Order this document

SEMICONDUCTOR TECHNICAL DATA by MPX5050/D

!!   "  

  ! 
!"  !  
 !
The MPX5050 series piezoresistive transducer is a state–of–the–art monolithic silicon
pressure sensor designed for a wide range of applications, but particularly those INTEGRATED
employing a microcontroller or microprocessor with A/D inputs. This patented, single PRESSURE SENSOR
element transducer combines advanced micromachining techniques, thin–film metalliza- 0 to 50 kPa (0 to 7.25 psi)
tion, and bipolar processing to provide an accurate, high level analog output signal that 0.2 to 4.7 Volts Output
is proportional to the applied pressure.
Features
• 2.5% Maximum Error over 0° to 85°C
• Ideally suited for Microprocessor or Microcontroller–Based Systems
• Temperature Compensated Over – 40° to +125°C
• Patented Silicon Shear Stress Strain Gauge
• Durable Epoxy Unibody Element MPX5050D
• Easy–to–Use Chip Carrier Option CASE 867

*'

("  ! " '( 

(!$&()& "
'"'"
#!$"'(#" &#)" *8=<
 !"(
" &&"
" '(  '( &)(&-

$"'   "  & "# #""('

" MPX5050GP
CASE 867B
Figure 1. Fully Integrated Pressure Sensor Schematic

MPX5050DP
CASE 867C

PIN NUMBER
1 Vout 4 N/C
2 Gnd 5 N/C
3 VS 6 N/C

NOTE: Pins 4, 5, and 6 are internal

device connections. Do not connect
to external circuitry or ground. Pin 1
is noted by the notch in the lead.

REV 5

Motorola Sensor Device Data 1

 Motorola, Inc. 2001
   

MAXIMUM RATINGS(NOTE)
Parametrics Symbol Value Unit
Maximum Pressure (P1 > P2) Pmax 200 kPa
Storage Temperature Tstg –40° to +125° °C
Operating Temperature TA –40° to +125° °C
NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device.

OPERATING CHARACTERISTICS (VS = 5.0 Vdc, TA = 25°C unless otherwise noted, P1 > P2. Decoupling circuit shown in Figure 4
required to meet electrical specifications.)
Characteristic Symbol Min Typ Max Unit
Pressure Range(1) POP 0 — 50 kPa
Supply Voltage(2) VS 4.75 5.0 5.25 Vdc
Supply Current Io — 7.0 10.0 mAdc
Minimum Pressure Offset(3) (0 to 85°C) Voff 0.088 0.20 0.313 Vdc
@ VS = 5.0 Volts
Full Scale Output(4) (0 to 85°C) VFSO 4.587 4.70 4.813 Vdc
@ VS = 5.0 Volts
Full Scale Span(5) (0 to 85°C) VFSS — 4.50 — Vdc
@ VS = 5.0 Volts
Accuracy(6) — — —
2.5 %VFSS
Sensitivity V/P — 90 — mV/kPa
Response Time(7) tR — 1.0 — ms
Output Source Current at Full Scale Output Io+ — 0.1 — mAdc
Warm–Up Time(8) — — 20 — ms
Offset Stability(9) — —
0.5 — %VFSS
NOTES:
1. 1.0kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range.
3. Offset (Voff) is defined as the output voltage at the minimum rated pressure.
4. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure.
5. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
6. Accuracy (error budget) consists of the following:
• Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range.
• Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
• Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from
minimum or maximum rated pressure at 25°C.
• TcSpan: Output deviation over the temperature range of 0° to 85°C, relative to 25°C.
• TcOffset: Output deviation with minimum pressure applied, over the temperature range of 0° to 85°C, relative
to 25°C.
• Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS at 25°C.
7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
8. Warm–up Time is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized.
9. Offset Stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.

MECHANICAL CHARACTERISTICS
Characteristics Typ Unit
Weight, Basic Element (Case 867) 4.0 grams

2 Motorola Sensor Device Data

   
Figure 3 illustrates the Differential/Gauge Sensing Chip in information regarding media compatibility in your application.
the basic chip carrier (Case 867). A fluorosilicone gel isolates Figure 2 shows the sensor output signal relative to pres-
the die surface and wire bonds from the environment, while sure input. Typical, minimum, and maximum output curves
allowing the pressure signal to be transmitted to the sensor are shown for operation over a temperature range of 0° to
diaphragm. 85°C using the decoupling circuit shown in Figure 4. The
The MPX5050 series pressure sensor operating charac- output will saturate outside of the specified pressure range.
teristics, and internal reliability and qualification tests are Figure 4 shows the recommended decoupling circuit for
based on use of dry air as the pressure media. Media, other interfacing the output of the integrated sensor to the A/D in-
than dry air, may have adverse effects on sensor perfor- put of a microprocessor or microcontroller. Proper decoup-
mance and long–term reliability. Contact the factory for ling of the power supply is recommended.


(&"'& )"(#"
  *8=<  *' $  ± &&#&
 *'   *0/
(!$  <8 °

#)($)(
*


(-$


!, !"


        
&"( $&'')& 4$.

Figure 2. Output versus Pressure Differential

 *
 )#&# ' #" '(" '' '(

  #( !( #*& #)($)(

ÉÉÉÉÉÉÉÉÉÉÉ
$ *8=<
$#,- *;

ÉÉÉÉÉÉÉÉÉÉÉ
+& #" $ '(
' $'

ÉÉÉÉÉÉÉÉÉÉÉ
 &!
ÉÉÉÉÉÉÉÉÉÉÉ
&"( )  !"(

#"
  "  9

Figure 3. Cross–Sectional Diagram Figure 4. Recommended power supply decoupling

(Not to Scale) and output filtering.
For additional output filtering, please refer to
Application Note AN1646.

Motorola Sensor Device Data 3

   
Transfer Function
Nominal Transfer Value: Vout = VS (P x 0.018 + 0.04)
+/– (Pressure Error x Temp. Factor x 0.018 x VS)
VS = 5.0 V ± 0.25 Vdc

Temperature Error Band

MPX5050D Series

(169 !=5<39531:

 
(1691:.<=:1 <8 
::8:   
./<8:

     

(1691:.<=:1 37 °

NOTE: The Temperature Multiplier is a linear response from 0° to –40°C and from 85° to 125°C.

Pressure Error Band

::8: 363<; 28: $:1;;=:1


$:1;;=:1
::8:
4$.

$:1;;=:1 37 4$.

   


?

? $:1;;=:1 ::8: !.>

<8  4$. ±  4$.

4 Motorola Sensor Device Data

   
PRESSURE (P1) / VACUUM (P2) SIDE IDENTIFICATION TABLE

Motorola designates the two sides of the pressure sensor pressure sensor is designed to operate with positive differen-
as the Pressure (P1) side and the Vacuum (P2) side. The tial pressure applied, P1 > P2.
Pressure (P1) side is the side containing fluorosilicone gel The Pressure (P1) side may be identified by using the
which protects the die from harsh media. The Motorola MPX table below:

Pressure (P1)
Part Number Case Type Side Identifier
MPX5050D 867 Stainless Steel Cap
MPX5050DP 867C Side with Part Marking
MPX5050GP 867B Side with Port Attached

ORDERING INFORMATION
The MPX5050 pressure sensor is available in differential and gauge configurations. Devices are available in the basic
element package or with pressure port fittings that provide printed circuit board mounting ease and barbed hose pressure
connections.
MPX Series

Device Type Options Case Type Order Number Device Marking

Basic Element Differential 867 MPX5050D MPX5050D

Ported Elements Differential Dual Ports 867C MPX5050DP MPX5050DP
Gauge 867B MPX5050GP MPX5050GP

Motorola Sensor Device Data 5

   
PACKAGE DIMENSIONS

C
R "#('
!"'#"" " (# &"" $& "'
POSITIVE PRESSURE
(P1) -  ! 
M #"(&# " !"'#" "
 !"'#"  ' " )'* # ( !# 
'(#$ &" !#  '(#$ &" "#( (# ,
B –A–    

     
N     
PIN 1
L     
     
      
  –T–
    
   
  
J G 
' 
'
S F     
D 6 PL       


  ! (  !





"#!




"#!
    
    
    
'(-   '(-   '(-  
$" *#)( $" #$" $" #$"
&#)" &#)" &#)"
 *  *#)(  *#)(
 *  *')$$ -  *')$$ -
 *  *#)(  *#)(
 *,  #$"  #$"

CASE 867–08
ISSUE N

BASIC ELEMENT

"#('
A !"'#"' & " ! !(&'
T  
 U !"'#"' " (# &"' $& '!
-  ! 
L
R   
V
  
    
Q   
N    
 

Q  
'
  
B    
   
 
    
 
    
K     
P     
PIN 1 S    
 
'
C P    
G 6X D
 ! ( % !
F
J  ! ( $ ' % ' '(-  
$" *#)(
&#)"
 *
 *
 *
 *,
CASE 867B–04
ISSUE F

PRESSURE SIDE PORTED (AP, GP)

6 Motorola Sensor Device Data

   
PACKAGE DIMENSIONS–CONTINUED

"#('
!"'#"" " (# &"" $& "'
-  ! 
P #"(&# " !"'#" "
–A–

  ! ( % !
     
U     
X       
W L
R      
V     
PORT #1 PORT #2 VACUUM (P2)    
POSITIVE   
PRESSURE PORT #1 POSITIVE
(P1) N PRESSURE (P1) 
' 
'
    
–Q–       
PORT #2      
VACUUM
(P2)     
      
B       
PIN 1    
    
K  
' 
'
     
     
C       
S      
  –T– –T–  
  G D 6 PL '(-  
J $" *#)(
F 
  !  ! &#)"
 *
 *
 *
 *,
CASE 867C–05
ISSUE F

PRESSURE AND VACUUM SIDES PORTED (DP)

Motorola Sensor Device Data 7

   

Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or
guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the
application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental
damages. “Typical” parameters which may be provided in Motorola data sheets and/or specifications can and do vary in different applications
and actual performance may vary over time. All operating parameters, including “Typicals” must be validated for each customer application
by customer’s technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are
not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications
intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where
personal injury or death may occur. Should Buyer purchase or use Motorola products for any such unintended or unauthorized application,
Buyer shall indemnify and hold Motorola and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs,
damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated
with such unintended or unauthorized use, even if such claim alleges that Motorola was negligent regarding the design or manufacture of the
part. Motorola and are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal Opportunity/Affirmative Action Employer.

How to reach us:

USA/EUROPE/Locations Not Listed: Motorola Literature Distribution; JAPAN: Motorola Japan Ltd.; SPS, Technical Information Center, 3–20–1,
P.O. Box 5405, Denver, Colorado 80217. 1–303–675–2140 or 1–800–441–2447 Minami–Azabu. Minato–ku, Tokyo 106–8573 Japan. 81–3–3440–3569

Technical Information Center: 1–800–521–6274 ASIA/PACIFIC: Motorola Semiconductors H.K. Ltd.; Silicon Harbour Centre,
2, Dai King Street, Tai Po Industrial Estate, Tai Po, N.T., Hong Kong.
852–26668334

HOME PAGE: http://www.motorola.com/semiconductors/

8 Motorola Sensor Device Data

◊ MPX5050/D