Resistance Capacitance

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Very Large Scale Integration

((VLSI
Lecture 3

Dr. Ahmed H. Madian


Ah_madian@hotmail.com

Dr. Ahmed H. Madian-VLSI 1


Contents
 Wiring tracks
 Latch-up
 Circuit characterization & performance
 Resistance estimation
 Capacitance estimation
 Inductance estimation
 Delay estimation
 Simple RC model
 Penfield-Rubenstein Model
 Delay minimization techniques
 Transistor sizing
 Distributed drivers
 Large driver
 Wiring techniques

Dr. Ahmed H. Madian-VLSI 2


Wiring Tracks
 A wiring track space required for a wire
 4λ width, 4λ spacing from the neighbor=8 λ
 Transistor consumes one wiring track



Dr. Ahmed H. Madian-VLSI 3


Area Estimation
 Estimate Area by Counting wiring tracks
 Multiply by 8 (4Width + 4Spacing) to express in λ

40λ

32λ
Dr. Ahmed H. Madian-VLSI 4
Latch up
 Latch up is a condition that can occur in a circuit
fabricated in a bulk CMOS technology.

GND VDD
VDD

P
+N +N +P +P
N
N-well
P
N

Dr. Ahmed H. Madian-VLSI 5


Latch up Prevention
 This could be corrected by:
 Include an N-well contact every time a pFET is connected to VDD
 Include an p-substrate contact every time a NFET is connected to
GND

GND GND VDD VDD

+N +N +P +P
N-well

P-substrate

Dr. Ahmed H. Madian-VLSI 6


Circuit characterization &
performance
 Resistance estimation
 Capacitance estimation
 Inductance estimation
 Delay estimation

Dr. Ahmed H. Madian-VLSI 7


Resistance estimation
 Resistance of uniform slab
I
can be given as,
ρ l
R = . ohms
t w t
Where ρ = resistivity
t= thickness
l= conductor length w
l
w=conductor width
or, l
R = Rs . ohms
w
Rs is the sheet resistance Ω/

Dr. Ahmed H. Madian-VLSI 8


(.Resistance estimation (cont
 Resistance of certain layers
Material Rs (Ω/ )
metal 0.03
Poly 15100
Diffusion p 80
Diffusion n 35
Silicide 24
N-well 1K  5K
Dr. Ahmed H. Madian-VLSI 9
Resistance estimation
 For MOSFET channel resistance
Rchannel = RSheet (L/W)
+N L +N
where Rsheet = 1/µCOX(Vgs-Vt)
L
For P and n channels
Rsheet = 1000 ->30,000 Ω/ channel
W

Dr. Ahmed H. Madian-VLSI 10


(.Resistance estimation (cont
 Resistance of non rectangular regions
W1
W2

L L L

W1
Ratio = 2L/(L+2W1) W W2
Ratio =L/W Ratio =L/W
W2 W2
W2

W1 W2
W1

W1 Ratio =W1/W2 W1
Ratio =W2/W1
Dr. Ahmed H. Madian-VLSI 11
Inverter resistance estimation
 CMOS inverter (no static
VDD
current) VDD

 Switching current Vin Vout


VDD VDD
I max = = Rs,p (L/W) MP

Rtotal R L L
s, p + Rs , n IL VOUT = VDS
W W Vin
for L =W =1 IDS

VDD VDD VDD Rs,n (L/W) MN

I max = = =
Rs , p + Rs , n 25 + 10 35 VGS

2
V DD
switching power loss = I max .VDD =
35
Dr. Ahmed H. Madian-VLSI 12
Circuit characterization &
performance
 Resistance estimation
 Capacitance estimation
 Transistor capacitance
 Routing capacitance
 Inductance estimation
 Delay estimation

Dr. Ahmed H. Madian-VLSI 13


Capacitance estimation
The dynamic response of MOS systems strongly depends on
the parasitic capacitances associated with the MOS device.
The total load capacitance on the output of a CMOS gate is
the sum of:
 gate capacitance (of other inputs connected to out)
 diffusion capacitance (of drain/source regions) drain
 routing capacitances (output to other inputs)
CGD CDB

gate substrate

CGS CSB
source

CGB
Dr. Ahmed H. Madian-VLSI 14
(.Capacitance estimation (cont
gate
 Gate capacitance Cgate insulator
 Diffusion capacitance +n
substrate
 Routing capacitance C.diff

Metal layer
 Cdiff >Cpoly>Cm1>Cm2
gate Crouting

+n
substrate

Dr. Ahmed H. Madian-VLSI 15


Capacitance estimation

 In general, capacitance could be calculated using

ε . A ε o .ε r . A
C= =
d d
ε o .ε r
C/ unit area = = Cox d
d

Dr. Ahmed H. Madian-VLSI 16


Gate Capacitance

 Cg = Cgs + Cgd + Cgb

Dr. Ahmed H. Madian-VLSI 17


(.Capacitance estimation (cont
b

 Diffusion capacitance (source/drain)


Source Drain
a Diffusion Diffusion
Area Area

C Ja Gate
CJP
insulator

Side wall capacitance area capacitance

C s , diff = C d , Area . A + C d , sidewalls .P


Where A = area and p = perimeters

Dr. Ahmed H. Madian-VLSI 18


Routing capacitance
 single conductor capacitance
 multiple conductor capacitance

Dr. Ahmed H. Madian-VLSI 19


(.Capacitance estimation (cont
Routing capacitance: a) single conductor capacitance
Fringing capacitance Half cylinders

Metal 1

w h
substrate

 
 t 
w − 

Ctotal =ε 2 + 
 h  2h 2h 2h 
 1+
ln  +  +2
 
 t t t 

 
Dr. Ahmed H. Madian-VLSI 20
(.Capacitance estimation (cont
Routing capacitance: b) multiple conductor capacitance
C12
Metal 2 Metal 1 Metal 2
Vin Vout
C1
C2
C12
C2

Metal 1
C12
C1 ∆Vout = ∆Vin .
C 2 + C12
substrate

Dr. Ahmed H. Madian-VLSI 21


Multilayer capacitance calculations
 Example: given the layout shown in the figure calculate the total
capacitance at source and gate given that:
Cmetal/Area = 0.025µF/µm2 100λ 4λ
CMP
Cpoly/Area = 0.045µF/µm 2
3λ CM 4λ
CGate/A = 0.7 fF/µm 2

CP1 2λ
Cd,a/A = 0.33fF/µm2
Cgate 3λ
Cd,side/L = 2.6fF/µm
λ = 5.1µm 2λ
CP1
4λ 2λ 4λ

Dr. Ahmed H. Madian-VLSI 22


100λ 4λ
CMP

Solution 3λ CM 4λ

CP1 2λ
Source capacitance Cgate 3λ

CS,diff = Cd,A . A + Cd,side walls . P 2λ


CP1
4λ 2λ 4λ
A = 4λ * 3λ = 12 λ2
S D

P = 2*(4λ + 3λ)=14 λ Cs G
CD

So, CS, diff = 0.33* 12 λ2+2.6* 14 λ=63.51fF CG

Dr. Ahmed H. Madian-VLSI 23


(.Solution (cont
100λ 4λ
Gate capacitance CMP
3λ CM 4λ
CG,total = CM + CMP+CP1+CG+CP2
CP1 2λ

CM = 0.025 * 100λ*3 λ=7.5λ2 Cgate 3λ


CMP = 0.045 * 4λ* 4 λ = 0.72λ2 4λ 2λ 4λ
CP1

CP1 = 0.045 * 2λ* 2λ = 0.18λ2


CP2 = 0.045 * 2λ* 2λ = 0.18λ2 CM CMP CP1 Cgate CP1
CG = 0.7 * 2λ* 3λ = 4.2λ2

Dr. Ahmed H. Madian-VLSI 24

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