Chapter 1
Chapter 1
CMOS Background
1
Marking
2
Background
1. Suggested Reading
2. Structure of MOS Transistors
3. Threshold Voltage
4. Long-Channel Current Equations
5. Regions of Operation
6. Transconductance
7. Second-Order Effects
8. Short-Channel Effects
9. MOS Layout
10.Device Capacitances
11. Small-signal Models
12. Circuit Impedance
13. Equivalent Transconductance
3
Suggested Reading
• Most of the material in this set are based on
Many of the figures in this set are from © Design of Analog CMOS Integrated Circuits,
McGraw-Hill, 2001, unless otherwise noted.
4
Transistor
• Transistor stands for …
5
Simplistic Model
• MOS transistors have three terminals: Gate, Source, and Drain
NMOS PMOS
6
Physical Structure - 1
• Source and Drain terminals are identical except that Source provides
charge carriers, and Drain receives them.
• MOS devices have in fact 4 terminals:
– Source, Drain, Gate, Substrate (bulk)
7
Physical Structure - 2
• Charge Carriers are electrons in NMOS devices, and holes in
PMOS devices.
• Electrons have a higher mobility than holes
• So, NMOS devices are faster than PMOS devices
• We rather to have a p-type substrate?!
• Actual length of the channel (Leff) is less than the length of gate
8
Physical Structure - 3
• N-wells allow both NMOS and PMOS devices to reside on the
same piece of die.
9
Physical Structure - 4
• MOS transistor Symbols:
(a) An NMOS driven by a gate voltage, (b) formation of depletion region, (c) onset of inversion,
and (d) channel formation
12
Threshold Voltage - 3
Analytically:
Qdep
VTH = MS + 2 F +
C ox
Where:
K T N
= Work Function (electrostatic potential) = ln
sub
n
F
q i
13
Threshold Voltage - 4
• In practice, the “native” threshold value may not be suited for
circuit design, e.g., VTH may be zero and the device may be on for
any positive gate voltage.
• When VDS is more than zero, there is some horizontal electric field
which causes a flow of electrons from source to drain.
14
Long Channel Current Equations - 1
• The voltage of the surface under the gate, V(x), depends on the
voltages of Source and Drain.
• If VDS is zero, VD= VS=V(x). The charge density Qd (unit C/m) is uniform.
− Q − C V − (CoxWL) (VGS −VTH )
Qd = = =
L L L
Qd = −WCox (VGS −V TH )
• If VDS is not zero, the channel is tapered, and V(x) is not constant. The
charge density depends on x.
15
Long Channel Current Equations - 3
• Current : dQ dQ dx
I= = = Qd velocity
dt dx dt
➢ Velocity in terms of V(x):
dV
velocity = E , E = −
dt
− dV (x)
→ velocity = ( )
dx
➢ Qd in terms of V(x):
Qd (x) = −WCox (VGS −V (x) −VTH )
1 2
(VGS −VTH )V DS − V DS
W
• Current in Triode Region: I D = n C ox
L 2
• Terminology:
W
Aspect Ratio =
L
Overdrive Voltage = Effective Voltage = VGS −VTH = Veff
17
Long Channel Current Equations - 5
18
Long Channel Current Equations - 6
• Increasing VDS causes the channel to acquire a tapered shape. Eventually,
as VDS reaches VGS – VTH the channel is pinched off at the drain. Increasing
VDS above VGS – VTH has little effect (ideally, no effect) on the channel’s
shape.
• When VDS is more than VGS – VTH the channel is pinched off, and the
horizontal electric field produces a current.
19
Long Channel Current Equations - 7
1 W
ID = n C ox (VGS − VTH )2
2 L'
0 ; if VGS VTH (Cut − off )
W
n C ox (V GS − VTH ) V DS ; if VGS VTH , VDS 2(VGS − VTH ) (Deep Triode)
L
I D = I DS =
L
n C ox (VGS − VTH ) V DS − V DS2
W 1
2
; if VGS VTH , VDS VGS − VTH (Triode)
1 C W (V − V ) 2 ; if V V , V V − V (Saturation )
2 n ox L GS TH GS TH DS GS TH
21
Long Channel Current Equations - 9
• Current Equation for PMOS:
0 ; if VSG VTH (Cut − off )
W
p C ox (V SG − VTH ) V SD ; if VSG VTH , V SD 2(VSG − VTH ) (Deep Triode)
L
I D = I SD =
L
p Cox (VSG − VTH ) V SD − V SD
W 1 2
2
; if VSG VTH , VSD VSG − VTH (Triode)
1 C W (V − V )2 ; if V V , V V − V (Saturation )
2 p ox L SG TH SG TH SD SG TH
22
Regions of Operation - 1
• Regions of Operation:
Cut-off, triode (linear), and saturation (active or pinch-off)
• Once the channel is pinched off, the current through the channel is
almost constant. As a result, the I-V curves have a very small slope in
the pinch-off (saturation) region, indicating the large channel
resistance.
23
Regions of Operation - 2
• The following illustrates the transition from pinch-off to triode region for
NMOS and PMOS devices.
25
Regions of Operation - 4
• PMOS Regions of Operation:
26
Regions of Operation - 5
Example:
For the following circuit assume that VTH=0.7V.
• When is the device on?
27
Transconductance - 1
• The drain current of the MOSFET in saturation region is ideally a
function of gate-overdrive voltage (effective voltage). In reality, it is also
a function of VDS.
• It makes sense to define a figure of merit that indicates how well the
device converts the voltage to current.
28
Transconductance - 2
Example:
Plot the transconductance of the following circuit as a function of VDS
(assume Vb is a constant voltage).
• Transconductance in triode:
gm =
V GS
W
L
2
n C ox (VGS − VTH ) V DS − V DS
1 2
V DS = Const.
W
= n C ox V DS
L
• Transconductance in saturation:
1 C W (V − V ) 2
gm =
VGS VDS = Const.
n ox GS TH
2 L
W
= n C ox (VGS − VTH )
L
30
Second-Order Effects (Body Effect)
Substrate Voltage:
• So far, we assumed that the bulk and source of the transistor are at the
same voltage (VB=VS).
• If VB >Vs, then the bulk-source PN junction will be forward biased, and
the device will not operate properly.
• If VB <Vs,
– the bulk-source PN junction will be reverse biased.
– the depletion region widens, and Qdep increases.
– VTH will be increased (Body effect or Backgate effect).
2 q si N sub
VTH = VTH 0 + 2 F + VSB − 2 F where =
Cox
31
Body Effect - 2
Example:
Consider the circuit below (assume the transistor is in the active region):
• If body-effect is ignored, VTH will be constant, and I1 will only depend on
VGS1=Vin-Vout. Since I1 is constant, Vin-Vout remains constant.
Vin −V out −VTH = C = Const. → Vin −V out = VTH + C = D = Conts.
33
Channel Length Modulation - 1
1 W
• The drain current is I D = nCox (VGS −VTH )2 where L' = L-L
2 L'
1
=
1 1
=
1
L' L − L L 1 − L
1 (
1+ L
L L
)
L
• Assuming L
L
= V DS we get:
L' L
(
1+ L
1 1
)
= (1+ V DS )
1
L L
2 L' 2 L
• As ID actually depends on both VGS and VDS, MOS transistors are
not ideal current sources (why?).
34
Channel Length Modulation - 2
• represents the relative variation in effective length of the channel for a given
increment in VDS
ID
• Transconductance: gm =
VGS VDS = Const.
In Triode:
W
g m = n Cox V
L DS
35
Channel Length Modulation - 3
Example:
Given all other parameters constant, plot ID-VDS characteristic of an NMOS
for L=L1 and L=2L1
• In Triode Region: W
I D n Cox
L
(
VGS −VTH )V DS −
1 2
2
V DS
ID W
Therefore :
VDS L
• Changing the length of the device from L1 to 2L1 will flatten the ID-VDS
curves (slope will be divided by two in triode and by four in saturation).
• Increasing L will make a transistor a better current source, while
degrading its current capability.
• Increasing W will improve the current capability.
36
Sub-threshold Conduction
• If VGS < VTH, the drain current is not zero.
• The MOS transistors behave similar to BJTs.
I C = I S e VBET
V
• In BJT:
VGS
• In MOS: I
D
= I e
0
VT
• In BJT devices the current drops faster (one decade for approximately
each 60mv of drop in VGS).
37
CMOS Processing Technology
• Top and side views of a typical CMOS process
38
CMOS Processing Technology
• Different layers comprising CMOS transistors
39
Photolithography (Lithography)
• Used to transfer circuit layout information to the wafer
40
Typical Fabrication Sequence
41
Self-Aligned Process
• Why source and drain junctions are formed after the gate oxide
and polysilicon layers are deposited?
42
Back-End Processing
• Oxide spacers and silicide
43
Back-End Processing
• Contact and metal layers fabrication
44
Back-End Processing
• Large contact areas should be avoided to minimize the
possibility of spiking
45
MOS Layout - 1
• It is beneficial to have some insight into the layout of the MOS devices.
46
MOS Layout - 2
Example:
Figures below show a circuit with a suggested layout.
• The same circuit can be laid out in different ways, producing different
electrical parameters (such as different terminal capacitances).
47
Device Capacitances - 1
• The quadratic model determines the DC behavior of a MOS transistor.
• The capacitances associated with the devices are important when
studying the AC behavior of a device.
• There is a capacitance between any two terminals of a MOS transistor.
So there are 6 Capacitances in total.
• The Capacitance between Drain and Source is negligible (CDS=0).
48
Device Capacitances - 2
• The following will be used to calculate the capacitances between
terminals:
C = W LC , C =
ox
1. Oxide Capacitance: 1 ox
t
ox
ox
q si Nsub
2. Depletion Capacitance: C2 = Cdep = W L
4F
4. Junction Capacitance:
➢ Sidewall Capacitance: C jsw C j0
C jun =
VR
m
49
Device Capacitances - 3
In Cut-off:
1. CGS: is equal to the overlap capacitance. C = C = CGS ov 3
CDB = C6
50
Device Capacitances - 4
In Triode:
• The channel isolates the gate from the substrate. This means that if VG
changes, the charge of the inversion layer are supplied by the drain
and source as long as VDS is close to zero. So, C1 is divided between
gate and drain terminals, and gate and source terminals, and C2 is
divided between bulk and drain terminals, and bulk and source
terminals.
+ C1
1. CGS: C GS = C ov 2
2. CGD: C GD = C ov + C1
2
3. CGB: the channel isolates the gate from the substrate. CGB = 0
+ C2
4. CSB: CSB = C5
2
5. CDB: + C
C DB = C 6 2
51
Device Capacitances - 5
In Saturation:
• The channel isolates the gate from the substrate. The voltage across
the channel varies which can be accounted for by adding two
equivalent capacitances to the source. One is between source and
gate, and is equal to two thirds of C1. The other is between source and
bulk, and is equal to two thirds of C2.
2
1. CGS: C =C + C
GS ov 1
3
2. CGD: C =C
GD ov
4. CSB: C =C + C
SB 5
2
2
3
5. DB C = C
C : DB 6
52
Device Capacitances - 6
• In summary:
Cut-off Triode Saturation
C1 2
C + C + C
CGS Cov ov
2
ov
3 1
C1
CGD Cov C + Cov
ov
2
CGB C1 C2
C C 0 0
C1 + C 2 GB 1
C2
C + 2
C + C
CSB C5 5
2 5
3 2
C2
CDB C6 C6 + C6
2
53
Importance of Layout
Example (Folded Structure):
Calculate the gate resistance of the circuits shown below.
Folded structure:
• Decreases the drain capacitance
• Decreases the gate resistance
• Keeps the aspect ratio the same
54
Passive Devices
• Resistors
55
Passive Devices
• Capacitors:
56
Passive Devices
• Capacitors
57
Passive Devices
• Inductors
58
Latch-Up
• Due to parasitic bipolar transistors in a CMOS process
59
Small Signal Models - 1
• Small signal model is an approximation of the large-signal model
around the operation point.
• In general, ID is a function of VGS, VDS, and VBS. We can use this Taylor
series approximation:
ID I I
Taylor Expansion : I D = I D0 + V GS + D V DS + D V BS + second order terms
VGS V DS V BS
ID I I V
I D V GS + D V DS + D V BS = g m V GS + DS + g mb V BS
V GS V DS V BS ro
60
Small Signal Models - 2
Current in Saturation: I D = n C ox (VGS − VTH ) 2 n C ox W (VGS − VTH )2 (1+ V DS )
1 W 1
•
2 L' 2 L
ID I I
• Taylor approximation: I D VGS + D V DS + D V BS
VGS V DS V BS
• Partial Derivatives:
ID
= n C ox (VGS −VTH ) (1+ V DS ) = g m
W
VGS L
ID 1 W 1
= n C ox (VGS −VTH ) 2 I D =
V DS 2 L ro
= −g m − = g m = g mb
2 2 F + VSB
61
Small Signal Models - 3
• Small-Signal Model:
vDS
i D = g m vGS + + g mb v BS
ro
62
Small Signal Models - 4
• Complete Small-Signal Model with Capacitances:
• Small signal model including all the capacitance makes the intuitive
(qualitative) analysis of even a few-transistor circuit difficult!
• For intuitive analysis we try to find a simplest model that can represent
the role of each transistor with reasonable accuracy.
63
Circuit Impedance - 1
• It is often useful to determine the impedance of a circuit seen from a
specific pair of terminals.
V
R =
X
X
I
X
64
Circuit Impedance - 2
Example:
• Find the small-signal impedance of the following current
sources.
• We draw the small-signal model, which is the same for both
circuits, and connect a voltage source as shown below:
v v
i =
X
X
+ g v =
m GS
X
r
o
r o
v
R = X
=rX
o
i X
65
Circuit Impedance - 3
Example:
• Find the small-signal impedance of the following circuits.
• We draw the small-signal model, which is the same for both
circuits, and connect a voltage source as shown below:
v v
i =
X
X
− g v − g v = + g v + g v
m GS mb BS
X
m X mb X
r
o
r o
v 1 1 1
R = = X
=r
X
i 1 g g o
X +g +g m mb
m mb
r o
66
Circuit Impedance - 4
Example:
• Find the small-signal impedance of the following circuit. This
circuit is known as the diode-connected load, and is used
frequently in analog circuits.
r
X m GS m X X m
r o
r o o
v 1 1
R = = X
=r
X
i 1 g o
X +g m
m
r o
R =r 1 = 1 = 1
X
g g o
g m m m
67
Circuit Impedance - 5
Example:
• Find the small-signal impedance of the following circuit. This
circuit is a diode-connected load with body effect.
v v
i =X
X
− g v − g v = + g v + g v
m GS mb BS
X
m X mb X
ro
r o
1
= v + g + g
r
X m mb
o
v 1 1 1 1
R = = X
=r =r
X
i 1
X +g +g g +g g g o
m mb
o
m mb
m mb
r o
R =r 1 1 1 1 1
= = =
X o
g +g
m
g +gmb
g +g g g m mb m mb m mb
68
Equivalent Transconductance - 1
• Recall that the transconductance of a transistor was a a figure of
merit that indicates how well the device converts a voltage to current.
I
g = D
V V = Const.
m
GS DS
V V = Const.
m
IN OUT
i
G = OUT
m
v v
IN OUT
=0
69
Equivalent Transconductance - 2
Example:
• Find the equivalent transconductance of an NMOS transistor
in saturation from its small-signal model.
iOUT
= g v = g v
m GS m IN
i
G = =g
OUT
m
v IN
m
70
Equivalent Transconductance - 3
Example:
• Find the equivalent transconductance of the following circuit
when the NMOS transistor in saturation.
v =v +v =v +i
IN GS S GS OUT
R S
R
R ) + g (− i R )−
v i
i
OUT
= g v + g v −
m GS mb BS
= g (v − i
S
m IN OUT S mb OUT S
OUT S
r O
r
O
R
i 1 + g R + g R + = g v S
OUT
m S
r mb S
O
m IN
i g g r
G = =
OUT
= m m O
R r + r (g R + g R ) + R
m
v 1+ g R + g R +
IN S O O m S mb S S
m S mb S
r O
71
Short-Channel Effects
• Threshold Reduction
– Drain-induced barrier lowering (DIBL)
• Mobility degradation
• Velocity saturation
72
Threshold Voltage Variation in Short Channel Devices
73
Drain-Induced Barrier Lowering (DIBL)
74
Effects of Velocity Saturation
• Due to drop in mobility at high electric fields
75
Hot Carrier Effects
• Short channel devices may experience high lateral drain-source
electric field
• “Hot” carriers may “hit” silicon atoms at high speed and cause
impact ionization
• The resulting electron and holes are absorbed by the drain and
substrate causing extra drain-substrate current
• Really “hot” carriers may be injected into gate oxide and flow out
of gate causing gate current!
76
Output Impedance Variation
77
Output Impedance Variation in Short-Channel Devices
78