EE C245 – ME C218

Introduction to MEMS Design

Fall 2007
Prof Clark T
Prof. T.-C.
C Nguyen
Dept of Electrical Engineering & Computer Sciences
Dept.
University of California at Berkeley
Berkeley,
y CA 94720

L t
Lecture 16:
16 Energy
E Methods
M th d I
EE C245: Introduction to MEMS Design Lecture 16 C. Nguyen 10/21/08 1
 Lecture Outline

• Reading:
g Senturia, Chpt.
p 9, 10
• Lecture Topics:
ª Bending of beams
ª Cantilever beam under small deflections
ª Combining cantilevers in series and parallel
p
ª Folded suspensions
ª Design implications of residual stress and stress gradients
ª Energy Methods
(Virtual Work
(Energy Formulations
(Tapered Beam Example
(Doubly Clamped Beam Example
(Large Deflection Analysis

EE C245: Introduction to MEMS Design Lecture 16 C. Nguyen 10/21/08 2

 Deflection of Folded Flexures

This equivalent to
two cantilevers of
l
length
th Lc/2
Composite cantilever
free ends attach here

Half of F
absorbed in
other half 4 sets of these pairs,
pairs each of
(symmetrical) which gets ¼ of the total force F
EE C245: Introduction to MEMS Design Lecture 16 C. Nguyen 10/21/08 3
 Constituent Cantilever Spring Constant
• From our previous analysis:
Fc Lc 2 ⎛ y ⎞ Fc y 2
x( y ) = y ⎜⎜ 1 − ⎟=
⎟ (3 Lc − y )
2 EI z ⎝ 3 Lc ⎠ 6 EI z

• From which the spring constant is:

Fc 3 EI z
3EI
kc = = 3
x ( Lc ) Lc
• Inserting Lc = L/2
3 EI z 24 EI z
kc = 3
=
( L / 2) L3

EE C245: Introduction to MEMS Design Lecture 16 C. Nguyen 10/21/08 4

 Overall Spring Constant
Rigid
Truss
• Four pairs of clamped-guided beams
ª In each pair, beams bend in series
ª (Assume
(A ttrusses are iinflexible)
fl ibl )
• Force is shared by each pair → Fpair = F/4
Leg

Fpair

EE C245: Introduction to MEMS Design Lecture 16 C. Nguyen 10/21/08 5

 Folded-Beam Stiffness Ratios
Folded-beam • In the x-direction:
suspension 24EI z
kx =
L3
• In the z-direction:
ª Same
S m flflexure and
d boundary
b d
conditions
24EI x
kz = 3
Shuttle
L
• In the yy-direction:
8 EWh
[See Senturia, §9.2] ky =
L
Folding
Much
• Thus: y = 4⎛⎜ ⎞⎟ stiffer in
truss 2
k L
Anchor kx ⎝ W ⎠ y-direction!
EE C245: Introduction to MEMS Design Lecture 16 C. Nguyen 10/21/08 6
 Folded-Beam Suspensions Permeate MEMS

Accelerometer [ADXL-05, Analog Devices] Gyroscope [Draper Labs.]

Micromechanical Filter [K. Wang, Univ. of Michigan]

EE C245: Introduction to MEMS Design Lecture 16 C. Nguyen 10/21/08 7
 Folded-Beam Suspensions Permeate MEMS

• Below: Micro-Oven Controlled Folded-Beam Resonator

EE C245: Introduction to MEMS Design Lecture 16 C. Nguyen 10/21/08 8

 Stressed Folded
Folded-Flexures
Flexures

EE C245: Introduction to MEMS Design Lecture 16 C. Nguyen 10/21/08 9

 Clamped-Guided Beam Under Axial Load
• Important case for MEMS suspensions, since the thin films
comprising them are often under residual stress
• Consider small deflection case: y(x) « L
z x
L
y

Governing differential equation: (Euler Beam Equation)

Axial Load Unit impulse @ x=L

EE C245: Introduction to MEMS Design Lecture 16 C. Nguyen 10/21/08 10
 The Euler Beam Equation

R
Axial Stress

• Axial stresses produce no net horizontal force; but as soon

as the beam is bent, there is a net downward force
ª For equilibrium,
equilibrium must postulate some kind of upward load
on the beam to counteract the axial stress-derived force
ª For ease of analysis, assume the beam is bent to angle π

EE C245: Introduction to MEMS Design Lecture 16 C. Nguyen 10/21/08 11

 The Euler Beam Equation

Note Use of the full

Note:
bend angle of π to
establish conditions for
load balance; but this
returns us to case of
small displacements and
small angles

EE C245: Introduction to MEMS Design Lecture 16 C. Nguyen 10/21/08 12

 Clamped-Guided Beam Under Axial Load
• Important case for MEMS suspensions, since the thin films
comprising them are often under residual stress
• Consider small deflection case: y(x) « L
z x
L
y

Governing differential equation: (Euler Beam Equation)

Axial Load Unit impulse @ x=L

EE C245: Introduction to MEMS Design Lecture 16 C. Nguyen 10/21/08 13
 Solving the ODE
• Can solve the ODE using standard methods
ª Senturia, pp. 232-235: solves ODE for case of point load
on a clamped-clamped
l d l d b
beam ((which
hi h d
defines
fi B.C.’s)
B C ’ )
ª For solution to the clamped-guided case: see S.
Timoshenko, Strength of Materials IIII: Advanced Theory
and Problems, McGraw-Hill, New York, 3rd Ed., 1955
• Result from Timoshenko:

EE C245: Introduction to MEMS Design Lecture 16 C. Nguyen 10/21/08 14

 Design Implications
• Straight flexures
ª Large tensile S means flexure behaves like a tensioned
wire
i (for
(f which
hi h k-11 = L/S)
ª Large compressive S can lead to buckling (k-1 → ∞)
• Folded flexures
ª Residual stress
y partially
only p y
released
ª Length from truss
to shuttle
shuttle’ss
centerline differs
by Ls for inner
and outer legs

EE C245: Introduction to MEMS Design Lecture 16 C. Nguyen 10/21/08 15

 Effect on Spring Constant
• Residual compression on outer legs with same magnitude of
tension on inner legs:
⎛ Ls ⎞ ⎛ Ls ⎞
Beam Strain: ε b = ±ε r ⎜ ⎟ ; Stress Force: S = ± Eε r ⎜ ⎟Wh
⎝ L⎠ ⎝ L⎠
• Spring constant becomes:

• Remedies:
ª Reduce the shoulder width Ls to minimize stress in legs
ª Compliance in the truss lowers the axial compression and
tension and reduces its effect on the spring constant
EE C245: Introduction to MEMS Design Lecture 16 C. Nguyen 10/21/08 16
 Energy Methods

EE C245: Introduction to MEMS Design Lecture 16 C. Nguyen 10/21/08 17

 More General Geometries
• Euler-Bernoulli beam theory works well for simple geometries
• But how can we handle more complicated ones?
• Example: tapered cantilever beam
• Objective: Find an expression for displacement as a function
of
f location
l ti x under
d a pointi t load
l d F applied
li d att the
th tip
ti of
f the
th
free end of a cantilever with tapered width W(x)

W
50% taper
t

x
y

EE C245: Introduction to MEMS Design Lecture 16 C. Nguyen 10/21/08 18

 Solution: Use Principle of Virtual Work
• In an energy-conserving system (i.e., elastic materials), the
energy stored in a body due to the quasi-static (i.e., slow)
action
i of f surface
f and
d body
b d forces
f is
i equall to the
h workk done
d
by these forces …
• Implication: if we can formulate stored energy as a function
of the deformation of a mechanical object, then we can
determine how an object responds to a force by determining
the shape the object must take in order to minimize the
difference U between the stored energy and the work done
by the forces:

U = Stored Energy - Work Done

• Key idea: we don’t

don t have to reach U = 0 to produce a very
useful, approximate analytical result for load-deflection
EE C245: Introduction to MEMS Design Lecture 16 C. Nguyen 10/21/08 19
 More Visual Description …

EE C245: Introduction to MEMS Design Lecture 16 C. Nguyen 10/21/08 20

 Fundamentals: Energy Density
• Strain energy density: [J/m3]
ª To find work done in straining material

• Total strain energy [J]:

ª Integrate over all strains (normal and shear)

EE C245: Introduction to MEMS Design Lecture 16 C. Nguyen 10/21/08 21

 Bending Energy Density
Neutral Axis
y(x)) = transverse displacement
y( p
of neutral axis
x
y
• First, find the bending energy dWbend in an infinitesimal
length dx:

EE C245: Introduction to MEMS Design Lecture 16 C. Nguyen 10/21/08 22

 Energy Due to Axial Load

x
y

• Strain due to axial load S contributes an energy dWstretch

in length dx, since lengthening of the different element dx
(to ds) results in a strain εx

EE C245: Introduction to MEMS Design Lecture 16 C. Nguyen 10/21/08 23

 Shear Strain Energy

Shear Modulus

• See W.C. Albert, “Vibrating Quartz Crystal Beam

Accelerometer,” Proc. ISA Int. Instrumentation Symp., May
1982 pp
1982, pp. 33-44

EE C245: Introduction to MEMS Design Lecture 16 C. Nguyen 10/21/08 24

 Applying the Principle of Virtual Work
• Basic Procedure:
ª Guess the form of the beam deflection under the applied
loads
ª Vary the parameters in the beam deflection function in
order to minimize:
Assumes
Sum strain energies point load

U = ∑ W j − ∑ Fi ui
j i
Displacement
at point load

ª Find minima by simply setting derivatives to zero

• See
S S
Senturia,
t i pg. 244
244, f
for a generall expression
i with
ith
distrubuted surface loads and body forces
EE C245: Introduction to MEMS Design Lecture 16 C. Nguyen 10/21/08 25
 Example: Tapered Cantilever Beam
• Objective: Find an expression for displacement as a function
of location x under a point load F applied at the tip of the
free end of a cantilever with tapered width W(x)

W
50% taper
Adjustable
x parameters:
minimize U
y

y( x ) = c2 x 2 + c3 x 3
• Start by guessing the solution
ª It should satisfy the boundary conditions
ª The strain energy integrals shouldn’t be too tedious
Thi might
(This i ht nott matter
tt much h these
th days,
d though,
th h since
i
one could just use matlab or mathematica
EE C245: Introduction to MEMS Design Lecture 16 C. Nguyen 10/21/08 26
 Strain Energy And Work By F

(Bending Energy)

(Using our guess)

p Deflection
Tip f

EWh3

EE C245: Introduction to MEMS Design Lecture 16 C. Nguyen 10/21/08 27

 Find c2 and c3 That Minimize U
• Minimize U → basically, find the c2 and c3 that brings U
closest to zero (which is what it would be if we had guessed
correctly)
l )
• The c2 and c3 that minimize U are the ones for which the
partial derivatives of U with respective to them are zero:

• Proceed:
ª First, evaluate the integral to get an expression for U:

EE C245: Introduction to MEMS Design Lecture 16 C. Nguyen 10/21/08 28

 Minimize U (cont)
• Evaluate the derivatives and set to zero:

• Solve
S l the
th simultaneous
i lt equations
ti to
t gett c2 and
d c3:

EE C245: Introduction to MEMS Design Lecture 16 C. Nguyen 10/21/08 29

 The Virtual Work-Derived Solution
• And the solution:

• Solve for tip deflection and obtain the spring constant:

• Compare with previous solution for constant-width cantilever

beam (using Euler theory):

13% smaller than

tapered width case
tapered-width

EE C245: Introduction to MEMS Design Lecture 16 C. Nguyen 10/21/08 30

 Comparison With Finite Element Simulation

• Below: ANSYS finite element model with

ase = 20 μm
L = 500 μm Wbase E = 170 GPa
h = 2 μm Wtip = 10 μm

• Result:
l (from
( static
analysis)
ªk = 0 0.471
471 μN/m
• This matches the
result from energy
minimization to 3
significant figures

EE C245: Introduction to MEMS Design Lecture 16 C. Nguyen 10/21/08 31

 Need a Better Approximation?
• Add more terms to the polynomial
• Add other strain energy
gy terms:
ª Shear: more significant as the beam gets shorter
ª Axial: more significant as deflections become larger
• Both of the above remedies make the math more complex,
complex
so encourage the use of math software, such as
Mathematica, Matlab, or Maple p
• Finite element analysis is really just energy minimization
• If this is the case, then why ever use energy minimization
analytically (i.e., by hand)?
ª Analytical expressions, even approximate ones, give
insight into parameter dependencies that FEA cannot
ª Can compare the importance of different terms
ª Should use in tandem with FEA for design

EE C245: Introduction to MEMS Design Lecture 16 C. Nguyen 10/21/08 32