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    8081 M UHV Datasheet

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    victorclaessen
    The document describes the Newport 8081-UHV ultra high vacuum motorized five-axis tilt aligner. It has motorized adjustments for X, Y, Z, θx, and θy axes with minimum incremental motion of less than 30 nm. It is compatible with ultra high vacuum environments down to 10-9 Torr and has been tested to outgas less than 5 ppm at 85°C. Key specifications and dimensions are provided.

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    8081 M UHV Datasheet

    Uploaded by

    victorclaessen
    17 views2 pages
    The document describes the Newport 8081-UHV ultra high vacuum motorized five-axis tilt aligner. It has motorized adjustments for X, Y, Z, θx, and θy axes with minimum incremental motion of less than 30 nm. It is compatible with ultra high vacuum environments down to 10-9 Torr and has been tested to outgas less than 5 ppm at 85°C. Key specifications and dimensions are provided.

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    8081-M-UHV-Datasheet

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    The document describes the Newport 8081-UHV ultra high vacuum motorized five-axis tilt aligner. It has motorized adjustments for X, Y, Z, θx, and θy axes with minimum incremental motion of less than 30 nm. It is compatible with ultra high vacuum environments down to 10-9 Torr and has been tested to outgas less than 5 ppm at 85°C. Key specifications and dimensions are provided.

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    17 views2 pages

    8081 M UHV Datasheet

    Uploaded by

    victorclaessen
    The document describes the Newport 8081-UHV ultra high vacuum motorized five-axis tilt aligner. It has motorized adjustments for X, Y, Z, θx, and θy axes with minimum incremental motion of less than 30 nm. It is compatible with ultra high vacuum environments down to 10-9 Torr and has been tested to outgas less than 5 ppm at 85°C. Key specifications and dimensions are provided.

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    of 2

    Ultra High Vacuum Motorized

    Five-Axis Tilt Aligner


    The 8081-UHV is our motorized Five-axis aligner that allows high remote and precision
    alignment in UHV (10-9 Torr) environments as well as for VUV/EUV applications. The
    Picomotor™ actuators to each stage allows better than <30 nm of various combinations of
    X, Y, Z, θx, and θy. The 8081-UHV has been tested and measured to outgas levels less
    than 5 ppm of volatile mass at 85 °C over three hours. Mass Spectrograms detailing the
    exact outgassing compounds are available upon request. Also available in metric version.

    Specifications
    Specifications 8081-UHV (8081M-UHV)
    Motorized Axes 5
    Axes of Travel X, Y, Z, Qx, Qy
    Model 8081(M)-UHV Features:
    Travel Range (mm) X=5, Y&Z=3
    • Ultra High Vacuum Compatible (10-9 Torr) Travel, Angular (°) Qx=8, Qy=10
    Minimum Incremental Motion (X, Y, Z) (nm) <30
    • Outgas less than 5 ppm of volatile mass at 85° C over 3 hrs Resolution- Angular (mrad) qx, qy≤0.7
    Load Capacity [lb (N)] 3 (13)
    • X, Y, Z, θx, θy adjustments
    Thread Type 8-32 and 1/4-20 (M4 and M6)
    • Minimum Incremental Motion < 30 nm Operating Temperature (°C) 10-40
    Survival Temperature Range (non-operating) (°C) -40-85
    • Maximum Load of 13N Vacuum Compatibility 10-9 Torr
    Wire Type Kapton® Ribbon Ultrahigh Vacuum Rated
    Connector Type DB15 Female
    Ultra High Vacuum Motorized Five-Axis Tilt Aligner
    Dimensions

    Locking Screw For


    1.94 (49.3)
    Removable Stage 1/16 Hex
    0.73 (18.5) 2.01 (50.9)
    0.85 (21.6) 2.08 (52.8)
    4X 0.50 (12.5) 2X Slot for 1/4-20 (M6) Screw 1.62 (41.1) Max
    0.97 (24.6) 1.48 (37.6) Min
    1.00 (25.0)
    D-Sub 15 Pin
    1.81 1.56 Female Connector 2.78 (70.7)
    (46.0) (39.7) 3.29 (83.6)

    Removable Stage
    7X 1/4-20 (M6) THD &
    For 1/4 (M6) SOC HD
    On Back Side 1.33
    2X 8-32 (M4) THD 15 Conductor Ribbon Cable (33.8)
    With Kapton Insulation
    17.00 NOM
    2X 0.37 (9.3) (431.8)

    Ordering Information
    Model Description
    8081-UHV Ultra High Vacuum Motorized XYZ Qx Qy Tilt Aligner, 1/4-20
    8081M-UHV Ultra High Vacuum Motorized XYZ Qx Qy Tilt Aligner, M6
    8081-UHV-C 8081-UHV cable , 1.83m, DB15 Female to 6-pin RJ25 Connector
    8725 Multi-Axis Adapter
    8742-4-KIT Four-Axis 8742 Picomotor Controller/Driver Kit
    8766-KIT-NF Six-Axis Picomotor Driver Module Kit, iPico

    www.newport.com/newfocus
    3635 Peterson Way, Santa Clara, CA 95054, USA
    PHONE: 1-800-222-6440 1-408-980-4300 FAX: 1-408-919-6083 EMAIL: sales@newfocus.com

    PHONE EMAIL PHONE EMAIL


    Belgium +32-(0)0800-11 257 belgium@newport.com Irvine, CA, USA +1-800-222-6440 sales@newport.com
    China +86-10-6267-0065 china@newport.com Netherlands +31-(0)30 6592111 netherlands@newport.com
    France +33-(0)1-60-91-68-68 france@newport.com United Kingdom +44-1235-432-710 uk@newport.com
    Japan +81-3-3794-5511 spectra-physics@splasers.co.jp Germany / Austria / Switzerland
    Taiwan +886 -(0)2-2508-4977 sales@newport.com.tw +49-(0)6151-708-0 germany@newport.com

    Newport Corporation, Irvine, California and Franklin, Massachusetts; Evry and Newport Corporation, Global Headquarters PHONE: 1-800-222-6440 1-949-863-3144
    Beaune-La-Rolande, France and Wuxi, China have all been certified compliant with 1791 Deere Avenue, Irvine, CA 92606, USA EMAIL: sales@newport.com
    ISO 9001 by the British Standards Institution. Santa Clara, California is DNV certified. Complete listings for all global office locations are available online at www.newport.com/contact

    DS-111206

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