Thin Film Growth Thin Film Growth: Thomas Schmidt Thomas Schmidt
Thin Film Growth Thin Film Growth: Thomas Schmidt Thomas Schmidt
Thin Film Growth Thin Film Growth: Thomas Schmidt Thomas Schmidt
FRITZ
HABER INSTITUTE
of the MAX-PLANCK-SOCIETY
Electronics*
Optics**
Ruby
Cr:Al2O3
* H.-J. Freund, Surf. Sci. 500 271 (2002), Clusters and islands on oxides: from catalysis via electronics and magnetism to optics
** J. T. Yates et al., Chem. Rev. (2012), Band Bending in Semiconductors: Chemical and Physical Consequences at Surfaces and Interfaces
Thomas Schmidt
21.03.2013
Introduction
Chemistry: heterogeneous catalysis
catalysis*
Ceramic monolith
washcoat
**
* H.-J. Freund, Surf. Sci. 500 271 (2002), Clusters and islands on oxides: from catalysis via electronics and magnetism to optics
** Y. Sun, Doctor Thesis (2010)/Jrg Libuda
Thomas Schmidt
21.03.2013
Overview
Nucleation and early Stage of Film Growth
Adsorption (physisorption)
Surface diffusion
Chemical bond formation (chemisorption)
Nucleation
N l ti
Microstructure formation
Bulk changes
Thomas Schmidt
21.03.2013
Outline
Introduction
Thermodynamics
Th
d
i
Island shape (equilibrium non-equilibrium)
Nucleation
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Thermodynamics
Thomas Schmidt
21.03.2013
Growth modes
Stranski-Krastanov
Layer(s) + Islands
Volmer-Weber
Islands
Thomas Schmidt
21.03.2013
Adsorption process:
Physisorption Chemisorption or desorption
Ephysi ~ 0
0.25
5e
eV
Echemi ~ 1 - 10 eV
21.03.2013
The overall surface energy can be minimized if the atom has enough energy and time to
diffuse to a lower energy site.
Ob i
Obviously,
l th
the diff
diffusion
i rate
t iincreases with
ith temperature,
t
t
and
d is
i defined
d fi d as
21.03.2013
Activation energies
21.03.2013
10
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