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SEMICONDUCTOR TECHNICAL DATA by MPX2100/D

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The MPX2100 series device is a silicon piezoresistive pressure sensor providing a 40 mV FULL SCALE SPAN
highly accurate and linear voltage output directly proportional to the applied pressure. (TYPICAL)
The sensor is a single, monolithic silicon diaphragm with the strain gauge and a thinfilm
resistor network integrated onchip. The chip is laser trimmed for precise span and offset
calibration and temperature compensation. UNIBODY PACKAGE
Features
Temperature Compensated Over 0C to +85C
EasytoUse Chip Carrier Package Options
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Available in Absolute, Differential and Gauge Configurations

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Ratiometric to Supply Voltage

0.25% Linearity (MPX2100D)
MPX2100A/D
Application Examples CASE 344
Pump/Motor Controllers
Robotics
Level Indicators
Medical Diagnostics
Pressure Switching
Barometers
Altimeters

Figure 1 illustrates a block diagram of the internal circuitry on the standalone

pressure sensor chip. MPX2100AP/GP
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Figure 1. Temperature Compensated Pressure Sensor Schematic

VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE

The differential voltage output of the sensor is directly proportional to the differential
pressure applied.
The absolute sensor has a builtin reference vacuum. The output voltage will decrease
as vacuum, relative to ambient, is drawn on the pressure (P1) side.
The output voltage of the differential or gauge sensor increases with increasing MPX2100ASX/GSX
pressure applied to the pressure (P1) side relative to the vacuum (P2) side. Similarly, CASE 344F
output voltage increases as increasing vacuum is applied to the vacuum (P2) side
relative to the pressure (P1) side.
PIN NUMBER
1 Gnd 3 VS
2 +Vout 4 Vout
NOTE: Pin 1 is noted by the notch in
the lead.
REV 9

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MAXIMUM RATINGS(NOTE)
Rating Symbol Value Unit
Maximum Pressure (P1 > P2) Pmax 400 kPa
Storage Temperature Tstg 40 to +125 C
Operating Temperature TA 40 to +125 C
NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device.

OPERATING CHARACTERISTICS (VS = 10 Vdc, TA = 25C unless otherwise noted, P1 > P2)
Characteristic Symbol Min Typ Max Unit
Pressure Range(1) POP 0 100 kPa
Supply Voltage(2) VS 10 16 Vdc
Supply Current Io 6.0 mAdc
Full Scale Span(3) MPX2100A, MPX2100D VFSS 38.5 40 41.5 mV
Offset(4) MPX2100D Voff 1.0 1.0 mV
MPX2100A Series 2.0 2.0
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Sensitivity V/P 0.4 mV/kPa

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Linearity(5) MPX2100D Series 0.25 0.25 %VFSS

MPX2100A Series 1.0 1.0
Pressure Hysteresis(5) (0 to 100 kPa) 0.1 %VFSS
Temperature Hysteresis(5) (40C to +125C) 0.5 %VFSS
Temperature Effect on Full Scale Span(5) TCVFSS 1.0 1.0 %VFSS
Temperature Effect on Offset(5) TCVoff 1.0 1.0 mV
Input Impedance Zin 1000 2500
Output Impedance Zout 1400 3000
Response Time(6) (10% to 90%) tR 1.0 ms
WarmUp 20 ms
Offset Stability(7) 0.5 %VFSS

NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device selfheating.
3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
4. Offset (Voff) is defined as the output voltage at the minimum rated pressure.
5. Accuracy (error budget) consists of the following:
Linearity: Output deviation from a straight line relationship with pressure, using end point method, over the specified
pressure range.
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25C.
TcSpan: Output deviation at full rated pressure over the temperature range of 0 to 85C, relative to 25C.
TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85C, relative
to 25C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
7. Offset stability is the products output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.

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LINEARITY
Linearity refers to how well a transducers output follows
'( '%)&' (
the equation: Vout = Voff + sensitivity x P over the operating
pressure range. There are two basic methods for calculating ,&(

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nonlinearity: (1) end point straight line fit (see Figure 2) or (2) $&#&!"
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a least squares best line fit. While a least squares fit gives '( *(#"
the best case linearity error (lower numerical value), the '%)&
calculations required are burdensome. *(#"
Conversely, an end point fit will give the worst case error
(often more desirable in error budget calculations) and the
calculations are more straightforward for the user. Motorolas " $#"(
specified pressure sensor linearities are based on the end '(&( " (
point straight line method measured at the midrange
pressure.
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Figure 2. Linearity Specification Comparison

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ONCHIP TEMPERATURE COMPENSATION and CALIBRATION

Figure 3 shows the output characteristics of the MPX2100 The effects of temperature on Full Scale Span and Offset
series at 25C. The output is directly proportional to the are very small and are shown under Operating Characteris-
differential pressure and is essentially a straight line. tics.


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Figure 4. CrossSectional Diagrams (Not to Scale)

Figure 4 illustrates the absolute sensing configuration teristics and internal reliability and qualification tests are
(right) and the differential or gauge configuration in the basic based on use of dry air as the pressure media. Media other
chip carrier (Case 344). A silicone gel isolates the die surface than dry air may have adverse effects on sensor perfor-
and wire bonds from the environment, while allowing the mance and long term reliability. Contact the factory for in-
pressure signal to be transmitted to the silicon diaphragm. formation regarding media compatibility in your application.
The MPX2100 series pressure sensor operating charac-

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PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE

Motorola designates the two sides of the pressure sensor applied, P1 > P2. The absolute sensor is designed for
as the Pressure (P1) side and the Vacuum (P2) side. The vacuum applied to P1 side.
Pressure (P1) side is the side containing the silicone gel The Pressure (P1) side may be identified by using the
which isolates the die. The differential or gauge sensor is table below:
designed to operate with positive differential pressure

Part Number Case Type Pressure (P1) Side Identifier

MPX2100A MPX2100D 344 Stainless Steel Cap
MPX2100DP 344C Side with Part Marking
MPX2100AP MPX2100GP 344B Side with Port Attached
MPX2100ASX MPX2100GSX 344F Side with Port Attached

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MPX2100 series pressure sensors are available in absolute, differential and gauge configurations. Devices are available in
ARCHIVED BY FREESCALE SEMICONDUCTOR, INC. 2005

the basic element package or with pressure port fittings which provide printed circuit board mounting ease and barbed hose
pressure connections.

MPX Series

Device Type Options Case Type Order Number Device Marking

Basic Element Absolute, Differential 344 MPX2100A MPX2100A
MPX2100D MPX2100D
Ported Elements Differential, Dual Port 344C MPX2100DP MPX2100DP
Absolute, Gauge 344B MPX2100AP MPX2100AP
MPX2100GP MPX2100GP
Absolute, Gauge Axial 344F MPX2100ASX MPX2100A
MPX2100GSX MPX2100D

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NOTES
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