ISO - TS - 16949 Semiconductor Requirements
ISO - TS - 16949 Semiconductor Requirements
ISO - TS - 16949 Semiconductor Requirements
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Customer Specific Requirements
(ISO/TS-16949) Semiconductor Commodity – Jan 12, 2004 Release
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Customer Specific Requirements
(ISO/TS-16949) Semiconductor Commodity – Jan 12, 2004 Release
SEMICONDUCTOR COMMODITY
The Automotive Electronics Council (AEC) has revised the QS-9000 (second edition) Semiconductor
Supplement as an evolution to utilize and align it with the ISO/TS-16949 (second edition) standard as a
customer specific requirements document for the semiconductor commodity. As with the QS9000
Semiconductor Supplement, Second Edition, this document coordinates its paragraph numbering with the
base document. The comprehensive document for semiconductors becomes this document coordinated
with the ISO/TS-16949 standard. Some minor rewording or changes have been incorporated into this
document as it evolved from the QS-9000 supplement. For continuity, the forwards to the prior editions of
the QS-9000 supplements have been reproduced below.
The AEC is thankful to the Supplier Quality Engineers, Component Engineers and Suppliers to our
respective companies that have offered suggestions to improve this document. Thanks also go to the
members of the DaimlerChrysler/Ford/General Motors Supplier Quality Requirements Task Force and to
Chad Kymal, President of Omnex, for their on-going guidance and direction.
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The Automotive Electronics Council (AEC) has revised the QS-9000 Semiconductor Supplement for three
reasons. First, it has desired to maintain consistency with the third edition of QS-9000. Second, as the
QS-9000 Semiconductor Supplement has been used in assessments; questions and suggestions for
improvement of the document have been received from auditors and semiconductor companies audited.
Third, the first edition was written to recognize that the AEC would be primarily conducting second party
assessments of semiconductor suppliers. Now that the majority of the assessments are being conducted
by third party registrars, it was determined that the document needed to be strengthened and many of the
requirements clarified to guide the auditors and suppliers.
The AEC would like to thank all the Supplier Quality Engineers and Component Engineers in their
companies and the many semiconductor company personnel that have made suggestions for
improvement of this document. A thanks also goes to the members of the Chrysler/Ford/General Motors
Supplier Quality Requirements Task Force for their on-going guidance and direction.
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The Automotive Electronics Council (AEC) under the guidance of the Chrysler/Ford/General Motors
Supplier Quality Requirements Task Force developed Quality System Requirements QS-9000
Semiconductor Supplement. The AEC retains control of the document under direction of the Task
Force.
The AEC is a cooperative alliance among the parts engineering/components engineering and supplier
quality groups of Chrysler, Delco Electronics and Ford. This document is the result of requests from the
semiconductor industry to provide a common interpretation and application of the former individual
company quality system requirements that have now been standardized by the Task Force.
The AEC has developed these supplementary requirements to QS-9000 to ensure consistency in the
quality system assessment processes.
This document:
• Is consistent with the Chrysler/Ford/General Motors Quality System Requirements
• Utilizes the Chrysler/Ford/General Motors Quality System Assessment document and process
• Provides the interpretation of nomenclature specific for the semiconductor industry
• Applies to semiconductor suppliers to Chrysler/Ford/Delco Electronics
• Is designed to aid the semiconductor supplier in implementing an effective quality system
• Assists the supplier in preparation for second party audits
The AEC and Task Force are confident that this supplement, implemented in the spirit of continuous
improvement, will enhance quality systems while eliminating redundant requirements, facilitate consistent
terminology, and thus reduce costs. In that same spirit, the Task Force and AEC encourage suppliers to
suggest how the document and its implementation can be improved.
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Customer Specific Requirements
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Table of Contents
(ISO/TS-16949 Semiconductor Commodity Only)
I Introduction……………………………………………………………… 9
I.1 Goal…………………………………………………………………………… 9
I.2 Purpose………………………………………………………………………. 9
I.3 Approach……………………………………………………………………… 9
I.4 Applicability…………………………………………………………………… 9
I.5 Implementation………………………………………………………………. 9
5 Management Responsibility………………………………………… 11
5.4.1.1S Quality objectives – supplemental……………………………………… 11
6 Resource Management……………………………………………… 11
6.2.2.2S Training………………………………………………………………. 11
7 Product realization…………………………………………………… 11
7.1S Planning of product realization –supplemental………………………. 11
7.3.3.2S PFMEA………………………………………………………………… 13
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Customer Specific Requirements
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I Introduction
I.1 Goal
The goal of this document is to assist the semiconductor industry in the application of ISO/TS-16949
(second edition) for the development of fundamental quality systems that provide for continuous
improvement, emphasizing defect prevention and the reduction of variation and waste in the
semiconductor supply chain.
I.2 Purpose
This customer specific, commodity document provides a consistent interpretation between
DaimlerChrysler, Delphi Corporation and Visteon Corporation of ISO/TS-16949 and communicates
additional common system requirements unique to the producers of semiconductor devices.
I.3 Approach
This customer specific, commodity document is intended to fully embrace the current release of ISO/TS -
16949. It is recognized by DaimlerChrysler, Delphi Corporation, Visteon Corporation, and the
semiconductor suppliers that automotive industry language begs consistent interpretation and application.
This supplement has been generated by quality and engineering professionals of DaimlerChrysler, Delphi
Corporation and Visteon Corporation with considerable assistance from the semiconductor industry.
ISO/TS-16949 together with this customer specific document constitutes the comprehensive requirements
document for the semiconductor industry. The two documents shall be used together to comprehend all
requirements and definitions.
I.4 Applicability
ISO/TS-16949 and this customer specific document applies to the internal and external suppliers of
production and service semiconductor parts and materials. Every clause of ISO/TS-16949 and this
customer specific document applies to semiconductor suppliers with the possible exception of design
and/or service. These clauses should be carefully analyzed with the customer or registrar to determine
applicability to a particular site or activity.
I.5 Implementation
Implementation is based on ISO/TS-16949 with the addition of the customer specific requirements for
semiconductor suppliers.
AEC qualification and quality documents are available through the AEC website: www.aecouncil.com.
The following AEC Documents are available in software version :
It is suggested that the AEC documents be implemented as part of this document as referenced within.
Semiconductor Assembly Council (SAC) documents are available through the SAC website. Open
"www.sacouncil.org," select "SAC STANDARDS" and follow the directions for members or nonmembers.
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The following SAC Standards are available and are suggested for use and implementation as referenced
within this document:
The following reference manuals are required as part of the implementation as refereneced within this
document:
These documents are available through AIAG 01-248-358-3003. In Europe, contact Carwin Continuous
at 44-1708-861333.
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3.1.5S Laboratory
For laboratory scope, laboratories are those facilities that perform reliability, qualification or durability
testing to the requirements of a customer documented specification or calibration of measurement
equipment.
Field and customer problem and failure analysis reports shall be retained for three years.
6.2.2.2S Training
Process steps that require operator certification will be identified and operators certified. These operators
shall be periodically re-certified.
The following environmental and housekeeping items shall be controlled where appropriate:
• ESD controls and discipline
• Airborne particles
• Chemical particle count
• Machine particle count
• Humidity
• Temperature
• General workstation cleanliness
• Water resistivity
• Robing requirements and discipline
The product realization planning shall include processes from the incoming material through shipping and
warehousing. Failure mode and effects analysis and control plan documents shall include these
processes.
NOTE: The organization should consider the entire supply chain in product realization planning. This
should encourage the use of FMEA, Control Plan, and other preventive tools.
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Product realization planning shall be extended to include material movement between controlled and
contracted sites, such as :
• Fabrication to assembly
• Assembler to test house
The intent of this activity is to establish a customer/supplier relationship between the sending and
receiving organizations to facilitate requirements definition and process mistake proofing.
• The receiving and sending organizations shall agree upon performance/capability requirements that
as a minimum establish product/process expectations, timing and support requirements.
• Feasibility concerns shall be documented and a plan developed to remove the feasibility concerns
with special attention to external and internal customer concerns.
Effects of process changes shall be verified by before and after characterization of the appropriate device
parameters. This applies to both proprietary and nonproprietary designs.
If the customer does not identify any special characteristics, the organization shall identify those process
parameters or product characteristics that are critical to proper operation of the product.
The feasibility analysis shall include a compatibility review of current design rules, critical process
capability and design/process FMEA with manufacturing personnel.
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For custom or application specific parts, the organization shall review with and, as appropriate, obtain
customer concurrence at appropriate stages of design and development. Design process effectiveness is
indicated by evidence of first pass design success.
Device and process simulation model robustness shall be reviewed periodically to assure design and
process compatibility. The organization shall have a documented procedure defining the review methods
and frequency. This procedure shall include the extraction of key semiconductor parameters to verify
process to model robustness.
NOTE: For semiconductor organizations, it is not required that CAD/CAE systems be capable of two way
interface with customer systems unless this capability is requested by the customer for specific parts.
When a new process or technology is being designed, the organization shall consider the customer
product life cycle vs. the process or technology life cycle being developed. When a technology or
process is identified as becoming obsolete, the organization shall notify the customer and develop plans
to manage the obsolescence. See also 7.3.7 S.
Parameters which are specified as “guarantee by design” shall be identified in the DFMEA. The
organization shall document the method used to guarantee such a parameter (i.e., correlated to other
tested parameters, controlled by process controls) both at design and over time.
NOTE: Due to the nature of semiconductors, where multiple parts come from a common family based on
common technology and processing, family DFMEAs are acceptable. Specific design differences for
parts within the family may require supplements to the family DFMEA.
The organization shall have a documented method for correlating design and product requirements to
process target values. For example, process data may be used to verify design and product simulations.
7.3.3.2S PFMEA
PFMEAs shall consider processes from incoming material receipt to shipping and warehousing. Mistake
proofing tools shall be used to prevent mixed material, wrong labeling and other common shipping,
logistics and storage errors.
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NOTE: Due to the nature of semiconductors, where multiple parts come from a common family based on
common technology and processing, family PFMEAs are acceptable. Specific process differences for
parts within the family may require supplements to the family PFMEA.
NOTE: The organization should consider the entire supply chain in product realization planning. This
should encourage the use of FMEA,Control Plan, and other preventive tools.
Design validation in the semiconductor industry may also include reliability monitoring. Design rule
modification should result when the design is no longer robust as indicated by the reliability monitor
results.
NOTE: The following are examples that indicate continuous improvement: wafer level reliability; dynamic
dielectric breakdown; test to failure.
The organization shall obtain customer concurrence for problem analysis related to design validation test
failures and corrective actions.
Whenever product or technology obsolescence plans are made or updated which affect any parts
previously purchased by a customer; that customer shall be notified of the obsolescence plans.
(See also 5.4. for business plan requirements)
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NOTE:The fact that the technology within the semi-conductor industry moves much faster than
automotive product life cycles, the semi-conductor organization's business plan must include the needs of
the automotive customer. This should include obsolescence plans consistent with automotive life cycles.
The organization shall assure that supplier facilities and personnel which perform
qualification testing or failure analysis meet customer specific requirements.
NOTE: Purchased products include products and services that affect customer requirements such as
subcontract assembly, fab, test, software services, device programming, warehousing or other similar
processes that may affect customer product realization.
NOTE: With the increased use of external manufacturing (foundries), the intent is that both internal and
external semiconductor manufacturing sources must meet the requirements of ISO/TS-16949:2002 and
this document.
Semiconductor organizations who choose to subcontract foundry, assembly and/or test processes shall
assure those suppliers conform to the requirements of ISO/TS -16949:2002, including the Semiconductor
Commodity Specifics. Conformity may be verified by:
• Third party registration to ISO/TS-16949: 2002
• Certification by the Semiconductor Assembly Council (SAC)
• Customer conducted or approved audits
Organizations should contact their customers to determine which of the above methods are acceptable.
The organization should identify the incoming material characteristics that significantly impact their
processes. The organization should communicate those characteristics to the supplier.
Where supplier's submitted statistical data is used as a control method, the supplier’s SPC methods shall
conform to requirements in the Statistical Process Control and the Measurement Systems Analysis
reference manuals.
Control plans shall include processes from incoming material through shipping and warehousing.
NOTE: Due to the nature of semiconductors, where multiple parts come from a common family, based on
common technology and processing, family Control Plans are acceptable. Specific process or control
differences for parts within the family may require supplements to the family Control Plan.
NOTE: Prototype - During the early phases of integrated circuit development, the “prototype” version
may not have the required physical, dimensional or material properties of the specified final part.
Additionally, the quantities of IC prototype parts are usually small, making the classic concept of control
plans inappropriate for this commodity. For instance, the prototype may be ceramic rather than plastic, a
multi-chip module rather than a single die, or an emulator rather than a packaged die. The prototype
control plan for this stage of the design development process is developed between the user (customer)
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and the organization so that the concerns and expectations of the customer and an agreed upon method
of compliance from the organization are documented.
NOTE: Pre-Launch - The pre-launch control plan is a transitional document which bridges between the
prototype and production control plans. It is similar to the production control plan in that it includes
physical, dimensional and material properties and the testing required for component qualification of the
production process. It normally occurs after DV (design verification) and before production ramp-up. The
pre-launch control plan also includes the preliminary production control plan for process control to ensure
the qualification build and test of production intent components is as close to the final production process
and controls as possible.
NOTE: Process control is used to identify special causes of variation and trigger appropriate action. One
such action would include incorporating those special causes into the D/PFMEAs, if those causes are not
already included.
NOTE: Production - The production control plan is a living document which includes SPC node points for
special characteristics identified in the design and process FMEA. It also includes the lessons learned in
the execution of the pre-launch control plan.
• Probe cards
• Tester contacts
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Tooling management for semiconductors shall include tools that change the form, fit, or function such as:
• Use of a world-wide accessible computer tracking system which provides on-line status of all product
in process
• Use of a machine-readable product identification system
• Mistake proofing techniques should be used to prevent mixing or misprocessing (at both internal
operations as well as customer shipments) of production materials
Examples:
The organization shall adequately protect customer supplied product from damage and deterioration
caused by environmental conditions (i.e., oxidation and contamination) and handling (i.e., mechanical
damage and ESD). The supplier shall have a documented method of inspecting or detecting signs of
damage or deterioration caused by environmental or handling conditions. When value added operations
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are performed by a subcontractor, the organization shall provide guidelines for the protection of product
from handling damage and environmental contamination deterioration.
Where the customer supplies software such as ROM codes, net lists, test vectors or other such
intellectual property, the organization shall have a documented method to ensure protection and/or
security of the customer’s intellectual property rights, verification of correct software in the delivered
product, and archiving control.
NOTE: This section refers to the control of materials by both internal (captive fab, assembly, and test
facilities) and external (subcontract) companies. The term “Customer-Supplied Product” applies to both
product moving between sites (i.e. fab to assembly to test) and items supplied by the customer for design
or testing purposes (i.e. correlation samples, customer products).
This clause refers to internal transfer of materials from one manufacturing location to another, as well as
to the customer.
NOTE: Handling methods that prevent damage or deterioration to product may include:
• Prohibiting the use of tweezers in wafer fab,
• Discarding product which jams in handling equipment,
• Covering wafer boat carriers to reduce contamination,
• Using appropriate finger cots or gloves.
• Using proper ESD control (equipment, personnel, and carts).
• Appropriate equipment to protect die, leadframes, wirebonds, and lead coplanarity during processing
and inspection.
The organization shall use appropriate storage methods for prevention of product damage.
NOTE: Examples are:
• ESD controls,
• N2 or dry air cabinet for exposed wafers and moisture sensitive packaged parts,
• die bank controls,
• temperature and humidity controls.
NOTE: The nature of many semiconductor products requires periodic testing to detect degradation; for
example, product solderability.
Transportation packaging shall meet ESD requirements, make proper use of dry pack/desiccant, and
prevent physical damage.
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NOTE: The goal is to minimize inventory, however, the long process cycles and lot processing of
semiconductors generally makes one-piece flow and an order driven process impractical. For
semiconductor processing, actual vs. theoretical cycle time and low work in process (WIP) are good
indicators of a managed process.
NOTE: Where golden units or other in house test verification units are used, it is recommended that the
master or the golden units be charted. Reaction limits on such charts should be chosen using statistical
methods.
NOTE: It is recommended that test software have 100% test coverage for the device under test and
interface circuit board.
In order to provide adequate measurement system discrimination, for measurement equipment used to
measure special characteristics, the apparent resolution of the equipment shall be at most one-tenth of
the total process six sigma standard deviation. (Reference Measurement System Analysis, Section 2.)
NOTE: Suppliers are expected to obtain value added state of the art measurement equipment. There
are rare instances when a special characteristic distribution is very narrow and the state of the art
equipment cannot discriminate at the stated level The supplier should repeat gage R&R studies when
warranted by measurement system change (including operator) and have a systematic method to
improve gaging.
The supplier measurement system studies shall be per Measurement System Analysis reference
manual and consistent with process Cp.
Internal and external laboratories selected by the organization for qualification testing shall be capable of
performing the tests required in AEC-Q100 and/or AEC-Q101 applicable to the types of parts being
supplied. The tests outlined in these documents are those typically accomplished as part of PPAP.
If the internal laboratory is used for engineering development and/or failure analysis, then the production
use equipment and processes must be clearly identified. The organization should chose to use
laboratory scope statements to document the qualification, production equipment and measurements
performed.
NOTE: Laboratories may be used for production measurement of process parameters such as
phosphorous content, plating thickness/composition, and chemical analysis of materials.
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If stress testing is employed as a reliability improvement technique, appropriate reliability data shall
demonstrate that no part degradation occurs. When guard banding is used to assure omitted test
compliance, the organization shall document statistical justification for guard banding methodology.
Correlation and guardband limits are often used to assure compliance to omitted, customer specified,
electrical parametric tests. Such guardband limits shall statistically provide a Cpk of 1.67or greater.
The above reliability and statistical data shall be supplied to the customer upon request.
Organizations shall conduct audits of final packaged product to verify conformance to packaging and
labeling requirements.
NOTE: Due to semiconductor packaging techniques, it is not required that part testing be performed on
parts packaged for shipping unless specifically required by the customer.
NOTE: Unless specified in customer documentation, customer approval of visual acceptance criteria for
semiconductor processes is not required.
NOTE: The organization is encouraged to protect the customer by establishing and using part average
testing and/or utilizing a maverick lot program. (See AEC-Q001, Guidelines for Part Average Testing and
AEC-Q 002 Guidelines for Statistical Yield Analysis)
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When a rework process is established it shall be statistically validated that the reworked product is as
reliable as non-reworked product.
The organization shall have a system to track customer problem analysis completion time.
Unless otherwise agreed to with the customer, the organization shall provide:
NOTE: The goal of containment is to have certified product at the customer in 24 hours.
NOTE: These time periods start when the organization is notified of a problem with trace code
information and ends when the appropriate information is supplied to the customer.
The organization shall provide adequate facilities for complete semiconductor failure analysis. If the
organization cannot perform such analyses, services shall be contracted from an adequate external
laboratory, or upon special arrangements, provided by the customer.
Analytical equipment used for failure analysis shall be included in a preventive maintenance and
calibration control.
Appropriate organization management shall review problem analysis reports, failure analysis reports, and
corrective action prior to submission to the customer.
The organization shall incorporate significant feedback from field return analysis into design rule
documentation, design and process FMEAs, and process control plans.
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Certificates for semiconductor suppliers shall include wording that indicates that the requirements of the
Customer Specific Requirements (ISO/TS-16949) Semiconductor Commodity were included.
Semiconductor suppliers are not typically direct suppliers to OEMs. Some tier one suppliers to the OEMs
have a customer specific requirement for tier 2 suppliers to be third party registered to ISO/TS16949.
Through this, the AEC members encourage all manufacturing locations of semiconductor suppliers to
become registered or certified in accordance with their specific requirements. This locations may not ship
directly to OEM or Tier 1, but provide a significant portion of the manufacturing process. As such, they
should be included in the registration process.
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During the audit planning, to assure that all relevant processes and support functions are included in the
audit of a semiconductor supplier, the audit team should use a site map, floor plan, and process flow
diagram to determine flows for raw materials (gases, DI water, chemical supply), tooling shops (molds,
masks, trim and form, probe cards), and other support functions. These functions shall be included in the
site audit as appropriate.
At least one member of the audit team shall have relevant semiconductor industry experience.
For semiconductor suppliers, the registration certificate shall include wording to indicate that the
requirements of the Customer Specific Requirements (ISO/TS-16949) Semiconductor Commodity
were included.
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Annual layout inspection is not required for semiconductor devices with the exception of parts which have
custom lead forming.
rd
The Process Sign-Off line speed demonstration (line 19 in the PSO 3 Edition) and BSR/NVH (line 21 in
rd
the PSO 3 Edition) are not required for PSO approval.
Laboratories used for qualification of semiconductors for the following Delphi Corporation Divisions shall
meet the requirements of the SQ-1000 Supplier Engineering Laboratory Verification and Approval.
Annual Run at Rate is not required for semiconductors for PSW. Annual layout inspection is not required
for semiconductor devices.
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Glossary
Captive Assembly/Test Facility An assembly or test facility that is owned by a semiconductor supplier
primarily for internal use.
Design Validation Testing Early prototype testing to validate design intent. This may include prototype
tooling and processes.
Design Qualification Testing Production intent testing to assure design intent is fully met. This shall
include production tooling and processes.
Golden Units Master samples or standards generally used for verifying test equipment
setup.
Maverick Lot A lot of material whose yield or parametric data indicates a significant
statistical departure from typical material. See AEC-Q002 Guidelines for
Statistical Yield Analysis.
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Glossary
Nominal Device Limits Parametric limits established to discard product which is deviant from that
seen when process is under control.
Part Average Testing A statistically based technique for removing parts with abnormal
characteristics (outliners) from product being tested. See AEC-Q001
Guidelines for Part Average Testing.
Process Corners These are the high and low combinations of interacting processes
considered during characterization of a part. Example: Base sheet
resistivity and NPN beta. The process corners would be Highp/High B, High
p/LoowB, Lowp/LowB, Low p/High B.
Qualification The series of environmental stress tests intended to validate a device as part
of the approval process for use in automotive application.
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KEY CONTACTS
If you have any suggestions for improvements of the ISO/TS-16949 Semiconductor Supplement, please
contact:
DaimlerChrysler Corporation
Burt Rich
CMS: 311-00-13
100 Electronics Blvd.
Huntsville, AL 35824-8401
Fax: 01-256-464-2119
Email: bhr@daimlerchrysler.com
Delphi Corporation
Rodney Weaver
MC R247
P.O. Box 9005
Kokomo, Indiana 46904-9005
Fax: 765-451-8288
Email: Rodney.l.Weaver@delphi.com
Visteon Corporation
Joe Wurts
Visteon Technical Center
Suite 3100, Cube 31B66
16630 Southfield Road
Allen Park, MI 48101
Fax: 01-313-755-0226
Email: Jwurts@Visteon.com
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