
via intuitive GUI
High-Quality
Imaging
Contents
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Laser
Microscope
R:0.2m
(OLYMPUS)
Advantages of Laser Scanning Microscopes
Fast Non-Contact, Non-Destructive Imaging and Measurement
Superior X-Y-Axis Measurement
Non-Contact, Non-Destructive Measurement
Accurate Measurement of Submicron Distances Across the X-Y Axes
Imaging Without Sample Preparation
Unlike stylus-based contact-type surface roughness
gauges, laser scanning microscopes (LSMs) employ
a low-power light that will prevent damaging the
surface.
An interferometer is based on a normal white-light optical
microscope, and so achieves the same lateral resolution.
With a larger-aperture objective and reduced wavelength,
the resolution of an LSM is greatly improved over typical
white light microscopes. In addition, precise angular-
controlled movement of the laser focus means that an
LSM can perform accurate X-Y plane sub-micron
measurements on diverse types of samples.
The OLS4100 achieves a lateral resolution of 0.12
microns.
A scanning electron microscope (SEM) requires
extensive sample preparation such as vacuum
evaporation and/or altering the sample to fit in the
observation chamber. An LSM allows the
measurement of samples without any prior
preparation, and immediate imaging after placing the
sample on the stage.
Comparison of Measuring Method
Start Imaging Without Sample Preparation
Micron-Order Laser Spot
Contact Surface
Roughness
Measurement R: 2 m
With an LSM, the sample can be safely returned to the production line or
experiment thanks to non-destructive measurement.
Non-Contact
Laser Microscope
R: 0.2 m (OLYMPUS)
SEM
Samples
Roughness Gauge
Samples
LSM Solution for
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Angular-Controlled Laser Scanning for
High-Resolution Imaging
Superior Z-Axis Measurement
Accurate Measurement of Submicron Heights Across the Z-Axis
An SEM delivers excellent high-resolution images but lacks any
height information. With a short-wavelength laser and its confocal
optical system, an LSM only detects in-focus reflections from a
single specified focal plane along the Z-axis. Combined with a
high-precision linear scale, this allows high-definition imaging and
accurate 3D measurement.
The OLS4100 can achieve a Z-axis resolution of 10 nanometers.
High X-Y Plane Resolution
Interferometer
Samples
LSM Solution for
Sliced Image
Sample Form
Z Position
Z1
Z2
Z3
Z4
Z-Axis Image
Z-axis Profile
Z1
Z2
Z3
Z4
128 x 128 m 0.12 m Line and Space (OLYMPUS)
LSMs have superior horizontal resolution due to a confocal optical system, making it easy to
measure the surface of the specific region of interest.
LSMs are ideal for measuring the surface contour of samples with
undulations ranging from several hundred micro-meters to the submicron
order.
SEM
Samples
Interferometer
Samples
LSM Solution for
LSM Solution for
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Superior Metrology
3D measurement of diverse samples with 10 nm height resolution and
advanced measurement parameters.
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Non-Exclusive Objective
LEXT-Dedicated Objective
Confocal B
Confocal A
2.5
2.0
1.5
1.0
0.5
0.0
-0.5
-1.0
-1.5
-2.0
-2.5
Aberration
Distance from Optical Axis Optical axis
Distance from Optical Axis Optical axis
Aberration
2.5
2.0
1.5
1.0
0.5
0.0
-0.5
-1.0
-1.5
-2.0
-2.5
Thanks to dedicated objectives with high numerical apertures and a
dedicated optical system that obtains superior performance from a 405
nm laser, the LEXT OLS4100 can reliably measure acute-angled
samples that were previously impossible to measure. These capabilities
also enable measurement of micro-roughness on an uneven surface.
With the OLS4100, an impressive X-Y resolution
of 0.12 microns is now possible thanks to a
short-wavelength 405 nm laser and a high-
aperture objective. As a result, the OLS4100 can
perform submicron measurements of a sample's
surface. With a precise 0.8 nanometer-resolution
linear scale and software algorithms such as our
original I-Z curve (see page 23), the OLS4100
can resolve height differences of 10 nanometers.
The OLS4100 employs a dual confocal
system, incorporating two confocal optical
light paths. In combination with a high-
sensitivity detector, this enables the OLS4100
to capture a precise 3D image from a sample
consisting of materials with different
reflectance characteristics.
LEXT-Dedicated Objectives
Minimized Aberrations with Dedicated Objective
(MPLAPON50XLEXT)
STEP Height standard Type B, PTB-5, Institut fr Mikroelektronik, Germany,
6 nm Detection in Height Measurement
Diamond Electroplated Tool
Objective : MPLAPON50XLEXT
Razor with an Acute Angle
Imaging Slopes up to 85
Micro-Profile Measurements with
10 nm Height Resolution
Overcoming Reflectance Differences
Wider Sample Range
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Repeatability
Repeatability &
Accuracy
Accuracy
National Standard (Japan)
National Metrology Institute of Japan (NMIJ)/National Institute of Advanced Industrial
Science and Technology (AIST)
LEXT OLS4100
JCSS Accredited Laboratory 0044
Olympus Corporation Quality
Assurance Division Testing and
Research Center
Japan Quality Assurance
Organization (JQA)
Standard Step Standard Scale
The multilayer mode facilitates observation and measurement of the transparent layer on the surface of a transparent sample. Even
with a transparent resin layer on a glass substrate, the shape and roughness of each layer, as well as the thickness of the surface
film, can be measured.
Observation/Measurement of Multiple Layers of Transparent Material
Polyimide Film
Metal Surface Polyimide Film Surface
Metallic Surface
The LEXT OLS4100's new multilayer mode is
capable of recognizing the peaks of reflected
light intensities originating from multiple layers.
Setting each layer as the focal point makes it
possible to observe and measure the upper
surface of a transparent sample. This also
enables the analysis of multiple layers,
measuring the thickness of each layer.
*According to Olympus survey as of Dec 2008.
Multilayer Mode
Applicable to Transparent Layers
Multilayer Mode Traditional
Reflected Light Reflected Light
Lower Surface Shape
Z-Position
Upper Surface Shape
Laser Beam
Z-Position
The performance of a measuring tool is typically
expressed using two different terms: accuracy,
which indicates how close a measurement value is
to its true value, and repeatability, which indicates
the degree of variations among repeated
measurement values. The OLS4100 is the
industry's first* LSM able to assure both accuracy
and repeatability.
Accuracy and Repeatability
Industry's First* Double Performance Guarantee
The OLS4100 uses a rigorous system of production for
every component. From the objective to the laser head,
Olympus delivers only the highest-quality systems based
on comprehensive inspection to the strictest standards.
On delivery, final adjustment and calibration is performed
by qualified engineers in the actual measurement
environment.
Traceability System
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This mode allows measurement of a
step between any two arbitrary points
on a surface profile. Profile
Measurement is also available.
This mode allows measurement of line
roughness on one line and plane
roughness on the entire surface.
This mode enables auto-separation of particles with the
separator function, setting of a threshold level, and setting
of a detection range within a region of interest.
This mode allows the thickness of a
film on a transparent body to be
measured by detecting changes in
refractive index.
With a user-defined threshold level on a
surface profile, this mode allows
measurement of the volume (or area) of
a geometry above or below the
threshold level.
This mode allows measurement of the distance between
two arbitrary points on a geometric image. The geometric
shape and angle for circle, rectangle, etc. are measured.
This mode allows a line width or a diameter to
be measured by automatically detecting
edges in a geometric image. This reduces
uncertainty by eliminating operator error.
"OLYMPUS Stream"
Launch Button
*Optional unit.
For grain size analysis or
nonmetallic inclusion rating,
optional OLYMPUS Stream micro-
imaging software is available,
which can be uploaded directly
from the OLS4100.
OLYMPUS Stream*
Workflow Solution for
Improved Image Analysis
Performance
Step Measurement Surface Roughness
Measurement
Particle Measurement*
Film Thickness
Measurement*
Area/Volume Measurement
Geometric Measurement
Auto Edge Detection/
Measurement*
Seven Measurement Modes
Wide Range of Measurement Types
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The LEXT OLS4100 has been developed to represent a new standard of surface roughness measuring. The OLS4100 is
calibrated in the same way as contact surface roughness gauges and has the necessary roughness parameters and filters
required per ISO and JQA. This allows users with contact surface roughness gauges to obtain output results from the
system consistent with their existing instruments, with the advantage of greater speed and non-contact measurement.
The OLS4100 has a roughness-specific mode enabling roughness profile measurement for sample lengths up to 100mm
with an automatic line stitching function.
Contact surface roughness gauges cannot measure micro surface contours less than the stylus tip diameter. The OLS4100
can measure the surface roughness of micro geometries at high resolution due to a minute laser spot diameter.
Since a contact surface roughness gauge uses a hard
needle-shaped stylus, it is more likely to scratch the surface
of a soft specimen, damaging or deforming it. With adhesive
specimens, on the other hand, the stylus can attach to the
specimen and be damaged when pulled loose, making it
impossible to obtain correct results. The OLS4100, a non-
contact laser microscope, can perform accurate surface
roughness measurement regardless of surface texture
conditions.
Micro Roughness
Non-Contact Measurement
Improved Roughness Measurement
Contact Surface
Roughness
Measuring Machine
R: 2 m
Soft Specimen
LEXT
OLS4100
R: 0.2 m
Adhesive Specimen
Polymer Film 3D image (above) and Results of Roughness Measurement (left)
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Surface roughness gauges cannot measure micron-level features since their styli are not able to access these areas. The
OLS4100 can correctly identify a measuring position and easily perform roughness measurement of a target micro area.
The OLS4100 comes with the same Surface
Profile Parameters as contact-type surface
roughness gauges, offering compatible
operability and measurement results.
The OLS4100 comes with roughness (3D)
parameters conforming to ISO25178 for
reliable evaluation of the planar area.
LEXT OLS4100 performance is comparable with results of a surface roughness gauge.
Primary Profile
Roughness Profile
Waviness Profile
Bearing Area Curve
Motif
Roughness Profile (JIS1994)
Others
Amplitude Parameters
Functional Parameters
Volumetric Parameters
Lateral Parameters
Primary Profile from a Contact Surface Roughness Gauge
Bonding Wires
Primary Profile from LEXT OLS4100
s=2.5 m with Filtering
: Pp, Pv, Pz, Pc, Pt, Pa, Pq, Psk, Pku, Psm, Pq, Pmr(c), Pc, Pmr
: Rp, Rv, Rz, Rc, Rt, Ra, Rq, Rsk, Rku, Rsm, Rq, Rmr(c),Rc, Rmr, RZJIS, Ra75
: Wp, Wv, Wz, Wc, Wt, Wa, Wq, Wsk, Wku, Wsm, Wq, Wmr(c), Wc, Wmr
: Rk, Rpk, Rvk, Mr1, Mr2
: R, Rx, AR, W, Wx, AW, Wte
: Ra(JIS1994), Ry, Rz(JIS1994), Sm, S, tp
: R3z, P3z, PeakCount
: Sq, Ssk, Sku, Sp, Sv, Sz, Sa
: Smr(c), Sdc(mr), Sk, Spk, Svk, SMr1, SMr2, Sxp
: Vv(p), Vvv, Vvc, Vm(p), Vmp, Vmc
: Sal, Str
Measurement of Features at the Micron Level
Parameter Compatibility
Accommodating Next-Generation Parameters
LEXT OLS4100 Parameters
High-Quality Imaging
For clear 3D color images, high-sensitivity laser DIC, or high-dynamic range
(HDR) images.
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Crystal-Clear 3D Color Images
The OLS4100 uses a white LED light and a high-color-fidelity CCD camera to generate clear, natural-looking color images,
comparable to those obtained with high-grade optical microscopes.
The LEXT OLS4100 can acquire three different types of information at the same time: a true-color optical microscope image, a
laser microscope image, and height map. The OLS4100 makes it possible to capture an optical microscope image consisting
of in-focus pixels only, and integrate them with a true-color optical microscope image containing height information.
Natural Color Reproduction
Three Types of Integrated Images
Real-Color 3D Image Confocal 3D Laser Image Height Map
2D Color Image (Inkjet Dots on Paper, Objective 20x) 3D Color Image (Inkjet Dots on Paper, Objective 20x)
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More Realistic Surface Reproduction
DI C
Differential Interference Contrast (DIC) is an observation method used to visualize nanometer micro surface contours, which
normally lie far beyond the resolving power of a laser microscope. Thanks to its DIC laser mode, the LEXT OLS4100 allows you
to obtain live images comparable to those of an electron microscope, under relatively low power magnifications.
Laser DIC (Differential Interference Contrast)
Laser Image with DIC (5x Objective)
STEP Height standard Type B, PTB-5, Institut fr Mikroelektronik, Germany,
Actual Height of the Feature : 6 nm
Laser Image without DIC (5x Objective)
STEP Height standard Type B, PTB-5, Institut fr Mikroelektronik, Germany
Laser Image without DIC (Polymer Film) Laser Image with DIC (Polymer Film)
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Optimized Balance Between Brightness and Contrast
Stabilization of Measurement and
Imaging Environments
HDR
The OLS4100's High Dynamic Range (HDR) function combines several optical microscope images captured using different
exposures. Brightness, contrast, texture, and saturation are controlled individually so that HDR creates images with a wide
dynamic range. This enables clear visualization of a color image, especially for samples lacking texture.
To eliminate external influences on measurement and
imaging, the OLS4100 incorporates a hybrid vibration-
dampening mechanism using coil springs and dampening
rubber to stabilize the operating environment. This eliminates
the need for a dedicated vibration-dampening stand,
allowing measurements on any desktop.
HDR (High Dynamic Range) Imaging
Color Image without HDR
(Super-Density Fabric, Objective 20x, Zoom 1x)
Color Image with HDR
(Super-Density Fabric, Objective 20x, Zoom 1x)
Hybrid Vibration-Dampening Mechanism
Algorithm
Several Different Exposure Images
High Tone Image Processing
To compress image data
into bit capacity of the display:
Processed Image
Parameter Adjustment
Contrast Control
Saturation Control
Texture Control
Brightness Control
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Systematic Workflow via Intuitive GUI
Easy operation accomplishes your goals faster than ever.
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Two stitching methods are available for scanning large
areas: Manual mode for live image acquisition and
Automatic mode for faster image acquisition. Operation is
quick and simple2D stitching starts automatically at the
touch of a single button, and wide area images are
acquired immediately. The stitching size is available from
five steps in 3x3, 5x5, 7x7, 9x9, and 21x21 in Automatic
mode. Unnecessary parts of the acquired images can also
be removed manually with simple mouse/joystick
operation.
Fast Macro Map Stitching
Easy Three-Step Process
Keeping Track of the Sample
With the LEXT OLS4100, observation or measurement begins immediately once the sample is placed on the stage.
Thanks to our easy three-step Imaging, Measurement and Reports process, measurement procedures can be quickly
mastered, even by those not familiar with laser microscopy.
The OLS4100s macro map function allows wide-field image display of a sample under low magnification, with a rectangular
observation marker on the macro sample image. The field of view can be set up to 441 (21x21) times wider than the
conventional view. When used with the motorized six-lens nosepiece, the macro map function allows smooth, convenient, one-
click operation for stage movement and magnification. Accurate parfocality and objective centering can be preset and
synchronized with one-click stage movement and magnification.
Macro Map Functionality
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Acquisition
Smart Scan for Simple 3D Imaging
Conventional 3D scanning requires complicated settings that are difficult for novice users. With the LEXT OLS4100s new
Smart Scan mode, even first-time users can quickly acquire 3D images with a single click of a button. In addition to upper and
lower limit settings, appropriate brightness level is automatically set up by the system based on the image to be captured,
allowing even new users to obtain accurate height measurements and an optimized image.
Upper/Lower Limit Setting
Acquisition Pitch Setting
Brightness Setting
Upper Limit Setting
Lower Limit Setting Lowered to Preset Level
Auto Recognition
Speed of image acquisition is significantly increased, with automatic adjustments for brightness and position across the Z-axis
direction and planar surface.
Automatic 3D Image Acquisition
3D Imaging
Conventional 3D Acquisition OLS4100 3D Acquisition
Greater Reduction of Acquisition Time
Automatic Brightness Control
Conventional Model OLS4100
Brightness Control on a Plane Brightness Control with a Range of Height
Automatic
Control
Lower Limit
Setting
Brightness
Setting
Upper Limit
Setting
Brightness &
Upper/
Lower Limit
Check
Click on
Acquisition
Button
Acquisition
Auto Lower
Limit Setting
Auto Upper
Limit Setting
Auto
Brightness
Setting
Click on
Acquisition
Button
Steps Automated in Smart Scan
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The new Ultra-Fast mode allows scanned image acquisition at twice the speed of conventional Fast mode, and
approximately nine times the speed of Fine mode. This makes it possible to measure micro-samples with very steep angles,
such as the tip of a knife, which is difficult to observe due to fine Z-step movement and high magnification.
The OLS4100 also comes with a Band Scan mode for measurement of limited target areas, providing measurement
performance 1/8th faster than conventional modes.
Acquisition with a Full Scan
Actual scanning time varies depending on magnification and Z-acquisition range.
Acquisition with Band Scan (1/8th )
Fine
Fast
Ultra-Fast
10 8 6 4 2 0
Number of images acquired in a set amount of elapsed time:
Improved Scanning Speed
High-Speed Acquisition of Required Areas Only
9.3
1.0
5.5
(images)
1024
X
128
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In Smart Scan mode, all it takes is the click of a button. As the location across the Z-axis is automatically adjusted, image
acquisition in the Z-axis direction can be restricted to required areas only, for rapid high-power observation across a wide area.
Quick Image Acquisition
In Live mode, the area to be observed
can be selected manually by tracing the
required region onscreen. This is ideal
when the sample has an irregular shape.
Manually Specifying Required Image Areas
2D Image After Stitching
Stitching Area: Square (21x3) 63 Pieces
Individual 2D Images Before Stitching (Simulation)
Smart Scan Mode
3D Image After Stitching
Stitching Area: Circle (3 Points)
Conventional Acquisition Mode
New High-Speed Stitching Mode
As in macro mapping, the area to be observed can be specified from a wide area map. In Automatic mode, an area map can be
automatically generated in roughly half the time it normally takes by setting a rectangular stitching size of up to 625 images.
Observation can begin immediately once the target area is specified on the area map.
Specify Target Areas from Wider-Area Stitched Images
Measuring
Areas in
Z-Axis
Direction
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Customizable Reports at the Touch of a Button
One-Click Solutions
The OLS4100 generates reports at the touch of a button after measurement, and an edit function allows the operator to
customize each report template. Copying and pasting measured results into a word processing/spreadsheet application is
also quite simple, as is retrieving required images/reports from a database.
A detailed user-designed wizard function eliminates the need for lengthy training and allows quick and easy operation by
new operators.
Report Creation
Wizard Function
Image A
Image B
Image C
Image D
Custom Recipe Applying to Multiple Images Offers Speedy Report Output
Customizable
Recipe
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For 2D scanning, the OLS4100 incorporates an
Olympus scanner-on-scanner. An electromagnetic
MEMS scanner handles the X direction, while a
high-precision Galvano mirror takes care of
scanning in the Y direction. This innovative system
enables the axis of the scanner and the exit pupil
of the objective to be placed at an optically
conjugate position. This ideal optical layout allows
accurate high-speed, low-distortion X-Y scanning,
enabling the OLS4100 to provide high-density
scanning up to 4096 x 4096 pixels.
A confocal optical system captures only the in-focus image while simultaneously eliminating flare. In addition, confocal
technology can be used as a height sensor since only thin image planes of the same height are captured. The OLS4100 is
equipped with an Olympus dual confocal system, enhancing optical performance for precise 3D images even with samples
made up of materials with different reflectances. The circular pinhole point of laser light also produces a uniform confocal effect,
enhancing contrast in every direction.
2D Scanning System
405 nm Laser Scan
Confocal Optical System
OLS4100 Light Source
(405 nm)
Conventional Microscopes
(550 nm peak)
700 nm 600 nm
OLS4100 Light Source
Photomultiplier Photomultiplier
Circular
Confocal
Pinhole
Telan Lens Telan Lens
Non-Confocal Non-Confocal Confocal
Basic Principles of the LEXT OLS4100
Confocal
The lateral resolution of an optical microscope is defined largely by the parameters of the optics and the wavelength of the light
source. With a 405 nm short-wavelength semiconductor laser, the LEXT OLS4100 enjoys a high lateral resolution in comparison
to a conventional microscope using visible light with a 550 nm peak.
400 nm 800 nm
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CFO Search
OLS4100 Optical Path Diagram
Obtaining height information is a primary
function of the OLS4100 and is achieved by
moving the objective upward to detect the
change of light intensity along the Z-axis.
Olympus CFO (calculated focus operation)
technology detects light intensity automatically in
order to obtain discrete height data. The
approximate curve of an ideal I-Z curve is
calculated alongside the maximum brightness
value and Z-axis information, which define each
image pixel. CFO search technology significantly
improves repeatabilityone of the most
indispensable assets of a measurement tool.
Violet laser enables non-contact
observation and measurement
Horizontal (X-Y direction)
resolution of 0.12 m to enable
high-definition image observation
10-nanometer resolution in the
Z-axis direction to enable 3D
surface contour measurement
Detects Peak Intensity for Every Pixel
Calculated Height
Reflective
Intensity
Calculated
Reflection
Intensity
Height
Multiple Images Acquired by Shifting Focus
Based on these basic principles, the LEXT OLS4100 offers the following features:
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1
1
2
2
3
3
4
4
Sample Applications
Semiconductor/FPD (Flat Panel Display)
Electronic Component/MEMS (Microelectromechanical System)
1 Photomask
(objective 20x/optical zoom 1x/scanning area 640 m x 640 m)
Sample provided by Koshibu Precision Co., Ltd. (P3,P24)
2 Micro Lens
(objective 100x/optical zoom 1x/scanning area 128 m x 128 m)
3 Flexible PCB Connector
(objective 50x/optical zoom 1x/scanning area 256 m x 256 m)
4 MEMS
(objective 20x/optical zoom 1.3x/scanning area 483 m x 483 m)
1 Wafer Bump
(objective 100x/optical zoom 1.5x/scanning area 85 m x 85 m)
2 Light Guide Panel
(objective 50x/optical zoom 1x/scanning area 256 m x 256 m)
3 Chip Pad
(objective 50x/optical zoom 2x/scanning area 128 m x 128 m)
4 Laser Dot on Light Guide Panel
(objective 100x/optical zoom 1x/scanning area 128 m x 128 m)
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5 Sandpaper #400 (3D)
(objective 20x/optical zoom 1x/scanning area 640 m x 640 m)
6 Sandpaper #400 (2D)
(objective 20x/optical zoom 1x/scanning area 640 m x 640 m)
7 Super-Density Fabric (3D)
(objective 20x/optical zoom 1x/scanning area 640 m x 640 m)

1
5
7
6
2
3 4
Material/Metal Processing
1 Diamond Electrocoating Tool
(objective 50x/optical zoom 1x/scanning area 256 m x 256 m)
2 Carbon
(objective 100x/optical zoom 1x/scanning area 128 m x 128 m)
3 Ultra-Thin Pipe
(objective 100x/optical zoom 1x/scanning area 128 m x 128 m)
4 Adhesive Tape
(objective 50x/optical zoom 2x/scanning area 128 m x 128 m)
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MAIN UNIT DIMENSIONS
COMBINATION SYSTEM DIMENSIONS
1300
5
5
0
358 276
4
0
5
Unit: mm
4
4
8
Standard-Type OLS4100-SAF
LINEUP
300mm-Stage-Type OLS4100-LAF
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LSM Section
Light Source/Detector
Light Source: 405 nm Semiconductor Laser,
Detector: Photomultiplier
Total Magnication 108x 17,280x
Zoom Optical Zoom: 1x 8x
Measurement Planar Measurement Repeatability 100x: 3n-1=0.02 m
Accuracy Measurement Value 2%
Height Measurement
System Revolving Nosepiece Vertical-Drive System
Stroke 10 mm
Scale Resolution 0.8 nm
Movement Resolution 10 nm
Display Resolution

1 nm
Repeatability 50x: n-1=0.012 m
Accuracy 0.2+L/100 m or Less (L=Measuring Length)
Color Observation Section Light Source/Detector Light Source: White LED,
Detector: 1/1.8-Inch 2-Megapixel Single-Panel CCD
Zoom Digital Zoom: 1x 8x
Revolving Nosepiece Motorized BF Sextuple Revolving Nosepiece
Differential Interference Contrast Unit Differential Interference Contrast Slider: U-DICR,
Polarizing Plate Unit Built-In
Objective BF Plan Semi-apochromat 5x, 10x
LEXT-Dedicated Plan Apochromat 20x, 50x, 100x
Z Focusing Unit Stroke 100 mm
XY Stage 100x100 mm (Motorized Stage),
Option: 300x300 mm (Motorized Stage)
Model Magnication Field of View Working Distance (WD) Numerical Aperture (NA)
MPLFLN5X 108x-864x 2,560-320 m 20.0 mm 0.15
MPLFLN10X 216x-1,728x 1,280-160 m 11.0 mm 0.30
MPLAPON20XLEXT 432x-3,456x 640-80 m 1.0 mm 0.60
MPLAPON50XLEXT 1,080x-8,640x 256-32 m 0.35 mm 0.95
MPLAPON100XLEXT 2,160x-17,280x 128-16 m 0.35 mm 0.95
This product is designed for use in industrial environments for the EMC performance. Using it in a residential environment may affect other equipment in the environment
MAIN UNIT
OBJECTIVE SPECIFICATIONS
OLYMPUS CORPORATION is ISO9001/ISO14001 certified.
All company and product names are registered trademarks and/or trademarks of their respective owners.
Images on the PC monitors are simulated.
Specifications and appearances are subject to change without any notice or obligation on the part of the manufacturer. www.olympus-ims.com
For enquiries - contact
www.olympus-ims.com/contact-us
M1775E-072014